WO2012133587A1 - 樹脂組成物、樹脂シート、樹脂シート硬化物、樹脂シート積層体、樹脂シート積層体硬化物及びその製造方法、半導体装置、並びにｌｅｄ装置 - Google Patents

樹脂組成物、樹脂シート、樹脂シート硬化物、樹脂シート積層体、樹脂シート積層体硬化物及びその製造方法、半導体装置、並びにｌｅｄ装置 Download PDF

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Publication number
WO2012133587A1
WO2012133587A1 PCT/JP2012/058247 JP2012058247W WO2012133587A1 WO 2012133587 A1 WO2012133587 A1 WO 2012133587A1 JP 2012058247 W JP2012058247 W JP 2012058247W WO 2012133587 A1 WO2012133587 A1 WO 2012133587A1
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Prior art keywords
resin
resin sheet
filler
sheet
cured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/058247
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English (en)
French (fr)
Japanese (ja)
Inventor
智雄 西山
桑野　敦司
敏明 白坂
原　直樹
謙介 吉原
片木　秀行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
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Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP2012541276A priority Critical patent/JP5431595B2/ja
Priority to EP12762900.4A priority patent/EP2692759B1/en
Priority to KR1020137024003A priority patent/KR101854948B1/ko
Priority to US14/008,486 priority patent/US9349931B2/en
Priority to CN201280013772.8A priority patent/CN103429634B/zh
Publication of WO2012133587A1 publication Critical patent/WO2012133587A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12042—LASER
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1301—Thyristor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H01L2924/13055—Insulated gate bipolar transistor [IGBT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

Definitions

  • the present invention relates to a resin composition, a resin sheet, a resin sheet cured product, a resin sheet laminate, a resin sheet laminate cured product, a manufacturing method thereof, a semiconductor device, and an LED device.
  • heat sinks and heat dissipation fins are indispensable for heat dissipation for stable operation of semiconductor devices used for central processing units of personal computers and motors of electric vehicles.
  • materials that can achieve both insulation and thermal conductivity.
  • organic materials are widely used for insulating materials such as printed boards on which semiconductor devices are mounted. Although these organic materials have high insulation properties, they have low thermal conductivity and do not contribute significantly to heat dissipation of semiconductor devices and the like.
  • inorganic materials such as inorganic ceramics are sometimes used for heat dissipation of semiconductor devices and the like. Although these inorganic materials have high thermal conductivity, it is difficult to say that their insulating properties are sufficient compared to organic materials, and materials that can achieve both high insulating properties and thermal conductivity are required.
  • a filler various materials in which a resin is combined with an inorganic filler with high thermal conductivity called a filler have been studied.
  • an epoxy resin composition having a low melt viscosity and capable of being filled with a high filler is known (see, for example, JP-A-2001-055425).
  • a cured product composed of a composite system of a general bisphenol A type epoxy resin and an alumina filler is known.
  • the conductivity can be achieved (see, for example, JP-A-2008-13759).
  • a cured product composed of a composite system of a special epoxy resin, an amine-based curing agent and an alumina filler is known, 9.4 W / mK in the xenon flash method and 10.4 W / m in the temperature wave thermal analysis method. It is supposed that a thermal conductivity of mK can be achieved (see, for example, JP-A-2008-13759).
  • thermosetting resin containing boron nitride and a polymer component such as an epoxy resin, an amine curing agent, and a curing catalyst as a cured thermosetting resin having excellent thermal conductivity
  • a temperature wave A thermal conductivity of 6 W / mK to 11 W / mK can be achieved by thermal analysis (see, for example, JP-A-2008-189818).
  • the thermally conductive resin cured products described in JP-A-2001-055425, JP-A-2008-13759, and JP-A-2008-189818 all have high levels of thermal conductivity, adhesive strength, and insulation. In some cases, it was difficult to satisfy. In particular, if the resin sheet has a resin thickness of several tens of ⁇ m and insulation must be ensured, the electric field strength applied in the direction of the resin thickness will increase, so that it may be exposed to high temperatures near the chip and Considering temperature changes and humidity, it is very difficult to ensure long-term reliability of insulation.
  • This invention makes it a subject to provide the resin sheet and resin composition which can form the resin sheet hardened
  • R 1 represents an alkyl group, an aryl group, or an aralkyl group.
  • R 2 and R 3 each independently represents a hydrogen atom, an alkyl group, an aryl group, or an aralkyl group.
  • m represents a number from 0 to 2
  • n represents a number from 1 to 7.
  • An epoxy resin monomer a novolak resin containing a compound having a structural unit represented by the following general formula (I), a first filler having a volume average particle diameter of 0.01 ⁇ m or more and less than 1 ⁇ m, and a volume average particle
  • a resin composition comprising: a second filler having a diameter of 1 ⁇ m or more and less than 10 ⁇ m; and a third filler having a volume average particle diameter of 10 ⁇ m or more and 100 ⁇ m or less and containing boron nitride particles.
  • R 1 represents an alkyl group, an aryl group, or an aralkyl group.
  • R 2 and R 3 each independently represents a hydrogen atom, an alkyl group, an aryl group, or an aralkyl group.
  • m represents a real number from 0 to 2
  • n represents a real number from 1 to 7.
  • the content of the first filler in the total volume of the first filler, the second filler, and the third filler is 1% by volume to 15% by volume
  • the content of the second filler Is a resin composition according to the above ⁇ 2> or ⁇ 3>, wherein the content of the third filler is 45% by volume to 80% by volume.
  • the novolak resin further includes a phenol compound constituting the novolak resin, and the content ratio of the phenol compound is 5% by mass or more and 50% by mass or less. It is a resin composition of description.
  • ⁇ 6> A resin sheet obtained by molding the resin composition according to any one of ⁇ 1> to ⁇ 5> into a sheet shape having an average thickness of 80 ⁇ m to 250 ⁇ m.
  • ⁇ 6> or ⁇ 7> which is a laminate of the first resin layer and the second resin layer formed from the resin composition according to any one of ⁇ 1> to ⁇ 5>. It is a resin sheet as described in above.
  • a cured resin sheet which is a heat-treated product of the resin sheet according to any one of ⁇ 6> to ⁇ 8>.
  • a resin sheet laminate comprising the resin sheet according to any one of ⁇ 6> to ⁇ 8> and a metal plate or a heat radiating plate disposed on at least one surface of the resin sheet. is there.
  • ⁇ 12> A cured resin sheet laminate that is a heat-treated product of the resin sheet laminate according to ⁇ 11>.
  • ⁇ 13> A step of disposing a metal plate or a heat radiating plate on at least one surface of the resin sheet according to any one of ⁇ 6> to ⁇ 8>, and applying heat to the resin sheet to form the resin A process for curing the sheet, and a method for producing a cured resin sheet laminate.
  • a semiconductor device comprising: a semiconductor element; and the cured resin sheet according to ⁇ 10> disposed on the semiconductor element.
  • the present invention it is possible to provide a cured resin sheet that is excellent in all of thermal conductivity, adhesive strength, and insulation, and a resin sheet and a resin composition that can form the cured resin sheet.
  • a resin sheet excellent in insulation under high temperature and high humidity it is possible to provide a resin sheet excellent in insulation under high temperature and high humidity.
  • the resin sheet laminated body comprised using the said resin sheet, resin sheet laminated body hardened
  • each component in the composition means the total amount of the plurality of substances present in the composition unless there is a specific notice when there are a plurality of substances corresponding to each component in the composition.
  • the resin composition according to the first aspect of the present invention includes an epoxy resin monomer, a novolac resin including a compound having a structural unit represented by the following general formula (I), and a filler, and uses a laser diffraction method.
  • a filler having a peak in each range of 0.01 ⁇ m to less than 1 ⁇ m, 1 ⁇ m to less than 10 ⁇ m, and 10 ⁇ m to 100 ⁇ m is a boron nitride particle having a particle size of 10 ⁇ m to 100 ⁇ m Containing.
  • the resin composition may further contain other components as necessary.
  • the resin composition according to the second aspect of the present invention includes an epoxy resin monomer, a novolak resin containing a compound having a structural unit represented by the following general formula (I), and a volume average particle size of 0.01 ⁇ m or more.
  • the resin composition may further contain other components as necessary.
  • R 1 represents an alkyl group, an aryl group, or an aralkyl group.
  • R 2 and R 3 each independently represents a hydrogen atom, an alkyl group, an aryl group, or an aralkyl group.
  • m represents a number from 0 to 2
  • n represents a number from 1 to 7.
  • the resin sheet containing the resin composition having such a configuration is excellent in insulation before curing and adhesion to a metal plate or a heat sink.
  • curing material which is excellent in all of heat conductivity, adhesiveness, and insulation can be comprised by heat-processing and heat-curing this resin sheet.
  • the resin sheet is excellent in insulation under high temperature and high humidity. This can be considered as follows, for example.
  • the filler having a peak in each range of 10 ⁇ m to 100 ⁇ m and having a particle diameter of 10 ⁇ m to 100 ⁇ m contains boron nitride particles. It can be considered that excellent thermal conductivity is expressed.
  • the novolak resin having a highly polar molecular skeleton exhibits good adhesion to the metal plate. This may be because the novolak resin has many hydroxyl groups, hydrogen bonds are formed and the viscosity is high, and electrostatic interaction is likely to occur with the metal oxide on the surface of the metal plate.
  • the methylene skeleton easily rotates between the benzene rings, the direction of the benzene ring skeleton can be easily changed. Therefore, it is considered that the functional group can be directed to the surface of the metal plate and the wettability is also good.
  • a good bonding strength can be expressed by forming a hydroxyl group with a coordinate bond with a metal atom on the surface of a metal plate such as copper or aluminum.
  • the novolak resin has a feature that the hydroxyl group equivalent is small and the hydroxyl group is not adjacent to each other, so that the novolak resin has a structure with little steric hindrance and easy crosslinking reaction. Therefore, since it has a high crosslink density in the C-stage state, it is considered that a cured product that is difficult for the high elastic modulus, high thermal conductivity, and humidity to enter can be formed.
  • the aluminum oxide surface is a metal oxide, it has basicity, and it is easy to form a coordinate bond with the hydroxyl group of the novolak resin, and it is considered that the resin and filler interface can be favorably bonded. Furthermore, it is difficult to place phonons, which are heat-conducting media, and the thermal resistance is reduced, and the effect that humidity is difficult to enter is conceivable.
  • the thermal conductivity can be dramatically improved together with the effect of high thermal conductivity of the resin.
  • Boron nitride has a Mohs hardness of 2, which is characterized by being softer and easier to deform than other insulating ceramics such as alumina and aluminum nitride (for example, hardness 8).
  • the resin composition of the first aspect includes, for example, an epoxy resin monomer, a novolac resin containing a compound having a structural unit represented by the general formula (I), and a volume average particle size of 0.01 ⁇ m or more and less than 1 ⁇ m
  • the resin composition includes a filler.
  • the filler has a peak in each range of 0.01 ⁇ m or more and less than 1 ⁇ m, 1 ⁇ m or more and less than 10 ⁇ m, and 10 ⁇ m or more and 100 ⁇ m or less in a particle size distribution measured using a laser diffraction method. Contains boron nitride particles having a particle size.
  • the filler having such a particle size distribution can be constituted by combining, for example, at least three kinds of fillers having a single peak in the particle size distribution.
  • the filler preferably contains at least three kinds of fillers having different volume average particle diameters. That is, the filler includes a first filler having a volume average particle diameter of 0.01 ⁇ m or more and less than 1 ⁇ m, a second filler having a volume average particle diameter of 1 ⁇ m or more and less than 10 ⁇ m, and a volume average particle diameter of 10 ⁇ m or more and 100 ⁇ m or less. It is preferable that it contains at least a third filler containing boron nitride particles.
  • the first filler preferably contains aluminum oxide particles.
  • the first filler has a volume average particle diameter of 0.01 ⁇ m or more and less than 1 ⁇ m, but from the viewpoint of dispersibility, it is preferably 0.05 ⁇ m or more and 0.8 ⁇ m or less, and from the viewpoint of filling properties, the first filler is preferably set to 0.001. More preferably, it is 1 ⁇ m or more and 0.6 ⁇ m or less.
  • the second filler has a volume average particle diameter of 1 ⁇ m or more and less than 10 ⁇ m, preferably from 2 ⁇ m to 8 ⁇ m from the viewpoint of resin melt viscosity, and from 2 ⁇ m to 6 ⁇ m from the viewpoint of fillability. It is more preferable.
  • the third filler has a volume average particle diameter of 10 ⁇ m or more and 100 ⁇ m or less, but is preferably 10 ⁇ m or more and 80 ⁇ m or less from the viewpoint of filler filling property, and is 10 ⁇ m or more and 60 ⁇ m or less from the viewpoint of adhesiveness. Is more preferably 15 ⁇ m or more and 55 ⁇ m or less, and particularly preferably 20 ⁇ m or more and 50 ⁇ m or less.
  • the volume average particle diameter of the third filler is preferably 15 ⁇ m or more, more preferably 20 ⁇ m or more, and further preferably 30 ⁇ m or more from the viewpoint of insulation.
  • the particle diameter distribution of the whole filler contained in the resin composition is measured by taking the particle diameter on the horizontal axis and the frequency on the vertical axis. Then, a particle size distribution having a peak in each of a particle size range of 0.01 ⁇ m or more and less than 1 ⁇ m, a range of 1 ⁇ m or more and less than 10 ⁇ m, and a range of 10 ⁇ m or more and 100 ⁇ m or less can be shown.
  • the particle size distribution of the filler can be measured by a laser diffraction method.
  • the filler can be extracted from the resin composition or resin sheet (including the cured product) and measured by using a laser diffraction scattering particle size distribution measuring device (for example, LS230 manufactured by Beckman Coulter, Inc.). It is. Specifically, the filler component is extracted from the resin composition or resin sheet using an organic solvent or the like, nitric acid, aqua regia, or the like, and sufficiently dispersed with an ultrasonic disperser or the like. By measuring the particle size distribution of this dispersion, the particle size distribution of the filler can be measured. Further, by calculating the volume of the particle group belonging to each peak in the particle size distribution of the filler, the volume content of the particle group belonging to each peak in the total volume of the filler can be calculated.
  • the particle size distribution of the filler can be measured by observing the cross section of the resin sheet or its cured product with a scanning electron microscope. Specifically, these resin sheets or their cured products are embedded in a transparent epoxy resin and polished with a polisher, slurry, ion milling, FIB (focused ion beam), etc., to expose the cross section of the resin sheet or its cured product. Let By directly observing this section with a scanning electron microscope, the particle size distribution of the filler can be measured. Further, using a FIB apparatus (focused ion beam SEM) or the like, polishing and two-dimensional cross-sectional observation can be repeated, and a three-dimensional structural analysis can be performed to measure the particle size distribution of the filler. Furthermore, by calculating the volume of the particle group belonging to each peak in the particle size distribution of the filler, the volume content of the particle group belonging to each peak in the total volume of the filler can be calculated.
  • FIB apparatus focused ion beam SEM
  • the particle size distribution is in a range where the particle size is 0.01 ⁇ m or more and less than 1 ⁇ m, a particle size is 1 ⁇ m or more and less than 10 ⁇ m, and a particle size is 10 ⁇ m or more and 100 ⁇ m or less. There is a peak.
  • the first filler, the second filler, and the third filler are the ratio of the volume average particle diameter of the second filler to the volume average particle diameter of the first filler (
  • the volume average particle diameter of the second filler / the volume average particle diameter of the first filler) is preferably 5 to 50, and more preferably 6 to 20 from the viewpoints of filling properties and thermal conductivity.
  • the ratio of the volume average particle diameter of the third filler to the volume average particle diameter of the second filler volume average particle diameter of the third filler / volume of the second filler
  • the average particle diameter is preferably 3 to 40, more preferably 5 to 30.
  • the particle size distribution of the first filler, the second filler, and the third filler is not particularly limited as long as each has a predetermined volume average particle size.
  • the first filler, the second filler, and the third filler preferably have a wide particle size distribution from the viewpoint of thermal conductivity.
  • the said filler when the said filler contains said 1st filler, 2nd filler, and 3rd filler, the said filler should just contain said 1st filler, 2nd filler, and 3rd filler as a whole. . That is, when the particle size distribution of the whole filler is measured, a peak corresponding to the first filler having a volume average particle size of 0.01 ⁇ m or more and less than 1 ⁇ m and a second filler having a volume average particle size of 1 ⁇ m or more and less than 10 ⁇ m It is only necessary to observe at least three peaks, a peak corresponding to, and a peak corresponding to a third filler having a volume average particle diameter of 10 ⁇ m or more and 100 ⁇ m or less.
  • the filler of such an embodiment may be configured by mixing the first filler, the second filler, and the third filler, which exhibit a single peak in the particle size distribution, for example. You may comprise combining the filler which has a 2 or more peak suitably.
  • the content of the first filler, the second filler, and the third filler in the filler is not particularly limited. From the viewpoint of improving the thermal conductivity more effectively, the content of each filler is preferably set such that the content ratio of the third filler is as high as possible and then the content ratio of the second filler is increased. Thus, thermal conductivity improves more effectively by adjusting the content ratio (volume basis) of at least three kinds of fillers having different volume average particle diameters.
  • the volume-based content in the total volume of the first filler, the second filler, and the third filler is such that the content of the first filler is 1% by volume to 15% by volume,
  • the content of the second filler is preferably 10% by volume to 40% by volume, and the content of the third filler is preferably 45% by volume to 80% by volume.
  • the content of the first filler is 6% by volume to 15% by volume and the content of the second filler is 18% by volume to 35% by volume. More preferably, the content is 50% by volume to 70% by volume.
  • the content of the first filler is 7 to 12% by volume
  • the content of the second filler is 20 to 30% by volume
  • the third filler More preferably, the content of is 55 volume% to 70 volume%.
  • the content of each filler is such that the content ratio of the second filler to the content of the first filler is 0.5 to 40 from the viewpoint of filling properties and thermal conductivity, and the content of the first filler is
  • the content ratio of the third filler is preferably 3 to 80, the content ratio of the second filler to the content of the first filler is 1 to 7, and the third filler content relative to the content of the first filler More preferably, the content ratio of the filler is 4 to 15, the content ratio of the second filler to the content of the first filler is 1.5 to 4.5, and the content ratio of the first filler to the content of the first filler is More preferably, the content ratio of the third filler is 4.5 to 10.
  • the filler has a volume average particle size of 0.01 ⁇ m or more and less than 1 ⁇ m, 1 ⁇ m or more and less than 10 ⁇ m, and 10 ⁇ m or more and 100 ⁇ m, respectively, from the viewpoints of filling properties and thermal conductivity.
  • the content of the first filler, the second filler, and the third filler is preferably 1% to 15%, 10 to 40, and 45 to 80% on a volume basis, respectively.
  • the volume average particle diameters of the first filler, the second filler, and the third filler are 0.05 ⁇ m or more and less than 0.8 ⁇ m, 2 ⁇ m or more and less than 8 ⁇ m, and 20 ⁇ m or more and 80 ⁇ m or less, respectively.
  • the contents of the filler and the third filler are 5% to 13%, 15% to 35%, and 50% to 73%, respectively, on a volume basis.
  • the volume average particle diameters of the first filler, the second filler, and the third filler are 0.1 ⁇ m or more and less than 0.6 ⁇ m, 2 ⁇ m or more and less than 6 ⁇ m, and 30 ⁇ m or more and 60 ⁇ m or less, respectively. More preferably, the contents of the filler and the third filler are 7% to 13%, 20% to 30%, and 55% to 70%, respectively, on a volume basis.
  • the filler contains boron nitride particles having a particle size of 10 ⁇ m or more and 100 ⁇ m or less.
  • the boron nitride particles are preferably included in the filler as the third filler.
  • the thermal conductivity is dramatically improved.
  • the particle shape of the boron nitride particles is not particularly limited, and examples thereof include a spherical shape, a round shape, a crushed shape, and a flake shape.
  • the boron nitride particles are also preferably aggregated particles.
  • the particle shape of the boron nitride particles is preferably spherical and round, and more preferably spherical and round aggregated particles, from the viewpoints of filling properties and thermal conductivity.
  • Boron nitride has a Mohs hardness of 2, which is lower and softer than other insulating ceramics (for example, hardness 8) such as alumina and aluminum nitride.
  • the boron nitride having a particle shape such as a spherical shape or a round shape has a shape in which primary particles are aggregated, and there are cavities inside the particles, which are harder than the molten resin, but the particles themselves are easily deformed. Yes. For this reason, it can be easily deformed by an external force, and can be deformed during the heating and pressurizing step, the laminating step, and the pressing step described later, and the resin between the fillers can be eliminated during the deformation. .
  • the fillers can easily approach each other, and it becomes easy to form a structure in which boron nitride particles are continuously in contact with the inside of the resin sheet and the cured resin sheet, and the thermal conductivity is dramatically improved. Then you can think. Although aluminum nitride is known as a filler having higher thermal conductivity than boron nitride, it is hard to be deformed because it is hard as a particle, so it is difficult to form a continuous layer, and the effect of improving thermal conductivity is less than boron nitride. It is done.
  • the content of boron nitride particles contained in the filler is not particularly limited. From the viewpoint of thermal conductivity, when the filler total volume is 100% by volume, it is preferably 15% by volume or more and 90% by volume or less, and from the viewpoint of adhesiveness, it is more preferably 30% by volume or more and 85% by volume or less. Preferably, from the viewpoint of thermal conductivity, it is more preferably 35% by volume or more and 80% by volume or less.
  • the filler contains boron nitride particles is effective in directly observing the structure of the resin composition or the sheet with a microscope. For example, by observing the cross section of the resin sheet or its cured product with an SEM (scanning electron microscope), the crystal form of the filler in the resin composition is confirmed, and further, SEM-EDX (energy dispersive X-ray) This can be confirmed by qualitating the filler element using a spectroscope.
  • SEM scanning electron microscope
  • the third filler may further contain inorganic compound particles having other insulating properties in addition to the boron nitride particles.
  • examples of the other inorganic compound having insulating properties other than boron nitride that can be contained in the third filler include those similar to the first filler and the second filler described later.
  • the first filler and the second filler are not particularly limited as long as they are insulating inorganic compound particles. It is preferable that the inorganic compound particles have high thermal conductivity.
  • Specific examples of the first filler and the second filler include inorganic compound particles such as aluminum oxide, magnesium oxide, boron nitride, aluminum nitride, silicon nitride, talc, mica, aluminum hydroxide, and barium sulfate. .
  • at least one inorganic compound particle selected from the group consisting of aluminum oxide, boron nitride, and aluminum nitride is preferable. These fillers may be used alone or in combination of two or more.
  • the first filler preferably contains aluminum oxide particles. Thereby, moisture-proof insulation can be improved more.
  • the reason is as follows. It is known that tree-like copper migration generated under constant temperature and humidity in a thermally conductive resin cured product in contact with metallic copper occurs along the interface between a resin and a filler having different dielectric constants. For this reason, the progress rate of the tree-like copper migration is reduced by increasing the specific surface area of the filler, strengthening the bond between the filler and the resin, increasing the crosslink density of the resin, and the like. It is considered that a resin composition having excellent long-term insulation reliability can be obtained.
  • the first filler with the smallest particle diameter has the largest surface area per mass, it can be considered that the moisture resistance reliability is affected.
  • the insulation reliability can be further improved when the first filler contains aluminum oxide particles having excellent binding properties with the resin. Moreover, since the hardened
  • the aluminum oxide particles preferably have a specific surface area of 2 m 2 / g or more from the viewpoint of moisture resistance reliability. From the viewpoint of moisture resistance reliability, the aluminum oxide is preferably aluminum oxide particles having a purity of 99% by mass or more.
  • the particle shape of the filler is not particularly limited, and examples thereof include a spherical shape, a round shape, a crushed shape, a flake shape, and an agglomerated particle shape.
  • the first filler and the second filler are preferably round, spherical, or agglomerated particles from the viewpoints of fillability and thermal conductivity.
  • the filler content in the resin composition is not particularly limited.
  • the filler content is preferably 50% by volume to 90% by volume in the total solid content volume of the resin composition from the viewpoints of thermal conductivity and adhesiveness, and 50% by volume to 85% by volume from the viewpoint of thermal conductivity. % Is more preferable.
  • the total solid content volume of a resin composition means the total volume of a non-volatile component among the components which comprise a resin composition.
  • the resin composition includes a novolac resin (hereinafter also referred to as “specific novolac resin”) including at least one compound having a structural unit represented by the following general formula (I).
  • the novolak resin acts as a curing agent, reacts with an epoxy resin monomer described later to form a cured resin, and exhibits insulating properties and adhesiveness.
  • a novolac resin containing a compound having a specific structure and a filler containing boron nitride or aluminum oxide it exhibits insulation and adhesion before curing, excellent thermal conductivity after curing, insulation and adhesion. be able to.
  • the specific novolac resin further includes a monomer that is a phenol compound constituting the novolac resin.
  • R 1 represents an alkyl group, an aryl group, or an aralkyl group.
  • the alkyl group, aryl group, and aralkyl group represented by R 1 may further have a substituent, if possible.
  • the substituent include an alkyl group, an aryl group, a halogen atom, and a hydroxyl group.
  • n represents a number from 0 to 2.
  • m is 2, two R 1 may be the same or different.
  • m is preferably 0 or 1 and more preferably 0 from the viewpoints of adhesiveness and thermal conductivity.
  • n is a number from 1 to 7, and is the number of repeating structural units represented by the general formula (I).
  • the specific novolac resin includes a compound having a plurality of structural units represented by the general formula (I)
  • n has an average value of 1.7 to 6.5 from the viewpoints of adhesiveness and thermal conductivity. It is preferable that it is 2.4 to 6.1.
  • the specific novolac resin only needs to contain at least one compound having a structural unit represented by the above general formula (I), and 2 of the compound having a structural unit represented by the above general formula (I). It may contain more than species.
  • the specific novolak resin contains at least a partial structure derived from resorcinol as a phenol compound because it contains a compound having a structural unit represented by the general formula (I).
  • the specific novolac resin may further include at least one partial structure derived from a phenol compound other than resorcinol.
  • phenol compounds other than resorcinol include phenol, cresol, catechol, hydroquinone, 1,2,3-trihydroxybenzene, 1,2,4-trihydroxybenzene, 1,3,5-trihydroxybenzene, and the like. it can.
  • the novolak resin may contain a single partial structure or a combination of two or more thereof.
  • the partial structure derived from a phenol compound means a monovalent or divalent group constituted by removing one or two hydrogen atoms from the benzene ring portion of the phenol compound. The position where the hydrogen atom is removed is not particularly limited.
  • the partial structure derived from a phenol compound other than resorcinol in the specific novolak resin includes phenol, cresol, catechol, hydroquinone, 1,2,3-trihydroxybenzene, from the viewpoint of thermal conductivity, adhesiveness, and storage stability.
  • a partial structure derived from at least one selected from the group consisting of 1,2,4-trihydroxybenzene and 1,3,5-trihydroxybenzene is preferable.
  • the content of the partial structure derived from resorcinol in the specific novolak resin is not particularly limited. From the viewpoint of thermal conductivity, the content of the partial structure derived from resorcinol is preferably 55% by mass or more in the total mass of the specific novolak resin, and from the viewpoint of further high thermal conductivity, 80% by mass or more. It is more preferable that The upper limit of the content rate of the partial structure derived from resorcinol in the total mass of the specific novolak resin is not particularly limited. For example, it is preferably 98% by mass or less.
  • R 2 and R 3 each independently represent a hydrogen atom, an alkyl group, an aryl group, a phenyl group, or an aralkyl group.
  • the alkyl group, phenyl group, aryl group and aralkyl group represented by R 2 and R 3 may further have a substituent if possible. Examples of the substituent include an alkyl group, an aryl group, a halogen atom, and a hydroxyl group.
  • R 2 and R 3 in the present invention are preferably a hydrogen atom, an alkyl group, or an aryl group from the viewpoint of storage stability and thermal conductivity, a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, or It is more preferably an aryl group having 6 to 10 carbon atoms, further preferably a hydrogen atom or a phenyl group, and particularly preferably a hydrogen atom. Furthermore, from the viewpoint of heat resistance, it is also preferable that at least one of R 2 and R 3 is an aryl group having 6 to 10 carbon atoms (more preferably, a phenyl group).
  • the specific novolak resin is preferably a novolak resin containing a compound having a structural unit represented by any one of the following general formulas (Ia) to (If).
  • i and j represent the content ratio (% by mass) of the structural unit derived from each phenol compound. i is 2% by mass to 30% by mass, j is 70% by mass to 98% by mass, and the total of i and j is 100% by mass.
  • the specific novolac resin includes a structural unit represented by any one of the general formula (Ia) and the general formula (Ie) from the viewpoint of thermal conductivity, i is 2% by mass to 20% by mass, and j Is preferably 80% by mass to 98% by mass, and includes a structural unit represented by the general formula (Ia) from the viewpoint of elastic modulus and linear expansion coefficient, and i is 5% by mass to 10% by mass. , J is more preferably 90% by mass to 95% by mass.
  • the specific novolac resin contains a compound having a structural unit represented by the above general formula (I), but preferably contains at least one compound represented by the following general formula (III).
  • R 11 represents a hydrogen atom or a monovalent group derived from a phenol compound represented by the following General Formula (IIIp), and R 12 represents a monovalent group derived from a phenol compound. .
  • R 1, R 2, R 3 , m and n are respectively the same as R 1, R 2, R 3 , m and n in the general formula (I).
  • the monovalent group derived from the phenol compound represented by R 12 is a monovalent group formed by removing one hydrogen atom from the benzene ring portion of the phenol compound, and the position at which the hydrogen atom is removed is particularly limited. Not.
  • R 1, R 2, R 3, and m is, R 1 in the general formula (I), R 2, R 3, and m and are each synonymous.
  • the phenol compound in R 11 and R 12 is not particularly limited as long as it is a compound having a phenolic hydroxyl group.
  • Specific examples include phenol, cresol, catechol, resorcinol, hydroquinone, and the like.
  • at least one selected from the group consisting of cresol, catechol, and resorcinol is preferable.
  • the number average molecular weight of the specific novolak resin is preferably 800 or less from the viewpoint of thermal conductivity and moldability. Moreover, from a viewpoint of an elasticity modulus and a linear expansion coefficient, it is more preferable that it is 300 or more and 750 or less. Further, from the viewpoint of moldability and adhesive strength, it is more preferably 350 or more and 550 or less.
  • the novolak resin containing the compound having the structural unit represented by the general formula (I) may contain a monomer that is a phenol compound constituting the novolak resin.
  • a monomer that is a phenol compound constituting the novolak resin (hereinafter sometimes referred to as “monomer content ratio”).
  • the content ratio of the monomer, which is a phenol compound constituting the novolak resin (hereinafter sometimes referred to as “monomer content ratio”).
  • monomer content ratio the content ratio of the monomer, which is a phenol compound constituting the novolak resin.
  • it is preferably 5% by mass to 50% by mass in the novolac resin, and from the viewpoint of high thermal conductivity and glass transition temperature, 10% by mass to 45% by mass. %, More preferably 15% by mass to 40% by mass from the viewpoint of further high thermal conductivity and glass transition temperature.
  • the monomer content ratio is 5% by mass or more, an increase in viscosity of the novolak resin is suppressed, and a composition having high adhesive strength and excellent thermal conductivity can be obtained.
  • the content is 50% by mass or less, a higher-order higher-order structure or a three-dimensional crosslinked structure is formed by a crosslinking reaction at the time of curing, and more excellent thermal conductivity and heat resistance can be achieved.
  • the monomer content in the resin composition is less than 5% by mass, the resin tends to have a high viscosity, so that the moldability and adhesiveness may be reduced, and the thermal conductivity may also be reduced. is there.
  • the monomer content ratio is greater than 50% by mass, the volatile content of the composition increases and voids tend to be generated. That is, the monomer content ratio of 5% by mass to 50% by mass is preferable because it is possible to excel in all of thermal conductivity, adhesiveness, and insulation.
  • the arithmetic average roughness of the sheet surface tends to be 2.5 ⁇ m or less in the resin sheet configured using the resin composition.
  • the arithmetic average roughness of the sheet surface tends to be 1.0 ⁇ m or more when it is 50% by mass or less. This is because the monomer amount correlates with the fluidity at the time of molding the resin sheet. If it is within this range, it is considered that bonding is possible without interfacial voids when bonding a metal plate or the like. When such a sheet is used, it is possible to obtain characteristics with better insulation, adhesion, and thermal conductivity during curing. From the above, it is surmised that the monomer content ratio in the resin composition correlates with the surface roughness of the sheet.
  • the organic component is extracted by dissolving the resin composition, and NMR (nuclear magnetic resonance) or HPLC (high performance liquid chromatography) is used for the obtained extract.
  • NMR nuclear magnetic resonance
  • HPLC high performance liquid chromatography
  • Preferred examples of the monomer which is a phenol compound constituting the novolak resin include resorcinol, catechol, and hydroquinone. It is preferable to contain at least resorcinol as a monomer constituting the novolak resin.
  • the resin composition may contain at least one other curing agent in addition to the novolac resin (specific novolac resin) containing the compound represented by the general formula (I).
  • the other curing agent is not particularly limited as long as it is a compound that can react with an epoxy resin monomer to form a cured resin.
  • novolak resins excluding those containing a compound represented by the general formula (I)
  • aromatic amine-based curing agents excluding those containing a compound represented by the general formula (I)
  • aromatic amine-based curing agents excluding those containing a compound represented by the general formula (I)
  • aromatic amine-based curing agents excluding those containing a compound represented by the general formula (I)
  • aromatic amine-based curing agents excluding those containing a compound represented by the general formula (I)
  • aromatic amine-based curing agents excluding those containing a compound represented by the general formula (I)
  • aromatic amine-based curing agents excluding those containing a compound represented by the general formula (I)
  • the other curing agent preferably further contains at least one other novolak resin not containing the compound represented by the general formula (I) from the viewpoints of insulation and heat resistance.
  • the other novolak resin is not particularly limited as long as it is a novolak resin not containing the compound represented by the general formula (I), and can be appropriately selected from novolak resins usually used as a curing agent for epoxy resins.
  • the content of the other curing agent is not particularly limited. From the viewpoint of thermal conductivity, the content is preferably 30% by mass or less, more preferably 5% by mass or less, with respect to the specific novolac resin.
  • the total content of the specific novolak resin in the resin composition and other curing agents contained as necessary is not particularly limited. From the viewpoint of thermal conductivity and adhesiveness, it is preferably 1% by mass to 10% by mass and more preferably 1% by mass to 8% by mass in the total solid content of the resin composition. Further, the content of the curing agent in the resin composition is preferably 0.8 to 1.2, more preferably 0.9 to 1.1, based on the equivalent of the epoxy resin monomer described later. preferable.
  • epoxy resin monomer The resin composition in the present invention contains at least one epoxy resin monomer (hereinafter sometimes simply referred to as “epoxy resin”).
  • epoxy resin a commonly used general epoxy resin can be used without particular limitation. Especially, it is preferable that it is low viscosity before hardening, is excellent in filler filling property and moldability, and has high heat conductivity in addition to high heat resistance and adhesiveness after thermosetting.
  • the epoxy resin monomer forms a cured resin together with a novolak resin having a specific structure
  • a highly ordered higher order structure derived from a covalent bond or an intermolecular force can be formed in the cured resin. For this reason, it is thought that scattering of the phonon which is a heat conductive medium in the insulating resin can be suppressed, and thereby high heat conductivity can be achieved.
  • Specific examples of general epoxy resins include glycidyl ethers such as bisphenol A type, F type, S type and AD type, hydrogenated bisphenol A type glycidyl ether, phenol novolac type glycidyl ether, cresol novolac type glycidyl.
  • Ether bisphenol A type novolac type glycidyl ether, naphthalene type glycidyl ether, biphenol type glycidyl ether, dihydroxypentadiene type glycidyl ether, triphenylmethane type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, etc. Is mentioned.
  • the epoxy resin monomer preferably has a low viscosity before curing, is excellent in filler filling properties and moldability, and has high heat conductivity in addition to high heat resistance and adhesiveness after thermosetting.
  • an epoxy resin monomer that is liquid at 25 ° C thereby, the flexibility at the time of forming into a sheet and the fluidity at the time of lamination are easily developed.
  • Examples of such epoxy resin monomers that are liquid at 25 ° C. include bisphenol A type and AD type, these hydrogenated resins and naphthalene types, and one end called a reactive diluent having an epoxy group.
  • the molecular weight of the epoxy resin monomer that is liquid at 25 ° C. is not particularly limited. For example, it is preferably 100 or more and 100,000 or less, and preferably 200 or more and 50,000 or less from the viewpoint of fluidity during lamination. More preferably, it is 300 or more and 10,000 or less.
  • liquid epoxy resin selected from the group consisting of bisphenol A type glycidyl ether and bisphenol F type glycidyl ether having a molecular weight of 500 or less when at least one liquid epoxy resin selected from the group consisting of bisphenol A type glycidyl ether and bisphenol F type glycidyl ether having a molecular weight of 500 or less is included, the flexibility at the time of sheeting and the fluidity at the time of lamination are further improved. can do.
  • the fluidity during lamination can be further improved.
  • the epoxy resin monomer may contain a polyfunctional epoxy resin. This makes it possible to achieve higher Tg (glass transition temperature) and higher thermal conductivity more effectively.
  • the polyfunctional epoxy resin include phenol novolac type epoxy resin, cresol novolac type epoxy resin, triphenylmethane type epoxy resin and the like.
  • the epoxy resin monomer may contain an epoxy resin monomer having a mesogenic group from the viewpoint of thermal conductivity.
  • the mesogenic group here is not particularly limited as long as it can form a higher-order structure derived from a mesogenic group in the cured resin when the epoxy resin monomer forms a cured resin together with a curing agent.
  • the higher order structure means a state in which molecules are aligned after the resin composition is cured.
  • a crystal structure or a liquid crystal structure is present in the cured resin.
  • the presence of such a crystal structure or liquid crystal structure can be directly confirmed by, for example, observation with a polarizing microscope under crossed Nicols or an X-ray scattering spectrum.
  • the presence can also be indirectly confirmed by a decrease in the change in storage elastic modulus with respect to a change in temperature.
  • mesogenic group examples include a biphenyl group, a terphenyl group, a terphenyl analog, an anthracene group, and a group in which these are linked by an azomethine group or an ester group.
  • an epoxy resin monomer having a mesogenic group as an epoxy resin monomer and forming a cured resin together with a curing agent, higher thermal conductivity can be achieved.
  • this can be considered as follows. That is, an epoxy resin monomer having a mesogenic group in the molecule forms a cured resin together with a curing agent (preferably a specific novolak resin), so that a highly ordered higher order derived from a mesogenic group in the cured resin is obtained. A structure can be formed. For this reason, it is thought that scattering of the phonon which is a heat conductive medium in the insulating resin can be suppressed, and thereby high heat conductivity can be achieved.
  • a curing agent preferably a specific novolak resin
  • epoxy resin monomer having a mesogenic group examples include 4,4′-biphenol glycidyl ether, 1- ⁇ (3-methyl-4-oxiranylmethoxy) phenyl ⁇ -4- (4-oxira Nylmethoxyphenyl) -1-cyclohexene, 4- (oxiranylmethoxy) benzoic acid-1,8-octanediylbis (oxy-1,4-phenylene) ester, 2,6-bis [4- [4- [ 2- (oxiranylmethoxy) ethoxy] phenyl] phenoxy] pyridine and the like.
  • 1- ⁇ (3-methyl-4-oxiranylmethoxy) phenyl ⁇ -4- (4-oxiranylmethoxyphenyl) -1-cyclohexene is particularly preferable from the viewpoint of improving thermal conductivity.
  • the epoxy resin may contain a liquid epoxy resin.
  • the resin softening point of the resin sheet in the A stage state or B stage state can be lowered.
  • the flexibility of the sheet is improved to improve the handleability, and the melt viscosity may be lowered during bonding.
  • the liquid epoxy resin may have low Tg and thermal conductivity, the content of the liquid epoxy resin can be appropriately selected in consideration of the physical properties of the cured resin. Specific examples of the liquid epoxy resin are as described above.
  • the content of the epoxy resin monomer in the resin composition is not particularly limited. From the viewpoint of thermal conductivity and adhesiveness, it is preferably 3% by mass to 30% by mass in the total solid content constituting the resin composition, and from the viewpoint of thermal conductivity, it is 5% by mass to 25% by mass. More preferably, the content is 5% by mass to 20% by mass.
  • the resin composition preferably contains 3% by mass to 30% by mass of an epoxy resin monomer having a mesogenic group as an epoxy resin monomer in the total solid content of the resin composition.
  • an epoxy resin monomer having at least one mesogenic group selected from the group consisting of pyridine is contained in an amount of 5% by mass to 25% in the total solid content of the resin composition. More preferably contains%.
  • the resin composition is at least one selected from the group consisting of a phenol novolac epoxy resin, a cresol novolac epoxy resin, and a triphenylmethane epoxy resin as an epoxy resin monomer from the viewpoint of thermal conductivity and heat resistance. And at least one selected from bisphenol A type glycidyl ether and bisphenol AD type glycidyl ether at a mass ratio of 85:15 to 85:15 in a total solid content of the resin composition of 3% by mass to 30% by mass.
  • the resin composition may further contain at least one silane coupling agent.
  • silane coupling agent By including the silane coupling agent, the bondability between the resin component including the epoxy resin and the novolak resin and the filler is further improved, and higher thermal conductivity and stronger adhesiveness can be achieved.
  • the silane coupling agent is not particularly limited as long as it is a compound having a functional group that binds to a resin component and a functional group that binds to a filler, and can be appropriately selected from commonly used silane coupling agents.
  • the functional group bonded to the filler include trialkoxysilyl groups such as a trimethoxysilyl group and a triethoxysilyl group.
  • the functional group bonded to the resin component include an epoxy group, an amino group, a mercapto group, a ureido group, and an aminophenyl group.
  • silane coupling agent examples include 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl).
  • a silane coupling agent oligomer represented by SC-6000KS2 manufactured by Hitachi Chemical Coated Sands Co., Ltd.
  • These silane coupling agents can be used alone or in combination of two or more.
  • the content of the silane coupling agent in the resin composition is not particularly limited. From the viewpoint of thermal conductivity, the content of the silane coupling agent is preferably 0.02% by mass to 0.83% by mass, and preferably 0.04% by mass to 0.03% by mass in the total solid content of the resin composition. More preferably, it is 0.42 mass%.
  • the content of the silane coupling agent relative to the content of the filler is preferably 0.02% by mass to 1% by mass from the viewpoint of thermal conductivity, insulation, and moldability, and has higher thermal conductivity. From the viewpoint, it is more preferably 0.05% by mass to 0.5% by mass.
  • the resin composition may contain other components as necessary in addition to the essential components.
  • other components include organic solvents, curing accelerators, and dispersants.
  • a commonly used method for producing a resin composition can be used without particular limitation.
  • a normal stirrer, a raking machine, a three-roller, a ball mill, or the like can be appropriately combined.
  • dispersion and dissolution can be performed by adding an appropriate organic solvent.
  • an epoxy resin, a novolak resin, a filler, and a silane coupling agent added as necessary are dissolved and dispersed in an appropriate organic solvent.
  • a resin composition can be obtained by mixing the components.
  • the organic solvent is preferably one having a low boiling point or vapor pressure because at least a part of the organic solvent is removed by a drying process in the drying step in the resin sheet manufacturing method described later. If a large amount of the organic solvent remains in the resin sheet, it may affect the thermal conductivity and the insulation performance. Moreover, if it is completely removed, the sheet may become hard and the adhesion performance may be lost. Therefore, the selection of the organic solvent must be compatible with the drying method and conditions.
  • the organic solvent can be appropriately selected depending on the type of resin to be used, the type of filler, and the ease of drying during sheet production.
  • organic solvents examples include alcohols such as methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2-propanol and cyclohexanol, ketone solvents such as methyl ethyl ketone, cyclohexanone and cyclopentanone, dimethylformamide and dimethylacetamide. And nitrogen-based solvents such as The organic solvents can be used alone or in combination of two or more.
  • the resin sheet of the present invention is formed by molding the resin composition into a sheet having an average thickness of 80 ⁇ m to 250 ⁇ m. By forming the resin sheet from the resin composition, the storage stability before curing and the thermal conductivity after curing are excellent. Details of the resin composition are as described above.
  • the average thickness of the resin sheet is 80 ⁇ m or more and 250 ⁇ m or less, but preferably 90 ⁇ m or more and 250 ⁇ m or less, more preferably 100 ⁇ m or more and 250 ⁇ m or less, and more preferably 110 ⁇ m or more and 230 ⁇ m from the viewpoint of achieving both thermal conductivity and insulation. More preferably, it is as follows.
  • the average thickness of the resin sheet can be selected as appropriate in consideration of electrical characteristics such as voltage and current to be insulated, and thermal resistance value between the heating element and the sheet. If the required thermal resistance value can be satisfied, the sheet thickness is preferably thick from the viewpoint of insulation.
  • the average thickness of the resin sheet is given as an arithmetic average value obtained by measuring the thickness of 9 points using a micrometer (for example, Mitutoyo Micrometer IP65).
  • the arithmetic average roughness on the surface of the resin sheet is preferably 1.0 ⁇ m or more and 2.5 ⁇ m or less, more preferably 1.2 ⁇ m or more and 2.3 ⁇ m or less, from the viewpoint of insulation including long-term reliability. preferable.
  • Examples of the method for setting the arithmetic average roughness on the surface of the resin sheet in the above range include laminating, pressing, and metal roll.
  • arithmetic mean roughness can also be made into the said range by selecting the composition of a resin composition suitably.
  • the arithmetic mean roughness in the surface of a resin sheet is measured on measurement conditions: 1 mm / s using the surface roughness measuring apparatus (For example, the surface roughness measuring machine by Kosaka Laboratory).
  • the resin sheet preferably further has a support on at least one surface, and more preferably has a support on both surfaces.
  • the resin composition can be protected from the adhesion or impact of foreign matter on the adhesive surface of the resin sheet from the external environment.
  • the support is preferably peeled off when used.
  • the support examples include plastic films such as polytetrafluoroethylene film, polyethylene terephthalate film, polyethylene film, polypropylene film, polymethylpentene film, and polyimide film. These plastic films may be subjected to surface treatment such as primer coating, UV treatment, corona discharge treatment, polishing treatment, etching treatment, mold release treatment and the like as necessary. Further, as the support, a metal foil such as a copper foil or an aluminum foil, or a metal such as an aluminum plate can be used.
  • the average film thickness is not particularly limited.
  • the average film thickness is appropriately determined based on the knowledge of those skilled in the art according to the average thickness of the resin sheet to be formed and the application of the resin sheet.
  • the average film thickness of the plastic film is preferably 10 ⁇ m to 150 ⁇ m, and more preferably 25 ⁇ m to 110 ⁇ m, from the viewpoint of good economic efficiency and good handleability.
  • the average film thickness is not particularly limited and can be appropriately selected according to the use of the resin sheet.
  • the thickness may be 10 ⁇ m to 400 ⁇ m, and is preferably 18 ⁇ m to 300 ⁇ m from the viewpoint of handleability as a roll foil.
  • the resin sheet is preferably a laminate of a first resin layer formed from the resin composition and a second resin layer formed from the resin composition. That is, it is preferable that the resin sheet is formed by laminating a second resin layer formed from the resin composition on a first resin layer formed from the resin composition. Thereby, the withstand voltage can be further improved.
  • the resin compositions forming the first resin layer and the second resin layer may have the same composition or different compositions. It is preferable that the resin composition which forms said 1st resin layer and 2nd resin layer is the same composition from a heat conductive viewpoint.
  • the resin sheet is a laminate of a first resin layer formed from the resin composition and a second resin layer formed from the resin composition, and a metal foil is provided on one surface of the laminate. Furthermore, it is preferable to have a polyethylene terephthalate film on the other surface. That is, it is preferable that the resin sheet further includes a metal foil and a polyethylene terephthalate film, and the metal foil, the first resin layer, the second resin layer, and the polyethylene terephthalate film are laminated in this order. As a result, a void filling effect is obtained, and the withstand voltage tends to be further improved.
  • the method for producing the resin sheet is not particularly limited as long as it can form a sheet-like resin layer having an average thickness of 80 ⁇ m or more and 250 ⁇ m or less using the resin composition, and is appropriately selected from commonly used sheet production methods. can do.
  • a resin composition containing an organic solvent is applied on a support so as to have a desired average thickness to form a coating layer, and the formed coating layer is dried. Examples thereof include a method of forming a resin layer by removing at least part of the organic solvent by treatment.
  • the coating method and drying method of the resin composition can be appropriately selected from commonly used methods without particular limitation.
  • Examples of the coating method include a comma coater method, a die coater method, and a dip coating method.
  • Examples of the drying method include heat drying under normal pressure or reduced pressure, natural drying, freeze drying, and the like.
  • the film thickness of the coating layer can be appropriately selected so that the resin layer after the drying treatment has a desired average thickness.
  • the average thickness of the resin layer after drying is 80 ⁇ m to 250 ⁇ m, but it is preferable to adjust the film thickness of the coating layer so as to be 90 ⁇ m to 230 ⁇ m.
  • the thickness is 80 ⁇ m or more, cavities are hardly formed in the coating layer, and the production likelihood tends to increase.
  • even when forming a resin roll as it is 250 micrometers or less there exists a tendency which can suppress that the powder of resin disperses.
  • the method for producing the resin sheet is obtained by laminating a second resin layer formed from the resin composition on a first resin layer formed from the resin composition to obtain a laminate. And a step of subjecting the laminated body to a heat and pressure treatment. With such a manufacturing method, the withstand voltage is further improved.
  • the probability of occurrence of pinholes or voids in the method for producing a resin sheet is not high, but by stacking two resin layers, the probability of overlapping thin portions becomes the square of that, and it will probably approach nearly zero. . Since the dielectric breakdown occurs at a place where insulation is weakest, it can be considered that the effect of further improving the withstand voltage can be obtained by stacking the two resin layers. Further, it can be considered that the contact probability between the fillers is improved, and the effect of improving the thermal conductivity is also produced.
  • the step of obtaining the laminate is provided on the metal foil, the first resin layer formed from the resin composition, and the second resin layer formed on the polyethylene terephthalate film and formed from the resin composition. Laminate the resin layer so that the surface of the first resin layer opposite to the surface in contact with the metal foil and the surface of the second resin layer opposite to the surface in contact with the polyethylene terephthalate film are in contact with each other. It is preferable that it is a process. Thereby, the hole filling effect can be obtained more effectively.
  • the first resin layer is formed by applying a resin composition containing an organic solvent on a metal foil to form a coating layer, and drying the formed coating layer to remove at least a part of the organic solvent.
  • the second resin layer may be formed by, for example, applying a resin composition containing an organic solvent on a polyethylene terephthalate film to form a coating layer, and drying the formed coating layer to remove at least a part of the organic solvent. It can be formed by removing.
  • the average thickness of the first resin layer and the second resin layer can be appropriately selected so that the average thickness of the laminate becomes 80 ⁇ m or more and 250 ⁇ m or less when the laminate is constituted.
  • the average thickness of the first resin layer and the second resin layer can be, for example, 30 ⁇ m to 250 ⁇ m, and preferably 50 ⁇ m to 200 ⁇ m. When the thickness is 50 ⁇ m or more, voids are hardly formed in the coating layer, and the production likelihood tends to increase. When it is 200 ⁇ m or less, there is a tendency that cracks are hardly formed in the sheet.
  • the average thicknesses of the first resin layer and the second resin layer may be the same as or different from each other.
  • the laminate in which the first resin layer and the second resin layer are laminated is preferably subjected to a heat and pressure treatment.
  • a resin sheet with improved thermal conductivity can be produced.
  • the method for heat and pressure treatment is not particularly limited as long as it can apply a predetermined pressure and heat, and can be appropriately selected from commonly used heat and pressure treatment methods. Specific examples include laminating, pressing, and metal roll processing.
  • the heat and pressure treatment includes a method of performing treatment at normal pressure and a vacuum treatment of performing treatment under reduced pressure. Vacuum treatment is preferred, but not limited.
  • the surface of the laminate before the heat and pressure treatment is uneven due to a filler or the like and may not be smooth.
  • the film thickness of the resin sheet obtained by heat and pressure treatment of such a laminate may be small without matching the sum of the thicknesses of the resin layers formed by coating. This is considered to be due to, for example, that the filler filling property changes before and after the heat and pressure treatment, that the convex and concave portions of the surface are superimposed, the uniformity of the sheet is improved, and the voids are filled. be able to.
  • the resin sheet is preferably made of a resin layer obtained by removing at least a part of the organic solvent from the coating layer. Furthermore, it is more preferable that the resin composition that constitutes the resin layer is in a semi-cured state (B stage) by further heating and pressing the resin layer from which at least a part of the organic solvent has been removed.
  • a resin sheet obtained by drying a coating layer formed from a resin composition is an A stage sheet, and a resin sheet obtained by further heating and pressing the A stage sheet is a B stage sheet.
  • the B stage sheet is preferably in a semi-cured state of the resin composition.
  • the B-stage sheet is a resin sheet having a viscosity of 10 4 Pa ⁇ s to 10 7 Pa ⁇ s at room temperature (25 ° C.), whereas it is 10 2 Pa ⁇ s to 10 6 at 100 ° C.
  • the viscosity is decreased by 0.01 to 30% at Pa ⁇ s.
  • the cured resin sheet to be described later is not melted by heating.
  • the viscosity can be measured by dynamic viscoelasticity measurement (frequency 1 Hz, load 40 g, temperature increase rate 3 ° C./min).
  • the handling property is improved because the resin sheet is a B stage sheet. This is because the elastic modulus is increased and the strength is improved by the progress of curing as compared with the A stage sheet. On the other hand, it is necessary to suppress the degree of curing of the resin so that it can be handled flexibly.
  • a method for bringing the resin layer into a semi-cured state for the B stage sheet for example, a method of performing heat and pressure treatment described later can be exemplified.
  • the method for heat-pressing the resin sheet is not particularly limited as long as the resin layer can be in a semi-cured state.
  • it can be heated and pressurized using a hot press or a laminator.
  • the heat-pressing conditions which make the resin composition which comprises a resin sheet a semi-hardened state can be suitably selected according to the structure of a resin composition.
  • the heating and pressurizing treatment can be performed under the conditions of a heating temperature of 80 ° C. to 180 ° C., a pressure of 0.1 MPa to 100 MPa, and 0.3 minutes to 30 minutes.
  • the cured resin sheet of the present invention is a heat-treated product of the resin sheet. That is, the cured resin sheet is formed by curing the resin composition constituting the resin sheet by heat-treating the resin sheet. Therefore, the cured resin sheet is composed of a cured resin derived from a novolak resin containing an epoxy resin monomer and a compound having a structural unit represented by the general formula (I), and boron nitride particles having a particle diameter of 10 ⁇ m or more and 100 ⁇ m or less.
  • a filler having peaks in respective ranges of 0.01 ⁇ m or more and less than 1 ⁇ m, 1 ⁇ m or more and less than 10 ⁇ m, and 10 ⁇ m or more and 100 ⁇ m or less in a particle size distribution measured using a laser diffraction method.
  • the cured resin sheet is a cured resin derived from a novolak resin containing a compound having a structural unit represented by the epoxy resin monomer and the general formula (I), and a volume average particle size of 0.01 ⁇ m or more and less than 1 ⁇ m.
  • the cured resin sheet exhibits high thermal conductivity because the third fillers are in contact with each other.
  • the heat treatment conditions for producing the cured resin sheet can be appropriately selected according to the configuration of the resin composition.
  • the heat treatment can be performed at 120 ° C. to 250 ° C. for 10 minutes to 300 minutes.
  • the heat treatment includes a temperature at which the resin cured product easily forms a higher order structure or a three-dimensional cross-linked structure.
  • the resin sheet laminated body of this invention has the said resin sheet and the metal plate or heat sink arrange
  • a metal plate or a heat radiating plate is disposed on at least one surface of the resin sheet, but is preferably disposed on both surfaces.
  • a method of arranging a metal plate or a heat radiating plate on the resin sheet either a method by adhesion with a thermosetting resin contained in the resin sheet or a method by adhesion of grease applied to the resin sheet surface may be used. Good. These methods can be appropriately used depending on the required physical properties, the form of the semiconductor device formed using the resin sheet laminate, and the like.
  • the resin sheet laminate can be produced by a production method including a step of obtaining a laminate by disposing a metal plate or a heat sink on at least one surface of the resin sheet.
  • a commonly used method can be used without any particular limitation.
  • the method of bonding a metal plate or a heat sink on at least one surface of a resin sheet can be mentioned.
  • the bonding method include a pressing method and a laminating method. The conditions for the pressing method and the laminating method can be appropriately selected according to the configuration of the resin sheet.
  • the resin sheet laminate may have a metal plate or a heat radiating plate on one side of the resin sheet and an adherend on the other side.
  • a resin sheet laminate can form a cured resin sheet laminate excellent in thermal conductivity between the adherend and the metal plate or the heat sink by curing the resin sheet by heat treatment.
  • the adherend is not particularly limited.
  • Examples of the material of the adherend include metals, resins, ceramics, composite materials that are mixtures thereof, and the like.
  • the method for producing a cured resin sheet according to the present invention includes a step of obtaining a resin sheet laminate by disposing a metal plate or a heat radiating plate on at least one surface of the resin sheet, and applying heat to the resin sheet to provide the resin. A step of curing the sheet, and includes other steps as necessary.
  • a commonly used method can be used without any particular limitation.
  • a method of attaching a metal plate or a heat radiating plate on at least one surface of the resin sheet can be exemplified.
  • the bonding method include a pressing method and a laminating method. The conditions for the pressing method and the laminating method can be appropriately selected according to the configuration of the resin sheet.
  • the method for producing a cured resin sheet laminate includes a press step of heating and pressurizing the resin sheet laminate after the step of obtaining the resin sheet laminate to deform and follow the third filler on a metal plate or a heat radiating plate. It is also preferred to include.
  • the pressing step is not particularly limited as long as at least part of the third filler can follow the interface of the adhesive layer. For example, a method of heating and pressing using a press device, a laminating device, a metal roller press device, a vacuum press device and the like can be mentioned.
  • the conditions for heating and pressurizing can be, for example, a temperature of 80 ° C. to 200 ° C., a pressure of 1 MPa to 100 MPa, 0.1 minutes to 360 minutes, a temperature of 100 ° C. to 190 ° C., and a pressure of 2 MPa to 80 MPa is preferably 0.5 to 240 minutes.
  • the heat and pressure treatment can be performed at atmospheric pressure (under normal pressure), but is preferably performed under reduced pressure.
  • the decompression condition is preferably 30000 Pa or less, more preferably 10,000 Pa or less.
  • the resin sheet is cured by heat treatment after the step of obtaining the resin sheet laminate.
  • the thermal conductivity is further improved.
  • the heat treatment can be performed at 120 ° C. to 250 ° C. for 10 minutes to 300 minutes.
  • the resin sheet laminate of the present invention is characterized by having a metal plate or a heat radiating plate disposed on at least one surface of the resin sheet and the cured resin sheet. With such a configuration, the thermal conductivity and the insulation are excellent, the adhesive strength between the cured resin sheet and the metal plate or the heat radiating plate is good, and the thermal shock resistance is also excellent.
  • grease or heat conductive grease may be applied to the resin sheet surface and connected to a metal foil or a plate.
  • the semiconductor device of this invention is equipped with a semiconductor element and the said resin sheet hardened
  • the semiconductor device may further include other members as necessary.
  • the semiconductor element a commonly used semiconductor element can be used without particular limitation. Specific examples of the semiconductor element include power semiconductor elements such as IGBTs and thyristors, LED elements, and the like.
  • FIG. 1 shows a heat dissipation base 106 in which a power semiconductor element 110 is disposed on a water cooling jacket 120 via a copper plate 104 disposed via a solder layer 112, a cured resin sheet 102 of the present invention, and a grease layer 108.
  • 1 is a schematic cross-sectional view showing a configuration example of a power semiconductor device 100 configured by stacking and. Since the heating element including the power semiconductor element 110 is in contact with the heat radiating member via the cured resin sheet 102, heat is efficiently radiated.
  • the heat dissipation base 106 can be configured using copper or aluminum having thermal conductivity. Examples of power semiconductor elements include IGBTs and thyristors.
  • FIG. 2 is a schematic cross-sectional view showing a configuration example of a power semiconductor device 150 configured by disposing cooling members on both surfaces of the power semiconductor element 110.
  • the cooling member disposed on the upper surface of the power semiconductor element 110 includes a two-layered copper plate 104 that is laminated via a solder layer 112. With such a configuration, generation of chip cracks and solder cracks can be more effectively suppressed.
  • the copper plate 104 disposed on the side far from the semiconductor element 110 is connected to the water cooling jacket 120 via the resin sheet cured product 102 and the grease layer 108.
  • one layer of the copper plate 104 is connected to the water cooling jacket 120 via the resin sheet cured product 102 and the grease layer 108.
  • the cured resin sheet 102 and the water cooling jacket 120 are disposed via the grease layer 108, but the cured resin sheet 102 and the water cooling jacket 120 may be disposed so as to be in direct contact with each other.
  • FIG. 3 is a schematic cross-sectional view showing a configuration example of a power semiconductor device 200 configured by disposing cooling members on both surfaces of the power semiconductor element 110.
  • the cooling members disposed on both surfaces of the power semiconductor element 110 are each configured to include one layer of copper plate 104.
  • the cured resin sheet 102 and the water cooling jacket 120 are disposed via the grease layer 108, but the cured resin sheet 102 and the water cooling jacket 120 may be disposed so as to be in direct contact with each other.
  • FIG. 4 is a schematic cross-sectional view showing a configuration example of a power semiconductor device 250 configured by arranging cooling members on both surfaces of the power semiconductor element 110.
  • the cooling member disposed on the upper surface of the power semiconductor element 110 includes the two layers of the copper plate 104 laminated via the solder layer 112. With such a configuration, generation of chip cracks and solder cracks can be more effectively suppressed. Further, by including the cured resin sheet 102 in the module, it is possible to prevent the influence of sheet cracking, external vibration, and the like, and the reliability is improved.
  • FIG. 4 is a schematic cross-sectional view showing a configuration example of a power semiconductor device 250 configured by arranging cooling members on both surfaces of the power semiconductor element 110.
  • the cooling member disposed on the upper surface of the power semiconductor element 110 includes the two layers of the copper plate 104 laminated via the solder layer 112.
  • the copper plate 104 disposed on the side far from the semiconductor element 110 is connected to the water cooling jacket 120 via the cured resin sheet 102, the heat dissipation base 106 and the grease layer 108.
  • the cooling member disposed on the lower surface of the semiconductor element 110 one layer of the copper plate 104 is connected to the water cooling jacket 120 through the resin sheet cured product 102, the heat dissipation base 106 and the grease layer 108.
  • the power semiconductor element 110 is connected to an external terminal 116 through a wiring member 114.
  • the cured resin sheet 102 and the water cooling jacket 120 are disposed via the heat radiation base 106 and the grease layer 108 disposed on the cured resin sheet 102. You may arrange
  • FIG. 5 is a schematic cross-sectional view illustrating a configuration example of a power semiconductor device 300 configured by arranging cooling members on both surfaces of the power semiconductor element 110.
  • the cooling members disposed on both surfaces of the power semiconductor element 110 are each configured to include one layer of the copper plate 104. Further, by including the cured resin sheet 102 in the module, it is possible to prevent the influence of sheet cracking, external vibration, and the like, and the reliability is improved.
  • the copper plate 104 is connected to the water cooling jacket 120 through the cured resin sheet 102, the heat dissipation base 106 and the grease layer 108.
  • the power semiconductor element 110 is connected to an external terminal 116 through a wiring member 114.
  • the cured resin sheet 102 and the water cooling jacket 120 are disposed via the heat radiation base 106 and the grease layer 108 disposed on the cured resin sheet 102. You may arrange
  • the power semiconductor element 110 is formed by laminating a copper plate 104 disposed via a solder layer 112, a cured resin sheet 102, and a heat radiation base 106 disposed on a water cooling jacket 120 via a grease layer 108.
  • 4 is a schematic cross-sectional view showing a configuration example of a power semiconductor device 350 configured as described above.
  • FIG. Since the heating element including the power semiconductor element 110 is in contact with the heat radiating member via the cured resin sheet 102, heat is efficiently radiated.
  • the heat dissipation base 106 can be configured using copper or aluminum having thermal conductivity.
  • the LED device of the present invention is configured by laminating an LED element, the cured resin sheet, and a substrate in this order.
  • the LED device may further include other members as necessary.
  • An example of the substrate is an aluminum substrate.
  • FIG. 7 is a schematic cross-sectional view showing an example of the configuration of the LED light bar 300 configured using the cured resin sheet of the present invention.
  • the LED light bar 300 includes a housing 138, a grease layer 136, an aluminum substrate 134, a cured resin sheet 132, and an LED chip 130 arranged in this order and fixed with screws 140. By disposing the LED chip 130 as a heating element on the aluminum substrate 134 through the cured resin sheet 132, it is possible to efficiently dissipate heat.
  • FIG. 8 is a schematic cross-sectional view showing a configuration example of the light emitting unit 350 of the LED bulb.
  • the light emitting part 350 of the LED bulb includes a housing 138, a grease layer 136, an aluminum substrate 134, a cured resin sheet 132, a circuit layer 142, and an LED chip 130 arranged in this order and fixed with screws 140. Composed.
  • FIG. 9 is a schematic cross-sectional view showing an example of the overall configuration of the LED bulb 450.
  • a light emitting housing 138 of the LED bulb is disposed on a sealing resin 146 that encloses a power supply member 148.
  • FIG. 9 is a schematic cross-sectional view showing an example of the configuration of the LED substrate 400.
  • the LED substrate 400 is configured by arranging an aluminum substrate 134, a cured resin sheet 132 of the present invention, a circuit layer 142, and an LED chip 130 in this order. By disposing the LED chip 130 as a heating element on the aluminum substrate 134 via the circuit layer 142 and the cured resin sheet 132, heat can be efficiently radiated.
  • Novolac resin catechol resorcinol novolak resin (containing 50% cyclohexanone (CHN)), synthetic product described later
  • PN phenol novolac resin, manufactured by Hitachi Chemical Co., Ltd., model number HP850N, number average molecular weight 630 ⁇
  • CPN Cresol novolak resin, Nippon Kayaku Co., Ltd.
  • TPM Triphenylmethane type novolak resin, Nippon Kayaku Co., Ltd.
  • PNAP triphenylmethane type epoxy resin, product name: EPPN-502H, manufactured by Nippon Kayaku Co., Ltd.
  • MOPOC 1- ⁇ (3-methyl-4-oxiranylmethoxy) phenyl ⁇ -4- (4-oxy Ranylmethoxyphenyl) -1-cyclohexene, synthetic product Note that MOPOC was prepared with reference to JP-A Nos. 2005-206814 and 2005-29778.
  • Bis-A / D Bisphenol AD mixture, model number ZX-1059, manufactured by Nippon Steel Chemical Co., Ltd.
  • TPP Triphenylphosphine (curing catalyst, manufactured by Wako Pure Chemical Industries, Ltd.)
  • PAM 3-phenylaminopropyltrimethoxysilane (silane coupling agent, product name: KBM-573, manufactured by Shin-Etsu Chemical Co., Ltd.)
  • PET film product name 75E-0010CTR-4, manufactured by Fujimori Industry Co., Ltd.
  • Copper foil product name GTS 080, manufactured by Furukawa Electric Co., Ltd., thickness 80 ⁇ m
  • Aluminum foil Sumitomo Light Metal Industry Co., Ltd., thickness 20 ⁇ m
  • CRN1 catechol resorcinol novolak resin solution
  • the number average molecular weight and the monomer content ratio were quantified by molecular weight measurement by GPC of the obtained product. Moreover, the NMR spectrum of the obtained product was measured and it confirmed that the structural unit represented by general formula (I) was contained. The conditions for GPC measurement and NMR measurement will be described later.
  • Example 1> Preparation of resin sheet 42.91 parts of aluminum oxide mixture (AA-3: AA-04; volume-based mixing ratio 2.4: 1) and 46.04 parts of boron nitride (HP-40) (volume-based mixing ratio with respect to AA-04: 6. 6), 0.09 part of a silane coupling agent (PAM), 7.23 parts of a CHN solution of CRN4 (solid content 50%) as a curing agent for epoxy resin, and 46.02 parts of CHN were mixed. After confirming that it was uniform, 11.73 parts of MOPOC and 0.13 parts of TPP as epoxy resin monomers were further added and mixed, followed by ball milling for 20 to 40 hours to obtain a resin layer as a resin composition. A forming coating solution was obtained. The filler content in the total solid volume of the resin composition was 60% by volume.
  • the obtained coating liquid for resin layer formation was used to remove PET (polyethylene terephthalate) film (thickness 50 ⁇ m, Teijin DuPont Film A31) using a comma coater (manufactured by Hirano Tech Sheet Co., Ltd.). , Also referred to as “PET film”), and a coating layer was formed by coating the release treatment surface so as to have a thickness of about 140 ⁇ m. Drying was performed in a box oven at 100 ° C. for 5 minutes to form a resin sheet (hereinafter also referred to as “A stage sheet”) in which a resin layer in an A stage state was formed on a PET film.
  • PET polyethylene terephthalate
  • a stage sheet a resin sheet in which a resin layer in an A stage state was formed on a PET film.
  • B-stage sheet a B-stage resin sheet having an average thickness of 198 ⁇ m (hereinafter referred to as “B-stage sheet”) Also called).
  • Example 2 a resin sheet in an A-stage state was used in the same manner as in Example 1 except that a mixture of FS-3 and HP-40 (1: 3, volume basis) was used instead of HP-40.
  • Example 3 a resin sheet in an A-stage state was used in the same manner as in Example 1 except that a mixture of FS-3 and HP-40 (1: 1, volume basis) was used instead of HP-40.
  • the resin sheet laminate cured product 3 in the C-stage state in which the resin sheet in the stage state and the copper foils were provided on both surfaces was obtained.
  • Example 4 A resin sheet in the A stage state and B stage state in the same manner as in Example 1 except that 11.15 parts Bis-A / D and 8.38 parts CRN4 were used instead of MOPOC in Example 1. A cured resin sheet laminate 4 in a C-stage state in which copper foil was provided on both sides of the resin sheet was obtained.
  • Example 5 In Example 1, a mixture of 5.6 parts of Bis-A / D and 5.6 parts of PNAP was used instead of MOPOC, and the same procedure as in Example 1 was carried out except that 8.27 parts of CRN4 were used. A resin sheet in the A stage state, a resin sheet in the B stage state, and copper foils were provided on both surfaces to obtain a cured resin sheet laminate 5 in the C stage state.
  • Example 6 The resin layer forming coating solution obtained in Example 5 was applied onto a 20 ⁇ m thick aluminum foil using a comma coater so as to have a thickness of about 140 ⁇ m to form a coating layer. It dried for 5 minutes in a 100 degreeC box type oven, and formed the resin sheet (A stage sheet) in which the resin layer of the A stage state was formed on the 20-micrometer-thick aluminum foil. Moreover, it apply
  • A-stage sheet having a resin layer formed on the aluminum foil obtained above and one A-stage sheet having a resin layer formed on the PET film obtained in Example 1 a resin layer They were stacked so that they face each other.
  • a hot press device hot plate 150 ° C., pressure 10 MPa, treatment time 1 minute
  • heat-pressing and bonding a B-stage resin layer sheet (B-stage sheet) having an average thickness of 192 ⁇ m Obtained.
  • Example 7 The resin layer-forming coating solution obtained in Example 5 was applied to a thickness of 110 ⁇ m on a 20 ⁇ m-thick aluminum foil using a comma coater, and the thickness was 170 ⁇ m on a PET film.
  • a cured resin sheet 7 in a C-stage state in which a copper foil was provided on one side and an aluminum foil was provided on one side was obtained in the same manner as in Example 6 except that the coating was performed as described above.
  • Example 8> In Example 5, except that CRN1 was used instead of CRN4, the A-stage resin sheet, the B-stage resin sheet, and the C-staged copper sheet on both sides were provided in the same manner as in Example 5. The cured resin sheet laminate 8 was obtained.
  • Example 9 In Example 5, except that CRN2 was used in place of CRN4, the same as in Example 5, the resin sheet in the A stage state, the resin sheet in the B stage state, and the C stage state in which the copper foil was provided on both sides Resin sheet laminates 9 were obtained.
  • Example 10 In Example 5, except that CRN3 was used in place of CRN4, the same as in Example 5, the resin sheet in the A stage state, the resin sheet in the B stage state, and the C stage state in which the copper foil was provided on both sides The cured resin sheet laminate 10 was obtained.
  • Example 11 In Example 5, except that CRN5 was used in place of CRN4, the same as in Example 5, the resin sheet in the A stage state, the resin sheet in the B stage state, and the C stage state in which the copper foil was provided on both surfaces Resin sheet laminates 11 were obtained.
  • Example 12 Preparation of resin sheet 25.24 parts of aluminum oxide mixture (AA-3: AA-04; volume-based mixing ratio 1: 1) and 55.81 parts of boron nitride (HP-40) (volume-based mixing ratio of 8.0 to AA-04) Then, 0.08 part of a silane coupling agent (PAM), 13.5 parts of a CHN solution of CRN4 (solid content 50%) and 38.8 parts of CHN as a curing agent for an epoxy resin were mixed. After confirming that it was uniform, 9.17 parts of PNAP as an epoxy resin monomer, 9.17 parts of BIS-A / D and 0.20 part of TPP were further added and mixed, followed by ball milling for 20 to 40 hours. As a result, a resin layer forming coating solution was obtained as a resin composition. The filler content in the total solid volume of the resin composition was 60% by volume.
  • a comma coater Using a comma coater, apply the obtained coating solution for resin layer formation to a PET film on which one side has been release-treated, with a thickness of about 140 ⁇ m on the release-treated surface. A coating layer was formed. It dried for 5 minutes in a 100 degreeC box-type oven, and formed the resin sheet in which the resin layer of the A stage state was formed on PET film.
  • the two A stage sheets obtained above were used and stacked so that the resin layers face each other.
  • a hot press apparatus hot plate 150 ° C., pressure 10 MPa, treatment time 1 minute
  • heat-pressing and bonding were performed to obtain a B-stage resin sheet having an average thickness of 209 ⁇ m.
  • the PET film was peeled off from both sides of the B stage sheet obtained above, and 80 ⁇ m thick copper foil (Furukawa Electric Co., Ltd., thickness 80 ⁇ m, GTS grade) was stacked on both sides, and then press treatment was performed. (Press processing conditions: hot plate temperature 165 ° C., degree of vacuum ⁇ 1 kPa, pressure 10 MPa, processing time 3 minutes). Further, the cured resin sheet laminate 12 in a C-stage state in which copper foil is provided on both sides is obtained by sequentially heat-treating at 140 ° C. for 2 hours, 165 ° C. for 2 hours, and 190 ° C. for 2 hours in a box-type oven. Got.
  • Example 13 The coating solution for resin layer formation obtained in Example 12 was applied on a copper foil having a thickness of 80 ⁇ m using a comma coater so as to have a thickness of about 140 ⁇ m to form a coating layer. It dried for 5 minutes in a 100 degreeC box type oven, and formed the resin sheet (A stage sheet
  • Example 14 The resin layer forming coating solution obtained in Example 12 was applied onto an aluminum foil having a thickness of 80 ⁇ m using a comma coater so as to have a thickness of about 140 ⁇ m to form a coating layer. It dried for 5 minutes in a 100 degreeC box type oven, and formed the resin sheet (A stage sheet
  • Example 15 (Preparation of resin sheet) 25.24 parts of aluminum oxide mixture (AA-3: AA-04; volume-based mixing ratio 1: 1) and 55.81 parts of boron nitride (HP-40) (volume-based mixing ratio of 8.0 to AA-04) Then, 0.08 part of a silane coupling agent (PAM), 9.78 parts (solid content 50%) of a CHN solution of CRN4 as a curing agent for epoxy resin, and 34.8 parts of CHN were mixed. After confirming that it was uniform, PAP 6.62 parts as epoxy resin monomer, 6.62 parts BIS-A / D and 0.15 parts TPP were further added and mixed, and then ball milled for 20 to 40 hours. And a resin layer forming coating solution was obtained as a resin composition. The filler content in the total solid volume of the resin composition was 68% by volume.
  • a comma coater Using a comma coater, apply the obtained coating solution for resin layer formation to a PET film on which one side has been release-treated, with a thickness of about 140 ⁇ m on the release-treated surface. A coating layer was formed. It dried for 5 minutes in a 100 degreeC box-type oven, and formed the resin sheet in which the resin layer of the A stage state was formed on PET film.
  • the two A stage sheets obtained above were used and stacked so that the resin layers face each other.
  • a hot press apparatus hot plate 150 ° C., pressure 10 MPa, treatment time 1 minute
  • heat-pressing and bonding were performed to obtain a B-stage resin sheet having an average thickness of 209 ⁇ m.
  • Example 16> (Preparation of cured resin sheet laminate)
  • the resin sheet in the A stage state and the B stage state were the same as in Example 13 except that the resin layer forming coating solution prepared in Example 15 was used as the resin layer forming coating solution.
  • C-stage resin sheet cured product 16 in which the copper sheet was provided on both the resin sheet and both surfaces was obtained.
  • Example 17> (Preparation of cured resin sheet laminate)
  • the resin sheet in the A stage state and the B stage state were the same as in Example 14 except that the resin layer forming coating liquid prepared in Example 15 was used as the resin layer forming coating liquid.
  • C-stage resin sheet laminates 17 each having a resin sheet and a copper foil on one side and an aluminum foil on one side were obtained.
  • Example 18 (Preparation of resin sheet) 25.24 parts of aluminum oxide mixture (AA-3: AA-04; volume-based mixing ratio 1: 1) and 55.81 parts of boron nitride (HP-40) (volume-based mixing ratio of 8.0 to AA-04) Then, 0.08 part of a silane coupling agent (PAM), 6.41 parts of CHN solution of CRN4 (solid content 50%) and 32.4 parts of CHN as a curing agent for epoxy resin were mixed. After confirming that it was uniform, 4.34 parts of PNAP as an epoxy resin monomer, 4.34 parts of BIS-A / D and 0.10 parts of TPP were further added and mixed, and then ball milling was performed for 20 to 40 hours. As a result, a resin layer forming coating solution was obtained as a resin composition. The filler content in the total solid volume of the resin composition was 76% by volume.
  • a comma coater Using a comma coater, apply the obtained coating solution for resin layer formation to a PET film on which one side has been release-treated, with a thickness of about 140 ⁇ m on the release-treated surface. A coating layer was formed. It dried for 5 minutes in a 100 degreeC box-type oven, and formed the resin sheet in which the resin layer of the A stage state was formed on PET film.
  • the two A stage sheets obtained above were used and stacked so that the resin layers face each other.
  • a hot press apparatus hot plate 150 ° C., pressure 10 MPa, treatment time 1 minute
  • heat-pressing and bonding were performed to obtain a B-stage resin sheet having an average thickness of 206 ⁇ m.
  • Example 19 (Preparation of cured resin sheet laminate)
  • the resin sheet in the A stage state and the B stage state were the same as in Example 13 except that the resin layer forming coating solution prepared in Example 18 was used as the resin layer forming coating solution.
  • the resin sheet laminated body cured product 19 in the C-stage state in which copper foil was provided on both the resin sheet and both surfaces was obtained.
  • Example 20> (Preparation of cured resin sheet laminate)
  • the resin sheet in the A stage state and the B stage state were the same as in Example 14 except that the resin layer forming coating liquid prepared in Example 18 was used as the resin layer forming coating liquid.
  • C-stage resin sheet cured product 20 having a copper sheet on one side and an aluminum foil on one side was obtained.
  • the obtained coating liquid for forming a heat conducting layer was applied on the release surface of the PET film so as to have a thickness of about 150 ⁇ m using a comma coater (manufactured by Hirano Tech Sheet Co., Ltd.) to form a coating layer. . It dried for 15 minutes in a 100 degreeC box-type oven, the resin layer was formed on PET film, and the resin sheet (A stage sheet) of the A stage state was obtained. Two A-stage sheets obtained as described above were used and overlapped so that the resin layers face each other.
  • the PET film After laminating using a laminator under conditions of a temperature of 130 ° C., a pressure of 1 MPa, a degree of vacuum ⁇ 1 kPa, and a time of 15 seconds, the PET film is peeled off, and a B-stage resin sheet having an average thickness of 198 ⁇ m (B stage Sheet).
  • Example 2 A-stage resin sheet was prepared in the same manner as in Comparative Example 1, except that 11.09 parts Bis-A / D was used instead of MOPOC and 7.83 parts PN was used instead of CRN4. B-stage resin sheet and C-stage resin sheet laminate C2 in which copper foil was provided on both surfaces were obtained.
  • Example 1 A-stage resin sheet was prepared in the same manner as in Comparative Example 1, except that 13.68 parts Bis-A / D was used instead of MOPOC, and 5.23 parts CPN was used instead of CRN4. B-stage resin sheet and C-stage resin sheet cured product C4 each having a copper foil provided on both surfaces were obtained.
  • GPC pump: L6200 Pump (manufactured by Hitachi, Ltd.), detector: differential refractive index detector L3300 RI Monitor (manufactured by Hitachi, Ltd.), column: TSKgel-G5000HXL and TSKgel-G2000HXL (both in total) (both from Tosoh)
  • the number average molecular weight was measured by molecular weight measurement using a series connection, column temperature: 30 ° C., eluent: tetrahydrofuran, flow rate: 1.0 ml / min, standard substance: polystyrene).
  • the content ratio of the monomer contained in CRN was measured.
  • Thermal conductivity of cured resin sheet The copper foil was removed by etching using a sodium persulfate solution from the cured C-stage resin sheet laminate obtained above. Furthermore, about the sample which has aluminum foil, the aluminum foil was etched away using the hydrochloric acid solution. Thus, a cured resin sheet was obtained. This was cut into 10 mm squares, blackened with graphite spray, and the thermal diffusivity was measured using a Nanoflash LFA447 model manufactured by NETZSCH. As measurement conditions, measurement temperature is 25 ⁇ 1 ° C., measurement voltage is 270 V, Amplitude 5000, and pulse width is 0.06 ms. The thermal conductivity was calculated from the product of the thermal diffusivity measured above, the density measured by the Archimedes method, and the specific heat measured by DSC (differential calorimeter).
  • B stage sheet dielectric strength The B stage sheet was sandwiched between a 20 mm ⁇ aluminum electrode and a 50 mm square aluminum plate, and the withstand voltage under alternating current was measured using a YST-243-100RHO manufactured by Yamayo Tester.
  • the measurement conditions were a pressure increase rate of 1 kV / sec, a measurement temperature of 23 ° C. ⁇ 2 ° C., and measurement was performed in the atmosphere.
  • the copper foil was removed by etching using a sodium persulfate solution from the cured C-stage resin sheet laminate obtained above. Furthermore, about the sample which has aluminum foil, the aluminum foil was etched away using the hydrochloric acid solution. Thus, a cured resin sheet was obtained.
  • the dielectric strength of the obtained resin sheet cured product under alternating current was measured using YST-243-100RHO manufactured by Yamayo Tester in the same manner as described above. The measurement conditions were a measurement temperature of 23 ° C. ⁇ 2 ° C., a pressure increase rate of 1 kV / sec, and a measurement temperature of 23 ° C. ⁇ 2 ° C. was measured in the atmosphere.
  • the support is a single-sided aluminum foil or copper foil, the shear adhesive strength of a resin sheet cured product of a single-sided PET film
  • the PET film was peeled off from one side of the B stage sheet, and a metal plate was attached.
  • the aluminum foil side was bonded to a similar metal plate using an epoxy resin adhesive, and the tensile shear bond strength of the C stage sheet was measured according to JIS K6850.
  • one copper plate having a width of 100 mm ⁇ 25 mm ⁇ 3 mm and an aluminum foil were alternately stacked and bonded to a B stage sheet of 12.5 mm ⁇ 25 mm ⁇ 0.2 mm.
  • the sheet surface roughness of the B stage sheet was measured under a measurement condition of 1 mm / s using a surface roughness measuring machine manufactured by Kosaka Laboratory. The surface roughness was evaluated using arithmetic average roughness.
  • the copper foil was removed by etching using a sodium persulfate solution from the cured C-stage resin sheet laminate obtained above. Furthermore, about the sample which has aluminum foil, the aluminum foil was etched away using the hydrochloric acid solution. Thus, a cured resin sheet of a single sheet was obtained.
  • the sheet surface roughness of the cured resin sheet (C stage sheet) was measured at 1 mm / s using a surface roughness measuring machine manufactured by Kosaka Laboratory. The surface roughness was evaluated using the arithmetic average roughness as in the evaluation of the B stage sheet.
  • the average thickness of the A stage sheet was measured as follows. For each of the two A stage sheets produced in each Example, the A stage sheet was cut into a 100 mm square with the support attached, and the thickness of 9 points was measured with a Mitutoyo micrometer IP65. The thicknesses of the PET film and aluminum foil as the support were subtracted assuming that they did not change, and the thicknesses of the resin layers were determined, and the arithmetic average value was taken as the average thickness of the resin sheets.
  • One of the two A stage sheets was an a-side resin sheet, and the other was a b-side resin sheet.
  • the sheet thickness of the B stage sheet was measured as follows. The B stage sheet was cut into a 100 mm square with the support attached, and the thickness of 9 points was measured with Mitutoyo Micrometer IP65. The thicknesses of the PET film and the aluminum foil as the support were subtracted on the assumption that they did not change, and the thickness of the resin layer was determined. The arithmetic average value was defined as the average thickness of each B-stage sheet.
  • the copper foil was removed by etching using a sodium persulfate solution from the cured C-stage resin sheet laminate obtained above. Furthermore, about the sample which has aluminum foil, the aluminum foil was etched away using the hydrochloric acid solution. Thus, a cured resin sheet was obtained. The cured resin sheet was cut into a 100 mm square, and this was measured with a Mitutoyo Micrometer IP65 to measure the thickness at 9 points, and the arithmetic average value was taken as the average thickness of the cured resin sheet.
  • the moisture resistance insulation was evaluated as follows for a total of eight circular patterns using two evaluation substrates. A DC voltage of 750 V was applied to each of the circular patterns in an environment of 85 ° C. and 85% for 1000 hours to determine the presence or absence of dielectric breakdown. As a result of the evaluation, the ratio of the number of circular patterns in which dielectric breakdown did not occur to the total number (8) of circular patterns subjected to the test was shown in a fractional format.
  • a B-stage resin sheet containing a filler having a specific configuration and a novolac resin containing a compound having a structural unit represented by the general formula (I), and a cured product thereof It can be seen that the cured resin sheet in the C stage state exhibits excellent thermal conductivity. Moreover, it turns out that it is excellent in adhesive strength and a dielectric breakdown voltage. From the above, it can be seen that the cured resin sheet formed using the resin composition of the present invention is excellent in all of heat treatment thermal conductivity, adhesive strength and insulation.

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PCT/JP2012/058247 2011-03-28 2012-03-28 樹脂組成物、樹脂シート、樹脂シート硬化物、樹脂シート積層体、樹脂シート積層体硬化物及びその製造方法、半導体装置、並びにｌｅｄ装置 Ceased WO2012133587A1 (ja)

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