CN104925473B - A kind of control method solving substrate conveyance dolly versatility - Google Patents
A kind of control method solving substrate conveyance dolly versatility Download PDFInfo
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- CN104925473B CN104925473B CN201510283840.8A CN201510283840A CN104925473B CN 104925473 B CN104925473 B CN 104925473B CN 201510283840 A CN201510283840 A CN 201510283840A CN 104925473 B CN104925473 B CN 104925473B
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- dolly
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- optical sensor
- fibre optical
- conveyance
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Abstract
The present invention relates to field of vacuum coating, especially a kind of solve substrate transport dolly versatility control method it is characterised in that：Described control method at least comprises the following steps：Fibre Optical Sensor was installed before the crawl position of mechanical arm, substrate described in described fiber sensor measuring transports the distance between origin position and its installation site of dolly；This distance and described substrate are transported the reference range between the origin position of dolly and the installation site of described Fibre Optical Sensor be compared, calculating difference；Compensated and corrected using the coordinate that described difference transports, to described substrate, the substrate that dolly is transported.It is an advantage of the invention that：Carry out detecting the commonality realizing material conveying trolley by substrate is transported with the front and back position of dolly, improve the accuracy of conveyance position, reduce carrying fault rate, electrical design increases to the detection of material conveying trolley front and back position, carry out material conveying trolley automated location by software to compensate and real-time update position coordinateses, solve material conveying trolley and share sex chromosome mosaicism.
Description
Technical field
The present invention relates to field of vacuum coating, especially a kind of control method solving substrate conveyance dolly versatility.
Background technology
At present, conveyance dolly is generally adopted to transport to vacuum film coating chamber substrate to carry out follow-up plated film operation, but
Conveyance dolly can because damage, outmoded or some other plant issue and need to substitute or use instead.Now, because each conveyance is little
The error when processing is with assembling for the part of car is different, and the conveyance precision of therefore dolly also just brings certain deviation, and this is inclined
Difference can produce harmful effect to the operation of follow-up equipment, easily cause apparatus overload and report to the police and hardware damage, greatly reduce and set
Standby automatization efficiency.
Content of the invention
The purpose of the present invention is according to above-mentioned the deficiencies in the prior art, there is provided a kind of substrate that solves transports dolly versatility
Control method, by substrate transport dolly front and back position detected and according to this to substrate transport position compensate,
Thus solving to transport the shared sex chromosome mosaicism of dolly.
The object of the invention is realized being completed by technical scheme below：
A kind of control method solving substrate conveyance dolly versatility, described substrate conveyance dolly is used for being transported to substrate
At the crawl position of mechanical arm it is characterised in that：Described control method at least comprises the following steps：
Fibre Optical Sensor was installed before the crawl position of mechanical arm, described Fibre Optical Sensor is used for sending on-off model
To a controller, described controller transports dolly from origin position to the installation of described Fibre Optical Sensor by recording described substrate
During position, the changes in coordinates of its motor transports the operating range of dolly to calculate described substrate；
This distance and described substrate are transported between origin position and the installation site of described Fibre Optical Sensor of dolly
Reference range is compared, calculating difference；
Compensated and corrected using the coordinate that described difference transports, to described substrate, the substrate that dolly is transported.
Described reference range is the distance between installation site by measuring a benchmark dolly and described Fibre Optical Sensor
Come to obtain, described benchmark dolly refers to that one meets design drawing desired size error and transports normal substrate in current board
Conveyance dolly.
Compensated revised substrate coordinate corresponds to the crawl position of described mechanical arm.
Described substrate conveyance dolly was being run with First Speed, through Fibre Optical Sensor before described Fibre Optical Sensor
When with second speed run, again the crawl position to described mechanical arm is run with First Speed afterwards and returns to described substrate
The origin position of conveyance dolly；Described First Speed is more than described second speed.
It is an advantage of the invention that：Realize sharing of material conveying trolley by substrate being transported with the front and back position of dolly carrying out detecting
Property, improve the accuracy of conveyance position, reduce carrying fault rate, electrical design increase detects to material conveying trolley front and back position, lead to
Cross software and carry out the compensation of material conveying trolley automated location real-time update position coordinateses, thus solving material conveying trolley to share sex chromosome mosaicism,
So that more mating the requirement to position for the mechanical arm under new material conveying trolley position.The conveyance position that substrate transports dolly can automatically be revised
Put, to ensure the normal operation of follow-up equipment, it is to avoid apparatus overload is reported to the police and hardware damage；Improve equipment automatization efficiency；
Simple and reasonable, practical, it is suitable to promote.
Brief description
Fig. 1 is the use structural representation of the present invention.
Specific embodiment
Feature of present invention and other correlated characteristic are described in further detail by embodiment below in conjunction with accompanying drawing, so that
Understanding in technical staff of the same trade：
As shown in figure 1, in figure labelling 1-6 is respectively：Substrate conveyance dolly 1, substrate 2, substrate conveyance dolly initial point 3, light
Fiber sensor 4, guide rail 5, mechanical arm 6.
Embodiment：In the present embodiment, substrate transports trolley control system and is carried out by substrate is transported with the front and back position of dolly
Detection simultaneously compensates to substrate conveyance position according to this.As shown in figure 1, substrate conveyance dolly 1 can be by driving means in guide rail 5
If upper operation is transported at the crawl position of mechanical arm 6 with the stem substrate 2 being carried.Fibre Optical Sensor as Fibre Optical Sensor
Before device 4 is mounted on mechanical arm 6, that is, substrate conveyance dolly 1 reaches grabbing of mechanical arm 6 after first passing through Fibre Optical Sensor 4 again
Fetch bit is put.
The control method of the present embodiment comprises the following steps：
（1）Calculate substrate conveyance dolly 1 as benchmark from substrate conveyance dolly initial point 3 position to Fibre Optical Sensor 4
The distance between put, and with coordinate form, it is recorded, and record preservation reference coordinate setting value.Substrate as benchmark
Conveyance dolly 1 meets design drawing desired size error, and normal in the conveyance of current board.Control method due to the present embodiment
It is for solving different substrate conveyance dolly 1 due to the shared sex chromosome mosaicism caused by scale error, therefore arbitrarily meet to meet and set
Meter drawing requirement simultaneously all can be used as benchmark in current board conveyance normal substrate conveyance dolly 1.
（2）To other substrates conveyance dolly from substrate conveyance dolly initial point 3 is to the installation site of Fibre Optical Sensor 4
Distance measures and records, and is equally recorded with coordinate form, and current data is compared with reference coordinate.Substrate
During the range measurement of conveyance dolly 1, the position of the motor by Fibre Optical Sensor 4 is transported dolly 1 with substrate is implemented in combination with；
When substrate transport dolly 1 from its origin position to the installation site of Fibre Optical Sensor 4 when, Fibre Optical Sensor 4 transmission switching value letter
Number give controller, controller to front substrate transport dolly 1 motor travel coordinate recorded and the substrate with origin position
The motor coordinate of conveyance dolly 1 is compared, thus calculating the operating range that substrate transports dolly 1.
（3）The difference comparing is compensated substrate coordinate position automatically to conveyance data, substrate conveyance coordinate is entered
Row is revised, and obtains the substrate conveyance coordinate of reality.Compensated revised substrate coordinate corresponds to the crawl position of mechanical arm 6,
Enable mechanical arm 6 accurately to capture substrate and transport the substrate 2 on dolly 1.
For improving efficiency, during substrate transports the separate-blas estimation of dolly 1, achieve variable motion, be just able to simultaneously full
Foot is to the time requirement of compensation process and the double requirements to Fibre Optical Sensor 4 certainty of measurement.Detailed process is, using control
The driving means that device connects control base board conveyance dolly 1 are regulated and controled with speed of service on guide rail 5 to it.For example, substrate
Conveyance dolly 1 before Fibre Optical Sensor 4 with the First Speed high-speed cruising of 50mm/s, when Fibre Optical Sensor 4 with
The second speed low cruise of 1mm/s, afterwards again with the crawl position of the First Speed high-speed cruising of 50mm/s to mechanical arm 6
And it is back at a high speed substrate conveyance dolly initial point 3.Above-mentioned motor process avoids substrate conveyance dolly 1 for guarantee accuracy of detection
With the disadvantage of single low cruise, it is simultaneously achieved the double requirements to time and certainty of measurement for the present embodiment.Substrate conveyance is little
Car First Speed and second speed are all the selections that each factor in performance and real work according to dolly itself is carried out；
When using, First Speed should be greater than second speed, but both concrete values can be selected according to actual design.
The present embodiment in the specific implementation, has steps of：
（1）Before conveyance starts, Fibre Optical Sensor 4 and substrate are transported with distance between the front end face of dolly 1 and carries out twice
Detect and record detected value.
（2）When between detected value, deviation is more than 2mm twice, Fibre Optical Sensor 4 and substrate are transported dolly 1 front end face it
Between distance again detected.
（3）Detected value twice is averaged, and is compared with reference value.
（4）The deviation comparing with benchmark>5mm sounds a warning, and need to confirm whether substrate conveyance dolly 1 is accurately arranged on base
On plate conveying dolly initial point 3.
（5）The deviation comparing with benchmark<During 5mm, detected value is compared with reference value, calculates offset.
（6）Because " the substrate conveyance dolly front end face as benchmark arrives the distance between Fibre Optical Sensor 4 " and " as base
There is corresponding relation between the coordinate of the substrate on accurate substrate conveyance dolly ".Therefore, using offset, dolly is transported to substrate
The coordinate of the substrate 2 on 1 is modified compensating, so that mechanical arm 6 can accurately capture substrate transports the substrate on dolly 1
2.
It is assumed that the conveyance coordinate as the substrate conveyance dolly of benchmark is 1300, this benchmark conveyance dolly is detected for the first time
Operating range from its origin position to the installation site of Fibre Optical Sensor 4 is 1700, benchmark conveyance is detected for the second time
Dolly from its origin position to the installation site of Fibre Optical Sensor 4 operating range be 1700.
If having a stylobate plate conveying dolly first time and the peace from its origin position to Fibre Optical Sensor 4 is detected for the second time
Operating range between holding position is 1703, then the difference and benchmark dolly operating range between is+3, then this stylobate plate conveying
The conveyance coordinate of dolly is 1300+3.Revised conveyance coordinate corresponds to the crawl position of mechanical arm 6, makes mechanical arm 6 permissible
Accurately crawl substrate transports the substrate on dolly.
Although above example elaborates to the design of the object of the invention and embodiment referring to the drawings, this
Field those of ordinary skill will be consequently realised that, under the precondition limiting scope without departing from claim, still can be right
The present invention makes various modifications and variations, such as：Transport the structure of dolly 1, size etc. for the species of 7 Fibre Optical Sensors, substrate,
Therefore here does not repeat one by one.
Claims (3)
1. a kind of control method solving substrate conveyance dolly versatility, described substrate conveyance dolly is used for for substrate being transported to machine
At the crawl position of tool arm it is characterised in that：Described control method at least comprises the following steps：
Fibre Optical Sensor was installed before the crawl position of mechanical arm, described Fibre Optical Sensor is used for sending on-off model to one
Controller, described controller transports dolly from origin position to the installation site of described Fibre Optical Sensor by recording described substrate
When its motor changes in coordinates transport the operating range of dolly to calculate described substrate；This distance is transported dolly with described substrate
Origin position and the installation site of described Fibre Optical Sensor between reference range be compared, calculating difference；Using described
The coordinate that difference transports, to described substrate, the substrate that dolly is transported compensates and corrects；Described reference range is by measuring one
Obtaining, described benchmark dolly refers to that one meets and sets for the distance between installation site of benchmark dolly and described Fibre Optical Sensor
Meter drawing requirement scale error simultaneously transports dolly in the normal substrate of current board conveyance.
2. according to claim 1 a kind of solve substrate transport dolly versatility control method it is characterised in that：Through mending
Repay the crawl position that revised substrate coordinate corresponds to described mechanical arm.
3. according to claim 1 a kind of solve substrate transport dolly versatility control method it is characterised in that：Described
Substrate conveyance dolly was being run with First Speed before described Fibre Optical Sensor, with second speed when Fibre Optical Sensor
Run, again the crawl position to described mechanical arm is run with First Speed afterwards and return to the former of described substrate conveyance dolly
Point position；Described First Speed is more than described second speed.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510283840.8A CN104925473B (en) | 2015-05-29 | 2015-05-29 | A kind of control method solving substrate conveyance dolly versatility |
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| CN201510283840.8A CN104925473B (en) | 2015-05-29 | 2015-05-29 | A kind of control method solving substrate conveyance dolly versatility |
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| CN104925473B true CN104925473B (en) | 2017-03-01 |
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| CN112474401A (en) * | 2020-10-09 | 2021-03-12 | 佛山科学技术学院 | Visual inspection classification method and system for ceramic resistor substrate size |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TW200502070A (en) * | 2003-07-04 | 2005-01-16 | Rorze Corp | Carrying apparatus and carrying control method for sheet-like objects |
| JP5597050B2 (en) * | 2010-07-15 | 2014-10-01 | 富士機械製造株式会社 | Substrate stop position control method and apparatus, and substrate mounting position control method |
| JP2012121680A (en) * | 2010-12-08 | 2012-06-28 | Yaskawa Electric Corp | Board conveyance hand, board conveyance robot system, board position departure detection method, and board position correction method |
| KR20130009700A (en) * | 2011-07-15 | 2013-01-23 | 도쿄엘렉트론가부시키가이샤 | Substrate transfer device, substrate processing system, substrate transfer method, and storage medium |
| JP5912426B2 (en) * | 2011-11-07 | 2016-04-27 | ヤマハ発動機株式会社 | Linear conveyor |
| JP5918518B2 (en) * | 2011-11-30 | 2016-05-18 | 川崎重工業株式会社 | Yaw correction mechanism and its correction method for transported workpieces |
| JP5934156B2 (en) * | 2013-08-20 | 2016-06-15 | Ｔｏｗａ株式会社 | Substrate transport and supply method and substrate transport and supply apparatus |
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