WO2013035438A1 - Procédé de régénération de fluide frigorigène - Google Patents

Procédé de régénération de fluide frigorigène Download PDF

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Publication number
WO2013035438A1
WO2013035438A1 PCT/JP2012/068197 JP2012068197W WO2013035438A1 WO 2013035438 A1 WO2013035438 A1 WO 2013035438A1 JP 2012068197 W JP2012068197 W JP 2012068197W WO 2013035438 A1 WO2013035438 A1 WO 2013035438A1
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Prior art keywords
centrifuge
coolant
liquid
membrane
centrifugal
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PCT/JP2012/068197
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English (en)
Japanese (ja)
Inventor
茂樹 坊野
高治 西田
大 荻田
延藤　芳樹
晃司 山田
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株式会社クラレ
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Priority to CN201280008310.7A priority Critical patent/CN103347654B/zh
Publication of WO2013035438A1 publication Critical patent/WO2013035438A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like

Definitions

  • the present invention relates to a coolant regeneration method, and more particularly to a coolant regeneration method for recovering a used coolant used in a slicing process for cutting a silicon material and generating a reusable coolant.
  • polycrystalline or amorphous silicon materials are produced.
  • the produced silicon material generally has a lump shape, and needs to be cut into a predetermined size in order to be used as each element.
  • a wire saw cutting device using an extra fine wire is used.
  • Such a wire saw cutting device cuts at a portion where they are in contact with each other by operating a wire stretched with a predetermined tension at high speed and bringing it into contact with a silicon material. At this time, frictional heat is generated at the contact portion by the wire operating at high speed.
  • the wire itself is baked by the frictional heat, and may be broken or damaged, or may be thermally deformed, which causes a trouble that reduces the cutting accuracy of the silicon material. Therefore, an organic liquid called a coolant is continuously supplied to the contact portion between the wire and the silicon material to remove the generated frictional heat.
  • a coolant is continuously supplied to the contact portion between the wire and the silicon material to remove the generated frictional heat.
  • the “free abrasive grain method” in which abrasive grains are mixed into the coolant and supplied to the contact area simultaneously with the coolant. May be performed.
  • the used coolant supplied to the contact part is collected as used coolant.
  • This used coolant contains a large amount of fine scraps (silicon cutting scraps) generated from the silicon material during slicing.
  • abrasive grains such as hard diamond supplied together with the coolant are also mixed. As a result, after collecting the used coolant mixed with silicon cutting waste and other substances, it cannot be reused as it is, and it is necessary to perform a process for removing the silicon cutting waste.
  • the technology for reusing a coolant that can be reused from the above-described used coolant may cause the following problems. That is, in the case of the centrifugation process described in Patent Document 1 and Patent Document 2, a horizontal type (horizontal type) centrifugal separation in which a rotating body that rotates at high speed is placed horizontally and used coolant is introduced into the rotating body. The machine is used. As a result, silicon cutting waste contained in the used coolant supplied to the inside of the rotating body is pressed and accumulated on the inner surface of the rotating body by centrifugal force, while the coolant from which the silicon cutting waste has been removed is recovered as a purified liquid. It had been.
  • the centrifugal separator with the rotating body since the centrifugal separator with the rotating body is used, the centrifugal separation is advanced to such an extent that the clay-like sludge composed of a small amount of coolant and silicon cutting waste deposited on the wall of the rotating body loses its fluidity. In some cases, it is difficult to discharge the sludge from the rotating body. Therefore, sludge in a state containing a certain amount of coolant and having fluidity is recovered from the rotating body. Therefore, the coolant recovery rate remained at about 50%. On the other hand, in the case of membrane separation treatment, even fine silicon chips can be removed, but when used coolant with a high solid content concentration is directly treated, the membrane separation filter may be clogged.
  • the membrane filtrate that has passed through the membrane separation filter and from which the solid content has been removed is collected, and the solid content that could not pass through the membrane separation filter (silicon cutting waste) ) (Concentrated liquid) may be discharged together with sludge.
  • the concentrated liquid contained a large amount of non-separable and reusable coolant along with the solid content of silicon cutting waste. Therefore, discharging the concentrated solution together with the sludge has been a factor of reducing the coolant recovery rate.
  • the silicon cutting waste contained in the used coolant is a mixture of very fine silicon particles of 0.1 ⁇ m or less and relatively large silicon particles of 1 ⁇ m or more, and the particle size distribution is around 0.1 ⁇ m and around 1 ⁇ m. In general, it is known to exhibit a so-called “bimodal” property having peaks respectively.
  • silicon particles having a specific gravity of 1 ⁇ m or more having a large specific gravity with respect to the organic liquid coolant have a large specific gravity difference from the coolant. Therefore, it can be removed relatively easily by the centrifugal action.
  • the solid content concentration of the silicon cutting waste is adjusted to about 6 to 8% by weight. It was possible to do.
  • silicon fine particles of 0.1 ⁇ m or less may not be sufficiently separated by centrifugal separation. For this reason, silicon fine particles of 0.1 ⁇ m or less may remain with high probability in the regenerated coolant.
  • the regenerated coolant used in the slicing process was then recovered again and repeatedly used through the above centrifugation process. For this reason, the coolant that has undergone a plurality of regeneration treatments cannot exhibit a sufficient cooling effect, which causes a problem that the wire itself of the wire saw cutting device is seized.
  • the used coolant is supplied to the centrifugal separator, and the coolant after the silicon cutting waste is removed is supplied to the supply tank, and is reduced by evaporation or the like in the supply tank. After adding new coolant and other components to replenish, it was reused as it was in wire saw cutting equipment. That is, the centrifugal separation process by the centrifuge was received only once.
  • the solid content concentration of the silicon cutting scrap was about 6 to 8% by weight. Since the density
  • a technology for filtering spent coolant using a filtration membrane of a membrane separation filter and performing membrane separation into a concentrate containing silicon cutting waste and a membrane filtrate (filtrate) that has passed through the filtration membrane is 0.1 ⁇ m. Even the following silicon fine particles could be well separated.
  • a high solid content liquid clogs the filtration membrane, which limits the use of the membrane separation treatment, and reduces the coolant recovery rate because the concentrated liquid is not circulated. There was a possibility.
  • the technique of heating and distilling used coolant was able to regenerate high-purity coolant that is free of impurities.
  • an object of the present invention is to provide a coolant regeneration method for generating a coolant that can be reused efficiently and stably from used coolant.
  • the coolant regeneration method of the present invention is: “A coolant regeneration method that removes the silicon cutting waste from the used coolant containing silicon cutting waste generated when cutting silicon material with a wire saw, and generates a reusable coolant, A centrifuge step of supplying a part of the used coolant to a centrifuge unit having a vertical centrifuge and centrifuging it into a solid content containing the silicon cutting waste and a centrifuge liquid, and the centrifuge thus centrifuged A centrifuge circulation process for mixing the centrifuge liquid with the centrifuge liquid mixing process for mixing the centrifuge liquid with the spent coolant; Performed in parallel with the centrifugal circulation step, A membrane separation step of supplying the remainder of the used coolant to a membrane separation unit having a filtration membrane, and separating the membrane into a concentrate containing the silicon cutting waste and a membrane filtrate, and the membrane separated by the membrane separation step A concentrated liquid mixing step for mixing the concentrated liquid with the used coolant, and a membrane separation and
  • the used coolant of the present invention is obtained by collecting the organic liquid used in the slicing process of cutting the silicon material using a wire saw cutting device. Generally, it contains about 5 to 20% by weight.
  • the used coolant is in the form of a fluid-like mud (slurry) liquid because the silicon scraps are mixed therein.
  • the used coolant refers to “free abrasive” in which abrasive particles are dispersed in advance in the coolant in addition to the recovered coolant used in the so-called “fixed abrasive type” wire saw cutting device. This includes the coolant recovered from the “grain-type” wire saw cutting device.
  • a coolant obtained by removing abrasive grains dispersed in the coolant in advance by a well-known centrifugal separator is used.
  • the specific gravity difference between the coolant and the silicon cutting waste is remarkable, the abrasive grains can be easily separated with a low centrifugal force (about 500 to 800 G) by the centrifugal separator.
  • Rotating the rotating body at high speed according to the rotating shaft generates a centrifugal force in the inner space of the rotating body and has a function of separating the used coolant discharged into the inner space by a centrifugal action.
  • the discharged used coolant is a liquid and is subjected to the centrifugal force generated in the inner space by being ejected toward the wall of the rotating body.
  • the solid content (silicon cutting waste) having a large specific gravity moves to and accumulates on the inner wall surface of the rotating body and is collected as sludge.
  • components having a relatively low specific gravity liquid components such as coolant
  • components having a relatively low specific gravity liquid components such as coolant
  • centrifugal force liquid components
  • the liquid component staying in the inner space of the rotating body reaches a certain amount or more
  • the used coolant supernatant in which the silicon cutting waste settles is discharged from the rotating body.
  • the separation efficiency of the solid content and the liquid component can be improved by increasing the residence time of the coolant in the inner space of the rotating body from which the used coolant is discharged. Therefore, the residence time is set to be longer by adjusting the discharge amount (supply amount) or discharge interval of the used coolant.
  • solid-liquid separation (or liquid-liquid separation) is possible using the difference in specific gravity, and the vertical centrifuge has a rotating body with the opening facing downward, so the used coolant is rotated. Since the liquid-phase centrifuged coolant after the separation can be continuously supplied to the body and recovered, the centrifugation process can be continued for a long time as compared with the conventional case. As a result, the processing efficiency is improved as compared with a conventional (batch type) centrifuge. In addition, since solid content (sludge) with a large specific gravity deposited on the rotating body wall of the rotating body will affect the centrifugal separation performance as it is, for example, it is scraped off from the rotating body wall using a scraper every predetermined time. And collected.
  • the recovered sludge is a clay-like substance having a liquid fraction of about 30 to 60% mainly composed of a coolant. Furthermore, it has been confirmed that the silicon purity of the sludge obtained from the fixed-abrasive-type spent coolant exhibits a value of 2 to 3N with the liquid content removed. Therefore, the sludge itself is excellent in handleability and suitable for recycling.
  • the membrane separation unit of the present invention preferably uses a filtration membrane formed by combining a plurality of straw-shaped hollow fiber membranes, and the membrane filtrate leached into the hollow portion and passes through the filtration membrane. Separated into concentrate that could not be done.
  • the concentrated liquid that could not pass through the filtration membrane contains a large amount of solids including silicon cutting waste, whereas the membrane filtrate contains almost no silicon cutting waste. Therefore, the membrane filtrate has a performance that can be reused as a recovered coolant as it is.
  • the used coolant recovered through the slicing process is supplied to the centrifugal circulation process using the centrifugal separation unit and the membrane separation circulation process using the membrane separation unit, respectively. become.
  • the collected used coolant is distributed at a predetermined ratio. That is, a part of the used coolant is supplied to the centrifuge unit, and the remaining part of the used coolant that has not been supplied to the centrifuge unit is supplied to the membrane separation unit.
  • the used coolant (part) used for the centrifugation circulation process is centrifuged by the centrifuge unit, and is divided into solid content containing silicon cutting waste and centrifuge liquid.
  • the centrifugal liquid is mixed with the used coolant and then distributed and supplied to either the centrifugal circulation process or the membrane separation circulation process.
  • the silicon content of the used coolant mixed with the centrifuge liquid becomes lower than the initial content.
  • the centrifugal separation liquid the solid content including silicon cutting waste is discharged out of the processing system, so that the silicon content is gradually reduced.
  • the used coolant (remaining part) that has not been supplied to the centrifugal separation unit is supplied to the membrane separation and circulation process, and the membrane separation process by the membrane separation unit is performed.
  • the membrane filtrate that has passed through the filtration membrane is subjected to the membrane separation process. Collected outside the processing system. Such membrane filtrate contains almost no silicon cutting waste and can be used as a recovery coolant.
  • the membrane filtrate (recovered coolant) is removed from the concentrated liquid that could not pass through the filtration membrane. Then, the membrane filtrate is discharged out of the processing system by circulating the concentrate.
  • backwashing methods include gas (air, nitrogen, etc.) backwashing and liquid backwashing, which can be selected as appropriate. Back washing is preferred.
  • clean water such as coolant, filtered water, tap water, etc., especially coolant and filtered water is pumped as backwash water to the treated water side, and the washing water is fed from the treated water side to the raw water. It is desirable to pass the filtration membrane to the side in the direction opposite to the filtration direction of the raw water to peel and remove the sludge deposited on the filtration membrane surface.
  • the interval of backwashing is not particularly limited, but it is generally performed once every 1 to 5 minutes and the backwashing time is 5 to 60 seconds.
  • the processing time may be set from the rate of decrease in solid content concentration.
  • the mechanism by which silicon fine particles having a size of 0.1 ⁇ m or less which is difficult to be separated by ordinary centrifugation is separated by the coolant regeneration method of the present invention can be inferred as follows. That is, the solid material of silicon cutting waste that could not pass through the filtration membrane adheres as a layer to the surface of the filtration membrane. This solid material layer is peeled off from the filtration membrane by gas backwashing or liquid backwashing.
  • the peeled solid layer is mixed with the spent coolant, and distributed and supplied again to either the centrifugal separation process or the membrane separation circulation process. At this time, it is inferred that the peeled solid layer becomes a lump having a certain particle size and is mixed with the used coolant. Therefore, the lump is expected to be separated by a centrifuge in the same manner as a large particle size cutting waste.
  • the coolant regeneration method of the present invention is: “A coolant regeneration method that removes the silicon cutting waste from the used coolant containing silicon cutting waste generated when cutting silicon material with a wire saw, and generates a reusable coolant, A first centrifugation step of supplying the used coolant to a centrifuge unit having a vertical centrifuge, and centrifuging the solid content containing the silicon cutting waste and the first centrifuge liquid, and the first centrifuge A first centrifugal mixing step for mixing a liquid with the used coolant, and a first centrifugal circulation step for circulating the first centrifugal liquid; A membrane separation step of supplying the first centrifugal liquid circulated by the first centrifugal circulation step to a membrane separation unit having a filtration membrane, and performing membrane separation into a concentrated liquid containing the silicon cutting waste and a membrane filtrate; And a concentrated liquid mixing step of mixing the concentrated liquid with the first centrifuge liquid, and a membrane separation circulating process for circulating the concentrated liquid, A second centrifugation step
  • a second centrifuge circulation step for circulating the second centrifuge liquid comprising a centrifuge process, and a second centrifuge liquid mixing process for mixing the second centrifuge liquid with the concentrated liquid;
  • the coolant regeneration method of the present invention after the used coolant is centrifuged using the centrifuge unit, the obtained first centrifuge liquid is mixed with the used coolant, and the first centrifuge liquid is mixed. Circulate. Thereafter, the first centrifugal separation liquid after a predetermined number of circulations is supplied to the membrane separation unit, and the membrane is separated into a concentrated liquid containing silicon cutting waste and a membrane filtrate. Further, the concentrated liquid that has not passed through the filtration membrane and the first centrifugal separation liquid are mixed, and the concentrated liquid is circulated.
  • the first centrifugal liquid supplied to the membrane circulation step has a silicon content (hereinafter sometimes referred to as “solid content concentration”) as compared with the used coolant. Remarkably reduced. Therefore, a stable membrane separation process can be performed without clogging the filtration membrane of the membrane separation unit.
  • the membrane filtrate is collected separately.
  • the concentrated liquid after a predetermined number of circulations is supplied to the second centrifugal separation unit and separated into a solid content containing silicon cutting waste and a second centrifugal separation liquid.
  • the solid content concentration of the second centrifuge obtained by centrifuging the concentrate is lower than that of the used coolant, it was generated by mixing the membrane filtrate and the second centrifuge.
  • the coolant also has a low solid content concentration.
  • the performance of the recovered coolant obtained can be stabilized by the process of reducing the solid concentration by the centrifugal separation process and the process of efficiently separating the used coolant by the membrane separation process.
  • the present embodiment is suitable when the initial solid content concentration of the used coolant is high because the centrifugal separation process is performed as the first stage.
  • the coolant regeneration method of the present invention is: “A coolant regeneration method that removes the silicon cutting waste from the used coolant containing silicon cutting waste generated when cutting silicon material with a wire saw, and generates a reusable coolant, A centrifuge step of supplying the used coolant to a centrifuge unit having a vertical centrifuge and centrifuging it into a solid content containing the silicon cutting waste and a centrifuge liquid, and the centrifuge liquid as the used coolant.
  • a centrifuge circulation process for circulating the centrifuge liquid A membrane separation step of supplying a part of the centrifugal liquid circulated in the centrifugal circulation step to a membrane separation unit having a filtration membrane, and membrane-separating into a concentrate containing the silicon cutting waste and a membrane filtrate; and A membrane separation and circulation step of circulating the concentrate, comprising a concentrate mixture step of mixing the concentrate separated by the membrane separation step with the centrifugal separation solution, It is performed in parallel with the membrane separation and circulation step, and the remaining portion of the centrifugal liquid circulated by the centrifugal separation and circulation step is supplied to a second centrifuge unit having a vertical centrifuge and includes the silicon cutting waste A second centrifuge step of centrifuging the solid content and the second centrifuge solution, and a second centrifuge solution mixing step of mixing the centrifuged second centrifuge solution with the centrifuge solution, A second centrifuge circulation step for circulating the second centrifuge liquid; A coolant mixing and generating step of mixing the second centr
  • the resulting centrifuge liquid is mixed with the used coolant, Circulate the centrifuge. Thereafter, a part of the centrifuged liquid after a predetermined number of circulations is continuously supplied to the membrane separation unit, and membrane-separated into a concentrated solution and a membrane filtrate containing silicon cutting waste.
  • the centrifuge liquid other than that supplied to the membrane separation unit is continuously supplied to the second centrifuge unit, and the solid content containing silicon cutting waste and the second centrifuge liquid are centrifuged (second centrifuge process). ) At this time, the membrane separation process and the second centrifugation process are performed in parallel.
  • the second centrifugation process described above can also be performed in such a manner that the second centrifugation process is continued after the first centrifugation process. That is, the centrifugal separation process is performed first, and the centrifugal liquid from which a certain amount of silicon cutting waste has been removed is a process of removing solids by a continuous centrifugal process and a process of generating a membrane filtrate by the membrane separation unit. Are performed in parallel.
  • the centrifugal separation treatment is continued to remove the silicon cutting waste (solid content), and the centrifugal liquid having a low silicon content is removed.
  • Part of the membrane can be subjected to membrane separation treatment to produce and collect a membrane filtrate. Thereby, the regeneration efficiency of the coolant is increased.
  • the coolant regeneration method according to the present invention is, in addition to the above-described configuration, “the recovery rate of the reusable coolant is 85 wt% or more and 98 wt% or less with respect to the used amount of the used coolant”. It does not matter.
  • the coolant regeneration method of the present invention further comprising such a configuration, it is possible to regenerate the coolant with a high recovery rate by combining the centrifugal separation process and the membrane separation process.
  • the coolant regeneration method includes, in addition to the above configuration, “the generated reusable coolant has a residual silicon component content of 0.01 wt% or more and 3.0 wt% of the entire coolant. And the ratio of silicon particles having a particle size of 0.1 ⁇ m or less contained in the residual silicon component is 0.01 wt% or more and 30 wt% or less of the entire remaining silicon component ” I do not care.
  • the recovered coolant generated from the used coolant by combining the centrifugal separation process and the membrane separation process satisfies the conditions in the predetermined range.
  • the recovered coolant generated from the used coolant by combining the centrifugal separation process and the membrane separation process satisfies the conditions in the predetermined range.
  • the centrifuge is circulated by a centrifuge unit having a vertical centrifuge, the concentrated liquid is circulated by a membrane separation unit, and the liquid processed by the membrane separation unit is again used as a vertical centrifuge.
  • the coolant can be regenerated from the used coolant with a high recovery rate.
  • FIG. 1 is an explanatory view schematically showing the flow of the coolant regeneration method 1a of this embodiment
  • FIGS. 2 and 3 are explanatory views schematically showing the flow of another example of the coolant regeneration methods 1b and 1c
  • 4 is an explanatory diagram showing a schematic configuration of the centrifugal separation unit 2
  • FIG. 5 is an explanatory diagram showing a coolant regeneration result by the coolant regeneration methods 1a, 1b, and 1c.
  • the coolant regeneration method 1a of the present embodiment collects the used coolant 3 generated in the slicing step of cutting the block-shaped silicon ingot (silicon material) into a predetermined size using a wire saw cutting device. And what is regenerated into the reusable coolant 4 is illustrated.
  • recovered by this embodiment assumes what was collect
  • the coolant regeneration methods 1a, 1b, and 1c of the present embodiment are formed by bundling a centrifuge unit 2 having a vertical centrifuge 5 and a plurality of hollow fiber membranes, as shown in FIGS.
  • a membrane separation unit 7 having a filtration membrane 6 is used, and a centrifugal separation and circulation step A using the centrifugal separation unit 2 and a membrane separation and circulation step B using the membrane separation unit 7 are combined. It is configured.
  • the centrifuge unit 2 includes a device main body 5a formed in a substantially casing shape, and is accommodated in the device main body 5a.
  • a bowl-shaped rotator 9 is formed at two upper positions and is disposed with one opening 8 facing downward, and is connected to the upper surface of the rotator 9, and a part projects from the apparatus body 5a.
  • Rotation having a rotation shaft 10 provided, a rotation motor 11 a that generates a rotational force that rotates the rotating body 9 at high speed according to the rotation shaft 10, and a rotation transmission portion 11 b that transmits the rotation of the rotation motor 11 a to the rotation shaft 10.
  • Centrifugal from nozzle port 13a at the tip of nozzle 13 A coolant discharge portion that discharges the used coolant 3 to be separated, and silicon cutting scraps 16 that are centrifuged using centrifugal force generated in the inner space 12 by the rotation of the rotating body 9 and accumulated on the wall 15 of the rotating body.
  • a liquid recovery unit 27 provided below and having a recovery drain 26 for recovering the centrifuge liquid 19 that flows along the inclined floor surface 25 and the inclined floor surface 25 inclined in one direction, and immediately below the opening 8 of the rotating body 9.
  • the bowl-shaped rotating body 9 that is rotated by the rotating body driving unit 11 can generate centrifugal force of about 100 G to 3000 G in the inner space 12 by rotating at high speed.
  • the liquid discharged into the inner space 12 is centrifuged by the specific gravity difference, and a component having a large specific gravity (for example, solid content 17) is pressed against the rotating body wall 15, while a component having a small specific gravity (liquid)
  • the centrifugal liquid 19) collects in the vicinity of the center of the inner space 12 of the rotating body 9 spaced from the wall surface of the rotating body wall 15, overflows from the opening 28 on the upper side of the rotating body 9, and is led out of the rotating body 9. Is done.
  • the liquid centrifugal separation liquid 19 is recovered from the recovery drain 26 along the inclination of the inclined floor surface 25 (see the two-dot chain line in FIG. 4).
  • the used coolant 3 containing a solid component and a liquid component can be isolate
  • the strength of the centrifugal force generated can be changed as appropriate according to the solid content concentration of the used coolant 3 and the size and type of the silicon cutting scraps 16.
  • the solid content 17 pressed against the rotating body wall 15 can be dropped from the rotating body wall 15 by operating the scraper 18 inserted into the inner space 12 (see the dashed line in FIG. 4). At this time, the rotational speed of the rotating body 9 is about 20 to 30 times / minute.
  • the scraped solid content 17 is collected from the rotating body 9.
  • the membrane separation unit 7 can use a filtration membrane 6 constituted by arranging 12 hydrophilized polyvinylidene fluoride hollow fiber membranes (module having a membrane area of 1.8 square meters) in parallel with a decomposition accuracy of 2 ⁇ m.
  • the liquid to be processed (used coolant 3) can be supplied at a supply rate of 10 liters / h ⁇ book.
  • the process of performing backwashing with air is for 5 seconds after supplying the liquid to be treated for 120 seconds as one cycle.
  • the backwashing with air is for preventing clogging by the silicon cutting scraps 16 adhering to the surface of the hollow fiber membrane in the membrane separation step and reducing the filtration performance.
  • the membrane separation unit 7 the membrane filtrate 21 that has passed through the filtration membrane 6 can be separated into the concentrated solution 22 that includes the silicon cutting waste 16 that has failed to pass through the filtration membrane 6. .
  • the coolant used in the slicing process for example, an organic liquid mixed in a ratio of 70% by weight of diethylene glycol, 27% by weight of water, and 3% by weight of other additives in an unused state is used.
  • the used coolant 3 after being used in the slicing process, the solid content of the solid content 17 including the silicon cutting scraps 16 is 6.3% by weight in this embodiment.
  • the solid content concentration in the used coolant 3 is obtained by diluting the liquid to be measured about 20 times with distilled water, suction filtration using a 0.45 ⁇ m cellulose acetate membrane filter, and then drying.
  • the solid content 17 remaining on the filter is quantified by measuring the weight.
  • the collected 180 liters of used coolant 3 is stored in advance in a storage tank (not shown).
  • the storage tank is connected to the centrifugal separation unit 2 and the membrane separation unit 7, respectively, so that the used coolant 3 can be supplied to the units 2 and 7. Therefore, the used coolant 3 is distributed and supplied from the storage tank to the units 2 and 7 using a pump (distribution supply step S1).
  • the supply amount to each of the units 2 and 7 can be set individually.
  • the supply amount to the centrifugal separation unit 2 is also supplied to the membrane separation unit 7 in this embodiment. It is set to be larger than the supply amount.
  • the centrifugal unit 2 has a rotating body 9 that rotates at high speed, and a part of the used coolant 3 that has been supplied passes through the discharge nozzle 13 into the inner space 12 of the rotating body 9 at a discharge speed of 18 liters / minute. Discharged.
  • separation based on the specific gravity difference is performed by the centrifugal force generated in the inner space 12, and the solid content 17 including silicon cutting waste 16 having a relatively large specific gravity is deposited so as to be pressed toward the rotating body wall 15.
  • the centrifugal liquid 19 mainly composed of the liquid component from which the solid content 17 has been removed stays in the inner space 12 and is recovered by overflowing from the opening 28 on the upper side of the rotating body 9 (centrifugation step S2).
  • the centrifugal liquid 19 led out of the rotating body 9 due to the overflow is recovered from the recovery drain 26 along the inclined floor surface 25 of the liquid recovery unit 27.
  • the collected centrifugal liquid 19 is sent to a storage tank in which the used coolant 3 is stored, and is mixed with the used coolant 3 (centrifugal liquid mixing step S3). Since the solid content 17 of the silicon cutting waste 16 is removed from the centrifugal liquid 19 by the centrifugal separation process, the solid content concentration in the used coolant 3 is reduced.
  • the collected centrifugal liquid 19 is mixed with the used coolant 3 again and processed in the centrifugal circulation step A a predetermined number of times (or a predetermined time), so that the solid content concentration in the used coolant 3 gradually decreases. It will be.
  • the centrifugal separation step S2 and the centrifugal liquid mixing step S3 correspond to the centrifugal circulation step A of the present invention.
  • the used coolant 3 supplied from the storage tank to the membrane separation unit 7 side is subjected to membrane separation processing by the filtration membrane 6 (membrane separation step S4).
  • the membrane filtrate 21 containing almost no silicon cutting waste 16 that has passed through the filtration membrane 6 constituted by a hollow fiber membrane, and the silicon cutting waste 16 that cannot pass through the filtration membrane 6 are included. It can isolate
  • the concentrated liquid 22 contains a liquid component coolant and the solid content 17, and is re-separated to obtain the centrifugal liquid 19 or the membrane filtrate 21 and the solid content 17 or the concentrated liquid 22. And can be separated. As a result, it is possible to recover the membrane filtrate 21 from which the solid content 17 of the silicon cutting waste 16 has been removed by the membrane separation process, and to return the concentrated liquid 22 to the used coolant 3 again. The separation process can be repeated, and the recovery rate of the coolant 4 regenerated from the used coolant 3 can be increased. In particular, when the concentrated liquid 22 is circulated and mixed with the used coolant 3, the concentrated liquid 22 is diluted with the used coolant 3, and clogging occurs when the concentrated liquid 22 is supplied to the membrane separation unit 7 again.
  • the membrane separation step S4 and the concentrated liquid mixing step S5 correspond to the membrane separation circulation step B of the present invention.
  • Step S6 the solid content concentration is reduced to a predetermined condition or less in advance (for example, by the centrifugal liquid 19 whose solid content concentration has been reduced by the centrifugal separation process) and the membrane filtrate 21 from which the silicon cutting waste 16 has been almost removed by the membrane separation process (for example, , 3.0 wt% or less) is produced.
  • both the disadvantages of the solid content removal rate of the solid content 17 by the centrifugal separation process and the processing speed by the membrane separation process are complemented, and the coolant 4 is efficiently processed. Generation can be performed.
  • the centrifuge unit 2 having the vertical centrifuge 5 the used coolant 3 stored in the storage tank can be continuously supplied, and the solid content 17 accumulated on the rotating body wall 15 can be supplied. There is no need to stop the operation of the centrifuge unit 2 other than the work of scraping (sludge) with the scraper 18. Therefore, the operation can be continued for a long time.
  • the centrifugal unit 2 is shown to supply the used coolant 3 continuously.
  • the discharge of the used coolant 3 is intermittently controlled to increase the solid content 17 removal rate. It does not matter if it is something to be made. Thereby, the discharge
  • regeneration method 1a of this embodiment can be made favorable.
  • the used coolant 3 having a particularly high solid content concentration at the start of the treatment is used as it is. If it is supplied, there is a possibility that clogging of the filtration membrane 6 is likely to occur. Therefore, it is considered suitable to apply when it is known in advance that the solid content concentration is relatively low.
  • the coolant regeneration method 1b includes a first centrifugal circulation process A ′, a membrane separation and circulation process B, and a second centrifugal circulation process A ′′.
  • the separation / circulation step A ′′ is similar to the centrifugation / circulation step A already described.
  • the used coolant 3 to be treated is one having a solid concentration of 10.1% by weight.
  • the used coolant 3 is supplied to the centrifuge unit 2 and discharged to the rotating body 9 rotating at a high speed to perform separation based on the specific gravity difference by the centrifugal action generated in the inner space 12 (first centrifuge step T1). .
  • the solid content 17 including the silicon cutting waste 16 having a large specific gravity accumulates on the rotating body wall 15, while the first centrifugal liquid 23 from which the solid content 17 has been removed overflows from the opening portion 28, and the liquid recovery unit 27 is recovered. Further, the recovered first centrifugal liquid 23 is led out to the storage tank in which the used coolant 3 is stored and mixed (first centrifugal liquid mixing step T2).
  • the solid content 17 is removed from the first centrifugal liquid 23 by the centrifugal separation process, the solid content concentration in the used coolant 3 decreases. Furthermore, the collected first centrifugal liquid 23 is mixed with the used coolant 3 again and circulated in the centrifugal separation system, whereby the solid content concentration gradually decreases with each circulation.
  • the first centrifugal separation step T1 and the first centrifugal liquid mixing step T2 correspond to the first centrifugal circulation step A ′ of the present invention.
  • the first centrifugal liquid 23 in which the concentration of the solid content 17 is reduced is supplied to the membrane separation unit 7 to perform a membrane separation process using the filtration membrane 6 (membrane separation step T3).
  • membrane separation step T3 the membrane separation unit 7 to perform a membrane separation process using the filtration membrane 6
  • concentration of the solid content 17 was concentrated.
  • the concentrated liquid 22 is led out to a storage tank in which the first centrifugal liquid 23 is stored, and is mixed with the first centrifugal liquid 23 (concentrated liquid mixing step T4).
  • the membrane separation step T3 and the concentrated liquid mixing step T4 correspond to the membrane separation circulation step B of the present invention. Further, since details have already been described, description thereof will be omitted.
  • the concentrated liquid 22 having been repeated a predetermined number of times (or a predetermined time) is supplied again to the centrifuge unit 2 (corresponding to the second centrifuge unit) to perform a centrifuge process (second centrifuge step T5).
  • second centrifuge step T5 the centrifuge unit 2
  • the centrifuge unit 2 corresponding to the second centrifuge unit
  • second centrifuge step T5 the centrifuge unit 2
  • the centrifuge liquid 22 is supplied again to the centrifuge unit 2 (corresponding to the second centrifuge unit) to perform a centrifuge process
  • second centrifuge liquid 24 is supplied again to the centrifuge unit 2 (corresponding to the second centrifuge unit) to perform a centrifuge process (second centrifuge step T5).
  • second centrifuge liquid 24 is mixed again with the concentrated liquid 22 (second centrifuge liquid mixing step T6), and is circulated in the centrifuge processing system, so that the solid content concentration in the concentrated liquid 22 is circulated. It will gradually decline every time.
  • the second centrifuge liquid 24 that has been circulated a predetermined number of times (or a predetermined time) is mixed with the membrane filtrate 21 recovered by the membrane separation and circulation step B to generate the coolant 4 (coolant mixed generation).
  • Step T7 a reusable coolant 4 having a reduced solid content concentration is formed.
  • the coolant regeneration method 1b of the present example a high solid content concentration is lowered to some extent by performing a centrifugal separation process as the first stage, and then the solid content 17 is almost completely changed by switching to the membrane separation process by the membrane separation unit 7.
  • the membrane filtrate 21 which does not contain can be obtained. Therefore, it is possible to cope with the used coolant 3 having a higher solid content concentration than the coolant regeneration method 1a.
  • a method of performing a centrifugal separation process as a first step as in the present coolant regeneration method 1b (and 1c) is adopted.
  • the liquid component contained in the concentrated liquid 22 can be separated by centrifuging again the concentrated liquid 22 separated in the membrane separation.
  • recovered can be improved.
  • by performing the centrifugal separation process in the first stage clogging when using the membrane separation unit 7 can be prevented, and an efficient regeneration process can be performed.
  • the coolant regeneration method 1c includes a centrifugal separation / circulation step A and a membrane separation / circulation step B performed in parallel from the middle of the centrifugal separation / circulation step A.
  • the used coolant 3 to be treated is one having a solid content concentration of 10.1% by weight as in the coolant regeneration method 1b.
  • the used coolant 3 is supplied to the centrifuge unit 2, and the centrifuge circulation process A is performed (the centrifuge process U1 and the centrifuge liquid mixing process U2). Thereby, the centrifuge liquid 19 in which the solid content concentration is gradually lowered by circulation is obtained. Then, after a predetermined number of times (or a predetermined time) has passed, a part of the centrifugal liquid 19 is supplied to the membrane separation unit 7 and the membrane separation circulation step B is performed (membrane separation step U3 and concentrated liquid mixing step U4). At this time, the centrifuge liquid 19 supplied to the membrane separation unit 7 is only a part, and the remainder is still supplied to the centrifuge unit 2 (corresponding to the second centrifuge unit).
  • the centrifugation process and the membrane separation process are performed in parallel.
  • the second centrifugal separation step U5 performed after supplying a part of the centrifugal separation liquid 19 to the membrane separation unit 7 is the centrifugal separation step in the present invention
  • the second centrifugal separation liquid mixing step U6 is the centrifugal separation liquid mixing step.
  • the second centrifugal circulation step A ′′ including them corresponds to the centrifugal circulation step.
  • the second centrifugal liquid 32 centrifuged from the second centrifugal unit corresponds to the centrifugal liquid, respectively. Since the details of the processing have already been described, the description thereof is omitted.
  • Step U7) a reusable coolant 4 having a reduced solid content concentration is generated. That is, in a state where the solid content concentration is high, only the centrifugal separation process is performed to prevent clogging of the filtration membrane 6, and the centrifugal separation process and the membrane separation process are used together when the solid content concentration is lowered to some extent. As a result, the overall processing time can be shortened.
  • FIG. 5 shows the regeneration results obtained by the coolant regeneration methods 1a, 1b and 1c already described.
  • Example 1 represents the coolant regeneration method 1a
  • Example 2 represents the coolant regeneration method 1b
  • Example 3 represents the coolant regeneration method 1c.
  • the conditions of the centrifugal separation ⁇ membrane separation ⁇ centrifugation step are not circulated as the comparative example 3.
  • Comparative Example 4 a case where the step of centrifugation ⁇ membrane separation is performed under conditions that are not circulated is also illustrated.
  • parallel refers to the case where the centrifugal circulation step A (or centrifugal separation step) and the membrane separation circulation step B (membrane separation step) are performed in parallel
  • in series refers to centrifugation. It is defined as a membrane separation circulation step B (or membrane separation step) performed in series after the separation circulation step A (or centrifugation step).
  • the reusable coolant 4 can be regenerated with a high recovery rate of 85% by weight or more with respect to the used spent coolant 3 (180 liters). . Furthermore, the solid content concentration (silicon residual ratio) of the finally obtained coolant 4 is on the order of 1%, it is suppressed to a very low value, and has sufficient performance that can be used as the coolant 4. It has been shown. As a result, the coolant can be regenerated with a high recovery rate of 85% by weight or more, and the excellent coolant 4 having a residual silicon component content of 0.01% by weight or more and 3.0% by weight or less can be obtained. it can.
  • fine silicon fine particles (silicon cutting waste) of 0.1 ⁇ m or less can be removed, and the proportion of these silicon particles is 0.01 wt. % Or more and 30% by weight or less. Therefore, it is possible to suppress occurrence of troubles such as breakage or breakage of the wire during the slicing process.
  • the particle size of the silicon fine particles is evaluated based on the mass distribution using a laser scattering particle size distribution measuring apparatus, and then the content of fine particles of 0.1 ⁇ m or less can be calculated by the area ratio.
  • Comparative Example 3 Furthermore, the decrease in the solid content concentration of Comparative Example 3 was slight (10.1% ⁇ 8.5%). This is because the membrane separation process time is shortened due to clogging of the membrane, it cannot be reduced to the desired solid content concentration, and the membrane separation process hardly contributed to the final solid content concentration. It is estimated to be. Thereby, the effectiveness of performing the process which circulates the centrifuge liquid 19 and the concentrate 22 in each process was shown. On the other hand, in the case of Comparative Example 4, although the decrease in the solid content concentration is confirmed by the action of the membrane separation process, as in Comparative Example 2, the solid separation contained in the coolant is performed in series without circulating the membrane separation process.
  • Example 1 Example 1 was also confirmed to be inferior.
  • the solid content concentration is suppressed and the recovery rate is reduced by combining the centrifugal circulation process A and the like and the membrane separation circulation process B. It was shown that coolant generation (regeneration processing) is possible in an elevated state.
  • the present invention is limited to this. It may be a thing using what was collect
  • the specific gravity of the abrasive grains is remarkably larger than that of the silicon cutting scraps 16 contained in the used coolant 3, most of the abrasive grains can be recovered by the centrifugal separation process. Therefore, the regeneration process of the coolant 4 by the coolant regeneration method 1a or the like of the present embodiment is not affected. Furthermore, in the coolant regeneration method 1a and the like of the present embodiment, the number of circulations and the circulation conditions in the centrifugal circulation step A and the membrane separation circulation step B can be arbitrarily set according to the used coolant 3 to be separated. .

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Treatment Of Sludge (AREA)
  • Centrifugal Separators (AREA)

Abstract

L'invention porte sur un procédé de régénération de fluide frigorigène (1a) qui comprend : une étape de séparation centrifuge et de circulation (A) comportant elle-même une étape de séparation centrifuge (S2) servant à fournir une partie du fluide frigorigène usé (3) à une unité de séparation centrifuge (2) ayant un séparateur centrifuge vertical, et à séparer le fluide frigorigène en une partie solide (17) et un liquide séparé par centrifugation (19), et une étape de mélange du liquide séparé par centrifugation (S3) servant à mélanger le liquide séparé par centrifugation (19) avec le fluide frigorigène usé (3) ; une étape de séparation par membrane et de circulation (B) comprenant une étape de séparation par membrane (S4) servant à fournir le reste du fluide frigorigène usé (3) à une unité de séparation par membrane (7) qui comporte une membrane filtrante (6) et à le séparer au moyen de la membrane en un liquide concentré (22) et un liquide filtré par membrane (21), et une étape de mélange du liquide concentré (S5) servant à mélanger le liquide concentré (22) avec le fluide frigorigène usé (3) ; et une étape de production d'un mélange de fluide frigorigène (S6) servant à mélanger le liquide séparé par centrifugation (19) et le liquide filtré par membrane récupéré (21) et à produire un fluide frigorigène (4).
PCT/JP2012/068197 2011-09-07 2012-07-18 Procédé de régénération de fluide frigorigène WO2013035438A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014172121A (ja) * 2013-03-08 2014-09-22 Ihi Compressor & Machinery Co Ltd ワイヤソースラリのクーラント回収装置
WO2014162708A1 (fr) * 2013-04-04 2014-10-09 株式会社クラレ Appareil de régénération de suspension, procédé de régénération de suspension et suspension régénérée

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105848827A (zh) * 2014-01-20 2016-08-10 株式会社可乐丽 冷却剂再生装置以及冷却剂再生方法
JP2015139861A (ja) * 2014-01-30 2015-08-03 株式会社クラレ クーラント再生方法および再生クーラント中間生成物
CN105856074A (zh) * 2016-05-30 2016-08-17 深圳汇准科技有限公司 一种智能研磨液供给系统
CN112658991B (zh) * 2020-12-16 2022-12-13 西安奕斯伟材料科技有限公司 抛光液供给装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002534242A (ja) * 1997-07-18 2002-10-15 シー・エー・ アーノルド アンド アソシエイツ，インク． 材料の小粒子への微粉化
JP2003300072A (ja) * 2002-04-09 2003-10-21 Ngk Insulators Ltd 研磨排水の処理方法
JP2003340719A (ja) * 2002-05-24 2003-12-02 Sharp Corp スラリ再生方法
JP2004255534A (ja) * 2003-02-27 2004-09-16 Komatsu Electronic Metals Co Ltd リサイクルに適したワイヤソー砥粒、スラリ再生方法及びワイヤソーシステム
JP2010221337A (ja) * 2009-03-24 2010-10-07 Ngk Insulators Ltd 使用済み研削液の再利用方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1299540B1 (it) * 1998-07-01 2000-03-16 Memc Electronic Materials Procedimento per separare e rigenerare abrasivo esausto a base di glicole e carburo di silicio ai fini della loro riutilizzazione
US6306282B1 (en) * 1999-01-04 2001-10-23 Advanced Micro Devices, Inc. Sludge-free treatment of copper CMP wastes
JP2001225070A (ja) * 2000-02-16 2001-08-21 Kurita Water Ind Ltd 研磨材の回収装置
JP3776675B2 (ja) * 2000-03-30 2006-05-17 三倉物産株式会社 無機研磨剤廃液の再生処理装置
JP2001310260A (ja) * 2000-04-28 2001-11-06 Nippei Toyama Corp スラリの再生方法
JP2002144229A (ja) * 2000-11-02 2002-05-21 Nippei Toyama Corp ワイヤソー及びワイヤソーの切断方法
ITRM20050329A1 (it) * 2005-06-24 2006-12-25 Guido Fragiacomo Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto.
US8940174B2 (en) * 2007-10-30 2015-01-27 Pall Corporation Method for treating spent abrasive slurry
JP5611748B2 (ja) * 2010-09-30 2014-10-22 株式会社Ｉｈｉ回転機械 ワイヤソースラリ廃液の処理方法及び装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002534242A (ja) * 1997-07-18 2002-10-15 シー・エー・ アーノルド アンド アソシエイツ，インク． 材料の小粒子への微粉化
JP2003300072A (ja) * 2002-04-09 2003-10-21 Ngk Insulators Ltd 研磨排水の処理方法
JP2003340719A (ja) * 2002-05-24 2003-12-02 Sharp Corp スラリ再生方法
JP2004255534A (ja) * 2003-02-27 2004-09-16 Komatsu Electronic Metals Co Ltd リサイクルに適したワイヤソー砥粒、スラリ再生方法及びワイヤソーシステム
JP2010221337A (ja) * 2009-03-24 2010-10-07 Ngk Insulators Ltd 使用済み研削液の再利用方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014172121A (ja) * 2013-03-08 2014-09-22 Ihi Compressor & Machinery Co Ltd ワイヤソースラリのクーラント回収装置
WO2014162708A1 (fr) * 2013-04-04 2014-10-09 株式会社クラレ Appareil de régénération de suspension, procédé de régénération de suspension et suspension régénérée
CN105121095A (zh) * 2013-04-04 2015-12-02 株式会社可乐丽 浆料再生装置、浆料再生方法以及再生浆料
JPWO2014162708A1 (ja) * 2013-04-04 2017-02-16 株式会社クラレ スラリー再生装置、スラリー再生方法及び再生スラリー

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