KR970063512A - 퍼니스의 연소 장치 및 연소 방법 - Google Patents

퍼니스의 연소 장치 및 연소 방법 Download PDF

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Publication number
KR970063512A
KR970063512A KR1019960004198A KR19960004198A KR970063512A KR 970063512 A KR970063512 A KR 970063512A KR 1019960004198 A KR1019960004198 A KR 1019960004198A KR 19960004198 A KR19960004198 A KR 19960004198A KR 970063512 A KR970063512 A KR 970063512A
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KR
South Korea
Prior art keywords
gas
furnace
reflector
combustion method
nozzle
Prior art date
Application number
KR1019960004198A
Other languages
English (en)
Other versions
KR0175044B1 (ko
Inventor
안준근
안정수
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960004198A priority Critical patent/KR0175044B1/ko
Priority to TW085107102A priority patent/TW297858B/zh
Priority to JP20235396A priority patent/JP3742151B2/ja
Priority to US08/692,998 priority patent/US5823763A/en
Publication of KR970063512A publication Critical patent/KR970063512A/ko
Application granted granted Critical
Publication of KR0175044B1 publication Critical patent/KR0175044B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/66—Preheating the combustion air or gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N1/00—Regulating fuel supply
    • F23N1/02—Regulating fuel supply conjointly with air supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2221/00—Pretreatment or prehandling
    • F23N2221/06—Preheating gaseous fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2225/00—Measuring
    • F23N2225/08—Measuring temperature
    • F23N2225/20—Measuring temperature entrant temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/34—Indirect CO2mitigation, i.e. by acting on non CO2directly related matters of the process, e.g. pre-heating or heat recovery

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Control Of Combustion (AREA)

Abstract

본 발명은 퍼니스의 연소 장치 및 연소 방법에 관해 게시한다. 종래의 연소장치는 할로겐 램프와 반사경과 그 하단에 설치된 집열판과 H2 가스 노즐 및 O2 가스 노즐로 구성되어 있는데, 상기 반사경이 부식되거나 오염될 경우에는 H2 가스가 제대로 연소되지 않게 된다. 그러나 본 발명은 종래의 반사경을 이용하지 않고 코일을 이용하여 H2 가스를 연소시킴으로써 종래의 반사경으로 인한 문제점을 모두 해결할 수 있다.

Description

퍼니스의 연소 장치 및 연소 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 퍼니스의 연소 장치의 단면도.

Claims (4)

  1. 가스를 공급하는 노즐; 및 상기 가스를 가열시키기 위한 코일을 갖는 것을 특징으로 하는 퍼니스의 연소 장치.
  2. 제1항에 있어서, 상기 가스는 H2 가스인 것을 특징으로 하는 퍼니스의 연소장치.
  3. 제1항에 있어서, 상기 연소 장치는 가스 온도 감지 센서와 온도 제어 장치를 더 구비하는 것을 특징으로 하는 퍼니스의 연소 장치.
  4. 가스 노즐에 가스가 공급되는 단계; 및 상기 가스 노즐에 설치된 코일에 전류가 공급되는 단계를 갖는 것을 특징으로 하는 퍼니스의 연소 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
    　
KR1019960004198A 1996-02-22 1996-02-22 퍼니스의 연소 장치 및 연소 방법 KR0175044B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019960004198A KR0175044B1 (ko) 1996-02-22 1996-02-22 퍼니스의 연소 장치 및 연소 방법
TW085107102A TW297858B (en) 1996-02-22 1996-06-13 Combustion device for use in furnace and combustion method
JP20235396A JP3742151B2 (ja) 1996-02-22 1996-07-31 ファーネス用燃焼装置
US08/692,998 US5823763A (en) 1996-02-22 1996-08-06 Combustion device and method for use in a thermal oxidation furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960004198A KR0175044B1 (ko) 1996-02-22 1996-02-22 퍼니스의 연소 장치 및 연소 방법

Publications (2)

Publication Number Publication Date
KR970063512A true KR970063512A (ko) 1997-09-12
KR0175044B1 KR0175044B1 (ko) 1999-04-01

Family

ID=19451572

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960004198A KR0175044B1 (ko) 1996-02-22 1996-02-22 퍼니스의 연소 장치 및 연소 방법

Country Status (4)

Country Link
US (1) US5823763A (ko)
JP (1) JP3742151B2 (ko)
KR (1) KR0175044B1 (ko)
TW (1) TW297858B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080299780A1 (en) * 2007-06-01 2008-12-04 Uv Tech Systems, Inc. Method and apparatus for laser oxidation and reduction
TW201116791A (en) * 2009-11-05 2011-05-16 Wei-En Chen Structure of wood-burning kiln and improved process thereof
JP6597662B2 (ja) * 2017-02-08 2019-10-30 トヨタ自動車株式会社 水素ガスバーナ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977823A (en) * 1975-07-02 1976-08-31 Frank Bernhard Method of burning residual fuel oil in distillate fuel oil burners

Also Published As

Publication number Publication date
US5823763A (en) 1998-10-20
TW297858B (en) 1997-02-11
KR0175044B1 (ko) 1999-04-01
JPH09232300A (ja) 1997-09-05
JP3742151B2 (ja) 2006-02-01

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