WO2013159471A1 - 高性能锂离子电池多孔薄膜硅基负极材料及其制备方法 - Google Patents

高性能锂离子电池多孔薄膜硅基负极材料及其制备方法 Download PDF

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WO2013159471A1
WO2013159471A1 PCT/CN2012/079976 CN2012079976W WO2013159471A1 WO 2013159471 A1 WO2013159471 A1 WO 2013159471A1 CN 2012079976 W CN2012079976 W CN 2012079976W WO 2013159471 A1 WO2013159471 A1 WO 2013159471A1
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dimensional porous
silicon
thin film
film silicon
negative electrode
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PCT/CN2012/079976
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French (fr)
Chinese (zh)
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刘萍
乔永民
李辉
吴敏昌
丁晓阳
李�杰
郑俊军
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宁波杉杉新材料科技有限公司
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Priority to JP2014519406A priority Critical patent/JP5951014B2/ja
Publication of WO2013159471A1 publication Critical patent/WO2013159471A1/zh

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134Electrodes based on metals, Si or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • H01M4/1395Processes of manufacture of electrodes based on metals, Si or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/38Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386Silicon or alloys based on silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/66Selection of materials
    • H01M4/661Metal or alloys, e.g. alloy coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • H01M4/80Porous plates, e.g. sintered carriers
    • H01M4/808Foamed, spongy materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Definitions

  • the invention relates to a lithium ion anode material with high specific capacity and cycle stability, and particularly relates to a porous film silicon-based anode material and a preparation method thereof, and belongs to the field of lithium ion batteries.
  • Lithium-ion batteries are known as the ideal energy source, green energy source and leading power source in the 21st century, showing broad application prospects and potentially huge economic benefits. With advances in the electronics industry, electric vehicles, and aerospace technology, higher performance is required for the performance of lithium-ion batteries that provide energy. Therefore, to achieve breakthroughs in energy density and power density of lithium-ion batteries, the crucial "bottleneck" problem is how to design and develop new electrode materials.
  • the ideal anode material should have the following conditions: 1 with good charge and discharge reversibility and cycle life; 2 small irreversible capacity for the first time; 3 good compatibility with electrolyte solvent; 4 higher specific capacity; 5 safe, no Pollution; 6 rich in resources, low prices, etc.
  • the existing anode materials are difficult to meet the above requirements at the same time.
  • the commercial anode materials for lithium ion batteries are mainly carbon materials (including graphite, hard carbon and soft carbon), and the volume expansion in the process of inserting and deintercalating lithium is basically 9%. Below, it exhibits high coulombic efficiency and excellent cycle stability.
  • Si, Al, Mg, Sn and other metals which can be alloyed with Li and their alloys have a reversible lithium storage capacity much higher than that of graphite anodes, and silicon has the highest Theoretical lithium storage capacity (Li 22 Si 5 , 4200mAh/g), low lithium insertion potential (less than 0.5V) Vs Li/Li+), low electrolyte reactivity, abundant natural reserves, and low price have attracted much attention. Elemental silicon, silicon oxides, silicon metal compounds, and silicon/carbon composites are the most studied silicon-based materials. However, silicon is a semiconductor material that has limited conductivity and is incompatible with conventional electrolytes.
  • the silicon-based material In the process of highly inserting and deintercalating lithium, the silicon-based material has a very significant volume expansion (volume expansion rate >300%) similar to that of general alloy materials. The resulting mechanical stress causes the electrode material to gradually powder during the cycle. The material structure is destroyed and the electrical contact between the active materials is lost, resulting in a decrease in cycle performance.
  • the silicon-based material has a large irreversible capacity for the first time, which may be caused by the decomposition of electrolyte and the presence of impurities such as oxides. The above reasons limit the commercial application of silicon-based materials. Therefore, while obtaining high capacity, how to improve the cycle stability of silicon-based materials, reduce its first irreversible capacity, and make it commercialized and practical, has become the research focus and difficulty of this kind of materials.
  • measures to improve the performance of silicon anodes include: by designing the composition and microstructure of silicon-based anode materials to suppress their volume changes and improve conductivity; developing binders and electrolyte additives suitable for silicon anodes; exploring new current collectors and Electrode structure, etc.
  • the main strategy for improving silicon-based materials is to design the composition and microstructure of the material to accommodate the bulk effect of the silicon and maintain the conductive network of the electrode.
  • the main ways are nanocrystallization, thin film formation, composite, and porous.
  • Nanomaterials have the characteristics of large specific surface area, short ion diffusion path, strong peristaltic property and high plasticity, which can alleviate the volume effect of alloy materials and improve their electrochemical performance.
  • ultrafine powders, especially nanomaterials cause more oxide impurities and more surface film formation and more electrolyte deposition and penetration, which leads to an increase in the first irreversible capacity, significantly reducing the efficiency of the first cycle.
  • the nanomaterials will undergo intense agglomeration during the cycle, and the agglomerated materials no longer exhibit the characteristics of the nanoparticles, thereby limiting the further improvement of the cycle performance.
  • Thinning of materials is also one of the effective methods to effectively improve the cycle stability of materials. This is because the film material has a large specific surface area thickness ratio, and thinning the material can effectively slow down the volume expansion effect due to alloying, control capacity attenuation, and improve cycle stability; and thinning of the material can make lithium The ions diffuse rapidly, resulting in reversibility of the material and high current cycle stability.
  • the compounding is to use the synergistic effect between the components of the composite material to achieve the complementary advantages. It mainly introduces an active or inactive buffer matrix with good conductivity and small volume effect while reducing the volume effect of the silicon active phase, and prepares a multi-phase composite anode material to improve the long-term cycle stability of the material by volume compensation and electrical conductivity.
  • Sex According to the type of the dispersed matrix introduced, it can be roughly classified into two types of a silicon-nonmetal composite system and a silicon-metal composite system. The latter is also classified into a silicon/inert lithium intercalation metal composite system and a silicon/active lithium intercalation metal composite system according to whether the metal has lithium intercalation activity. From the existing research, the silicon/inert lithium intercalation composite has better cycle stability, and the capacity of the silicon/active lithium intercalation composite is higher.
  • the alloying or partial alloying of a metal element which forms a stable compound with silicon can fully utilize the advantages of good electrical conductivity, ductility and high mechanical strength of the metal.
  • the addition of metal can not only improve the charge transfer of Si and lithium.
  • the reaction increases the conductivity of the silicon electrode and suppresses or buffers the volume change of the silicon in the case of charge and discharge. That is, the purpose of recombining with the metal is to improve the conductivity of silicon on the one hand, and to disperse and buffer on the other hand.
  • the inactive lithium intercalation metal material has no lithium intercalation property, although it can improve the cycle performance of the material, but the inert matrix has a limited buffering effect on the volume change of the active material; and a certain volume (mass) material in the battery assembly
  • the contribution to capacity does not limit the volumetric energy density (mass energy density) of the assembled battery, which limits the application of this material in future high energy density batteries.
  • Porous materials have the following advantages due to their unique structure: 1 porous structure has a high specific surface area, large openings allow the transport of liquid electrolyte; 2 porous structure allows the electrolyte to fully contact the active material, reducing lithium ions Diffusion path; 3 porous structure can improve the conductivity of lithium ions, thereby increasing the electrochemical reaction rate; 4 porous structure can provide reactive sites, improve the efficiency of electrochemical reactions; 5 no need to add binder and conductive agent; 6 effective absorption and slow The volume expansion effect of flushing Si improves the cycle performance of the material.
  • nano-materials has a poor effect on improving the cycle properties of alloy materials; single active doping or inert doping can partially inhibit the volume expansion of silicon-based materials, but still cannot completely solve the problem of silicon dispersion and agglomeration.
  • Other methods have limited effectiveness in improving stability and are highly polluting to the environment. Finding a matrix that is more capable of buffering volume changes and having higher conductivity; Designing and constructing a more porous film structure is undoubtedly one of the main strategies for developing silicon-based anode materials.
  • the object of the present invention is to adapt to the development trend of lithium ion batteries, and to solve the problem of serious volume effect of lithium ion battery high-capacity silicon-based anode material in electrochemical lithium-intercalation process, affecting the cycle performance of electrode materials, and low-level materials.
  • the conductive property provides a novel high-capacity three-dimensional porous thin film silicon-based anode material preparation method with high reversibility and good cycle performance without introducing a conductive agent and a binder.
  • the present invention integrates an active/active, active/inactive composite system, a porous and thin film method to prepare a three-dimensional porous film silicon-based anode material.
  • the technical solution adopted is: a method for preparing a three-dimensional porous film silicon-based anode material for a lithium ion battery, comprising the following steps: Step (1): cleaning a three-dimensional porous current collector material to remove impurities such as surface oil and surface oxide.
  • the three-dimensional porous current collector material is an inert lithium intercalation metal; the inert lithium intercalation metal refers to a metal that cannot form an intermetallic compound or alloy with lithium; and the inert lithium intercalation metal is preferably a copper foil mesh, considering economic cost.
  • the active lithium intercalation metal Means a metal that forms an intermetallic compound or alloy with lithium, such as magnesium, calcium, aluminum, bismuth, tin, lead, arsenic, antimony, bismuth, platinum, silver, gold, cadmium, indium, etc.;
  • the active lithium intercalation metal is preferably tin, magnesium and aluminum.
  • silicon based refers to a lithium ion battery anode material that uses silicon and a silicon metal alloy as active materials.
  • vacuum means a degree of vacuum of at least lx 10- 2 Pa.
  • the copper foil mesh, the copper mesh or the foamed copper has a porosity of not less than 95.0%, an average pore diameter of 50 to 200 ⁇ m, and a thickness of 50 ⁇ m to 400 ⁇ m.
  • the purity of the elemental silicon target used is at least 99.99%.
  • the purity of the Sn target, the Mg target, and the A1 target used was at least 99.99%.
  • the "purity” refers to the mass percentage.
  • the mass ratio of the elemental silicon to the metal M is between 1:1 and 9:1. When two or more metals are used, the ratio of the mass sum of the elemental silicon to the two or more metals is 1:1. Until 9:1.
  • the composition of the alloy film is controlled mainly by controlling the sputtering power of the silicon target and the metal target, and the ratio of silicon to metal directly affects the capacity and cycle stability of the porous film material.
  • the working conditions of the magnetron sputtering method are: (1) the background vacuum is 1.0 ⁇ 10-5 to 1. Ox 10- 3 Pa; (2) the working pressure during sputtering is 0.2 to 0.8 Pa; (3) The flow rate of argon Ar is 40 to 60 sccm; (4) The sputtering power of different targets is as follows: Si is 150 to 300 W, A1 is 30 to 60 W, Sn is 25 to 50 W, and Mg is 30 to 60 W; (5) The sample table revolution speed is 15 to 20 rpm; (6) The sputtering time is 2 to 8 hours.
  • the term "working gas pressure” refers to the pressure of an inert gas (e.g., argon) used in performing a magnetron sputtering operation.
  • the magnetron sputtering porous film has a thickness of 300 nm to 3 ⁇ m.
  • the heat treatment refers to heating the three-dimensional porous thin film silicon-based electrode precursor obtained in the step (2) to 200 ° C to 800 ° C and making it at 200 ° C. After being kept at 800 ° C for 2 to 5 hours, it is alloyed; then, after cooling to 100 ° C to 200 ° C, it is further incubated for 1 to 3 hours to be annealed; The electric heating is stopped, allowed to cool to room temperature with the furnace, and the heat treatment process is always maintained in a vacuum or an inert atmosphere.
  • the rate of temperature rise during the temperature increase is 3 to 15 ° C / min.
  • the "warming to 200 ° C to 800 ° C” means heating from room temperature to 200 ° C to 800 ° C:.
  • the heat treatment is carried out in a vacuum or an inert atmosphere.
  • the "heat treatment in a vacuum or an inert atmosphere” means the process of the heat treatment, including the temperature rise, the two heat preservation, and the stage of cooling with the furnace are always kept vacuum or inert. Atmosphere.
  • the vacuum device can be allowed to be turned off.
  • the alloying treatment means holding the alloy at a temperature lower than the melting point of the substrate, Si and metal M and the eutectic temperature of the relevant alloy for a period of time, by interdiffusion or partial interdiffusion to form a corresponding alloy, alloy
  • the formation is beneficial to improve the electrochemical performance (specific capacity and cycle performance) of the three-dimensional porous thin film silicon-based anode material.
  • the annealing treatment can promote the homogenization of the alloy composition, grain refinement, stress elimination, increase the bonding force between the material and the current collector, and improve the plasticity for processing.
  • the heat treatment improves the microstructure of the three-dimensional porous film silicon-based electrode precursor, so that the elemental silicon or Si-M microparticles are uniformly and stably distributed in the three-dimensional network structure of the copper foil mesh, the copper mesh, the copper foam or the foamed nickel.
  • the bonding between the materials and the matrix is improved, and the mechanical properties of the material are also improved, thereby suppressing the volume change of the active material during charging and discharging, and improving the cycle stability of the silicon-based anode material.
  • Another aspect of the invention provides a high performance lithium ion battery three dimensional porous film silicon based negative electrode material prepared by the method described herein.
  • the active material of the porous film electrode of the present invention is mainly a partial alloy formed of Si and Si-M; the specific storage capacity of lithium can be adjusted by the content of high-capacity silicon as the main active material in the electrode active material.
  • the active lithium intercalation metal M itself has good conductivity and lithium intercalation performance, and the invention utilizes the lithium intercalation effect of Si and metal M at different potentials, so that the volume expansion of the material occurs at different potentials, which can alleviate the volume Internal stress caused by the effect, thereby enhancing the structural stability of the material and improving its cycle performance;
  • the electrode active material is sputtered into the three-dimensional network porous structure of the current collector in the present invention, without introducing an adhesive, as compared with the electrode prepared by directly coating the electrode active material on the current collector foil. It has better electrical contact (that is, the porous structure of the current collector can enhance the bonding force between the current collector and the active material of the film), which is favorable for large current charge and discharge;
  • the current collector having a three-dimensional network porous structure in the present invention provides a "conducting and yet High toughness" skeleton, which not only serves as an electrode support and current collector, but also can utilize its physical and chemical affinity to interdiffusion or partial interdiffusion with the active anode material during heat treatment, thereby improving the structure of the entire battery. Coordination of stability and performance; on the other hand, since the system itself has a three-dimensional network porous structure, the contact area between the material and the electrolyte can be greatly improved, and the polarization can be reduced; the volume of the alloy electrode during charging and discharging can be alleviated. Change, improve the charge and discharge cycle performance of the alloy electrode; can also improve the high rate charge and discharge performance of the alloy electrode.
  • Figure 1 is a flow chart of the method of the present invention.
  • Fig. 2 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 1.
  • Fig. 3 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 2.
  • Fig. 4 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 5.
  • Fig. 5 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 6.
  • Fig. 6 is a graph showing the cycle performance of a three-dimensional porous film silicon-based negative electrode material prepared in Example 1.
  • Example 1 A copper foil mesh having a porosity of 98.0% and an average pore diameter of ⁇ and a thickness of 70 ⁇ m was sequentially ultrasonically cleaned with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface.
  • Impurities such as oxides. ⁇ Using magnetron sputtering, with a purity of 99.99% Si as the target, the copper foil mesh current collector as the substrate, the background vacuum is 1.0x l0_ 3 Pa, the working pressure at the time of sputtering is 0.2Pa, Ar gas Ar The flow rate was 40 sccm, the sputtering power of the Si target was 150 W, the revolution speed of the sample stage was 15 rpm, the sputtering time was 2 hours, and the thickness of the film obtained by sputtering was 300 nm.
  • the obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 700 ° C, a heating rate of 12 ° C / min, and a holding time of 3.5 hours. It is alloyed; then it is cooled to 200 ° C and then insulated for 1.5 h, and then annealed; after the end of the heat, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material.
  • Its electrode active material is mainly Si. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based composite negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2300 mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 95% capacity.
  • Example 2 A copper foam having a porosity of 98.0%, an average pore diameter of 150 ⁇ m, and a thickness of 400 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • the flow rate was 60 sccm
  • the sputtering power of the Si target was 300 W
  • the traveling speed of the sample stage was 20 rpm
  • the sputtering time was 8 hours
  • the thickness of the film obtained by sputtering was 1.0 ⁇ m.
  • the obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 800 ° C, a heating rate of 15 ° C / min, and a holding time of 2 hours. It is alloyed; then it is kept at 200 ° C for another 2 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly Si. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2600 mAh/g, the first efficiency is 92%, and after 50 cycles, it can still maintain 97% capacity.
  • Example 3 A copper foil mesh having a porosity of 98.0%, an average pore diameter of 50 ⁇ m, and a thickness of 50 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass percent) diluted hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface.
  • Impurities such as oxides. ⁇ Using magnetron sputtering, with a purity of 99.998% Si and a purity of 99.99% Sn as targets (and Si: Sn l: l), copper foil mesh current collector as the substrate, the background vacuum is 2.0 Xl (T 4 Pa, working pressure at sputtering is 0.3 Pa, flow rate of Ar gas is 40 sccm, sputtering power of Si target is 200 W, sputtering power of Sn target is 25 W, revolution speed of sample stage is 18 rpm, sputtering The film thickness was 3.0 ⁇ m when the time was 8 hours.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 200 ° C. It is 3 ° C / min, the holding time is 5 hours, it is alloyed; then it is kept at 100 ° C for 3 hours, then it is annealed; after the heat is kept, the electric heating is stopped, so that After cooling to room temperature with the furnace, a three-dimensional porous film silicon-based anode material is obtained, and the electrode active material is mainly a part of alloy formed by Si and Si-Sn. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1300 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 97% capacity.
  • Example 4 A copper mesh having a porosity of 96.0% and an average pore diameter of ⁇ and a thickness of 150 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 230 ° C and a heating rate of 5 °C/min, holding time is 3.5 hours, make it alloying; then let it cool down to 100 °C for another 2 hours, then make it annealed; after the end of the heat, stop electric heating, make it with the furnace
  • a three-dimensional porous silicon-based composite anode material is obtained, and the electrode active material is mainly a part of alloy formed by Si and Si-Sn.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1600mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 94% capacity.
  • Example 5 A copper foil mesh having a porosity of 98.0%, an average pore diameter of 50 ⁇ m, and a thickness of ⁇ was sequentially ultrasonically cleaned with copper, 10% (mass percent) diluted hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface.
  • Impurities such as oxides. ⁇ Using magnetron sputtering, with a purity of 99.996% Si and a purity of 99.995% of Mg as targets (and Si: Mg 6: 1), copper foil mesh current collector as the substrate, the background vacuum is 2.0 Xl (T 4 Pa, working pressure at sputtering is 0.5Pa, flow rate of argon Ar is 50sccm, sputtering power of Si target is 200W, sputtering power of Mg target is 30W, revolution speed of sample stage is 15 rpm, sputtering time is The thickness of the film obtained by sputtering was 2.2 ⁇ m in 4 hours.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 550 ° C and a heating rate of 9 °C/min, holding time is 4 hours, make it alloying; then let it cool down to 150 °C for another 2 hours, let it carry out Annealing treatment; After the end of the heat preservation, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1900 mAh/g, the first efficiency is 90%, and after 50 cycles, it can still maintain 95% capacity.
  • Example 6 A foamed nickel having a porosity of 96.0%, an average pore diameter of 150 ⁇ m, and a thickness of 300 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • Impurities such as matter. ⁇ Using magnetron sputtering, with a purity of 99.999% Si and a purity of 99.999% Mg (and Si: Mg 9: 1), a foamed nickel current collector as the matrix, the background vacuum is 1.0xl (T 4 Pa, working pressure is 0.6 Pa during sputtering, flow rate of Ar gas is 60 sccm, sputtering power of Si target is 300 W, sputtering power of Mg target is 60 W, revolution speed of sample stage is 18 rpm, sputtering time is 6 The thickness of the film obtained by sputtering was 2.0 ⁇ m.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 620 ° C and a heating rate of 10 °. C/min, the holding time is 2.5 hours, and it is alloyed; then it is kept at 200 °C for another hour, then it is annealed; after the heat is kept, the electric heating is stopped, and it is cooled with the furnace.
  • a three-dimensional porous thin film silicon-based negative electrode material is obtained, and the electrode active material is mainly a partial alloy formed of Si and Si-Mg.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2100 mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 93% capacity.
  • Example A copper mesh having a porosity of 98.0% and an average pore diameter of ⁇ and a thickness of 50 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 550 ° C and a heating rate of 6 °C/min, holding time is 4 hours, make it alloying; then let it cool down to 150 °C for another 3 hours, then make it annealed; after the end of the heat, stop electric heating, make it with the furnace
  • a three-dimensional porous thin film silicon-based negative electrode material is obtained, and the electrode active material is mainly a partial alloy formed of Si and Si-Al.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2000mAh/g, the first efficiency is 92%, and after 50 cycles, it can still maintain 97% capacity.
  • Example 8 A foamed copper having a porosity of 96.0%, an average pore diameter of 200 ⁇ m, and a thickness of 200 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • Impurities such as matter. ⁇ Using magnetron sputtering, with a purity of 99.999% Si and a purity of 99.999% A1 as targets (and Si: Al 4: 1), a copper foam current collector as the matrix, the background vacuum is 1.0xl (T 5 Pa, working pressure is 0.8Pa during sputtering, flow rate of Ar gas is 60sccm, sputtering power of Si target is 300W, sputtering power of A1 target is 60W, revolution speed of sample table is 20rpm, sputtering time is 6 The film thickness obtained by sputtering is 2.6 ⁇ m.
  • the obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 650 ° C and a heating rate of 8 °. C/min, the holding time is 2 hours, and it is alloyed; then it is kept at 200 °C for 2 hours, then it is retreated.
  • the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si and Si-Al.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1700 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 95% capacity.
  • Example 9 A foamed nickel having a porosity of 95.0%, an average pore diameter of 150 ⁇ m, and a thickness of 400 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace under vacuum. Or heat treatment under an inert atmosphere, the heat treatment temperature is 230 ° C, the heating rate is 5 ° C / min, the holding time is 5 hours, and it is alloyed; then it is kept at 100 ° C for another 3 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si, Si-Sn and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1900 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 98% capacity.
  • Example 10 A copper foil mesh having a porosity of 97.0% and an average pore diameter of ⁇ and a thickness of 90 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace. Heat treatment under vacuum or inert atmosphere, heat treatment temperature is 600 °C, heating rate is 6 °C / min, holding time is 3.5 hours, it is alloyed; then it is kept at 200 °C for 2 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly a part formed of Si, Si-Al and Si-Mg. Alloys. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2200 mAh/g, the first efficiency is 90%, and after 50 cycles, it can still maintain 97% capacity.

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