AU2003304270A1 - Transfer device, thin plate-like article transfer method, and thin plate-like article production system - Google Patents

Transfer device, thin plate-like article transfer method, and thin plate-like article production system

Info

Publication number
AU2003304270A1
AU2003304270A1 AU2003304270A AU2003304270A AU2003304270A1 AU 2003304270 A1 AU2003304270 A1 AU 2003304270A1 AU 2003304270 A AU2003304270 A AU 2003304270A AU 2003304270 A AU2003304270 A AU 2003304270A AU 2003304270 A1 AU2003304270 A1 AU 2003304270A1
Authority
AU
Australia
Prior art keywords
thin plate
article
production system
transfer device
transfer method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003304270A
Inventor
Seiichi Fujii
Hidekazu Okutsu
Katsunori Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rorze Corp
Original Assignee
Rorze Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corp filed Critical Rorze Corp
Publication of AU2003304270A1 publication Critical patent/AU2003304270A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/002—Arms comprising beam bending compensation means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023—Cartesian coordinate type
    • B25J9/026—Gantry-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU2003304270A 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system Abandoned AU2003304270A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003271050 2003-07-04
JP2003-271050 2003-07-04
PCT/JP2003/015411 WO2005002804A1 (en) 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system

Publications (1)

Publication Number Publication Date
AU2003304270A1 true AU2003304270A1 (en) 2005-01-21

Family

ID=33562640

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003304270A Abandoned AU2003304270A1 (en) 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system

Country Status (6)

Country Link
JP (1) JP4499038B2 (en)
KR (1) KR101106401B1 (en)
CN (1) CN100407395C (en)
AU (1) AU2003304270A1 (en)
TW (2) TW200502070A (en)
WO (1) WO2005002804A1 (en)

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JP5006927B2 (en) * 2007-03-26 2012-08-22 日本電産サンキョー株式会社 Industrial robot and its transport method
US7946800B2 (en) 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
JP2009012877A (en) * 2007-06-29 2009-01-22 Ihi Corp Float-carrying device
JP2010023195A (en) * 2008-07-22 2010-02-04 Nidec Sankyo Corp Industrial robot
DE102008062153A1 (en) * 2008-12-17 2010-12-30 Grenzebach Maschinenbau Gmbh Method and device for rapid transport of glass plates
TWI418810B (en) * 2010-03-26 2013-12-11 Hon Tech Inc Testing machine for multi-layer electronic elements
JP5818345B2 (en) * 2011-04-27 2015-11-18 日本電産サンキョー株式会社 Rotation mechanism, industrial robot, and method of returning origin of rotating body
KR101829397B1 (en) 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 Low variability robot
JP2013074112A (en) * 2011-09-28 2013-04-22 Yaskawa Electric Corp Hand and substrate transfer device
CN102514971A (en) * 2011-12-08 2012-06-27 深圳市鑫联达包装机械有限公司 Transfer system capable of continuously delivering paper and transfer method thereof
JP5614417B2 (en) * 2012-01-05 2014-10-29 株式会社安川電機 Transport system
TWM431163U (en) * 2012-01-31 2012-06-11 Shengjia Prec Co Ltd Glass substrate transportation device
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CN103663166A (en) * 2013-12-11 2014-03-26 深圳市华星光电技术有限公司 Automatic material carrying system and overhead traveling crane system thereof
KR102432133B1 (en) 2014-01-21 2022-08-12 퍼시몬 테크놀로지스 코포레이션 Substrate transport vacuum platform
CN104440950B (en) * 2014-11-17 2016-03-16 上海华力微电子有限公司 A kind of boiler tube passes protective device and the guard method of sheet manipulator
CN104495357B (en) * 2014-12-12 2017-01-04 南通富士通微电子股份有限公司 A kind of photolithography plate Filtting device
CN104690736B (en) * 2015-02-12 2017-03-08 成都天马微电子有限公司 Mechanical arm and its detecting system and detection method
JP6491515B2 (en) 2015-03-31 2019-03-27 キヤノン株式会社 Automatic assembly apparatus and automatic assembly method
CN104925473B (en) * 2015-05-29 2017-03-01 光驰科技(上海)有限公司 A kind of control method solving substrate conveyance dolly versatility
JP6629012B2 (en) * 2015-08-31 2020-01-15 豊田鉄工株式会社 Work transfer device for heating furnace
CN105417066B (en) * 2015-11-09 2017-12-01 合肥欣奕华智能机器有限公司 Substrate position offset detection and means for correcting and substrate conveying system
CN105583815B (en) * 2016-03-17 2017-12-08 北京新智远恒计量校准技术有限公司 A kind of concrete sample testing inspection robot
JP6617832B2 (en) * 2016-05-20 2019-12-11 村田機械株式会社 Transport vehicle and transport method
CN106216859B (en) * 2016-08-17 2018-02-27 江苏大学 The quick taking device and its method of a kind of flexible loading of laser indirect impact forging
JP6700149B2 (en) * 2016-09-29 2020-05-27 株式会社Ｓｃｒｅｅｎホールディングス Posture change device
JP6723131B2 (en) * 2016-09-29 2020-07-15 株式会社Ｓｃｒｅｅｎホールディングス Substrate transfer device and substrate transfer method
CN106516739B (en) * 2016-10-26 2019-04-16 福耀集团(福建)机械制造有限公司 A kind of glass carrying system based on robot vision
CN106737065B (en) * 2017-01-05 2019-03-15 张家港市铭斯特光电科技有限公司 A kind of glass production line
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CN107458108B (en) * 2017-08-25 2023-04-18 浙江正润机械有限公司 Swing rotary mechanism and paperboard transfer deviation-rectifying manipulator
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CN107934458B (en) * 2017-10-13 2019-09-10 弗埃斯工业技术（苏州）有限公司 Thin plate materials and parts position adjusting mechanism
CN109879052A (en) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 It is a kind of singly to put correction robot and its method for correcting error
JP7181013B2 (en) * 2018-06-20 2022-11-30 Juki株式会社 Electronic component mounting apparatus and electronic component mounting method
CN108818588A (en) * 2018-07-17 2018-11-16 芜湖超源力工业设计有限公司 A kind of bilateral formula clamp device
CN109454640A (en) * 2018-11-14 2019-03-12 惠科股份有限公司 A method of shortening changing plate duration
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Also Published As

Publication number Publication date
TW200521056A (en) 2005-07-01
TW200502070A (en) 2005-01-16
WO2005002804A1 (en) 2005-01-13
KR20060118394A (en) 2006-11-23
CN100407395C (en) 2008-07-30
JPWO2005004230A1 (en) 2006-11-09
TWI348447B (en) 2011-09-11
JP4499038B2 (en) 2010-07-07
KR101106401B1 (en) 2012-01-17
CN1816907A (en) 2006-08-09

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase