WO2011158666A1 - 接続構造体の製造方法 - Google Patents
接続構造体の製造方法 Download PDFInfo
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- WO2011158666A1 WO2011158666A1 PCT/JP2011/062779 JP2011062779W WO2011158666A1 WO 2011158666 A1 WO2011158666 A1 WO 2011158666A1 JP 2011062779 W JP2011062779 W JP 2011062779W WO 2011158666 A1 WO2011158666 A1 WO 2011158666A1
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- WIPO (PCT)
- Prior art keywords
- heating
- anisotropic conductive
- temperature
- conductive adhesive
- electric element
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
- H01R43/02—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for soldered or welded connections
- H01R43/0242—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for soldered or welded connections comprising means for controlling the temperature, e.g. making use of the curie point
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- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
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- C09J163/10—Epoxy resins modified by unsaturated compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/0665—Epoxy resin
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
- H01L2924/07811—Extrinsic, i.e. with electrical conductive fillers
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
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- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
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- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/04—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation using electrically conductive adhesives
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/0425—Solder powder or solder coated metal powder
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/00—Metal working
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- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49147—Assembling terminal to base
- Y10T29/49149—Assembling terminal to base by metal fusion bonding
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24826—Spot bonds connect components
Definitions
- the heating and pressing step includes a first heating and pressing step and a second heating and pressing step subsequent thereto.
- FIG. 1 shows a graph showing changes in temperature T (dashed line) and pressure P (solid line) and melt viscosity ⁇ (dotted line) of the anisotropic conductive adhesive with respect to time.
- the anisotropic conductive adhesive existing between the wiring board and the electric element is heated and flowed to a temperature equal to or higher than the temperature indicating the minimum melt viscosity ⁇ 0 (that is, the minimum melt viscosity temperature Tv).
- Tv the minimum melt viscosity temperature
- the curing rate is a numerical value defined by a decrease in characteristic absorption caused by an olefin of an acrylic compound by infrared spectroscopy.
- the pressurizing pressure P2 in the second heating and pressurizing step is set to be lower than the pressurizing pressure P1 in the first heating and pressurizing step.
- voids are efficiently removed from between the fine wiring patterns of the wiring substrate connected by the anisotropic conductive adhesive. That is, in order to extrude the void remaining between the fine wiring patterns of the wiring board from the anisotropic conductive adhesive between the wiring board and the electric element, the void is formed when the melt viscosity of the adhesive is too low. Since it becomes difficult to extrude, it is necessary to extrude the void while the melt viscosity of the adhesive is relatively high. Therefore, it is necessary to set a high pressure in the first heating and pressurizing step.
- the specific minimum melt viscosity temperature Tv of the anisotropic conductive adhesive is too low, it is difficult to form a film (film), and when it is too high, the solder may be melted. Is 70 to 150 ° C, more preferably 80 to 120 ° C.
- the specific heating temperature T1 in the first heating and pressing step is too low, the fluidity of the anisotropic conductive adhesive is lowered, and if it is too high, the solder may be melted. -160 ° C, more preferably 90-130 ° C.
- the melting temperature Ts of the solder particles is preferably 100 to 210 ° C, more preferably 130 to 170 ° C. It is.
- the heating temperature T2 in the second heating and pressurizing step is too low, the solder will not melt, and if it is too high, there is a concern that the anisotropic conductive adhesive will spring back (peel). More preferably, it is 130 to 190 ° C.
- curable acrylic compound examples include polyethylene glycol diacryl, phosphate ester acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 4-hydroxybutyl acrylate, isobutyl acrylate, t-butyl acrylate, Isooctyl acrylate, bisphenoxyethanol full orange acrylate, 2-acryloyloxyethyl succinic acid, lauryl acrylate, stearyl acrylate, isobornyl acrylate, tricyclodecane dimethanol dimethacrylate, cyclohexyl acrylate, tris (2-hydroxyethyl) isocyanurate Triacrylate, tetrahydrofurfuryl acrylate, o-phthalic acid diglycidyl ether acrylate, Butoxy bisphenol A dimethacrylate, bisphenol A type epoxy acrylate, urethane acrylate, epoxy acrylate, and can be given the corresponding (meth) acrylate
- the blending amount of the curable acrylic compound in the acrylic thermosetting resin is too small, the conduction reliability tends to be low, and if it is too large, the adhesive strength tends to be low. 20 to 70% by mass, more preferably 30 to 60% by mass, based on the total amount of the system compound and the film-forming resin.
- the amount of the thermosetting initiator used in the anisotropic conductive adhesive is too small, the reactivity is lost. If the amount is too large, the cohesive force of the anisotropic conductive film tends to decrease.
- the amount is preferably 1 to 10 parts by mass, more preferably 3 to 7 parts by mass with respect to parts by mass.
- the anisotropic conductive adhesive used in the present invention is obtained by uniformly mixing and dispersing the above solder particles in an insulating acrylic thermosetting adhesive together with a solvent such as toluene, if necessary. It can be produced by molding into a film according to the method. Further, the anisotropic conductive adhesive may contain silane coupling agents, rubber components, fillers such as inorganic fillers, and various additives.
- a conventionally well-known thing can be used as a wiring board, an electrical element, and electrode which can apply the manufacturing method of this invention.
- the wiring substrate include a glass substrate, a ceramic substrate, a polyimide flexible substrate, and a silicon substrate.
- metal electrodes such as copper, aluminum, silver, and gold, metal complex oxide electrodes, such as ITO, etc. are mentioned.
- the electrode shape in this case is not particularly limited, and may be a pad shape or a bump shape.
- various electrical elements such as a bare chip, a chip size package, a semiconductor element such as an IC module, an optical element such as an LED, and a flexible wiring board can be used as the electrical element. It may be in the shape.
- anisotropic conductive adhesives A and B were prepared as described below.
- the heating and pressurizing process is not in two stages, the heating temperature is 190 ° C., and the pressure is constant at a low level (0.5 MPa), so that the indentation is insufficient. Although there was no short circuit between adjacent terminals, there was a problem in the reliability test results.
- the heating and pressurizing process is not in two stages, and the pressure is constant at a high level (3.0 MPa), and the heating temperature is 190 ° C. A short circuit occurred between adjacent terminals.
- the anisotropic conductive film B was used, and the heating temperature was lower than the melting temperature of the solder particles, and thus no metal bond was formed by the solder particles.
- Comparative Example 5 is an example in which two-step heating is performed, but since the pressure is constant and the heating temperature in the second heating and pressurizing step is 180 ° C., a short circuit due to the solder bonding of the solder particles is adjacent terminal. Occurred between.
- low temperature melting solder particles are adopted as the conductive particles constituting the anisotropic conductive adhesive, and the acrylic heat that can be cured at low temperature using the anisotropic conductive adhesive as the insulating thermosetting adhesive.
- a curable resin and also has a melting temperature of solder particles, a minimum melt viscosity temperature of an anisotropic conductive adhesive, a preheating temperature, a main heating temperature, and a preheating pressure and a main heating.
Abstract
Description
異方性導電接着剤として、溶融温度Tsのハンダ粒子が、絶縁性のアクリル系熱硬化性樹脂中に分散してなるものを使用し、異方性導電接着剤の最低溶融粘度を示す温度がTvであり、
加熱加圧工程が、第1加熱加圧工程とそれに続く第2加熱加圧工程を有し、
第1加熱加圧工程の加熱温度をT1とし、加圧圧力をP1とし、
第2加熱加圧工程の加熱温度をT2とし、加圧圧力をP2としたときに、以下の式(1)及び(2)を満足しており、
第1加熱加圧工程において、異方性導電接着剤を溶融流動させて配線基板と電気素子との間隙からプレスアウトさせ、更に予備硬化させ、
第2加熱加圧工程において、ハンダ粒子を溶融させて配線基板の電極と電気素子の電極との間に金属結合を形成させると共に異方性導電接着剤を本硬化させることを特徴とする製造方法、並びにこの製造方法により製造された接続構造体を提供する。
<加熱加圧工程>
本発明の製造方法において、異方性導電接続に使用する異方性導電接着剤としては、溶融温度Tsのハンダ粒子が最低溶融粘度温度Tvの絶縁性のアクリル系熱硬化性樹脂中に分散してペースト状あるいはフィルム状に成形されたものを使用する。
本発明の製造方法が適用できる配線基板、電気素子、電極としては、従来公知のものを使用することができる。例えば、配線基板としては、ガラス基板、セラミックス基板、ポリイミドフレキシブル基板、シリコン基板などを挙げることができる。電極としても、銅、アルミニウム、銀、金等の金属電極、ITO等の金属複合酸化物電極などが挙げられる。この場合の電極形状は、特に制限はなく、パッド状でもバンプ状でもよい。また、電気素子としては、ベアチップ、チップサイズパッケージ、ICモジュール等の半導体素子、LED等の光学素子等、フレキシブル配線板等の種々の電気素子を使用することができ、その電極もパッド状でもバンプ状でもよい。
まず、異方性導電接着剤A及びBを以下に説明するように作成した。
ビスA型フェノキシ樹脂(YP50、新日鐵化学株式会社)30質量部、液状アクリル化合物(EB3701、ダイセルサイテック株式会社)30質量部、有機過酸化物硬化剤(パーオクタ0、日油株式会社)、アクリル系シランカップリング剤(A-172、モメンティブ・パフォーマンス・マテリアルズ社)1質量部を混合し、更に平均粒子径10μmの溶融温度138℃の共晶SnBiハンダを樹脂固形分中に20質量%となるように添加し、更にトルエンを加え、固形物50wt%の異方性導電組成物を作成し、剥離処理されたPETにバーコーターを用いて塗布し、70℃のオーブンで5分乾燥させ、35μm厚の異方性導電フィルムを作製した。
異方性導電フィルムAの共晶SnBiハンダを共晶SnInハンダに変えた以外は、異方性導電フィルムAと同様に作製した。
40℃に設定された平盤上に配線板(端子導体パターン幅50μm、パターンピッチ100μm)、異方性導電フィルムA又はB、更にフレキシブル配線板(端子導体パターン幅50μm、パターンピッチ100μm)を重ね、表1の条件で加熱加圧し、接続構造体を作成した。
得られた接続構造体について、隣接間ショートの発生の有無(30V、1分間チャージ)、Jedecのレベル3相当の耐湿性(30℃、70%RH、168時間)を確保できるプレッシャークッカー(PCT(60℃、95%RH))処理時間並びに熱衝撃処理(H/S(-55℃(15分)←→125℃(15分)))サイクル数を調べた。得られた結果を表1に示す。
Claims (5)
- 配線基板の電極と電気素子の電極とが異方性導電接続されてなる接続構造体を製造する方法であって、配線基板に異方性導電接着剤を介して電気素子を載置し、その電気素子を加熱加圧することにより、配線基板の電極と電気素子の電極とを接続する加熱加圧工程を有する製造方法において、
異方性導電接着剤として、溶融温度Tsのハンダ粒子が、絶縁性のアクリル系熱硬化性樹脂中に分散してなるものを使用し、異方性導電接着剤の最低溶融粘度を示す温度がTvであり、
加熱加圧工程が、第1加熱加圧工程とそれに続く第2加熱加圧工程を有し、
第1加熱加圧工程の加熱温度をT1とし、加圧圧力をP1とし、
第2加熱加圧工程の加熱温度をT2とし、加圧圧力をP2としたときに、以下の式(1)及び(2)を満足しており、
第1加熱加圧工程において、異方性導電接着剤を溶融流動させて配線基板と電気素子との間隙からプレスアウトさせ、更に予備硬化させ、
第2加熱加圧工程において、ハンダ粒子を溶融させて配線基板の電極と電気素子の電極との間に金属結合を形成させると共に異方性導電接着剤を本硬化させることを特徴とする製造方法。 - 異方性導電接着剤の最低溶融粘度を示す温度Tvが70~150℃であり、第1加熱加圧工程の加熱温度T1が80~160℃であり、ハンダ粒子の溶融温度Tsが100~210℃であり、第2加熱加圧工程の加熱温度T2が130~220℃である請求項1記載の製造方法。
- T1とTvとの差が10~40℃であり、TsとT1との差が2~110℃であり、T2とTsとの差が2~100℃である請求項1又は2記載の製造方法。
- ハンダ粒子が、共晶SnBiハンダ粒子または共晶SnInハンダ粒子である請求項1~3のいずれかに記載の製造方法。
- 請求項1~4のいずれかに記載の製造方法により製造された接続構造体。
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Also Published As
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US8835772B2 (en) | 2014-09-16 |
CN102939645A (zh) | 2013-02-20 |
HK1178688A1 (en) | 2013-09-13 |
CN102939645B (zh) | 2015-06-10 |
TWI480966B (zh) | 2015-04-11 |
JP5540916B2 (ja) | 2014-07-02 |
JP2010226140A (ja) | 2010-10-07 |
KR101355709B1 (ko) | 2014-01-27 |
US20120255766A1 (en) | 2012-10-11 |
KR20120136386A (ko) | 2012-12-18 |
TW201207972A (en) | 2012-02-16 |
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