ATE487218T1 - Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers - Google Patents

Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers

Info

Publication number
ATE487218T1
ATE487218T1 AT03807973T AT03807973T ATE487218T1 AT E487218 T1 ATE487218 T1 AT E487218T1 AT 03807973 T AT03807973 T AT 03807973T AT 03807973 T AT03807973 T AT 03807973T AT E487218 T1 ATE487218 T1 AT E487218T1
Authority
AT
Austria
Prior art keywords
producing
optical media
optical disc
master
manufacturing
Prior art date
Application number
AT03807973T
Other languages
English (en)
Inventor
Akira Kouchiyama
Katsuhisa Aratani
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of ATE487218T1 publication Critical patent/ATE487218T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S425/00—Plastic article or earthenware shaping or treating: apparatus
    • Y10S425/81—Sound record
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Materials For Photolithography (AREA)
  • Optical Integrated Circuits (AREA)
AT03807973T 2002-10-10 2003-09-25 Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers ATE487218T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002297892 2002-10-10
PCT/JP2003/012236 WO2004034391A1 (ja) 2002-10-10 2003-09-25 光ディスク用原盤の製造方法及び光ディスクの製造方法

Publications (1)

Publication Number Publication Date
ATE487218T1 true ATE487218T1 (de) 2010-11-15

Family

ID=32089286

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03807973T ATE487218T1 (de) 2002-10-10 2003-09-25 Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers

Country Status (8)

Country Link
US (5) US7670514B2 (de)
EP (2) EP1551020B1 (de)
KR (1) KR100926858B1 (de)
CN (1) CN100380485C (de)
AT (1) ATE487218T1 (de)
AU (1) AU2003266613A1 (de)
DE (1) DE60334825D1 (de)
WO (1) WO2004034391A1 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1551020B1 (de) * 2002-10-10 2010-11-03 Sony Corporation Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers
CN1890733B (zh) * 2003-12-01 2011-09-14 索尼株式会社 光盘用母盘的制造方法以及光盘用母盘
JPWO2008088076A1 (ja) * 2007-01-17 2010-05-13 ソニー株式会社 現像液、および微細加工体の製造方法
FR2912538B1 (fr) * 2007-02-08 2009-04-24 Commissariat Energie Atomique Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique
JP2008233552A (ja) * 2007-03-20 2008-10-02 Sony Corp パターン形成基板、パターン形成方法、並びに金型
JP2008269720A (ja) * 2007-04-23 2008-11-06 Canon Inc 透光性スタンパ、透光性スタンパの製造方法及び多層光記録媒体の製造方法
JP2009020962A (ja) * 2007-07-12 2009-01-29 Canon Inc 微細パターンの形成方法及びスタンパ
US8089843B2 (en) * 2007-08-10 2012-01-03 Sony Disc & Digital Solutions, Inc. Recording drive waveform adjusting method for manufacturing master disc, master disc manufacturing method, master disc manufacturing apparatus, and master disc
JP5098633B2 (ja) * 2007-12-27 2012-12-12 ソニー株式会社 ディスク原盤、ディスク原盤製造方法、スタンパ、ディスク基板、光ディスク、光ディスク製造方法
JP2009181662A (ja) * 2008-01-31 2009-08-13 Toshiba Corp 原盤記録装置及び記録方法
JP4453767B2 (ja) * 2008-03-11 2010-04-21 ソニー株式会社 ホログラム基板の製造方法
US8250863B2 (en) 2008-04-09 2012-08-28 Sustainx, Inc. Heat exchange with compressed gas in energy-storage systems
US8240140B2 (en) 2008-04-09 2012-08-14 Sustainx, Inc. High-efficiency energy-conversion based on fluid expansion and compression
US7802426B2 (en) 2008-06-09 2010-09-28 Sustainx, Inc. System and method for rapid isothermal gas expansion and compression for energy storage
EP2280841A2 (de) 2008-04-09 2011-02-09 Sustainx, Inc. Systeme und verfahren zur energiespeicherung und & 8209;rückgewinnung unter verwendung von druckgas
US8448433B2 (en) 2008-04-09 2013-05-28 Sustainx, Inc. Systems and methods for energy storage and recovery using gas expansion and compression
US8474255B2 (en) 2008-04-09 2013-07-02 Sustainx, Inc. Forming liquid sprays in compressed-gas energy storage systems for effective heat exchange
US7958731B2 (en) 2009-01-20 2011-06-14 Sustainx, Inc. Systems and methods for combined thermal and compressed gas energy conversion systems
US8225606B2 (en) 2008-04-09 2012-07-24 Sustainx, Inc. Systems and methods for energy storage and recovery using rapid isothermal gas expansion and compression
US8677744B2 (en) 2008-04-09 2014-03-25 SustaioX, Inc. Fluid circulation in energy storage and recovery systems
US8479505B2 (en) 2008-04-09 2013-07-09 Sustainx, Inc. Systems and methods for reducing dead volume in compressed-gas energy storage systems
US8037678B2 (en) 2009-09-11 2011-10-18 Sustainx, Inc. Energy storage and generation systems and methods using coupled cylinder assemblies
US20100307156A1 (en) 2009-06-04 2010-12-09 Bollinger Benjamin R Systems and Methods for Improving Drivetrain Efficiency for Compressed Gas Energy Storage and Recovery Systems
WO2010105155A2 (en) 2009-03-12 2010-09-16 Sustainx, Inc. Systems and methods for improving drivetrain efficiency for compressed gas energy storage
US8104274B2 (en) 2009-06-04 2012-01-31 Sustainx, Inc. Increased power in compressed-gas energy storage and recovery
KR20120044355A (ko) * 2009-07-03 2012-05-07 호야 가부시키가이샤 기능 경사형 무기 레지스트, 기능 경사형 무기 레지스트가 부착된 기판, 기능 경사형 무기 레지스트가 부착된 원통 기재, 기능 경사형 무기 레지스트의 형성 방법 및 미세 패턴 형성 방법과 무기 레지스트와 그 제조 방법
WO2011056855A1 (en) 2009-11-03 2011-05-12 Sustainx, Inc. Systems and methods for compressed-gas energy storage using coupled cylinder assemblies
US8191362B2 (en) 2010-04-08 2012-06-05 Sustainx, Inc. Systems and methods for reducing dead volume in compressed-gas energy storage systems
US8171728B2 (en) 2010-04-08 2012-05-08 Sustainx, Inc. High-efficiency liquid heat exchange in compressed-gas energy storage systems
US8234863B2 (en) 2010-05-14 2012-08-07 Sustainx, Inc. Forming liquid sprays in compressed-gas energy storage systems for effective heat exchange
US8495872B2 (en) 2010-08-20 2013-07-30 Sustainx, Inc. Energy storage and recovery utilizing low-pressure thermal conditioning for heat exchange with high-pressure gas
US8578708B2 (en) 2010-11-30 2013-11-12 Sustainx, Inc. Fluid-flow control in energy storage and recovery systems
US20120156625A1 (en) * 2010-12-21 2012-06-21 Ritek Corporation Nano-fabrication method
US20120181714A1 (en) * 2011-01-14 2012-07-19 Ritek Corporation Method for manufacturing master plate for optical disc
US20130091835A1 (en) 2011-10-14 2013-04-18 Sustainx, Inc. Dead-volume management in compressed-gas energy storage and recovery systems
TW201339744A (zh) 2012-03-20 2013-10-01 Ind Tech Res Inst 圖案化層狀材料與形成轉印模的方法
US20130295714A1 (en) * 2012-05-02 2013-11-07 Board Of Trustees Of The University Of Arkansas Systems and methods for site controlled crystallization
JP6037721B2 (ja) * 2012-08-24 2016-12-07 旭化成株式会社 モールドの製造方法

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895234A (en) * 1973-06-15 1975-07-15 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a member
US3931460A (en) * 1974-02-04 1976-01-06 Zenith Radio Corporation Video disc with multiturn undulating storage track
US4259433A (en) * 1976-10-22 1981-03-31 Fuji Photo Film Co., Ltd. Method for producing disk-recording plates
US4136940A (en) * 1977-12-19 1979-01-30 Rca Corporation Resist development control system
JPS54133134A (en) * 1978-04-06 1979-10-16 Canon Inc Recording medium
JPS5517152A (en) 1978-07-25 1980-02-06 Fujitsu Ltd Photo mask
JPS56125743A (en) * 1980-03-07 1981-10-02 Konishiroku Photo Ind Co Ltd Base material for photomask
JPS60173736A (ja) 1984-02-06 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 光学デイスク用スタンパの製造方法
JPS60173737A (ja) 1984-02-09 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 光学デイスク用スタンパ−の製造方法
US4724043A (en) * 1984-09-04 1988-02-09 International Business Machines Corporation Process for forming a master mold for optical storage disks
JPS6367549A (ja) * 1986-09-10 1988-03-26 Pioneer Electronic Corp 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置
JPS63237234A (ja) * 1987-03-24 1988-10-03 Mitsubishi Electric Corp デイスク原盤
US5266409A (en) * 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
JPH03110563A (ja) * 1989-09-25 1991-05-10 Sanyo Electric Co Ltd パターン形成方法
JPH03129349A (ja) * 1989-10-16 1991-06-03 New Japan Radio Co Ltd フォトマスクの製法
US5324188A (en) * 1989-12-19 1994-06-28 Canon Kabushiki Kaisha Roller stamper for molding a substrate sheet to become an information recording medium
JP3150850B2 (ja) * 1994-07-08 2001-03-26 シャープ株式会社 光磁気ディスク原盤の製造方法
US5494782A (en) * 1994-07-29 1996-02-27 Sony Corporation Direct to stamper/mother optical disk mastering
US5740138A (en) * 1994-09-06 1998-04-14 Kabushiki Kaisha Toshiba Apparatus for recording information on a primary optical disk to manufacture optical disks
US5843626A (en) * 1995-04-19 1998-12-01 Pioneer Video Corporation Method for manufacturing a master disc for optical discs
US5691091A (en) * 1995-06-07 1997-11-25 Syracuse University Optical storage process
US6060220A (en) * 1995-07-10 2000-05-09 The Board Of Trustees Of The Leland Stanford Junior University Method for producing an optical information carrier having a variable relief structure
JPH09128818A (ja) * 1995-11-02 1997-05-16 Sony Corp 露光装置
US5741627A (en) * 1996-05-15 1998-04-21 Del Mar Avionics Optical recording medium and method for eliminating berm buildup
US5869212A (en) * 1996-05-31 1999-02-09 Kabushiki Kaisha Toshiba Integrated circuit photofabrication masks and methods for making same
US5965309A (en) * 1997-08-28 1999-10-12 International Business Machines Corporation Focus or exposure dose parameter control system using tone reversing patterns
JPH11209558A (ja) 1998-01-28 1999-08-03 Dainippon Printing Co Ltd 光重合性顔料分散剤、感光性着色組成物及び遮光層用組成物
JPH11250504A (ja) * 1998-02-27 1999-09-17 Sony Corp 光記録媒体及びその製造方法
US6706358B1 (en) * 1998-04-09 2004-03-16 Seagate Technology Llc Storage disk comprising depressions and /or raised features
TW476958B (en) * 1999-02-09 2002-02-21 Ricoh Kk Optical disk and method of producing the same
JP3104699B1 (ja) * 1999-06-01 2000-10-30 株式会社ニコン 細溝付き成形基板の製造方法
US6438088B1 (en) * 1999-07-29 2002-08-20 Hitachi Maxell, Ltd. Light transmission device and apparatus including light transmission device
JP2001043562A (ja) * 1999-08-03 2001-02-16 Sony Corp 光情報記録媒体の製造方法及び光情報記録媒体の製造装置
JP2001126980A (ja) * 1999-11-01 2001-05-11 Nikon Corp 蓄積エネルギー計算方法、プログラム記憶媒体、近接効果計算方法、マスク又はレチクルパターンの設計方法、及び半導体デバイスの製造方法
JP2002237102A (ja) * 2000-07-07 2002-08-23 Tdk Corp 光記録媒体およびその製造方法
JP2002063747A (ja) * 2000-08-18 2002-02-28 Sony Corp 記録媒体および記録媒体原盤ならびに記録媒体の製造方法
EP1191527A3 (de) * 2000-09-14 2006-11-02 Pioneer Corporation Vorrichtung zur Herstellung einer Matrizenplatte
JP2002092946A (ja) * 2000-09-20 2002-03-29 Toshiba Corp 光ディスク基板およびその製造方法
JP2002140840A (ja) * 2000-11-01 2002-05-17 Pioneer Electronic Corp 光ディスク及びその原盤製造装置
US6806021B2 (en) * 2001-04-02 2004-10-19 Kabushiki Kaisha Toshiba Method for forming a pattern and method of manufacturing semiconductor device
US6859260B2 (en) * 2001-04-25 2005-02-22 Asml Holding N.V. Method and system for improving focus accuracy in a lithography system
US6894959B2 (en) * 2001-08-23 2005-05-17 Matsushita Electric Industrial Co., Ltd. Method and apparatus for exposing optical disk master
US6879376B2 (en) * 2001-11-19 2005-04-12 Pixelligent Technologies Llc Method and apparatus for exposing photoresists using programmable masks
JP4055543B2 (ja) * 2002-02-22 2008-03-05 ソニー株式会社 レジスト材料及び微細加工方法
EP1551020B1 (de) 2002-10-10 2010-11-03 Sony Corporation Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers
JP4484785B2 (ja) * 2005-08-09 2010-06-16 ソニー株式会社 記録方法
US8089843B2 (en) * 2007-08-10 2012-01-03 Sony Disc & Digital Solutions, Inc. Recording drive waveform adjusting method for manufacturing master disc, master disc manufacturing method, master disc manufacturing apparatus, and master disc

Also Published As

Publication number Publication date
CN1610942A (zh) 2005-04-27
CN100380485C (zh) 2008-04-09
EP1551020B1 (de) 2010-11-03
US20050226999A1 (en) 2005-10-13
KR100926858B1 (ko) 2009-11-13
US20110279793A1 (en) 2011-11-17
EP1551020A4 (de) 2009-01-28
EP2315205A3 (de) 2012-01-25
EP2315205B1 (de) 2014-01-15
WO2004034391A1 (ja) 2004-04-22
EP2315205A2 (de) 2011-04-27
EP1551020A1 (de) 2005-07-06
AU2003266613A1 (en) 2004-05-04
US20100112491A1 (en) 2010-05-06
DE60334825D1 (de) 2010-12-16
US8097189B2 (en) 2012-01-17
US20110274895A1 (en) 2011-11-10
US20110273696A1 (en) 2011-11-10
US7670514B2 (en) 2010-03-02
KR20050053524A (ko) 2005-06-08

Similar Documents

Publication Publication Date Title
ATE487218T1 (de) Verfahren zur herstellung eines originals für optische datenträgerbenutzung und verfahren zur herstellung eines optischen datenträgers
ATE354166T1 (de) Verfahren zur herstellung eines plattensubstrats und verfahren und vorrichtung zur herstellung einer optischen platte
ATE288123T1 (de) Verfahren zur herstellung eines optischen aufzeichnungsträgers
EP1746460A3 (de) Photomaskenrohling, Photomaske und deren Herstellungsverfahren
ATE544095T1 (de) Verfahren zur herstellung einer druckplatte
ATE130457T1 (de) Verfahren zur herstellung eines optischen aufzeichnungsmediums von hoher dichte.
EP1359576A3 (de) Optisches Speichermedium und Verfahren zum optischen Speichern von Daten auf demselben
DE602005011425D1 (de) Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur
DE60231197D1 (de) Matrize fuer optische platte, verfahren zur herstellung einer optischen platte, und optische platte
DE602004026769D1 (de) Prozess zur herstellung eines originaldatenträgers für einen optischen datenträger und originaldatenträger für einen optischen datenträger
JP4036820B2 (ja) サブ波長構造体の製造
EP1505588A3 (de) Verfahren zur Herstellung einer mit Photolack beschichten Glasplatte, einer Matrize und eines Aufzeichnungsmediums
DE50109144D1 (de) Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschliesslich aus Linsen positiver Brechkraft und Verfahren zur Herstellung mikrostrukturierter Bauteile mit einem solchen Objektiv
ATE486303T1 (de) Verfahren zur verarbeitung von flachdruckplatten
ATE232459T1 (de) Verfahren zur herstellung einer optischen masterscheibe
ATE182411T1 (de) Eingebettete phasenverschiebungsmasken sowie verfahren zu dessen herstellung
ATE521968T1 (de) Verfahren zur herstellung eines stempels zur herstellung eines optischen datenträgers und herstellungsverfahren für optische datenträger
ATE459899T1 (de) Methode und system für einen verbesserten lithographischen prozess
DE602004021755D1 (de) Verfahren zur Herstellung eines Prägestempels für optische Informationsmedien, Originalplatte eines solchen Prägestempels
DE602004020709D1 (de) Verfahren zur Herstellung einer Matrize für optisches Informationsaufzeichnungsmedium
ATE498179T1 (de) Optischer datenträger und verfahren zur herstellung desselben
DE602004009377D1 (de) Verfahren zur Herstellung einer Masterplatte für ein optisches Aufzeichnungsmedium, Verfahren zur Herstellung eines Musters, einer Mutterplatte, einer Matrize, eines optischen Aufzeichnungsmediums und eines Resists
JP2001060340A (ja) ビジュアルウォーターマーク付き光情報記録媒体、ビジュアルウォーターマーク形成装置及びその形成方法
CA2056308A1 (en) Method for manufacturing a photomask for an optical memory
EP1291859A3 (de) Verfahren zur Herstellung von Matrizen für optische Informationsmedien, Photoresist Originalplatte dafür, Matrize für optische Informationsmedien, und optisches Informationsmedium

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1551020

Country of ref document: EP