WO2011071145A1 - 積層型セラミックコンデンサ - Google Patents
積層型セラミックコンデンサ Download PDFInfo
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- WO2011071145A1 WO2011071145A1 PCT/JP2010/072217 JP2010072217W WO2011071145A1 WO 2011071145 A1 WO2011071145 A1 WO 2011071145A1 JP 2010072217 W JP2010072217 W JP 2010072217W WO 2011071145 A1 WO2011071145 A1 WO 2011071145A1
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- ceramic
- sintered body
- internal electrodes
- ceramic sintered
- width direction
- Prior art date
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- 239000003985 ceramic capacitor Substances 0.000 title claims abstract description 45
- 239000000919 ceramic Substances 0.000 claims abstract description 140
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 13
- 238000010030 laminating Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 18
- 239000004020 conductor Substances 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 9
- 238000010304 firing Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- -1 rare earth compound Chemical class 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 238000009420 retrofitting Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910002971 CaTiO3 Inorganic materials 0.000 description 1
- 229910002976 CaZrO3 Inorganic materials 0.000 description 1
- 229910002370 SrTiO3 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
Definitions
- the present invention relates to a multilayer ceramic capacitor.
- the present invention includes a rectangular parallelepiped ceramic sintered body, and a plurality of first and second internal electrodes provided alternately inside the ceramic sintered body so as to face each other through a ceramic layer.
- the present invention relates to a multilayer ceramic capacitor comprising:
- Patent Document 1 various types of multilayer ceramic capacitors having a large capacity while being small and methods for manufacturing the same are proposed.
- One effective method for increasing the capacity of a multilayer ceramic capacitor is to reduce the thickness of the ceramic layer interposed between the electrodes.
- the grain size must be reduced.
- the ceramic layer is thin, dielectric breakdown is likely to occur, and there is a problem that the reliability of the ceramic capacitor is lowered.
- the present invention has been made in view of such a point, and an object thereof is to provide a multilayer ceramic capacitor having a large capacity and high reliability.
- the multilayer ceramic capacitor according to the present invention includes a ceramic sintered body and first and second internal electrodes.
- the ceramic sintered body includes a plurality of laminated ceramic layers.
- the first and second internal electrodes are alternately provided inside the ceramic sintered body so as to face each other in the stacking direction of the ceramic layers via the ceramic layers.
- the ceramic sintered body includes a first portion and a second portion. The first portion is located in a region where the first and second internal electrodes are opposed to each other.
- the second part is located outside the first part. In the first part, the ceramic layer is oriented in the stacking direction.
- the ratio (Ic / Ia) of the c-axis peak intensity (Ic) to the a-axis peak intensity (Ia) by XRD analysis (X-ray diffraction analysis) of the ceramic layer is 2 or more.
- the ceramic sintered body includes first and second main surfaces extending along a length direction and a width direction perpendicular to the length direction. , A thickness direction perpendicular to both the length direction and the width direction, first and second side surfaces extending along the length direction, and first and first sides extending along the width direction and the thickness direction.
- a rectangular parallelepiped ceramic sintered body having two end faces, wherein the first portion is a facing portion where the first and second internal electrodes face each other, and the second portion is the It is located on both sides of the facing portion in the length direction, the non-facing portion where the first and second internal electrodes are not facing, and the both sides of the facing portion in the width direction, Side gear in which neither of the first and second internal electrodes is provided And a flop part.
- the ratio of the area occupied by the first portion in the ceramic sintered body when viewed from the stacking direction is 80% or more.
- the length of each side gap portion in the width direction is set to 45 ⁇ m or less. In still another specific aspect of the multilayer ceramic capacitor according to the present invention, the length of each non-opposing portion in the length direction is 57.5 ⁇ m or less.
- the ratio (Ic / Ia) of the c-axis peak intensity (Ic) to the a-axis peak intensity (Ia) by XRD analysis of the ceramic layer is 2 or more. For this reason, the degree of polarization of the ceramic layer in the first portion can be increased. Therefore, the capacity can be increased without making the ceramic layer too thin. Therefore, it is possible to provide a multilayer ceramic capacitor having a large capacity and high reliability.
- FIG. 1 is a schematic perspective view of a ceramic capacitor according to a first embodiment of the present invention.
- FIG. 2 is a sectional view taken along line II-II in FIG. 3 is a cross-sectional view taken along line III-III in FIG. 4 is a cross-sectional view taken along line IV-IV in FIG.
- FIG. 5 is a partially enlarged sectional view of a section taken along line VV in FIG.
- FIG. 6 is a schematic plan view of a ceramic green sheet on which a conductor pattern is printed.
- FIG. 7 is a schematic perspective view of a ceramic member.
- FIG. 8 is a schematic perspective view showing a process of forming a ceramic layer on both side surfaces.
- FIG. 9 is a schematic perspective view of the multilayer ceramic capacitor according to the second embodiment of the present invention.
- FIG. 10 is a schematic cross-sectional view taken along line II-II in FIG. 11 is a schematic cross-sectional view taken along line III-III in FIG. 12 is a schematic cross-sectional view taken along line IV-IV in FIG.
- FIG. 13 is a graph showing the peak intensity in the XRD analysis of the multilayer ceramic capacitors according to Samples 1 and 8.
- FIG. 1 is a schematic perspective view of a ceramic capacitor according to a first embodiment of the present invention.
- FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG.
- FIG. 3 is a schematic cross-sectional view taken along line III-III in FIG. 4 is a schematic cross-sectional view taken along line IV-IV in FIG.
- This multilayer ceramic capacitor 2 includes a rectangular parallelepiped ceramic sintered body 10.
- the ceramic sintered body 10 includes first and second main surfaces 10a and 10b, first and second side surfaces 10c and 10d, and first and second end surfaces 10e and 10f.
- the first and second 10a and 10b extend along the length direction L and the width direction W.
- the first and second side surfaces 10c and 10d extend along the length direction L and the thickness direction T.
- the first and second end faces 10e and 10f extend along the width direction W and the thickness direction T.
- the “cuboid” includes those in which at least a part of a corner portion or a ridge line portion is chamfered or rounded.
- the dimensions of the ceramic sintered body 10 are not particularly limited.
- the length of the ceramic sintered body 10 in the length direction L can be set to, for example, about 0.4 mm to 3.2 mm.
- the length of the ceramic sintered body 10 in the width direction W can be set to, for example, about 0.2 mm to 2.6 mm.
- the length in the thickness direction T of the ceramic sintered body 10 can be set to, for example, about 0.2 mm to 2.6 mm.
- the ceramic sintered body 10 includes a plurality of laminated ceramic layers 15 (see FIGS. 2 and 4).
- the ceramic layer 15 is made of a ceramic material containing ceramic.
- the ceramic material may contain firing aids such as Si, Mg, B and glass components in addition to ceramic.
- the ceramic layer 15 is formed of a dielectric ceramic.
- a dielectric ceramic a ceramic having a perovskite structure crystal lattice mainly composed of barium titanate is used.
- subcomponents such as a Mn compound, a Mg compound, a Si compound, a Co compound, a Ni compound, and a rare earth compound may be appropriately added to the dielectric ceramic.
- a plurality of first and second internal electrodes 11 and 12 are provided inside the ceramic sintered body 10.
- Each of the first and second internal electrodes 11 and 12 is provided in parallel to the first and second main surfaces 10a and 10b.
- the planar shape of each of the first and second internal electrodes 11 and 12 is a rectangle.
- the plurality of first and second internal electrodes 11 and 12 are alternately arranged so as to face each other in the thickness direction T. In other words, the first and second internal electrodes 11, 12 are arranged in the thickness direction T so as to face each other through the ceramic layers 15 provided on the ceramic sintered body 10.
- the layer thickness of the ceramic layer 15 is preferably in the range of 0.3 ⁇ m to 2 ⁇ m, for example.
- the thickness of the first and second internal electrodes 11 and 12 is preferably in the range of 0.2 ⁇ m to 1 ⁇ m, for example.
- the layer thickness of the ceramic layer 15 is preferably in the range of 1 to 3 times the thickness of the first and second internal electrodes 11 and 12.
- the first inner electrode 11 is exposed at the first end face 10e, while the second end face 10f, the first and second main faces 10a, 10b, and the first and second side faces 10c, 10d Not exposed.
- the second internal electrode 12 is exposed at the second end face 10f, while the first end face 10e, the first and second main faces 10a and 10b, and the first and second side faces 10c and 10d. Is not exposed.
- the first external electrode 13 is provided on the first end face 10e.
- the first external electrode 13 is connected to the first internal electrode 11.
- a second external electrode 14 is provided on the second end face 10f.
- the second external electrode 14 is connected to the second internal electrode 12.
- the material for forming the first and second internal electrodes 11 and 12 and the first and second external electrodes 13 and 14 is not particularly limited as long as it is a conductive material.
- the first and second inner electrodes 11 and 12 and the first and second outer electrodes 13 and 14 are made of, for example, metals such as Ag, Au, Pt, Pd, Ni, Cr, Al, and Cu, and their metals. It can form with the alloy containing 1 or more of these.
- the first and second internal electrodes 11 and 12 and the first and second external electrodes 13 and 14 may be formed of a laminate of a plurality of conductive films.
- the ceramic sintered body 10 includes first and second outer layer portions 10A and 10B, first and second side gap portions 10C and 10D, and an inner layer portion 10E. Is provided.
- the inner layer portion 10E is a portion excluding the first and second outer layer portions 10A and 10B and the first and second side gap portions 10C and 10D of the ceramic sintered body 10. Specifically, in this embodiment, the ceramic sintered body 10 is provided in a region excluding both ends in the thickness direction T and both ends in the width direction W.
- the inner layer portion 10E includes only a portion where the first and second internal electrodes 11, 12 face each other in the thickness direction T, and the first or second internal electrodes 11, 12 when viewed from the thickness direction T. Part provided.
- the ratio (Ic) of the c-axis peak intensity (Ic) to the a-axis peak intensity (Ia) by X-ray analysis (XRD analysis) in the stacking direction in the facing portion constituting the first portion (Ic / Ia) is 2 or more. That is, in the first part for obtaining the electrostatic capacitance, it is shown that there is a large proportion that the c-axis arrangement of the ceramic crystal lattice is aligned in parallel with the stacking direction. For this reason, the degree of polarization of the ceramic layer 15 in the facing portion (first portion) can be increased. Therefore, the capacity of the multilayer ceramic capacitor 2 can be increased without making the ceramic layer 15 too thin.
- the multilayer ceramic capacitor 2 having a large capacity and high reliability can be provided.
- the peak intensity of the a-axis by XRD analysis in the stacking direction of the ceramic layer (at the opposing portion constituting the first portion) is preferably 2 or more.
- the ratio (Ic / Ia) is adjusted by adjusting the ratio of the area occupied by the facing portion (first portion) in the ceramic sintered body 10 when viewed from the width direction W (stacking direction). be able to. Specifically, as described later, by reducing the side gap portions 10C and 10D and increasing the ratio of the area occupied by the facing portion 10E1 (first portion) in the ceramic sintered body 10, the ratio (Ic / Ia) can be increased. This is because the difference in shrinkage along the thickness direction T between the side gap portions 10C and 10D and the facing portion is reduced during firing due to the reduced width of the side gap portions 10C and 10D, and the thickness applied to the facing portion. This is considered to be because the compressive stress in the direction T becomes small.
- the ratio (Ic / Ia) can be increased by retrofitting the side gap portions 10C and 10D. This is because the difference in shrinkage amount along the thickness direction T between the side gap portion and the facing portion is reduced during firing because no step occurs between the facing portion and the side gap portion in the width direction W, and the facing This is presumably because the compressive stress in the thickness direction T applied to the part becomes small.
- the ratio (Ic / Ia) is set to 2 or more, for example, the ratio of the area occupied by the facing portion (first portion) in the ceramic sintered body 10 when viewed from the stacking direction is 80% or more. It is preferable.
- the ceramic green sheet 20 shown in FIG. 6 is formed.
- the method for forming the ceramic green sheet 20 is not particularly limited.
- the ceramic green sheet 20 can be formed by, for example, a die coater, a gravure coater, a micro gravure coater, or the like.
- a conductor pattern 21 is formed on the ceramic green sheet 20.
- This conductor pattern 21 is for forming the first and second internal electrodes 11, 12.
- the method for forming the conductor pattern 21 is not particularly limited.
- the conductor pattern 21 can be formed by, for example, a screen printing method, an ink jet method, a gravure printing method, or the like.
- a laminate is formed by laminating a plurality of ceramic green sheets 20 on which the conductor pattern 21 is formed. Specifically, first, after laminating a plurality of ceramic green sheets 20 on which the conductor pattern 21 is not formed, the ceramic green sheet 20 on which the conductor pattern 21 is formed is placed on one side in the x direction. A plurality of sheets are stacked alternately shifted to the other side. Further, a plurality of ceramic green sheets 20 on which the conductor pattern 21 is not formed are laminated thereon to complete the laminate.
- the ceramic green sheet 20 which is laminated at the beginning and at the end and on which the conductor pattern 21 is not formed is for forming the first and second outer layer portions 10A and 10B.
- a plurality of rectangular parallelepiped ceramic members 23 shown in FIG. 7 are formed by cutting the laminate along a virtual cut line L shown in FIG. Note that the laminated body can be cut by dicing or pressing. Moreover, you may cut
- ceramic layers 24 and 25 are formed on the side surfaces 23e and 23f of the ceramic member 23 so as to cover the side surfaces 23e and 23f.
- the ceramic layers 24 and 25 are for forming the first and second side gap portions 10C and 10D.
- the formation method of the ceramic layers 24 and 25 is not particularly limited, and can be performed by a printing method such as a screen printing method, a coating method such as an inkjet method or a gravure coating method, a spraying method, or the like.
- the ceramic member 23 on which the ceramic layers 24 and 25 are formed is sintered. Thereby, the ceramic sintered body 10 is completed.
- first and second external electrodes 13 and 14 are formed to complete the multilayer ceramic capacitor 2.
- the formation method of the 1st and 2nd external electrodes 13 and 14 is not specifically limited.
- the first and second external electrodes 13 and 14 may be formed, for example, by baking after applying a conductive paste. In that case, a conductive paste may be applied before firing the ceramic member 23, and the first and second external electrodes 13, 14 may be formed simultaneously with firing.
- FIG. 9 is a schematic perspective view showing a multilayer ceramic capacitor according to a second embodiment of the present invention. 10 is a cross-sectional view taken along line II-II in FIG. 9, FIG. 11 is a cross-sectional view taken along line III-III in FIG. 9, and FIG. 12 is taken along line IV-V in FIG. It is sectional drawing which follows.
- the multilayer ceramic capacitor 101 of the present embodiment includes a cuboid ceramic sintered body 10.
- the ceramic sintered body 10 includes first and second main surfaces 10a and 10b, first and second side surfaces 10c and 10d, and first and second end surfaces 10e and 10f.
- the first and second main surfaces 10a and 10b extend along the length direction L and the width direction W.
- the first and second side surfaces 10c and 10d extend along the length direction L and the thickness direction T.
- the first and second end faces 10e, 10f extend along the width direction W and the thickness direction T.
- the dimensions of the ceramic sintered body 10 are not particularly limited.
- the length of the ceramic sintered body 10 in the length direction L can be set to, for example, about 0.4 mm to 3.2 mm.
- the length of the ceramic sintered body 10 in the width direction W can be set to, for example, about 0.2 mm to 2.6 mm.
- the length in the thickness direction T of the ceramic sintered body 10 can be set to, for example, about 0.2 mm to 2.6 mm.
- the ceramic sintered body 10 includes a plurality of laminated ceramic layers 15 (see FIGS. 10 and 12).
- the ceramic layer 15 is made of a ceramic composition containing ceramic.
- the ceramic composition may contain a firing aid such as Si, Mg, B, or a glass component.
- dielectric ceramic mainly contained in the ceramic composition include, for example, BaTiO3, CaTiO3, SrTiO3, CaZrO3, and the like.
- subcomponents such as a Mn compound, a Mg compound, a Co compound, a Ni compound, and a rare earth compound may be appropriately added to the dielectric ceramic.
- a plurality of first and second internal electrodes 11, 12 are provided inside the ceramic sintered body 10.
- Each of the first and second internal electrodes 11 and 12 is provided in parallel to the first and second side surfaces 10c and 10d.
- the planar shape of each of the first and second internal electrodes 11 and 12 is a rectangle.
- the plurality of first and second internal electrodes 11 and 12 are alternately arranged so as to face each other with the ceramic layer 15 in the width direction W (stacking direction).
- the thickness of the ceramic layer 15 along the width direction W is not particularly limited.
- the thickness of the ceramic layer 15 along the width direction W is preferably in the range of 0.3 ⁇ m to 0.7 ⁇ m, for example. If the thickness of the ceramic layer 15 along the width direction W is smaller than 0.3 ⁇ m, dielectric breakdown may easily occur. Therefore, the reliability of the multilayer ceramic capacitor 101 may be reduced.
- the first internal electrode 11 is exposed to the first main surface 10a, while the second main surface 10b, the first and second side surfaces 10c and 10d, and the first and second end surfaces 10e and 10f are exposed to the first main surface 10a. Is not exposed.
- the second internal electrode 12 is exposed to the second main surface 10b, while the first main surface 10a, the first and second side surfaces 10c and 10d, and the first and second end surfaces 10e, It is not exposed at 10f.
- the thickness in the width direction W of each of the first and second internal electrodes 11 and 12 is not particularly limited.
- the thickness in the width direction W of each of the first and second internal electrodes 11 and 12 can be about 0.2 ⁇ m to 0.6 ⁇ m.
- the first external electrode 13 is provided on the first main surface 10a.
- the first external electrode 13 is connected to the first internal electrode 11.
- a second external electrode 14 is provided on the second main surface 10b.
- the second external electrode 14 is connected to the second internal electrode 12.
- the material for forming the first and second internal electrodes 11 and 12 and the first and second external electrodes 13 and 14 is not particularly limited as long as it is a conductive material.
- the first and second internal electrodes 11 and 12 and the first and second external electrodes 13 and 14 are made of, for example, metals such as Ag, Au, Pt, Pd, Ni, Cr, and Cu, It can form with the alloy containing 1 or more types of these.
- the first and second internal electrodes 11 and 12 and the first and second external electrodes 13 and 14 may be formed of a laminate of a plurality of conductive films.
- the ceramic sintered body 10 includes first and second outer layer portions 10A and 10B, first and second side gap portions 10C and 10D, and an inner layer portion 10E. Is provided.
- the inner layer portion 10E is located in a region of the ceramic sintered body 10 where at least one of the first and second inner electrodes 11, 12 is provided when viewed from the width direction W (stacking direction). Part.
- the inner layer portion 10E includes a facing portion 10E1 and a non-facing portion 10E2.
- the facing portion 10E1 is a portion located in a region where the first and second internal electrodes 11 and 12 face each other in the width direction W (stacking direction). For this reason, in this embodiment, the opposing part 10E1 comprises the 1st part.
- the ceramic sintered body 10 a portion excluding the facing portion 10E1, that is, the non-facing portion 10E2, the first and second outer layer portions 10A and 10B, and the first and second side gap portions 10C and 10D.
- the second portion 10F is configured.
- the second portion 10F is located outside the facing portion 10E1 that constitutes the first portion.
- the non-facing portion 10E2 is a portion where the first or second internal electrodes 11 and 12 are provided when viewed from the width direction W (stacking direction).
- the non-facing portion 10E2 is located at both ends of the ceramic sintered body 10 in the thickness direction T (second direction).
- the first and second outer layer portions 10A and 10B and the first and second side gap portions 10C and 10D are portions where neither the first nor second inner electrodes 11 and 12 are provided.
- the first and second outer layer portions 10 ⁇ / b> A and 10 ⁇ / b> B are located at both end portions in the width direction W of the ceramic sintered body 10.
- the 1st and 2nd side gap parts 10C and 10D are located in the both ends in the length direction L (1st direction) of the ceramic sintered compact 10. As shown in FIG.
- the ratio (Ic / Ia) of the peak intensity (Ic) to the peak intensity (Ia) by XRD analysis of the ceramic layer in the ceramic sintered body is 2 or more.
- the multilayer ceramic capacitor 101 of the present embodiment can also be manufactured by the same method as the multilayer ceramic capacitor 2 of the first embodiment.
- a multilayer body in which the first and second side gap portions 10C and 10D described above are not formed is prepared, and the first and second side gap portions 10C, A method of forming a ceramic layer that forms 10D is used.
- the sintered ceramic body 10 can be obtained by firing the ceramic laminate thus obtained. Thereby, the dimension in the said 1st direction of the side gap parts 10C and 10D can be made small.
- the lengths in the first direction after firing of the side gap portions 10C and 10D are each 45 ⁇ m or less. Also in the present embodiment, it is desirable that the length of the non-opposing portion in the second direction is 57.5 ⁇ m or less. Thereby, the facing area of the first and second internal electrodes in the facing portion can be increased.
- the first and second inner electrodes 11, 12 are parallel to the first and second side surfaces 10c, 10d, and the first inner electrode 11 is drawn out to the first main surface 10a.
- the example in which the second internal electrode 12 is drawn out to the second main surface 10b has been described.
- the arrangement of the first and second internal electrodes is not particularly limited as long as the gap layer is formed in the ceramic sintered body.
- first and second internal electrodes may be formed in parallel to the first and second main surfaces or the first and second end surfaces.
- the multilayer ceramic capacitor of the first embodiment shown in FIG. 1 was manufactured with the following design parameters.
- Ceramic layer 15 Composition of ceramic layer 15: BaTiO 3 Layer thickness of ceramic layer 15: 0.8 ⁇ m Dimension of ceramic sintered body: 1.0mm x 0.5mm x 0.5mm (Dimensional tolerance ⁇ 0.1mm) Ceramic layer thickness: 0.8 ⁇ m Outer layer (one side) thickness: 36 ⁇ m Internal electrode material: Ni Internal electrode thickness: 0.5 ⁇ m Number of internal electrode layers: 380 layers Firing temperature: 1200 ° C. Material of external electrode: Cu (Ni, Sn plating formed thereon) External electrode baking temperature: 800 ° C
- Multilayer ceramic capacitors 2 of Samples 1 to 8 were manufactured by varying the facing area ratio, which is the ratio of the area occupied by the facing portion in the sintered body 10, as shown in Table 1 below. Samples 1 to 4 were produced by a conventional method without retrofitting the side gap. Samples 5 to 8 were produced by a method in which side gap portions were retrofitted.
- the peak intensity by XRD analysis was measured at the center in the length direction L and the end in the width direction W of the facing portion.
- the XRD apparatus used is a product number: D8-Discover with GADDS manufactured by Bruker AXS.
- each multilayer ceramic capacitor was measured by applying a voltage of 1 kHz and a voltage of 0.5 Vrms using an LCR meter (manufactured by Hewlett-Packard Company, product number: HP4284A). The relative dielectric constant was calculated from the obtained capacitance. The results are shown in Table 1 below.
- the XRD spectra of Sample 1 and Sample 8 in Table 1 are shown in FIG. 13 as a representative example. Note that the XRD spectrum in FIG. 13 is a result of measurement at a portion corresponding to the portion indicated by the broken line X in FIG. 3 (the center in the length direction L of the facing portion and the end portion in the width direction W).
- Multilayer ceramic capacitor 10 ... Ceramic sintered body 10A, 10B ... Outer layer part 10C, 10D ... Side gap part 10E ... Inner layer part 10E1 ... Opposing part 10E2 ... Non-opposing part 10F ... Second part 10a ... First 10b ... second main surface 10c ... first side surface 10d ... second side surface 10e ... first end surface 10f ... second end surface 11 ... first internal electrode 12 ... second internal electrode 13 ... 1st external electrode 14 ... 2nd external electrode 15 ... Ceramic layer 20 ... Ceramic green sheet 21 ... Conductive pattern 22 ... Laminate 23 ... Ceramic member 23e, 23f ... End surface 24, 25 ... Ceramic layer of ceramic member
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Abstract
Description
本発明に係る積層型セラミックコンデンサのさらに他の特定の局面では、前記各非対向部の前記長さ方向における長さが57.5μm以下とされている。
図1は、本発明の第1の実施形態のセラミックコンデンサの略図的斜視図である。図2は、図1の線II-IIにおける略図的断面図である。図3は、図1の線III-IIIにおける略図的断面図である。図4は、図2の線IV-IVにおける略図的断面図である。
この積層型セラミックコンデンサ2は、直方体状のセラミック焼結体10を備えている。セラミック焼結体10は、第1及び第2の主面10a,10bと、第1及び第2の側面10c,10dと、第1及び第2の端面10e,10fとを備えている。第1及び第2の10a,10bは、長さ方向L及び幅方向Wに沿って延びている。第1及び第2の側面10c,10dは、長さ方向L及び厚み方向Tに沿って延びている。第1及び第2の端面10e,10fは、幅方向W及び厚み方向Tに沿って延びている。
本発明は、上述した第1の実施形態の積層セラミックコンデンサに限らず、様々な構造の積層型セラミックコンデンサを提供することができる。図9は、本発明の第2の実施形態に係る積層型セラミックコンデンサを示す略図的斜視図である。図10は、図9の線II-IIに沿う部分の断面図であり、図11は、図9のIII-III線に沿う断面図であり、図12は、図9のIV-V線に沿う断面図である。
誘電体セラミックの具体例としては、例えば、BaTiO3、CaTiO3、SrTiO3、CaZrO3などが挙げられる。誘電体セラミックには、例えば、Mn化合物、Mg化合物、Co化合物、Ni化合物、希土類化合物などの副成分を適宜添加してもよい。
以下、上記実施形態の変形例について説明する。なお、以下の変形例の説明において、上記実施形態と実質的に共通の機能を有する部材を挙通の符号で参照し、説明を省略する。
上記製造方法により、下記の設計パラメータで、上記図1に示した第1の実施形態の積層型セラミックコンデンサを作製した。
セラミック層15の層厚:0.8μm
セラミック焼結体の寸法:1.0mm×0.5mm×0.5mm(寸法公差±0.1mm)
セラミック層の厚み:0.8μm
外層(片側)厚み:36μm
内部電極の材料:Ni
内部電極の厚み:0.5μm
内部電極の層数:380層
焼成温度:1200℃
外部電極の材料:Cu(その上にNi、Snめっきを形成した)
外部電極焼き付け温度:800℃
これに対して、比Ic/Iaが2.0以上である試料5~8では、比誘電率を2920以上と大幅に高め得ることがわかる。なお、図13に代表例として示すように、本発明の範囲外である試料1では、Icに比べ、Iaが大きく、本発明の実施例である試料8では、IcがIaの2倍以上であることがわかる。
10…セラミック焼結体
10A,10B…外層部
10C,10D…サイドギャップ部
10E…内層部
10E1…対向部
10E2…非対向部
10F…第2の部分
10a…第1の主面
10b…第2の主面
10c…第1の側面
10d…第2の側面
10e…第1の端面
10f…第2の端面
11…第1の内部電極
12…第2の内部電極
13…第1の外部電極
14…第2の外部電極
15…セラミック層
20…セラミックグリーンシート
21…導体パターン
22…積層体
23…セラミック部材
23e、23f…セラミック部材の端面
24,25…セラミック層
Claims (5)
- 積層された複数のセラミック層を含むセラミック焼結体と、
前記セラミック焼結体の内部に、前記セラミック層を介して、前記セラミック層の積層方向において互いに対向するように交互に設けられている第1及び第2の内部電極とを備え、
前記セラミック焼結体は、前記第1及び第2の内部電極が対向している領域に位置している第1の部分と、前記第1の部分の外側に位置している第2の部分とを含み、
前記第1の部分において、前記セラミック層は、前記積層方向に配向されており、かつ、前記セラミック層のXRD分析によるa軸のピーク強度(Ia)に対するc軸のピーク強度(Ic)の比(Ic/Ia)が2以上である、積層型セラミックコンデンサ。 - 前記セラミック焼結体が、長さ方向と、前記長さ方向に垂直な幅方向とに沿って延びる第1,第2の主面と、前記長さ方向及び前記幅方向の両方に垂直な厚み方向と、前記長さ方向とに沿って延びる第1,第2の側面と、前記幅方向及び厚み方向に沿って延びる第1,第2の端面とを有する直方体状のセラミック焼結体であり、
前記第1の部分が、前記第1及び第2の内部電極が対向している対向部であり、
前記第2の部分が、前記長さ方向において前記対向部の両側に位置しており、前記第1及び第2の内部電極が対向していない非対向部と、前記幅方向において前記対向部の両側に位置しており、前記第1及び第2の内部電極のいずれもが設けられていないサイドギャップ部とを有する、請求項1に記載の積層型セラミックコンデンサ。 - 前記積層方向から視た際に、前記セラミック焼結体における前記第1の部分の占める面積の割合は、80%以上である、請求項1または2に記載の積層型セラミックコンデンサ。
- 前記各サイドギャップ部の前記幅方向における長さが45μm以下である、請求項1~3のいずれか1項に記載の積層型セラミックコンデンサ。
- 前記各非対向部の前記長さ方向における長さが57.5μm以下である、請求項1~4のいずれか1項に記載の積層型セラミックコンデンサ。
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