ATE416459T1 - Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur - Google Patents

Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur

Info

Publication number
ATE416459T1
ATE416459T1 AT05718671T AT05718671T ATE416459T1 AT E416459 T1 ATE416459 T1 AT E416459T1 AT 05718671 T AT05718671 T AT 05718671T AT 05718671 T AT05718671 T AT 05718671T AT E416459 T1 ATE416459 T1 AT E416459T1
Authority
AT
Austria
Prior art keywords
relief structure
substrate
density relief
master substrate
high density
Prior art date
Application number
AT05718671T
Other languages
English (en)
Inventor
Erwin Meinders
Rolf Loch
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE416459T1 publication Critical patent/ATE416459T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Integrated Circuits (AREA)
  • Manufacturing Optical Record Carriers (AREA)
AT05718671T 2004-04-15 2005-04-08 Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur ATE416459T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04101561 2004-04-15

Publications (1)

Publication Number Publication Date
ATE416459T1 true ATE416459T1 (de) 2008-12-15

Family

ID=34963745

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05718671T ATE416459T1 (de) 2004-04-15 2005-04-08 Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur

Country Status (11)

Country Link
US (1) US7935403B2 (de)
EP (1) EP1741102B1 (de)
JP (1) JP2007532355A (de)
KR (1) KR20060127254A (de)
CN (1) CN100583258C (de)
AT (1) ATE416459T1 (de)
CA (1) CA2562559A1 (de)
DE (1) DE602005011425D1 (de)
MX (1) MXPA06011773A (de)
TW (1) TW200606928A (de)
WO (1) WO2005101397A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1741102B1 (de) 2004-04-15 2008-12-03 Koninklijke Philips Electronics N.V. Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur
EP1929473A1 (de) * 2005-09-02 2008-06-11 Moser Baer India Ltd. Verfahren zum herstellen eines stempels zum duplizieren einer dichten reliefstruktur
EP2273501A1 (de) * 2009-06-24 2011-01-12 Singulus Mastering B.V. Masterplatte mit einer PTM-Schicht und einer Nickelgrundschicht
US8283202B2 (en) * 2009-08-28 2012-10-09 International Business Machines Corporation Single mask adder phase change memory element
US8012790B2 (en) * 2009-08-28 2011-09-06 International Business Machines Corporation Chemical mechanical polishing stop layer for fully amorphous phase change memory pore cell
US8283650B2 (en) * 2009-08-28 2012-10-09 International Business Machines Corporation Flat lower bottom electrode for phase change memory cell
US8233317B2 (en) * 2009-11-16 2012-07-31 International Business Machines Corporation Phase change memory device suitable for high temperature operation
US8129268B2 (en) 2009-11-16 2012-03-06 International Business Machines Corporation Self-aligned lower bottom electrode
US7943420B1 (en) * 2009-11-25 2011-05-17 International Business Machines Corporation Single mask adder phase change memory element

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Also Published As

Publication number Publication date
US20070184233A1 (en) 2007-08-09
DE602005011425D1 (de) 2009-01-15
CN1942956A (zh) 2007-04-04
JP2007532355A (ja) 2007-11-15
EP1741102B1 (de) 2008-12-03
KR20060127254A (ko) 2006-12-11
CN100583258C (zh) 2010-01-20
EP1741102A1 (de) 2007-01-10
CA2562559A1 (en) 2005-10-27
TW200606928A (en) 2006-02-16
US7935403B2 (en) 2011-05-03
WO2005101397A1 (en) 2005-10-27
MXPA06011773A (es) 2007-01-16

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