CN104440950B - A kind of boiler tube passes protective device and the guard method of sheet manipulator - Google Patents
A kind of boiler tube passes protective device and the guard method of sheet manipulator Download PDFInfo
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- CN104440950B CN104440950B CN201410654570.2A CN201410654570A CN104440950B CN 104440950 B CN104440950 B CN 104440950B CN 201410654570 A CN201410654570 A CN 201410654570A CN 104440950 B CN104440950 B CN 104440950B
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Abstract
The invention discloses protective device and guard method that a kind of boiler tube passes sheet manipulator, by passing sheet manipulator at boiler tube, protective cover detecting unit is set, detect in real time with the state whether boiler tube biography sheet tongs being covered with to protective cover, and forbid that the driver element of boiler tube biography sheet manipulator passes sheet manipulator to boiler tube and drives when handgrip is covered with protective cover by control unit, can prevent from boiler tube from passing sheet manipulator to move when handgrip is covered with protective cover, and there is warning function simultaneously, thus avoid because making handgrip by mistake colliding with protective cover of causing of motion and the accident damaged, ensure that the security operated when boiler tube passes sheet manipulator maintaining.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing technology field, more specifically, relate to protective device and guard method that a kind of boiler tube passes sheet manipulator.
Background technology
Boiler tube technology has been widely used in semiconductor integrated circuit industry, by using pressure different, can be divided into normal pressure boiler tube and low pressure boiler tube.Normal pressure boiler tube is mainly used in the technique such as thermal oxide, diffusion annealing; Low pressure boiler tube is then mainly used in LPCVD technique.Boiler tube is divided into rectilinear and horizontal usually, wherein, the advantages such as the floor space that rectilinear boiler tube has because of it is little, automaticity is high, single useful load is large, can improve the safety of operator and particle contamination is few, particularly it has better temperature-controlled precision and uniformity advantage, makes rectilinear boiler tube become the main flow equipment of semiconductor integrated circuit industry gradually.
Along with the development of semiconductor technology, in each technical process of semiconductor, the transmission (biography sheet) of silicon chip is changed into by manual type comprehensively and automatically passed sheet mode.Application machine hand achieves the automatic biography sheet to silicon chip, not only alleviates operation intensity, improves and passes sheet control accuracy, and safety coefficient when improve technique, the effective guarantee personal safety of operating personnel.
Biography sheet manipulator for boiler tube is arranged on the bottom section being positioned at boiler tube, is mainly used in the silicon chip extracting in silicon box and is sent to brilliant boat, and silicon chip is sent into boiler tube and carried out technique by brilliant boat again; After technique, brilliant boat exits boiler tube, and manipulator passes silicon chip extracting back silicon box from brilliant boat again.In the process, manipulator also needs to detect the quantity of silicon chip.
Refer to Fig. 1, Fig. 1 is the partial structurtes schematic diagram that existing a kind of boiler tube passes sheet manipulator, which show boiler tube biography sheet manipulator and carries out the advance of horizontal direction or the part-structure composition of setback.As shown in Figure 1, boiler tube passes sheet manipulator and is arranged on the lower zone being positioned at boiler tube (diagram is omitted), and boiler tube passes sheet manipulator and is provided with handgrip 4, and the below of handgrip 4 is connected with slide block 2, is provided with guide rail 1 below slide block 2, and slide block 2 connects driver element 3.Driver element 3 drives slide block 2 to drive handgrip 4 to do the advance of horizontal direction or setback along described guide rail 1, and (boiler tube passes the rotation that sheet manipulator can also make horizontal direction under the drive of rotatable parts, because not relating to the main points of elaboration, this figure is omitted, can understand with reference to prior art), pick and place with the silicon chip in the silicon box (diagram is omitted) to corresponding position.
When needs carry out maintaining to above-mentioned boiler tube biography sheet manipulator; usually can use a protective cover that boiler tube is passed sheet tongs covers on wherein; prevent having article to drop on handgrip when safeguarding; or avoid attendant to encounter handgrip by mistake, play the effect of protection handgrip and boiler tube biography sheet manipulator.Refer to Fig. 2, Fig. 2 is handgrip in Fig. 1 mated condition schematic diagram when being covered with protective cover.As shown in Figure 2, protective cover 5 lower surface is opening, and its shape approximation is corresponding with the vertical projection profile of handgrip 4.After the protected cover 5 of handgrip 4 covers, will can't see handgrip 4 from the outside, therefore, protective cover 5 can play good protection to handgrip 4.
But, when needs carry out maintaining to above-mentioned boiler tube biography sheet manipulator, if be just covered with protective cover simply on handgrip, still larger potential safety hazard can be there is.This is because boiler tube biography sheet manipulator itself lacks the checkout gear for protective cover, so cannot judge whether protective cover exists.That is, handgrip, when being covered with protective cover, still can move under the driving of driver element.
At boiler tube with passing in the maintaining process of sheet manipulator; when operating personnel needs to use boiler tube biography sheet manipulator to carry out the Task of Debugging getting sheet action; if operating personnel does not notice that handgrip is covered with protective cover and Direct driver boiler tube biography sheet manipulator carries out getting sheet due to carelessness; handgrip and protective cover will be caused to collide, cause handgrip may be damaged because of impact protector cover and even damage the accident that whole boiler tube passes sheet manipulator.
In addition, if when loading silicon box in board in the maintaining process of boiler tube biography sheet manipulator, handgrip can stretch out from trend silicon box direction under pre-set programs state, carries out sweeping blade, to detect the quantity of silicon chip to the silicon chip in the silicon box loaded.Now, boiler tube passes sheet manipulator owing to cannot detect the existence of protective cover, and therefore handgrip can not stop action, and handgrip and protective cover so also can be caused to collide and cause the accident damaged to occur.
Summary of the invention
The object of the invention is to the above-mentioned defect overcoming prior art existence, the protective device providing a kind of boiler tube to pass sheet manipulator and guard method, the state whether being covered with protective cover by passing sheet tongs to boiler tube detects in real time, forbid or allow to pass boiler tube the driving of sheet manipulator accordingly, can prevent from boiler tube from passing sheet manipulator to move when handgrip is covered with protective cover, thus avoid because making handgrip by mistake colliding with protective cover of causing of motion and the accident damaged, ensure that the security operated when boiler tube passes sheet manipulator maintaining.
For achieving the above object, the invention provides a kind of boiler tube, to pass the technical scheme of the protective device of sheet manipulator and guard method as follows:
A kind of boiler tube passes the protective device of sheet manipulator; described boiler tube passes the lower zone that described boiler tube is located at by sheet manipulator; described boiler tube passes sheet manipulator and is provided with handgrip; be provided with slide block below described handgrip, be provided with guide rail below described slide block, described slide block connects driver element; slide block described in described drive unit drives drives described handgrip along described guide rail horizontal movement; in order to transmit the silicon chip in silicon box, and detect the quantity of silicon chip, described protective device comprises:
Protective cover, lower end is opening, in order to cover in wherein from top by described handgrip;
Protective cover detecting unit, whether be covered with described protective cover in order to detect described handgrip, it produces the first detection signal when described handgrip is covered with described protective cover, produces the second detection signal when described handgrip is not covered with described protective cover;
Control unit; connect described protective cover detecting unit and described driver element respectively; in order to described first detection signal according to reception; control to forbid that described driver element performs the driving described boiler tube being passed to sheet manipulator; and according to described second detection signal received, control to allow described driver element to perform the driving described boiler tube being passed to sheet manipulator.
Preferably, described protective cover detecting unit is located at the upper end, side of described slide block, whether is covered with described protective cover in order to detect described handgrip, and produces corresponding detection signal.
Preferably, described protective cover detecting unit is located at the described slide block upper end above that described handgrip captures side, whether is covered with described protective cover, and produces the detection signal of correspondence in order to detect described handgrip.
Preferably; described protective cover detecting unit is relay open in usual; described protective cover is when covering described handgrip, and its lower end contacts with the normally opened contact of described relay open in usual, described relay open in usual is produced corresponding detection signal that described handgrip is covered with described protective cover.
Preferably, described protective cover detecting unit is pressure sensor, and described protective cover is when covering described handgrip, and described pressure sensor is oppressed in its lower end, described pressure sensor is produced corresponding detection signal that described handgrip is covered with described protective cover.
Preferably; described protective cover detecting unit is photoelectric sensor; the light emission part of described photoelectric sensor is relative with light receiver is located at the both sides that described handgrip captures the described slide block of front end, side; described protective cover is when covering described handgrip; its front end is blocked between the light emission part of described photoelectric sensor and light receiver, makes described photoelectric sensor produce described first detection signal.
Preferably, also comprise alarm unit, described alarm unit connects described control unit, and described control unit, according to described first detection signal received, controls described alarm unit and sends alarm signal.
Preferably, described alarm unit be light siren, sound siren or acoustooptic alarm one of them.
A kind of boiler tube passes the guard method of sheet manipulator; above-mentioned boiler tube is adopted to pass the protective device of sheet manipulator; when described boiler tube biography sheet manipulator is in maintenance shut-downs maintenance state; use protective cover that described boiler tube is passed sheet tongs to cover to protect, described guard method comprises:
Detect boiler tube biography sheet tongs and whether be covered with protective cover, produce the first detection signal when described handgrip is covered with described protective cover, produce the second detection signal when described handgrip is not covered with described protective cover;
Be covered with described first detection signal of described protective cover according to described handgrip, forbid that passing sheet manipulator to described boiler tube drives; Be not covered with described second detection signal of described protective cover according to described handgrip, allow that sheet manipulator is passed to described boiler tube and drive.
Preferably, described first detection signal of described protective cover is covered with according to described handgrip, alert trigger.
As can be seen from technique scheme, beneficial effect of the present invention is, by passing sheet manipulator at boiler tube, protective cover detecting unit is set, detect in real time with the state whether boiler tube biography sheet tongs being covered with to protective cover, and forbid that the driver element of boiler tube biography sheet manipulator passes sheet manipulator to boiler tube and drives when handgrip is covered with protective cover by control unit, can prevent from boiler tube from passing sheet manipulator to move when handgrip is covered with protective cover, and there is warning function simultaneously, thus avoid because making handgrip by mistake colliding with protective cover of causing of motion and the accident damaged, ensure that the security operated when boiler tube passes sheet manipulator maintaining.
Accompanying drawing explanation
Fig. 1 is the partial structurtes schematic diagram that existing a kind of boiler tube passes sheet manipulator;
Fig. 2 is handgrip in Fig. 1 mated condition schematic diagram when being covered with protective cover;
Fig. 3 is the structural principle schematic diagram of the protective device of a kind of boiler tube biography sheet manipulator of one embodiment of the invention;
Fig. 4 is the structural principle schematic diagram of the protective device of a kind of boiler tube biography sheet manipulator of another embodiment of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
It should be noted that, in following detailed description of the invention, when describing embodiments of the present invention in detail, in order to clearly represent structure of the present invention so that explanation, special to the structure in accompanying drawing not according to general scale, and carried out partial enlargement, distortion and simplify processes, therefore, should avoid being understood in this, as limitation of the invention.
Boiler tube passes sheet manipulator and is arranged on the bottom section being positioned at boiler tube, and be mainly used in the silicon chip extracting in silicon box and be sent to brilliant boat, silicon chip is sent into boiler tube and carried out technique by brilliant boat again; After technique, brilliant boat exits boiler tube, and boiler tube to pass sheet manipulator and passes silicon chip extracting back silicon box from brilliant boat again.In the process, boiler tube passes sheet manipulator also needs to detect the quantity of silicon chip.
In the detailed description of the invention stated under the invention, first refer to Fig. 3, Fig. 3 is the structural principle schematic diagram of the protective device of a kind of boiler tube biography sheet manipulator of one embodiment of the invention.As shown in Figure 3, boiler tube passes sheet manipulator and is provided with handgrip 4, and be provided with slide block 2 below described handgrip 4, be provided with guide rail 1 below described slide block 2, described slide block 2 connects driver element 3.Described driver element 3 drives described slide block 2 to drive described handgrip 4, and along the horizontal movement of described guide rail 1, (boiler tube passes the rotation that sheet manipulator can also make horizontal direction under the drive of rotatable parts, because not relating to the main points that the present invention sets forth, diagram is omitted, can understand with reference to the prior art passing sheet manipulator about boiler tube), in order to transmit the silicon chip in silicon box (diagram is omitted), and the quantity of silicon chip is detected.
Please continue to refer to Fig. 3.When needs carry out maintaining to boiler tube biography sheet manipulator; a protective cover 5 can be used (for showing the mated condition of protective cover 5 and handgrip 4; protective cover 5 is indicated with dotted outline in figure; can be understood with reference to figure 2) boiler tube biography sheet tongs 4 is covered on wherein; prevent having article to drop on handgrip 4 when safeguarding; or avoid attendant to encounter handgrip 4 by mistake, play the effect of protection handgrip 4 and boiler tube biography sheet manipulator.
Please continue to refer to Fig. 3.Pass state when sheet manipulator carries out maintaining for boiler tube, protective device of the present invention comprises protective cover 5, protective cover detecting unit 7 and control unit 8.The lower end of protective cover 5 is opening, in order to cover in wherein from top by described handgrip 4.Whether protective cover detecting unit 7 is covered with described protective cover 5 in order to detect described handgrip 4, and it produces the first detection signal when described handgrip 4 is covered with described protective cover 5, produces the second detection signal when described handgrip 4 is not covered with described protective cover 5.The appearance profile of protective cover 5 and position should ensure that it is when covering handgrip 4, and protective cover detecting unit 7 can detect the existence of protective cover 5.Control unit 8 connects described protective cover detecting unit 7 and described driver element 3 respectively; in order to described first detection signal according to reception; control forbids that described driver element 3 performs the driving described boiler tube being passed to sheet manipulator (slide block); and according to described second detection signal received, control to allow described driver element 3 to perform the driving described boiler tube being passed to sheet manipulator.
Please continue to refer to Fig. 3.As an embodiment of the present invention, described protective cover detecting unit 7 can be arranged on upper end (please refer to shown position) before described slide block 2 that described handgrip 4 captures side (i.e. the right openings end of illustrated handgrip).And; the appearance profile of protective cover 5 is processed into the form matched with described protective cover detecting unit 7 position; to ensure when protective cover 5 covers or leaves handgrip 4, protective cover detecting unit 7 can detect whether protective cover 5 exists, and produces first, second corresponding detection signal.Certainly; also described protective cover detecting unit 7 can be arranged on the upper end, side (diagram is omitted) of described slide block 2; make described protective cover detecting unit 7 can detect described handgrip 4 equally and whether be covered with described protective cover 5, and produce corresponding detection signal.
Please continue to refer to Fig. 3.As an embodiment of above-mentioned protective cover detecting unit, relay open in usual can be adopted as described protective cover detecting unit 7, and be arranged on upper end, side or the upper end above of described slide block 2, such as illustratedly be arranged on upper end before described slide block 2.Owing to considering the form being processed into by the appearance profile of protective cover 5 and matching with the position of described protective cover detecting unit 7 (i.e. relay open in usual), such as, the length dimension of protective cover 5 is processed into the size that can contact with relay 7 open in usual, therefore, when described protective cover 5 falls and covers described handgrip 4, the front lower ending opening edge of protective cover 5 can contact with the normally opened contact of described relay 7 open in usual, make the signal circuit conducting of relay 7 open in usual, produce and detect that described handgrip 4 is covered with the closure signal (i.e. aforesaid first detection signal) of described protective cover 5.Meanwhile, utilize the feature of relay open in usual, using open circuit signaling during its open-circuit condition as the second detection signal, be not now covered with protective cover in order to identify.Control unit 8 is after the closure signal receiving relay 7 open in usual, namely the driver element 3 to boiler tube biography sheet manipulator sends instruction, and driver element 3 is locked, control to forbid that described driver element 3 performs the driving described boiler tube being passed to sheet manipulator.Thus as long as handgrip 4 is covered with protective cover 5, boiler tube passes sheet manipulator would not there is action, and thus handgrip 4 also would not collide protective cover 5 and cause damage.Now; even if operating personnel does not notice that handgrip 4 is covered with protective cover 5 and directly starts the driver element 3 of boiler tube biography sheet manipulator due to carelessness; driver element 3 drives reaction due to locked also can not generation, ensure that the security operated when boiler tube passes sheet manipulator maintaining.And when handgrip 4 is not covered with protective cover 5, namely relay 7 open in usual produces open circuit signaling (i.e. the second detection signal).Control unit 8 is after the open circuit signaling recognizing relay 7 open in usual, namely the driver element 3 to boiler tube biography sheet manipulator sends instruction, and driver element 3 is unlocked, control to allow described driver element 3 to perform the driving described boiler tube being passed to sheet manipulator.When boiler tube biography sheet manipulator is in normal process state, handgrip 4 will no longer be covered with protective cover 5, and thus driver element 3 is also in released state always, normally be carried out the driving that boiler tube passes sheet manipulator.
Please continue to refer to Fig. 3.As another embodiment of above-mentioned protective cover detecting unit; also pressure sensor can be adopted as described protective cover detecting unit 7; and be arranged on upper end, side or the upper end above of described slide block 2, such as, be arranged on upper end before described slide block 2 shown in Fig. 3.When described protective cover 5 is when covering described handgrip 4, oppressing described pressure sensor by lower edge before protective cover 5, described pressure sensor can be made to produce piezoelectric signal (i.e. the first detection signal).Meanwhile, using during non-for described pressure sensor pressured state without piezoelectric signal as the second detection signal, in order to identify now be not covered with protective cover.Control unit 8 is after receiving the piezoelectric signal of pressure sensor, and the driver element 3 namely to boiler tube biography sheet manipulator sends instruction, and locks driver element 3, controls to forbid that described driver element 3 performs the driving described boiler tube being passed to sheet manipulator.Otherwise, control unit 8 receive pressure sensor without piezoelectric signal time, namely control to make driver element 3 be in released state, allow described driver element 3 to perform driving to described boiler tube biography sheet manipulator.
Refer to Fig. 4, Fig. 4 is the structural principle schematic diagram of the protective device of a kind of boiler tube biography sheet manipulator of another embodiment of the present invention.As the further embodiment of above-mentioned protective cover detecting unit, photoelectric sensor also can be adopted as described protective cover detecting unit 7.As shown in Figure 4, be located at relative with light receiver (the light emission part 6 that light receiver is illustrated blocks and do not show) for the light emission part 6 of photoelectric sensor 7 both sides that described handgrip 4 captures the described slide block 2 of front end, side.When described protective cover 5 covers described handgrip 4; between the light emission part 6 that the front end of protective cover 5 is blocked in described photoelectric sensor 7 and light receiver, the light path of described photoelectric sensor 7 is connected and blocks and produce disabling signal (i.e. the first detection signal).Meanwhile, the Continuity signal when light path of described photoelectric sensor 7 being in conducting state, as the second detection signal, is not now covered with protective cover in order to identify.Control unit 8 is after the disabling signal receiving photoelectric sensor 7, and the driver element 3 namely to boiler tube biography sheet manipulator sends instruction, and locks driver element 3, controls to forbid that described driver element 3 performs the driving described boiler tube being passed to sheet manipulator.Otherwise control unit 8, when receiving the Continuity signal of photoelectric sensor 7, namely controls to make driver element 3 be in released state, allows described driver element 3 to perform the driving described boiler tube being passed to sheet manipulator.
Please continue to refer to Fig. 3 and Fig. 4.As the preferred embodiment of the invention described above, protective device of the present invention also comprises and is provided with alarm unit 9.Described alarm unit 9 connects described control unit 8; described control unit 8 is according to described first detection signal (namely can be the disabling signal of the closure signal of relay open in usual, the piezoelectric signal of pressure sensor or photoelectric sensor) received; judge that handgrip 4 is now covered with protective cover 5, namely control described alarm unit 9 and send alarm signal.That is, when boiler tube biography sheet manipulator carries out maintaining, as long as handgrip 4 is covered with protective cover 5, alarm unit 9 will be triggered and send alarm signal constantly, reminds operating personnel to note, and correctly operate with the moment.Further preferably, described alarm unit 9 can adopt light siren, sound siren or acoustooptic alarm, and, adopt the alarming effect of acoustooptic alarm better.
When adopting above-mentioned protective device of the present invention (please refer to Fig. 3, Fig. 4 to be understood) to carry out maintaining to boiler tube biography sheet manipulator; following guard method can be adopted; use protective cover that described boiler tube is passed sheet tongs to cover to protect, and prevent boiler tube from passing sheet manipulator misoperation and causing the security incident that handgrip crash protection cover causes in the process.Described guard method comprises:
Such as, by passing the protective cover detecting unit that the slide block below sheet hand grip is installed at boiler tube, relay open in usual, pressure sensor or photoelectric sensor, detect boiler tube biography sheet tongs and whether be covered with protective cover.The first detection signal is produced, such as the disabling signal of the closure signal of relay open in usual, the piezoelectric signal of pressure sensor or photoelectric sensor when described handgrip is covered with described protective cover; The second detection signal is produced, the Continuity signal without piezoelectric signal or photoelectric sensor of the open circuit signaling of such as relay open in usual, pressure sensor when described handgrip is not covered with described protective cover.
The control unit be connected with protective cover detecting unit is covered with described first detection signal of described protective cover according to the described handgrip received, the driver element passing sheet manipulator to its boiler tube connected sends instruction, and driver element is locked, control to forbid that described driver element performs and described boiler tube biography sheet manipulator is driven; Control unit is not covered with described second detection signal of described protective cover according to the described handgrip received, and controls to make driver element be in released state, allows described driver element to perform and drives described boiler tube biography sheet manipulator.
As preferably guard method; by the alarm unit be connected and installed with described control unit; such as light siren, sound siren or acoustooptic alarm; described control unit is covered with described first detection signal of described protective cover according to the described handgrip received; control described alarm unit and send alarm signal, be i.e. alert trigger.
In sum, the present invention arranges protective cover detecting unit by passing sheet manipulator at boiler tube, detect in real time with the state whether boiler tube biography sheet tongs being covered with to protective cover, and forbid that the driver element of boiler tube biography sheet manipulator passes sheet manipulator to boiler tube and drives when handgrip is covered with protective cover by control unit, can prevent from boiler tube from passing sheet manipulator to move when handgrip is covered with protective cover, and there is warning function simultaneously, thus avoid because making handgrip by mistake colliding with protective cover of causing of motion and the accident damaged, ensure that the security operated when boiler tube passes sheet manipulator maintaining.
Above-describedly be only the preferred embodiments of the present invention; described embodiment is also not used to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization description of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (10)
1. the boiler tube protective device passing sheet manipulator; described boiler tube passes the lower zone that described boiler tube is located at by sheet manipulator; described boiler tube passes sheet manipulator and is provided with handgrip; slide block is provided with below described handgrip; guide rail is provided with below described slide block; described slide block connects driver element; slide block described in described drive unit drives drives described handgrip along described guide rail horizontal movement; in order to transmit the silicon chip in silicon box; and the quantity of silicon chip is detected; it is characterized in that, described protective device comprises:
Protective cover, lower end is opening, in order to cover in wherein from top by described handgrip;
Protective cover detecting unit, whether be covered with described protective cover in order to detect described handgrip, it produces the first detection signal when described handgrip is covered with described protective cover, produces the second detection signal when described handgrip is not covered with described protective cover;
Control unit; connect described protective cover detecting unit and described driver element respectively; in order to described first detection signal according to reception; control to forbid that described driver element performs the driving described boiler tube being passed to sheet manipulator; and according to described second detection signal received, control to allow described driver element to perform the driving described boiler tube being passed to sheet manipulator.
2. boiler tube according to claim 1 passes the protective device of sheet manipulator, and it is characterized in that, described protective cover detecting unit is located at the upper end, side of described slide block, whether is covered with described protective cover in order to detect described handgrip, and produces corresponding detection signal.
3. boiler tube according to claim 1 passes the protective device of sheet manipulator; it is characterized in that; described protective cover detecting unit is located at the described slide block upper end above that described handgrip captures side, whether is covered with described protective cover, and produces the detection signal of correspondence in order to detect described handgrip.
4. the protective device passing sheet manipulator of the boiler tube according to Claims 2 or 3; it is characterized in that; described protective cover detecting unit is relay open in usual; described protective cover is when covering described handgrip; its lower end contacts with the normally opened contact of described relay open in usual, described relay open in usual is produced corresponding detection signal that described handgrip is covered with described protective cover.
5. the protective device passing sheet manipulator of the boiler tube according to Claims 2 or 3; it is characterized in that; described protective cover detecting unit is pressure sensor; described protective cover is when covering described handgrip; described pressure sensor is oppressed in its lower end, described pressure sensor is produced corresponding detection signal that described handgrip is covered with described protective cover.
6. boiler tube according to claim 1 passes the protective device of sheet manipulator; it is characterized in that; described protective cover detecting unit is photoelectric sensor; the light emission part of described photoelectric sensor is relative with light receiver is located at the both sides that described handgrip captures the described slide block of front end, side; described protective cover is when covering described handgrip; its front end is blocked between the light emission part of described photoelectric sensor and light receiver, makes described photoelectric sensor produce described first detection signal.
7. boiler tube according to claim 1 passes the protective device of sheet manipulator; it is characterized in that, also comprise alarm unit, described alarm unit connects described control unit; described control unit, according to described first detection signal received, controls described alarm unit and sends alarm signal.
8. boiler tube according to claim 7 passes the protective device of sheet manipulator, it is characterized in that, described alarm unit be light siren, sound siren or acoustooptic alarm one of them.
9. the boiler tube guard method passing sheet manipulator; adopt the boiler tube protective device passing sheet manipulator described in claim 1 ~ 8 any one; when described boiler tube biography sheet manipulator is in maintenance shut-downs maintenance state; use protective cover that described boiler tube is passed sheet tongs to cover to protect; it is characterized in that, described guard method comprises:
Detect boiler tube biography sheet tongs and whether be covered with protective cover, produce the first detection signal when described handgrip is covered with described protective cover, produce the second detection signal when described handgrip is not covered with described protective cover;
Be covered with described first detection signal of described protective cover according to described handgrip, forbid that passing sheet manipulator to described boiler tube drives; Be not covered with described second detection signal of described protective cover according to described handgrip, allow that sheet manipulator is passed to described boiler tube and drive.
10. boiler tube according to claim 9 passes the guard method of sheet manipulator, it is characterized in that, is covered with described first detection signal of described protective cover, alert trigger according to described handgrip.
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