CN104678915B - Multi-crane coordinated scheduling method oriented to semiconductor production line carrying system - Google Patents
Multi-crane coordinated scheduling method oriented to semiconductor production line carrying system Download PDFInfo
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- CN104678915B CN104678915B CN201310634924.2A CN201310634924A CN104678915B CN 104678915 B CN104678915 B CN 104678915B CN 201310634924 A CN201310634924 A CN 201310634924A CN 104678915 B CN104678915 B CN 104678915B
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- overhead traveling
- traveling crane
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the transport system
- G05B19/41895—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the transport system using automatic guided vehicles [AGV]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention relates to a multi-crane coordinated scheduling method oriented to a semiconductor production line carrying system. The method comprises the following steps: detecting whether other cranes are disposed in a path after planning the crane moving path by the carrying system; directly sending a moving command to move a current crane to a destination if the other cranes are not disposed in the path, calculating a safe position far from the current crane if the other cranes are in an idle state if the other cranes are disposed in the path, and moving the idle cranes to the safe position; moving and scheduling after moving the current crane to the safe position of the other cranes with moving tasks if the disposed other cranes have the moving tasks; repeating the process in an iterated mode to control movement of relevant cranes. According to the method, multiple cranes are moved at the same time under the condition that the multiple cranes are not in collision to one another; the carrying tasks are distributed to the multiple cranes at the same time; the multi-crane scheduling method is used for coordinating the actions of moving and waiting of the multiple cranes so as to jointly carry out the carrying tasks of the multiple cranes.
Description
Technical field
The present invention relates to a kind of handling system multiple stage overhead traveling crane coordinated scheduling method, carries in particular for semiconductor production line
The coordinated scheduling method of the multiple stage overhead traveling crane of system.
Background technology
In modern semiconductor production factory, generally removing for the materials such as wafer is carried out using the handling system of automatization
Fortune activity.And the carrying overhead traveling crane of handling system can use tens overhead traveling cranes by the scale of factory.Common handling system one
As occur that the overhead traveling crane transfer line of selection passes by length, have the overhead traveling crane not high situation of overhead traveling crane utilization rate such as run empty always.How to assist
The utilization rate that multiple stage overhead traveling crane improves overhead traveling crane is mixed up, the production efficiency of handling system and the production effect of semiconductor factory is directly affected
Rate.
The content of the invention
Low in order to overcome the shortcomings of handling system multiple stage overhead traveling crane coordinated scheduling efficiency, the present invention provides one kind towards quasiconductor
Production line handling system multiple stage overhead traveling crane is coordinated to adjust dispatching method, while overhead traveling crane is carried safely, improves multiple stage day
The utilization rate of car.
The technical solution adopted for the present invention to solve the technical problems is：It is a kind of many towards semiconductor production line handling system
Overhead traveling crane coordinated scheduling method, comprises the following steps：
Handling system is cooked up after current overhead traveling crane movement route, is checked in this route with the presence or absence of other overhead traveling cranes；If not depositing
Then directly current overhead traveling crane is being sent and is being moved to the order of destination；If existing, the overhead traveling crane nearest with current overhead traveling crane is searched, sentenced
Whether fixed nearest overhead traveling crane is idle overhead traveling crane；
If idle overhead traveling crane, the destination locations of current overhead traveling crane are made in a forward direction plus the position after safe distance
For the destination of idle overhead traveling crane, the mobile route of idle overhead traveling crane is cooked up；
If not idle overhead traveling crane, then it is assumed that be to carry overhead traveling crane, be moved to the home in the reverse direction for carrying overhead traveling crane
After reschedule；
Movement directive is sent to above-mentioned overhead traveling crane simultaneously；Then nearest overhead traveling crane is made as current overhead traveling crane, repeat the above steps
All overhead traveling cranes reach respective destination in this circuit.
If the idle overhead traveling crane, by the destination locations of current overhead traveling crane in a forward direction plus the position after safe distance
The destination as idle overhead traveling crane is put, the mobile route of idle overhead traveling crane is cooked up, and current overhead traveling crane is associated with the idle overhead traveling crane,
And record current day car mark on idle overhead traveling crane.
It is described if not idle overhead traveling crane, then it is assumed that be carry overhead traveling crane, be moved to carry overhead traveling crane home after adjust again
Degree；After calculating to the home for carrying overhead traveling crane, find from the incidence relation of current overhead traveling crane record and closed with current overhead traveling crane
The overhead traveling crane numbering of connection, and obtained associating the stop position of overhead traveling crane according to overhead traveling crane numbering, sending order makes the overhead traveling crane be moved to stopping
Position.
The speed that all overhead traveling cranes are moved on track section is identical.
Beneficial effects of the present invention and advantage：
1. the inventive method makes multiple stage overhead traveling crane in the case where not colliding mutually, while mobile multiple stage overhead traveling crane.And it is right
Multiple stage overhead traveling crane distributes carrying task simultaneously, coordinates many overhead traveling cranes by many overhead traveling crane dispatching methods and moves and the action such as wait jointly complete
Into the carrying task of multiple stage overhead traveling crane.
2., because track only allows an overhead traveling crane to pass through, using many overhead traveling crane dispatching methods more overhead traveling cranes can be allowed to move
Come, improve the overall handling efficiency of the utilization rate and handling system of track.
3. the present invention increases overhead traveling crane related information in overhead traveling crane, records the identification information of adjacent overhead traveling crane.By the pass of overhead traveling crane
When connection information just can calculate many overhead traveling crane collaborative works, the overhead traveling crane moves to the home before destination, so can improve and
Improve the efficiency of transmission of overhead traveling crane.
Description of the drawings
Fig. 1 is the handling system schematic diagram of the present invention；
Fig. 2 is many overhead traveling crane scheduling flow figures.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
The present invention discloses one kind towards many overhead traveling crane coordinated scheduling methods of semiconductor production line handling system, carries track by straight
The fork rail composition of trajectory, shaped form bend and switching connection both direction track.Carry track-bound covering wafer storage to set
Standby and process equipment.Overhead traveling crane hangs in orbit, and track section can only once allow an overhead traveling crane to pass through.The operation of overhead traveling crane
Direction is fixed, it is impossible to backward running.Same time track section only allows an overhead traveling crane to pass through.
After handling system cooks up overhead traveling crane movement route by the dispatching platform of server, by server controls platform
Find out in the overhead traveling crane related information of record in inspection route with the presence or absence of other overhead traveling cranes.If it does not, directly transmitting mobile life
Order allows overhead traveling crane to move to destination.It is remote by one to calculating current overhead traveling crane if overhead traveling crane is idle condition if there is other overhead traveling cranes
The home of point, allows idle overhead traveling crane to be moved to home.If exist other overhead traveling cranes oneself have mobile task, current overhead traveling crane
It is moved to other oneself and has after mobile task overhead traveling crane home and is moving scheduling.Repeat said process using iterative manner
Control is moved to related overhead traveling crane.By many overhead traveling crane coordination approachs, track utilization rate can be improved, while improve carrying effect
Rate.
The present invention specifically includes following steps：
After systems organization goes out overhead traveling crane movement route, check with the presence or absence of other overhead traveling cranes in this route, if without other days
Car, then directly send to overhead traveling crane and be moved to the order of destination.
If there are other overhead traveling cranes, the overhead traveling crane nearest with current overhead traveling crane is searched, judge whether nearest overhead traveling crane is idle overhead traveling crane.If
It is idle overhead traveling crane, by the destination of current vehicle farther position is calculated（Plus the position of safe distance）As idle overhead traveling crane
Destination, cooks up the mobile route of idle overhead traveling crane.Current overhead traveling crane is associated with nearest idle overhead traveling crane, and in idle overhead traveling crane note
Record current day car mark.Being designated as idle overhead traveling crane is moved by current overhead traveling crane.
If the nearest overhead traveling crane for existing is carrying state, current overhead traveling crane is first arranged to transfer point to carry before overhead traveling crane destination
Side is apart from a nearest safe distance position of destination.Current overhead traveling crane is moved to after home, checks current location and mesh
The route of cursor position whether there is other overhead traveling cranes.
Repeat said process in an iterative manner, control is moved to related overhead traveling crane, until all related overhead traveling cranes are moved
Move to target location.
Wherein, the order for being moved to mesh ground for sending to overhead traveling crane, is made up of multiple points of route.These are put
Related mark, by these points the track element sequence that route is passed through can be identified.
Safe distance is to maintain that two overhead traveling cranes do not collide and crash sensor does not produce the orbital distance of warning.By
In track an overhead traveling crane can only be allowed to pass through, when overhead traveling crane stops, in front and back car will keep minimum of one safe distance；When overhead traveling crane is moved
When dynamic, in front and back car will also keep minimum of one safe distance.Generally system safe distance is according to the actual track circuit of overhead traveling crane
It is fixed.
Minimum of one safe distance is kept when overhead traveling crane is moved.Overhead traveling crane speed when specified track is moved is fixed.Two
It is identical that overhead traveling crane equally moves through the time of same track section.So the too fast feelings for hitting front truck of rear car movement will not occur
Condition.
In addition, current overhead traveling crane is associated with nearest idle overhead traveling crane, and current day car mark is recorded in idle overhead traveling crane.It is designated as
Idle overhead traveling crane is moved by current overhead traveling crane.
After idle overhead traveling crane distributes movement directive, other overhead traveling cranes are searched whether in route in the same way, if depositing
In other idle overhead traveling cranes, mobile other idle overhead traveling cranes are to farther home.
If presence has distributed other overhead traveling cranes of mobile task, the security bit of other overhead traveling cranes for distributing mobile task is moved to
Postpone and reschedule.Calculating to the home of other overhead traveling cranes for distributing mobile task, from the pass of this overhead traveling crane record
The overhead traveling crane numbering associated with this overhead traveling crane is found in connection relation, according to the overhead traveling crane numbering for finding out the stop position of the overhead traveling crane is calculated
Put.According to the stop position for calculating, in distribution, that overhead traveling crane is moved to home instruction.
Handling system is made up of track, overhead traveling crane, wafer storage device and wafer process equipment and server.As shown in Figure 1：
A, B, C are overhead traveling cranes.The tip of triangular form represents the forward direction side of movement, and overhead traveling crane does not allow opposite direction to move.D is that wafer process sets
Standby, G is wafer storage device.
Fig. 2 is many overhead traveling crane scheduling flow figures
After overhead traveling crane distribution mobile route, search and whether there is in route nearest overhead traveling crane.If not existing, shifting is directly transmitted
Dynamic order is simultaneously special to be moved to destination.
If there are other overhead traveling cranes, the task status of other overhead traveling cranes is determined.
If idle overhead traveling crane, distribute remote away from destination（Safe distance）Home route.With idle overhead traveling crane
Based on carry out same scheduling flow, until all related overhead traveling cranes all distribute route.Movement is sent to all related overhead traveling cranes
Order and wait all related overhead traveling cranes to be moved to destination.
If the nearest overhead traveling crane for existing has mobile task, distribute closer away from mobile overhead crane destination（Safe distance）Safety
Position route.Same scheduling flow is being carried out based on the mobile overhead crane for existing.Until all related days all distribute road
Line.Movement directive is sent to all related overhead traveling cranes and waits all related overhead traveling cranes to be moved to destination.
By taking the handling system shown in Fig. 1 as an example：
After overhead traveling crane A distribution is moved to the route of D positions, can find out from A to D and there is overhead traveling crane B and C.It is nearest with A
Overhead traveling crane is B.
It is first more remote with A mesh ground to B distribution if B and C are idle overhead traveling cranes（Safe distance）Home E.To day
Car B distribution is moved to after the route of home E, is searched and whether there is between B and E overhead traveling crane.Find out overhead traveling crane C.By the mesh with B
The remote home meters of some of ground E put out the destination F of C.
When it is determined that all related overhead traveling cranes mobile route and destination after, to A, tri- overhead traveling cranes of B, C send mobile life simultaneously
Order.Work as A, tri- overhead traveling cranes of B, C all reach this finishing scheduling after specified destination.
If wherein C is not idle overhead traveling crane, and the destination of C is D.When it is determined that B mobile route after, discovery there is overhead traveling crane C.
The safe distance H closer with overhead traveling crane C halt D is calculated, distributes the destination H of overhead traveling crane B.And calculated by the destination of B
Overhead traveling crane A should in-position H safe distances position I.After determining the destination of all related overhead traveling cranes, movement directive is sent.When
All overhead traveling cranes are moved to after destination, complete this scheduling.
After C reaches D points and completes the loading or unloading operation of wafer, C is changed into idle overhead traveling crane.Now existed by the route of A to D
Idle overhead traveling crane B and idle overhead traveling crane C.The destination for determining C as stated above is F, and the destination of B is E, and the destination of A is D.Together
When to A, B, C sends movement directive.After all overhead traveling cranes move to destination, this scheduling is completed.
Claims (3)
1. one kind is towards many overhead traveling crane coordinated scheduling methods of semiconductor production line handling system, it is characterised in that comprise the following steps：
Handling system is cooked up after current overhead traveling crane movement route, is checked in this route with the presence or absence of other overhead traveling cranes；If not existing,
Directly the order for being moved to destination is sent to current overhead traveling crane；If existing, the overhead traveling crane nearest with current overhead traveling crane is searched, judge nearest
Whether overhead traveling crane is idle overhead traveling crane；
If idle overhead traveling crane, using the destination locations of current overhead traveling crane in a forward direction plus the position after safe distance as sky
The destination of not busy overhead traveling crane, cooks up the mobile route of idle overhead traveling crane；
If not idle overhead traveling crane, then it is assumed that be to carry overhead traveling crane, weight after the home in the reverse direction for carrying overhead traveling crane is moved to
New scheduling；
Movement directive is sent to above-mentioned overhead traveling crane simultaneously；Then using nearest overhead traveling crane as current overhead traveling crane, repeat the above steps, this line is made
All overhead traveling cranes reach respective destination in road；
It is described if not idle overhead traveling crane, then it is assumed that be carry overhead traveling crane, be moved to carry overhead traveling crane home after reschedule；
Obtain to the home for carrying overhead traveling crane, the overhead traveling crane associated with current overhead traveling crane is found from the incidence relation of current overhead traveling crane record
Numbering, and obtained associating the stop position of overhead traveling crane according to overhead traveling crane numbering, sending order makes association overhead traveling crane be moved to stop position.
2. one kind according to claim 1 is towards many overhead traveling crane coordinated scheduling methods of semiconductor production line handling system, and it is special
Levy and be：If the idle overhead traveling crane, by the destination locations of current overhead traveling crane in a forward direction plus the position after safe distance
The destination as idle overhead traveling crane is put, the mobile route of idle overhead traveling crane is cooked up, and current overhead traveling crane is associated with the idle overhead traveling crane,
And record current day car mark on idle overhead traveling crane.
3. one kind according to claim 1 is towards many overhead traveling crane coordinated scheduling methods of semiconductor production line handling system, and it is special
Levy and be：The speed that all overhead traveling cranes are moved on track section is identical.
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| CN116542417B (en) * | 2023-07-05 | 2023-09-12 | 泓浒(苏州)半导体科技有限公司 | Control system and method for semiconductor production line conveying system |
| CN117376984B (en) * | 2023-12-08 | 2024-03-08 | 华芯(武汉)智能装备有限公司 | Crown block scheduling data transmission method and readable storage medium |
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| DK199800837A (en) * | 1998-06-29 | 1999-12-30 | Ecco Sko A S | Installations for the treatment of subjects |
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| KR20110091020A (en) * | 2008-12-26 | 2011-08-10 | 무라다기카이가부시끼가이샤 | Traveling vehicle system |
| CN102103379A (en) * | 2009-12-17 | 2011-06-22 | 广州风神汽车有限公司 | Dispatching system of automated guided vehicle (AGV) |
| CN103268119A (en) * | 2013-06-05 | 2013-08-28 | 合肥凌翔信息科技有限公司 | Automatic guided vehicle navigation control system and navigation control method thereof |
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| CN1587010A (en) * | 2004-08-12 | 2005-03-02 | 友达光电股份有限公司 | Automatic material transport system |
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