ATE420751T1 - Vakuumsaugkopf und vakuumsaugvorrichtung und tisch, der diese/n verwendet - Google Patents

Vakuumsaugkopf und vakuumsaugvorrichtung und tisch, der diese/n verwendet

Info

Publication number
ATE420751T1
ATE420751T1 AT04818977T AT04818977T ATE420751T1 AT E420751 T1 ATE420751 T1 AT E420751T1 AT 04818977 T AT04818977 T AT 04818977T AT 04818977 T AT04818977 T AT 04818977T AT E420751 T1 ATE420751 T1 AT E420751T1
Authority
AT
Austria
Prior art keywords
vacuum suction
suction
suction head
head
same
Prior art date
Application number
AT04818977T
Other languages
English (en)
Inventor
Yoshitaka Nishio
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Application granted granted Critical
Publication of ATE420751T1 publication Critical patent/ATE420751T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Sanitary Device For Flush Toilet (AREA)
AT04818977T 2003-11-21 2004-11-19 Vakuumsaugkopf und vakuumsaugvorrichtung und tisch, der diese/n verwendet ATE420751T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003392157 2003-11-21

Publications (1)

Publication Number Publication Date
ATE420751T1 true ATE420751T1 (de) 2009-01-15

Family

ID=34616438

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04818977T ATE420751T1 (de) 2003-11-21 2004-11-19 Vakuumsaugkopf und vakuumsaugvorrichtung und tisch, der diese/n verwendet

Country Status (10)

Country Link
US (1) US7665783B2 (de)
EP (1) EP1685930B1 (de)
JP (1) JP4724562B2 (de)
KR (1) KR101142346B1 (de)
CN (1) CN100445049C (de)
AT (1) ATE420751T1 (de)
DE (1) DE602004019132D1 (de)
PL (1) PL1685930T3 (de)
TW (1) TW200529997A (de)
WO (1) WO2005049287A1 (de)

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CN100445049C (zh) 2008-12-24
DE602004019132D1 (de) 2009-03-05
TW200529997A (en) 2005-09-16
US7665783B2 (en) 2010-02-23
WO2005049287A1 (ja) 2005-06-02
CN1882425A (zh) 2006-12-20
TWI346034B (de) 2011-08-01
JP4724562B2 (ja) 2011-07-13
US20070200377A1 (en) 2007-08-30
KR20060126485A (ko) 2006-12-07
EP1685930B1 (de) 2009-01-14
PL1685930T3 (pl) 2009-06-30
EP1685930A4 (de) 2007-10-10
KR101142346B1 (ko) 2012-05-18
EP1685930A1 (de) 2006-08-02

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