WO2013159471A1 - Porous thin film silicon-based negative electrode material of high-performance lithium ion cell and preparation method thereof - Google Patents

Porous thin film silicon-based negative electrode material of high-performance lithium ion cell and preparation method thereof Download PDF

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WO2013159471A1
WO2013159471A1 PCT/CN2012/079976 CN2012079976W WO2013159471A1 WO 2013159471 A1 WO2013159471 A1 WO 2013159471A1 CN 2012079976 W CN2012079976 W CN 2012079976W WO 2013159471 A1 WO2013159471 A1 WO 2013159471A1
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dimensional porous
silicon
thin film
film silicon
negative electrode
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PCT/CN2012/079976
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French (fr)
Chinese (zh)
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刘萍
乔永民
李辉
吴敏昌
丁晓阳
李�杰
郑俊军
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宁波杉杉新材料科技有限公司
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Priority to JP2014519406A priority Critical patent/JP5951014B2/en
Publication of WO2013159471A1 publication Critical patent/WO2013159471A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134Electrodes based on metals, Si or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • H01M4/1395Processes of manufacture of electrodes based on metals, Si or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/38Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386Silicon or alloys based on silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/66Selection of materials
    • H01M4/661Metal or alloys, e.g. alloy coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • H01M4/80Porous plates, e.g. sintered carriers
    • H01M4/808Foamed, spongy materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Definitions

  • the invention relates to a lithium ion anode material with high specific capacity and cycle stability, and particularly relates to a porous film silicon-based anode material and a preparation method thereof, and belongs to the field of lithium ion batteries.
  • Lithium-ion batteries are known as the ideal energy source, green energy source and leading power source in the 21st century, showing broad application prospects and potentially huge economic benefits. With advances in the electronics industry, electric vehicles, and aerospace technology, higher performance is required for the performance of lithium-ion batteries that provide energy. Therefore, to achieve breakthroughs in energy density and power density of lithium-ion batteries, the crucial "bottleneck" problem is how to design and develop new electrode materials.
  • the ideal anode material should have the following conditions: 1 with good charge and discharge reversibility and cycle life; 2 small irreversible capacity for the first time; 3 good compatibility with electrolyte solvent; 4 higher specific capacity; 5 safe, no Pollution; 6 rich in resources, low prices, etc.
  • the existing anode materials are difficult to meet the above requirements at the same time.
  • the commercial anode materials for lithium ion batteries are mainly carbon materials (including graphite, hard carbon and soft carbon), and the volume expansion in the process of inserting and deintercalating lithium is basically 9%. Below, it exhibits high coulombic efficiency and excellent cycle stability.
  • Si, Al, Mg, Sn and other metals which can be alloyed with Li and their alloys have a reversible lithium storage capacity much higher than that of graphite anodes, and silicon has the highest Theoretical lithium storage capacity (Li 22 Si 5 , 4200mAh/g), low lithium insertion potential (less than 0.5V) Vs Li/Li+), low electrolyte reactivity, abundant natural reserves, and low price have attracted much attention. Elemental silicon, silicon oxides, silicon metal compounds, and silicon/carbon composites are the most studied silicon-based materials. However, silicon is a semiconductor material that has limited conductivity and is incompatible with conventional electrolytes.
  • the silicon-based material In the process of highly inserting and deintercalating lithium, the silicon-based material has a very significant volume expansion (volume expansion rate >300%) similar to that of general alloy materials. The resulting mechanical stress causes the electrode material to gradually powder during the cycle. The material structure is destroyed and the electrical contact between the active materials is lost, resulting in a decrease in cycle performance.
  • the silicon-based material has a large irreversible capacity for the first time, which may be caused by the decomposition of electrolyte and the presence of impurities such as oxides. The above reasons limit the commercial application of silicon-based materials. Therefore, while obtaining high capacity, how to improve the cycle stability of silicon-based materials, reduce its first irreversible capacity, and make it commercialized and practical, has become the research focus and difficulty of this kind of materials.
  • measures to improve the performance of silicon anodes include: by designing the composition and microstructure of silicon-based anode materials to suppress their volume changes and improve conductivity; developing binders and electrolyte additives suitable for silicon anodes; exploring new current collectors and Electrode structure, etc.
  • the main strategy for improving silicon-based materials is to design the composition and microstructure of the material to accommodate the bulk effect of the silicon and maintain the conductive network of the electrode.
  • the main ways are nanocrystallization, thin film formation, composite, and porous.
  • Nanomaterials have the characteristics of large specific surface area, short ion diffusion path, strong peristaltic property and high plasticity, which can alleviate the volume effect of alloy materials and improve their electrochemical performance.
  • ultrafine powders, especially nanomaterials cause more oxide impurities and more surface film formation and more electrolyte deposition and penetration, which leads to an increase in the first irreversible capacity, significantly reducing the efficiency of the first cycle.
  • the nanomaterials will undergo intense agglomeration during the cycle, and the agglomerated materials no longer exhibit the characteristics of the nanoparticles, thereby limiting the further improvement of the cycle performance.
  • Thinning of materials is also one of the effective methods to effectively improve the cycle stability of materials. This is because the film material has a large specific surface area thickness ratio, and thinning the material can effectively slow down the volume expansion effect due to alloying, control capacity attenuation, and improve cycle stability; and thinning of the material can make lithium The ions diffuse rapidly, resulting in reversibility of the material and high current cycle stability.
  • the compounding is to use the synergistic effect between the components of the composite material to achieve the complementary advantages. It mainly introduces an active or inactive buffer matrix with good conductivity and small volume effect while reducing the volume effect of the silicon active phase, and prepares a multi-phase composite anode material to improve the long-term cycle stability of the material by volume compensation and electrical conductivity.
  • Sex According to the type of the dispersed matrix introduced, it can be roughly classified into two types of a silicon-nonmetal composite system and a silicon-metal composite system. The latter is also classified into a silicon/inert lithium intercalation metal composite system and a silicon/active lithium intercalation metal composite system according to whether the metal has lithium intercalation activity. From the existing research, the silicon/inert lithium intercalation composite has better cycle stability, and the capacity of the silicon/active lithium intercalation composite is higher.
  • the alloying or partial alloying of a metal element which forms a stable compound with silicon can fully utilize the advantages of good electrical conductivity, ductility and high mechanical strength of the metal.
  • the addition of metal can not only improve the charge transfer of Si and lithium.
  • the reaction increases the conductivity of the silicon electrode and suppresses or buffers the volume change of the silicon in the case of charge and discharge. That is, the purpose of recombining with the metal is to improve the conductivity of silicon on the one hand, and to disperse and buffer on the other hand.
  • the inactive lithium intercalation metal material has no lithium intercalation property, although it can improve the cycle performance of the material, but the inert matrix has a limited buffering effect on the volume change of the active material; and a certain volume (mass) material in the battery assembly
  • the contribution to capacity does not limit the volumetric energy density (mass energy density) of the assembled battery, which limits the application of this material in future high energy density batteries.
  • Porous materials have the following advantages due to their unique structure: 1 porous structure has a high specific surface area, large openings allow the transport of liquid electrolyte; 2 porous structure allows the electrolyte to fully contact the active material, reducing lithium ions Diffusion path; 3 porous structure can improve the conductivity of lithium ions, thereby increasing the electrochemical reaction rate; 4 porous structure can provide reactive sites, improve the efficiency of electrochemical reactions; 5 no need to add binder and conductive agent; 6 effective absorption and slow The volume expansion effect of flushing Si improves the cycle performance of the material.
  • nano-materials has a poor effect on improving the cycle properties of alloy materials; single active doping or inert doping can partially inhibit the volume expansion of silicon-based materials, but still cannot completely solve the problem of silicon dispersion and agglomeration.
  • Other methods have limited effectiveness in improving stability and are highly polluting to the environment. Finding a matrix that is more capable of buffering volume changes and having higher conductivity; Designing and constructing a more porous film structure is undoubtedly one of the main strategies for developing silicon-based anode materials.
  • the object of the present invention is to adapt to the development trend of lithium ion batteries, and to solve the problem of serious volume effect of lithium ion battery high-capacity silicon-based anode material in electrochemical lithium-intercalation process, affecting the cycle performance of electrode materials, and low-level materials.
  • the conductive property provides a novel high-capacity three-dimensional porous thin film silicon-based anode material preparation method with high reversibility and good cycle performance without introducing a conductive agent and a binder.
  • the present invention integrates an active/active, active/inactive composite system, a porous and thin film method to prepare a three-dimensional porous film silicon-based anode material.
  • the technical solution adopted is: a method for preparing a three-dimensional porous film silicon-based anode material for a lithium ion battery, comprising the following steps: Step (1): cleaning a three-dimensional porous current collector material to remove impurities such as surface oil and surface oxide.
  • the three-dimensional porous current collector material is an inert lithium intercalation metal; the inert lithium intercalation metal refers to a metal that cannot form an intermetallic compound or alloy with lithium; and the inert lithium intercalation metal is preferably a copper foil mesh, considering economic cost.
  • the active lithium intercalation metal Means a metal that forms an intermetallic compound or alloy with lithium, such as magnesium, calcium, aluminum, bismuth, tin, lead, arsenic, antimony, bismuth, platinum, silver, gold, cadmium, indium, etc.;
  • the active lithium intercalation metal is preferably tin, magnesium and aluminum.
  • silicon based refers to a lithium ion battery anode material that uses silicon and a silicon metal alloy as active materials.
  • vacuum means a degree of vacuum of at least lx 10- 2 Pa.
  • the copper foil mesh, the copper mesh or the foamed copper has a porosity of not less than 95.0%, an average pore diameter of 50 to 200 ⁇ m, and a thickness of 50 ⁇ m to 400 ⁇ m.
  • the purity of the elemental silicon target used is at least 99.99%.
  • the purity of the Sn target, the Mg target, and the A1 target used was at least 99.99%.
  • the "purity” refers to the mass percentage.
  • the mass ratio of the elemental silicon to the metal M is between 1:1 and 9:1. When two or more metals are used, the ratio of the mass sum of the elemental silicon to the two or more metals is 1:1. Until 9:1.
  • the composition of the alloy film is controlled mainly by controlling the sputtering power of the silicon target and the metal target, and the ratio of silicon to metal directly affects the capacity and cycle stability of the porous film material.
  • the working conditions of the magnetron sputtering method are: (1) the background vacuum is 1.0 ⁇ 10-5 to 1. Ox 10- 3 Pa; (2) the working pressure during sputtering is 0.2 to 0.8 Pa; (3) The flow rate of argon Ar is 40 to 60 sccm; (4) The sputtering power of different targets is as follows: Si is 150 to 300 W, A1 is 30 to 60 W, Sn is 25 to 50 W, and Mg is 30 to 60 W; (5) The sample table revolution speed is 15 to 20 rpm; (6) The sputtering time is 2 to 8 hours.
  • the term "working gas pressure” refers to the pressure of an inert gas (e.g., argon) used in performing a magnetron sputtering operation.
  • the magnetron sputtering porous film has a thickness of 300 nm to 3 ⁇ m.
  • the heat treatment refers to heating the three-dimensional porous thin film silicon-based electrode precursor obtained in the step (2) to 200 ° C to 800 ° C and making it at 200 ° C. After being kept at 800 ° C for 2 to 5 hours, it is alloyed; then, after cooling to 100 ° C to 200 ° C, it is further incubated for 1 to 3 hours to be annealed; The electric heating is stopped, allowed to cool to room temperature with the furnace, and the heat treatment process is always maintained in a vacuum or an inert atmosphere.
  • the rate of temperature rise during the temperature increase is 3 to 15 ° C / min.
  • the "warming to 200 ° C to 800 ° C” means heating from room temperature to 200 ° C to 800 ° C:.
  • the heat treatment is carried out in a vacuum or an inert atmosphere.
  • the "heat treatment in a vacuum or an inert atmosphere” means the process of the heat treatment, including the temperature rise, the two heat preservation, and the stage of cooling with the furnace are always kept vacuum or inert. Atmosphere.
  • the vacuum device can be allowed to be turned off.
  • the alloying treatment means holding the alloy at a temperature lower than the melting point of the substrate, Si and metal M and the eutectic temperature of the relevant alloy for a period of time, by interdiffusion or partial interdiffusion to form a corresponding alloy, alloy
  • the formation is beneficial to improve the electrochemical performance (specific capacity and cycle performance) of the three-dimensional porous thin film silicon-based anode material.
  • the annealing treatment can promote the homogenization of the alloy composition, grain refinement, stress elimination, increase the bonding force between the material and the current collector, and improve the plasticity for processing.
  • the heat treatment improves the microstructure of the three-dimensional porous film silicon-based electrode precursor, so that the elemental silicon or Si-M microparticles are uniformly and stably distributed in the three-dimensional network structure of the copper foil mesh, the copper mesh, the copper foam or the foamed nickel.
  • the bonding between the materials and the matrix is improved, and the mechanical properties of the material are also improved, thereby suppressing the volume change of the active material during charging and discharging, and improving the cycle stability of the silicon-based anode material.
  • Another aspect of the invention provides a high performance lithium ion battery three dimensional porous film silicon based negative electrode material prepared by the method described herein.
  • the active material of the porous film electrode of the present invention is mainly a partial alloy formed of Si and Si-M; the specific storage capacity of lithium can be adjusted by the content of high-capacity silicon as the main active material in the electrode active material.
  • the active lithium intercalation metal M itself has good conductivity and lithium intercalation performance, and the invention utilizes the lithium intercalation effect of Si and metal M at different potentials, so that the volume expansion of the material occurs at different potentials, which can alleviate the volume Internal stress caused by the effect, thereby enhancing the structural stability of the material and improving its cycle performance;
  • the electrode active material is sputtered into the three-dimensional network porous structure of the current collector in the present invention, without introducing an adhesive, as compared with the electrode prepared by directly coating the electrode active material on the current collector foil. It has better electrical contact (that is, the porous structure of the current collector can enhance the bonding force between the current collector and the active material of the film), which is favorable for large current charge and discharge;
  • the current collector having a three-dimensional network porous structure in the present invention provides a "conducting and yet High toughness" skeleton, which not only serves as an electrode support and current collector, but also can utilize its physical and chemical affinity to interdiffusion or partial interdiffusion with the active anode material during heat treatment, thereby improving the structure of the entire battery. Coordination of stability and performance; on the other hand, since the system itself has a three-dimensional network porous structure, the contact area between the material and the electrolyte can be greatly improved, and the polarization can be reduced; the volume of the alloy electrode during charging and discharging can be alleviated. Change, improve the charge and discharge cycle performance of the alloy electrode; can also improve the high rate charge and discharge performance of the alloy electrode.
  • Figure 1 is a flow chart of the method of the present invention.
  • Fig. 2 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 1.
  • Fig. 3 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 2.
  • Fig. 4 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 5.
  • Fig. 5 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 6.
  • Fig. 6 is a graph showing the cycle performance of a three-dimensional porous film silicon-based negative electrode material prepared in Example 1.
  • Example 1 A copper foil mesh having a porosity of 98.0% and an average pore diameter of ⁇ and a thickness of 70 ⁇ m was sequentially ultrasonically cleaned with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface.
  • Impurities such as oxides. ⁇ Using magnetron sputtering, with a purity of 99.99% Si as the target, the copper foil mesh current collector as the substrate, the background vacuum is 1.0x l0_ 3 Pa, the working pressure at the time of sputtering is 0.2Pa, Ar gas Ar The flow rate was 40 sccm, the sputtering power of the Si target was 150 W, the revolution speed of the sample stage was 15 rpm, the sputtering time was 2 hours, and the thickness of the film obtained by sputtering was 300 nm.
  • the obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 700 ° C, a heating rate of 12 ° C / min, and a holding time of 3.5 hours. It is alloyed; then it is cooled to 200 ° C and then insulated for 1.5 h, and then annealed; after the end of the heat, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material.
  • Its electrode active material is mainly Si. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based composite negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2300 mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 95% capacity.
  • Example 2 A copper foam having a porosity of 98.0%, an average pore diameter of 150 ⁇ m, and a thickness of 400 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • the flow rate was 60 sccm
  • the sputtering power of the Si target was 300 W
  • the traveling speed of the sample stage was 20 rpm
  • the sputtering time was 8 hours
  • the thickness of the film obtained by sputtering was 1.0 ⁇ m.
  • the obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 800 ° C, a heating rate of 15 ° C / min, and a holding time of 2 hours. It is alloyed; then it is kept at 200 ° C for another 2 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly Si. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2600 mAh/g, the first efficiency is 92%, and after 50 cycles, it can still maintain 97% capacity.
  • Example 3 A copper foil mesh having a porosity of 98.0%, an average pore diameter of 50 ⁇ m, and a thickness of 50 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass percent) diluted hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface.
  • Impurities such as oxides. ⁇ Using magnetron sputtering, with a purity of 99.998% Si and a purity of 99.99% Sn as targets (and Si: Sn l: l), copper foil mesh current collector as the substrate, the background vacuum is 2.0 Xl (T 4 Pa, working pressure at sputtering is 0.3 Pa, flow rate of Ar gas is 40 sccm, sputtering power of Si target is 200 W, sputtering power of Sn target is 25 W, revolution speed of sample stage is 18 rpm, sputtering The film thickness was 3.0 ⁇ m when the time was 8 hours.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 200 ° C. It is 3 ° C / min, the holding time is 5 hours, it is alloyed; then it is kept at 100 ° C for 3 hours, then it is annealed; after the heat is kept, the electric heating is stopped, so that After cooling to room temperature with the furnace, a three-dimensional porous film silicon-based anode material is obtained, and the electrode active material is mainly a part of alloy formed by Si and Si-Sn. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1300 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 97% capacity.
  • Example 4 A copper mesh having a porosity of 96.0% and an average pore diameter of ⁇ and a thickness of 150 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 230 ° C and a heating rate of 5 °C/min, holding time is 3.5 hours, make it alloying; then let it cool down to 100 °C for another 2 hours, then make it annealed; after the end of the heat, stop electric heating, make it with the furnace
  • a three-dimensional porous silicon-based composite anode material is obtained, and the electrode active material is mainly a part of alloy formed by Si and Si-Sn.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1600mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 94% capacity.
  • Example 5 A copper foil mesh having a porosity of 98.0%, an average pore diameter of 50 ⁇ m, and a thickness of ⁇ was sequentially ultrasonically cleaned with copper, 10% (mass percent) diluted hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface.
  • Impurities such as oxides. ⁇ Using magnetron sputtering, with a purity of 99.996% Si and a purity of 99.995% of Mg as targets (and Si: Mg 6: 1), copper foil mesh current collector as the substrate, the background vacuum is 2.0 Xl (T 4 Pa, working pressure at sputtering is 0.5Pa, flow rate of argon Ar is 50sccm, sputtering power of Si target is 200W, sputtering power of Mg target is 30W, revolution speed of sample stage is 15 rpm, sputtering time is The thickness of the film obtained by sputtering was 2.2 ⁇ m in 4 hours.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 550 ° C and a heating rate of 9 °C/min, holding time is 4 hours, make it alloying; then let it cool down to 150 °C for another 2 hours, let it carry out Annealing treatment; After the end of the heat preservation, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1900 mAh/g, the first efficiency is 90%, and after 50 cycles, it can still maintain 95% capacity.
  • Example 6 A foamed nickel having a porosity of 96.0%, an average pore diameter of 150 ⁇ m, and a thickness of 300 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • Impurities such as matter. ⁇ Using magnetron sputtering, with a purity of 99.999% Si and a purity of 99.999% Mg (and Si: Mg 9: 1), a foamed nickel current collector as the matrix, the background vacuum is 1.0xl (T 4 Pa, working pressure is 0.6 Pa during sputtering, flow rate of Ar gas is 60 sccm, sputtering power of Si target is 300 W, sputtering power of Mg target is 60 W, revolution speed of sample stage is 18 rpm, sputtering time is 6 The thickness of the film obtained by sputtering was 2.0 ⁇ m.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 620 ° C and a heating rate of 10 °. C/min, the holding time is 2.5 hours, and it is alloyed; then it is kept at 200 °C for another hour, then it is annealed; after the heat is kept, the electric heating is stopped, and it is cooled with the furnace.
  • a three-dimensional porous thin film silicon-based negative electrode material is obtained, and the electrode active material is mainly a partial alloy formed of Si and Si-Mg.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2100 mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 93% capacity.
  • Example A copper mesh having a porosity of 98.0% and an average pore diameter of ⁇ and a thickness of 50 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 550 ° C and a heating rate of 6 °C/min, holding time is 4 hours, make it alloying; then let it cool down to 150 °C for another 3 hours, then make it annealed; after the end of the heat, stop electric heating, make it with the furnace
  • a three-dimensional porous thin film silicon-based negative electrode material is obtained, and the electrode active material is mainly a partial alloy formed of Si and Si-Al.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2000mAh/g, the first efficiency is 92%, and after 50 cycles, it can still maintain 97% capacity.
  • Example 8 A foamed copper having a porosity of 96.0%, an average pore diameter of 200 ⁇ m, and a thickness of 200 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • Impurities such as matter. ⁇ Using magnetron sputtering, with a purity of 99.999% Si and a purity of 99.999% A1 as targets (and Si: Al 4: 1), a copper foam current collector as the matrix, the background vacuum is 1.0xl (T 5 Pa, working pressure is 0.8Pa during sputtering, flow rate of Ar gas is 60sccm, sputtering power of Si target is 300W, sputtering power of A1 target is 60W, revolution speed of sample table is 20rpm, sputtering time is 6 The film thickness obtained by sputtering is 2.6 ⁇ m.
  • the obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 650 ° C and a heating rate of 8 °. C/min, the holding time is 2 hours, and it is alloyed; then it is kept at 200 °C for 2 hours, then it is retreated.
  • the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si and Si-Al.
  • the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1700 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 95% capacity.
  • Example 9 A foamed nickel having a porosity of 95.0%, an average pore diameter of 150 ⁇ m, and a thickness of 400 ⁇ m was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace under vacuum. Or heat treatment under an inert atmosphere, the heat treatment temperature is 230 ° C, the heating rate is 5 ° C / min, the holding time is 5 hours, and it is alloyed; then it is kept at 100 ° C for another 3 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si, Si-Sn and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 1900 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 98% capacity.
  • Example 10 A copper foil mesh having a porosity of 97.0% and an average pore diameter of ⁇ and a thickness of 90 ⁇ m was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide.
  • the obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace. Heat treatment under vacuum or inert atmosphere, heat treatment temperature is 600 °C, heating rate is 6 °C / min, holding time is 3.5 hours, it is alloyed; then it is kept at 200 °C for 2 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly a part formed of Si, Si-Al and Si-Mg. Alloys. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
  • the obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V.
  • the discharge capacity of the negative pole piece can reach 2200 mAh/g, the first efficiency is 90%, and after 50 cycles, it can still maintain 97% capacity.

Abstract

Disclosed are a porous thin film silicon-based negative electrode material of a high-performance lithium ion cell and a preparation method thereof. The present invention adopts a three-dimensional porous current collector material, such as a copper foil mesh, a copper wire mesh, foamed copper, or foamed nickel. A magnetron sputtering method is used to form a layer of a silicon thin film or a silicon-metal composite thin film on the copper foil mesh, copper wire mesh, foamed copper, or foamed nickel, and then a three-dimensional porous thin film silicon-based negative electrode material is formed through heat treatment. In the present invention, with the forming of the three-dimensional porous structure and the silicon-metal alloy, and a fine bonding force between the thin film negative electrode material and the three-dimensional porous current collector, the cell prepared using the porous thin film silicon-based negative electrode material has high discharge capacity and initial charge-discharge efficiency, and good cycle performance. The method of the present invention is easy to operate, and has wide application prospect in the field of lithium cell negative electrode.

Description

高性能锂离子电池多孔薄膜硅基负极材料及其制备方法  High-performance lithium ion battery porous film silicon-based anode material and preparation method thereof
技术领域 Technical field
本发明涉及的是一种高比容量、 循环稳定性的锂离子负极材料, 具体 涉及多孔薄膜硅基负极材料及其制备方法, 属于锂离子电池领域。  The invention relates to a lithium ion anode material with high specific capacity and cycle stability, and particularly relates to a porous film silicon-based anode material and a preparation method thereof, and belongs to the field of lithium ion batteries.
背景技术 Background technique
锂离子电池被称为 21 世纪的理想能源、 绿色能源和主导电源, 显示 出了广阔的应用前景和潜在的巨大经济效益。 而随着电子工业、 电动汽车 及航空航天技术的进步, 对为其提供能量的锂离子电池的性能则提出了更 高的要求。 因此要实现锂离子电池在能量密度和功率密度上的突破, 至关 重要的 "瓶颈" 问题是如何设计和发展新型电极材料。  Lithium-ion batteries are known as the ideal energy source, green energy source and leading power source in the 21st century, showing broad application prospects and potentially huge economic benefits. With advances in the electronics industry, electric vehicles, and aerospace technology, higher performance is required for the performance of lithium-ion batteries that provide energy. Therefore, to achieve breakthroughs in energy density and power density of lithium-ion batteries, the crucial "bottleneck" problem is how to design and develop new electrode materials.
在锂离子电池的研究领域, 其研究重点是负极材料。 理想的负极材料 应具备以下几个条件: ①具有良好的充放电可逆性和循环寿命; ②首次不 可逆容量较小; ③与电解质溶剂相容性好; ④较高的比容量; ⑤安全, 无 污染; ⑥资源丰富, 价格低廉等。 现有负极材料很难同时满足上述要求, 目前锂离子电池商业化负极材料主要是碳素类材料(包括石墨、 硬碳和软 碳等), 其嵌脱锂过程中的体积膨胀基本在 9%以下, 表现出较高的库仑效 率和优良的循环稳定性能。但是,石墨电极本身较低的理论储锂容量( LiC6, 372mAh/g )使其很难再取得突破性进展。 因此,研究和开发具有高比容量、 高充放电效率、 高循环性能、 高倍率充放电性能好、 高安全性、 以及低成 本的新型负极材料极具紧迫性, 已成为锂离子电池研究领域的热门课题, 并且对锂离子电池的发展具有十分重要的意义。 In the research field of lithium ion batteries, the research focus is on the anode material. The ideal anode material should have the following conditions: 1 with good charge and discharge reversibility and cycle life; 2 small irreversible capacity for the first time; 3 good compatibility with electrolyte solvent; 4 higher specific capacity; 5 safe, no Pollution; 6 rich in resources, low prices, etc. The existing anode materials are difficult to meet the above requirements at the same time. At present, the commercial anode materials for lithium ion batteries are mainly carbon materials (including graphite, hard carbon and soft carbon), and the volume expansion in the process of inserting and deintercalating lithium is basically 9%. Below, it exhibits high coulombic efficiency and excellent cycle stability. However, the lower theoretical lithium storage capacity of the graphite electrode itself (LiC 6 , 372 mAh/g) makes it difficult to make breakthroughs. Therefore, research and development of new anode materials with high specific capacity, high charge and discharge efficiency, high cycle performance, high rate charge and discharge performance, high safety, and low cost have become extremely urgent, and have become the research field of lithium ion batteries. Hot topics, and is of great significance for the development of lithium-ion batteries.
新型非碳负极材料的研究中发现 Si、 Al、 Mg、 Sn等可与 Li合金化的 金属及其合金类材料, 其可逆储锂的量远远高于石墨类负极, 而其中硅因 具有最高的理论储锂容量(Li22Si5, 4200mAh/g )、 嵌锂电位低(低于 0.5V vs Li/Li+ )、 电解液反应活性低、 自然界储量丰富、 价格低廉等优点而备受 瞩目。 单质硅、 硅的氧化物、 硅的金属化合物以及硅 /碳复合材料是目前研 究最多的硅基材料。 然而, 硅是一种半导体材料, 其导电性有限, 且与常 规电解液不相容。 硅基材料在高度嵌脱锂过程中, 与一般的合金类材料类 似, 均存在非常显著的体积膨胀(体积膨胀率 >300% ), 由此产生的机械应 力使电极材料在循环过程中逐渐粉化, 材料结构被破坏, 活性物质之间电 接触丧失,从而导致循环性能下降。 此外,硅基材料首次不可逆容量较大, 这可能是由电解液分解和氧化物等杂质的存在所引起。 上述原因限制了硅 基材料的商业化应用。 因此, 在获得高容量的同时, 如何改善硅基材料的 循环稳定性, 降低其首次不可逆容量, 使之趋于商业化与实用化, 成为该 类材料的研究重点和难点。 In the research of new non-carbon anode materials, it is found that Si, Al, Mg, Sn and other metals which can be alloyed with Li and their alloys have a reversible lithium storage capacity much higher than that of graphite anodes, and silicon has the highest Theoretical lithium storage capacity (Li 22 Si 5 , 4200mAh/g), low lithium insertion potential (less than 0.5V) Vs Li/Li+), low electrolyte reactivity, abundant natural reserves, and low price have attracted much attention. Elemental silicon, silicon oxides, silicon metal compounds, and silicon/carbon composites are the most studied silicon-based materials. However, silicon is a semiconductor material that has limited conductivity and is incompatible with conventional electrolytes. In the process of highly inserting and deintercalating lithium, the silicon-based material has a very significant volume expansion (volume expansion rate >300%) similar to that of general alloy materials. The resulting mechanical stress causes the electrode material to gradually powder during the cycle. The material structure is destroyed and the electrical contact between the active materials is lost, resulting in a decrease in cycle performance. In addition, the silicon-based material has a large irreversible capacity for the first time, which may be caused by the decomposition of electrolyte and the presence of impurities such as oxides. The above reasons limit the commercial application of silicon-based materials. Therefore, while obtaining high capacity, how to improve the cycle stability of silicon-based materials, reduce its first irreversible capacity, and make it commercialized and practical, has become the research focus and difficulty of this kind of materials.
至今, 提高硅负极性能的措施包括: 通过设计硅基负极材料的组成和 微观结构来抑制其体积变化并改善导电性; 研发适于硅负极的粘结剂和电 解液添加剂; 探索新型集流体及电极结构等。 其中, 硅基材料本身电化学 性能的突破仍是实现硅负极商业化的关键。 改进硅基材料的主要策略是设 计材料的组成和微观结构, 以适应娃的体积效应并维持电极导电网络, 主 要途径有纳米化、 薄膜化、 复合化、 多孔化等。  So far, measures to improve the performance of silicon anodes include: by designing the composition and microstructure of silicon-based anode materials to suppress their volume changes and improve conductivity; developing binders and electrolyte additives suitable for silicon anodes; exploring new current collectors and Electrode structure, etc. Among them, the breakthrough of electrochemical properties of silicon-based materials is still the key to commercialization of silicon anodes. The main strategy for improving silicon-based materials is to design the composition and microstructure of the material to accommodate the bulk effect of the silicon and maintain the conductive network of the electrode. The main ways are nanocrystallization, thin film formation, composite, and porous.
(1) 减小活性体的颗粒尺寸 (如纳米尺寸)是提高合金稳定性的一个 途径。 纳米材料具有比表面积大、 离子扩散路径短、 蠕动性强以及塑性高 等特点, 能够一定程度上緩解合金类材料的体积效应, 并提高其电化学性 能。 然而, 超细粉末尤其是纳米材料, 会引起更多的氧化物杂质和形成更 多的表面膜以及产生较多的电解液沉积和渗透, 这些都会导致首次不可逆 容量的增加, 明显降低首次循环效率; 并且纳米材料在循环过程中会发生 剧烈团聚, 团聚后的材料己经不再表现出纳米粒子的特性, 从而限制了其 循环性能的进一步提高。  (1) Reducing the particle size of the active body (such as nanometer size) is one way to improve the stability of the alloy. Nanomaterials have the characteristics of large specific surface area, short ion diffusion path, strong peristaltic property and high plasticity, which can alleviate the volume effect of alloy materials and improve their electrochemical performance. However, ultrafine powders, especially nanomaterials, cause more oxide impurities and more surface film formation and more electrolyte deposition and penetration, which leads to an increase in the first irreversible capacity, significantly reducing the efficiency of the first cycle. And the nanomaterials will undergo intense agglomeration during the cycle, and the agglomerated materials no longer exhibit the characteristics of the nanoparticles, thereby limiting the further improvement of the cycle performance.
(2) 材料薄膜化也是有效提高材料循环稳定性的有效方法之一。 这是 因为薄膜材料具有较大的比表面积厚度之比, 将材料薄膜化可以有效地减 緩由于合金化带来的体积膨胀效应, 控制容量衰减, 提高循环稳定性; 并 且材料薄膜化可使锂离子快速的扩散, 从而材料的可逆性以及大电流循环 稳定性好。 (3) 复合化是利用复合材料各组分间的协同效应, 达到优势互补目的。 主要是在降低硅活性相体积效应的同时引入导电性好、 体积效应小的活性 或非活性緩冲基体, 制备多相复合负极材料, 通过体积补偿、 增加导电性 等方式提高材料的长期循环稳定性。 根据引入的分散基体的类别, 可以粗 略地分为硅-非金属复合体系和硅-金属复合体系两种类型。 后者又据金属 是否具有嵌锂活性, 可分为硅 /惰性嵌锂金属复合体系与硅 /活性嵌锂金属 复合体系。从现有研究来看,硅 /惰性嵌锂金属复合材料的循环稳定性较好, 硅 /活性嵌锂金属复合材料的容量较高。 (2) Thinning of materials is also one of the effective methods to effectively improve the cycle stability of materials. This is because the film material has a large specific surface area thickness ratio, and thinning the material can effectively slow down the volume expansion effect due to alloying, control capacity attenuation, and improve cycle stability; and thinning of the material can make lithium The ions diffuse rapidly, resulting in reversibility of the material and high current cycle stability. (3) The compounding is to use the synergistic effect between the components of the composite material to achieve the complementary advantages. It mainly introduces an active or inactive buffer matrix with good conductivity and small volume effect while reducing the volume effect of the silicon active phase, and prepares a multi-phase composite anode material to improve the long-term cycle stability of the material by volume compensation and electrical conductivity. Sex. According to the type of the dispersed matrix introduced, it can be roughly classified into two types of a silicon-nonmetal composite system and a silicon-metal composite system. The latter is also classified into a silicon/inert lithium intercalation metal composite system and a silicon/active lithium intercalation metal composite system according to whether the metal has lithium intercalation activity. From the existing research, the silicon/inert lithium intercalation composite has better cycle stability, and the capacity of the silicon/active lithium intercalation composite is higher.
釆用与硅能形成稳定化合物的金属元素与硅进行合金化或部分合金 化, 可充分利用金属良好的导电性、 延展性以及机械强度高等优势, 金属 的加入不仅可以提高 Si与锂的电荷传递反应, 从而提高硅电极的导电性, 并且可以抑制或緩冲硅在充放电情况下的体积变化。 即与金属复合的目的 一方面是提高硅的导电性, 另一方面是起到分散和緩冲作用。 活性嵌锂金 属材料(M=Sn、 Mg、 A1等)本身具有嵌锂性能, 利用其作为活性中心的 Si、 M在不同电位下的嵌锂效应, 使材料的体积膨胀发生在不同电位下, 可緩解由于体积效应带来的内应力, 从而增强材料的结构稳定性, 提高其 循环性能。 其中, 锡形成 Li4.4Sn合金时, 其理论质量比容量为 994mAh/g, 体积比容量更可高达 7200mAh/cm3; A1理论比容量为 2235mAh/g; Mg理 论比容量为 2205mAh/g, 相对于碳类材料具有高的比容量, 这一点对于电 器小型化的发展具有很大意义。 The alloying or partial alloying of a metal element which forms a stable compound with silicon can fully utilize the advantages of good electrical conductivity, ductility and high mechanical strength of the metal. The addition of metal can not only improve the charge transfer of Si and lithium. The reaction increases the conductivity of the silicon electrode and suppresses or buffers the volume change of the silicon in the case of charge and discharge. That is, the purpose of recombining with the metal is to improve the conductivity of silicon on the one hand, and to disperse and buffer on the other hand. The active lithium intercalation metal material (M=Sn, Mg, A1, etc.) itself has lithium intercalation property, and the lithium intercalation effect of Si and M at different potentials as the active center causes the volume expansion of the material to occur at different potentials. It can alleviate the internal stress caused by the volume effect, thereby enhancing the structural stability of the material and improving its cycle performance. Among them, when tin forms Li 4 . 4 Sn alloy, its theoretical mass specific capacity is 994 mAh/g, and the volume specific capacity can be as high as 7200 mAh/cm 3 ; A1 theoretical specific capacity is 2235 mAh/g; Mg theoretical specific capacity is 2205 mAh/g. Compared with carbon materials, it has a high specific capacity, which is of great significance for the development of electrical miniaturization.
非活性嵌锂金属材料由于本身不具有嵌锂性能, 虽然能够提高材料的 循环性能, 但是惰性基体对活性材料的体积变化起到的緩冲作用有限; 并 且电池组装中一定体积(质量) 的材料对容量没有贡献, 使得组装的电池 体积能量密度(质量能量密度) 受到限制, 也就制约了这种材料在未来高 能量密度电池中的应用。  The inactive lithium intercalation metal material has no lithium intercalation property, although it can improve the cycle performance of the material, but the inert matrix has a limited buffering effect on the volume change of the active material; and a certain volume (mass) material in the battery assembly The contribution to capacity does not limit the volumetric energy density (mass energy density) of the assembled battery, which limits the application of this material in future high energy density batteries.
可见, 硅基复合材料在研究上所取得的成绩离产业化还有很大的差 距。  It can be seen that the achievements in the research of silicon-based composite materials are far from the industrialization.
(4)设计多孔性结构, 预留膨胀空间。 多孔材料由于其独特的结构具 有以下优点: ①多孔结构具有较高的比表面积, 大的开孔允许液体电解质 的输运; ②多孔结构可以使电解液与活性材料充分接触, 减少了锂离子的 扩散路径; ③多孔结构可以提高锂离子的电导率, 从而提高电化学反应速 率; ④多孔结构可以提供反应活性位, 提高电化学反应效率; ⑤无需添加 粘结剂和导电剂; ⑥有效吸收和緩冲 Si的体积膨胀效应,提高材料的循环 性能。 (4) Design a porous structure and reserve an expansion space. Porous materials have the following advantages due to their unique structure: 1 porous structure has a high specific surface area, large openings allow the transport of liquid electrolyte; 2 porous structure allows the electrolyte to fully contact the active material, reducing lithium ions Diffusion path; 3 porous structure can improve the conductivity of lithium ions, thereby increasing the electrochemical reaction rate; 4 porous structure can provide reactive sites, improve the efficiency of electrochemical reactions; 5 no need to add binder and conductive agent; 6 effective absorption and slow The volume expansion effect of flushing Si improves the cycle performance of the material.
综上所述, 釆用纳米材料对改善合金材料循环性能的效果不佳; 单一 活性掺杂或者惰性掺杂虽然能够部分抑制硅基材料的体积膨胀, 但仍无法 完全解决硅的分散和团聚问题; 其他方法提高稳定性的效果有限, 且对环 境有较大污染。 寻找更能緩冲体积变化、 具有更高导电性的基质; 设计和 构筑更优越的多孔薄膜结构无疑是发展硅基负极材料的主要策略之一。  In summary, the use of nano-materials has a poor effect on improving the cycle properties of alloy materials; single active doping or inert doping can partially inhibit the volume expansion of silicon-based materials, but still cannot completely solve the problem of silicon dispersion and agglomeration. Other methods have limited effectiveness in improving stability and are highly polluting to the environment. Finding a matrix that is more capable of buffering volume changes and having higher conductivity; Designing and constructing a more porous film structure is undoubtedly one of the main strategies for developing silicon-based anode materials.
发明内容 Summary of the invention
本发明的目的在于适应锂离子电池的发展趋势, 针对锂离子电池高容 量硅基负极材料在电化学嵌脱锂过程中产生的严重体积效应, 影响电极材 料循环性能的问题, 以及该类材料低导电特性, 在不引入导电剂和粘结剂 的前提下, 提供一种充放电过程可逆性高、 循环性能良好的新型高容量三 维多孔薄膜硅基负极材料的制备方法。  The object of the present invention is to adapt to the development trend of lithium ion batteries, and to solve the problem of serious volume effect of lithium ion battery high-capacity silicon-based anode material in electrochemical lithium-intercalation process, affecting the cycle performance of electrode materials, and low-level materials. The conductive property provides a novel high-capacity three-dimensional porous thin film silicon-based anode material preparation method with high reversibility and good cycle performance without introducing a conductive agent and a binder.
为实现上述目的, 本发明综合活性 /活性、 活性 /非活性复合体系、 多 孔化及薄膜化方法制备三维多孔薄膜硅基负极材料。 所釆用的技术方案 是: 锂离子电池三维多孔薄膜硅基负极材料的制备方法, 包括以下步骤: 步骤 (1):清洗三维多孔集流体材料,以去除表面油污和表面氧化物等杂质, 所述三维多孔集流体材料材质为惰性嵌锂金属; 所述惰性嵌锂金属是指与 锂不能形成金属间化合物或合金的金属; 由于考虑经济成本, 所述惰性嵌 锂金属优选为铜箔网、 铜丝网、 泡沫铜和泡沫镍中任意一种; 步骤 (2): 釆 用磁控溅射法 [Radio-frequency (RF) magnetron sputtering method] , 将单质 硅、 或单质硅与金属 Μ共溅射( Co-sputtering )在铜箔网、 铜丝网、 泡沫 铜或泡沫镍集流体上,得到三维多孔薄膜硅基电极前驱体, 所述金属 M为 活性嵌锂金属; 所述活性嵌锂金属是指与锂能形成金属间化合物或合金的 金属, 如镁、 钙、 铝、 锗、 锡、 铅、 砷、 锑、 铋、 铂、 银、 金、 辞、 镉、 铟等; 鉴于环保要求和经济成本, 所述活性嵌锂金属优选为锡、 镁和铝中 的任意一种或两种以上的组合; 以及步骤 (3): 将步骤 (2)所得的所述三维多 孔薄膜硅基电极前驱体在真空或惰性气氛下进行热处理, 得到三维多孔薄 膜硅基负极材料。 如本文所使用, 术语 "硅基" 是指以硅和硅金属合金为 活性物质的锂离子电池负极材料。 术语 "真空" 是指真空度至少为 l x 10-2Pa。 In order to achieve the above object, the present invention integrates an active/active, active/inactive composite system, a porous and thin film method to prepare a three-dimensional porous film silicon-based anode material. The technical solution adopted is: a method for preparing a three-dimensional porous film silicon-based anode material for a lithium ion battery, comprising the following steps: Step (1): cleaning a three-dimensional porous current collector material to remove impurities such as surface oil and surface oxide. The three-dimensional porous current collector material is an inert lithium intercalation metal; the inert lithium intercalation metal refers to a metal that cannot form an intermetallic compound or alloy with lithium; and the inert lithium intercalation metal is preferably a copper foil mesh, considering economic cost. Any one of copper wire mesh, copper foam, and foamed nickel; Step (2): RaRotate elemental silicon, or elemental silicon and metal ruthenium by magnetron sputtering method [Radio-frequency (RF) magnetron sputtering method] Co-sputtering on a copper foil mesh, a copper mesh, a copper foam or a foamed nickel current collector to obtain a three-dimensional porous thin film silicon-based electrode precursor, the metal M being an active lithium intercalation metal; the active lithium intercalation metal Means a metal that forms an intermetallic compound or alloy with lithium, such as magnesium, calcium, aluminum, bismuth, tin, lead, arsenic, antimony, bismuth, platinum, silver, gold, cadmium, indium, etc.; In view of environmental requirements and economic costs, the active lithium intercalation metal is preferably tin, magnesium and aluminum. Any one or a combination of two or more; and the step (3): subjecting the three-dimensional porous thin film silicon-based electrode precursor obtained in the step (2) to heat treatment under vacuum or an inert atmosphere to obtain a three-dimensional porous thin film silicon-based negative electrode material. As used herein, the term "silicon based" refers to a lithium ion battery anode material that uses silicon and a silicon metal alloy as active materials. The term "vacuum" means a degree of vacuum of at least lx 10- 2 Pa.
在上述技术方案的步骤 (1)中, 所述铜箔网、 铜丝网或泡沫铜的孔隙率 不低于 95.0%, 平均孔径为 50至 200μπι, 厚度为 50μπι至 400μπι。  In the step (1) of the above technical solution, the copper foil mesh, the copper mesh or the foamed copper has a porosity of not less than 95.0%, an average pore diameter of 50 to 200 μm, and a thickness of 50 μm to 400 μm.
在上述技术方案的步骤 (2)中, 所釆用单质硅靶的纯度至少为 99.99%。 所釆用 Sn靶、 Mg靶、 A1靶的纯度为至少为 99.99%。 所述的 "纯度" 是 指质量百分比。 所述单质硅与所述金属 M的质量比例在 1 :1至 9:1之间, 当使用两种以上的金属时, 所述单质硅与两种以上金属的质量和的比值为 1:1至 9:1。主要通过控制硅靶与金属靶的溅射功率来控制合金薄膜的组分, 硅与金属的比例直接影响多孔薄膜材料的容量及循环稳定性。  In the step (2) of the above technical solution, the purity of the elemental silicon target used is at least 99.99%. The purity of the Sn target, the Mg target, and the A1 target used was at least 99.99%. The "purity" refers to the mass percentage. The mass ratio of the elemental silicon to the metal M is between 1:1 and 9:1. When two or more metals are used, the ratio of the mass sum of the elemental silicon to the two or more metals is 1:1. Until 9:1. The composition of the alloy film is controlled mainly by controlling the sputtering power of the silicon target and the metal target, and the ratio of silicon to metal directly affects the capacity and cycle stability of the porous film material.
所述步骤 (2)中, 所述磁控溅射法的工作条件为: (1) 本底真空度为 1.0x10-5至 1. Ox 10-3Pa; (2) 溅射时工作气压为 0.2至 0.8Pa; (3) 氩气 Ar的 流量为 40至 60sccm; (4) 不同靶材的溅射功率如下: Si为 150至 300W、 A1为 30至 60W、 Sn为 25至 50W、 Mg为 30至 60W; (5)样品台公转运 动速度为 15至 20rpm; (6) 溅射时间为 2至 8小时。 如本文所使用, 术语 "工作气压" 是指在进行磁控溅射操作时所用惰性气体(例如氩气) 的压 力。 In the step (2), the working conditions of the magnetron sputtering method are: (1) the background vacuum is 1.0×10-5 to 1. Ox 10- 3 Pa; (2) the working pressure during sputtering is 0.2 to 0.8 Pa; (3) The flow rate of argon Ar is 40 to 60 sccm; (4) The sputtering power of different targets is as follows: Si is 150 to 300 W, A1 is 30 to 60 W, Sn is 25 to 50 W, and Mg is 30 to 60 W; (5) The sample table revolution speed is 15 to 20 rpm; (6) The sputtering time is 2 to 8 hours. As used herein, the term "working gas pressure" refers to the pressure of an inert gas (e.g., argon) used in performing a magnetron sputtering operation.
所述步骤 (2)中, 所述磁控溅射的多孔薄膜厚度为 300nm至 3μπι。 在上述技术方案的步骤 (3)中, 所述热处理是指将所述步骤( 2 )所得的 三维多孔薄膜硅基电极前驱体升温到 200°C至 800 °C , 并使其在 200°C至 800 °C的条件下保温 2至 5小时,使其进行合金化处理;接着使其降温至 100 °C至 200°C时再保温 1至 3小时, 使其进行退火处理; 保温结束后, 停止 电加热,使其随炉冷却至室温,并且热处理过程始终保持真空或惰性气氛。 所述升温过程中的升温速率为 3至 15°C/min。 所述 "升温到 200°C至 800 °C " 是指从室温升温到 200°C至 800°C:。 为了防止氧化, 所述热处理在真 空或惰性气氛中进行。 所述 "真空或惰性气氛中进行热处理" 是指所述热 处理的过程, 包括升温、 两个保温和随炉冷却的阶段始终保持真空或惰性 气氛。 但是为了节约能源特别是当釆用真空装置形成的真空条件时, 由于 真空装置的运行需要消耗能量, 当冷却至 85°C以下时, 可以允许关闭真空 装置。 In the step (2), the magnetron sputtering porous film has a thickness of 300 nm to 3 μm. In the step (3) of the above technical solution, the heat treatment refers to heating the three-dimensional porous thin film silicon-based electrode precursor obtained in the step (2) to 200 ° C to 800 ° C and making it at 200 ° C. After being kept at 800 ° C for 2 to 5 hours, it is alloyed; then, after cooling to 100 ° C to 200 ° C, it is further incubated for 1 to 3 hours to be annealed; The electric heating is stopped, allowed to cool to room temperature with the furnace, and the heat treatment process is always maintained in a vacuum or an inert atmosphere. The rate of temperature rise during the temperature increase is 3 to 15 ° C / min. The "warming to 200 ° C to 800 ° C" means heating from room temperature to 200 ° C to 800 ° C:. In order to prevent oxidation, the heat treatment is carried out in a vacuum or an inert atmosphere. The "heat treatment in a vacuum or an inert atmosphere" means the process of the heat treatment, including the temperature rise, the two heat preservation, and the stage of cooling with the furnace are always kept vacuum or inert. Atmosphere. However, in order to save energy, especially when vacuum conditions are formed by using a vacuum device, since the operation of the vacuum device requires energy consumption, when it is cooled to below 85 ° C, the vacuum device can be allowed to be turned off.
如本文所使用, 所述合金化处理指在低于基体、 Si和金属 M的熔点 以及相关合金的低共熔点温度下保温一段时间, 通过发生互扩散或部分互 扩散以形成相应的合金, 合金的形成有利于提高三维多孔薄膜硅基负极材 料的电化学性能 (比容量和循环性能)。 所述退火处理可以起到促进合金 成分均匀化、 晶粒细化、 消除应力、 增加材料与集流体结合力, 以及提高 塑性便于加工等作用。 所述热处理改善了三维多孔薄膜硅基电极前驱体的 微观结构, 使得单质硅或 Si-M微颗粒均匀、 稳定地分布在铜箔网、 铜丝 网、 泡沫铜或泡沫镍的三维网状结构中, 提高了材料之间以及与基体的结 合力, 材料的机械性能也随之提高, 从而抑制了活性材料在充放电过程中 的体积变化, 提高了硅基负极材料的循环稳定性。  As used herein, the alloying treatment means holding the alloy at a temperature lower than the melting point of the substrate, Si and metal M and the eutectic temperature of the relevant alloy for a period of time, by interdiffusion or partial interdiffusion to form a corresponding alloy, alloy The formation is beneficial to improve the electrochemical performance (specific capacity and cycle performance) of the three-dimensional porous thin film silicon-based anode material. The annealing treatment can promote the homogenization of the alloy composition, grain refinement, stress elimination, increase the bonding force between the material and the current collector, and improve the plasticity for processing. The heat treatment improves the microstructure of the three-dimensional porous film silicon-based electrode precursor, so that the elemental silicon or Si-M microparticles are uniformly and stably distributed in the three-dimensional network structure of the copper foil mesh, the copper mesh, the copper foam or the foamed nickel. In the middle, the bonding between the materials and the matrix is improved, and the mechanical properties of the material are also improved, thereby suppressing the volume change of the active material during charging and discharging, and improving the cycle stability of the silicon-based anode material.
本发明的另一方面提供高性能锂离子电池三维多孔薄膜硅基负极材 料, 釆用如本文所述方法制备得到。  Another aspect of the invention provides a high performance lithium ion battery three dimensional porous film silicon based negative electrode material prepared by the method described herein.
本发明的有益效果如下:  The beneficial effects of the present invention are as follows:
(1) 釆用磁控溅射技术, 无需加入导电剂和粘接剂, 电极活性材料的 制备和电极成型同时完成, 简化了工艺过程, 可降低工艺成本。  (1) With magnetron sputtering technology, it is not necessary to add conductive agent and adhesive. The preparation of electrode active material and electrode forming are completed at the same time, which simplifies the process and reduces the process cost.
(2) 本发明多孔薄膜电极的活性材料主要是 Si和 Si-M形成的部分合 金; 可储锂比容量通过电极活性材料中作为主要活性物质的高容量硅的含 量来调节。  (2) The active material of the porous film electrode of the present invention is mainly a partial alloy formed of Si and Si-M; the specific storage capacity of lithium can be adjusted by the content of high-capacity silicon as the main active material in the electrode active material.
(3) 活性嵌锂金属 M本身具有良好的导电性和嵌锂性能, 本发明利用 Si和金属 M在不同电位下的嵌锂效应 ,使材料的体积膨胀发生在不同电位 下, 可緩解由于体积效应带来的内应力, 从而增强材料的结构稳定性, 提 高其循环性能;  (3) The active lithium intercalation metal M itself has good conductivity and lithium intercalation performance, and the invention utilizes the lithium intercalation effect of Si and metal M at different potentials, so that the volume expansion of the material occurs at different potentials, which can alleviate the volume Internal stress caused by the effect, thereby enhancing the structural stability of the material and improving its cycle performance;
(4) 与电极活性物质直接涂布于集流体箔片上制备的电极相比, 本发 明中电极活性材料溅射入集流体的三维网状多孔结构中, 在不引入粘接剂 的情况下, 具有更良好的电接触性(即, 集流体的多孔结构能增强集流体 与薄膜活性材料间的结合力), 有利于大电流充放电;  (4) The electrode active material is sputtered into the three-dimensional network porous structure of the current collector in the present invention, without introducing an adhesive, as compared with the electrode prepared by directly coating the electrode active material on the current collector foil. It has better electrical contact (that is, the porous structure of the current collector can enhance the bonding force between the current collector and the active material of the film), which is favorable for large current charge and discharge;
(5) 本发明中具有三维网状多孔结构的集流体提供了一个 "导电而又 高韧性" 的骨架, 其不仅作为电极支撑体与集流体, 且在热处理过程中, 能够利用本身的物理与化学亲和性与活性负极材料发生互扩散或部分互 扩散, 从而提高整个电池的结构稳定性与性能的协同性; 另一方面, 由于 体系本身具有三维网状多孔结构, 因此可以大大提高材料和电解液的接触 面积, 减小极化; 可緩解合金电极在充放电过程中的体积变化, 改善合金 电极的充放电循环性能; 还可以改善合金电极的高倍率充放电性能。 (5) The current collector having a three-dimensional network porous structure in the present invention provides a "conducting and yet High toughness" skeleton, which not only serves as an electrode support and current collector, but also can utilize its physical and chemical affinity to interdiffusion or partial interdiffusion with the active anode material during heat treatment, thereby improving the structure of the entire battery. Coordination of stability and performance; on the other hand, since the system itself has a three-dimensional network porous structure, the contact area between the material and the electrolyte can be greatly improved, and the polarization can be reduced; the volume of the alloy electrode during charging and discharging can be alleviated. Change, improve the charge and discharge cycle performance of the alloy electrode; can also improve the high rate charge and discharge performance of the alloy electrode.
附图简述 BRIEF DESCRIPTION OF THE DRAWINGS
图 1为本发明方法流程图。  Figure 1 is a flow chart of the method of the present invention.
图 2为实施例 1三维多孔薄膜硅基负极材料。  Fig. 2 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 1.
图 3为实施例 2三维多孔薄膜硅基负极材料。  Fig. 3 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 2.
图 4为实施例 5三维多孔薄膜硅基负极材料。  Fig. 4 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 5.
图 5为实施例 6三维多孔薄膜硅基负极材料。  Fig. 5 is a view showing a three-dimensional porous film silicon-based negative electrode material of Example 6.
图 6为实施例 1制备的三维多孔薄膜硅基负极材料的循环性能。  Fig. 6 is a graph showing the cycle performance of a three-dimensional porous film silicon-based negative electrode material prepared in Example 1.
具体实施方式 detailed description
下面对本发明的实施例作详细说明, 本实施例在以本发明技术方案为 前提下进行实施, 给出了详细的实施方式和具体的操作过程, 但本发明的 保护范围不限于下述的实施例。 The embodiments of the present invention are described in detail below. The present embodiment is implemented on the premise of the technical solution of the present invention, and the detailed implementation manner and the specific operation process are given. However, the protection scope of the present invention is not limited to the following implementation. example.
实施例 1: 将孔隙率为 98.0%, 平均孔径为 ΙΟΟμπι, 厚度 70μπι的铜箔网依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.99%的 Si 为靶材, 铜箔网集流体为基体, 本底真空度为 1.0x l0_3Pa, 溅射时工作气 压为 0.2Pa, 氩气 Ar的流量为 40sccm, Si靶溅射功率为 150W, 样品台公 转运动速度 15rpm, 溅射时间为 2小时, 溅射所得薄膜厚度为 300nm。 将 所得的三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下 进行热处理, 热处理温度为 700 °C , 升温速率为 12°C/min, 保温时间为 3.5 小时, 使其进行合金化处理; 接着使其降温至 200°C再保温 1.5h, 使其进 行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维 多孔薄膜硅基负极材料, 其电极活性材料主要是 Si。 为防止氧化, 热处理 过程始终保持真空或惰性气氛。 Example 1: A copper foil mesh having a porosity of 98.0% and an average pore diameter of ΙΟΟμπι and a thickness of 70 μm was sequentially ultrasonically cleaned with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface. Impurities such as oxides.磁 Using magnetron sputtering, with a purity of 99.99% Si as the target, the copper foil mesh current collector as the substrate, the background vacuum is 1.0x l0_ 3 Pa, the working pressure at the time of sputtering is 0.2Pa, Ar gas Ar The flow rate was 40 sccm, the sputtering power of the Si target was 150 W, the revolution speed of the sample stage was 15 rpm, the sputtering time was 2 hours, and the thickness of the film obtained by sputtering was 300 nm. The obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 700 ° C, a heating rate of 12 ° C / min, and a holding time of 3.5 hours. It is alloyed; then it is cooled to 200 ° C and then insulated for 1.5 h, and then annealed; after the end of the heat, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material. Its electrode active material is mainly Si. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基复合负极极片和金属锂组成半电池进行电 化学性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极 极片的放电比容量可以达到 2300mAh/g , 首次效率 88%, 经过 50次循环 后, 仍可保持 95%的容量。 The obtained three-dimensional porous film silicon-based composite negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 2300 mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 95% capacity.
实施例 2: 将孔隙率为 98.0%, 平均孔径为 150μπι, 厚度 400μπι的泡沫铜依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.999%的 Si 为靶材, 泡沫铜集流体为基体, 本底真空度为 1.0x lO_4Pa, 溅射时工作气 压为 0.8Pa, 氩气 Ar的流量为 60sccm, Si靶溅射功率为 300W, 样品台公 转运动速度 20rpm, 溅射时间为 8小时, 溅射所得薄膜厚度为 1.0μπι。 将 所得的三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下 进行热处理, 热处理温度为 800 °C , 升温速率为 15 °C/min, 保温时间为 2 小时, 使其进行合金化处理; 接着使其降温至 200 °C时再保温 2小时, 使 其进行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到 三维多孔薄膜硅基负极材料, 其电极活性材料主要是 Si。 为防止氧化, 热 处理过程始终保持真空或惰性气氛。 Example 2: A copper foam having a porosity of 98.0%, an average pore diameter of 150 μm, and a thickness of 400 μm was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation. Impurities such as matter.磁 Using magnetron sputtering, with a purity of 99.999% Si as the target, a copper foam current collector as the substrate, a background vacuum of 1.0x lO_ 4 Pa, a working pressure of 0.8 Pa during sputtering, Ar gas The flow rate was 60 sccm, the sputtering power of the Si target was 300 W, the traveling speed of the sample stage was 20 rpm, the sputtering time was 8 hours, and the thickness of the film obtained by sputtering was 1.0 μm. The obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 800 ° C, a heating rate of 15 ° C / min, and a holding time of 2 hours. It is alloyed; then it is kept at 200 ° C for another 2 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly Si. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 2600mAh/g, 首次效率 92%, 经过 50次循环后, 仍可保持 97%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 2600 mAh/g, the first efficiency is 92%, and after 50 cycles, it can still maintain 97% capacity.
实施例 3: 将孔隙率为 98.0%, 平均孔径为 50μπι, 厚度 50μπι的铜箔网依次用丙 铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除表 面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.998%的 Si和 纯度为 99.99%的 Sn为靶材(且 Si: Sn=l : l ), 铜箔网集流体为基体, 本底 真空度为 2.0x l(T4Pa,溅射时工作气压为 0.3Pa,氩气 Ar的流量为 40sccm, Si 靶溅射功率为 200 W, Sn靶溅射功率为 25 W, 样品台公转运动速度 18rpm, 溅射时间为 8小时, 溅射所得薄膜厚度为 3.0μπι。 将所得的三维多 孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下进行热处理, 热处理温度为 200°C , 升温速率为 3 °C/min, 保温时间为 5小时, 使其进行 合金化处理; 接着使其降温至 100°C时再保温 3小时, 使其进行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多孔薄膜硅基 负极材料, 其电极活性材料主要是 Si和 Si-Sn形成的部分合金。 为防止氧 化, 热处理过程始终保持真空或惰性气氛。 Example 3: A copper foil mesh having a porosity of 98.0%, an average pore diameter of 50 μm, and a thickness of 50 μm was sequentially ultrasonically cleaned with copper, 10% (mass percent) diluted hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface. Impurities such as oxides.磁 Using magnetron sputtering, with a purity of 99.998% Si and a purity of 99.99% Sn as targets (and Si: Sn=l: l), copper foil mesh current collector as the substrate, the background vacuum is 2.0 Xl (T 4 Pa, working pressure at sputtering is 0.3 Pa, flow rate of Ar gas is 40 sccm, sputtering power of Si target is 200 W, sputtering power of Sn target is 25 W, revolution speed of sample stage is 18 rpm, sputtering The film thickness was 3.0 μm when the time was 8 hours. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 200 ° C. It is 3 ° C / min, the holding time is 5 hours, it is alloyed; then it is kept at 100 ° C for 3 hours, then it is annealed; after the heat is kept, the electric heating is stopped, so that After cooling to room temperature with the furnace, a three-dimensional porous film silicon-based anode material is obtained, and the electrode active material is mainly a part of alloy formed by Si and Si-Sn. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 1300mAh/g, 首次效率 91%, 经过 50次循环后, 仍可保持 97%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 1300 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 97% capacity.
实施例 4: 将孔隙率为 96.0%, 平均孔径为 ΙΟΟμπι, 厚度 150μπι的铜丝网依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.997%的 Si 和纯度为 99.999%的 Sn为靶材(且 Si: Sn=5: 1 ), 铜丝网集流体为基体, 本底真空度为 6.0xl(T4Pa, 溅射时工作气压为 0.4Pa, 氩气 Ar 的流量为 50sccm, Si靶溅射功率为 300W, Sn靶溅射功率为 50W, 样品台公转运动 速度 20rpm, 溅射时间为 6小时, 溅射所得薄膜厚度为 2.3μπι。 将所得的 三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下进行热 处理, 热处理温度为 230°C , 升温速率为 5°C/min, 保温时间为 3.5小时, 使其进行合金化处理; 接着使其降温至 100°C时再保温 2小时, 使其进行 退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多 孔硅基复合负极材料,其电极活性材料主要是 Si和 Si-Sn形成的部分合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example 4: A copper mesh having a porosity of 96.0% and an average pore diameter of ΙΟΟμπι and a thickness of 150 μm was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide. .磁 Using magnetron sputtering, with a purity of 99.997% Si and a purity of 99.999% Sn (and Si: Sn=5: 1), copper mesh collector as the substrate, the background vacuum is 6.0 Xl (T 4 Pa, working pressure is 0.4 Pa during sputtering, flow rate of Ar gas is 50 sccm, sputtering power of Si target is 300 W, sputtering power of Sn target is 50 W, revolution speed of sample stage is 20 rpm, sputtering time is The thickness of the film obtained by sputtering was 2.3 μm in 6 hours. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 230 ° C and a heating rate of 5 °C/min, holding time is 3.5 hours, make it alloying; then let it cool down to 100 °C for another 2 hours, then make it annealed; after the end of the heat, stop electric heating, make it with the furnace After cooling to room temperature, a three-dimensional porous silicon-based composite anode material is obtained, and the electrode active material is mainly a part of alloy formed by Si and Si-Sn. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 1600mAh/g, 首次效率 88%, 经过 50次循环后, 仍可保持 94%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 1600mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 94% capacity.
实施例 5: 将孔隙率为 98.0%, 平均孔径为 50μπι, 厚度 ΙΟΟμπι的铜箔网依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.996%的 Si 和纯度为 99.995%的 Mg为靶材(且 Si: Mg=6: 1 ),铜箔网集流体为基体, 本底真空度为 2.0xl(T4Pa, 溅射时工作气压为 0.5Pa, 氩气 Ar 的流量为 50sccm, Si靶溅射功率为 200W, Mg靶溅射功率为 30W, 样品台公转运 动速度 15rpm, 溅射时间为 4小时, 溅射所得薄膜厚度为 2.2μπι。 将所得 的三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下进行 热处理, 热处理温度为 550°C , 升温速率为 9°C/min, 保温时间为 4小时, 使其进行合金化处理; 接着使其降温至 150°C时再保温 2小时, 使其进行 退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多 孔薄膜硅基负极材料,其电极活性材料主要是 Si和 Si-Mg形成的部分合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example 5: A copper foil mesh having a porosity of 98.0%, an average pore diameter of 50 μm, and a thickness of ΙΟΟμπι was sequentially ultrasonically cleaned with copper, 10% (mass percent) diluted hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface. Impurities such as oxides.磁 Using magnetron sputtering, with a purity of 99.996% Si and a purity of 99.995% of Mg as targets (and Si: Mg=6: 1), copper foil mesh current collector as the substrate, the background vacuum is 2.0 Xl (T 4 Pa, working pressure at sputtering is 0.5Pa, flow rate of argon Ar is 50sccm, sputtering power of Si target is 200W, sputtering power of Mg target is 30W, revolution speed of sample stage is 15 rpm, sputtering time is The thickness of the film obtained by sputtering was 2.2 μm in 4 hours. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 550 ° C and a heating rate of 9 °C/min, holding time is 4 hours, make it alloying; then let it cool down to 150 °C for another 2 hours, let it carry out Annealing treatment; After the end of the heat preservation, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 1900mAh/g, 首次效率 90%, 经过 50次循环后, 仍可保持 95%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 1900 mAh/g, the first efficiency is 90%, and after 50 cycles, it can still maintain 95% capacity.
实施例 6: 将孔隙率为 96.0%, 平均孔径为 150μπι, 厚度 300μπι的泡沫镍依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.999%的 Si 和纯度为 99.999%的 Mg为靶材(且 Si: Mg=9: 1 ), 泡沫镍集流体为基体, 本底真空度为 1.0xl(T4Pa, 溅射时工作气压为 0.6Pa, 氩气 Ar 的流量为 60sccm, Si靶溅射功率为 300W, Mg靶溅射功率为 60W, 样品台公转运 动速度 18rpm, 溅射时间为 6小时, 溅射所得薄膜厚度为 2.0μπι。 将所得 的三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下进行 热处理, 热处理温度为 620 °C , 升温速率为 10°C/min, 保温时间为 2.5小 时, 使其进行合金化处理; 接着使其降温至 200 °C时再保温 1小时, 使其 进行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三 维多孔薄膜硅基负极材料,其电极活性材料主要是 Si和 Si-Mg形成的部分 合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example 6: A foamed nickel having a porosity of 96.0%, an average pore diameter of 150 μm, and a thickness of 300 μm was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation. Impurities such as matter.磁 Using magnetron sputtering, with a purity of 99.999% Si and a purity of 99.999% Mg (and Si: Mg=9: 1), a foamed nickel current collector as the matrix, the background vacuum is 1.0xl (T 4 Pa, working pressure is 0.6 Pa during sputtering, flow rate of Ar gas is 60 sccm, sputtering power of Si target is 300 W, sputtering power of Mg target is 60 W, revolution speed of sample stage is 18 rpm, sputtering time is 6 The thickness of the film obtained by sputtering was 2.0 μm. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 620 ° C and a heating rate of 10 °. C/min, the holding time is 2.5 hours, and it is alloyed; then it is kept at 200 °C for another hour, then it is annealed; after the heat is kept, the electric heating is stopped, and it is cooled with the furnace. At room temperature, a three-dimensional porous thin film silicon-based negative electrode material is obtained, and the electrode active material is mainly a partial alloy formed of Si and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 2100mAh/g, 首次效率 88%, 经过 50次循环后, 仍可保持 93%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 2100 mAh/g, the first efficiency is 88%, and after 50 cycles, it can still maintain 93% capacity.
实施例 将孔隙率为 98.0%, 平均孔径为 ΙΟΟμπι, 厚度 50μπι的铜丝网依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.995%的 Si 和纯度为 99.995%的 A1为靶材(且 Si: Al=8: 1 ), 铜丝网集流体为基体, 本底真空度为 6.0x l(T4Pa, 溅射时工作气压为 0.2Pa, 氩气 Ar 的流量为 40sccm, Si靶溅射功率为 200W, A1靶溅射功率为 30W, 样品台公转运动 速度 15rpm, 溅射时间为 4小时, 溅射所得薄膜厚度为 1.8μπι。 将所得的 三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下进行热 处理, 热处理温度为 550°C , 升温速率为 6°C/min, 保温时间为 4小时, 使 其进行合金化处理; 接着使其降温至 150°C时再保温 3小时, 使其进行退 火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多孔 薄膜硅基负极材料, 其电极活性材料主要是 Si和 Si-Al形成的部分合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example A copper mesh having a porosity of 98.0% and an average pore diameter of ΙΟΟμπι and a thickness of 50 μm was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide. .磁 Using magnetron sputtering, with a purity of 99.995% Si and a purity of 99.995% A1 as targets (and Si: Al=8: 1), copper mesh collector as the matrix, the background vacuum is 6.0 Xl (T 4 Pa, working pressure is 0.2Pa during sputtering, flow rate of Ar gas is 40sccm, sputtering power of Si target is 200W, sputtering power of A1 target is 30W, revolution speed of sample table is 15rpm, sputtering time is After 4 hours, the thickness of the film obtained by sputtering was 1.8 μm. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 550 ° C and a heating rate of 6 °C/min, holding time is 4 hours, make it alloying; then let it cool down to 150 °C for another 3 hours, then make it annealed; after the end of the heat, stop electric heating, make it with the furnace After cooling to room temperature, a three-dimensional porous thin film silicon-based negative electrode material is obtained, and the electrode active material is mainly a partial alloy formed of Si and Si-Al. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 2000mAh/g, 首次效率 92%, 经过 50次循环后, 仍可保持 97%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 2000mAh/g, the first efficiency is 92%, and after 50 cycles, it can still maintain 97% capacity.
实施例 8: 将孔隙率为 96.0%, 平均孔径为 200μπι, 厚度 200μπι的泡沫铜依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。 釆用磁控溅射法, 以纯度为 99.999%的 Si 和纯度为 99.999%的 A1为靶材(且 Si: Al=4: 1 ), 泡沫铜集流体为基体, 本底真空度为 1.0x l(T5Pa, 溅射时工作气压为 0.8Pa, 氩气 Ar 的流量为 60sccm, Si靶溅射功率为 300W, A1靶溅射功率为 60W, 样品台公转运动 速度 20rpm, 溅射时间为 6小时, 溅射所得薄膜厚度为 2.6μπι。 将所得的 三维多孔薄膜硅基电极前驱体置于箱式炉中, 在真空或惰性气氛下进行热 处理, 热处理温度为 650°C , 升温速率为 8°C/min, 保温时间为 2小时, 使 其进行合金化处理; 接着使其降温至 200 °C时再保温 2小时, 使其进行退 火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多孔 薄膜硅基负极材料, 其电极活性材料主要是 Si和 Si-Al形成的部分合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example 8: A foamed copper having a porosity of 96.0%, an average pore diameter of 200 μm, and a thickness of 200 μm was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation. Impurities such as matter.磁 Using magnetron sputtering, with a purity of 99.999% Si and a purity of 99.999% A1 as targets (and Si: Al=4: 1), a copper foam current collector as the matrix, the background vacuum is 1.0xl (T 5 Pa, working pressure is 0.8Pa during sputtering, flow rate of Ar gas is 60sccm, sputtering power of Si target is 300W, sputtering power of A1 target is 60W, revolution speed of sample table is 20rpm, sputtering time is 6 The film thickness obtained by sputtering is 2.6 μm. The obtained three-dimensional porous film silicon-based electrode precursor is placed in a box furnace and heat-treated under vacuum or an inert atmosphere at a heat treatment temperature of 650 ° C and a heating rate of 8 °. C/min, the holding time is 2 hours, and it is alloyed; then it is kept at 200 °C for 2 hours, then it is retreated. After the heat treatment, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si and Si-Al. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 1700mAh/g, 首次效率 91%, 经过 50次循环后, 仍可保持 95%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 1700 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 95% capacity.
实施例 9: 将孔隙率为 95.0%, 平均孔径为 150μπι, 厚度 400μπι的泡沫镍依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。釆用磁控溅射法, 以纯度为 99.996%的 Si、 纯度为 99.995%的 Sn和纯度为 99.996%的 Mg为靶材(且 Si: (Sn+Mg)=7: 1 ), 泡沫镍集流体为基体, 本底真空度为 3.0xl(T4Pa, 溅射时工作气压为 0.3Pa, 氩气 Ar的流量为 50sccm, Si靶溅射功率为 200W, Sn靶溅射功率 为 25W, Mg靶溅射功率为 30W, 样品台公转运动速度 15rpm, 溅射时间 为 5小时, 溅射所得薄膜厚度为 2.7μπι。 将所得的三维多孔薄膜硅基电极 前驱体置于箱式炉中,在真空或惰性气氛下进行热处理,热处理温度为 230 °C , 升温速率为 5°C/min, 保温时间为 5小时, 使其进行合金化处理; 接 着使其降温至 100 °C时再保温 3小时, 使其进行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多孔薄膜硅基负极材料, 其 电极活性材料主要是 Si、 Si-Sn和 Si-Mg形成的部分合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example 9: A foamed nickel having a porosity of 95.0%, an average pore diameter of 150 μm, and a thickness of 400 μm was sequentially ultrasonically washed with copper, 10% by mass of dilute hydrochloric acid, distilled water and absolute ethanol to remove surface oil and surface oxidation. Impurities such as matter.磁 Using magnetron sputtering, with a purity of 99.996% Si, a purity of 99.995% Sn, and a purity of 99.996% of Mg as targets (and Si: (Sn+Mg)=7: 1 ), foamed nickel set The fluid is a matrix, the background vacuum is 3.0xl (T 4 Pa, the working pressure is 0.3Pa during sputtering, the flow rate of Ar gas is 50sccm, the sputtering power of Si target is 200W, and the sputtering power of Sn target is 25W, Mg The target sputtering power was 30 W, the sample stage revolution speed was 15 rpm, the sputtering time was 5 hours, and the film thickness obtained by sputtering was 2.7 μm. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace under vacuum. Or heat treatment under an inert atmosphere, the heat treatment temperature is 230 ° C, the heating rate is 5 ° C / min, the holding time is 5 hours, and it is alloyed; then it is kept at 100 ° C for another 3 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly a part of alloy formed by Si, Si-Sn and Si-Mg. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 1900mAh/g, 首次效率 91%, 经过 50次循环后, 仍可保持 98%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 1900 mAh/g, the first efficiency is 91%, and after 50 cycles, it can still maintain 98% capacity.
实施例 10: 将孔隙率为 97.0%, 平均孔径为 ΙΟΟμπι, 厚度 90μπι的铜箔网依次用 丙铜、 10% (质量百分比)稀盐酸、 蒸馏水和无水乙醇超声清洗, 以去除 表面油污和表面氧化物等杂质。釆用磁控溅射法, 以纯度为 99.998%的 Si、 纯度为 99.996%的 A1和纯度为 99.995%的 Mg为靶材(且 Si: (Al+Mg)=9: 1 ), 铜箔网集流体为基体, 本底真空度为 5.0xl(T4Pa, 溅射时工作气压为 0.5Pa, 氩气 Ar的流量为 40sccm, Si靶溅射功率为 200W, A1靶溅射功率 为 30W, Mg靶溅射功率为 30W, 样品台公转运动速度 18rpm, 溅射时间 为 7小时, 溅射所得薄膜厚度为 2.9μπι。 将所得的三维多孔薄膜硅基电极 前驱体置于箱式炉中,在真空或惰性气氛下进行热处理,热处理温度为 600 °C , 升温速率为 6°C/min, 保温时间为 3.5小时, 使其进行合金化处理; 接 着使其降温至 200 °C时再保温 2小时, 使其进行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 得到三维多孔薄膜硅基负极材料, 其 电极活性材料主要是 Si、 Si-Al和 Si-Mg形成的部分合金。 为防止氧化, 热处理过程始终保持真空或惰性气氛。 Example 10: A copper foil mesh having a porosity of 97.0% and an average pore diameter of ΙΟΟμπι and a thickness of 90 μm was sequentially ultrasonically cleaned with copper, 10% (mass%) diluted hydrochloric acid, distilled water and absolute ethanol to remove impurities such as surface oil and surface oxide. .磁 Using magnetron sputtering, with a purity of 99.998% Si, a purity of 99.996% A1 and a purity of 99.995% of Mg as targets (and Si: (Al+Mg)=9: 1), copper foil mesh The current collector is a substrate, the background vacuum is 5.0×1 (T 4 Pa, the working pressure is 0.5 Pa when sputtering, the flow rate of Ar gas is 40 sccm, the sputtering power of Si target is 200 W, and the sputtering power of A1 target is 30 W, The sputtering power of the Mg target was 30 W, the traveling speed of the sample stage was 18 rpm, the sputtering time was 7 hours, and the thickness of the film obtained by sputtering was 2.9 μm. The obtained three-dimensional porous film silicon-based electrode precursor was placed in a box furnace. Heat treatment under vacuum or inert atmosphere, heat treatment temperature is 600 °C, heating rate is 6 °C / min, holding time is 3.5 hours, it is alloyed; then it is kept at 200 °C for 2 hours. After annealing, the electric heating is stopped, and the furnace is cooled to room temperature to obtain a three-dimensional porous thin film silicon-based anode material, and the electrode active material is mainly a part formed of Si, Si-Al and Si-Mg. Alloys. To prevent oxidation, the heat treatment process always maintains a vacuum or an inert atmosphere.
把所得三维多孔薄膜硅基负极极片和金属锂组成半电池进行电化学 性能测试, 测试电流密度为 0.6mA/cm2、 充放电电压为 0-2.0V。 负极极片 的放电比容量可以达到 2200mAh/g, 首次效率 90%, 经过 50次循环后, 仍可保持 97%的容量。 The obtained three-dimensional porous film silicon-based negative electrode sheet and metallic lithium were subjected to electrochemical performance test, and the test current density was 0.6 mA/cm 2 , and the charge and discharge voltage was 0-2.0 V. The discharge capacity of the negative pole piece can reach 2200 mAh/g, the first efficiency is 90%, and after 50 cycles, it can still maintain 97% capacity.
以上所述, 仅是本发明的较佳实施例, 并非对本发明作任何限制, 凡 结构变化, 均仍属于本发明技术方案的保护范围内。  The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any structural changes are still within the scope of protection of the technical solutions of the present invention.

Claims

权 利 要 求 书 Claim
1. 高性能锂离子电池三维多孔薄膜硅基负极材料的制备方法,其特征 在于, 包括以下步骤: A method for preparing a three-dimensional porous film silicon-based anode material for a high-performance lithium ion battery, comprising the steps of:
步骤 (1): 清洗三维多孔集流体材料, 所述三维多孔集流体材料材质为 惰性嵌锂金属;  Step (1): cleaning the three-dimensional porous current collector material, wherein the three-dimensional porous current collector material is an inert lithium intercalation metal;
步骤 (2): 釆用磁控溅射法, 将单质硅、 或单质硅与金属 M共溅射在 铜箔网、 铜丝网、 泡沫铜或泡沫镍集流体上, 得到三维多孔薄膜硅基电极 前驱体, 所述金属 M为与锂能形成金属间化合物或合金的金属, 即活性嵌 锂金属;  Step (2): 单 co-sputtering elemental silicon, or elemental silicon and metal M on a copper foil mesh, a copper mesh, a copper foam or a foamed nickel current collector by magnetron sputtering to obtain a three-dimensional porous thin film silicon base An electrode precursor, the metal M being a metal capable of forming an intermetallic compound or alloy with lithium, that is, an active lithium intercalation metal;
以及步骤 (3):将步骤 (2)所得的所述三维多孔薄膜硅基电极前驱体在真 空或惰性气氛下进行热处理, 得到三维多孔薄膜硅基负极材料。  And the step (3): the three-dimensional porous thin film silicon-based electrode precursor obtained in the step (2) is subjected to heat treatment in a vacuum or an inert atmosphere to obtain a three-dimensional porous thin film silicon-based negative electrode material.
2. 根据权利要求 1 所述的高性能锂离子电池三维多孔薄膜硅基负极 材料的制备方法, 其特征在于, 所述步骤 (1)中, 所述铜箔网、 铜丝网或泡 沫铜的孔隙率不低于 95.0%, 平均孔径为 50至 200μπι, 厚度为 50μπι至 400μπι。  2 . The method for preparing a three-dimensional porous film silicon-based anode material for a high-performance lithium ion battery according to claim 1 , wherein in the step (1), the copper foil mesh, the copper mesh or the copper foam The porosity is not less than 95.0%, the average pore diameter is 50 to 200 μm, and the thickness is 50 μm to 400 μm.
3. 根据权利要求 1 所述的高性能锂离子电池三维多孔薄膜硅基负极 材料的制备方法, 其特征在于, 所述步骤 (2)中, 所釆用单质硅靶的纯度至 少为 99.99%。  The method according to claim 1, wherein in the step (2), the purity of the elemental silicon target used is at least 99.99%.
4. 根据权利要求 1 所述的高性能锂离子电池三维多孔薄膜硅基负极 材料的制备方法, 其特征在于, 所述步骤 (2)中, 所釆用活性嵌锂金属靶的 纯度至少为 99.99%。  The method for preparing a three-dimensional porous thin film silicon-based negative electrode material for a high performance lithium ion battery according to claim 1, wherein in the step (2), the active lithium intercalated metal target has a purity of at least 99.99. %.
5. 根据权利要求 1至 4中任一项所述的高性能锂离子电池三维多孔薄 膜硅基负极材料的制备方法, 其特征在于, 所述步骤 (2)中, 所述单质硅与 所述金属 Μ的质量比例在 1 :1至 9:1之间。  The method for preparing a three-dimensional porous thin film silicon-based negative electrode material for a high-performance lithium ion battery according to any one of claims 1 to 4, wherein in the step (2), the elemental silicon and the The mass ratio of metal ruthenium is between 1:1 and 9:1.
6. 根据权利要求 1 所述的高性能锂离子电池三维多孔薄膜硅基负极 材料的制备方法, 其特征在于, 所述步骤 (2)中, 所述磁控溅射法的工作条 件为:  The method for preparing a three-dimensional porous thin film silicon-based negative electrode material for a high performance lithium ion battery according to claim 1, wherein in the step (2), the working condition of the magnetron sputtering method is:
(1) 本底真空度为 1.0x 10-5至 1.0 l0"3Pa; (2) 溅射时工作气压为 0.2至 0.8Pa; (1) The background vacuum is 1.0x 10-5 to 1.0 l0" 3 Pa; (2) The working pressure during sputtering is 0.2 to 0.8 Pa;
(3) 氩气 Ar的流量为 40至 60sccm;  (3) The flow rate of argon Ar is 40 to 60 sccm;
(4) 不同靶材的溅射功率如下: Si为 150至 300W、 A1为 30至 60W、 Sn为 25至 50W、 Mg为 30至 60W;  (4) The sputtering power of different targets is as follows: Si is 150 to 300 W, A1 is 30 to 60 W, Sn is 25 to 50 W, and Mg is 30 to 60 W;
(5)样品台公转运动速度为 15至 20rpm;  (5) The sample table revolution speed is 15 to 20 rpm;
(6) 溅射时间为 2至 8小时。  (6) The sputtering time is 2 to 8 hours.
7. 根据权利要求 6所述的高性能锂离子电池三维多孔薄膜硅基负极材 料的制备方法, 其特征在于, 所述步骤 (2)中, 所述磁控溅射的多孔薄膜厚 度为 300匪至 3μπι。  The method for preparing a three-dimensional porous film silicon-based anode material for a high performance lithium ion battery according to claim 6, wherein in the step (2), the thickness of the magnetron sputtering porous film is 300 匪To 3μπι.
8. 根据权利要求 1所述的高性能锂离子电池三维多孔薄膜硅基负极材 料的制备方法, 其特征在于, 所述步骤 (3)中, 所述热处理是指釆用电加热 的方式使所述步骤(2 ) 所得的三维多孔薄膜硅基电极前驱体升温到 200 °C至 800°C , 并使其在 200°C至 800°C的条件下保温 2至 5小时, 使其进行 合金化处理; 接着使其降温至 100°C至 200°C时再保温 1至 3小时, 使其 进行退火处理; 保温结束后, 停止电加热, 使其随炉冷却至室温, 并且热 处理过程始终保持真空或惰性气氛。  The method for preparing a three-dimensional porous film silicon-based negative electrode material for a high-performance lithium ion battery according to claim 1, wherein in the step (3), the heat treatment means that the heat is heated by electric heating. The three-dimensional porous thin film silicon-based electrode precursor obtained in the step (2) is heated to 200 ° C to 800 ° C, and is kept at 200 ° C to 800 ° C for 2 to 5 hours to be alloyed. After the temperature is lowered to 100 ° C to 200 ° C for another 1 to 3 hours, it is annealed; after the heat is kept, the electric heating is stopped, the furnace is cooled to room temperature, and the heat treatment process is always kept vacuum. Or an inert atmosphere.
9. 根据权利要求 8所述的高性能锂离子电池三维多孔薄膜硅基负极材 料的制备方法, 其特征在于, 所述步骤 (3)中, 所述升温过程中的升温速率 为 3至 15°C/min。  The method for preparing a three-dimensional porous thin film silicon-based anode material for a high-performance lithium ion battery according to claim 8, wherein in the step (3), the temperature rising rate during the heating process is 3 to 15° C/min.
10. 高性能锂离子电池三维多孔薄膜硅基负极材料,其特征在于,釆用 权利要求 1至 9中任一项所述的制备方法制备得到。  A high-performance lithium ion battery three-dimensional porous film silicon-based negative electrode material, which is produced by the production method according to any one of claims 1 to 9.
PCT/CN2012/079976 2012-04-26 2012-08-10 Porous thin film silicon-based negative electrode material of high-performance lithium ion cell and preparation method thereof WO2013159471A1 (en)

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