WO2005002804A1 - Dispositif et procede de transfert d'article de type plaque mince et systeme de production d'article de type plaque mince - Google Patents

Dispositif et procede de transfert d'article de type plaque mince et systeme de production d'article de type plaque mince Download PDF

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Publication number
WO2005002804A1
WO2005002804A1 PCT/JP2003/015411 JP0315411W WO2005002804A1 WO 2005002804 A1 WO2005002804 A1 WO 2005002804A1 JP 0315411 W JP0315411 W JP 0315411W WO 2005002804 A1 WO2005002804 A1 WO 2005002804A1
Authority
WO
WIPO (PCT)
Prior art keywords
amount
robot
horizontal support
correction
radius
Prior art date
Application number
PCT/JP2003/015411
Other languages
English (en)
Japanese (ja)
Inventor
Katsunori Sakata
Hidekazu Okutsu
Seiichi Fujii
Original Assignee
Rorze Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corporation filed Critical Rorze Corporation
Priority to AU2003304270A priority Critical patent/AU2003304270A1/en
Priority to PCT/JP2004/009438 priority patent/WO2005004230A1/fr
Priority to KR1020067000134A priority patent/KR101106401B1/ko
Priority to DE112004001210T priority patent/DE112004001210T5/de
Priority to JP2005511363A priority patent/JP4499038B2/ja
Priority to TW093120144A priority patent/TW200521056A/zh
Publication of WO2005002804A1 publication Critical patent/WO2005002804A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/002—Arms comprising beam bending compensation means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023—Cartesian coordinate type
    • B25J9/026—Gantry-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

Definitions

  • Transport device transport method of thin plate, and thin plate manufacturing system
  • the present invention relates to raw materials for semiconductor wafers, liquid crystal display devices, plasma display devices, organic and organic electroluminescence display devices, field emission display devices, liquid crystal display panels, printed wiring boards, etc., and thin plates for intermediate products and products.
  • TECHNICAL FIELD The present invention relates to a transport device for transferring or transporting a sheet and a method of transporting the sheet, and a thin plate manufacturing system having the transfer device. Background art
  • Japanese Unexamined Patent Publication No. 2739394 has been used as a robot for transporting a thin plate in a clean environment.
  • a display such as a liquid crystal display
  • the size of a glass substrate used for the display has increased, and the size of a robot for transporting the glass substrate has been demanded.
  • especially large glass substrates must be transported with a lift of 2 m or more in the height direction, and securing a transport distance in this height direction is a major problem. Therefore, various inventions have been proposed. For example, Japanese Unexamined Patent Publication No.
  • Hei 9-15053384 discloses an elevating mechanism in which ball screws are stacked in multiple stages
  • Japanese Unexamined Patent Publication No. H10-2099241 discloses a jack type. An elevating mechanism is described.
  • Japanese Patent Application Laid-Open No. H11-2387779 discloses a bending arm type elevating mechanism found in welding robots and the like. Describes a robot that arranges an elevating mechanism at the base of two horizontally rotating arms that face up and down.
  • the ball screw multi-stage lifting mechanism has weak horizontal strength, and it is difficult to prevent rolling.
  • jack-type or bent-arm type pots require a great deal of force when lifting from low angles against gravity due to the principle of inverted leverage.
  • the present invention provides a transfer device and a transfer system which can stably operate without transferring a large force as in the related art even when transferring a large thin plate medium in the height direction against gravity. Its purpose is to provide.
  • Another object of the present invention is to provide a transfer device, a transfer system, and a transfer method that can transfer a transfer target accurately even if a radius occurs in the robot itself. Disclosure of the invention
  • a vertically movable horizontal support base is provided between a pair of upright supports, and a robot provided with a horizontal rotating arm is mounted on the horizontal support base. It is also possible to provide a tilt adjustment mechanism on the horizontal support base to adjust the tilt angle of the robot.
  • One embodiment of the transfer device is a pair of uprights that stand apart from each other.
  • a support at least one horizontal support platform that is cantilevered by a pair of upright supports so as to be able to move up and down; an elevation drive drive unit that vertically moves the horizontal support platform up and down; And a robot having a horizontal rotating arm for lifting and transferring the transferred object.
  • the robot is supported by the two upright supports and is moved up and down along the upright supports, so that a stable up and down operation can be performed even at a relatively high position. Also, regardless of the current position, the load that lifts the robot is the same.
  • Another embodiment of the transfer device according to the present invention is characterized in that the robot is accessible to drive the horizontal rotating arm to take out or return the transferred object from between the pair of upright supports.
  • the transported object can be taken out from the pair of upright supports and transported. Become.
  • Another embodiment of the transfer device according to the present invention is characterized in that the horizontal support section is provided with an inclination adjusting means for changing an angle of the robot mounted on the horizontal support section with respect to the horizontal plane.
  • the inclination angle of the robot can be changed by providing the inclination means for slightly changing the inclination of the entire robot on the horizontal support base on which the robot is installed.
  • the inclination can be adjusted by slightly lifting or lowering one or two points or one side of the platform supporting the robot with a cam or the like.
  • the transport device further includes a moving means for horizontally moving the pair of upright supports.
  • the horizontal support base on which the robot is mounted is configured to be horizontally movable.
  • the mouth pot can be transported in both horizontal and vertical directions. This makes it possible to move the mouth pot to a free position in a predetermined space.
  • Another embodiment of the transport device according to the present invention includes a beam portion for fixing the pair of upright supports while keeping the pair of upright supports spaced apart from each other in parallel. It is characterized by the following.
  • the fixed position of the upright support is captured by the beam.
  • Another embodiment of the transfer device includes a deflection correction unit that corrects a vertical radius of an end effector and a rotation arm provided at a tip of a rotation arm that lifts and transfers an object to be transferred. It is characterized by the following.
  • the object to be conveyed becomes large and the amount of movement of the rotary arm becomes large. It can be transported safely.
  • Another embodiment of the transfer device according to the present invention is characterized in that the deflection correcting means corrects the amount of deflection when the transported object is lifted by the end effector.
  • correction control is performed according to the difference in the amount of bending depending on whether or not the transported object is held.
  • the radius correcting means stores a vertical deflection amount of a plurality of measurement points associated with a movement of a reference point provided on the rotating arm or on the end effector.
  • a radius storage means is provided, and every time the reference point moves to the measurement point, a deflection amount corresponding to the current position is read from the deflection storage means, and the deflection amount is corrected.
  • the correction control is performed in a time-sharing manner in accordance with the amount of bending that varies depending on the degree of movement of the rotating arm.
  • the deflection storage means stores both the amount of deflection due to the weight of the object alone and the amount of deflection when the object is held. It is characterized in that the correction amount is changed between the case of only the weight and the case of holding the conveyed object.
  • the correction unit includes a correction control unit that controls the lifting drive unit, and controls the drive unit to raise the horizontal support base in accordance with the radius or It is characterized in that the bending amount is corrected by lowering it.
  • the amount of radius is corrected by adjusting the height of the horizontal support base on which the robot is placed according to the amount of radius.
  • the correcting means includes a correction control means for controlling the inclination adjusting means, and the adjusting means tilts the robot placed on the horizontal support base.
  • the position of the end effector and the rotating arm is raised or lowered to correct the amount of radius.
  • the position of the end of the end effector is raised by inclining the robot on the horizontal support base to correct the amount of deflection.
  • the correction unit includes a correction control unit that controls the elevation drive unit and the inclination unit, and moves up and down the horizontal support base in accordance with the amount of bending, and / or The amount of radius is corrected by inclining the inclination adjusting means.
  • This embodiment makes it possible to correct the amount of deflection by controlling both the adjustment of the horizontal support base in the height direction and the adjustment of the inclination of the robot. This enables more appropriate and efficient transfer of the transferred object.
  • One embodiment of the sheet-like material processing system according to the present invention is provided with the transfer device according to any one of the above, and a pair of upright support members sandwiched therebetween, provided on a side opposite to a horizontal support base portion, A stage on which a cassette for accommodating a conveyed object is placed, and at least one processing device provided on the side of the horizontal support base.
  • One embodiment of the method for transporting a thin plate according to the present invention includes: a transport device that has a rotating arm and transports the thin plate; (a) based on position information of an access position of the rotating arm; Calculating a lateral movement amount, a vertical movement amount, and arm drive data of the rotating arm; (b) transferring the robot in accordance with the calculated lateral and vertical movement amounts; Driving the rotating arm based on the arm driving data; (c) reading the bending amount data when the rotating arm is extended from a predetermined storage means; and (d) reading the bending amount data. Calculating correction data for correcting the amount of deflection based on the correction data; and (e) adjusting the amount of vertical movement based on the correction data so as to correct the bending amount. And a step of controlling It is characterized in.
  • the method for transporting a thin plate instead of the step (e), (£) adjusting the inclination angle of the robot based on the correction data,
  • the method is characterized by comprising a step of correcting the amount.
  • the transport is performed with the amount of deflection corrected by adjusting the height of the robot.
  • the vertical movement amount and / or the tilt of the robot based on the correction data is characterized by comprising a step of correcting the amount of radius by adjusting an angle.
  • the deflection amount is corrected by changing the position of the end of the end effector by changing the inclination angle of the robot.
  • the deflection amounts at a plurality of moving points are read out, and in the step (d), the correction data for each moving point is read. Is calculated. This aspect is the height of the robot The deflection amount is corrected using both or either of the adjustment of the tilt angle and / or the adjustment of the inclination angle.
  • the step (c) is a step of reading a radius amount according to whether or not the thin plate is held from the storage means.
  • the deflection correction amount is changed depending on whether the end effector holds the transferred object or not.
  • a correction amount calculated in advance according to the radius amount is read from the storage unit.
  • the processing of the step (e) is performed based on the read correction amount without calculating the correction amount.
  • correction data of the amount of deflection corresponding to each moving position is calculated and stored in advance, and the correction data is read out to correct the amount of deflection. Therefore, there is no need to calculate correction data when moving, and the load on the control unit is reduced, and high-speed processing can be performed.
  • FIG. 1 is a plan view of a thin plate manufacturing system including one embodiment of a transfer device according to the present invention.
  • FIG. 2 is a perspective view of the transfer device 10 shown in FIG.
  • FIG. 3 is a cross-sectional view taken along line AA ′ of FIG.
  • FIG. 4A is a side view showing an embodiment of an elevating mechanism of a tower (upright support member).
  • FIG. 4B is a cross-sectional view taken along the line 8-8 ′ shown in FIG.
  • FIG. 5 is a side view of a transfer device showing another embodiment of the elevating mechanism provided in the tower.
  • Figure 6 shows the operable range (direction) of the mouth pot and its end effector.
  • FIG. 7A is a side view showing an embodiment of the inclination adjusting means.
  • FIG. 7B is a side view showing one embodiment of the inclination adjusting means.
  • FIG. 7C is a side view showing one embodiment of the inclination adjusting means.
  • FIG. 8 is a side view showing an inclination adjusting means according to another embodiment.
  • FIG. 9 is a schematic diagram illustrating the concept of a tilt adjusting unit according to another embodiment.
  • FIG. 10A shows a radius curve D indicating a radius when a predetermined measurement point (reference point) on the end effector moves from the measurement point A to the point J in the process of extending the rotating arm. It is a graph.
  • FIG. 10B is a graph showing a bending curve and a complementary curve for correcting the bending.
  • FIG. 11 is a functional block diagram showing an embodiment of the transfer control means of the present invention for performing transfer control in a horizontal direction and a vertical direction.
  • FIG. 12A is a diagram showing the maximum transfer distance of the end effector 17 by the rotating arm.
  • FIG. 12B is a diagram showing a case where the end effector 17 is inserted into a predetermined storage container when the amount of radius is not corrected.
  • FIG. 12C is a diagram showing a case where the amount of bending is corrected by using the inclination adjusting unit.
  • FIG. 13 is a plan view showing the transfer position of the transferred object by the robot.
  • FIG. 1 is a plan view of a thin plate manufacturing system provided with one embodiment of a transfer device according to the present invention.
  • the sheet manufacturing system is installed in front of the transfer device 10 and the transfer device 10.
  • FIG. 2 is a perspective view of a transfer device according to another embodiment, which is different from the transfer device 10 shown in FIGS. 1 and 3 only in the structure of the horizontal support base.
  • FIG. 3 is a cross-sectional view taken along the line AA ′ of FIG.
  • a cassette 51 containing a glass plate 57 and an empty cassette 52 are placed on the stage 50.
  • the transfer device 10 takes out the glass plate 53 (FIG. 3) from the cassette 51 and transfers it to the processing device 60 at the rear.
  • the glass plate is processed according to a predetermined purpose.
  • the processed glass plate 53 is taken out by the transfer device 10 and transferred to an empty cassette 52.
  • the cassettes 51 and 52 are carried by an AGV (Automotive Ground Vehicle) or the like, and are mounted or carried out at predetermined positions on the stage.
  • the transport device 10 includes a base 40, a pair of upright towers (upright supports) 12, a horizontal support 13 supported by the pair of towers 12 so as to be able to move up and down. And a robot 14 mounted and fixed on the horizontal support 13.
  • the base part 40 includes three rails 42 extending left and right, and a movable base 11 provided to be movable on the rails 42 left and right (X-axis direction).
  • the pair of towers 12 are provided on a movable platform 41, and can move horizontally along the rails 42 in the left-right direction (X-axis direction).
  • the distance between the pair of towers 12 is set to be a width that allows the conveyed goods to enter and exit, and the height of the towers 12 is determined by the height of the glass substrate storage cassette to be carried in and out and the height of the substrate processing equipment.
  • the pair of towers 12 be connected to each other with a beam straddling the top and reinforced to form a portal.
  • a pair of towers 12 is provided with a horizontal support 13.
  • the horizontal support base 13 is cantilevered by a pair of towers 12 so as to protrude toward the processing apparatus 60, and has a structure capable of moving up and down along the towers 12. It is preferable that the horizontal surface serving as the base of the horizontal support base 13 has a minimum necessary size and is in the shape of a minnow or a perforated plate. Since the yield (rate of non-defective products) is reduced if dust adheres to the sheet-like material to be conveyed, the sheet-like material requires a high-purity production environment. This is because it is desirable to minimize the disturbance of air during ascent and descent.
  • the robot 14 is placed and fixed on the horizontal support base 13.
  • the robot 14 includes two rotating arms 16 rotatable around a joint. At the end of each rotating arm 16, an end effector 17 for transferring a glass plate 53 is provided. I have.
  • the movable platform 41 to which the pair of towers 12 are fixed is moved in the horizontal direction (X-axis direction), and the horizontal support platform 13 is moved up and down (Z-axis).
  • the robot 14 is moved in front of the cassette 51 in which the glass substrates are stored by adjusting the height by moving the robot 14 upward and downward.
  • the robot having a rotating arm used in the present invention includes a SCARA robot in which an arm rotates horizontally, a multi-joint robot in which a joint rotates in a vertical plane or rotates around an axis in the arm direction, and the like. is there.
  • an elevating mechanism may be provided also on the mouth bot itself installed on the horizontal support base 13. If the robot itself has an elevating mechanism, it is possible to make fine adjustments in the Z-axis direction.
  • the robot used in the present invention includes an end effector 17 for placing an object to be conveyed thereon, and may be provided with a suction mechanism, and its shape may be publicly known. It is preferable that the joints are sealed with a magnetic fluid, and that all joints are sealed with packing so that dust in the robot body does not go outside.
  • the pair of towers 12 raises and lowers the horizontal support base 13 on which the mouth pot 14 is placed in the vertical direction (Z-axis direction).
  • the pair of towers 12 is fixed to the moving table 41, and moves in the horizontal direction (X-axis direction).
  • the horizontal support base 13 is provided with a tilt mechanism (tilt adjusting means) 30 (FIG. 3), and a robot 14 is installed via the tilt adjusting means.
  • tilt mechanism tilt adjusting means
  • the structure of the base 40 and the movement of the pair of towers 12 fixed to the base in the X-axis direction will be described with reference to FIGS.
  • the base 40 is provided with a movable base 41 slidably movable on three rails 42, and a pair of towers 12 is fixed thereon.
  • a motor 19 is fixed on the carriage 41, and is driven in the X-axis direction by a pinion attached to the motor 19 and a rack attached to the rail 42.
  • the motor 19, the rack and the pinion may be mounted on any of the rails 42, but is preferably mounted on the center rail 42.
  • Such a horizontal moving mechanism includes a horizontal parallel rail and a rack and pinion system, a cableway system, a ball screw rail system, a rail self-propelled system, an air levitation system, a magnetic levitation system, and other known heavy lifting systems.
  • a mass drive method can be employed.
  • a driving source of the horizontal moving mechanism a servo motor, a stepping motor, a linear motor, a hydraulic cylinder using hydraulic pressure, air pressure, or the like, and other known driving sources can be used.
  • the pair of towers 12 has at least a function of supporting the horizontal support base 13 on which the robot 14 is installed, and a function of driving the horizontal support base 13 up and down (in the Z-axis direction). ing. Driving in the vertical direction is performed by a guide unit that ensures accurate vertical movement and a lifting drive unit. An example of a specific mechanism will be described with reference to FIGS. 4A and 4B.
  • FIG. 4A is a side view showing an embodiment of an elevating mechanism provided on a tower (upright support member) 12, and FIG. 4B is a cross-sectional view taken along line 8-8 ′ shown in FIG. 48.
  • the elevating motor 27 rotates the connecting shaft 26 via a bevel gear.
  • the connecting shaft 26 rotates the pawl-shaped screw screws 25 provided in the towers 12 on both sides via another bevel gear provided at the bottom of the tower 12.
  • a screw receiver 28 fixed to the horizontal support base 13 is fitted to the screw 24.
  • the screw holder 28 moves up or down according to the direction of rotation. Therefore, the horizontal support base 13 rises or descends along the linear guide 24 via the screw receiver 28 by the rotation of the screw screw 25.
  • the robot 14 Since the robot 14 is installed on the horizontal support base 13 as described above, the position of the rotary arm 16 of the robot 14 and the position of the end effector 17 in the height direction (Z direction) can be adjusted. It becomes.
  • the horizontal support section 13 can be moved up and down in a range from the maximum height H to the minimum height L.
  • the guide section includes a roller guide mechanism that guides rotating bodies such as bearings and rollers along the reference rail, and a contact guide mechanism that applies magnetic repulsion or air film.
  • a roller guide mechanism that guides rotating bodies such as bearings and rollers along the reference rail
  • a contact guide mechanism that applies magnetic repulsion or air film.
  • a ball screw, a rack and a pinion, a pulley and a suspended string body and a counterweight hanging on the pulley, an air balance cylinder with a rod or a padless dress, various brakes, and other known drive units can be used.
  • FIG. 5 is a side view of a transfer device showing another embodiment of the elevating mechanism provided in the tower 12.
  • the lifting mechanism is equipped with an air balance cylinder 34 to minimize energy.
  • a ring-shaped chain 33 is hung between a motor 29 provided at the bottom of the tower 12 and a sprocket 32 provided near the top of the tower.
  • An air balance cylinder 34 is disposed on the left of the chain 33.
  • the horizontal support base 13 that is guided and moved by the linear guide 24 and the chuck of the air balance cylinder 34 are connected to the chain 33, and the weight of the horizontal support base 13 on which the robot 14 rides is reduced. Appropriate air pressure is applied to cylinder 34.
  • the horizontal support base 13 is movable from the minimum height position L to the maximum height H.
  • FIG. 6 shows the operating range of the robot 14 and its end effector 17.
  • the two sets of rotating arms 16 and the end effector 17 attached to their tips were installed in the right-hand part of the pair of towers 12 within a fan-shaped area that was opened at approximately 220 degrees.
  • the processing unit 60 is accessible.
  • the robot 14 rotates so that the end-effector 17 can access the cassettes 51 and 52 on the stage through the space between the pair of towers 12. It is possible.
  • the transport speed of the thin plate can be doubled.
  • the horizontal support base 13 is provided with a tilt mechanism (inclination adjusting means) 30, and the robot 14 is mounted on the horizontal support base 13 via the tilt adjustment means.
  • the tilt adjusting mechanism can adjust the tilt angle of the robot 14 within the range of the angle “T”.
  • 7A to 7C are side views showing one embodiment of the inclination adjusting means 30.
  • the tilt adjusting means 30 includes a tilt table 31 rotatably attached to a hinge 35 fixed to the horizontal support table 13 and a tilt drive mechanism.
  • the tilting drive mechanism includes a pole-shaped screw screw 36, a receiving screw 37 fitted to the screw screw 36, a rotary driving unit 45 for driving the screw screw 36 forward and reverse, and a bearing 46.
  • the rotation drive unit 38 rotates the screw 36
  • the receiving screw 37 moves left and right according to the rotation direction of the screw 36.
  • the receiving screw 37 is attached to a sliding hinge 38, and the sliding hinge moves along the sliding guide 39.
  • the left end of the inclined base 31 rises or falls, and the angle of the upper surface of the inclined base 31 changes. Since the robot 14 is fixed on the upper surface of the inclined table 31, the horizontal inclination of the robot 14 changes according to the change in the angle of the inclined table 31.
  • FIG. 7B shows a change in angle when the screw 36 having a clockwise rotating screw is driven to rotate clockwise.
  • the receiving screw 37 moves to the left, and the left end of the inclined base 31 rises.
  • FIG. 7C shows the angle change when the screw 34 is rotated counterclockwise.
  • the receiving screw 37 moves to the right, and the left end of the sloping base 31 rises around ⁇ .
  • FIG. 8 shows a tilt adjusting means according to another embodiment.
  • the angle of the inclined base 71 rotatably connected to the hinge 72 is changed by driving the cam 73.
  • FIG. 9 shows another embodiment of the tilt adjusting means.
  • the inclined table 76 is supported by three points: a fixed position rotating shaft 79, and vertical drive means 77, 78.
  • the fixed position rotation shaft 79 can rotate 360 degrees in the horizontal direction and 90 degrees in the vertical direction in a state where the position is fixed.
  • the vertical drive means 77 and 78 drive the drive shafts 77 b and 78 b up and down by hydraulic drive means 77 a and 78 a.
  • the inclined base 76 is driven up and down by the end portions 77 c and 78 c of the drive shaft.
  • Fixed position The vertical position of the rotating shaft 79 is fixed, and two points can be freely driven up and down, so that it is possible to adjust the tilt in the horizontal direction 360 degrees including front, rear, left and right. Become.
  • the transport device of the present invention transports large objects. Therefore, the size of the robot 14 becomes large, and the rotating arm also becomes heavy.
  • the pivot arm When the pivot arm is extended, it is possible to extend the center of the end effector more than 400 mm from the center of the robot. Therefore, due to the weight of the rotating arm and the weight of the transferred object, the rotating arm is radiused and the tip of the end-effector falls below its original position. For this reason, it may be difficult to accurately remove the conveyed object from a predetermined position inside a cassette or the like and to place the conveyed object at the accurate position. Therefore, it is desirable to correct the radius in order to accurately and safely transport the load.
  • FIG. 10A is a graph showing a deflection curve D indicating a deflection amount when a predetermined measurement point (reference point) on the end effector moves from the measurement point A to the point J in the process of extending the rotating arm.
  • the straight line S in the graph is the movement locus when there is no deflection Indicates.
  • the bending curve D shows an example in which the bending amount at the point A is set to 0, and then the bending is gradually performed, and the maximum bending amount d is obtained at the point J.
  • control for correcting the amount of bending is performed in order to accurately and surely convey an object to a target position.
  • the capture control moves upward (Z-axis direction) so as to cancel the radius shown in Fig. 10A.
  • the horizontal support base 13 is driven upward along a graph that is symmetric with respect to the straight line S in the Z-axis direction so as to cancel the amount of deflection. Make corrections.
  • the graph in Fig. 1OA is a line graph that merely plots the amount of deflection at each of the measurement points A to J. Therefore, there may be a problem that vibration occurs in the vertical direction between the measurement points due to an error from the actual radius. Therefore, complementation control is performed so that the line graph becomes a curve, and correction processing is performed based on this. Thereby, the extension operation of the rotating arm becomes smooth.
  • the supplementary control includes, for example, a method of calculating the radius of a circle including the three front and rear radii at all of the measurement points, and the like. A curve approximating the graph is obtained. As a result, a smooth curve C as shown in FIG. 10B is obtained, and by performing driving in the Z-axis direction along this curve, a smooth correction processing operation can be performed.
  • FIG. 11 is a functional block diagram of the transport control means according to one embodiment of the present invention.
  • the transfer control unit 120 is used to move the object in the horizontal direction (X-axis direction), move it up and down (Z-axis direction), and access the object to access the object and transport it to the target position. It controls the tilt angle of 14 and the rotation of the robot 14 and the operation of the rotary arm 16.
  • the movement in the Z-axis direction is performed by the lifting drive means 121, and the movement in the X-axis direction is performed.
  • the movement is performed by horizontal moving means 130. As a result, the entire robot 14 is transported to a predetermined position.
  • the robot control means 135 controls the rotation of the robot and the operation of the rotating arm. Further, the inclination angle of the horizontal support base 13 is adjusted by the inclination adjusting means 125. Various sensors 1338 are provided in each section of the moving mechanism and the robot, and the detection signals are fed to the transfer control section 120.
  • the transfer control unit 120 determines the moving direction and the moving amount from the current position data and the received position data. calculate.
  • the calculated movement amount data is divided into horizontal direction data and vertical direction data and output to the respective drive control means.
  • the movement amount data in the X-axis direction is output to the horizontal drive control unit 131, and the horizontal drive unit 132 is driven based on the data.
  • the movement amount data in the Z-axis direction is output to the vertical drive control unit 122 of the lifting drive unit 121, and the lifting drive unit 123 is driven based on the output.
  • the robot 14 moves to a predetermined position in the X-axis direction and the Z-axis direction.
  • the robot control unit 1336 drives the arm driving unit 1337 based on the transfer data from the transfer control means 120 to operate the horizontal rotation operation and the rotation arm 16 .
  • the transport control means shown in FIG. 11 further includes a deflection correction means 140.
  • the deflection correcting means 140 receives the current position information of the robot 14 and the operating position information of the rotating arm from the transfer control section 120 and adjusts the height of the end of the end effector 17 so as to correct the amount of bending. Adjust the length.
  • the radius correction means 140 corrects the amount of deflection, a correction information calculation unit 144 for calculating a correction amount, and a radius storing deflection amount data at each measurement position when the rotating arm 16 is extended.
  • An information storage unit 144 is provided.
  • the correction information calculation unit 144 reads out the amount of deflection (or the amount of correction) measured in advance from the deflection information storage unit 142 according to the received position information and the like, and the data to be corrected. Is calculated.
  • the calculated correction data is output to the elevating drive unit 122 or the skew drive unit 126, and by changing the elevating position of the horizontal support base 13 or the inclination angle of the robot 14, The amount of deflection is corrected. Both the driving of the horizontal support base 13 and the change of the inclination angle of the robot 14 may be performed to more accurately detect the radius.
  • FIG. 12A is a diagram showing the maximum transfer distance of the end effector 17 by the rotating arm 16.
  • the end effector 17 is held near the center of the mouth pot 100.
  • the rotating arm 16 With the force applied, the rotating arm 16 is extended and the end effector is extended to a distant position. Difference in distance of 101 (m) This is the maximum transfer distance of the force rotation arm 16. As the transfer distance increases, the amount of deflection of the rotating arm 16 increases.
  • FIG. 12B is a diagram showing a case where the end effector 17 is inserted into a predetermined cassette 51 when the amount of deflection is not corrected. In this case, simply driving the rotating arm 16 to extend the end effector 17 horizontally in the horizontal direction causes the end effector 17 to hit the cassette 51.
  • FIG. 12C is a diagram showing a case in which the amount of deflection is corrected using the tilt adjustment unit 30.
  • FIG. 13 shows the transfer position of the transferred object by the robot 14. It is a top view for showing. As shown in FIG. 5, the robot 14 can transfer the robot at an angle of 220 degrees, but the processing devices were also installed in four directions to confirm the operation.
  • Tower 2 is made of cans and has a height of 4250 mm, an outer wall interval of 3820 mm, an inner wall interval of 262 Omm, a tower width of 60 OmmX 50 Omm, and the corners on the robot side are sharpened.
  • Rail length 6500 mm x 3 pieces (Renore interval 830 mm and 2000 mm), rail width 33 mm X rail top height 220 mm.
  • Shelf 3 Tower side elevating beam 270 Omm with 40 Omm wide and 180 Omm long bottom mounting.
  • Tilt mechanism Two motors with worm gears are arranged at equal distances from the center of the robot to the rail orthogonal line at 60 ° left and right, and tilt freely in 360 ° directions. Maximum tilt angle (tilt adjustment angle): ⁇ 2 °.
  • the capacity of this transfer device is: transportable head: 110-360 Omm, lifting time: 3.5 seconds / 2,500 mm, horizontal movement distance 2500 mm.
  • the turning angle of the mouth pot is 500 degrees, the turning speed is 180 degrees for 2 seconds, and the tilt speed is ⁇ 2 degrees for 1 second.
  • the maximum transfer distance of one arm of the robot is 415 Omm, and it is possible to extend the center of the end effector from the center of the robot to 430 Omm ahead.
  • the loading and unloading directions of the robot 4 are the four directions of P, Q, R, and S in FIG. Since the tower 2 is moved by the horizontal moving mechanism 5 having rails, the transfer destination is free within a horizontal moving distance of 2730 mm.
  • a glass plate with a thickness of 0.7 mm, a width of 200 Omm, and a length of 220 Omm is transported by this transfer device. From Omm to the uppermost stage, 272 Omm, it is unloaded from the force and transported and placed on the 160 Omm height temporary storage table in the processing unit 60. After the processing, the gate 61 is opened, and the robot 4 of the present invention takes out the glass substrate 8 and stores it in the other cassette 52.
  • the horizontal transport device structure in the Y-axis direction is not described.
  • the transfer device of the present invention often transports a large thin plate (such as a 2 mx 2 m glass plate), so that the distance between a plurality of cassettes as a transfer destination and the distance between a plurality of processing devices are often long. Therefore, it is preferable to provide a horizontal movement mechanism.
  • Specific examples of the horizontal movement mechanism of the robot 14 include known heavy objects such as a horizontal parallel rail and a rack and pinion system, a cableway system, a ball screw rail system, a rail self-propelled system, an air levitation system, and a magnetic levitation system.
  • a driving method can be adopted. Servo motors, stepping motors, linear motors, and the like can be used as the driving source of this horizontal moving mechanism.
  • the transported object is placed at a predetermined position on the transport device.
  • a detectable sensor 120 is provided.
  • the transported object is suction-held by the end effector, the transported object is transported along a predetermined arc such that two adjacent sides of the held transported object pass over the sensor 120.
  • the detection timing of the sensor at this time and the size and shape of the transferred object that is known in advance, it is possible to determine whether or not the transferred object is correctly suction-held by the end effector.
  • the displacement of the transferred object on the end effector is detected, and the displacement can be calculated by the control means.
  • the deviation can be calculated by comparing the preset teaching position with the actual position.
  • the distance and the angle are calculated.
  • necessary position information can be obtained by using a plurality of sensors, or by detecting a plurality of times with one sensor.
  • This method has an advantage that it is possible to determine whether or not the transferred object is correctly held by passing the sensor once over at least one sensor 120.
  • the transfer for this determination into the transfer route for the transfer, more efficient determination can be made.
  • the sensor a line sensor, a spot sensor or the like can be used, and it is desirable to use a known optical non-contact sensor.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention porte sur un dispositif de transfert permettant de transférer des articles de type plaques minces tels que des panneaux d'affichage à cristaux liquides et des substrats en verre. Ce dispositif de transfert constitué d'un robot relativement grand (14) possédant un bras rotatif (16) pour transférer des articles de type plaques minces de grandes dimensions, ce dispositif pouvant effectuer un levage de manière stabilisée même si l'objet a une hauteur de 2m et effectuer un transfert pendant lequel l'intensité de la flexion par le bras rotatif (16) étendu peut être corrigée. L'invention porte également sur un système de transfert d'un article de type plaque mince. Le robot de transfert (14) de l'invention possédant le bras rotatif (16) est monté sur un bloc de support horizontal (13) en porte-à-faux pour monter et descendre sur deux corps de support verticaux (12). L'intensité de la flexion avec le bras étendu est corrigée en remontant le niveau du bloc de support horizontal (13) en fonction de la flexion. L'intensité de la flexion peut également être corrigée en modifiant l'angle d'installation du robot (14) monté sur le bloc de support horizontal (13).
PCT/JP2003/015411 2003-07-04 2003-12-02 Dispositif et procede de transfert d'article de type plaque mince et systeme de production d'article de type plaque mince WO2005002804A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AU2003304270A AU2003304270A1 (en) 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system
PCT/JP2004/009438 WO2005004230A1 (fr) 2003-07-04 2004-07-02 Appareil de transport et procede de commande de transport pour substrats du type feuille
KR1020067000134A KR101106401B1 (ko) 2003-07-04 2004-07-02 박판상 기판의 반송 장치 및 그 반송 제어 방법
DE112004001210T DE112004001210T5 (de) 2003-07-04 2004-07-02 Transportvorrichtung und Transportsteuerverfahren für eine dünne Platte
JP2005511363A JP4499038B2 (ja) 2003-07-04 2004-07-02 薄板状基板の搬送装置、及びその搬送制御方法
TW093120144A TW200521056A (en) 2003-07-04 2004-07-05 Carrying apparatus and carrying control method for sheet-like substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003271050 2003-07-04
JP2003-271050 2003-07-04

Publications (1)

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WO2005002804A1 true WO2005002804A1 (fr) 2005-01-13

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PCT/JP2003/015411 WO2005002804A1 (fr) 2003-07-04 2003-12-02 Dispositif et procede de transfert d'article de type plaque mince et systeme de production d'article de type plaque mince

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JP (1) JP4499038B2 (fr)
KR (1) KR101106401B1 (fr)
CN (1) CN100407395C (fr)
AU (1) AU2003304270A1 (fr)
TW (2) TW200502070A (fr)
WO (1) WO2005002804A1 (fr)

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Publication number Priority date Publication date Assignee Title
JP2007054939A (ja) * 2005-08-26 2007-03-08 Mitsubishi Electric Corp 産業用ロボット及びその輸送方法
EP2049422A2 (fr) * 2006-07-24 2009-04-22 Applied Materials, Inc. Système de traitement modulaire de petite empreinte
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TW200521056A (en) 2005-07-01
KR101106401B1 (ko) 2012-01-17
AU2003304270A1 (en) 2005-01-21
JP4499038B2 (ja) 2010-07-07
JPWO2005004230A1 (ja) 2006-11-09
CN1816907A (zh) 2006-08-09
KR20060118394A (ko) 2006-11-23
CN100407395C (zh) 2008-07-30
TWI348447B (fr) 2011-09-11

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