WO2017047285A1 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
- Publication number
- WO2017047285A1 WO2017047285A1 PCT/JP2016/073368 JP2016073368W WO2017047285A1 WO 2017047285 A1 WO2017047285 A1 WO 2017047285A1 JP 2016073368 W JP2016073368 W JP 2016073368W WO 2017047285 A1 WO2017047285 A1 WO 2017047285A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- semiconductor
- type
- helium
- semiconductor layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 312
- 238000004519 manufacturing process Methods 0.000 title claims description 52
- 239000000758 substrate Substances 0.000 claims abstract description 156
- 239000001307 helium Substances 0.000 claims abstract description 155
- 229910052734 helium Inorganic materials 0.000 claims abstract description 155
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 155
- 230000007547 defect Effects 0.000 claims abstract description 59
- 238000009826 distribution Methods 0.000 claims abstract description 43
- 230000007423 decrease Effects 0.000 claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims description 30
- 230000003213 activating effect Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 377
- 239000006096 absorbing agent Substances 0.000 description 12
- 230000001133 acceleration Effects 0.000 description 11
- 238000000137 annealing Methods 0.000 description 11
- 238000011084 recovery Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 8
- 239000002344 surface layer Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- 239000000386 donor Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000000852 hydrogen donor Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000011669 selenium Substances 0.000 description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/221—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities of killers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0641—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type
- H01L27/0647—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. vertical bipolar transistor and bipolar lateral transistor and resistor
- H01L27/0652—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
- H01L27/0664—Vertical bipolar transistor in combination with diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0705—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type
- H01L27/0727—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66136—PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/8613—Mesa PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
Definitions
- the present invention relates to a semiconductor device and a method of manufacturing the semiconductor device.
- RC reverse conducting IGBT
- IGBT Insulated Gate Bipolar Transistor
- FWD Free Wheeling Diode
- FIG. 16 is a flowchart showing an outline of a method of manufacturing a conventional FS type RC-IGBT.
- MOS gate metal-oxide film-semiconductor insulated gate
- interlayer insulating film an interlayer insulating film
- front surface electrode A front surface element structure such as an electrode pad is formed (step S101).
- the semiconductor wafer is ground from the back surface side to a position of a product thickness used as a semiconductor device (step S102).
- phosphorus (P) or selenium (Se) is ion implanted from the back surface of the semiconductor wafer after grinding to form an n-type FS layer on the surface layer of the back surface of the semiconductor wafer from the IGBT region to the diode region (step S103) ).
- boron (B) is ion-implanted from the back surface of the semiconductor wafer to form ap + -type collector region from the IGBT region to the diode region at a position shallower than the n-type FS layer in the surface layer of the back surface of the semiconductor wafer.
- a resist mask having an opening at a portion corresponding to the diode region is formed on the back surface of the semiconductor wafer by photolithography (step S105).
- step S106 phosphorous is ion-implanted from the back surface of the semiconductor wafer using this resist mask as a mask, and the p + -type collector region in the diode region of the surface layer on the back surface of the semiconductor wafer is inverted to n-type to make the n + -type cathode region It forms (step S106).
- step S107 the resist mask is removed by ashing (step S107).
- the impurity ion-implanted into the semiconductor wafer is diffused by heat treatment (step S108).
- a polyimide surface protective film is formed on the front surface of the semiconductor wafer (step S109).
- the semiconductor wafer is irradiated with helium (He) or an electron beam to introduce lattice defects (crystal defects) which become lifetime killers in the n ⁇ type drift layer (step S 110).
- lattice defects caused by helium or an electron beam are recovered by heat treatment (annealing) to adjust the amount of lattice defects in the semiconductor wafer.
- the carrier lifetime is adjusted (step S111).
- step S112 a back electrode in contact with the p + -type collector region and the n + -type cathode region is formed on the back surface of the semiconductor wafer (step S112). Thereafter, the semiconductor wafer is cut (diced) into individual chips, whereby a conventional RC-IGBT is completed.
- the carrier lifetime control near the pn junction in the n - type layer on the diode side and the carrier lifetime control near the n - n + junction are both proton (H (H)
- H (H) A method of controlling by irradiating + ) from both main surfaces has been proposed (see, for example, Patent Document 1 (paragraphs 0007 and 0014, FIG. 1)).
- protons are irradiated from the main surfaces on the side closer to the pn junction and the n ⁇ n + junction in the n ⁇ -type layer, respectively.
- a He line mask is used to cover the diode area of the back of the substrate, helium is implanted into the IGBT area, and then the active area of the IGBT area of the back of the substrate is covered with the He line mask;
- a method of controlling the carrier lifetime by injecting helium into the outer edge portion of the IGBT region has been proposed (see, for example, Patent Document 2 (paragraphs 0053, 0056 to 0057, FIGS. 4 and 5)).
- Patent Document 2 the range of helium is adjusted by a He line mask, and a low lifetime region is formed over the entire collector layer of the IGBT region and all of the drift layer, FS layer, and cathode layer of the diode region. .
- the first one is located at a position slightly deeper than the p-type anode layer on the front surface and the trench gate in the MOS gate region over both the IGBT region and the diode region.
- a method of forming a second low lifetime region at a position slightly deep inside the substrate from an n-type cathode layer and a p-type collector layer on the back surface is proposed (for example, Patent Document 3 below) , 0026, 0035 to 0040, see FIG.
- the first low lifetime region is irradiated with helium (He) from the front or back surface
- the second low lifetime region is irradiated with helium (He) from the back surface to a predetermined depth.
- a method of forming the crystal defect density to be peak is described.
- the switching speed of the IGBT region can be further improved if the second low lifetime region is also provided in the diode region.
- a first low carrier lifetime region is formed in the n + -type cathode layer by particle beam irradiation such as proton irradiation or helium irradiation, and particle beam irradiation such as proton irradiation
- particle beam irradiation such as proton irradiation or helium irradiation
- particle beam irradiation such as proton irradiation
- Patent Document 4 describes that particle beam irradiation may be performed from either side of a semiconductor substrate.
- n-type FS layer when forming an n-type FS layer by ion implantation of phosphorus or selenium, it is difficult to form an n-type FS layer with good controllability deep from the back surface of the wafer. Reverse recovery vibration can not be suppressed.
- proton irradiation the n-type FS layer can be formed with good controllability.
- the irradiation depth of protons depends on the capability of the manufacturing apparatus, an expensive manufacturing apparatus capable of irradiating protons with high acceleration is required to form an n-type FS layer that extends deep from the wafer back surface. There is a problem that the cost increases.
- a semiconductor device having a semiconductor layer of the same conductivity type as the drift layer and having a higher carrier concentration than the drift layer is provided inside the drift layer.
- An object of the present invention is to provide a semiconductor device that can be improved and cost reduction, and a method of manufacturing the semiconductor device.
- a method of manufacturing a semiconductor device has the following features. First, protons are irradiated from a side of one main surface of a semiconductor substrate of a first conductivity type with a first predetermined depth as a range, and the first conductivity containing a proton and having a peak of carrier concentration at the first predetermined depth A first irradiation step of forming a first semiconductor layer of a mold is performed. Next, a first heat treatment step of activating protons by heat treatment is performed.
- helium is irradiated from a main surface side of the semiconductor substrate with a second predetermined depth deeper than the first predetermined depth as a range, and a second irradiation step of introducing lattice defects in the semiconductor substrate is performed.
- a second heat treatment step of adjusting the amount of the lattice defects in the semiconductor substrate by heat treatment is performed.
- a second semiconductor layer of a first conductivity type including protons and helium and in contact with the first semiconductor layer is formed on the other main surface side of the semiconductor substrate than the first semiconductor layer.
- the peak of the carrier concentration is lower than that of the first semiconductor layer and on the other main surface side of the semiconductor substrate. It is characterized in that the second semiconductor layer having a carrier concentration distribution which decreases with a gentle slope as compared to the first semiconductor layer is formed.
- the method further includes the step of forming a second conductivity type semiconductor region on the other main surface side of the semiconductor substrate before the first irradiation step. .
- the first semiconductor layer and the second semiconductor layer serve as a field stop layer for suppressing the extension of a depletion layer extending from the pn junction between the second conductivity type semiconductor region and the semiconductor substrate to one main surface side of the semiconductor substrate.
- a semiconductor layer is formed.
- protons are irradiated a plurality of times in different ranges, and the depths from one main surface of the semiconductor substrate are different.
- a plurality of the first semiconductor layers are formed.
- the first semiconductor layer formed at the deepest position from one main surface of the semiconductor substrate is formed by proton irradiation within a range of the first predetermined depth. It features.
- the first semiconductor layer in the second heat treatment step, may be further on one main surface side of the semiconductor substrate than the first semiconductor layer. And forming a third semiconductor layer of the first conductivity type containing proton and helium.
- the peak of the carrier concentration is lower than that of the first semiconductor layer, and on one main surface side of the semiconductor substrate.
- the third semiconductor layer may be formed to have a carrier concentration distribution that decreases with a gentle slope as it goes toward the first semiconductor layer.
- the semiconductor device has the following features.
- a first conductive first semiconductor layer containing protons is provided inside the semiconductor substrate of the first conductive type.
- the first semiconductor layer has a carrier concentration peak at a first predetermined depth from one of the main surfaces of the semiconductor substrate.
- a second semiconductor layer of a first conductivity type containing proton and helium is provided on the other main surface side of the semiconductor substrate than the first semiconductor layer. The second semiconductor layer is in contact with the first semiconductor layer.
- the peak of the carrier concentration of the second semiconductor layer is lower than that of the first semiconductor layer, and the second semiconductor layer is directed to the other main surface side of the semiconductor substrate.
- the semiconductor device is characterized by having a carrier concentration distribution which decreases at a gentle slope than the first semiconductor layer.
- the semiconductor device further includes a second conductivity type semiconductor region provided on the other main surface side of the semiconductor substrate.
- the first semiconductor layer and the second semiconductor layer suppress the extension of a depletion layer extending from a pn junction between the second conductivity type semiconductor region and the semiconductor substrate to one main surface side of the semiconductor substrate. It is characterized by being a stop layer.
- a semiconductor device is, in the above-described invention, provided with a plurality of first semiconductor layers different in depth from one main surface of the semiconductor substrate.
- the first semiconductor layer provided at the deepest position from one main surface of the semiconductor substrate has a carrier concentration peak at the first predetermined depth. Do.
- the semiconductor device according to the present invention includes a proton and helium, which are provided on one main surface side of the semiconductor substrate than the first semiconductor layer and in contact with the first semiconductor layer.
- a third semiconductor layer of a conductive type is provided.
- the peak of the carrier concentration of the third semiconductor layer is lower than that of the first semiconductor layer, and the third semiconductor layer is directed to one main surface side of the semiconductor substrate.
- the semiconductor device is characterized by having a carrier concentration distribution which decreases at a gentle slope than the first semiconductor layer.
- the non-activated protons in the first semiconductor layer are diffused in the second heat treatment step, and the diffused protons are introduced by helium irradiation in the vicinity of the first semiconductor layer.
- the second semiconductor layer containing helium may be formed in contact with the first semiconductor layer. Therefore, for example, as the field stop layer or the broad buffer layer, a thick semiconductor layer composed of the first and second semiconductor layers can be formed with good controllability regardless of the performance of the proton irradiation apparatus.
- semiconductor layers such as field stop layers and broad buffer layers having the same conductivity type as the drift layer and higher carrier concentration than the drift layer are formed inside the drift layer. There is an effect that the reliability can be improved and the cost can be reduced.
- FIG. 1 is an explanatory view of the structure of the semiconductor device according to the first embodiment.
- FIG. 2A is a flowchart schematically illustrating a method of manufacturing a semiconductor device according to the first embodiment (part 1).
- FIG. 2B is a flowchart schematically illustrating a method of manufacturing a semiconductor device according to the first embodiment (part 2).
- FIG. 3 is a cross-sectional view showing a state in the middle of manufacturing the semiconductor device according to the first embodiment.
- FIG. 4 is a cross-sectional view showing a state in the middle of manufacturing the semiconductor device according to the first embodiment.
- FIG. 5 is a characteristic diagram showing a carrier concentration distribution of the FS layer of the semiconductor device according to the first embodiment.
- FIG. 6 is a characteristic diagram showing the carrier concentration distribution of the FS layer of the semiconductor device as a comparative example.
- FIG. 7 is a characteristic diagram showing carrier concentration distribution by helium irradiation.
- FIG. 8 is an explanatory view of the structure of the semiconductor device according to the second embodiment.
- FIG. 8 is an explanatory view of the structure of the semiconductor device according to the third embodiment.
- FIG. 10 is an explanatory view showing a carrier concentration distribution of another example of the semiconductor device according to the third embodiment.
- FIG. 11 is an explanatory view of the structure of the semiconductor device according to the fourth embodiment.
- FIG. 12 is an explanatory view of the structure of the semiconductor device according to the fifth embodiment.
- FIG. 13 is a cross-sectional view showing a state in the middle of manufacturing the semiconductor device according to the fifth embodiment.
- FIG. 14 is a cross-sectional view showing a state in the middle of manufacturing the semiconductor device according to the fifth embodiment.
- FIG. 15 is a flowchart showing an outline of a method of manufacturing a semiconductor device according to the sixth embodiment.
- FIG. 16 is a flowchart showing an outline of a method of manufacturing a conventional FS type RC-IGBT.
- the layer or region having n or p it is meant that electrons or holes are majority carriers, respectively.
- + and-attached to n and p mean that the impurity concentration is higher and the impurity concentration is lower than that of the layer or region to which it is not attached, respectively.
- the same components are denoted by the same reference numerals and redundant description will be omitted.
- the first conductivity type is n-type
- the second conductivity type is p-type.
- FIG. 1 is an explanatory view of the structure of the semiconductor device according to the first embodiment.
- 1 (a) shows a sectional structure
- FIG. 1 (b) shows carriers in the depth direction from the back surface of the substrate (the boundary between the semiconductor substrate and the back surface electrode) along the cutting line AA 'in FIG. The concentration distribution is shown.
- the semiconductor device according to the first embodiment shown in FIG. 1 is an RC-IGBT in which an IGBT having a trench gate structure and a diode connected in reverse parallel to the IGBT are integrated on the same semiconductor substrate (semiconductor chip). .
- an IGBT region 21 to be an operation region of the IGBT and a diode region 22 to be an operation region of a diode are provided in parallel.
- a p-type base layer (second conductivity type semiconductor region) 2 is provided from the IGBT region 21 to the diode region 22 in the surface layer on the front surface of the semiconductor substrate to be the n ⁇ -type drift layer 1.
- the p-type base layer 2 functions as a p-type anode region in the diode region 22.
- a trench 3 which penetrates the p-type base layer 2 and reaches the n ⁇ -type drift layer 1 is provided. Trenches 3 are arranged, for example, in a striped planar layout at predetermined intervals in the direction from IGBT region 21 toward diode region 22 to separate p type base layer 2 into a plurality of regions (mesa portions).
- a gate insulating film 4 is provided along the inner wall of the trench 3, and a gate electrode 5 is provided inside the gate insulating film 4.
- the n + -type emitter region 6 and the p + -type contact region 7 are selectively provided in each mesa portion.
- the n + -type emitter region 6 faces the gate electrode 5 with the gate insulating film 4 provided on the inner wall of the trench 3 interposed therebetween.
- the n + -type emitter region 6 is not provided inside the p-type base layer 2.
- the front surface electrode 9 is in contact with the n + -type emitter region 6 and the p + -type contact region 7 via a contact hole, and is electrically insulated from the gate electrode 5 by the interlayer insulating film 8.
- the front surface electrode 9 functions as an emitter electrode in the IGBT region 21 and functions as an anode electrode in the diode region 22.
- n-type field stop (FS) layer 10 is provided inside the n ⁇ -type drift layer 1 on the back side of the substrate.
- the n-type FS layer 10 has a function of suppressing the extension of the depletion layer extending from the pn junction between the p-type base layer 2 and the n ⁇ -type drift layer 1 to the p + -type collector region 12 side when off.
- the n-type FS layer 10 includes n-type layers (first semiconductor layers) 10a to 10d having a plurality of steps (here, four steps) having different depths from the back surface of the substrate from the IGBT region 21 to the diode region 22. In FIG.
- reference numerals 10a to 10d are given in the depth direction from the back surface of the substrate in order from the first n-type layer 10a closest to the back surface of the substrate.
- the plurality of n-type layers (hereinafter referred to as first to fourth n-type layers) 10a to 10d have a plurality of protons (H + at different ranges (projected range (projected length along the incident angle)) Rp. )
- the diffusion layer containing protons includes complex defects (VOH) of protons, that is, hydrogen (H), holes (V) mainly formed at the time of proton irradiation, and oxygen (O) contained in the semiconductor substrate. It is a containing donor layer.
- a VOH complex defect is a hydrogen-related donor or a donor called a hydrogen donor, which is a defect showing a donor in silicon or a semiconductor containing silicon. Hereinafter, it will be simply called a hydrogen donor.
- the first to fourth n-type layers 10a to 10d each have a peak (maximum value) at which the proton of proton irradiation reaches (depth position for a range Rp from the back surface of the substrate), and from the peak positions It has a carrier concentration distribution that sharply decreases toward (the anode side and the cathode side).
- the peak of the carrier concentration of the first n-type layer 10a closest to the back surface of the substrate is lower than the carrier concentration of the p + -type collector region 12 and the n + -type cathode region 13 described later, and the other second to fourth n-type layers 10b to Higher than the 10 d carrier concentration peak.
- the first n-type layer 10 a may be in contact with the p + -type collector region 12 and the n + -type cathode region 13. As the first to fourth n-type layers 10a to 10d are disposed deeper from the back surface of the substrate, the peak of the carrier concentration is lower. The peak of the carrier concentration of the second to fourth n-type layers 10b to 10d may be substantially the same. By using protons, the first to fourth n-type layers 10a to 10d can be formed to a predetermined depth from the back surface of the substrate with good controllability.
- the n-type FS layer 10 has an n-type layer (hereinafter, referred to as a fifth n-type layer (second semiconductor layer)) 10 e at a position deeper than the fourth surface 10 d from the back surface of the substrate.
- the fifth n-type layer 10 e is provided in the diode region 22.
- the fifth n-type layer 10 e may extend to the vicinity of the boundary between the IGBT region 21 and the diode region 22.
- the fifth n-type layer 10 e is formed by proton irradiation for forming the fourth n-type layer 10 d and helium (He) irradiation for controlling the carrier lifetime of the n ⁇ -type drift layer 1, for example.
- He helium
- the fifth n-type layer 10 e is in contact with the anode side of the fourth n-type layer 10 d, and has a peak of carrier concentration at a position deeper than the fourth n-type layer 10 d from the back surface of the substrate.
- the fifth n-type layer 10e has a lower carrier concentration peak than that of the first to fourth n-type layers 10a to 10d due to proton irradiation, and the first to fourth n-type layers 10a to 10d move from the peak position toward the anode. It has a nearly flat carrier concentration distribution that decreases with a gentler slope.
- n ⁇ type drift layer 1 ⁇ ⁇ type drift layer 1 ⁇ ⁇ ⁇ type drift layer 1 ⁇ ⁇ ⁇ type drift layer 1 ⁇ ⁇ ⁇ ⁇ -type drift layer 1 ⁇ ⁇ -type drift layer 1 ⁇ ⁇ -type drift layer 1 .
- the carrier concentration of the n ⁇ -type drift layer 1 is lower in the portion provided with the first defect layer 11 a than in the other portions. As a result, the carrier lifetime of the n ⁇ -type drift layer 1 in the diode region 22 is shortened, and the annihilation of carriers during reverse recovery of the diode can be accelerated to reduce reverse recovery loss.
- the carrier concentration of the n ⁇ -type drift layer 1 is lower than the carrier concentration of the semiconductor substrate (the carrier concentration of the ingot) in the portion provided with the first defect layer 11 a and the semiconductor substrate in the portion provided with the n-type FS layer 10 Is higher than the carrier concentration of As a result, in the diode region 22, the carrier lifetime becomes longer on the cathode side than on the anode side of the n ⁇ -type drift layer 1. Therefore, the oscillation of the current / voltage waveforms Irp and Vrp during reverse recovery of the diode and the surge (transient abnormal voltage dV / dt) due to the oscillation of the voltage waveform Vrp are less likely to occur.
- the n-type FS layer 10 has a wider carrier concentration distribution that reaches from the back surface of the substrate to a deeper position than in the conventional, so that soft recovery reverse recovery current / voltage Waveforms Irp and Vrp are obtained.
- FIG. 1 shows a state in which the second defect layer 11 b is formed in the vicinity of the second n-type layer 10 b. In this case, the carrier concentration in the vicinity of the second n-type layer 10b can be reduced and adjusted.
- the p + -type collector region 12 is provided in the IGBT region 21 and the n + -type cathode region 13 is provided in the diode region 22 at a position shallower than the n-type FS layer 10 in the surface layer on the back surface of the semiconductor substrate. .
- the n + -type cathode region 13 is adjacent to the p + -type collector region 12.
- the p + -type collector region 12 and the n + -type cathode region 13 may be in contact with the first n-type layer 10 a closest to the rear surface of the n-type FS layer 10.
- the back surface electrode 14 is provided on the front surface (the entire back surface of the n ⁇ -type semiconductor substrate) of the p + -type collector region 12 and the n + -type cathode region 13.
- the back surface electrode 14 functions as a collector electrode in the IGBT region 21 and functions as a cathode electrode in the diode region 22.
- FIGS. 2A and 2B are flowcharts showing an outline of a method of manufacturing a semiconductor device according to the first embodiment.
- 3 and 4 are cross-sectional views showing a state in the middle of manufacturing the semiconductor device according to the first embodiment.
- the trench 3, the gate insulating film 4 and the gate electrode 5 are sequentially formed by a general method on the front surface side of the n ⁇ type semiconductor substrate (semiconductor wafer) to be the n ⁇ type drift layer 1.
- a MOS gate is formed (step S1).
- the p-type base layer 2 is formed to a depth shallower than the trench 3 in the surface layer of the entire front surface of the substrate by ion implantation of p-type impurities such as boron (B) (step S2).
- n + -type emitter region 6 is selectively formed in p-type base layer 2 of IGBT region 21 by ion implantation of n-type impurities such as phosphorus (P) and arsenic (As) (step S3).
- p + -type contact region 7 is selectively formed in p-type base layer 2 of IGBT region 21 by ion implantation of p-type impurity such as boron (step S4). At this time, the p + -type contact region 7 may be selectively formed in the p-type base layer 2 of the diode region 22.
- an interlayer insulating film 8 such as a BPSG film is deposited (formed) so as to cover the gate electrode 5 (step S5).
- the interlayer insulating film 8 is patterned to form a contact hole, and the n + -type emitter region 6 and the p + -type contact region 7 are exposed in the IGBT region 21 and the p-type base layer 2 in the diode region 22 is exposed.
- a plug electrode (not shown) is formed inside the contact hole via a barrier metal (not shown) (step S7).
- the front surface electrode 9 is formed on the entire surface of the interlayer insulating film 8 so as to be in contact with the plug electrode inside the contact hole, for example, by sputtering (step S8).
- the semiconductor substrate is ground from the back surface side to a position of a product thickness used as a semiconductor device (step S9).
- p-type impurities such as boron are ion implanted into the entire back surface of the substrate to form the p + -type collector region 12 in the surface layer of the entire back surface of the substrate (step S10).
- a resist mask (not shown) having an opening at a portion corresponding to the diode region is formed on the rear surface of the substrate by photolithography (step S11).
- the resist mask by ion-implanting the n-type impurity as a mask such as phosphorus, etc., of the substrate back surface of the surface layer, and a p + -type collector region 12 is inverted to n-type in the diode region 22 n + -type cathode region 13 are formed (step S12).
- the resist mask is removed by an ashing process (step S13).
- the p + -type collector region 12 and the n + -type cathode region 13 are activated by laser annealing (step S14).
- the entire front surface of the substrate is covered with a surface protection film (not shown) such as a polyimide film, for example, and then the surface protection film is patterned to expose the surface electrodes 9 and the respective electrode pads (step S15). ).
- step S16 protons are irradiated from the back side of the substrate to form the n-type FS layer 10 (step S16).
- step S16 for example, proton irradiation is performed a plurality of times (for example, four times here) having different ranges Rp from the back surface of the substrate, and a plurality of n stages of n-type FS layers 10 having different depths from the back surface of the substrate Form a mold layer.
- the range Rp of each proton irradiation may be adjusted by irradiating protons directly from the back surface of the substrate at different acceleration voltages.
- an n-type layer with a half width of about 3 ⁇ m having a peak of carrier concentration at a depth of about 60 ⁇ m from the irradiation surface is formed.
- the acceleration voltage for proton irradiation is about 8 MeV
- an n-type layer with a half width of about 10 ⁇ m having a peak of carrier concentration at a depth of about 60 ⁇ m from the irradiation surface is formed.
- the acceleration voltage may be fixed, and the ranges Rp of each proton irradiation may be adjusted by irradiating protons via absorbers of different thicknesses.
- the acceleration voltage for proton irradiation constant at about 4.3 MeV and the absorber thickness at about 95 ⁇ m, an n-type with a half width of about 10 ⁇ m having a peak of carrier concentration at a depth of about 60 ⁇ m from the irradiated surface A layer is formed.
- the absorber is, for example, a member made of a material such as aluminum (Al) having a stopping power comparable to that of the semiconductor substrate.
- the dose amount is set lower as the range Rp from the back surface of the substrate becomes longer in plural times of proton irradiation.
- step S16 the dose of proton irradiation for forming the first n-type layer 10a closer to the back surface of the substrate is higher than the dose of proton irradiation for forming the other second to fourth n-type layers 10b to 10d.
- the dose of proton irradiation for forming the other second to fourth n-type layers 10b to 10d may be substantially the same.
- the order of forming the plurality of n-type layers can be changed variously.
- protons in the semiconductor substrate are activated by heat treatment (annealing) (step S17).
- first helium irradiation 31 is performed from the back surface of the substrate to a position deeper than the range Rp of proton irradiation in step S16. Then, a lattice defect serving as a lifetime killer is introduced into the n ⁇ -type drift layer 1 in the vicinity of the boundary between the IGBT region 21 and the diode region 22 (step S18).
- the range of the first helium irradiation 31 is deeper from the rear surface of the substrate than the end of the fourth n-type layer 10 d on the anode side. At this time, it is preferable to adjust the range of the first helium irradiation 31 using the absorber 32 so that helium does not reach the MOS gate on the front side of the substrate.
- step S18 a material having a stopping power similar to that of the semiconductor substrate, such as aluminum, between the semiconductor substrate and the absorber 32 so that no lattice defect is introduced into the portion of the IGBT region 21 where the lattice defect is not introduced.
- a thick metal plate 33 made of The metal plate 33 is, for example, a member having a substantially circular planar shape capable of covering the entire back surface of the substrate, and has an opening 33a that exposes the irradiation area of the first helium irradiation 31 on the back surface of the substrate.
- a large number of lattice defects are introduced into the arrival position of helium (the depth position for the range Rp of the first helium irradiation 31 (hereinafter referred to as the first helium arrival position)) 31a by the first helium irradiation 31, and the carrier concentration is Will drop significantly.
- lattice defects are formed in the entire region 31b where helium passes (the region from the back surface of the substrate to the first helium arrival position 31a (hereinafter, the first helium passage region)) 31b. That is, the first defect layer 11a is formed at the first helium arrival position 31a.
- the carrier concentration of the portion away from the first helium arrival position 31a also decreases slightly.
- the portion distant from the helium arrival position is a portion of the helium passage region that is closer to the substrate backside than the portion showing the depression of the carrier concentration distribution centered on the helium arrival position where the carrier concentration is a minimum value.
- step S 18 helium is irradiated from the back surface of the substrate (hereinafter referred to as second helium irradiation) 34 to form p + -type collector region 12 and n ⁇ of n ⁇ type drift layer 1.
- a lattice defect may be introduced near the boundary with the + type cathode region 13 to adjust the switching characteristics of the RC-IGBT.
- the range Rp of the second helium irradiation 34 is adjusted using, for example, the absorber 35.
- the second helium irradiation 34 Due to the second helium irradiation 34, many lattice defects are further introduced into the arrival position of helium (depth position for the range Rp of the second helium irradiation 34 (hereinafter referred to as second helium arrival position)) 34a, Carrier concentration is significantly reduced. That is, the second defect layer 11 b is formed at the second helium arrival position 34 a. In addition, a lattice defect is introduced in the entire region 34b through which helium passes (the region from the back surface of the substrate to the second helium arrival position 34a (hereinafter referred to as second helium passage region)) 34b, away from the second helium arrival position 34a The carrier concentration of the portion also decreases slightly. In FIG. 4, the hatched portion is the first helium passage region 31 b by the first helium irradiation 31.
- the lattice defects due to the first and second helium irradiations 31 and 34 are recovered by heat treatment (annealing) to adjust the amount of lattice defects in the semiconductor substrate, thereby adjusting the carrier lifetime (step S19).
- the non-activated protons in the fourth n-type layer 10d are diffused, and the fourth n-type layer 10d is in contact with the fourth n-type layer 10d on the anode side of the fourth n-type layer 10d and toward the anode side.
- a fifth n-type layer 10 e is formed which has a carrier concentration distribution which decreases with a gentler slope (see FIG. 1).
- the fifth n-type layer 10e is formed in the first helium passage region 31b, and protons and helium coexist in the fifth n-type layer 10e.
- the non-activated protons in the first to fourth n-type layers 10a to 10d are diffused, and the lattice defects in the first and second helium passage regions 31b and 34b are recovered by the diffusion of the protons.
- lattice defects remain at the first and second helium arrival positions 31a and 34a, and the state in which the carrier concentration is significantly reduced is maintained.
- the back electrode 14 in contact with the p + -type collector region 12 and the n + -type cathode region 13 is formed on the entire back surface of the semiconductor substrate (step S20). Thereafter, the semiconductor wafer is cut (diced) into individual chips, whereby an RC-IGBT having a trench gate structure shown in FIG. 1 is completed.
- Example 1 The carrier concentration distribution of the n-type FS layer 10 was verified.
- FIG. 5 is a characteristic diagram showing a carrier concentration distribution of the FS layer of the semiconductor device according to the first embodiment.
- FIG. 6 is a characteristic diagram showing the carrier concentration distribution of the FS layer of the semiconductor device as a comparative example.
- an RC-IGBT having a trench gate structure was manufactured (manufactured) under the above conditions (hereinafter referred to as Example 1).
- an RC-IGBT was manufactured using a silicon wafer (semiconductor substrate) cut (sliced) from an ingot manufactured by an MCZ (Magnetic field applied Czochralski) method.
- the specific resistance of the silicon wafer is 38 ⁇ cm (converted carrier concentration (carrier concentration of ingot) is 1.13 ⁇ 10 14 / cm 3 ), and the thickness is 70 ⁇ m.
- first to fourth n-type layers 10a to 10d are formed as the n-type FS layer 10 by four times of proton irradiation with different accelerating voltages.
- the proton irradiation for forming the first n-type layer 10a has an acceleration voltage of 0.40 MeV and a dose of 3.0 ⁇ 10 14 / cm 2 so that the range Rp from the back surface of the wafer is about 4 ⁇ m.
- the proton irradiation for forming the second n-type layer 10b has an acceleration voltage of 0.82 MeV and a dose of 1.0 ⁇ 10 13 / cm 2 so that the range Rp from the back surface of the wafer is about 10 ⁇ m. .
- the proton irradiation for forming the third n-type layer 10c has an acceleration voltage of 1.10 MeV and a dose of 7.0 ⁇ 10 12 / cm 2 so that the range Rp from the back surface of the wafer is about 18 ⁇ m. .
- the proton irradiation for forming the fourth n-type layer 10d has an acceleration voltage of 1.45 MeV and a dose of 1.0 ⁇ 10 13 / cm 2 so that the range Rp from the back surface of the wafer is about 28 ⁇ m. .
- step S17 annealing for activating protons was performed at a temperature of 380 ° C. for 5 hours.
- the first and second helium irradiations 31 and 34 are performed.
- the first helium irradiation 31 was adjusted with an absorber so that the dose amount was 9.0 ⁇ 10 10 / cm 2 and the range Rp from the back surface of the wafer was about 58 ⁇ m.
- the second helium irradiation 34 was adjusted by an absorber so that the dose amount was 5.0 ⁇ 10 10 / cm 2 and the range Rp from the back surface of the wafer was about 10 ⁇ m.
- annealing for recovering lattice defects by the first and second helium irradiations 31 and 34 is performed at a temperature of 360 ° C. for one hour.
- a RC-IGBT having a trench gate structure as a comparative example was manufactured.
- the comparative example is different from the example 1 in that the heat treatment for recovering lattice defects caused by helium in the first and second helium irradiations 31 and 34 in step S18 and in step S19 is not performed.
- the conditions of the comparative example except that the processes of steps S18 and S19 are not performed are the same as those of the first embodiment.
- carrier concentration distribution was measured by a spreading resistance measurement (SR: Spreading Resistance) method about these Example 1 and a comparative example. The results are shown in FIGS. In FIG.
- n-type layers 100a to 100d are formed as the n-type FS layer, and carriers in a portion deeper than the fourth n-type layer 100d disposed at the deepest position from the wafer back surface. It was confirmed that the concentration was the same as the carrier concentration of the silicon wafer (the carrier concentration of the n ⁇ -type drift layer 101).
- Reference numeral 113 is an n + -type cathode region.
- the silicon wafer is 10 .mu.m thick (width) t1 at a deeper position on the anode side than the fourth n-type layer 10d disposed at the deepest position from the wafer back surface. It was confirmed that a region (fifth n-type layer 10e) having a higher carrier concentration than the carrier concentration (the carrier concentration of n -- type drift layer 101) was formed. The fifth n-type layer 10 e was confirmed to have a carrier concentration peak at a position deeper than the fourth n-type layer 10 d disposed at the deepest position from the wafer back surface (depth of 35.1 ⁇ m from the wafer back surface). .
- the peak of the carrier concentration of the fifth n-type layer 10 e is 1.81 ⁇ 10 14 / cm 3 , which is lower than the peak of the carrier concentration of the first to fourth n-type layers 10 a to 10 d.
- the fifth n-type layer 10e is thicker (wider) than the thickness (half-width) t2 of the fourth n-type layer 10d, and decreases with a gentle slope than the fourth n-type layer 10d toward the anode. It was confirmed to have a concentration distribution.
- FIG. 7 is a characteristic diagram showing carrier concentration distribution by helium irradiation.
- a monitor wafer semiconductor substrate on which only the first and second helium irradiations 31 and 34 of step S18 of the method for manufacturing a semiconductor device according to the first embodiment described above were performed was prepared (hereinafter referred to as Example 2).
- Example 2 a silicon wafer (semiconductor substrate) cut from an ingot manufactured by the MCZ method was used as a monitor wafer.
- the specific resistance of the silicon wafer is 54.6 ⁇ cm (converted carrier concentration is 7.9 ⁇ 10 13 / cm 3 ).
- the first helium irradiation 31 was adjusted with an absorber so that the dose amount was 9.0 ⁇ 10 10 / cm 2 and the range Rp from the back surface of the wafer was about 110 ⁇ m.
- the second helium irradiation 34 was adjusted by an absorber so that the dose amount was 1.1 ⁇ 10 11 / cm 2 and the range Rp from the back surface of the wafer was about 10 ⁇ m.
- the first and second defect layers 11a and 11b each having a half width of 7 ⁇ m were formed by using helium 3 ( 3 He) for both the first and second helium irradiations 31 and 34.
- the annealing in step S19 is not performed.
- the carrier concentration distribution in the vicinity of the wafer center was measured by the SR method in the second embodiment. The results are shown in FIG.
- the carrier concentration is significantly reduced at the first helium arrival position 31 a where the first defect layer 11 a is formed by the first helium irradiation 31. Also, it was confirmed that a lattice defect was formed in the entire first helium passage region 31b by the first helium irradiation 31, and the carrier concentration in the portion away from the first helium arrival position 31a was slightly reduced.
- the carrier concentration distribution of the portion 41 away from the first helium arrival position 31a in the first helium passage region 31b by the first helium irradiation 31 gradually decreases from the wafer back surface side toward the first helium arrival position 31a side It is confirmed that you are doing.
- the concentration gradient in the direction from the first helium arrival position 31a toward the wafer backside was 6.23 ⁇ 10 13 / cm 3 to 7.27 ⁇ 10 13 / cm 3 .
- the carrier concentration is significantly reduced at the portion on the wafer back surface side (the second helium arrival position 34 a) of the first helium passage region 31 b due to the second helium irradiation 34.
- the first helium passage region 31 b has a carrier concentration distribution which gradually decreases from the back surface of the wafer toward the first helium arrival position 31 a.
- the carrier concentration at the first helium arrival position 31a can be significantly reduced and, of the first helium passage region 31b, It has been confirmed that the carrier concentration of the portion away from the first helium arrival position 31a can be slightly reduced.
- the carrier concentration of the portion 42 deeper than the first helium arrival position 31a from the back surface of the wafer is the same as the carrier concentration of the silicon wafer (corresponding to the carrier concentration of the n ⁇ -type drift layer 1). It was confirmed that they were not affected by 31, 34.
- the carrier concentration was significantly reduced also at the second helium arrival position 34 a where the second defect layer 11 b is formed by the second helium irradiation 34. It has been confirmed that a lattice defect is also formed over the entire second helium passage region 34b by the second helium irradiation 34, and the carrier concentration in the portion away from the second helium arrival position 34a is slightly reduced.
- the carrier concentration of the portion 43 on the wafer rear surface side with respect to the second helium arrival position 34 a was 5.0 ⁇ 10 13 / cm 3 .
- protons are irradiated from the back surface of the substrate and helium is irradiated and annealed at a deeper range than the proton irradiation, thereby forming protons formed by proton irradiation.
- An n-type layer containing proton and helium can be formed as an n-type FS layer at a position deeper from the back surface of the substrate than the n-type layer contained.
- the n-type layer containing this proton and helium is in contact with the n-type layer by proton irradiation, and has a carrier concentration distribution which decreases with a gentle slope than the n-type layer by proton irradiation toward the front side of the substrate. .
- n-type FS layer consisting of an n-type layer containing proton and an n-type layer containing proton and helium at a deep position from the back surface of the substrate inside the n - type drift layer it can.
- the n-type FS layer can be formed with good controllability, reaching the deep position from the back surface of the substrate by proton irradiation and helium irradiation, so that the reliability of the RB-IGBT can be improved. it can.
- a type FS layer can be formed. For this reason, it is not necessary to use the expensive manufacturing apparatus which can irradiate a proton with high acceleration rather than a general proton irradiation apparatus, and the increase in cost can be prevented.
- FIG. 8 is an explanatory view of the structure of the semiconductor device according to the second embodiment.
- FIG. 8 (a) shows a cross sectional structure
- FIG. 8 (b) shows a carrier concentration distribution in the depth direction from the back surface of the substrate taken along the line BB 'in FIG. 8 (a).
- the semiconductor device according to the second embodiment is one in which the first embodiment is applied to an RC-IGBT in which an n-type layer (hereinafter referred to as a first n-type layer) 50a formed by proton irradiation is one stage.
- a first n-type layer hereinafter referred to as a first n-type layer
- the n-type FS layer 50 includes a first step n-type layer 50a by proton irradiation and an n-type layer 50b by proton irradiation and helium irradiation (hereinafter referred to as a second n-type layer).
- a first step n-type layer 50a by proton irradiation and an n-type layer 50b by proton irradiation and helium irradiation hereinafter referred to as a second n-type layer.
- the first n-type layer 50 a is provided at a position near the back surface of the substrate inside the n ⁇ -type drift layer 1, that is, in the vicinity of the p + -type collector region 12 and the n + -type cathode region 13.
- the first n-type layer 50a may be provided under the same conditions as the n-type layer closest to the back surface of the substrate among the plurality of n-type layers constituting the n-type FS layer in the first embodiment.
- the second n-type layer 50 b is a diffusion containing proton and helium formed by proton irradiation to form the first n-type layer 50 a and the first helium irradiation 31 (or the second helium irradiation 34 or both) It is a layer.
- the range of the first helium irradiation 31 (or the second helium irradiation 34 or both) is deeper than the range Rp of proton irradiation from the rear surface of the substrate.
- the second n-type layer 50 b is provided at a deeper position than the first n-type layer 50 a from the back surface of the substrate.
- the second n-type layer 50b is in contact with the anode side of the first n-type layer 50a, and has a peak of carrier concentration at a position deeper than the first n-type layer 50a from the back surface of the substrate.
- the second n-type layer 50b has a carrier concentration peak lower than that of the first n-type layer 50a, and is substantially flat and decreases at a gentle slope as compared to the first n-type layer 50a from the peak position to the anode side. It has carrier concentration distribution.
- the thickness t3 of the second n-type layer 50b may be thicker than the thickness t4 of the first n-type layer 50a (t3> t4).
- the proton irradiation in step S16 may be performed only once in the method of manufacturing the semiconductor device according to the first embodiment (see FIG. 2B).
- the carrier concentration distribution on the anode side of the n-type FS layer in the vicinity of the p + -type collector region and the n + -type cathode region of the n ⁇ -type drift layer in the depth direction It is possible to make a smooth impurity concentration distribution with a relatively wide width (thickness). Therefore, the switching characteristics of the RC-IGBT can be adjusted.
- FIG. 9 is an explanatory view of the structure of the semiconductor device according to the third embodiment.
- FIG. 9 (a) shows a cross sectional structure
- FIG. 9 (b) shows a carrier concentration distribution in the depth direction from the back surface of the substrate along the cutting line CC 'in FIG. 9 (a).
- the semiconductor device according to the third embodiment differs from the semiconductor device according to the second embodiment in a predetermined position deep from the back surface of the substrate inside the n ⁇ type drift layer 1 (for example, a depth of about 30 ⁇ m to 60 ⁇ m from the back surface of the substrate) Or a broad buffer structure in which one n-type FS layer 51 is provided as a broad buffer layer at a depth of about 60 ⁇ m or more.
- the broad buffer structure is a structure provided with a broad buffer layer having a peak at the center in the depth direction and having a carrier concentration distribution which decreases from the peak position toward both main surface sides of the substrate.
- the n-type FS layer 51 includes the first n-type layer 51a by proton irradiation and the n-type layers by proton irradiation and helium irradiation (hereinafter referred to as second and third n-type layers Layers 51b and 51c).
- the first n-type layer 51 a is provided at a deep position from the back surface of the substrate inside the n ⁇ -type drift layer 1 from the IGBT region 21 to the diode region 22.
- the first n-type layer 51a is a diffusion layer containing protons, which is formed by one proton irradiation.
- the n-type FS layer 51 has second and third n-type layers 51b and 51c on both substrate main surface sides of the first n-type layer 51a.
- the second and third n-type layers 51 b and 51 c are diffusion layers formed by proton irradiation and first helium irradiation 31 and containing proton and helium. That is, as in the first embodiment, the second and third n-type layers 51b and 51c are provided at a deeper position from the back surface of the substrate than the range Rp of proton irradiation, as in the first embodiment.
- the second and third n-type layers 51 b and 51 c are provided in the diode region 22.
- the second and third n-type layers 51 b and 51 c may extend to the vicinity of the boundary between the IGBT region 21 and the diode region 22.
- the second n-type layer 51b is in contact with the anode side of the first n-type layer 51a, and has a peak of carrier concentration at a position deeper than the first n-type layer 51a from the back surface of the substrate.
- the second n-type layer 51b has a lower carrier concentration peak than that of the first n-type layer 51a due to proton irradiation, and decreases with a gentle slope as it goes from the peak position to the anode side than the first n-type layer 51a. It has a substantially flat carrier concentration distribution.
- the third n-type layer 51c is in contact with the cathode side of the first n-type layer 51a, and has a peak of carrier concentration at a position deeper than the first n-type layer 51a from the back surface of the substrate.
- the third n-type layer 51c has a lower carrier concentration peak than that of the first n-type layer 51a due to proton irradiation, and decreases with a gentle slope from the peak position toward the cathode side as compared to the first n-type layer 51a. It has a substantially flat carrier concentration distribution.
- the thicknesses t5 and t6 of the second and third n-type layers 51b and 51c may be larger than the thickness t7 of the first n-type layer 51a (t5> t7 and t6> t7). Further, the n-type FS layer 51 has the second and third n-type layers 51b and 51c, so that the thickness t8 is relatively large.
- proton irradiation in step S16 may be performed at a deeper range Rp from the back surface of the substrate than in the second embodiment.
- the non-activated protons in the first n-type layer 51a are diffused in the diode region 22 to the both substrate main surface sides of the first n-type layer 51a by the annealing in step S19.
- the carrier concentration has a peak on each of the substrate main surface sides of the first n-type layer 51a, and the carrier concentration decreases with a gentle slope compared to the first n-type layer 51a from the peak position to each substrate main surface side.
- Two n-type layers having a distribution are formed in the diode region 22.
- the two n-type layers are the second and third n-type layers 51 b and 51 c.
- FIG. 10 is an explanatory view showing a carrier concentration distribution of another example of the semiconductor device according to the third embodiment.
- the defect layer 11b is not shown.
- 10 (a) and 10 (b) show carrier concentration distributions in the depth direction from the back surface of the substrate in the diode region 22.
- the range of the first helium irradiation 31 (the first helium passage region 31d of the first helium irradiation 31) is in the vicinity of the range Rp of proton irradiation and the range Rp of proton irradiation It may be shallow from the back side of the substrate.
- the third n-type layer 51c containing proton and helium is formed only on the cathode side of the first n-type layer 51a.
- the configuration of the third n-type layer 51c is similar to, for example, the third n-type layer 51c of the semiconductor device according to the third embodiment shown in FIG.
- the range of the first helium irradiation 31 (the first helium passage region 31e of the first helium irradiation 31) is in the vicinity of the range Rp of the proton irradiation and the flying of the proton irradiation.
- the depth may be deeper from the rear surface of the substrate than Rp.
- second and third n-type layers 51d and 51c containing proton and helium are formed on the anode side and the cathode side of the first n-type layer 51a, respectively.
- the second n-type layer 51 d on the anode side is located in the range of the half width of the peak of the defect layer formed by the first helium irradiation 31 and contains many lattice defects. For this reason, the second n-type layer 51d has a higher carrier concentration peak than the third n-type layer 51c on the cathode side, is steeper than the third n-type layer 51c, and has a peak higher than the first n-type layer 51a It also has a carrier concentration distribution that decreases with a gentle slope.
- the configuration of the third n-type layer 51c is similar to, for example, the third n-type layer 51c of the semiconductor device according to the third embodiment shown in FIG.
- the same effect as that of the first embodiment can be obtained.
- the first n-type layer by proton irradiation in which the carrier concentration decreases at a steep slope from the peak position as in the conventional case and the first n-type layer are in contact with the first n-type layer.
- a broad buffer layer can be formed having the second and third n-type layers in which the carrier concentration gradually decreases.
- the semiconductor device of the broad buffer structure can obtain a soft recovery reverse recovery current / voltage waveform at high speed operation and has a high effect of suppressing oscillation of the reverse recovery current / voltage waveform. Therefore, it is possible to provide a power semiconductor device such as an IGBT having high speed, low loss, and soft recovery characteristics, which is useful for a power control device or the like.
- FIG. 11 is an explanatory view of the structure of the semiconductor device according to the fourth embodiment.
- FIG. 11 (a) shows a cross sectional structure
- FIG. 11 (b) shows a carrier concentration distribution in the depth direction from the rear surface of the substrate along the cutting line DD 'in FIG. 11 (a).
- the semiconductor device according to the fourth embodiment is different from the semiconductor device according to the third embodiment in that two n-type FS layers (hereinafter referred to as first and second n-type FS layers) 51 having different depths from the back surface of the substrate. , 52 are provided.
- first and second n-type FS layers two n-type FS layers
- the configuration of the first n-type FS layer 51 is, for example, the same as the n-type FS layer of the third embodiment.
- the second n-type FS layer 52 has a plurality of steps (here, four steps) of n-type layers 52a to 52d having different depths from the back surface of the substrate.
- the plurality of n-type layers (hereinafter referred to as first to fourth n-type layers) 52a to 52d of the second n-type FS layer 52 are diffusion layers formed by plural times of proton irradiation with different ranges Rp.
- the configuration of the second n-type FS layer 52 is, for example, the same as the first to fourth n-type layers formed by proton irradiation among the plurality of n-type layers forming the n-type FS layer of the first embodiment. It may be.
- reference numerals 52a to 52d are given in the depth direction from the rear surface of the substrate in order from the first n-type layer 52a closest to the rear surface of the substrate.
- the first n-type of the first n-type FS layer 51 is irradiated with protons (a plurality of proton irradiations) in step S16.
- the layer 51a may be formed, and the first to fourth n-type layers 52a to 52d of the second n-type FS layer 52 may be formed.
- FIG. 11 shows a state in which the second defect layer 11b by the second helium irradiation 34 in step S18 is formed in the vicinity of the second n-type layer 52b (the same applies to FIGS. 12 and 14).
- FIG. 12 is an explanatory view of the structure of the semiconductor device according to the fifth embodiment.
- 13 and 14 are cross-sectional views showing the semiconductor device according to the fifth embodiment in the process of being manufactured.
- the semiconductor device according to the fifth embodiment is different from the semiconductor device according to the fourth embodiment in the second and third n-type layers (n-type layer by proton irradiation and helium irradiation) 51e constituting the first n-type FS layer 51.
- 51 f is provided from the IGBT region 21 to the diode region 22.
- the first n-type layer (by proton irradiation) 51a of the first n-type FS layer 51 is in a state of being sandwiched by the second and third n-type layers 51e and 51f respectively disposed on the substrate main surface side.
- the first defect layer 11 a is provided from the IGBT region 21 to the diode region 22.
- the first helium irradiation 31 in step S18 may be performed from the IGBT region 21 to the diode region 22. That is, as shown in FIG. 13, in the first helium irradiation 31 of step S18, a thick metal plate (see FIG. 3) is not arranged between the semiconductor substrate and the absorber 32. Thereby, as shown in FIG. 14, the entire IGBT region 21 and the diode region 22 become the first helium passage region 31 b (hatched portion with diagonal lines).
- FIG. 14 shows a state in which the second helium irradiation 34 is performed in step S18. Therefore, second and third n-type layers 51e and 51f are formed over the diode region 22 and the IGBT region 21 respectively on the substrate main surface side of the first n-type layer 51a by annealing in step S19.
- the fifth embodiment may be applied to the first to third embodiments, and the n-type layer by proton irradiation and helium irradiation formed in each of the first to third embodiments may be formed from the IGBT region 21 to the diode region 22. .
- FIG. 15 is a flowchart showing an outline of a method of manufacturing a semiconductor device according to the sixth embodiment.
- the semiconductor device manufacturing method according to the sixth embodiment is different from the semiconductor device manufacturing method according to the first embodiment in that the order of proton irradiation and helium irradiation is changed. That is, proton irradiation is performed after helium irradiation.
- steps from formation of a MOS gate (step S1) to formation of a surface protective film (step S15) are sequentially performed.
- step S21 helium irradiation is performed.
- step S21 The method and conditions of the helium irradiation in step S21 are the same as the helium irradiation in the first embodiment.
- step S22 proton irradiation is performed (step S22).
- step S23 the protons in the semiconductor substrate are activated by heat treatment (annealing), and lattice defects caused by helium irradiation are recovered (step S23).
- step S21 heat treatment for recovering lattice defects caused by helium irradiation is not performed before proton irradiation in step S22.
- the annealing conditions in step S23 are, for example, the same as the annealing conditions for activating the protons in the first embodiment.
- the method of manufacturing a semiconductor device according to the sixth embodiment may be applied when manufacturing the semiconductor devices according to the second to fifth embodiments.
- the effects of the structure of the semiconductor device of the first to fifth embodiments can be obtained.
- the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.
- the trench gate structure RC-IGBT is described as an example in each embodiment described above, the present invention can be applied to various semiconductor devices provided with an n-type FS layer such as an IGBT alone or a diode alone.
- the case of performing the first helium irradiation to control the carrier lifetime is described as an example, but the n-type including proton and helium to be the n-type FS layer is described.
- First helium irradiation may be performed for the purpose of forming a layer.
- the semiconductor device and the method for manufacturing the semiconductor device according to the present invention are useful for a power semiconductor device used for a power conversion device such as an inverter or a power supply device such as various industrial machines.
Abstract
Description
実施の形態1にかかる半導体装置の構造について、RC-IGBTを例に説明する。図1は、実施の形態1にかかる半導体装置の構造を示す説明図である。図1(a)には断面構造を示し、図1(b)には図1(a)の切断線A-A'における基板裏面(半導体基板と裏面電極との境界)から深さ方向のキャリア濃度分布を示す。図1に示す実施の形態1にかかる半導体装置は、トレンチゲート構造のIGBTと、このIGBTに逆並列に接続したダイオードとを同一の半導体基板(半導体チップ)上に一体化したRC-IGBTである。具体的には、同一の半導体基板上に、IGBTの動作領域となるIGBT領域21と、ダイオードの動作領域となるダイオード領域22と、が並列に設けられている。
n型FS層10のキャリア濃度分布について検証した。図5は、実施例1にかかる半導体装置のFS層のキャリア濃度分布を示す特性図である。図6は、比較例となる半導体装置のFS層のキャリア濃度分布を示す特性図である。まず、上述した実施の形態1にかかる半導体装置の製造方法にしたがい、上記諸条件でトレンチゲート構造のRC-IGBTを作製(製造)した(以下、実施例1とする)。具体的には、実施例1においては、MCZ(Magnetic field applied Czochralski)法により作製したインゴットから切断(スライシング)したシリコンウエハ(半導体基板)を用いてRC-IGBTを作製した。シリコンウエハの比抵抗を38Ωcm(換算したキャリア濃度(インゴットのキャリア濃度)は1.13×1014/cm3)であり、厚さを70μmとした。
次に、第1ヘリウム照射31によるキャリア濃度変化について検証した。図7は、ヘリウム照射によるキャリア濃度分布を示す特性図である。まず、上述した実施の形態1にかかる半導体装置の製造方法のステップS18の第1,2ヘリウム照射31,34のみを行ったモニターウエハ(半導体基板)を用意した(以下、実施例2とする)。実施例2においては、モニターウエハとして、MCZ法により作製したインゴットから切断したシリコンウエハ(半導体基板)を用いた。シリコンウエハの比抵抗は54.6Ωcm(換算したキャリア濃度は7.9×1013/cm3)である。第1ヘリウム照射31は、ドーズ量を9.0×1010/cm2とし、ウエハ裏面からの飛程Rpが110μm程度となるようにアブソーバーで調整した。第2ヘリウム照射34は、ドーズ量を1.1×1011/cm2とし、ウエハ裏面からの飛程Rpが10μm程度となるようにアブソーバーで調整した。第1,2ヘリウム照射31,34ともにヘリウム3(3He)を用い、それぞれ半値幅7μmの第1,2欠陥層11a,11bを形成した。ステップS19のアニールは行っていない。そして、この実施例2についてSR法によりウエハ中心付近のキャリア濃度分布を測定した。その結果を図7に示す。
次に、実施の形態2にかかる半導体装置の構造について説明する。図8は、実施の形態2にかかる半導体装置の構造を示す説明図である。図8(a)には断面構造を示し、図8(b)には図8(a)の切断線B-B'における基板裏面から深さ方向のキャリア濃度分布を示す。実施の形態2にかかる半導体装置は、プロトン照射により形成するn型層(以下、第1n型層とする)50aを1段としたRC-IGBTに実施の形態1を適用したものである。実施の形態2においては、n型FS層50は、プロトン照射による1段の第1n型層50aと、プロトン照射およびヘリウム照射によるn型層(以下、第2n型層とする)50bと、を有する。
次に、実施の形態3にかかる半導体装置の構造について説明する。図9は、実施の形態3にかかる半導体装置の構造を示す説明図である。図9(a)には断面構造を示し、図9(b)には図9(a)の切断線C-C'における基板裏面から深さ方向のキャリア濃度分布を示す。実施の形態3にかかる半導体装置が実施の形態2にかかる半導体装置と異なる点は、n-型ドリフト層1の内部の基板裏面から深い所定位置(例えば基板裏面から例えば30μm~60μm程度の深さ、または60μm以上程度の深さ)にブロードバッファ層として1つのn型FS層51を設けたブロードバッファ構造としている点である。ブロードバッファ構造とは、ピークを深さ方向の中心とし、当該ピーク位置から基板両主面側にそれぞれ向うにしたがって減少するキャリア濃度分布を有するブロードバッファ層を備えた構造である。
次に、実施の形態4にかかる半導体装置の構造について説明する。図11は、実施の形態4にかかる半導体装置の構造を示す説明図である。図11(a)には断面構造を示し、図11(b)には図11(a)の切断線D-D'における基板裏面から深さ方向のキャリア濃度分布を示す。実施の形態4にかかる半導体装置が実施の形態3にかかる半導体装置と異なる点は、基板裏面からの深さが異なる2つのn型FS層(以下、第1,2n型FS層とする)51,52を設けている点である。
次に、実施の形態5にかかる半導体装置の構造について説明する。図12は、実施の形態5にかかる半導体装置の構造を示す説明図である。図13,14は、実施の形態5にかかる半導体装置の製造途中の状態を示す断面図である。実施の形態5にかかる半導体装置が実施の形態4にかかる半導体装置と異なる点は、第1n型FS層51を構成する第2,3n型層(プロトン照射およびヘリウム照射によるn型層)51e、51fを、IGBT領域21からダイオード領域22にわたって設けている点である。すなわち、第1n型FS層51の第1n型層(プロトン照射による)51aは、基板両主面側にそれぞれ配置された第2,3n型層51e、51fに挟まれた状態となっている。第1欠陥層11aは、IGBT領域21からダイオード領域22にわたって設けられている。
次に、実施の形態6にかかる半導体装置の製造方法について、図1,2A,15を参照しながら説明する。図15は、実施の形態6にかかる半導体装置の製造方法の概要を示すフローチャートである。実施の形態6にかかる半導体装置の製造方法が実施の形態1にかかる半導体装置の製造方法を異なる点は、プロトン照射とヘリウム照射との順序を入れ換えて行っている点である。すなわち、ヘリウム照射の後にプロトン照射を行っている。
2 p型ベース層(p型アノード層)
3 トレンチ
4 ゲート絶縁膜
5 ゲート電極
6 n+型エミッタ領域
7 p+型コンタクト領域
8 層間絶縁膜
9 おもて面電極
10,50,51,52 n型FS層
10a~10e,50a,50b,51a~51d,52a~52d n型FS層を構成するn型層
11a,11b 欠陥層
12 p+型コレクタ領域
13 n+型カソード領域
14 裏面電極
21 IGBT領域
22 ダイオード領域
31,34 ヘリウム照射
31a,34a ヘリウム到達位置
31b,34b ヘリウム通過領域
32,35 アブソーバー
33 金属板
33a 金属板の開口部
Claims (13)
- 第1導電型の半導体基板の一方の主面側から第1所定深さを飛程としてプロトンを照射し、プロトンを含み、かつ前記第1所定深さにキャリア濃度のピークを有する第1導電型の第1半導体層を形成する第1照射工程と、
熱処理によりプロトンを活性化させる第1熱処理工程と、
前記半導体基板の一方の主面側から前記第1所定深さよりも深い第2所定深さを飛程としてヘリウムを照射し、前記半導体基板に格子欠陥を導入する第2照射工程と、
熱処理により、前記半導体基板中の前記格子欠陥の量を調整する第2熱処理工程と、
を含み、
前記第2熱処理工程では、前記第1半導体層よりも前記半導体基板の他方の主面側に、プロトンおよびヘリウムを含み、かつ前記第1半導体層に接する第1導電型の第2半導体層を形成することを特徴とする半導体装置の製造方法。 - 前記第2熱処理工程では、前記第1半導体層よりもキャリア濃度のピークが低く、かつ前記半導体基板の他方の主面側に向うにしたがって前記第1半導体層よりもなだらかな傾斜で減少するキャリア濃度分布を有する前記第2半導体層を形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記第1照射工程の前に、前記半導体基板の他方の主面側に第2導電型半導体領域を形成する工程をさらに含み、
前記第2導電型半導体領域と前記半導体基板との間のpn接合から前記半導体基板の一方の主面側に伸びる空乏層の伸びを抑制するフィールドストップ層として、前記第1半導体層および前記第2半導体層を形成することを特徴とする請求項1または2に記載の半導体装置の製造方法。 - 前記第1照射工程では、
異なる飛程でプロトンを複数回照射し、前記半導体基板の一方の主面からの深さの異なる複数の前記第1半導体層を形成し、
複数の前記第1半導体層のうち、前記半導体基板の一方の主面から最も深い位置に形成する前記第1半導体層を、前記第1所定深さを飛程とするプロトン照射により形成することを特徴とする請求項1または2に記載の半導体装置の製造方法。 - 前記第2熱処理工程では、さらに、前記第1半導体層よりも前記半導体基板の一方の主面側に、前記第1半導体層に接する、プロトンおよびヘリウムを含む第1導電型の第3半導体層を形成することを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記第2熱処理工程では、前記第1半導体層よりもキャリア濃度のピークが低く、かつ前記半導体基板の一方の主面側に向うにしたがって前記第1半導体層よりもなだらかな傾斜で減少するキャリア濃度分布を有する前記第3半導体層を形成することを特徴とする請求項5に記載の半導体装置の製造方法。
- 第1導電型の半導体基板の内部に設けられ、前記半導体基板の一方の主面から第1所定深さにキャリア濃度のピークを有する、プロトンを含む第1導電型の第1半導体層と、
前記第1半導体層よりも前記半導体基板の他方の主面側に設けられ、前記第1半導体層に接する、プロトンおよびヘリウムを含む第1導電型の第2半導体層と、
を備えることを特徴とする半導体装置。 - 前記第2半導体層は、前記第1半導体層よりもキャリア濃度のピークが低く、かつ前記半導体基板の他方の主面側に向うにしたがって前記第1半導体層よりもなだらかな傾斜で減少するキャリア濃度分布を有することを特徴とする請求項7に記載の半導体装置。
- 前記半導体基板の他方の主面側に設けられた第2導電型半導体領域をさらに備え、
前記第1半導体層および前記第2半導体層は、前記第2導電型半導体領域と前記半導体基板との間のpn接合から前記半導体基板の一方の主面側に伸びる空乏層の伸びを抑制するフィールドストップ層であることを特徴とする請求項7に記載の半導体装置。 - 前記半導体基板の一方の主面からの深さの異なる複数の前記第1半導体層を備え、
複数の前記第1半導体層のうち、前記半導体基板の一方の主面から最も深い位置に設けられた前記第1半導体層は、前記第1所定深さにキャリア濃度のピークを有することを特徴とする請求項7に記載の半導体装置。 - 前記第1半導体層よりも前記半導体基板の一方の主面側に設けられ、前記第1半導体層に接する、プロトンおよびヘリウムを含む第1導電型の第3半導体層を備えることを特徴とする請求項7に記載の半導体装置。
- 前記第3半導体層は、前記第1半導体層よりもキャリア濃度のピークが低く、かつ前記半導体基板の一方の主面側に向うにしたがって前記第1半導体層よりもなだらかな傾斜で減少するキャリア濃度分布を有することを特徴とする請求項11に記載の半導体装置。
- 前記半導体基板の一方の主面から前記第1所定深さよりも深い第2所定深さに含まれるヘリウムの格子欠陥からなる欠陥層をさらに備えることを特徴とする請求項7~12のいずれか一つに記載の半導体装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112016001611.5T DE112016001611B4 (de) | 2015-09-16 | 2016-08-08 | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
JP2017539773A JP6477897B2 (ja) | 2015-09-16 | 2016-08-08 | 半導体装置および半導体装置の製造方法 |
CN201680012460.3A CN107408576B (zh) | 2015-09-16 | 2016-08-08 | 半导体装置及半导体装置的制造方法 |
US15/694,116 US10381225B2 (en) | 2015-09-16 | 2017-09-01 | Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium |
US16/521,630 US10840099B2 (en) | 2015-09-16 | 2019-07-25 | Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium |
US17/071,762 US11508581B2 (en) | 2015-09-16 | 2020-10-15 | Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-183481 | 2015-09-16 | ||
JP2015183481 | 2015-09-16 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US15/694,116 Continuation US10381225B2 (en) | 2015-09-16 | 2017-09-01 | Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2017047285A1 true WO2017047285A1 (ja) | 2017-03-23 |
Family
ID=58288853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2016/073368 WO2017047285A1 (ja) | 2015-09-16 | 2016-08-08 | 半導体装置および半導体装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (3) | US10381225B2 (ja) |
JP (1) | JP6477897B2 (ja) |
CN (1) | CN107408576B (ja) |
DE (1) | DE112016001611B4 (ja) |
WO (1) | WO2017047285A1 (ja) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017128247A1 (de) * | 2017-11-29 | 2019-05-29 | Infineon Technologies Ag | Verfahren zum Herstellen einer Halbleitervorrichtung mit ersten und zweiten Feldstoppzonenbereichen |
JP2020027921A (ja) * | 2018-08-17 | 2020-02-20 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
WO2020080295A1 (ja) * | 2018-10-18 | 2020-04-23 | 富士電機株式会社 | 半導体装置および製造方法 |
WO2020100995A1 (ja) * | 2018-11-16 | 2020-05-22 | 富士電機株式会社 | 半導体装置および製造方法 |
WO2020100997A1 (ja) * | 2018-11-16 | 2020-05-22 | 富士電機株式会社 | 半導体装置および製造方法 |
JP2021073733A (ja) * | 2018-03-19 | 2021-05-13 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US20210273046A1 (en) * | 2017-06-29 | 2021-09-02 | Alpha And Omega Semiconductor (Cayman) Ltd. | Semiconductor device incorporating epitaxial layer field stop zone |
US11139291B2 (en) | 2017-12-06 | 2021-10-05 | Fuji Electric Co., Ltd. | Semiconductor device |
WO2021201216A1 (ja) * | 2020-04-01 | 2021-10-07 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
WO2021201235A1 (ja) * | 2020-04-01 | 2021-10-07 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
DE112020001029T5 (de) | 2019-10-11 | 2021-11-25 | Fuji Electric Co., Ltd. | Halbleitervorrichtung und herstellungsverfahren einer halbleitervorrichtung |
JPWO2021125140A1 (ja) * | 2019-12-17 | 2021-12-16 | 富士電機株式会社 | 半導体装置 |
JPWO2022014624A1 (ja) * | 2020-07-14 | 2022-01-20 | ||
WO2022014623A1 (ja) * | 2020-07-15 | 2022-01-20 | 富士電機株式会社 | 半導体装置 |
US11424126B2 (en) | 2020-06-17 | 2022-08-23 | Fuji Electric Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
WO2023145805A1 (ja) * | 2022-01-28 | 2023-08-03 | 富士電機株式会社 | 半導体装置および製造方法 |
US11901443B2 (en) | 2018-08-14 | 2024-02-13 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method |
US11972950B2 (en) | 2018-12-28 | 2024-04-30 | Fuji Electric Co., Ltd. | Semiconductor device and method for manufacturing |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016051970A1 (ja) * | 2014-09-30 | 2016-04-07 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
CN105814694B (zh) | 2014-10-03 | 2019-03-08 | 富士电机株式会社 | 半导体装置以及半导体装置的制造方法 |
DE112016001611B4 (de) * | 2015-09-16 | 2022-06-30 | Fuji Electric Co., Ltd. | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
CN107851584B (zh) * | 2016-02-23 | 2021-06-11 | 富士电机株式会社 | 半导体装置 |
KR20180104236A (ko) * | 2017-03-10 | 2018-09-20 | 매그나칩 반도체 유한회사 | 전력 반도체 소자의 제조 방법 |
WO2019017104A1 (ja) * | 2017-07-18 | 2019-01-24 | 富士電機株式会社 | 半導体装置 |
DE102017118975B4 (de) * | 2017-08-18 | 2023-07-27 | Infineon Technologies Ag | Halbleitervorrichtung mit einem cz-halbleiterkörper und verfahren zum herstellen einer halbleitervorrichtung mit einem cz-halbleiterkörper |
US11393812B2 (en) * | 2017-12-28 | 2022-07-19 | Fuji Electric Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
JP7036198B2 (ja) * | 2018-04-11 | 2022-03-15 | 三菱電機株式会社 | 半導体装置、半導体ウエハおよび半導体装置の製造方法 |
CN112652661A (zh) * | 2019-10-10 | 2021-04-13 | 珠海格力电器股份有限公司 | 一种晶体管及其制备方法 |
DE102020110072A1 (de) * | 2020-04-09 | 2021-10-14 | Infineon Technologies Ag | Vertikale leistungs-halbleitervorrichtung und herstellungsverfahren |
CN111900087B (zh) * | 2020-08-31 | 2022-09-20 | 华虹半导体(无锡)有限公司 | Igbt器件的制造方法 |
JP2022092731A (ja) | 2020-12-11 | 2022-06-23 | 株式会社東芝 | 半導体装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013074181A (ja) * | 2011-09-28 | 2013-04-22 | Toyota Motor Corp | 半導体装置とその製造方法 |
WO2013100155A1 (ja) * | 2011-12-28 | 2013-07-04 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2014209507A (ja) * | 2013-04-16 | 2014-11-06 | ローム株式会社 | 半導体装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08102545A (ja) | 1994-09-30 | 1996-04-16 | Meidensha Corp | 半導体素子のライフタイム制御方法 |
JPH1074959A (ja) | 1996-07-03 | 1998-03-17 | Toshiba Corp | 電力用半導体素子 |
DE102004004045B4 (de) | 2004-01-27 | 2009-04-02 | Infineon Technologies Ag | Halbleiterbauelement mit temporärem Feldstoppbereich und Verfahren zu dessen Herstellung |
US7557386B2 (en) | 2006-03-30 | 2009-07-07 | Infineon Technologies Austria Ag | Reverse conducting IGBT with vertical carrier lifetime adjustment |
JP5695343B2 (ja) | 2010-05-13 | 2015-04-01 | 株式会社豊田中央研究所 | 半導体装置 |
JP5605073B2 (ja) | 2010-08-17 | 2014-10-15 | 株式会社デンソー | 半導体装置 |
DE102011113549B4 (de) | 2011-09-15 | 2019-10-17 | Infineon Technologies Ag | Ein Halbleiterbauelement mit einer Feldstoppzone in einem Halbleiterkörper und ein Verfahren zur Herstellung einer Feldstoppzone in einem Halbleiterkörper |
US9214521B2 (en) | 2012-06-21 | 2015-12-15 | Infineon Technologies Ag | Reverse conducting IGBT |
US9263271B2 (en) | 2012-10-25 | 2016-02-16 | Infineon Technologies Ag | Method for processing a semiconductor carrier, a semiconductor chip arrangement and a method for manufacturing a semiconductor device |
US9627517B2 (en) | 2013-02-07 | 2017-04-18 | Infineon Technologies Ag | Bipolar semiconductor switch and a manufacturing method therefor |
US9041096B2 (en) | 2013-04-16 | 2015-05-26 | Rohm Co., Ltd. | Superjunction semiconductor device and manufacturing method therefor |
JP6119593B2 (ja) * | 2013-12-17 | 2017-04-26 | トヨタ自動車株式会社 | 半導体装置 |
JP5895950B2 (ja) | 2014-01-20 | 2016-03-30 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
US9312135B2 (en) | 2014-03-19 | 2016-04-12 | Infineon Technologies Ag | Method of manufacturing semiconductor devices including generating and annealing radiation-induced crystal defects |
US9754787B2 (en) | 2014-06-24 | 2017-09-05 | Infineon Technologies Ag | Method for treating a semiconductor wafer |
US9312120B2 (en) | 2014-08-29 | 2016-04-12 | Infineon Technologies Ag | Method for processing an oxygen containing semiconductor body |
DE102014117538A1 (de) | 2014-11-28 | 2016-06-02 | Infineon Technologies Ag | Verfahren zum Herstellen von Halbleitervorrichtungen unter Verwendung von Implantation leichter Ionen und Halbleitervorrichtung |
DE102015107085A1 (de) | 2015-05-06 | 2016-11-10 | Infineon Technologies Ag | Verfahren zum Herstellen von Halbleitervorrichtungen und Sauerstoffkorrelierte thermische Donatoren enthaltende Halbleitervorrichtung |
JP6311840B2 (ja) * | 2015-06-17 | 2018-04-18 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
DE112016001611B4 (de) * | 2015-09-16 | 2022-06-30 | Fuji Electric Co., Ltd. | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
DE102016120771B3 (de) | 2016-10-31 | 2018-03-08 | Infineon Technologies Ag | Verfahren zum Herstellen von Halbleitervorrichtungen und Halbleitervorrichtung, die wasserstoff-korrelierte Donatoren enthält |
-
2016
- 2016-08-08 DE DE112016001611.5T patent/DE112016001611B4/de active Active
- 2016-08-08 JP JP2017539773A patent/JP6477897B2/ja active Active
- 2016-08-08 CN CN201680012460.3A patent/CN107408576B/zh active Active
- 2016-08-08 WO PCT/JP2016/073368 patent/WO2017047285A1/ja active Application Filing
-
2017
- 2017-09-01 US US15/694,116 patent/US10381225B2/en active Active
-
2019
- 2019-07-25 US US16/521,630 patent/US10840099B2/en active Active
-
2020
- 2020-10-15 US US17/071,762 patent/US11508581B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013074181A (ja) * | 2011-09-28 | 2013-04-22 | Toyota Motor Corp | 半導体装置とその製造方法 |
WO2013100155A1 (ja) * | 2011-12-28 | 2013-07-04 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2014209507A (ja) * | 2013-04-16 | 2014-11-06 | ローム株式会社 | 半導体装置 |
Cited By (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11749716B2 (en) * | 2017-06-29 | 2023-09-05 | Alpha And Omega Semiconductor (Cayman) Ltd. | Semiconductor device incorporating epitaxial layer field stop zone |
US20210273046A1 (en) * | 2017-06-29 | 2021-09-02 | Alpha And Omega Semiconductor (Cayman) Ltd. | Semiconductor device incorporating epitaxial layer field stop zone |
US11081544B2 (en) | 2017-11-29 | 2021-08-03 | Infineon Technologies Ag | Method of manufacturing a semiconductor device comprising first and second field stop zone portions |
DE102017128247A1 (de) * | 2017-11-29 | 2019-05-29 | Infineon Technologies Ag | Verfahren zum Herstellen einer Halbleitervorrichtung mit ersten und zweiten Feldstoppzonenbereichen |
US11139291B2 (en) | 2017-12-06 | 2021-10-05 | Fuji Electric Co., Ltd. | Semiconductor device |
JP2022062217A (ja) * | 2018-03-19 | 2022-04-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2021073733A (ja) * | 2018-03-19 | 2021-05-13 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7327541B2 (ja) | 2018-03-19 | 2023-08-16 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US11824095B2 (en) | 2018-03-19 | 2023-11-21 | Fuji Electric Co., Ltd. | Semiconductor device and semiconductor device manufacturing method |
JP7024896B2 (ja) | 2018-03-19 | 2022-02-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US11901443B2 (en) | 2018-08-14 | 2024-02-13 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method |
CN110838517A (zh) * | 2018-08-17 | 2020-02-25 | 三菱电机株式会社 | 半导体装置及其制造方法 |
US11101133B2 (en) | 2018-08-17 | 2021-08-24 | Mitsubishi Electric Corporation | Semiconductor device and manufacturing method thereof |
JP2020027921A (ja) * | 2018-08-17 | 2020-02-20 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
CN110838517B (zh) * | 2018-08-17 | 2024-02-06 | 三菱电机株式会社 | 半导体装置及其制造方法 |
WO2020080295A1 (ja) * | 2018-10-18 | 2020-04-23 | 富士電機株式会社 | 半導体装置および製造方法 |
JP7067636B2 (ja) | 2018-10-18 | 2022-05-16 | 富士電機株式会社 | 半導体装置および製造方法 |
US11735424B2 (en) | 2018-10-18 | 2023-08-22 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11342186B2 (en) | 2018-10-18 | 2022-05-24 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method thereof |
JPWO2020080295A1 (ja) * | 2018-10-18 | 2021-04-01 | 富士電機株式会社 | 半導体装置および製造方法 |
US11854782B2 (en) | 2018-11-16 | 2023-12-26 | Fuji Electric Co., Ltd. | Semiconductor device and fabrication method |
JP7400874B2 (ja) | 2018-11-16 | 2023-12-19 | 富士電機株式会社 | 半導体装置および製造方法 |
US11373869B2 (en) | 2018-11-16 | 2022-06-28 | Fuji Electric Co., Ltd. | Semiconductor device and fabrication method |
JP7351380B2 (ja) | 2018-11-16 | 2023-09-27 | 富士電機株式会社 | 半導体装置 |
WO2020100995A1 (ja) * | 2018-11-16 | 2020-05-22 | 富士電機株式会社 | 半導体装置および製造方法 |
WO2020100997A1 (ja) * | 2018-11-16 | 2020-05-22 | 富士電機株式会社 | 半導体装置および製造方法 |
US11715771B2 (en) | 2018-11-16 | 2023-08-01 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method |
JPWO2020100997A1 (ja) * | 2018-11-16 | 2021-05-13 | 富士電機株式会社 | 半導体装置および製造方法 |
JPWO2020100995A1 (ja) * | 2018-11-16 | 2021-05-20 | 富士電機株式会社 | 半導体装置および製造方法 |
JP7078133B2 (ja) | 2018-11-16 | 2022-05-31 | 富士電機株式会社 | 半導体装置および製造方法 |
JP7099541B2 (ja) | 2018-11-16 | 2022-07-12 | 富士電機株式会社 | 半導体装置および製造方法 |
US11972950B2 (en) | 2018-12-28 | 2024-04-30 | Fuji Electric Co., Ltd. | Semiconductor device and method for manufacturing |
DE112020001029T5 (de) | 2019-10-11 | 2021-11-25 | Fuji Electric Co., Ltd. | Halbleitervorrichtung und herstellungsverfahren einer halbleitervorrichtung |
US11901419B2 (en) | 2019-10-11 | 2024-02-13 | Fuji Electric Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
JPWO2021125140A1 (ja) * | 2019-12-17 | 2021-12-16 | 富士電機株式会社 | 半導体装置 |
JP7188539B2 (ja) | 2019-12-17 | 2022-12-13 | 富士電機株式会社 | 半導体装置 |
JP2022024094A (ja) * | 2019-12-17 | 2022-02-08 | 富士電機株式会社 | 半導体装置 |
JP7452632B2 (ja) | 2020-04-01 | 2024-03-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7367856B2 (ja) | 2020-04-01 | 2023-10-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JPWO2021201235A1 (ja) * | 2020-04-01 | 2021-10-07 | ||
WO2021201235A1 (ja) * | 2020-04-01 | 2021-10-07 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JPWO2021201216A1 (ja) * | 2020-04-01 | 2021-10-07 | ||
WO2021201216A1 (ja) * | 2020-04-01 | 2021-10-07 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US11424126B2 (en) | 2020-06-17 | 2022-08-23 | Fuji Electric Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
WO2022014624A1 (ja) * | 2020-07-14 | 2022-01-20 | 富士電機株式会社 | 半導体装置 |
JPWO2022014624A1 (ja) * | 2020-07-14 | 2022-01-20 | ||
JP7439929B2 (ja) | 2020-07-14 | 2024-02-28 | 富士電機株式会社 | 半導体装置 |
WO2022014623A1 (ja) * | 2020-07-15 | 2022-01-20 | 富士電機株式会社 | 半導体装置 |
JP7405261B2 (ja) | 2020-07-15 | 2023-12-26 | 富士電機株式会社 | 半導体装置 |
WO2023145805A1 (ja) * | 2022-01-28 | 2023-08-03 | 富士電機株式会社 | 半導体装置および製造方法 |
Also Published As
Publication number | Publication date |
---|---|
DE112016001611T5 (de) | 2017-12-28 |
US10840099B2 (en) | 2020-11-17 |
US20210028019A1 (en) | 2021-01-28 |
US11508581B2 (en) | 2022-11-22 |
CN107408576B (zh) | 2020-11-13 |
CN107408576A (zh) | 2017-11-28 |
DE112016001611B4 (de) | 2022-06-30 |
JPWO2017047285A1 (ja) | 2017-12-28 |
US20190362975A1 (en) | 2019-11-28 |
JP6477897B2 (ja) | 2019-03-06 |
US10381225B2 (en) | 2019-08-13 |
US20180012762A1 (en) | 2018-01-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2017047285A1 (ja) | 半導体装置および半導体装置の製造方法 | |
US10629678B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP6078961B2 (ja) | 半導体装置の製造方法 | |
JP5754545B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP5641055B2 (ja) | 半導体装置およびその製造方法 | |
WO2012056536A1 (ja) | 半導体装置および半導体装置の製造方法 | |
JP5807724B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2001160559A (ja) | 半導体装置の製造方法 | |
WO2016204098A1 (ja) | 半導体装置 | |
US11355595B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP6784148B2 (ja) | 半導体装置、絶縁ゲート型バイポーラトランジスタ、絶縁ゲート型バイポーラトランジスタの製造方法 | |
JP6611532B2 (ja) | 半導体装置および半導体装置の製造方法 | |
US11424126B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP3952452B2 (ja) | 半導体装置の製造方法 | |
US11107887B2 (en) | Semiconductor device | |
US11245010B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP2018011030A (ja) | 逆阻止mos型半導体装置および逆阻止mos型半導体装置の製造方法 | |
JP2022000882A (ja) | 半導体装置および半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 16846158 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2017539773 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 112016001611 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 16846158 Country of ref document: EP Kind code of ref document: A1 |