WO2018061608A8 - 波長分散型蛍光ｘ線分析装置およびそれを用いる蛍光ｘ線分析方法 - Google Patents

波長分散型蛍光ｘ線分析装置およびそれを用いる蛍光ｘ線分析方法 Download PDF

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WO2018061608A8
WO2018061608A8 PCT/JP2017/031495 JP2017031495W WO2018061608A8 WO 2018061608 A8 WO2018061608 A8 WO 2018061608A8 JP 2017031495 W JP2017031495 W JP 2017031495W WO 2018061608 A8 WO2018061608 A8 WO 2018061608A8
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ray fluorescence
intensity
area
background
wavelength dispersive
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PCT/JP2017/031495
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French (fr)
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WO2018061608A1 (ja
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秀一 加藤
片岡　由行
一 藤村
山田　隆
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株式会社リガク
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Priority to EP17855566.0A priority Critical patent/EP3521814B1/en
Priority to JP2018542027A priority patent/JP6574959B2/ja
Priority to KR1020187032312A priority patent/KR102056556B1/ko
Priority to CN201780028012.7A priority patent/CN109196340B/zh
Publication of WO2018061608A1 publication Critical patent/WO2018061608A1/ja
Publication of WO2018061608A8 publication Critical patent/WO2018061608A8/ja
Priority to US16/181,544 priority patent/US10768125B2/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

本発明の波長分散型蛍光Ｘ線分析装置は、相異なる分光角度の２次Ｘ線（４１）の各強度を対応する検出素子（７）で検出する位置敏感型検出器（１０）と、検出素子（７）の配列方向位置と検出素子（７）の検出強度との関係を測定スペクトルとして表示器（１５）に表示する測定スペクトル表示手段（１４）と、ピーク領域およびバックグラウンド領域が設定される検出領域設定手段（１６）と、ピーク領域におけるピーク強度、バックグラウンド領域におけるバックグラウンド強度およびバックグラウンド補正係数に基づいて、ネット強度として測定対象の蛍光Ｘ線の強度を算出して定量分析を行う定量手段（１７）とを備える。
PCT/JP2017/031495 2016-09-30 2017-08-31 波長分散型蛍光ｘ線分析装置およびそれを用いる蛍光ｘ線分析方法 WO2018061608A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP17855566.0A EP3521814B1 (en) 2016-09-30 2017-08-31 Wavelength-dispersive x-ray fluorescence spectrometer and x-ray fluorescence analysing method using the same
JP2018542027A JP6574959B2 (ja) 2016-09-30 2017-08-31 波長分散型蛍光ｘ線分析装置およびそれを用いる蛍光ｘ線分析方法
KR1020187032312A KR102056556B1 (ko) 2016-09-30 2017-08-31 파장 분산형 형광 x선 분석 장치, 및 그것을 사용하는 형광 x선 분석 방법
CN201780028012.7A CN109196340B (zh) 2016-09-30 2017-08-31 波长分散型荧光x射线分析装置和采用它的荧光x射线分析方法
US16/181,544 US10768125B2 (en) 2016-09-30 2018-11-06 Wavelength dispersive x-ray fluorescence spectrometer and x-ray fluorescence analyzing method using the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-194355 2016-09-30
JP2016194355 2016-09-30

Related Child Applications (1)

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US16/181,544 Continuation US10768125B2 (en) 2016-09-30 2018-11-06 Wavelength dispersive x-ray fluorescence spectrometer and x-ray fluorescence analyzing method using the same

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WO2018061608A1 WO2018061608A1 (ja) 2018-04-05
WO2018061608A8 true WO2018061608A8 (ja) 2018-07-26

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US (1) US10768125B2 (ja)
EP (1) EP3521814B1 (ja)
JP (1) JP6574959B2 (ja)
KR (1) KR102056556B1 (ja)
CN (1) CN109196340B (ja)
WO (1) WO2018061608A1 (ja)

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Also Published As

Publication number Publication date
KR102056556B1 (ko) 2019-12-16
EP3521814A4 (en) 2020-06-17
KR20180127498A (ko) 2018-11-28
JP6574959B2 (ja) 2019-09-18
WO2018061608A1 (ja) 2018-04-05
JPWO2018061608A1 (ja) 2019-03-07
CN109196340B (zh) 2020-11-03
US20190072504A1 (en) 2019-03-07
EP3521814A1 (en) 2019-08-07
US10768125B2 (en) 2020-09-08
EP3521814B1 (en) 2022-08-03
CN109196340A (zh) 2019-01-11

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