JP5251976B2 - フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置 - Google Patents

フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置 Download PDF

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JP5251976B2
JP5251976B2 JP2010513063A JP2010513063A JP5251976B2 JP 5251976 B2 JP5251976 B2 JP 5251976B2 JP 2010513063 A JP2010513063 A JP 2010513063A JP 2010513063 A JP2010513063 A JP 2010513063A JP 5251976 B2 JP5251976 B2 JP 5251976B2
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fluoride crystal
base material
fluoride
crystal base
temperature
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JPWO2009142284A1 (ja
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美菜子 安住
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Nikon Corp
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Nikon Corp
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F11/00—Compounds of calcium, strontium, or barium
    • C01F11/20—Halides
    • C01F11/22—Fluorides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/12—Halides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2010513063A 2008-05-23 2009-05-22 フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置 Active JP5251976B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010513063A JP5251976B2 (ja) 2008-05-23 2009-05-22 フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008135239 2008-05-23
JP2008135239 2008-05-23
PCT/JP2009/059405 WO2009142284A1 (fr) 2008-05-23 2009-05-22 Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique
JP2010513063A JP5251976B2 (ja) 2008-05-23 2009-05-22 フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置

Related Child Applications (1)

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JP2012283977A Division JP5648675B2 (ja) 2008-05-23 2012-12-27 フッ化物結晶成形体からなる光学部材、光学部材を備える光学装置及び紫外線洗浄装置

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JPWO2009142284A1 JPWO2009142284A1 (ja) 2011-09-29
JP5251976B2 true JP5251976B2 (ja) 2013-07-31

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JP2010513063A Active JP5251976B2 (ja) 2008-05-23 2009-05-22 フッ化物結晶成形体の製造方法、並びに、それにより製造された光学部材、光学部材を備える光学装置及び紫外線洗浄装置
JP2012283977A Active JP5648675B2 (ja) 2008-05-23 2012-12-27 フッ化物結晶成形体からなる光学部材、光学部材を備える光学装置及び紫外線洗浄装置

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JP2012283977A Active JP5648675B2 (ja) 2008-05-23 2012-12-27 フッ化物結晶成形体からなる光学部材、光学部材を備える光学装置及び紫外線洗浄装置

Country Status (3)

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JP (2) JP5251976B2 (fr)
KR (2) KR101394781B1 (fr)
WO (1) WO2009142284A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009142284A1 (fr) * 2008-05-23 2009-11-26 株式会社ニコン Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique
JP6233017B2 (ja) * 2013-12-27 2017-11-22 株式会社ニコン フッ化カルシウム光学部材、フッ化カルシウム部材の製造方法、及びフッ化カルシウム単結晶の加工方法
JP7042471B2 (ja) * 2017-04-13 2022-03-28 国立大学法人東海国立大学機構 無機結晶材料の加工方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141500A (ja) * 1983-02-01 1984-08-14 Sumitomo Electric Ind Ltd 光学部品の製造法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184533A (ja) * 1983-04-04 1984-10-19 Agency Of Ind Science & Technol ３−５族化合物半導体結晶の処理方法
JPH0797277A (ja) * 1993-08-02 1995-04-11 Kyocera Corp 酸化物超電導体の接合方法
JP3650872B2 (ja) * 1998-07-15 2005-05-25 株式会社豊田中央研究所 結晶配向ビスマス層状ペロブスカイト型化合物及びその製造方法
JP2003034194A (ja) 2001-07-23 2003-02-04 Hiroshima Kasei Ltd ウェザーストリップ
WO2009142284A1 (fr) * 2008-05-23 2009-11-26 株式会社ニコン Procédé de production d’un article en cristal de fluorure moulé, élément optique produit selon le procédé, et dispositif optique et dispositif de lavage par rayonnement ultraviolet comprenant chacun l’élément optique

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141500A (ja) * 1983-02-01 1984-08-14 Sumitomo Electric Ind Ltd 光学部品の製造法

Also Published As

Publication number Publication date
JP2013082620A (ja) 2013-05-09
KR20110015621A (ko) 2011-02-16
KR101330974B1 (ko) 2013-11-18
KR20130041369A (ko) 2013-04-24
WO2009142284A1 (fr) 2009-11-26
KR101394781B1 (ko) 2014-05-15
JP5648675B2 (ja) 2015-01-07
JPWO2009142284A1 (ja) 2011-09-29

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