WO2016002357A8 - 蛍光ｘ線分析装置および方法 - Google Patents

蛍光ｘ線分析装置および方法 Download PDF

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Publication number
WO2016002357A8
WO2016002357A8 PCT/JP2015/063892 JP2015063892W WO2016002357A8 WO 2016002357 A8 WO2016002357 A8 WO 2016002357A8 JP 2015063892 W JP2015063892 W JP 2015063892W WO 2016002357 A8 WO2016002357 A8 WO 2016002357A8
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WIPO (PCT)
Prior art keywords
ray fluorescence
exposure
sample
angle
size
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PCT/JP2015/063892
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English (en)
French (fr)
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WO2016002357A1 (ja
Inventor
山田　隆
清水　雄一郎
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株式会社リガク
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Priority to JP2016531176A priority Critical patent/JP6283854B2/ja
Priority to DE112015003094.8T priority patent/DE112015003094B4/de
Publication of WO2016002357A1 publication Critical patent/WO2016002357A1/ja
Priority to US15/391,156 priority patent/US9746433B2/en
Publication of WO2016002357A8 publication Critical patent/WO2016002357A8/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/303—Accessories, mechanical or electrical features calibrating, standardising
    • G01N2223/3037—Accessories, mechanical or electrical features calibrating, standardising standards (constitution)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/641—Specific applications or type of materials particle sizing

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

本発明の蛍光Ｘ線分析装置は、基板（１０）上に載せられた多数のナノ粒子である試料（１）に１次Ｘ線（６）を照射するＸ線源（３）と、基板の表面（１０ａ）への１次Ｘ線（６）の照射角度（α）を調整する照射角度調整手段（５）と、試料（１）から発生する蛍光Ｘ線（７）の強度を測定する検出手段（８）と、照射角度（α）の変化に対する蛍光Ｘ線（７）の強度の変化として試料プロファイルを作成して、ピーク照射角度位置を算出するピーク位置算出手段（１１）と、ピーク照射角度位置とナノ粒子（１）の粒子径との相関関係である検量線を作成する粒子径検量線作成手段（２１）と、未知試料（１）についてピーク照射角度位置を検量線に適用して未知試料（１）のナノ粒子の粒子径を算出する粒子径算出手段（２２）と、を備える。
PCT/JP2015/063892 2014-07-01 2015-05-14 蛍光ｘ線分析装置および方法 WO2016002357A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016531176A JP6283854B2 (ja) 2014-07-01 2015-05-14 蛍光ｘ線分析装置および方法
DE112015003094.8T DE112015003094B4 (de) 2014-07-01 2015-05-14 Röntgenfluoreszenzspektrometer und Röntgenfluoreszenzanalyseverfahren
US15/391,156 US9746433B2 (en) 2014-07-01 2016-12-27 X-ray fluorescence spectrometer and X-ray fluorescence analyzing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-135613 2014-07-01
JP2014135613 2014-07-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US15/391,156 Continuation US9746433B2 (en) 2014-07-01 2016-12-27 X-ray fluorescence spectrometer and X-ray fluorescence analyzing method

Publications (2)

Publication Number Publication Date
WO2016002357A1 WO2016002357A1 (ja) 2016-01-07
WO2016002357A8 true WO2016002357A8 (ja) 2017-01-12

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PCT/JP2015/063892 WO2016002357A1 (ja) 2014-07-01 2015-05-14 蛍光ｘ線分析装置および方法

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US (1) US9746433B2 (ja)
JP (1) JP6283854B2 (ja)
DE (1) DE112015003094B4 (ja)
WO (1) WO2016002357A1 (ja)

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JP6142135B2 (ja) * 2014-12-25 2017-06-07 株式会社リガク 斜入射蛍光ｘ線分析装置および方法
US9933375B2 (en) * 2015-09-25 2018-04-03 Olympus Scientific Solutions Americas, Inc. XRF/XRD system with dynamic management of multiple data processing units
FR3052259B1 (fr) * 2016-06-02 2023-08-25 Avenisense Capteur, procede de calibration d'un capteur et methode automatisee de suivi en ligne de l'evolution d'un corps liquide
CN106248709A (zh) * 2016-08-31 2016-12-21 吴俊逸 一种测定烟花爆竹用烟火药剂中钾含量的方法
CN106124547A (zh) * 2016-08-31 2016-11-16 吴俊逸 一种测定工业硝酸钾中钾含量的方法
CN106323930A (zh) * 2016-08-31 2017-01-11 吴俊逸 一种测定烟花爆竹用重铬酸钾中铬含量的方法
CN106124546A (zh) * 2016-08-31 2016-11-16 吴俊逸 一种测定工业氯酸钾中钾含量的方法
CN106404817A (zh) * 2016-08-31 2017-02-15 吴俊逸 一种测定烟花爆竹用烟火药剂中钛含量的方法
CN106093097A (zh) * 2016-08-31 2016-11-09 吴俊逸 一种测定烟花爆竹用烟火药剂中锶含量的方法
CN106404816A (zh) * 2016-08-31 2017-02-15 吴俊逸 一种测定烟花爆竹用硝酸锶中锶含量的方法
CN106370684A (zh) * 2016-08-31 2017-02-01 吴俊逸 一种测定烟花爆竹用钛粉中钛含量的方法
CN106290437A (zh) * 2016-08-31 2017-01-04 吴俊逸 一种测定烟花爆竹用四氧化三铁中铁含量的方法
CN106338532A (zh) * 2016-08-31 2017-01-18 吴俊逸 一种测定烟花爆竹用烟火药剂中铬含量的方法
CN106338533A (zh) * 2016-08-31 2017-01-18 吴俊逸 一种测定烟花爆竹用碳酸钡中钡含量的方法
CN106404814A (zh) * 2016-08-31 2017-02-15 吴俊逸 一种测定黑火药中钾含量的方法
CN106404815A (zh) * 2016-08-31 2017-02-15 吴俊逸 一种测定烟花爆竹用碳酸锶中锶含量的方法
CN106093098A (zh) * 2016-08-31 2016-11-09 吴俊逸 一种测定烟花爆竹用烟火药剂中铜含量的方法
CN106323929A (zh) * 2016-08-31 2017-01-11 吴俊逸 一种测定烟花爆竹用氧化铜中铜含量的方法
CN106093096A (zh) * 2016-08-31 2016-11-09 吴俊逸 一种测定烟花爆竹用硝酸钡中钡含量的方法
CN106370685A (zh) * 2016-08-31 2017-02-01 吴俊逸 一种测定工业氯化钾中钾含量的方法
CN106168587A (zh) * 2016-08-31 2016-11-30 吴俊逸 一种测定烟花爆竹用烟火药剂中铁含量的方法
CN106168586A (zh) * 2016-08-31 2016-11-30 吴俊逸 一种测定烟花爆竹用铁粉中铁含量的方法
CN106324005A (zh) * 2016-08-31 2017-01-11 吴俊逸 一种测定烟花爆竹用烟火药剂中钡含量的方法
JP6916640B2 (ja) * 2017-03-14 2021-08-11 沢井製薬株式会社 粒子径測定方法、粒子径測定装置及びそれを用いた品質管理方法
CN110487824B (zh) * 2019-08-22 2022-06-10 深圳市泛亚环境工程开发设计股份有限公司 一种移动式x射线探伤机
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Also Published As

Publication number Publication date
US9746433B2 (en) 2017-08-29
DE112015003094T5 (de) 2017-03-16
JPWO2016002357A1 (ja) 2017-04-27
US20170108424A1 (en) 2017-04-20
DE112015003094B4 (de) 2017-08-03
JP6283854B2 (ja) 2018-02-28
WO2016002357A1 (ja) 2016-01-07

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