KR101330974B1 - 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치 - Google Patents

불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치 Download PDF

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KR101330974B1
KR101330974B1 KR1020107027598A KR20107027598A KR101330974B1 KR 101330974 B1 KR101330974 B1 KR 101330974B1 KR 1020107027598 A KR1020107027598 A KR 1020107027598A KR 20107027598 A KR20107027598 A KR 20107027598A KR 101330974 B1 KR101330974 B1 KR 101330974B1
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South Korea
Prior art keywords
fluoride crystal
base material
crystal base
fluoride
temperature
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KR1020107027598A
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English (en)
Korean (ko)
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KR20110015621A (ko
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미나코 아즈미
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가부시키가이샤 니콘
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Publication of KR20110015621A publication Critical patent/KR20110015621A/ko
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F11/00—Compounds of calcium, strontium, or barium
    • C01F11/20—Halides
    • C01F11/22—Fluorides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/12—Halides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1020107027598A 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치 KR101330974B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2008-135239 2008-05-23
JP2008135239 2008-05-23
PCT/JP2009/059405 WO2009142284A1 (fr) 2008-05-23 2009-05-22 Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020137007827A Division KR101394781B1 (ko) 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치

Publications (2)

Publication Number Publication Date
KR20110015621A KR20110015621A (ko) 2011-02-16
KR101330974B1 true KR101330974B1 (ko) 2013-11-18

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KR1020107027598A KR101330974B1 (ko) 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치
KR1020137007827A KR101394781B1 (ko) 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치

Family Applications After (1)

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KR1020137007827A KR101394781B1 (ko) 2008-05-23 2009-05-22 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치

Country Status (3)

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JP (2) JP5251976B2 (fr)
KR (2) KR101330974B1 (fr)
WO (1) WO2009142284A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101330974B1 (ko) * 2008-05-23 2013-11-18 가부시키가이샤 니콘 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치
JP6233017B2 (ja) * 2013-12-27 2017-11-22 株式会社ニコン フッ化カルシウム光学部材、フッ化カルシウム部材の製造方法、及びフッ化カルシウム単結晶の加工方法
JP7042471B2 (ja) * 2017-04-13 2022-03-28 国立大学法人東海国立大学機構 無機結晶材料の加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797277A (ja) * 1993-08-02 1995-04-11 Kyocera Corp 酸化物超電導体の接合方法
JP2000034194A (ja) 1998-07-15 2000-02-02 Toyota Central Res & Dev Lab Inc 結晶配向ビスマス層状ペロブスカイト型化合物及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141500A (ja) * 1983-02-01 1984-08-14 Sumitomo Electric Ind Ltd 光学部品の製造法
JPS59184533A (ja) * 1983-04-04 1984-10-19 Agency Of Ind Science & Technol ３−５族化合物半導体結晶の処理方法
JP2003034194A (ja) 2001-07-23 2003-02-04 Hiroshima Kasei Ltd ウェザーストリップ
KR101330974B1 (ko) * 2008-05-23 2013-11-18 가부시키가이샤 니콘 불화물 결정 성형체의 제조 방법, 그리고, 그것에 의해 제조된 광학 부재, 광학 부재를 구비하는 광학 장치 및 자외선 세정 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797277A (ja) * 1993-08-02 1995-04-11 Kyocera Corp 酸化物超電導体の接合方法
JP2000034194A (ja) 1998-07-15 2000-02-02 Toyota Central Res & Dev Lab Inc 結晶配向ビスマス層状ペロブスカイト型化合物及びその製造方法

Also Published As

Publication number Publication date
JPWO2009142284A1 (ja) 2011-09-29
KR20130041369A (ko) 2013-04-24
KR101394781B1 (ko) 2014-05-15
WO2009142284A1 (fr) 2009-11-26
JP5648675B2 (ja) 2015-01-07
JP2013082620A (ja) 2013-05-09
KR20110015621A (ko) 2011-02-16
JP5251976B2 (ja) 2013-07-31

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