CN204713967U - The control system of substrate conveyance dolly - Google Patents
The control system of substrate conveyance dolly Download PDFInfo
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- CN204713967U CN204713967U CN201520356856.2U CN201520356856U CN204713967U CN 204713967 U CN204713967 U CN 204713967U CN 201520356856 U CN201520356856 U CN 201520356856U CN 204713967 U CN204713967 U CN 204713967U
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- substrate conveyance
- dolly
- optical fiber
- fiber transducer
- conveyance dolly
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Abstract
The utility model relates to field of vacuum coating, especially the control system of substrate conveyance dolly, it is characterized in that: described system comprises optical fiber transducer and controller, before described optical fiber transducer is fixedly installed on the crawl position of described mechanical arm, between described controller with described optical fiber transducer, composition data is connected, mechanical arm described in described controller connection control.The utility model has the advantages that: the conveyance position of energy auto modification substrate conveyance dolly, to ensure the normal operation of follow-up equipment, avoid apparatus overload to report to the police and hardware damage; Improve equipment automatization efficiency; Simple and reasonable, practical, be suitable for promoting.
Description
Technical field
The utility model relates to field of vacuum coating, especially the control system of substrate conveyance dolly.
Background technology
At present, usually adopt conveyance dolly that substrate conveyance is indoor to carry out follow-up plated film operation to vacuum coating, but conveyance dolly can because damage, outmoded or some other plant issue and need to substitute or use instead.Now, because the part of each conveyance dolly is different with error during assembling in processing, therefore the conveyance precision of dolly also just brings certain deviation, this deviation can produce harmful effect to the operation of follow-up equipment, easily cause apparatus overload to report to the police and hardware damage, greatly reduce equipment automatization efficiency.
Summary of the invention
The purpose of this utility model is according to above-mentioned the deficiencies in the prior art, provide the control system of substrate conveyance dolly, by carrying out detection to the front and back position of substrate conveyance dolly and compensating substrate conveyance position according to this, thus solve conveyance dolly commonality problem.
The utility model object realizes being completed by following technical scheme:
A kind of control system of substrate conveyance dolly, described substrate conveyance dolly is used for crawl position place substrate being transported to mechanical arm, it is characterized in that: described system comprises optical fiber transducer and controller, before described optical fiber transducer is fixedly installed on the crawl position of described mechanical arm, between described controller with described optical fiber transducer, composition data is connected, mechanical arm described in described controller connection control.
The actuating device of substrate conveyance dolly described in described controller connection control.
The actuating device of described substrate conveyance dolly refers to the speed-changing driving device that can control described substrate conveyance crab traversing speed.
The utility model has the advantages that: the conveyance position of energy auto modification substrate conveyance dolly, to ensure the normal operation of follow-up equipment, avoid apparatus overload to report to the police and hardware damage; Improve equipment automatization efficiency; Simple and reasonable, practical, be suitable for promoting.
Accompanying drawing explanation
Fig. 1 is use structural representation of the present utility model.
Detailed description of the invention
The utility model feature and other correlated characteristic are described in further detail by embodiment below in conjunction with accompanying drawing, so that the understanding of technical personnel of the same trade:
As shown in Figure 1, mark 1-6 in figure to be respectively: substrate conveyance dolly 1, substrate 2, substrate conveyance dolly initial point 3, optical fiber transducer 4, guide rail 5, mechanical arm 6.
Embodiment: as shown in Figure 1, in the present embodiment, substrate conveyance trolley control system is by carrying out detection to the front and back position of substrate conveyance dolly and compensating substrate conveyance position according to this.Substrate conveyance dolly 1 runs the crawl position place being transported to mechanical arm 6 with the some substrates 2 carried on guide rail 5 by actuating device.
Substrate conveyance control system comprises optical fiber transducer 4 and controller, and composition data connects between the two.Optical fiber transducer 4 is arranged on the front of mechanical arm 6.Be combined as distance measuring equipment (DME) by position optical fiber transducer 4 and substrate being transported the motor of dolly 1 to use; When substrate conveyance dolly 1 is from its origin position to the setting position of optical fiber transducer 4, optical fiber transducer 4 transmits on-off model to controller, the motor of controller to front substrate conveyance dolly 1 travel coordinate carry out recording and and the substrate of the origin position motor coordinate that transport dolly 1 compare, thus calculate the operating range that substrate transports dolly 1.Controller is for receiving the on-off model of optical fiber transducer 4, and by take off data compared with Reference data, the difference compensating approach substrate obtained transports the actual coordinate of position, thus solves the commonality problem of conveyance dolly.
The present embodiment has following process when concrete use:
(1) substrate calculated as benchmark transports dolly 1 from the distance substrate conveyance dolly initial point 3 position to optical fiber transducer 4 position, and carries out record with coordinate form to it, and reference coordinate setting value preserved in record.Substrate conveyance dolly 1 as benchmark meets design paper and requires scale error, and normal in current board conveyance.
(2): other substrates conveyance dolly is measured and record from the distance substrate conveyance dolly initial point 3 to optical fiber transducer 4 position, carries out record with coordinate form equally, and current data and reference coordinate are compared.
(3) difference compared is carried out auto-compensation substrate coordinate position to conveyance data, namely substrate conveyance coordinate is revised, obtain actual substrate conveyance coordinate.
The present embodiment is in the specific implementation: for raising the efficiency, and achieves variable-speed motion, just met the time requirement of compensation process and the double requirements to optical fiber transducer 4 survey precision simultaneously in the separate-blas estimation process of substrate conveyance dolly 1.Detailed process is, utilizes controller connection control substrate to transport the actuating device of dolly 1 to regulate and control its running velocity on guide rail 5.Such as, substrate conveyance dolly 1 before close to optical fiber transducer 4 with the speed high-speed cruising of 50mm/s, with the speed low cruise of 1mm/s when optical fiber transducer 4, be again back at a high speed substrate conveyance dolly initial point 3 with the speed high-speed cruising of 50mm/s to the crawl position of mechanical arm 6 afterwards.Above-mentioned motion process avoids substrate conveyance dolly 1 for ensureing accuracy of detection and with the disadvantage of single low cruise, achieves the double requirements of the present embodiment to time and survey precision simultaneously.The high speed of substrate conveyance dolly 50mm/s and the low speed of 1mm/s are all the selections carried out according to each factor in the performance of dolly itself and real work; When specifically using, high speed and low speed all can be selected according to actual design.
Although above embodiment elaborates the design of the utility model object and embodiment with reference to accompanying drawing, but those of ordinary skill in the art can recognize, under the precondition not departing from claim limited range, still various improvement and conversion can be made to the utility model, as: the kind of optical fiber transducer, the structure, size etc. of substrate conveyance dolly 1, therefore do not repeat one by one at this.
Claims (3)
1. the control system of a substrate conveyance dolly, described substrate conveyance dolly is used for crawl position place substrate being transported to mechanical arm, it is characterized in that: described system comprises optical fiber transducer and controller, before described optical fiber transducer is fixedly installed on the crawl position of described mechanical arm, between described controller with described optical fiber transducer, composition data is connected, mechanical arm described in described controller connection control.
2. the control system of a kind of substrate conveyance dolly according to claim 1, is characterized in that: the actuating device of substrate conveyance dolly described in described controller connection control.
3. the control system of a kind of substrate conveyance dolly according to claim 2, is characterized in that: the actuating device of described substrate conveyance dolly refers to the speed-changing driving device that can control described substrate conveyance crab traversing speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520356856.2U CN204713967U (en) | 2015-05-29 | 2015-05-29 | The control system of substrate conveyance dolly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520356856.2U CN204713967U (en) | 2015-05-29 | 2015-05-29 | The control system of substrate conveyance dolly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204713967U true CN204713967U (en) | 2015-10-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520356856.2U Active CN204713967U (en) | 2015-05-29 | 2015-05-29 | The control system of substrate conveyance dolly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204713967U (en) |
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2015
- 2015-05-29 CN CN201520356856.2U patent/CN204713967U/en active Active
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |