WO2009142284A1 - Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique - Google Patents

Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique Download PDF

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Publication number
WO2009142284A1
WO2009142284A1 PCT/JP2009/059405 JP2009059405W WO2009142284A1 WO 2009142284 A1 WO2009142284 A1 WO 2009142284A1 JP 2009059405 W JP2009059405 W JP 2009059405W WO 2009142284 A1 WO2009142284 A1 WO 2009142284A1
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WO
WIPO (PCT)
Prior art keywords
fluoride crystal
base material
crystal base
fluoride
temperature
Prior art date
Application number
PCT/JP2009/059405
Other languages
English (en)
Japanese (ja)
Inventor
美菜子 安住
Original Assignee
株式会社ニコン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ニコン filed Critical 株式会社ニコン
Priority to KR1020137007827A priority Critical patent/KR101394781B1/ko
Priority to JP2010513063A priority patent/JP5251976B2/ja
Priority to KR1020107027598A priority patent/KR101330974B1/ko
Publication of WO2009142284A1 publication Critical patent/WO2009142284A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F11/00—Compounds of calcium, strontium, or barium
    • C01F11/20—Halides
    • C01F11/22—Fluorides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/12—Halides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment

Abstract

L’invention concerne un procédé de production d’un article en cristal de fluorure moulé qui a une forme différente de celle d’une base en cristal de fluorure et a facilement d’excellentes propriétés optiques. Le procédé comprend le chauffage de la base en cristal de fluorure à une température inférieure au point de fusion de la base en cristal de fluorure tout en effectuant une compression pour mouler la base en cristal de fluorure en une forme prédéfinie. Dans le procédé, la base en cristal de fluorure est comprimée pour initier sa déformation par recristallisation et la déformation peut continuer jusqu'à ce que la base en cristal de fluorure ait une forme prédéfinie.
PCT/JP2009/059405 2008-05-23 2009-05-22 Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique WO2009142284A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020137007827A KR101394781B1 (ko) 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치
JP2010513063A JP5251976B2 (ja) 2008-05-23 2009-05-22 フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置
KR1020107027598A KR101330974B1 (ko) 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008135239 2008-05-23
JP2008-135239 2008-05-23

Publications (1)

Publication Number Publication Date
WO2009142284A1 true WO2009142284A1 (fr) 2009-11-26

Family

ID=41340211

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/059405 WO2009142284A1 (fr) 2008-05-23 2009-05-22 Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique

Country Status (3)

Country Link
JP (2) JP5251976B2 (fr)
KR (2) KR101330974B1 (fr)
WO (1) WO2009142284A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013082620A (ja) * 2008-05-23 2013-05-09 Nikon Corp フッ化物結晶成形体からなる光学部材、光学部材を備える光学装置及び紫外線洗浄装置
JP2018177589A (ja) * 2017-04-13 2018-11-15 国立大学法人名古屋大学 無機結晶材料の加工方法、半導体結晶材料のバンドギャップ変更方法、半導体結晶材料、および、無機結晶材料の製造装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6233017B2 (ja) * 2013-12-27 2017-11-22 株式会社ニコン フッ化カルシウム光学部材、フッ化カルシウム部材の製造方法、及びフッ化カルシウム単結晶の加工方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141500A (ja) * 1983-02-01 1984-08-14 Sumitomo Electric Ind Ltd 光学部品の製造法
JPS59184533A (ja) * 1983-04-04 1984-10-19 Agency Of Ind Science & Technol ３−５族化合物半導体結晶の処理方法
JPH0797277A (ja) * 1993-08-02 1995-04-11 Kyocera Corp 酸化物超電導体の接合方法
JP2000034194A (ja) * 1998-07-15 2000-02-02 Toyota Central Res & Dev Lab Inc 結晶配向ビスマス層状ペロブスカイト型化合物及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003034194A (ja) 2001-07-23 2003-02-04 Hiroshima Kasei Ltd ウェザーストリップ
KR101330974B1 (ko) * 2008-05-23 2013-11-18 가부시키가이샤 니콘 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141500A (ja) * 1983-02-01 1984-08-14 Sumitomo Electric Ind Ltd 光学部品の製造法
JPS59184533A (ja) * 1983-04-04 1984-10-19 Agency Of Ind Science & Technol ３−５族化合物半導体結晶の処理方法
JPH0797277A (ja) * 1993-08-02 1995-04-11 Kyocera Corp 酸化物超電導体の接合方法
JP2000034194A (ja) * 1998-07-15 2000-02-02 Toyota Central Res & Dev Lab Inc 結晶配向ビスマス層状ペロブスカイト型化合物及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013082620A (ja) * 2008-05-23 2013-05-09 Nikon Corp フッ化物結晶成形体からなる光学部材、光学部材を備える光学装置及び紫外線洗浄装置
JP2018177589A (ja) * 2017-04-13 2018-11-15 国立大学法人名古屋大学 無機結晶材料の加工方法、半導体結晶材料のバンドギャップ変更方法、半導体結晶材料、および、無機結晶材料の製造装置
JP7042471B2 (ja) 2017-04-13 2022-03-28 国立大学法人東海国立大学機構 無機結晶材料の加工方法

Also Published As

Publication number Publication date
JP2013082620A (ja) 2013-05-09
JPWO2009142284A1 (ja) 2011-09-29
KR101394781B1 (ko) 2014-05-15
KR101330974B1 (ko) 2013-11-18
KR20130041369A (ko) 2013-04-24
JP5648675B2 (ja) 2015-01-07
KR20110015621A (ko) 2011-02-16
JP5251976B2 (ja) 2013-07-31

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