WO2015107826A1 - Dispositif de régénération de liquide de refroidissement et procédé de régénération de liquide de refroidissement - Google Patents

Dispositif de régénération de liquide de refroidissement et procédé de régénération de liquide de refroidissement Download PDF

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Publication number
WO2015107826A1
WO2015107826A1 PCT/JP2014/083329 JP2014083329W WO2015107826A1 WO 2015107826 A1 WO2015107826 A1 WO 2015107826A1 JP 2014083329 W JP2014083329 W JP 2014083329W WO 2015107826 A1 WO2015107826 A1 WO 2015107826A1
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Prior art keywords
liquid
tank
sludge
coolant
treated
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PCT/JP2014/083329
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English (en)
Japanese (ja)
Inventor
延藤　芳樹
雅之 玉井
一真 井上
大 荻田
Original Assignee
株式会社クラレ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社クラレ filed Critical 株式会社クラレ
Priority to CN201480071473.9A priority Critical patent/CN105848827A/zh
Priority to JP2015557743A priority patent/JP6190473B2/ja
Publication of WO2015107826A1 publication Critical patent/WO2015107826A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration

Definitions

  • the present invention relates to a coolant regeneration device and a coolant regeneration method for reclaiming used coolant so that it can be reused.
  • a slicing step of cutting a block-shaped silicon ingot (silicon material) into a predetermined size is performed.
  • silicon coolant is used when the silicon ingot is cut using, for example, a wire saw cutting device.
  • the used coolant after being used in the slicing process contains silicon cutting waste.
  • the used coolant is regenerated into a reusable state using a coolant regenerating apparatus (for example, Patent Document 1).
  • the coolant regenerator is equipped with a membrane separation unit. Used coolant stored in the treatment tank is supplied to the membrane separation unit, and in the membrane separation unit, the membrane filtrate that becomes the regenerated coolant and the silicon cutting waste that could not pass through the membrane such as the hollow fiber membrane. Into a concentrated solution containing
  • the coolant regeneration device may include a centrifuge.
  • the used coolant stored in the processing tank is supplied to the centrifuge, and is separated into centrifuge liquid and sludge in the centrifuge.
  • the separated centrifuge liquid is returned to the processing tank again, and the sludge is discharged from the centrifuge.
  • the coolant regenerator may include, for example, a filter press instead of the centrifuge.
  • liquids such as the concentrated liquid separated in the membrane separation unit and the drain liquid discharged from the centrifugal separator are returned to the processing tank from the viewpoint of increasing the recovery efficiency of the coolant.
  • these liquids may contain sludge that has become a lump.
  • the liquid to be processed containing the sludge that has become a mass is supplied from the processing tank to the membrane separation unit, which may cause clogging of the membrane in the membrane separation unit.
  • An object of the present invention is to suppress clogging of a membrane in a membrane separation unit in a coolant regeneration device for reprocessing used coolant.
  • a first tank portion in which a liquid to be treated containing sludge is stored, and a region having a large amount of sludge and a region having a small amount of sludge are formed in the liquid to be treated, and the first tank And a membrane separation unit for separating the membrane filtrate from the treatment target liquid flowing in from the second tank part.
  • FIG. 1 is a diagram showing a schematic configuration of a coolant regenerator 1 according to an embodiment of the present invention.
  • the coolant regenerating apparatus 1 is an apparatus for regenerating so that the used coolant used in the product manufacturing process can be reused.
  • the used coolant include, but are not limited to, used silicon coolant including silicon cutting waste generated when a silicon material is cut.
  • the silicon coolant is used, for example, in a slicing process of cutting a block-shaped silicon ingot (silicon material) into a predetermined size using a wire saw cutting device.
  • a liquid containing diethylene glycol, water, and other additives is used, but is not limited thereto.
  • the used coolant S after being used in the slicing process contains silicon cutting waste.
  • the used coolant S is separated into a regenerated coolant S1 regenerated to be reusable by the coolant regenerating apparatus 1 and a sludge S2 containing silicon cutting waste.
  • the coolant regeneration apparatus 1 includes a stock solution tank 10, a processing tank 11, a centrifuge 12, a membrane separation unit 13, a filtrate solution tank 14, a regeneration solution tank 15, and a control unit 4. And.
  • the coolant regenerator 1 includes a plurality of pipes 90 to 99 and a plurality of pumps P1 to P4.
  • the coolant regenerator 1 is not limited to the specific example shown in FIG. 1, and some tanks, some pipes, some pumps, and the like may be omitted as necessary.
  • the stock solution tank 10 is a container for storing the collected used coolant S.
  • the spent coolant S flows into the stock solution tank 10 through a pipe 90 connected to the stock solution tank 10. Further, the used coolant S stored in the stock solution tank 10 is sent to the processing tank 11 (specifically, the first tank portion 11A of the processing tank 11) through the pipe 91 provided with the pump P1.
  • the treatment tank 11 is a container for storing the used coolant S sent from the stock solution tank 10.
  • the processing tank 11 includes a first tank portion 11A and a second tank portion 11B.
  • the liquid to be processed in the first tank unit 11A includes the used coolant S that flows from the stock solution tank 10, the drain liquid that flows from the centrifuge 12, and the concentrated liquid that flows from the membrane separation unit 13. It is a liquid mixture containing. That is, all of these liquids flowing into the first tank portion 11A are liquids having a high sludge content, that is, liquids having a high SS (sustained substance) concentration. Therefore, the liquid to be processed in the first tank portion 11A has a high SS concentration as a whole.
  • the processing target liquid in the second tank unit 11B is a mixed liquid including the processing target liquid flowing from the first tank unit 11A and the centrifuge liquid flowing from the centrifuge 12.
  • the centrifuge liquid is a liquid having a low sludge content, that is, a liquid having a low SS concentration.
  • the processing target liquid flowing from the first tank portion 11A is a liquid flowing from a region with little sludge in the first tank portion 11A, as will be described later. Therefore, the liquid to be processed in the second tank portion 11B has a low SS concentration as a whole.
  • the liquid flow around the processing tank 11 is as follows.
  • the liquid to be processed in the first tank portion 11A is sent to the centrifuge 12 through the pipe 92 provided with the pump P2.
  • the centrifuge 12 separates the liquid to be processed into a centrifuge liquid and a sludge.
  • the centrifuge liquid is a liquid in which the sludge content is reduced by the centrifuge process in the centrifuge 12.
  • the centrifuge liquid centrifuged in the centrifuge 12 is returned to the second tank portion 11B through the pipe 93.
  • the sludge S2 separated in the centrifuge 12 is discharged from the centrifuge 12.
  • the drain liquid from the centrifuge 12 is returned to the first tank portion 11A through the pipe 94.
  • the drain liquid is a liquid (waste liquid) generated by cleaning the inside of the centrifuge 12, for example.
  • the inside of the centrifuge 12 is cleaned by, for example, supplying the processing target liquid stored in the processing tank 11 to the inside of the centrifuge 12 and spraying it. Therefore, the drain liquid contains a relatively large amount of sludge that has become a lump.
  • the liquid to be treated in the second tank portion 11B is sent to the membrane separation unit 13 through a pipe 95 provided with a pump P3.
  • the membrane separation unit 13 separates the treatment target liquid into a membrane filtrate and a concentrated liquid.
  • the membrane filtrate is a liquid from which sludge has been removed by passing through the membrane of the membrane separation unit 13.
  • the concentrated liquid is a liquid separated from the membrane filtrate by the membrane separation process in the membrane separation unit 13 (a liquid having a large sludge content), and contains silicon cutting waste.
  • the concentrate contains a relatively large amount of sludge S2 that has become a lump.
  • the membrane filtrate subjected to membrane separation in the membrane separation unit 13 is sent to the filtrate tank 14 through the pipe 97.
  • the concentrated solution that has been subjected to the membrane separation process in the membrane separation unit 13 is returned to the first tank portion 11 ⁇ / b> A through the pipe 96.
  • the filtrate tank 14 is a container that stores the membrane filtrate S1 (recovered solution S1) that has been subjected to membrane separation processing in the membrane separation unit 13.
  • the membrane filtrate S1 flowing out from the filtrate opening 13c of the membrane separation unit 13 is sent to the filtrate tank 14 through the pipe 97.
  • the regeneration liquid tank 15 is a container for storing the membrane filtrate S1 (recovered liquid S1) sent from the filtrate tank 14.
  • the membrane filtrate S1 in the filtrate tank 14 is sent to the regenerated liquid tank 15 through a pipe 98 provided with a pump P4.
  • the membrane filtrate S1 (recovered solution S1) stored in the regenerating solution tank 15 is sent to the next step (for example, a silicon ingot slicing step) through the pipe 99 and reused.
  • the centrifuge 12 is a vertical type device (vertical centrifuge) in which the direction of the rotating shaft of the rotating body (rotating pot) is directed vertically, but is not limited to this, for example, the rotating shaft of the rotating body.
  • a horizontal type device (horizontal centrifuge) or the like may be used.
  • the membrane separation unit 13 is a cross flow type that separates the liquid to be treated into a membrane filtrate and a concentrated solution, but is not limited thereto.
  • the membrane separation unit 13 may employ a structure in which a hollow fiber membrane is provided in an elongated casing, but is not limited thereto.
  • the membrane separation unit 13 only needs to be able to remove cutting waste and the like from the used coolant S, and may have a structure in which a separation membrane other than the hollow fiber membrane is provided in the housing.
  • the liquid enters and exits the membrane separation unit 13 through the pipe connections 13a and 13b. Further, on the side surface of the casing of the membrane separation unit 13, a filtrate opening 13 c is formed to communicate the inner space of the casing (the outer space of the hollow fiber membrane) with the outside of the casing. The membrane filtrate filtered through the hollow fiber membrane is led out of the casing through the filtrate opening 13c.
  • the membrane separation unit 13 By using the membrane separation unit 13, it is possible to separate the membrane filtrate S1 that has passed through the hollow fiber membrane and the concentrated solution containing silicon cutting waste that has failed to pass through the hollow fiber membrane.
  • the filtrate opening 13c may be used to allow the backwash fluid to be introduced into the membrane separation unit 13.
  • a pump (not shown) provided in the pipe 97 can be used.
  • a pipe and a pump separately provided for introducing the backwash fluid into the membrane separation unit 13 during backwashing may be used.
  • the membrane separation unit 13 includes a mechanism for switching the liquid feeding direction.
  • the liquid feeding direction switching mechanism includes a plurality of valves 13v and a pipe 13p that connects these valves 13v. By controlling the opening / closing operation of the valve 13v by the controller 4, the liquid feeding direction of the liquid flowing in the membrane separation unit 13 can be switched.
  • one or more removal mechanisms are provided in the pipe 95 through which the liquid to be treated in the second tank portion 11B is sent to the membrane separation unit 13.
  • a strainer 21 and a sludge atomization mechanism 22 are provided as a removal mechanism.
  • the strainer 21 has a net-like part for removing solid components from the liquid to be treated.
  • the strainer 21 is provided on the upstream side of the pump P3.
  • the sludge atomization mechanism 22 is for atomizing a lump of sludge by energy, shearing force, and the like due to collision when the liquid to be treated flows inside.
  • the sludge atomization mechanism 22 for example, “Damatori” manufactured by Yoshida Kikai Kogyo Co., Ltd. can be used.
  • the control unit 4 includes an unillustrated central processing unit (CPU), a memory, and the like.
  • the control unit 4 controls the operation of the coolant regeneration device 1. Specifically, the control unit 4 controls the rotation operation of the rotating body of the centrifuge 12 and the operations of the plurality of pumps P1 to P4.
  • the first tank portion 11A and the second tank portion 11B are separate containers.
  • the first tank portion 11A and the second tank portion 11B may be formed by dividing one container by a partition wall W as shown in FIGS.
  • each of the first tank portion 11 ⁇ / b> A and the second tank portion 11 ⁇ / b> B has a columnar shape, but is not limited to this, for example, other shapes such as a rectangular parallelepiped shape It may be.
  • a region having a large amount of sludge S2 and a region having a small amount of sludge S2 are formed in the liquid to be treated.
  • the specific gravity of the sludge S2 is larger than the specific gravity of the liquid, a part of the sludge collects in the lower region L, thereby forming a region with a large amount of sludge S2.
  • FIG. 2 shows a state in which a part of the sludge S2 is precipitated at the bottom of the first tank portion 11A.
  • the sludge content in the lower region L is greater than the sludge content in the upper region H in the treatment target liquid of the first tank unit 11A. Further, in the present embodiment, the sludge content in the lower region L is larger than the sludge content in the middle region M in the height direction, and the sludge content in the middle region M is the sludge content in the upper region H. More than quantity.
  • the lower region L is the lowermost region among regions obtained by dividing the height from the lower end (bottom surface) to the upper end (overflow position) in the first tank portion 11 ⁇ / b> A into three equal parts.
  • the upper region H is the uppermost region among the three regions divided as described above, and the middle region M is a region between the lower region L and the upper region H (see FIG. 3 described later). The same applies to the modified example 1 shown in FIG.
  • the processing target liquid in the upper region H flows into the second tank unit 11B.
  • the second tank portion 11B is disposed at a position lower than the first tank portion 11A. Then, the processing target liquid overflowed from the first tank unit 11A flows into the second tank unit 11B.
  • the liquid to be processed in the upper region H of the first tank unit 11A is, for example, as follows. Can flow into the second tank portion 11B.
  • the first tank unit 11A is configured such that the liquid to be processed in the upper region H of the first tank unit 11A overflows from the upper edge of the side wall of the first tank unit 11A and flows out of the first tank unit 11A. May be.
  • a notch for example, a V-shaped notch
  • first tank unit 11A is configured such that the liquid to be processed in the upper region H of the first tank unit 11A overflows through an opening provided on the upper wall or side wall of the first tank unit 11A and is outside the first tank unit 11A. It may be configured to flow out.
  • the liquid to be processed that has flowed out of the first tank unit 11A flows into the second tank unit 11B through a pipe extending from the upper edge of the side wall or the opening toward the second tank unit 11B, for example. Good.
  • the above piping can also be abbreviate
  • a stirring mechanism 23 that stirs the liquid to be processed may be provided in the second tank portion 11B.
  • FIG. 3 is a schematic diagram illustrating a first modification of the processing tank 11
  • FIG. 4 is a schematic diagram illustrating a second modification of the processing tank 11.
  • the first tank portion 11A and the second tank portion 11B of the processing tank 11 are formed by dividing the inside of the processing tank 11 by the partition wall W.
  • the liquid to be treated that has overflowed from the first tank portion 11A flows into the second tank portion 11B.
  • the upper edge of the partition wall W provided in the processing tank 11 is lower than the upper edge of the side wall of the processing tank 11 (the lower position than the upper wall of the processing tank 11). ).
  • the liquid to be processed in the upper region H in the first tank portion 11A can overflow the upper edge of the partition wall W and flow into the second tank portion 11B.
  • one or a plurality of through holes A are provided in the partition wall W, and the liquid to be processed in the first tank portion 11A flows into the second tank portion 11B through the through holes A.
  • the through hole A is provided in the upper region H.
  • FIG. 5 is a schematic diagram illustrating a third modification of the processing tank 11
  • FIG. 6 is a schematic diagram illustrating a fourth modification of the processing tank 11.
  • the first tank portion 11A and the second tank portion 11B of the processing tank 11 are separate containers.
  • the first tank portion 11 ⁇ / b> A and the second tank portion 11 ⁇ / b> B of the processing tank 11 are formed by dividing the inside of the processing tank 11 by partition walls W.
  • the processing target liquid in the upper region H out of the processing target liquid in the first tank unit 11A flows into the second tank unit 11B by the pump P5 provided in the pipe 100. That is, in the modified examples 3 and 4, the liquid to be processed in the upper region H in the first tank unit 11A is extracted by the pump P5 and flows into the second tank unit 11B through the pipe 100.
  • the lower region L is the lowest region of the regions obtained by dividing the height from the lower end portion of the partition wall W to the upper end portion into three equal parts.
  • the upper region H is the uppermost region of the three regions divided as described above, and the middle region M is a region between the lower region L and the upper region H.
  • region L is the lowest in the area
  • the upper region H is the uppermost region of the three regions divided as described above, and the middle region M is a region between the lower region L and the upper region H.
  • the first tank portion 11A and the second tank portion 11B are provided, and the liquid to be processed in the region where the sludge S2 is small in the first tank portion 11A flows into the second tank portion 11B, and the processing target that has flowed in The liquid flows into the membrane separation unit 13. That is, in this configuration, for example, compared to the case where only one tank 111 is provided as a processing tank as in the coolant regeneration apparatus of the reference example shown in FIG. 7, it is included in the processing target liquid flowing into the membrane separation unit 13. The amount of sludge S2 that is generated can be reduced. Thereby, it is possible to suppress the clogging of the membrane in the membrane separation unit 13 in the coolant regeneration device 1 for reprocessing the used coolant.
  • a means of providing a plurality of centrifuges on the upstream side of the membrane separation unit 13 is also conceivable.
  • the sludge discharged from the centrifuge contains a relatively large amount of coolant. Therefore, when a plurality of centrifuges are provided, the coolant recovery rate decreases.
  • clogging of the membrane in the membrane separation unit 13 is provided by providing the first tank portion 11A and the second tank portion 11B as described above. Since it suppresses, the fall of the recovery rate of a coolant can be suppressed compared with the case where a some centrifuge is provided.
  • the coolant regenerating apparatus 1 in the present embodiment may be provided with a plurality of centrifuges 12.
  • a region with a large amount of sludge S2 is formed by collecting a part of the sludge S2 in the lower region L in the processing target liquid of the first tank portion 11A.
  • a region with a large amount of sludge S2 is formed by a part of sludge S2 sinking and gathering in the liquid to be treated in the first tank portion 11A.
  • a region with a small amount of sludge S2 is formed in the vicinity of the center in the height direction and in the upper part in the liquid to be treated.
  • the processing target liquid in the upper region H out of the processing target liquid in the first tank unit 11A flows into the second tank unit 11B. That is, when a region having a large amount of sludge S2 is formed in the lower portion in the processing target liquid, the sludge S2 tends to decrease in the upper region in the processing target liquid. Therefore, the amount of sludge S2 contained in the processing target liquid in the second tank unit 11B can be more effectively reduced by causing the processing target liquid in the upper region H to flow into the second tank unit 11B.
  • FIGS. 2 to 6 can be exemplified as the form in which the liquid to be treated in the upper region H flows into the second tank part 11B among the liquids to be treated in the first tank part 11A. Not limited.
  • the liquid to be treated that has overflowed from the first tank portion 11A flows into the second tank portion 11B. That is, when a region having a large amount of sludge S2 is formed in the lower part of the processing target liquid, the amount of sludge S2 contained in the processing target liquid overflowing from the first tank portion 11A is reduced. Therefore, the amount of sludge S2 contained in the processing target liquid in the second tank unit 11B can be more effectively reduced by causing the processing target liquid that overflows to flow into the second tank unit 11B.
  • the membrane separation unit 13 separates the treatment target liquid into the membrane filtrate and the concentrated liquid of the sludge S2, and the concentrated liquid is returned to the first tank unit 11A.
  • the concentrated liquid containing a relatively large amount of sludge S2 is returned to the first tank section 11A instead of the second tank section 11B, an increase in the sludge S2 contained in the second tank section 11B can be suppressed.
  • the used coolant as the stock solution flows into the first tank portion 11A.
  • the stock solution containing a large amount of sludge S2 is returned to the first tank portion 11A instead of the second tank portion 11B, an increase in the sludge S2 contained in the second tank portion 11B can be suppressed.
  • the coolant regeneration device 1 includes a centrifuge 12 that separates the liquid to be processed into a centrifuge liquid and a sludge S2, and the centrifuge liquid is returned to the second tank unit 11B.
  • the centrifuge liquid separated from the sludge S2 by the centrifuge 12 that is, the centrifuge liquid having a small amount of sludge S2
  • the centrifuge liquid having a small amount of sludge S2 is directly returned to the second tank part 11B without passing through the first tank part 11A.
  • the second tank unit 11B together with the processing target liquid in the first tank unit 11A having a large sludge content.
  • the amount of sludge flowing into the can be reduced.
  • the liquid to be processed in the first tank unit 11A flows into the centrifuge 12.
  • the centrifugal separator 12 the higher the amount of sludge S2 contained in the liquid to be treated, the better the centrifugal separation efficiency. Therefore, in this configuration, the efficiency of centrifugation in the centrifuge 12 can be increased compared to the case where the liquid to be processed in the second tank unit 11B flows into the centrifuge 12.
  • the process target liquid of 11 A of 1st tank parts is sent to the centrifuge 12, the quantity of the process target liquid which flows in into the 2nd tank part 11B from the 1st tank part 11A can be reduced. As a result, it is possible to suppress an increase in the amount of sludge S2 contained in the processing target liquid in the second tank portion 11B.
  • the drain liquid from the centrifuge 12 is returned to the first tank portion 11A.
  • the drain liquid is a waste liquid that is discharged when the inside of the centrifuge 12 is cleaned, for example, and contains a relatively large amount of sludge S2 that has become a lump. Therefore, by returning the drain liquid to the first tank part 11A as in this configuration, it is possible to suppress an increase in the sludge S2 contained in the second tank part 11B.
  • the coolant regenerator 1 includes a removal mechanism for removing a part of the sludge S2 in the flow path through which the liquid to be treated in the second tank unit 11B is sent to the membrane separation unit 13.
  • the removal mechanism since the removal mechanism is provided in the flow path to the membrane separation unit 13, the amount of sludge S2 contained in the processing target liquid sent to the membrane separation unit 13 can be further reduced.
  • the coolant regenerator 1 includes a pump P3 provided in the flow path, the removal mechanism is provided upstream of the pump P3, and the removal mechanism is blocked based on the increase in the load of the pump P3.
  • a state degree of clogging of the removal mechanism
  • the pump P3 is provided downstream of the removal mechanism, the load on the pump P3 increases as the sludge S2 accumulates in the removal mechanism. Based on such an increase in the load of the pump P3, it is possible to detect the accumulation state of the sludge S2 in the removal mechanism.
  • the coolant regenerator 1 includes a stirring mechanism that is provided in the second tank unit 11B and stirs the liquid to be processed.
  • the sludge S2 is also included in the liquid to be processed in the second tank unit 11B, and when such sludge S2 accumulates at the bottom (specifically, the corner of the bottom) of the second tank unit 11B, It may be a lump. Therefore, in this configuration, it is possible to suppress the accumulation of sludge S2 at the bottom of the second tank unit 11B by stirring the liquid to be processed in the second tank unit 11B by the stirring mechanism.
  • the liquid discharged by backwashing the membrane separation unit 13 is returned to the first tank portion 11A.
  • the drained liquid at the time of backwashing that may contain a lump of sludge S2 is returned to the first tank part 11A, it is possible to suppress an increase in the sludge S2 contained in the liquid to be treated in the second tank part 11B. it can.
  • the membrane separation unit 13 includes a mechanism for switching the liquid feeding direction. In this configuration, clogging in the membrane separation unit 13 can be further suppressed by switching the liquid feeding direction in the membrane separation unit 13.
  • the first tank portion 11A and the second tank portion 11B are separate containers.
  • the degree of freedom in designing the shape and size of each tank portion is increased.
  • the sludge S2 may accumulate in the corner of the bottom of the tank part and stay as it is. However, by making the tank part cylindrical, the sludge S2 is retained. Can be suppressed.
  • the first tank portion 11A and the second tank portion 11B are formed by dividing the inside of the container by a partition wall.
  • a sludge-rich region is formed by collecting a part of the sludge S2 in the lower region, but the present invention is not limited thereto.
  • a region where the sludge S2 is locally collected by a capturing means such as a filter provided in the first tank portion 11A sludge sludge.
  • a region away from the capture unit is a region with little sludge.
  • the membrane separation unit 13 was a crossflow type which isolate
  • centrifuge liquid from the centrifuge 12 is returned to the second tank unit 11B
  • the present invention is not limited to this, and the centrifuge liquid may be returned to the first tank unit 11A.
  • the case where the removal mechanism and the stirring mechanism are provided is illustrated, but one or both of the removal mechanism and the stirring mechanism may be omitted.
  • the case where the liquid discharged by backwashing the membrane separation unit is returned to the first tank portion 11A is illustrated, but such backwashing can be omitted.
  • the membrane separation unit 13 includes a mechanism for switching the liquid feeding direction is illustrated in the embodiment, this mechanism can be omitted.
  • One or both of a detector that detects the liquid level of the first tank unit 11A and a detector that detects the liquid level of the second tank unit 11B may be provided. Depending on the liquid level detected by the detector, for example, the replenishment timing of the stock solution from the stock solution tank 10 to the processing tank 11 can be controlled.
  • a discharge port for discharging the sludge S2 settled on the bottom portion to the outside of the first tank portion 11A may be provided at the bottom portion of the first tank portion 11A.
  • the pipe connected to the discharge port may be provided with an on-off valve for opening and closing the pipe.
  • the coolant regenerator 1 includes the centrifuge 12 and the membrane separation unit 13 is exemplified.
  • a filter press may be provided instead of the centrifuge 12.
  • the processing target liquid stored in the processing tank 11 (specifically, the first processing tank unit 11A) is supplied to the filter press, and is separated into the separation liquid and the sludge (cake) in the filter press.
  • the separated separation liquid is returned to the processing tank 11 (for example, the second processing tank unit 11B), and the sludge is discharged from the filter press.
  • the first tank unit in which the liquid to be processed including sludge is stored, and the region having a large amount of the sludge and the region having a small amount of the sludge are formed in the liquid to be processed.
  • the first tank unit and the second tank unit are provided, and the processing target liquid in the first tank unit in the region with less sludge flows into the second tank unit, and the processing target liquid that has flowed into the membrane separation unit. Inflow. That is, in this configuration, for example, compared to the case where only one tank 111 is provided as a processing tank as in the coolant regeneration apparatus of the reference example shown in FIG. 7, it is included in the processing target liquid flowing into the membrane separation unit. The amount of sludge can be reduced. As a result, it is possible to suppress clogging of the membrane in the membrane separation unit in the coolant regeneration device for regenerating used coolant.
  • a part of the sludge is gathered at a lower portion in the processing target liquid in the first tank portion to form a region with a lot of sludge.
  • a sludge-rich region is formed by a portion of sludge that sinks and collects in the liquid to be processed in the first tank unit.
  • a region with little sludge is formed near the center (in the middle) in the height direction and at the top in the liquid to be treated.
  • the upper processing target liquid out of the processing target liquid in the first tank section flows into the second tank section. That is, when a region with a large amount of sludge is formed in the lower part in the processing target liquid, the sludge tends to decrease in the upper part in the processing target liquid. Therefore, the amount of sludge contained in the processing target liquid in the second tank unit can be more effectively reduced by causing the upper processing target liquid to flow into the second tank unit.
  • Examples of the form in which the upper processing target liquid of the processing target liquid in the first tank part flows into the second tank part include various forms shown in FIGS. 2 to 6 described above, for example.
  • the liquid to be treated that has overflowed from the first tank portion flows into the second tank portion. That is, when a region with a large amount of sludge is formed in the lower portion in the processing target liquid, the amount of sludge contained in the processing target liquid overflowing from the first tank portion is reduced. Therefore, the amount of sludge contained in the processing target liquid in the second tank unit can be more effectively reduced by causing the processing target liquid that overflows to flow into the second tank unit.
  • the membrane separation unit separates the treatment target liquid into the membrane filtrate and a sludge concentrate, and the concentrate is returned to the first tank unit.
  • the concentrated liquid containing a relatively large amount of sludge is returned to the first tank part instead of the second tank part, it is possible to suppress an increase in the amount of sludge contained in the second tank part.
  • the coolant regeneration device includes a centrifuge that separates the liquid to be processed into a centrifuge liquid and a sludge, and the centrifuge liquid is returned to the second tank unit.
  • the centrifuge separated from the sludge by the centrifuge that is, the centrifuge having a small amount of sludge is directly returned to the second tank without passing through the first tank.
  • the processing target liquid in the first tank portion flows into the centrifuge.
  • the higher the amount of sludge contained in the liquid to be treated the better the efficiency of the centrifuge. Therefore, in this configuration, the efficiency of centrifugation in the centrifuge can be increased as compared with the case where the liquid to be processed in the second tank unit flows into the centrifuge. Further, in this configuration, since the processing target liquid in the first tank unit is sent to the centrifuge, the amount of the processing target liquid flowing from the first tank unit to the second tank unit can be reduced. As a result, it is possible to suppress an increase in sludge contained in the liquid to be processed in the second tank unit.
  • the drain liquid from the centrifuge is returned to the first tank portion.
  • the drain liquid is, for example, a waste liquid that is discharged when the inside is cleaned in a centrifuge, and contains a relatively large amount of sludge that has become a lump. Therefore, by returning the drain liquid to the first tank part as in this configuration, it is possible to suppress an increase in the sludge contained in the second tank part.
  • the coolant regeneration device preferably includes a removal mechanism for removing a part of the sludge in a flow path in which the liquid to be treated in the second tank section is sent to the membrane separation unit.
  • the coolant regeneration device includes a pump provided in the flow path, the removal mechanism is provided upstream of the pump, and the removal mechanism is blocked based on an increase in load of the pump. It is preferable to detect (the degree of clogging of the removal mechanism). That is, when the pump is provided downstream of the removal mechanism, the load on the pump increases as sludge accumulates in the removal mechanism. Based on such an increase in the load on the pump, it is possible to detect the accumulation of sludge in the removal mechanism.
  • the first tank portion and the second tank portion are separate containers.
  • the degree of freedom in designing the shape and size of each tank portion is increased.
  • sludge may accumulate in the corners of the bottom part of the tank part and stay as it is. .
  • the first tank part and the second tank part may be formed by dividing the inside of the container by a partition wall.
  • the sludge-rich region and the sludge-poor region are formed in the liquid to be treated including the sludge stored in the first tank unit, and the sludge in the first tank unit is formed.
  • the processing target liquid in a small area is caused to flow into the second tank part, the processing target liquid in the second tank part is allowed to flow into the membrane separation unit, and the membrane filtrate is separated from the processing target liquid in the membrane separation unit.

Landscapes

  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

L'invention concerne un dispositif de régénération de liquide de refroidissement (1) comprenant: une première unité de réservoir (11A) au niveau de laquelle un liquide selon l'invention contenant une boue (S2) est retenu et au niveau de laquelle une région comprenant plus de boue (S2) et une région comprenant moins de boue (S2) sont formées dans le liquide selon l'invention; une seconde unité de réservoir (11B) dans laquelle le liquide selon l'invention de la région comprenant moins de boue (S2) dans la première unité de réservoir (11A) s'écoule; et une unité de séparation à membrane (13) qui sépare un filtrat de membrane du liquide selon l'invention s'écoulant depuis la seconde unité de réservoir (11B).
PCT/JP2014/083329 2014-01-20 2014-12-17 Dispositif de régénération de liquide de refroidissement et procédé de régénération de liquide de refroidissement WO2015107826A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201480071473.9A CN105848827A (zh) 2014-01-20 2014-12-17 冷却剂再生装置以及冷却剂再生方法
JP2015557743A JP6190473B2 (ja) 2014-01-20 2014-12-17 クーラント再生装置及びクーラント再生方法

Applications Claiming Priority (2)

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JP2014-007815 2014-01-20
JP2014007815 2014-01-20

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WO2015107826A1 true WO2015107826A1 (fr) 2015-07-23

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Country Link
JP (1) JP6190473B2 (fr)
CN (1) CN105848827A (fr)
TW (1) TWI613004B (fr)
WO (1) WO2015107826A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017087309A (ja) * 2015-11-03 2017-05-25 ジヤトコ株式会社 スラッジ濾過装置
CN111559015A (zh) * 2020-06-15 2020-08-21 格力博(江苏)股份有限公司 电动切割工具
CN112654772A (zh) * 2018-09-11 2021-04-13 瓦锡兰芬兰有限公司 用于液体冷却剂的分隔式集液箱、多发动机集液箱装置以及配备有这种多发动机集液箱装置的动力设备和船舶
JP7233145B1 (ja) 2022-09-15 2023-03-06 株式会社松浦機械製作所 クーラント処理装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0590760A (ja) * 1991-04-25 1993-04-09 Dia Denshi Kk 多層プリント板の製造法
JPH0751514A (ja) * 1993-08-18 1995-02-28 Okamoto Kosaku Kikai Seisakusho:Kk 濾過装置
JPH1043756A (ja) * 1996-05-28 1998-02-17 Samsung Electron Co Ltd 浄水機の加圧ポンプ制御装置
JP2009166154A (ja) * 2008-01-15 2009-07-30 Yamatake Corp 被切削部材の切粉用沈澱槽
JP2011240453A (ja) * 2010-05-20 2011-12-01 Nippon Spindle Mfg Co Ltd 処理液浄化装置
WO2013089126A1 (fr) * 2011-12-12 2013-06-20 株式会社エコファースト Dispositif de purification d'eau, et système de maintenance pour celui-ci

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2591384Y2 (ja) * 1991-11-06 1999-03-03 日立精機株式会社 工作機械のクーラントタンク
JP5802609B2 (ja) * 2011-09-07 2015-10-28 ジー・フォースジャパン株式会社 クーラント再生方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0590760A (ja) * 1991-04-25 1993-04-09 Dia Denshi Kk 多層プリント板の製造法
JPH0751514A (ja) * 1993-08-18 1995-02-28 Okamoto Kosaku Kikai Seisakusho:Kk 濾過装置
JPH1043756A (ja) * 1996-05-28 1998-02-17 Samsung Electron Co Ltd 浄水機の加圧ポンプ制御装置
JP2009166154A (ja) * 2008-01-15 2009-07-30 Yamatake Corp 被切削部材の切粉用沈澱槽
JP2011240453A (ja) * 2010-05-20 2011-12-01 Nippon Spindle Mfg Co Ltd 処理液浄化装置
WO2013089126A1 (fr) * 2011-12-12 2013-06-20 株式会社エコファースト Dispositif de purification d'eau, et système de maintenance pour celui-ci

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017087309A (ja) * 2015-11-03 2017-05-25 ジヤトコ株式会社 スラッジ濾過装置
CN112654772A (zh) * 2018-09-11 2021-04-13 瓦锡兰芬兰有限公司 用于液体冷却剂的分隔式集液箱、多发动机集液箱装置以及配备有这种多发动机集液箱装置的动力设备和船舶
CN112654772B (zh) * 2018-09-11 2022-04-01 瓦锡兰芬兰有限公司 配备有多发动机集液箱装置的动力设备和船舶
CN111559015A (zh) * 2020-06-15 2020-08-21 格力博(江苏)股份有限公司 电动切割工具
JP7233145B1 (ja) 2022-09-15 2023-03-06 株式会社松浦機械製作所 クーラント処理装置
JP2024042297A (ja) * 2022-09-15 2024-03-28 株式会社松浦機械製作所 クーラント処理装置
US11951580B1 (en) 2022-09-15 2024-04-09 Matsuura Machinery Corporation Coolant processing apparatus

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CN105848827A (zh) 2016-08-10
TWI613004B (zh) 2018-02-01
JPWO2015107826A1 (ja) 2017-03-23
TW201534387A (zh) 2015-09-16
JP6190473B2 (ja) 2017-08-30

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