WO2018168939A8 - 蛍光ｘ線分析方法、蛍光ｘ線分析プログラムおよび蛍光ｘ線分析装置 - Google Patents

蛍光ｘ線分析方法、蛍光ｘ線分析プログラムおよび蛍光ｘ線分析装置 Download PDF

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Publication number
WO2018168939A8
WO2018168939A8 PCT/JP2018/010004 JP2018010004W WO2018168939A8 WO 2018168939 A8 WO2018168939 A8 WO 2018168939A8 JP 2018010004 W JP2018010004 W JP 2018010004W WO 2018168939 A8 WO2018168939 A8 WO 2018168939A8
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Prior art keywords
ray fluorescence
fluorescence analysis
analysis method
theoretical intensity
spectrometer
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PCT/JP2018/010004
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English (en)
French (fr)
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WO2018168939A1 (ja
Inventor
片岡　由行
航介 川久
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株式会社リガク
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Priority to EP18767402.3A priority Critical patent/EP3598116B1/en
Priority to CN201880012059.9A priority patent/CN110312928B/zh
Priority to JP2019506226A priority patent/JP6614740B2/ja
Publication of WO2018168939A1 publication Critical patent/WO2018168939A1/ja
Publication of WO2018168939A8 publication Critical patent/WO2018168939A8/ja
Priority to US16/559,063 priority patent/US10921267B2/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

ＦＰ法による蛍光Ｘ線分析方法において、感度定数を求めるための標準試料理論強度計算ステップおよび繰り返し計算の中の未知試料理論強度計算ステップで用いる所定の理論強度式において、Ｘ線の吸収に関する吸収項についてのみ、各成分の濃度比を全成分の濃度比の合計が１になるように規格化する。
PCT/JP2018/010004 2017-03-15 2018-03-14 蛍光ｘ線分析方法、蛍光ｘ線分析プログラムおよび蛍光ｘ線分析装置 WO2018168939A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP18767402.3A EP3598116B1 (en) 2017-03-15 2018-03-14 X-ray fluorescence analysis method, x-ray fluorescence analysis program, and x-ray fluorescence spectrometer
CN201880012059.9A CN110312928B (zh) 2017-03-15 2018-03-14 荧光x射线分析方法以及荧光x射线分析装置
JP2019506226A JP6614740B2 (ja) 2017-03-15 2018-03-14 蛍光ｘ線分析方法、蛍光ｘ線分析プログラムおよび蛍光ｘ線分析装置
US16/559,063 US10921267B2 (en) 2017-03-15 2019-09-03 X-ray fluorescence analysis method, X-ray fluorescence analysis program, and X-ray fluorescence spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-049447 2017-03-15
JP2017049447 2017-03-15

Related Child Applications (1)

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US16/559,063 Continuation US10921267B2 (en) 2017-03-15 2019-09-03 X-ray fluorescence analysis method, X-ray fluorescence analysis program, and X-ray fluorescence spectrometer

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WO2018168939A1 WO2018168939A1 (ja) 2018-09-20
WO2018168939A8 true WO2018168939A8 (ja) 2019-08-15

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US (1) US10921267B2 (ja)
EP (1) EP3598116B1 (ja)
JP (1) JP6614740B2 (ja)
CN (1) CN110312928B (ja)
WO (1) WO2018168939A1 (ja)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10989822B2 (en) 2018-06-04 2021-04-27 Sigray, Inc. Wavelength dispersive x-ray spectrometer
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
WO2020051061A1 (en) 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (de) 2018-09-07 2021-07-08 Sigray, Inc. System und verfahren zur röntgenanalyse mit wählbarer tiefe
DE112020004169T5 (de) 2019-09-03 2022-05-25 Sigray, Inc. System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung
JP6838754B1 (ja) * 2019-09-26 2021-03-03 株式会社リガク 蛍光ｘ線分析装置
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
JP7190749B2 (ja) 2020-05-18 2022-12-16 株式会社リガク 蛍光ｘ線分析装置
JP7395775B2 (ja) 2020-05-18 2023-12-11 シグレイ、インコーポレイテッド 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法
DE112021004828T5 (de) 2020-09-17 2023-08-03 Sigray, Inc. System und verfahren unter verwendung von röntgenstrahlen für tiefenauflösende messtechnik und analyse
CN112432916A (zh) * 2020-11-10 2021-03-02 青岛海关技术中心 一种碳酸钙粉体的化验鉴定方法及商品归类应用
DE112021006348T5 (de) 2020-12-07 2023-09-21 Sigray, Inc. 3d-röntgenbildgebungssystem mit hohem durchsatz, das eine transmissionsröntgenquelle verwendet
JP7233756B2 (ja) * 2021-06-08 2023-03-07 株式会社リガク 蛍光ｘ線分析装置
US11992350B2 (en) 2022-03-15 2024-05-28 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
WO2023215204A1 (en) 2022-05-02 2023-11-09 Sigray, Inc. X-ray sequential array wavelength dispersive spectrometer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2853261B2 (ja) * 1989-05-16 1999-02-03 三菱マテリアル株式会社 金属分析方法および分析装置
JP3921872B2 (ja) * 1999-05-20 2007-05-30 株式会社島津製作所 蛍光ｘ線分析用データ処理装置
FI20011362A (fi) * 2001-06-26 2002-12-27 Bs Instr Technology Oy Röntgenfluoresenssianalysaattori ja menetelmä röntgenfluoresenssianalysaattorin käyttämiseksi
DE10159828B4 (de) * 2001-12-06 2007-09-20 Rigaku Industrial Corporation, Takatsuki Röntgenfluoreszenzspektrometer
EP1521947B1 (en) * 2002-06-17 2018-05-16 Edax Inc. Scatter spectra method for x-ray fluorescent analysis with optical components
JP3965191B2 (ja) * 2005-04-06 2007-08-29 理学電機工業株式会社 蛍光ｘ線分析装置およびそれに用いるプログラム
US8155268B2 (en) * 2009-04-23 2012-04-10 Thermo Niton Analyzers Llc Rapid screening for lead concentration compliance by X-ray fluorescence (XRF) analysis
JP2011099749A (ja) * 2009-11-05 2011-05-19 Horiba Ltd 濃度計測方法及び蛍光ｘ線分析装置
JP5481752B2 (ja) * 2010-09-15 2014-04-23 株式会社リガク 蛍光ｘ線分析装置
JP6266914B2 (ja) * 2013-08-01 2018-01-24 田中貴金属工業株式会社 蛍光ｘ線分析装置を用いた貴金属製品の分析方法、及び、貴金属製品分析用のコンピュータプログラム
JP5975181B2 (ja) * 2013-10-15 2016-08-23 株式会社島津製作所 蛍光ｘ線分析方法及び蛍光ｘ線分析装置
WO2015056305A1 (ja) * 2013-10-15 2015-04-23 株式会社島津製作所 蛍光ｘ線分析方法及び蛍光ｘ線分析装置
CN104111263B (zh) * 2014-07-07 2016-08-24 大连理工大学 一种虚拟合成标样的x射线荧光光谱基本参数法
US9784699B2 (en) * 2015-03-03 2017-10-10 Panalytical B.V. Quantitative X-ray analysis—matrix thickness correction
WO2017038701A1 (ja) * 2015-08-28 2017-03-09 株式会社リガク 蛍光ｘ線分析装置
US20180348150A1 (en) * 2017-05-30 2018-12-06 Malvern Panalytical B.V. Pressed Powder Sample Measurements Using X-ray Fluorescence

Also Published As

Publication number Publication date
WO2018168939A1 (ja) 2018-09-20
CN110312928A (zh) 2019-10-08
EP3598116B1 (en) 2021-07-21
EP3598116A4 (en) 2020-04-29
CN110312928B (zh) 2021-03-26
JP6614740B2 (ja) 2019-12-04
US10921267B2 (en) 2021-02-16
EP3598116A1 (en) 2020-01-22
JPWO2018168939A1 (ja) 2019-11-14
US20200003712A1 (en) 2020-01-02

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