WO2004106945A2 - 電子部品試験装置 - Google Patents
電子部品試験装置 Download PDFInfo
- Publication number
- WO2004106945A2 WO2004106945A2 PCT/JP2004/007363 JP2004007363W WO2004106945A2 WO 2004106945 A2 WO2004106945 A2 WO 2004106945A2 JP 2004007363 W JP2004007363 W JP 2004007363W WO 2004106945 A2 WO2004106945 A2 WO 2004106945A2
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- Prior art keywords
- test
- electronic component
- under test
- chip
- orientation
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C29/56016—Apparatus features
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Definitions
- the present invention relates to an electronic component test apparatus for testing various electronic components (hereinafter, also typically referred to as an IC chip) such as a semiconductor integrated circuit device, and more particularly, to an electronic component test device that can easily be used for a wide variety of electronic devices under test.
- the present invention relates to an electronic component test apparatus capable of coping with the above.
- IC testing device electronic component testing device
- a handler a large number of IC chips stored in a tray are conveyed into the handler, and each IC chip is brought into electrical contact with a test head. Then, an electronic component test apparatus main body (hereinafter, also referred to as a tester) performs a test. When the test is completed, each IC chip is dispensed from the test head and placed on a tray according to the test result, thereby sorting the product into categories such as non-defective products and defective products.
- a tester electronic component test apparatus main body
- an electronic component test apparatus for testing a memory IC chip (hereinafter, also referred to as a memory IC) requiring a relatively long test time. )
- a tray for storing pre-tested Z-tested IC chips before and after the test hereinafter also referred to as a customer tray
- a tray that is circulated and transported in the electronic component tester hereinafter a test tray.
- the IC chip is mounted on a test tray and passed through a chamber in a high-temperature or low-temperature environment to reach a high temperature of about 150-150 ° C. Alternatively, the test is performed by simultaneously applying a low temperature to the test head.
- a test tray used in such a memory IC test apparatus As a test tray used in such a memory IC test apparatus, a plurality of inserts for holding each IC chip are provided, and when the IC chip is pressed against a test head, a guide hole formed in each insert is formed.
- guide pins provided in the contact part of the test head and accurately positioning the input / output terminals of the IC chip and the contact pins of the contact part, miscontact during the test is prevented.
- each insert provided on such a test tray has an external shape of the IC chip. It is designed to constrain the movement of the IC chip based on its shape, and is a so-called exclusive product that depends on the external shape of the IC chip for each product type. Therefore, it is necessary to prepare a test tray equipped with inserts corresponding to each type of IC chip in advance, and every time the type of IC chip to be tested is changed, it is necessary to replace it with a test tray corresponding to the type . Therefore, a test device for a memory IC using such a test tray cannot shorten the exchange time when switching the type of IC chip, and can improve the efficiency particularly in a small number test of many types. Can not.
- a test plate having a substantially smooth holding surface is employed in place of the above-described test tray as a memory IC test device capable of easily supporting a wide variety of IC chips. It is conceivable to use a smooth holding surface to hold the back surface of the IC chip where the input / output terminals are not led out. This makes it possible to hold the IC chip without depending on the external shape of the IC chip.Therefore, there is no need to prepare the test tray for each type of IC chip, and there is no need to change the type when switching types. Therefore, it is considered to be an effective means of realizing a memory IC test device that can easily handle a wide variety of IC chips.
- the above-described test tray is used as an electronic component test apparatus (hereinafter, also referred to as a logic IC test apparatus) for a logic IC chip requiring a shorter test time than a memory IC.
- a logic IC test apparatus an electronic component test apparatus
- the relative position of each IC chip with respect to the outside of the counter is calculated using a CCD camera and an image processing device, etc., and based on the calculation result, the relative position of the IC chip is accurately determined by the moving means. It is known that positioning prevents miscontact during testing without depending on the external shape of the IC chip.
- Such a method using image processing enables highly accurate positioning of the IC chip by allowing variations in the relative positions of the input / output terminals with respect to the external shape of the IC chip occurring in the manufacturing process. Therefore, it is considered effective to prevent miscontact by applying the above-mentioned test apparatus for memory IC using the test plate.
- the test plate where the I / O terminals of the IC chip are not led out, it is necessary to hold the front surface where the I / O terminals of the IC chip are led out by the moving means.
- Patent Document 1 JP 2001-33519 A
- Patent Document 2 WO 03/075023 pamphlet
- the present invention relates to an electronic component test apparatus that can easily cope with various types of electronic components, and in particular, it is possible to prevent miscontact of an electronic component under test with a test head.
- An object of the present invention is to provide an electronic component test apparatus.
- an electronic component test apparatus for performing a test by pressing an input / output terminal of an electronic component under test against a contact portion of a test head.
- Moving means for gripping and moving the electronic component under test first imaging means for imaging one main surface of the electronic component under test before being gripped by the moving means, A second imaging unit for imaging the other main surface of the electronic component under test, and image information captured by the first imaging unit and the second imaging unit, which are gripped by the moving unit.
- the position and posture of the input / output terminal of the electronic component under test are calculated, and based on the calculation result, the relative position and posture of the electronic component under test gripped by the moving means with respect to the contact portion.
- a means of identifying An electronic component test apparatus that corrects the position and posture of the electronic component under test based on the relative position and orientation of the electronic component under test specified by the specifying unit. Is provided.
- the specifying means may determine, based on the image information captured by the first imaging means, a position of an outer shape of the one main surface of the electronic component under test before being held by the moving means, and The attitude and the position and orientation of the input / output terminal of the electronic component under test before being gripped by the moving means are calculated, and the image data captured by the second imaging means is used to calculate the gripping by the moving means.
- the calculated position and orientation of the external shape of the other main surface of the electronic component under test is calculated, and based on the calculation results, the input / output terminals of the input / output terminal of the electronic component under test gripped by the moving means are calculated.
- To calculate position and orientation Can be configured.
- the first and second imaging units respectively image both main surfaces of the electronic device under test, and the image obtained by the specifying unit Based on the information, the position and orientation of the input / output terminal of the electronic component under test after grasping that cannot be imaged are calculated, and based on the calculation result, the relative position and orientation of the electronic component under test with respect to the outside of the contour are specified.
- the moving means corrects the position and orientation of the electronic component under test based on the specified result.
- the moving means grips the surface from which the input / output terminals of the electronic component under test are led out.
- the position and orientation of the input / output terminals of the electronic device under test after being gripped by the moving means can be determined, and the electronic component under test can be accurately positioned with respect to the contact portion. Positioning is possible, and it is possible to prevent the occurrence of miscontact during testing.
- the electronic component test apparatus further includes third imaging means for imaging the other main surface of the electronic component under test before being gripped by the moving means, and the specifying means includes: Calculating the positions and postures of the input / output terminals of the electronic component under test held by the moving unit from the image information taken by the imaging unit, the second imaging unit, and the third imaging unit. Then, based on the calculation result, the relative position and posture of the electronic component under test held by the moving means with respect to the contact portion can be specified.
- the specifying means calculates a position and a posture of an input / output terminal of the electronic component under test before being held by the moving means, from image information taken by the first imaging means, Calculating the position and orientation of the external shape of the other main surface of the electronic component under test before being gripped by the moving unit from the image information captured by the third imaging unit; The position and orientation of the external shape of the other main surface of the electronic device under test held by the moving means are calculated from the image information captured by the moving means, and the moving means is calculated based on the calculation results.
- a third imaging means is further provided, and the third imaging means images the other main surface of the electronic device under test before being held by the moving means, and The position and orientation of the input / output terminal of the electronic component under test gripped by the moving means are calculated in consideration of the image information.
- the moving unit may be configured to include a suction unit that suctions and holds the electronic device under test. Since the moving means sucks and grips the electronic component under test, the electronic component under test can be reliably held and the structure of the electronic component test apparatus can be simplified.
- the electronic component testing apparatus further includes a test plate having a substantially smooth holding surface for holding the other main surface from which input / output terminals of the electronic component under test are not led out,
- the moving means places the electronic device under test on the holding surface of the test plate so as to relatively correspond to the arrangement of the contact portions, and moves the test plate in a positional relationship corresponding to the arrangement of the contact portions.
- the input / output terminals of the electronic component under test can be configured to make electrical contact with the corresponding contact portions of the test head.
- a test plate having a substantially smooth holding surface is adopted in place of the conventional test tray, and the input / output terminals of the electronic component under test are led out from the flat holding surface.
- the electronic component under test can be held without depending on the external shape of the electronic component under test. This eliminates the need to prepare the test plate for each type of electronic component under test, and eliminates the need for replacement at the time of product type switching. Becomes possible.
- the electronic components under test in a state where the holding surface of the test plate corresponds to the arrangement of the contact portions, in a memory IC test device that needs to secure a large number of simultaneous measurements, there are many types of test devices. It is possible to easily cope with the electronic component under test.
- the holding surface of the test plate may be configured to include a suction unit that suctions the other main surface of the electronic component under test.
- a suction means is provided on the holding surface of the test plate, and the suction means sucks and holds the main surface of the electronic component under test from which the input / output terminals are not led out, thereby securely holding the electronic device under test.
- the holding surface of the test plate can be configured to hold the electronic device under test in a state where the input / output terminals of the electronic device under test are vertically upward. With the input / output terminals of the electronic component under test facing vertically upward, the holding surface of the test plate holds the electronic component under test. It is possible to do.
- the test plate may have a holding portion provided so as to be swingable, and a holding surface of the test plate may be formed on the holding portion.
- the test plate is provided with a holding portion so as to be swingable, and the holding portion forms a holding surface for holding the electronic device under test. It is possible to absorb an error at the time of contact due to thermal expansion / contraction due to thermal stress applied to the component.
- a guide portion is provided around the contact portion, and the holding portion of the test plate may be configured to be guided by the guide portion.
- a guide section is provided around the contact section, and the guide section guides the holding section when out of the contour, whereby the electronic component under test can be positioned relatively accurately with respect to the contact section.
- the guide portion may be configured to have at least two guide surfaces extending in directions not parallel to each other.
- the guide part is provided with at least two non-parallel guide surfaces extending in two directions, and when the electronic component under test contacts the contact part, the holding part of the test plate abuts on the two guide surfaces. By doing so, it becomes possible to position the electronic device under test relatively stably with respect to the contact portion.
- the electronic component test apparatus may be configured such that a distance from a side surface of the holding unit that contacts the guide surface to the electronic component under test is equal to a distance between the guide surface around the contact unit and the contact.
- the moving means may be configured to correct the position and orientation of the electronic component under test on the holding part of the test plate so that the distance is substantially the same as the distance to the part.
- the moving means is provided so that the distance force S from the side surface of the holding portion to the electronic component under test and the distance from the guide surface around the contact portion to the outside of the contour are substantially the same.
- the electronic component under test is placed on the holder while correcting the position and orientation of the test plate, and at the time of contact, the side surface of the holder of the test plate and the guide surface around the contact part come into contact with each other, so that This makes it possible to position the electronic device under test relatively accurately.
- the electronic component test apparatus may be configured to further include a pressing unit that presses the holding portion of the test plate so that a side surface of the holding portion contacts the guide surface.
- a pressing means is further provided in the electronic component test apparatus, and the holding means of the test plate is pressed against the guide part of the contact part by the pressing means, whereby the holding part and the guide part are brought into close contact with each other.
- the electronic component under test can be positioned more accurately with respect to the contact portion.
- the pressing means has an elastic member and is provided on the test plate.
- the pressing means has an elastic member and is provided on the test plate.
- the electronic component testing apparatus may further include a positioning plate for positioning a holding portion of the test plate, and the moving unit may move the test plate with the positioning plate positioning the holding portion of the test plate.
- the position and orientation of the electronic component under test can be corrected and placed on the holding part of the test plate, and the positioning plate has an opening force capable of inserting the holding part of the test plate.
- the moving means is formed so as to relatively correspond to the arrangement of the contact portions of the head, and the side surface of the holding portion of the test plate is in contact with the inner wall surface of the opening of the positioning plate. Indicates the position and orientation of the electronic component under test in the holder of the test plate. It can be configured to be mounted after correction.
- the holding portion When the electronic component under test is mounted on the holding portion by the positioning plate for positioning the holding portion of the test plate, the holding portion is positioned and constrained to be provided on the test plate so as to be swingable. Since the relative positional relationship between the specified holding parts is regulated, it is possible to improve the workability of moving the electronic component under test by the moving means.
- the pressing means may be configured to press the holding portion of the test plate so that a side surface of the holding portion of the test plate is in contact with an inner wall surface of the opening of the positioning plate.
- the test plate holding section is positioned by the pressing means used to contact the test plate holding section with the guide section of the contact section.
- the moving means can be configured so that the gripped electronic device under test can be moved in an arbitrary direction and can be rotated in a predetermined direction.
- the electronic component under test can be mounted at a desired position and a desired posture of the holding surface.
- an electronic component test method for performing a test by pressing an input / output terminal of an electronic component under test against a contact portion of a test head
- a first imaging step of imaging one main surface of the electronic device under test before the electronic device under test is gripped by moving means for gripping and moving the electronic device under test
- the position and orientation of the input / output terminal of the electronic device under test gripped by the moving means are calculated, and based on the calculation result, the relative position of the electronic component under test gripped by the moving device to the outside of the contour is calculated.
- Position and posture A specifying step of constant, the identified at a particular step the device under test unit A correction step of correcting the position and orientation of the electronic component under test by the moving means based on the relative position and orientation of the component.
- the attitude and the position and orientation of the input / output terminals of the electronic component under test before being gripped by the moving means are calculated, and from the image information captured in the second imaging step, the electronic component under test is gripped by the moving means.
- the position and orientation of the external shape of the other main surface of the electronic device under test are calculated, and based on the calculation results, the input / output terminals of the input / output terminals of the electronic device under test gripped by the moving means. It can be configured to calculate the position and orientation.
- both main surfaces of the electronic component under test are respectively imaged in the first and second imaging steps, and the image captured in the specific step is obtained.
- the position and orientation of the input / output terminal of the electronic component under test after grasping that cannot be imaged are calculated, and based on the calculation result, the relative position and orientation of the electronic component under test with respect to the outside of the contour are specified.
- the correction step the position and orientation of the electronic component under test are corrected by the moving means based on the specified result.
- the moving means grips the surface from which the input / output terminals of the electronic component under test are led out. Even when the electronic component under test is moved, it is possible to determine the position and orientation of the input / output terminals of the electronic device under test after being gripped by the moving means, and to accurately position the electronic device under test against the outside of the contour. Position can be prevented, and the occurrence of miscontact during the test can be prevented.
- the method for testing an electronic component includes a third imaging step of imaging the other main surface of the electronic component under test before the electronic component under test is gripped by the moving means;
- the electronic device under test gripped by the moving means is determined based on image information captured in the first imaging step, the second imaging step, and the third imaging step. Calculate the position and orientation of the input / output terminals of the Based on the calculation result, the relative position and posture of the electronic device under test gripped by the moving means with respect to the outside of the contour can be specified.
- the position and orientation of the input / output terminal of the electronic component under test before being held by the moving means are calculated from the image information captured in the first imaging step. Calculating, from the image information captured in the third imaging step, a position and a posture of the outer shape of the other main surface of the electronic component under test before being gripped by the moving means; From the image information captured in the imaging step of 2, the position and orientation of the outer shape of the other main surface of the electronic component under test held by the moving means are calculated, and based on the calculation results, The position and the attitude of the input / output terminal of the electronic component under test held by the moving means may be calculated.
- a third imaging step of imaging the other main surface of the electronic device under test before being held by the moving means is further provided, and in the specific step, the image information is taken into consideration. Then, the position and orientation of the input / output terminals of the electronic component under test held by the moving means are calculated. As a result, even when the external shape of the two main surfaces of the electronic component under test is slightly different due to the knock of the electronic component under test in the manufacturing process, the relative position of the electronic component under test with respect to the contact portion is obtained. And posture can be accurately specified.
- FIG. 1 is a schematic plan view of an electronic component test apparatus according to an embodiment of the present invention.
- FIG. 2 is a schematic cross-sectional view taken along the line II-III of FIG.
- FIG. 3 is a conceptual diagram showing a transfer path of an IC chip in the electronic component test apparatus shown in FIG.
- FIG. 4 is a cross-sectional view of a principal part of the alignment section, taken along the line IV-IV in FIG.
- FIG. 5 is a block diagram of an image processing apparatus for positioning an IC chip of an electronic component test apparatus according to an embodiment of the present invention, and peripheral components thereof.
- FIG. 7 is a cross-sectional view of a main part of an alignment unit according to another embodiment of the present invention.
- FIG. 8A is a cross-sectional view of a main part of the chamber along the IHI line in FIG. 1.
- FIG. 8B is a cross-sectional view of a main part in a direction orthogonal to FIG. 8A.
- FIG. 9 is an overall plan view of a test head and an enlarged view of a contact portion in the electronic component test apparatus shown in FIG. 1 in which a plurality of contact portions are arranged.
- FIG. 10 is an overall plan view of a test plate and an enlarged view of a holding section in the electronic component test apparatus shown in FIG. 1.
- FIG. 11 is a diagram showing a state before the IC chip held by the holding portion of the test plate shown in FIG. 10 is pressed against the contact portion of the test head shown in FIG.
- FIG. 12 is a plan view showing a state where the holding portion of the test plate shown in FIG. 10 is inserted into the opening of the positioning plate shown in FIG.
- FIG. 13 is a cross-sectional view taken along the line xm_xm in FIG. 12, showing a state before a holding portion of a test plate is inserted into an opening of a positioning plate.
- FIG. 14 is a flowchart showing a procedure for positioning an IC chip by the image processing device and the IC moving device.
- FIG. 15 is a diagram showing a state where the first camera captures an image of the front surface of the IC chip.
- FIG. 16 is a diagram showing an image captured by a first camera in FIG. Garden 17]
- FIG. 17 is a diagram showing a state where the IC moving device grips the IC chip.
- FIG. 18 is a diagram showing a state in which the second camera is capturing an image of the back surface of the IC chip held by the moving means.
- FIG. 19 is a diagram showing an image captured by a second camera in FIG. 18.
- FIG. 20 is a diagram showing a state where the first camera is capturing an image of the holding portion of the test plate.
- FIG. 21 is a diagram showing an image captured by the first camera in FIG. Garden 22]
- FIG. 22 is a diagram showing a state where the IC moving device positions the IC chip.
- FIG. 23 is a view showing a state in which the moving means places the IC chip on the holding portion of the test plate.
- FIG. 24 is a plan view of a holding portion of a test plate holding an IC chip.
- FIG. 25 is a diagram showing a state in which the IC moving device sequentially places the IC chips on the respective holders of the test plate.
- FIG. 26 is a diagram showing a state in which each IC chip held on a test plate is simultaneously pressed against a contact portion of a test head.
- the electronic component test apparatus 1 includes a plurality (64 in the present embodiment) of IC chips (indicated by the symbol “IC” in FIGS. 1 to 26) on the test plate 110. While holding the IC chip, it is transported to the contact section 151 provided on the test head 150 and simultaneously tested.After the test, each IC chip is classified according to the test result and stored in a predetermined tray. Yes, this is a device for testing IC chips as components to be tested in a state where a thermal stress is applied to the IC chip at a temperature higher than normal temperature (high temperature) or low and low (low temperature).
- the electronic component test apparatus 1 of the present embodiment stores IC chips to be tested from now on, and classifies and stores tested IC chips.
- the IC chips before the test supplied from the IC storage unit 200 and the IC storage unit 200 are sent to the alignment unit 400, and the tested IC chips tested in the chamber unit 100 are classified and the IC storage unit 200 is classified.
- FIG. 3 is a conceptual diagram for understanding a method of arranging a test IC chip in the electronic component test apparatus according to the present embodiment. Actually, members arranged in the vertical direction are plane views. There are also parts that are shown.
- a large number of IC chips before being accommodated in the electronic component test apparatus 1 are accommodated in a customer tray (not shown), and in that state, the IC chip 1 of the electronic component test apparatus 1 shown in FIGS. IC accommodation Supplied to section 200. Then, the IC chips before the test are sequentially supplied from the customer tray of the IC accommodating section 200 to the alignment section 400 by the loader / unloader section 300, and the IC chip corresponding to the contact section 151 of the test head 150 in the alignment section 400. While being positioned relative to each other, the test plates 110 are sequentially placed on the holding portions 112 of the test plate 110 at the placement position 101 of the chamber portion 100.
- test plate 110 is moved to the application position 102 and each IC chip is subjected to high or low temperature thermal stress while being held by the test plate 110
- the test plate 110 is moved to the test position 103. Go to.
- a test is performed simultaneously by the test head 150 on the plurality of IC chips to determine whether or not the IC chip operates properly, and classification is performed according to the test results.
- the inside of the electronic component test apparatus 1 will be individually described in detail.
- the IC housing section 200 of the electronic component test apparatus 1 has a pre-test IC tray supply storage force 201 storing a customer tray containing an IC chip before the test, and a tested An empty tray supply stocker 202 for storing empty customer trays for accommodating IC chips, and a tested IC tray storage stocker 203 for storing customer trays accommodating fully tested IC chips. And a tray transport device 210 for transporting the customer tray between the stocking forces 201-203.
- this IC storage section 200 the supply of the pre-test IC tray stored in the customer tray from the pre-test IC tray supply storage force 201 to the loader / unloader section 300 and the test by the test head 150 are completed.
- the loading and unloading of the tested IC chip from the loader / unloader section 300 to the tested IC housing stop force 203 according to the test result is performed.
- the empty tray supply stocking force 202 can accommodate all IC chips and can accommodate empty customer trays.
- the supply Z The pre-tested / tested IC chips that are classified are the front surface from which the input / output terminals HB are led out (hereinafter simply referred to as the front surface of the IC chip. (Hereinafter simply referred to as the back surface of the IC chip) is stored in the customer tray in a vertically upward posture, and is stored in the pre-test IC tray supply stocker 201 and the tested IC tray storage stocker 203 in this posture. ing.
- the front surface of the IC chip corresponds to one main surface of the electronic component under test in the present invention
- the back surface of the IC chip corresponds to the other main surface of the electronic component under test in the present invention. .
- Each of the pre-test IC tray supply stocker 201, the empty tray supply stock force 202, and the tested IC tray storage stocker 203 has substantially the same structure.
- the pre-test IC tray supply stocker It is also possible to use the part of the storage force 202 for supplying the empty tray 201 as the storage force 203 for storing the tested IC tray and vice versa. Therefore, in the present test apparatus 1, the number of each stock force 201 203 can be easily changed as needed.
- two stop force STK-B are provided as stop force 201 for IC tray supply before test.
- two empty stocking forces STK-E are provided as stocking force 202 for empty tray supply.
- eight storage powers STK_1, STK-2,..., STK-8 are provided as tested storage power 203 for the IC tray. It is configured so that it can be sorted into up to eight classifications and stored. In other words, besides the good and defective products, they are classified into high-quality products, medium-speed products, low-speed products, and defective products that require retesting.
- the device base 10 of the electronic component test apparatus 1 above the IC storage unit 200 has two supply windows 301 where customer trays containing IC chips before the test are located, and a tested IC chip. There are formed four payout windows 302 on which customer trays for storing the trays are located. Below each of the windows 301 and 302, a lifting table (not shown) for raising and lowering the customer tray is provided. ) Are provided. Each of the supply windows 301 is moved up by the customer elevator lift elevators equipped with the pre-test IC chips supplied from the pre-test IC tray supply stocker 201, and moved up and down in the area of the loader / unloader section 300. It is located in.
- the empty customer trays supplied from the empty tray supply storage force 202 are lifted up by the elevators in the respective payout windows 302, and the loader Z unloader 30 It is located in the area of 0. Then, as described later, the IC chip before the test is supplied to the loader / unloader unit 300 from the customer tray located in each supply window unit 301 by the first IC transport device 310 of the loader / unloader unit 300, Further, the tested IC chip is paid out from the loader Z unloader unit 300 to the customer tray located in each payout window unit 302.
- the tray transfer device 210 provided in the IC storage section 200 includes an X-axis direction rail 211 provided along the X-axis direction and an X-axis direction rail 211 along the X-axis direction rail 211.
- the tray transport device 210 transports the customer tray containing the IC chips before the test from the pre-test IC tray supply stocker 201 to the elevating table provided below the supply window 301, or All the pre-test IC chips are supplied at the supply window 301, and the empty customer tray is conveyed to the empty tray supply storage force 202, and the dispensing window 302 is supplied from the empty tray supply storage force 202.
- the customer tray that has been fully loaded with the tested IC chips in the payout window 302 is transferred to the tested IC tray storage stocker 203 according to the test result. Classify and transport, and circulate the customer tray inside the IC storage unit 200.
- the loader / unloader section 300 of the electronic component test apparatus 1 is located within the area of the loader / unloader section 300 and the customer tray located at each of the windows 301 and 302.
- the first IC transfer device 310 that sequentially transfers the pre-tested / tested IC chips to and from the second IC transfer device 320 and the area of the loader / unloader section 300 and the area of the alignment section 400 And two sets of second IC transport devices 320 for transporting IC chips that have been tested / tested.
- the loader / unloader unit 300 In the loader / unloader unit 300, the supply of the IC chip before the test from the IC storage unit 200 to the alignment unit 400 and the completion of the test from the alignment of the tested IC chip 400 to the IC storage unit 200 are performed. And the payout to is done.
- the first IC transfer device 310 provided in the loader / unloader section 300 is similar to the first IC transfer device 310 shown in Figs. As shown in Fig. 2, two Y-axis direction rails 311 laid on the device base 10 and the two Lenores 311 reciprocate between the windows 301, 302 and the second IC carrier 320. It has a movable arm 312 that can move, and two movable heads 313 that are respectively supported by the movable arm 312 and that can reciprocate independently in the X-axis direction along the movable arm 312.
- the range including the window section 301 and each payout window section 302 and the two sets of the second IC transfer devices 320 in the area of the loader Z unloader section 300 is defined as the operation range.
- Each movable head 313 of the first IC transfer device 310 is provided with a plurality of suction pads which can be moved up and down in the Z-axis direction by a Z-axis direction actuator (not shown). Then, the suction pad of the movable head 313 moves while sucking air, so that the IC chip before the test holds the front surface of the IC chip before the test from the customer tray located at the supply window 301. Then, the IC chip is transferred to any one of the second IC transfer devices 320. In the case of a tested IC chip, the front surface of the tested IC chip is gripped from one of the second IC transfer devices 320 and the IC chip is placed in one of the payout windows 302 according to the test result. It is transported to the located customer tray. For example, about eight such suction pads are attached to each movable head 313, and eight IC chips can be transferred at one time.
- the two sets of second IC transfer devices 320 provided in the loader / unloader section 300 each include a Y-axis direction rail 321 laid on the device base 10 and a rail 321 along the Y-axis direction. And a movable head 322 that can reciprocate in the Y-axis direction.
- the movable heads 322 are provided respectively so as to correspond to two sets of movable heads 413 included in an IC moving device 410 of an alignment unit 400 described later. ing.
- the movable head 322 of each second IC transport device 320 includes a supply holding unit 323 that holds the IC chip before the test, and a payout holding unit 324 that holds the tested IC chip.
- the supply holding portion 323 and the payout holding portion 324 have eight concave portions each having a peripheral surface formed with an inclined surface, and can hold eight IC chips under test. Generally, the position of the IC chip in the state accommodated in the customer tray has a large variation. Thus, by forming the inclined surface in each concave portion of the supply holding portion 323, the first position is obtained.
- the drop position of the IC chip is corrected on the inclined surface, so that the mutual positions of the eight IC chips before the test are determined. The position and posture are corrected.
- a heater (not shown), for example, is mounted on the bottom surface of the concave portion of each payout holding portion 324, and a tested IC chip applied at a low temperature in the chamber portion 100 is used for the chamber.
- a tested IC chip applied at a low temperature in the chamber portion 100 is used for the chamber.
- each of the holding portions 323 and 324 of the movable head 322 of each of the second IC transfer devices 320 is formed, for example, by forming each of the holding portions 323 and 324 into a substantially smooth plane instead of the above-described recess. Then, the suction nozzle may be provided and held on the flat surface, or the suction nozzle may be provided on the bottom surface of the concave portion.
- the two movable heads 313 in the first IC transfer device 310 for example, one of the movable heads 313 is positioned at the supply window 301, While holding the IC chip before the test from the tray, the other movable head 313 can sort and place the tested IC chip on the customer tray located in the dispensing window 302. Therefore, the mutual working time can be absorbed, and the throughput in the electronic component test apparatus 1 can be improved.
- one of the second IC transport devices 320 is positioned within the area of the alignment unit 400. While the positioning and placing work by the IC moving device 410 described later is being performed, the other second IC transport device 320 is positioned in the area of the loader / unloader unit 300 and the first IC Since the transfer operation by the transfer device 310 can be performed, the mutual operation time can be absorbed, and the throughput in the electronic component test apparatus 1 can be improved.
- the alignment section 400 of the electronic component test apparatus 1 is moved from the second IC transfer device 320 located in the area of the alignment section 400 to the inside of the chamber section 100.
- -IC moving device 4 for moving pre-tested / tested IC chips to and from 110 10 (moving means), two second cameras 420 (second imaging means) for imaging the IC chip before the test held by the IC moving device 410, and And a positioning plate 430 for positioning the holding portion 113 of the test plate 110 on which the IC chip is placed.
- the movement of the IC chip before the test from the second IC transfer device 320 located in the area of the alignment section 400 to the test plate 110 located at the mounting position 101 of the chamber section 100 And the positioning of the IC chip before the test during the movement, and the transfer of the second IC located within the area of the alignment section 400 from the test plate 110 of the tested IC chip that has been tested in the chamber section 100.
- the movement to the device 320 is performed.
- the IC moving device 410 provided in the alignment section 400 includes two X-axis direction renoles 411 installed on the device base 10, and an X moving device independently along the two rails 411. Two movable arms 412 that can reciprocate in the axial direction, and two movable heads 413 that are respectively supported by the movable arms 412 and that can reciprocate in the Y-axis direction along the movable arms 312.
- the operating range is a range including the second IC transfer device 320 located in the area of the alignment unit 400 and the test plate 110 located at the mounting position 101 of the chamber unit 100.
- the IC moving device 410 is controlled by the control device 416 shown in FIG. 5 so that the movable arms 412 do not interfere with each other on the same rail 411.
- Each movable head 413 of the IC moving device 410 is mounted in a posture in which the optical axis is directed vertically downward with the gripping portion 414 which grips the front surface of the IC chip by the suction pad mounted on the lower end.
- a first camera 415 (first imaging means) such as a CCD camera, which can image the front surface of the IC chip.
- each of the gripping portions 414 of these movable heads 413 can rotate independently about the Z axis by a servomotor or the like, and can move up and down by a Z axis direction actuator (not shown). Operation is possible independently of each other. Therefore, each movable arm 412 can position and move the two pre-test IC chips by one reciprocating movement between the second IC carrier 320 and the test plate 110. .
- two gripping portions are provided for one movable head 413 of the IC moving device 410.
- one or three movable heads 413 may be provided for one movable head 413 in accordance with, for example, the working time required for the IC moving device 410, which is not particularly limited thereto. It is okay to provide more than one gripper 414.
- the IC moving device 410 since the IC moving device 410 includes the two movable heads 413 that can move independently of each other, the IC chip positioning and moving operations are independent of each other. Therefore, the mutual working time can be absorbed, and the throughput of the electronic component test apparatus 1 can be improved.
- the IC moving device 410 corresponds to an example of the moving means in the present invention. Therefore, the moving means in the present invention is capable of gripping and releasing the electronic device under test, moving the electronic device under test in the X_Y_Z axis direction, and further moving the electronic device under test around the ⁇ axis. It is possible to rotate. Thus, when the electronic component under test is placed on the holding surface of the test plate, the electronic component under test can be positioned at a desired position and a desired posture of the holding surface.
- Each second camera 420 provided in the alignment unit 400 is, for example, a CCD camera or the like, and has a posture in which the optical axis is vertically upward as shown in Figs. 1 and 4.
- the IC chip is held in the device base 10 between each second IC transfer device 320 and the positioning plate 430, and the back surface of the IC chip held by the IC transfer device 410 can be imaged.
- each of the second camera 420 and the first force camera 415 mounted on each movable head 413 of the IC moving device 410 includes, for example, an image processing processor or the like.
- the image processing device 450 is connected to a control device 416 that controls the operation of the IC moving device 410.
- the first camera 415 and the second camera 420 image each other, for example, when the electronic component test apparatus 1 is started up, so that the coordinate axes on the respective images are associated with each other.
- the positioning plate 430 provided in the alignment portion 400 penetrates the plate main portion 431 in the thickness direction into a substantially flat plate-shaped plate main portion 431.
- 64 openings 432 arranged in 4 rows and 16 columns are formed.
- it is fixed to the device base 10 above the mounting position 101 of the chamber section 100.
- each opening 432 of the positioning plate 430 has a size that allows the holding portion 113 of the test plate 110 to be inserted.
- the test plate 110 is placed on the test plate 110, the test plate 110 is positioned at the placement position 101 in the chamber portion 100 and rises to contact the rear surface of the positioning plate 430, and 113 are inserted into corresponding openings 432 of the positioning plate 430.
- the openings 432 of the positioning plate 430 are arranged so as to correspond to the arrangement of the contact portions 151 of the test head 150.
- the positioning and moving operation of the IC chip before the test in the alignment unit 400 is performed by first placing the IC moving device above the IC chip transferred into the area of the alignment unit 400 by the second IC transfer device 320.
- the movable head 413 of the movable head 413 moves, and the first camera 415 attached to the movable head 413 captures an image of the front surface of the IC chip before the test.
- the second camera 420 is moved onto the second camera 420, and the second camera 420 images the back surface of the IC chip.
- the image processing device 450 uses the image information captured by the first camera 415 to determine the position and orientation of the external shape of the IC chip before being gripped by the movable head 414, The position and orientation of the input / output terminal HB of the IC chip are extracted, and the relative position and orientation of the input / output terminal HB with respect to the outer shape of the IC chip before being gripped are calculated based on the extraction result. At this time, the image processing device 450 extracts the position and orientation of the external shape of the IC chip and the position and orientation of the input / output terminal HB with reference to the first coordinate system originally possessed by the first camera 415 itself. I do.
- the image processing device 450 extracts the position and orientation of the external shape of the IC chip held by the movable head 414 from the image information captured by the second camera 420. At this time, the image processing device 450 extracts the position and orientation of the external shape of the IC chip with reference to the second coordinate system that the second camera 420 itself has. Next, the image processing apparatus 450 determines the position and orientation of the input / output terminal HB of the IC chip held by the movable head 413 from the calculation results. At this time, as described above, the first coordinate system of the first camera 415 and the second coordinate system of the second camera 420 are relatively associated with each other, for example, when the electronic component test apparatus 1 is started.
- the movable head 414 holds the camera 415 based on the external shape of the IC chip and the position and orientation of the input / output terminal HB extracted based on the coordinate system of each camera 4 15 and 420.
- the position and orientation of the input / output terminal HB can be calculated.
- the position and orientation of the input / output terminal in a state of being held by the IC moving device are determined from the image information captured by the first camera and the second camera. This allows the IC moving device to hold the front of the IC chip and move it between the input / output terminals of the IC chip and the first camera to facilitate the handling of various types of IC chips. If the position and orientation of the input / output terminals of the IC chip held by the IC moving device cannot be imaged due to the presence of Positioning becomes possible.
- the movable head 413 is moved so that the first camera 415 is located above the holding portion 113 of the test plate 110, and the first camera 415 is moved to the test plate 1 on which the IC chip is mounted.
- the ten holding surfaces 114 are imaged.
- the image processing device 450 extracts the position and orientation of the image information holding surface 114 imaged by the first camera 415, and calculates the center position P of the holding surface 114 and the center of gravity of the input / output terminal HB of the IC chip.
- Position P substantially coincides with, and
- a correction amount is calculated so that the attitude of the holding surface 114 substantially matches the attitude of the input / output terminal HB of the IC chip, and the movable head 413 positions the IC chip on the holding portion based on the correction amount. And place it.
- the details of the positioning method using the image processing device 450 will be described later.
- Such high-precision positioning of the IC chip by the image processing not only causes the displacement of the IC chip caused by gripping / moving by the IC moving device in the test process, but also the external shape of the IC chip generated in the manufacturing process. It is possible to prevent a miscontact caused by a variation in the relative positions of the input / output terminals with respect to the shape.
- the image information captured by the first camera 415 is displayed.
- the third embodiment of the alignment unit 400 is newly described as a third embodiment.
- the camera 440 may be installed, and the position and orientation of the external shape of the IC chip may be extracted from the image information obtained by the third camera 440.
- a third camera 440 such as a CCD camera is placed in an orientation such that its optical axis is vertically upward, and the alignment unit 400 It is set on the device base 10 below the second IC transport device 320 located in the area of FIG. Further, in the supply holding unit 323 of the second IC transport device 320, a holding surface 323a for holding the IC chip before the test is provided so that the rear surface of the IC chip can be imaged by the third camera 440. It is composed of a transparent member.
- the third camera 440 takes an image of the outer shape of the back surface of the IC chip held by the supply holding section 323 of the second IC transport device 320 located in the area of the alignment section 400.
- the position and orientation of the external shape of the IC chip before the image processing device 450 is gripped by the IC moving device 410 are extracted from the image information captured by the third camera 440, and the first camera
- the image information captured by 415 is used only for extracting the position and orientation of the input / output terminal HB.
- the first camera 415 captures an image of the outer shape of the front surface of the IC chip in the supply holding unit 323 of the second IC carrier 320, so that the difference in the outer shape of the front surface and the back surface is obtained. Since the ray can be calculated, the image of the IC chip imaged by the second camera 420 is obtained through the image information of the position and orientation of the external shape on the back surface of the IC chip imaged by the third camera 440. From the image information of the position and orientation of the external shape on the back and the image information of the position and orientation of the external shape on the front surface of the IC chip captured by the first camera 415, the IC chip held by the IC moving device 410 is obtained. It is possible to calculate the position and orientation of the input / output terminal HB with high accuracy. As a result, more accurate positioning of the IC chip by image processing becomes possible.
- the third camera 440 and the first camera 415 take images of each other, for example, when the electronic component test apparatus 1 is started up, so that coordinate axes on the respective images are associated with each other.
- the position and orientation of the external shape of the IC and the position and orientation of the input / output terminal HB are each based on a unique coordinate system of the first and third cameras 415 and 440 themselves. And extracted.
- the third camera 440 captures an image of the back surface of the IC chip before being gripped by the IC moving device 410, and grips the image from the image information captured by the third camera 440.
- the external shape of the front surface of the IC chip and the external shape of the back surface may be different due to variations in the IC chip generated in the manufacturing process. Even so, the position and orientation of the input / output terminal HB of the gripped IC chip can be accurately determined by the image processing device 450, and positioning can be performed with higher precision.
- Bus 00 [0086] Bus 00.
- the chamber 100 of the electronic component test apparatus 1 includes a test head 150 for testing the IC chip held on the test plate 110, and an alignment unit 400.
- Moving device 120 plate moving means
- Moving device 120 for moving a test plate 110 from a mounting position 101 below the test head to a test position 103 located below the test head 150 via an application position 102 where thermal stress is applied.
- a casing 130 for sealing to cover the plate moving device 120 and applying thermal stress to the IC chip.
- the IC chips are simultaneously pressed against the contact section 151 of the test head 150 to perform a test. Done.
- two guide surfaces 152 and 153 extending substantially orthogonally to each other are provided around each contact portion 151 of the test head 150. As shown in the enlarged view of FIG. 9, the center position of each contact portion 151 is located at a distance L from the first guide surface 152 and at a distance L from the second guide surface 153.
- each contact portion 151 are arranged with reference to the first and second guide surfaces 152 and 153.
- the test head 150 is inverted above the test position 103 of the chamber section 100 as shown in FIGS.
- the setting is such that the tatto part 151 is vertically downward.
- test plate 110 circulating in the chamber section 100 is shown in FIG. 10 so that 64 IC chips can be simultaneously pressed against the contact sections 151 arranged as described above.
- 64 holding sections 151 for holding the IC chip are provided in an array of 4 rows and 16 columns so as to correspond to the arrangement of the contact sections 151.
- each holding portion 113 of test plate 110 is a substantially smooth flat surface located on the upper surface of each holding portion 113, and is provided by IC moving device 410.
- the center of the holding surface 114 is located at a distance L from the first side 113a, and the second side 1
- the first and second side surfaces 113a and 113b are located at a distance L from 13b.
- the distances L and L correspond to the first and second guides of the test head 150 described above.
- the distance from the surfaces 152, 153 to the center of the contact part 151 is substantially L and L, respectively.
- the first and second side surfaces 113a and 113b of the test plate 110 are brought into contact with and guided by the first and second guide surfaces 152 and 153 of the head 100, so that the contact pins constituting the contact portion 151 are Therefore, the input / output terminal HB of the IC chip is mechanically positioned.
- the holding surface 114 is provided with a suction nozzle 115 capable of holding the back surface of the IC chip so as to be located substantially at the center thereof.
- the product testing device 1 is formed larger than the back of IC chips of all types to be tested.
- the suction nozzle 115 provided on the holding surface 114 for example, a double-sided tape, a silicone gel, or an adhesive member such as an ultraviolet curable adhesive tape used in a semiconductor manufacturing process. Good to use ,.
- the holding surface holding the IC chip is substantially smoother than the back surface of the IC chip.
- this holding surface provides a common test even for different types of IC chips. Plates can be used, which eliminates the need for type switching work that depends on the external shape of the IC chip, making it easy to handle a wide variety of IC chips.
- an opening 112 having a slight clearance with respect to the outer diameter of the holding portion 113 is formed in the plate main body 111 of the test plate 110.
- the holding portions 113 are inserted into the portions 112, and each of the holding portions 113 is swingably supported by the plate body 111.
- the mechanical radius of the test head 150 and the test plate 110 can be reduced. It is possible to absorb an error at the time of contact due to inclination, thermal expansion / contraction due to thermal stress in the chamber section 100, or the like.
- the two side surfaces facing the first side surface 113a and the second side surface 113b respectively have a direction substantially perpendicular to the side surface.
- Springs 116 are provided so as to apply a predetermined pressing force.
- an elastic member that can apply a pressing force to the holding portion 113 such as a panel, rubber, or an elastomer, may be used.
- the plate moving device 120 provided in the chamber portion 100 includes a three-stage guide rail 121 arranged in the chamber portion 100 along the Y-axis direction.
- Three guide bases 122 that can reciprocate in the Y-axis direction on each guide rail 121 by an axial actuator (not shown) and can hold one test plate 110, respectively, and a Z-axis actuator
- Each guide base 122 of the plate moving device 120 is formed with an opening 123 through which the upper end of the lifting mechanism 124 and the upper end of the pressing mechanism 125 can pass. At the test position 103, the elevating mechanism 124 and the pressing mechanism 125 can perform the elevating operation without interfering with the guide base 122.
- the IC chip is pressed against the contact portion 151 with an appropriate pressing force on the upper part of the pressing mechanism 125 of the plate moving device 120, and the temperature of the IC applied to a high temperature is reduced.
- Pushers 126 having a heater function for keeping the temperature constant are provided in an array corresponding to the holding portion 113 of the test plate 110.
- one test plate 110 is assigned to each guide rail 121, and for example, as shown in FIG. 8A, a test plate assigned to the top guide rail 121 is provided. While the test 110 is pressed against the contact portion 151 at the test position 103 to perform the test, the test plate 110 assigned to the second-stage guide rail 121 is positioned at the application position 102 and held. Thermal stress is applied to the mounted IC chip, and the test plate 110 assigned to the lowermost guide rail 121 is located at the mounting position 101, is raised by the lifting mechanism 124, and is tested by the IC moving device 410.
- the casing 130 provided in the chamber section 100 is sealed so as to cover the plate moving device 120, and it is possible to apply a thermal stress of about -55 to 150 ° C to the IC chip.
- a thermal stress of about -55 to 150 ° C
- the casing 130 can blow hot air into the enclosed space or directly heat the lower part of the test plate 110 with a heater.
- a low temperature is applied to an IC chip, for example, liquid nitrogen can be circulated around the enclosed space to absorb heat.
- the test plate 110 is located at the mounting position 101 in the chamber section 100, and is raised by the elevating mechanism 124 to contact the rear surface of the positioning plate 430.
- the holding portion 113 is inserted into the corresponding opening 432 of the positioning plate 430.
- the first side surface 113a of the holding portion 113 abuts so as to follow the first inner wall surface 432a of the opening 432, and the second side of the holding portion 113
- the side surface 113b of the opening 432 contacts the second inner wall surface 432b of the opening 432.
- the springs 116 apply elastic force in the respective abutting directions, the respective surfaces 113a, 113b, 432a, 432b are in close contact with each other and the respective openings of the positioning plate 430
- the corresponding holding portion 113 of the test plate 110 is positioned with respect to the portion 432 and is restrained.
- the test plate 110 holding the IC chip in the holding portion 113 is lowered by the lifting mechanism 124, It moves to the application position 102 along the guide rail 121 of the corresponding step.
- the IC chip is moved to the test position 103, raised by the pressing mechanism 125, and held in each holding portion 113 of the test plate 110.
- the test is performed by simultaneously pressing the corresponding contact portions 151 of the IC chip force test head 150 that has been tested.
- the first side surface of the holding portion 113 of the test plate 110 is similar to the contact operation between the side surfaces 113 a and 113 b of the holding portion 113 and the inner wall surfaces 432 a and 432 b of the opening 432.
- 113a Force Abuts so as to follow the first guide surface 152 around the contact portion 151, and the second side surface 113b of the holding portion 113 of the test plate 110 contacts the second guide around the contact portion 151.
- the IC chip on the test plate 110 is moved by the IC moving device 410.
- the center of gravity position P and posture of the input / output terminal HB are the center position P and posture of the holding surface 114.
- the IC chip is positioned with high precision by image processing in advance outside the chamber, and the side surface of the test plate holding section is guided inside the chamber by the guide surface of the test head.
- Mechanical positioning by contacting the It is possible to achieve high-precision positioning of IC chips using an image processing method without installing a CCD camera or the like in the member.
- the holding portion in the test plate, can be swung with respect to the plate main body.
- the holding portion when the IC chip is placed by the IC moving device, the holding portion is positioned by the positioning plate. '' By restricting, it is possible to regulate the relative positional relationship between the respective holding portions and to uniquely determine the relative positional relationship between the respective holding surfaces 114. It is not necessary to recognize the holding surface by the first camera every time the IC chip is mounted, so that the operation speed of the movement and positioning operation of the IC moving device can be improved.
- one of the movable heads 313 of the first IC transport device 310 approaches the customer tray supplied from the pre-test IC tray force 201 to the supply window 301, and the movable head 313 contacts the lower end of the movable head 313. Eight IC chips before test are simultaneously sucked and gripped by the provided suction head. Then, the movable head 313 raises a Z-axis direction actuator (not shown) in the Z-axis direction, slides along the movable arm 312 and the Y-axis direction rail 311, and moves within the area of the loader / unloader section 300.
- a Z-axis direction actuator not shown
- the IC chip is moved to one of the second IC transport devices 320 located at the second position, and the IC chip is transferred to the second IC transport device 320. Then, the second IC carrier 320 holding the IC chip moves the movable head 322 along the Y-axis direction rail 321 into the area of the alignment section 400.
- the IC moving device 410 is moved so that the first camera 415 is located above the second IC transport device 320 that has moved into the area of the alignment section 400.
- One movable head 413 moves (step S10 in FIG. 14), and the first camera 415 captures an image of the front surface of the IC chip (step S20).
- the image processing device 450 uses the image information captured by the first camera 415 to determine the relative position and orientation of the input / output terminal HB with respect to the external shape of the IC chip, as shown in FIG. (x, y, ⁇ ) is calculated (step S30).
- the image processing apparatus 450 takes in the image information captured by the first camera 415, and uses an image processing method such as binarization on the image information to obtain the outer shape of the IC chip. Extract the shape and input / output terminal HB. Next, based on the first coordinate system of the first camera 415, the coordinates (X, y) of the center position P of the extracted external shape and the extracted
- the relative position (X, y) is calculated.
- the image processing apparatus 450 first uses the contour line forming the extracted external shape of the IC chip. Is calculated. Next, a regular row composed of the extracted input / output terminals HB is extracted, an approximate straight line passing through the center of each input / output terminal HB constituting the row is calculated for each row, and the plurality of Calculate the average straight line of the approximate straight lines.
- the relative position of the input / output terminal HB to the external shape of the IC chip is calculated. Is calculated. Note that the outer shape of this IC chip
- the relative position and orientation (X, y, ⁇ ) of the input / output terminals HB are determined by the IC chip manufacturing process.
- one of the movable heads 413 of the IC moving device 410 holds the one holding portion 414 by sucking the approximate center of the IC chip with the suction pad (step S40). ). Then, the movable head 414 repeats the operations from step S10 to S40 again for the other IC chips held in the second IC transport device 320 located in the area of the alignment section 400, and The other IC chip is gripped by the gripping portion 414.
- the movable head 414 moves so that one IC chip is positioned above the second camera 420 as shown in FIG. S50), the second camera 420 captures an image of the back surface of the IC chip held by the movable head 414 (step S60).
- the image processing device 450 converts the image information captured by the second camera 420 into the second coordinates of the second camera 420 as shown in FIG. System
- the position and orientation (x ′, y ′, ⁇ ′) of the external shape of the IC chip held by the movable head 413 of the IC moving device 410 are calculated, and the IC chip calculated in step S30 is calculated.
- Step S70 the first coordinate system of the first camera 415 and the second coordinate system of the second camera 420 are relatively associated with each other, for example, when the electronic component test apparatus 1 is started.
- the position of the movable head 414 is determined based on the external shape of the IC chip and the position and orientation of the input / output terminal HB extracted based on the coordinate system of each of the cameras 415 and 420.
- the position and orientation of the input / output terminal HB can be calculated.
- the main cause is a displacement that occurs when the movable head 414 sucks and moves.
- the first camera 415 is positioned above the holder 113 on which the test plate 110 is to be mounted.
- One of the movable heads 414 moves so as to be placed (Step S80), and the first camera 415 captures an image of the holding surface 114 located below (Step S90).
- the test plate 110 is located at the mounting position 101 in the chamber section 100, and is moved up by the elevating mechanism 124 to come into contact with the rear surface of the positioning plate 430.
- the holding portion 113 is inserted into the corresponding opening 432 of the positioning plate 430, and the first and second side surfaces 113a and 113b of the holding portion 113 are connected to the first and second inner wall surfaces 432a and 432a of the opening 432. 432b (Abuts against this and is pressed by spring 116, so it is in close contact, and the corresponding holding part 113 of the test plate 110 is positioned and restrained against each opening 432 of the positioning plate 430, RU
- the image processing apparatus 450 stores the image data based on the image information captured by the first camera 415 as shown in FIG.
- the coordinates (X, y) of the center position ⁇ of the surface 114 and the posture ⁇ ⁇ of the holding surface are calculated, and the holding surface 114 is calculated.
- the first coordinate system of the first camera 415 and the second coordinate system of the second camera 420 are relatively associated with each other, for example, when the electronic component test apparatus 1 is started. This makes the calculated position and orientation of the input / output terminal HB of the IC chip coincide with the position and orientation of the holding surface 114 calculated based on the coordinate system of the first camera 415 independently. It is possible to calculate an appropriate correction amount.
- each holding portion 113 of the test plate 110 is positioned and restrained by the opening 432 of the positioning plate 430, and the relative positional relationship between the holding surfaces 114 is unambiguous. Therefore, the imaging of the holding surface 114 in step S90 is performed, for example, only at the first time when the type is changed, and thereafter, the imaging is omitted by using the first data, or the IC moving device 410 is used. It can be omitted based on the mechanical positional relationship between the positioning plate 430 and the positioning plate 430.
- the IC chip is positioned above the holding surface 114 on which the test plate 100 is placed. Then, the movable head 413 moves, and based on the correction amount calculated in step S100, the movable head 413 grips the IC chip and independently drives the gripper 414, The IC chip is positioned with respect to the holding surface 114 of the test plate 110 (Step S110).
- one gripper 414 descends, stops suction of the suction pad of the gripper 414, and places the IC chip on the holder 113 (step S120). ). Simultaneously with or before stopping the suction of the suction pad of the gripping portion 414, the bowing I of the suction nozzle 115 of the holding portion 113 of the test plate 110 is started, and the holding portion 113 holds the IC chip. In this state, as shown in FIG. 24, the center position P, posture,
- the operations up to steps S110 and S130 are performed, and when the other IC chip is placed on the test plate 110, one movable head 414 of the IC moving device 410 is connected to the alignment section 400.
- the operations from steps S10 to S130 in FIG. 14 are repeated until the IC chip is held on all the holding portions 113 on the test plate 110.
- one of the movable heads 413 of the IC moving device 410 performs the operation of positioning and moving the IC chip
- the other movable head 413 performs the same operation on the same test plate 110.
- the operation time is absorbed, and the throughput of the electronic component test apparatus 1 is improved.
- the test plate 110 When the IC chip is placed on all the holding portions 113 on the test plate 110, the test plate 110 is lowered by the elevating mechanism 124 of the plate moving device 120 and taken into the chamber portion 100, and It is moved to the application position 102 along the step guide rail 121. When a desired thermal stress is applied to the IC chip after waiting at the application position 102 for a predetermined time, the IC chip is moved to the test position 103, raised by the pressing mechanism 125, and held by the holding portions 113 of the test plate 110. As shown in FIG. 26, the test is performed by simultaneously pressing the corresponding contact portions 151 of the test head 150 as shown in FIG. The result of this test is stored in the storage device of the electronic component test apparatus 1 with an address determined by, for example, the identification number given to the test plate 110 and the number of the IC chip assigned inside the test plate 110.
- the distances L and L from the first and second side surfaces 113a and 113b to the center position P of the holding surface 114 are the same.
- V 3 4 are the same, the center position P of the holding surface 114, the posture, and the input / output terminal HB.
- the IC chip is held by the holder 113 so that the center of gravity position P and posture substantially match.
- the input / output terminals HB of the IC chip can be positioned relative to the contact pins of the contact portion 151 of the test head 150.
- the tested IC chip that has been tested by the test head 150 is moved from the chamber section 100 to the alignment section 400 by the plate moving apparatus 120, and is moved from the alignment section 400 to the Z unloader section by the IC moving apparatus 410. It is moved to 300 and is stored in the customer tray located in the payout window 302 according to the test result by the first IC transfer device 310 of the loader / unloader unit 300.
- a force using a BGA type IC chip with ball-shaped input / output terminals derived as an example of an electronic component is not particularly limited in the present invention.
- the relative position and orientation of the input / output terminals with respect to the external shape of the IC chip are calculated.
- the present invention is not particularly limited to this. It is also possible to insert a marker, extract the position and orientation of the IC chip using the marker, and calculate the relative position and orientation of the input / output terminal with respect to the marker.
- the first and second guide surfaces around the contact portion are brought into contact with the first and first side surfaces of the holding portion, thereby holding the contact portion.
- the present invention is not particularly limited to this.
- a guide pin is formed in the contact portion, a guide hole is formed in the holding portion, and the guide pin is formed at the time of contact. Position the holding part with respect to the contact part by inserting it into the guide hole.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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US10/558,385 US7511522B2 (en) | 2003-05-30 | 2004-05-28 | Electronic device test apparatus |
JP2005506502A JPWO2004106945A1 (ja) | 2003-05-30 | 2004-05-28 | 電子部品試験装置 |
Applications Claiming Priority (2)
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JPPCT/JP03/06835 | 2003-05-30 | ||
PCT/JP2003/006835 WO2004106954A1 (ja) | 2003-05-30 | 2003-05-30 | 電子部品試験装置 |
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WO2004106945A1 WO2004106945A1 (ja) | 2004-12-09 |
WO2004106945A2 true WO2004106945A2 (ja) | 2004-12-09 |
WO2004106945A3 WO2004106945A3 (ja) | 2005-02-17 |
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PCT/JP2003/006835 WO2004106954A1 (ja) | 2003-05-30 | 2003-05-30 | 電子部品試験装置 |
PCT/JP2004/007363 WO2004106945A2 (ja) | 2003-05-30 | 2004-05-28 | 電子部品試験装置 |
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PCT/JP2003/006835 WO2004106954A1 (ja) | 2003-05-30 | 2003-05-30 | 電子部品試験装置 |
Country Status (7)
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US (1) | US7511522B2 (ja) |
JP (1) | JPWO2004106945A1 (ja) |
KR (1) | KR100815490B1 (ja) |
CN (1) | CN1788205A (ja) |
AU (1) | AU2003241977A1 (ja) |
TW (1) | TW200504376A (ja) |
WO (2) | WO2004106954A1 (ja) |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2008044305A1 (fr) * | 2006-10-12 | 2008-04-17 | Advantest Corporation | Appareil de transfert de plateau et appareil de test de composant électronique doté de cet appareil de transfert de plateau |
JPWO2008044305A1 (ja) * | 2006-10-12 | 2010-02-04 | 株式会社アドバンテスト | トレイ搬送装置及びそれを備えた電子部品試験装置 |
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TWI679428B (zh) * | 2019-02-01 | 2019-12-11 | 迅得機械股份有限公司 | 訊號接通裝置及訊號接通方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2004106945A3 (ja) | 2005-02-17 |
TW200504376A (en) | 2005-02-01 |
KR100815490B1 (ko) | 2008-03-24 |
JPWO2004106945A1 (ja) | 2006-07-20 |
WO2004106954A1 (ja) | 2004-12-09 |
AU2003241977A1 (en) | 2005-01-21 |
US7511522B2 (en) | 2009-03-31 |
US20070069752A1 (en) | 2007-03-29 |
CN1788205A (zh) | 2006-06-14 |
KR20060003110A (ko) | 2006-01-09 |
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