ATE211583T1 - Senkrechter ofen - Google Patents

Senkrechter ofen

Info

Publication number
ATE211583T1
ATE211583T1 AT96200869T AT96200869T ATE211583T1 AT E211583 T1 ATE211583 T1 AT E211583T1 AT 96200869 T AT96200869 T AT 96200869T AT 96200869 T AT96200869 T AT 96200869T AT E211583 T1 ATE211583 T1 AT E211583T1
Authority
AT
Austria
Prior art keywords
support structure
support
inner sleeve
sleeve
vertical oven
Prior art date
Application number
AT96200869T
Other languages
English (en)
Inventor
Frank Huussen
Gerard Berenpas
Albert Hasper
Ridder Chris G M De
Original Assignee
Asm Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Int filed Critical Asm Int
Application granted granted Critical
Publication of ATE211583T1 publication Critical patent/ATE211583T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B1/00—Shaft or like vertical or substantially vertical furnaces
    • F27B1/10—Details, accessories or equipment specially adapted for furnaces of these types
    • F27B1/12—Shells or casings; Supports therefor
    • F27B1/14—Arrangements of linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/0084—Charging; Manipulation of SC or SC wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Inorganic Insulating Materials (AREA)
  • Display Devices Of Pinball Game Machines (AREA)
  • Glass Compositions (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Control Of Resistance Heating (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
AT96200869T 1995-03-31 1996-03-29 Senkrechter ofen ATE211583T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/414,294 US5662470A (en) 1995-03-31 1995-03-31 Vertical furnace

Publications (1)

Publication Number Publication Date
ATE211583T1 true ATE211583T1 (de) 2002-01-15

Family

ID=23640837

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96200869T ATE211583T1 (de) 1995-03-31 1996-03-29 Senkrechter ofen

Country Status (7)

Country Link
US (1) US5662470A (de)
EP (1) EP0735575B1 (de)
JP (1) JP4285789B2 (de)
KR (1) KR960034959A (de)
AT (1) ATE211583T1 (de)
DE (1) DE69618265T2 (de)
TW (1) TW293082B (de)

Families Citing this family (329)

* Cited by examiner, † Cited by third party
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JP4508893B2 (ja) * 2004-02-02 2010-07-21 エーエスエム インターナショナル エヌ．ヴェー． 半導体処理方法、半導体処理システム及び反応チャンバにガスを供給する方法
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KR101333363B1 (ko) * 2006-10-13 2013-11-28 도쿄엘렉트론가부시키가이샤 열처리 장치
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US5662470A (en) 1997-09-02
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JPH08327238A (ja) 1996-12-13
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TW293082B (de) 1996-12-11
KR960034959A (ko) 1996-10-24

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