JP7188539B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7188539B2 JP7188539B2 JP2021187426A JP2021187426A JP7188539B2 JP 7188539 B2 JP7188539 B2 JP 7188539B2 JP 2021187426 A JP2021187426 A JP 2021187426A JP 2021187426 A JP2021187426 A JP 2021187426A JP 7188539 B2 JP7188539 B2 JP 7188539B2
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- 239000004065 semiconductor Substances 0.000 title claims description 179
- 239000000758 substrate Substances 0.000 claims description 138
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- 229910052760 oxygen Inorganic materials 0.000 claims description 16
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
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- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
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Description
[先行技術文献]
[特許文献]
[特許文献1] 米国特許出願公開第2016/0141399号明細書
連続ピーク領域の最も平坦部側のピークは、第1ピークであり、第1ピークのドーピング濃度は、平坦部のドーピング濃度の2倍以下であってよい。
Claims (15)
- 半導体基板と、
前記半導体基板の裏面側に設けられたドーピング濃度の複数のピークと、
前記半導体基板の深さ方向において前記複数のピークの間に設けられ、前記半導体基板の基板濃度の2.5倍以上のドーピング濃度を有する平坦部と、
を備え、
前記複数のピークの少なくとも1つは、前記平坦部よりもおもて面側に設けられた第1ピークであって、
前記第1ピークよりも前記半導体基板のおもて面側に、深さ方向のドーピング濃度勾配が前記第1ピークよりも緩やかな緩勾配領域が設けられ、
前記緩勾配領域における前記ドーピング濃度の傾きαは、750以上、1500以下であり、前記傾きαの単位は[/cm]である、
半導体装置。 - 前記緩勾配領域の厚さは、5μm以上、10μm以下である、
請求項1に記載の半導体装置。 - 前記第1ピークの深さ位置は、25μm以上、35μm以下である、
請求項1または2に記載の半導体装置。 - 前記複数のピークは、バッファ領域に設けられ、
前記バッファ領域における酸素化学濃度は、1×1017cm-3以上、6×1017cm-3以下である、
請求項1から3のいずれか一項に記載の半導体装置。 - 前記平坦部のドーピング濃度は、前記半導体基板の基板濃度の10倍以下である、
請求項1から4のいずれか一項に記載の半導体装置。 - 前記平坦部は、
第1平坦部と、
前記第1平坦部とは異なるドーピング濃度の第2平坦部と、
を含む
請求項1から5のいずれか一項に記載の半導体装置。 - 前記第2平坦部のドーピング濃度は、前記第1平坦部のドーピング濃度の±10%以内である
請求項6に記載の半導体装置。 - 前記複数のピークは、おもて面側から深さ方向に、順に前記第1ピーク、第2ピーク、第3ピーク、および第4ピークを有し、
前記第1平坦部は、前記第1ピークと前記第2ピークとの間に設けられる
請求項6または7に記載の半導体装置。 - 前記第2平坦部は、前記第2ピークと前記第3ピークとの間に設けられる
請求項8に記載の半導体装置。 - 前記平坦部の厚さの合計が、前記平坦部より下方の前記半導体基板の厚さより厚い、
請求項1から9のいずれか一項に記載の半導体装置。 - 半導体基板と、
前記半導体基板の裏面側に設けられたドーピング濃度の複数のピークと、
前記半導体基板の深さ方向において前記複数のピークの間に設けられ、前記半導体基板の基板濃度の2.5倍以上のドーピング濃度を有する平坦部と、
を備え、
前記平坦部よりも前記半導体基板のおもて面側に、複数のドーピング濃度の前記ピークを有する連続ピーク領域が設けられ、
前記連続ピーク領域は、ドーピング濃度の前記ピーク間に平坦領域を有さず、谷部を有する
半導体装置。 - 前記連続ピーク領域は、2つ、3つ、または4つのドーピング濃度の前記ピークを有する
請求項11に記載の半導体装置。 - 前記連続ピーク領域の最も前記平坦部の側のピークは、第1ピークであり、
前記第1ピークのドーピング濃度は、前記平坦部のドーピング濃度の2倍以下である
請求項11または12に記載の半導体装置。 - 前記連続ピーク領域は、前記平坦部からドーピング濃度が前記半導体基板の基板濃度に等しくなるまでの区間に設けられており、
前記連続ピーク領域の前記ピークの高さは、前記半導体基板の前記おもて面側ほど低い
請求項11から13のいずれか一項に記載の半導体装置。 - 前記連続ピーク領域の前記ピークの深さ方向の位置は、水素化学濃度のピークの深さ方向の位置に対応し、
前記連続ピーク領域の前記ピークと、当該連続ピーク領域のピークに対応する前記水素化学濃度のピークとに関し、前記水素化学濃度の予め定められたピークに対する、当該ピークと隣接する谷部の水素化学濃度の比は、前記連続ピーク領域の予め定められたピークに対する、当該ピークと隣接する谷部のドーピング濃度の比よりも小さい
請求項11から14のいずれか一項に記載の半導体装置。
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