DE602005011425D1 - Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur - Google Patents

Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur

Info

Publication number
DE602005011425D1
DE602005011425D1 DE602005011425T DE602005011425T DE602005011425D1 DE 602005011425 D1 DE602005011425 D1 DE 602005011425D1 DE 602005011425 T DE602005011425 T DE 602005011425T DE 602005011425 T DE602005011425 T DE 602005011425T DE 602005011425 D1 DE602005011425 D1 DE 602005011425D1
Authority
DE
Germany
Prior art keywords
relief structure
substrate
density relief
master substrate
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005011425T
Other languages
English (en)
Inventor
Erwin R Meinders
Rolf A Loch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE602005011425D1 publication Critical patent/DE602005011425D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Integrated Circuits (AREA)
DE602005011425T 2004-04-15 2005-04-08 Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur Active DE602005011425D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04101561 2004-04-15
PCT/IB2005/051160 WO2005101397A1 (en) 2004-04-15 2005-04-08 Optical master substrate and method to manufacture high-density relief structure

Publications (1)

Publication Number Publication Date
DE602005011425D1 true DE602005011425D1 (de) 2009-01-15

Family

ID=34963745

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005011425T Active DE602005011425D1 (de) 2004-04-15 2005-04-08 Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur

Country Status (11)

Country Link
US (1) US7935403B2 (de)
EP (1) EP1741102B1 (de)
JP (1) JP2007532355A (de)
KR (1) KR20060127254A (de)
CN (1) CN100583258C (de)
AT (1) ATE416459T1 (de)
CA (1) CA2562559A1 (de)
DE (1) DE602005011425D1 (de)
MX (1) MXPA06011773A (de)
TW (1) TW200606928A (de)
WO (1) WO2005101397A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005011425D1 (de) 2004-04-15 2009-01-15 Koninkl Philips Electronics Nv Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur
JP2009507316A (ja) * 2005-09-02 2009-02-19 モーザー ベイアー インディア リミテッド 高密度凹凸構造を複製するスタンパの製造方法
EP2273501A1 (de) * 2009-06-24 2011-01-12 Singulus Mastering B.V. Masterplatte mit einer PTM-Schicht und einer Nickelgrundschicht
US8012790B2 (en) * 2009-08-28 2011-09-06 International Business Machines Corporation Chemical mechanical polishing stop layer for fully amorphous phase change memory pore cell
US8283202B2 (en) * 2009-08-28 2012-10-09 International Business Machines Corporation Single mask adder phase change memory element
US8283650B2 (en) 2009-08-28 2012-10-09 International Business Machines Corporation Flat lower bottom electrode for phase change memory cell
US8129268B2 (en) 2009-11-16 2012-03-06 International Business Machines Corporation Self-aligned lower bottom electrode
US8233317B2 (en) * 2009-11-16 2012-07-31 International Business Machines Corporation Phase change memory device suitable for high temperature operation
US7943420B1 (en) * 2009-11-25 2011-05-17 International Business Machines Corporation Single mask adder phase change memory element

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JPS60170045A (ja) * 1984-02-13 1985-09-03 Pioneer Electronic Corp アドレス，案内溝付光デイスク製造方法
US5051340A (en) * 1989-06-23 1991-09-24 Eastman Kodak Company Master for optical element replication
US5029199A (en) * 1989-08-10 1991-07-02 Boston Technology Distributed control and storage for a large capacity messaging system
US5214688A (en) * 1990-06-05 1993-05-25 Inventions, Inc. Method and apparatus for dynamic and interdependent processing of inbound calls and outbound calls
US6847611B1 (en) * 1990-12-10 2005-01-25 At&T Corp. Traffic management for frame relay switched data service
US5506894A (en) * 1991-06-03 1996-04-09 At&T Corp. System for processing calling party information for international communications services
US5438570A (en) * 1993-12-29 1995-08-01 Tekno Industries, Inc. Service observing equipment for signalling System Seven telephone network
US5734498A (en) * 1994-05-09 1998-03-31 The Regents Of The University Of California Illuminator elements for conventional light microscopes
US5621727A (en) * 1994-09-16 1997-04-15 Octel Communications Corporation System and method for private addressing plans using community addressing
US7188003B2 (en) * 1994-12-30 2007-03-06 Power Measurement Ltd. System and method for securing energy management systems
US20040264402A9 (en) * 1995-06-01 2004-12-30 Padcom. Inc. Port routing functionality
JPH0964987A (ja) * 1995-08-30 1997-03-07 Fujitsu Ltd 信号局輻輳制御システム
US6002689A (en) * 1996-11-22 1999-12-14 Sprint Communications Co. L.P. System and method for interfacing a local communication device
US6144658A (en) * 1996-12-20 2000-11-07 Cisco Technology, Inc. Repetitive pattern removal in a voice channel of a communication network
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US6030556A (en) * 1997-07-08 2000-02-29 Imation Corp. Optical disc stampers and methods/systems for manufacturing the same
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US6169735B1 (en) * 1998-04-30 2001-01-02 Sbc Technology Resources, Inc. ATM-based distributed virtual tandem switching system
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US6208618B1 (en) * 1998-12-04 2001-03-27 Tellabs Operations, Inc. Method and apparatus for replacing lost PSTN data in a packet network
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US6511788B1 (en) 1999-02-12 2003-01-28 Sony Corporation Multi-layered optical disc
JP3104699B1 (ja) 1999-06-01 2000-10-30 株式会社ニコン 細溝付き成形基板の製造方法
EP1065663A3 (de) 1999-06-30 2002-02-06 Sony Corporation Optisches Aufzeichnungsmedium
JP3689612B2 (ja) * 2000-01-26 2005-08-31 株式会社日立製作所 情報記録媒体
JP4573941B2 (ja) * 2000-03-30 2010-11-04 富士フイルム株式会社 コリメータレンズおよびこれを用いた光走査装置
ATE254330T1 (de) 2000-07-12 2003-11-15 Koninkl Philips Electronics Nv Optisches aufzeichnungsmedium mit verschiedenen aufzeichnungsschichten
US7914711B2 (en) 2002-01-24 2011-03-29 Dphi Acquisitions, Inc. Use of mother stamper for optical disk molding
JP4272934B2 (ja) * 2002-07-22 2009-06-03 株式会社リコー 相変化型光記録媒体
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DE602005011425D1 (de) 2004-04-15 2009-01-15 Koninkl Philips Electronics Nv Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur

Also Published As

Publication number Publication date
JP2007532355A (ja) 2007-11-15
EP1741102B1 (de) 2008-12-03
KR20060127254A (ko) 2006-12-11
WO2005101397A1 (en) 2005-10-27
US7935403B2 (en) 2011-05-03
EP1741102A1 (de) 2007-01-10
CA2562559A1 (en) 2005-10-27
CN1942956A (zh) 2007-04-04
CN100583258C (zh) 2010-01-20
TW200606928A (en) 2006-02-16
MXPA06011773A (es) 2007-01-16
ATE416459T1 (de) 2008-12-15
US20070184233A1 (en) 2007-08-09

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