UA91346C2 - Устройство и способ для получения силанов - Google Patents
Устройство и способ для получения силановInfo
- Publication number
- UA91346C2 UA91346C2 UAA200704230A UAA200704230A UA91346C2 UA 91346 C2 UA91346 C2 UA 91346C2 UA A200704230 A UAA200704230 A UA A200704230A UA A200704230 A UAA200704230 A UA A200704230A UA 91346 C2 UA91346 C2 UA 91346C2
- Authority
- UA
- Ukraine
- Prior art keywords
- distillation column
- chimney tray
- side reactor
- discharge
- line
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/009—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping in combination with chemical reactions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0242—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly vertical
- B01J8/025—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly vertical in a cylindrical shaped bed
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S203/00—Distillation: processes, separatory
- Y10S203/06—Reactor-distillation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Silicon Compounds (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004045245A DE102004045245B4 (de) | 2004-09-17 | 2004-09-17 | Vorrichtung und Verfahren zur Herstellung von Silanen |
Publications (1)
Publication Number | Publication Date |
---|---|
UA91346C2 true UA91346C2 (ru) | 2010-07-26 |
Family
ID=35063075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UAA200704230A UA91346C2 (ru) | 2004-09-17 | 2005-07-21 | Устройство и способ для получения силанов |
Country Status (11)
Country | Link |
---|---|
US (1) | US8038961B2 (ru) |
EP (1) | EP1791613A1 (ru) |
JP (1) | JP4847958B2 (ru) |
KR (1) | KR101325796B1 (ru) |
CN (1) | CN1774397B (ru) |
BR (1) | BRPI0515468A (ru) |
DE (1) | DE102004045245B4 (ru) |
NO (1) | NO20071960L (ru) |
RU (1) | RU2403079C2 (ru) |
UA (1) | UA91346C2 (ru) |
WO (1) | WO2006029930A1 (ru) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005005383A1 (de) * | 2005-02-05 | 2006-08-10 | Degussa Ag | Verfahren zur kontinuierlichen Herstellung kohlenstoffhaltiger Mono-, Oligo- und/oder Polyborosilazane |
DE102005041137A1 (de) * | 2005-08-30 | 2007-03-01 | Degussa Ag | Reaktor, Anlage und großtechnisches Verfahren zur kontinuierlichen Herstellung von hochreinem Siliciumtetrachlorid oder hochreinem Germaniumtetrachlorid |
DE102006003464A1 (de) * | 2006-01-25 | 2007-07-26 | Degussa Gmbh | Verfahren zur Erzeugung einer Siliciumschicht auf einer Substratoberfläche durch Gasphasenabscheidung |
DE102007007874A1 (de) | 2007-02-14 | 2008-08-21 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Silane |
DE102007014107A1 (de) * | 2007-03-21 | 2008-09-25 | Evonik Degussa Gmbh | Aufarbeitung borhaltiger Chlorsilanströme |
CN103272637A (zh) * | 2007-04-10 | 2013-09-04 | 赢创德固赛有限责任公司 | 用于制备通式R(4-m-n)AClmHn,特别是硅烷的化合物或高纯化合物的方法和装置 |
DE102007028254A1 (de) | 2007-06-20 | 2008-12-24 | Wacker Chemie Ag | Verfahren zur Herstellung von SiH-haltigen Silanen |
DE102007048937A1 (de) * | 2007-10-12 | 2009-04-16 | Evonik Degussa Gmbh | Entfernung von polaren organischen Verbindungen und Fremdmetallen aus Organosilanen |
DE102007050199A1 (de) * | 2007-10-20 | 2009-04-23 | Evonik Degussa Gmbh | Entfernung von Fremdmetallen aus anorganischen Silanen |
DE102007059170A1 (de) * | 2007-12-06 | 2009-06-10 | Evonik Degussa Gmbh | Katalysator und Verfahren zur Dismutierung von Wasserstoff enthaltenden Halogensilanen |
DE102008004397A1 (de) * | 2008-01-14 | 2009-07-16 | Evonik Degussa Gmbh | Verfahren zur Verminderung des Gehaltes von Elementen, wie Bor, in Halogensilanen sowie Anlage zur Durchführung des Verfahrens |
DE102008002537A1 (de) * | 2008-06-19 | 2009-12-24 | Evonik Degussa Gmbh | Verfahren zur Entfernung von Bor enthaltenden Verunreinigungen aus Halogensilanen sowie Anlage zur Durchführung des Verfahrens |
US20120213687A1 (en) * | 2008-08-05 | 2012-08-23 | Mitsubishi Materials Corporation | Method for manufacturing trichlorosilane |
JP5316290B2 (ja) | 2008-08-05 | 2013-10-16 | 三菱マテリアル株式会社 | トリクロロシラン製造装置及び製造方法 |
JP5563471B2 (ja) * | 2008-10-31 | 2014-07-30 | 昭和電工株式会社 | モノシランおよびテトラアルコキシシランの製造方法 |
DE102008054537A1 (de) * | 2008-12-11 | 2010-06-17 | Evonik Degussa Gmbh | Entfernung von Fremdmetallen aus Siliciumverbindungen durch Adsorption und/oder Filtration |
KR101666473B1 (ko) * | 2008-12-25 | 2016-10-14 | 가부시끼가이샤 도꾸야마 | 클로로실란의 제조 방법 |
CN102092720B (zh) * | 2009-02-13 | 2013-03-27 | 李明成 | 高纯硅烷气体连续制备装置 |
WO2010128743A1 (ko) * | 2009-05-07 | 2010-11-11 | 주식회사 케이씨씨 | 실란 제조용 수직형 반응기 및 이를 이용한 실란의 연속적 회수방법 |
RU2414421C2 (ru) | 2009-05-07 | 2011-03-20 | Федеральное государственное унитарное предприятие "Государственный ордена Трудового Красного Знамени научно-исследовательский институт химии и технологии элементоорганических соединений" (ФГУП ГНИИХТЭОС) | Способ непрерывного получения моносилана |
DE102009003163A1 (de) * | 2009-05-15 | 2010-11-25 | Wacker Chemie Ag | Silandestillation mit reduziertem Energieeinsatz |
DE102009027728A1 (de) * | 2009-07-15 | 2011-01-20 | Evonik Degussa Gmbh | Verfahren zur Behandlung von Katalysator-Präkursoren |
DE102009027730A1 (de) | 2009-07-15 | 2011-01-27 | Evonik Degussa Gmbh | Verahren und Verwendung von aminofunktionellen Harzen zur Dismutierung von Halogensilanen und zur Entfernung von Fremdmetallen |
CN101987296B (zh) * | 2009-07-30 | 2013-12-04 | 比亚迪股份有限公司 | 歧化SiH2Cl2制备SiH4的方法 |
DE102009037155B3 (de) * | 2009-08-04 | 2010-11-04 | Schmid Silicon Technology Gmbh | Verfahren und Anlage zur Herstellung von Trichlorsilan |
DE102009053804B3 (de) | 2009-11-18 | 2011-03-17 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
DE102010002342A1 (de) | 2010-02-25 | 2011-08-25 | Evonik Degussa GmbH, 45128 | Verwendung der spezifischen Widerstandsmessung zur indirekten Bestimmung der Reinheit von Silanen und Germanen und ein entsprechendes Verfahren |
JP5337749B2 (ja) * | 2010-03-10 | 2013-11-06 | 信越化学工業株式会社 | トリクロロシランの製造方法 |
CN102344145B (zh) * | 2010-07-29 | 2013-05-08 | 比亚迪股份有限公司 | 一种三氯氢硅制备硅烷的方法 |
CN101920178B (zh) * | 2010-08-30 | 2012-04-25 | 哈尔滨工业大学 | 制备甲硅烷气体的管式反应器系统及使用其制备甲硅烷的方法 |
DE102010043648A1 (de) | 2010-11-09 | 2012-05-10 | Evonik Degussa Gmbh | Verfahren zur selektiven Spaltung höherer Silane |
CN102001667B (zh) * | 2010-11-13 | 2012-11-28 | 宁夏阳光硅业有限公司 | 三氯硅烷合成装置及方法 |
US8715597B2 (en) * | 2010-12-20 | 2014-05-06 | Memc Electronic Materials, Inc. | Production of polycrystalline silicon in substantially closed-loop systems that involve disproportionation operations |
CN102009979B (zh) * | 2010-12-23 | 2011-10-26 | 江西嘉柏新材料有限公司 | 一种利用循环热对三氯氢硅进行精馏提纯的方法 |
DE102011004058A1 (de) * | 2011-02-14 | 2012-08-16 | Evonik Degussa Gmbh | Monochlorsilan, Verfahren und Vorrichtung zu dessen Herstellung |
CN102219222B (zh) * | 2011-04-22 | 2012-12-26 | 武汉新硅科技有限公司 | 光纤用高纯四氯化硅连续精馏方法 |
DE102011078749A1 (de) * | 2011-07-06 | 2013-01-10 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Trisilylamin aus Monochlorsilan und Ammoniak |
US20130156675A1 (en) * | 2011-12-16 | 2013-06-20 | Rec Silicon Inc | Process for production of silane and hydrohalosilanes |
EP2991930A4 (en) * | 2013-05-04 | 2016-12-21 | Sitec Gmbh | SYSTEM AND METHOD FOR PRODUCING SILANE |
US9352971B2 (en) * | 2013-06-14 | 2016-05-31 | Rec Silicon Inc | Method and apparatus for production of silane and hydrohalosilanes |
CN103408024B (zh) * | 2013-07-29 | 2015-08-05 | 中国恩菲工程技术有限公司 | 用于制备硅烷的方法 |
CN103408020B (zh) * | 2013-07-29 | 2015-08-05 | 中国恩菲工程技术有限公司 | 用于制备硅烷的设备 |
MY195545A (en) | 2014-01-24 | 2023-01-31 | Hanwha Chemical Corp | Purification Method And Purification Apparatus For Off-Gas |
WO2016061278A1 (en) * | 2014-10-14 | 2016-04-21 | Sitec Gmbh | Distillation process |
DE102015203618A1 (de) * | 2015-02-27 | 2016-09-01 | Schmid Silicon Technology Gmbh | Kolonne und Verfahren zur Disproportionierung von Chlorsilanen zu Monosilan und Tetrachlorsilan sowie Anlage zur Gewinnung von Monosilan |
CN105000564B (zh) * | 2015-07-17 | 2020-05-26 | 江苏中能硅业科技发展有限公司 | 用于制备硅烷的二氯二氢硅的生产方法 |
KR101709754B1 (ko) * | 2016-05-16 | 2017-02-23 | 베니트엠 주식회사 | 기체분배장치 및 기체 분배비율을 조절하는 방법 |
CN106955578B (zh) * | 2017-05-24 | 2023-04-11 | 襄阳泽东化工集团股份有限公司 | 一种氨法烟气脱硫循环液优化平衡装置 |
Family Cites Families (31)
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---|---|---|---|---|
US2220009A (en) * | 1938-05-28 | 1940-10-29 | Phillips Petroleum Co | Fractionator distillate outlet |
CA988275A (en) * | 1970-12-17 | 1976-05-04 | Carl J. Litteral | Disproportionation of chlorosilicon hydrides |
US3968199A (en) * | 1974-02-25 | 1976-07-06 | Union Carbide Corporation | Process for making silane |
US4676967A (en) | 1978-08-23 | 1987-06-30 | Union Carbide Corporation | High purity silane and silicon production |
US4307254A (en) * | 1979-02-21 | 1981-12-22 | Chemical Research & Licensing Company | Catalytic distillation process |
FR2526003A1 (fr) | 1982-05-03 | 1983-11-04 | Rhone Poulenc Spec Chim | Procede de fabrication de silane a partir de trichlorosilane |
JPS60145907A (ja) * | 1984-01-11 | 1985-08-01 | Denki Kagaku Kogyo Kk | シラン化合物の連続的製造方法 |
JPS60215513A (ja) * | 1984-04-06 | 1985-10-28 | Denki Kagaku Kogyo Kk | シラン化合物の連続的製造方法 |
JPS6153107A (ja) * | 1984-08-22 | 1986-03-17 | Denki Kagaku Kogyo Kk | シラン化合物の連続的製造方法 |
JPS61138540A (ja) * | 1984-12-11 | 1986-06-26 | Denki Kagaku Kogyo Kk | クロルシランの不均化触媒及びシラン化合物の連続的製法 |
JPS61151017A (ja) * | 1984-12-25 | 1986-07-09 | Denki Kagaku Kogyo Kk | シラン化合物の連続的製造法 |
JPS61191513A (ja) * | 1985-02-19 | 1986-08-26 | Denki Kagaku Kogyo Kk | シラン化合物の連続的製造方法 |
DE3711444A1 (de) | 1987-04-04 | 1988-10-13 | Huels Troisdorf | Verfahren und vorrichtung zur herstellung von dichlorsilan |
DE3805282A1 (de) * | 1988-02-19 | 1989-08-31 | Wacker Chemitronic | Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen |
DE3925357C1 (ru) * | 1989-07-31 | 1991-04-25 | Degussa Ag, 6000 Frankfurt, De | |
FI92318C (fi) * | 1992-03-18 | 1994-10-25 | Neste Oy | Menetelmä ja laitteisto tertiaaristen eetterien valmistamiseksi |
DE19654516C1 (de) | 1996-12-27 | 1998-10-01 | Degussa | Verfahren zur Auftrennung des Produktgasgemisches der katalytischen Synthese von Methylmercaptan |
DE19860146A1 (de) * | 1998-12-24 | 2000-06-29 | Bayer Ag | Verfahren und Anlage zur Herstellung von Silan |
US6103942A (en) * | 1999-04-08 | 2000-08-15 | Midwest Research Institute | Method of high purity silane preparation |
DE10017168A1 (de) * | 2000-04-07 | 2001-10-11 | Bayer Ag | Verfahren und Anlage zur Herstellung von Silan |
DE10034493C1 (de) | 2000-07-15 | 2001-11-29 | Degussa | Verfahren zur Herstellung von Organosilylalkylpolysulfanen |
DE10057521B4 (de) | 2000-11-21 | 2009-04-16 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Silanen |
DE10061680A1 (de) * | 2000-12-11 | 2002-06-20 | Solarworld Ag | Verfahren zur Herstellung von Silan |
DE10243022A1 (de) | 2002-09-17 | 2004-03-25 | Degussa Ag | Abscheidung eines Feststoffs durch thermische Zersetzung einer gasförmigen Substanz in einem Becherreaktor |
DE10331952A1 (de) | 2003-07-15 | 2005-02-10 | Degussa Ag | Vorrichtung und Verfahren zur diskontinuierlichen Polykondensation |
DE102004008042A1 (de) | 2004-02-19 | 2005-09-01 | Goldschmidt Gmbh | Verfahren zur Herstellung von Aminosäureestern und deren Säure-Additions-Salzen |
DE102004038718A1 (de) * | 2004-08-10 | 2006-02-23 | Joint Solar Silicon Gmbh & Co. Kg | Reaktor sowie Verfahren zur Herstellung von Silizium |
US7658900B2 (en) * | 2005-03-05 | 2010-02-09 | Joint Solar Silicon Gmbh & Co. Kg | Reactor and process for the preparation of silicon |
DE102006003464A1 (de) * | 2006-01-25 | 2007-07-26 | Degussa Gmbh | Verfahren zur Erzeugung einer Siliciumschicht auf einer Substratoberfläche durch Gasphasenabscheidung |
DE102007052325A1 (de) * | 2007-03-29 | 2009-05-07 | Erk Eckrohrkessel Gmbh | Verfahren zum gleitenden Temperieren chemischer Substanzen mit definierten Ein- und Ausgangstemperaturen in einem Erhitzer und Einrichtung zur Durchführung des Verfahrens |
DE102007050199A1 (de) * | 2007-10-20 | 2009-04-23 | Evonik Degussa Gmbh | Entfernung von Fremdmetallen aus anorganischen Silanen |
-
2004
- 2004-09-17 DE DE102004045245A patent/DE102004045245B4/de not_active Expired - Fee Related
-
2005
- 2005-07-21 KR KR1020077006137A patent/KR101325796B1/ko not_active IP Right Cessation
- 2005-07-21 CN CN2005800002985A patent/CN1774397B/zh not_active Expired - Fee Related
- 2005-07-21 RU RU2007114043/05A patent/RU2403079C2/ru not_active IP Right Cessation
- 2005-07-21 US US11/575,226 patent/US8038961B2/en not_active Expired - Fee Related
- 2005-07-21 WO PCT/EP2005/053544 patent/WO2006029930A1/en active Application Filing
- 2005-07-21 JP JP2007531731A patent/JP4847958B2/ja not_active Expired - Fee Related
- 2005-07-21 UA UAA200704230A patent/UA91346C2/ru unknown
- 2005-07-21 BR BRPI0515468-5A patent/BRPI0515468A/pt not_active IP Right Cessation
- 2005-07-21 EP EP05763051A patent/EP1791613A1/en not_active Withdrawn
-
2007
- 2007-04-17 NO NO20071960A patent/NO20071960L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
BRPI0515468A (pt) | 2008-07-22 |
RU2403079C2 (ru) | 2010-11-10 |
KR20070053269A (ko) | 2007-05-23 |
JP4847958B2 (ja) | 2011-12-28 |
DE102004045245B4 (de) | 2007-11-15 |
KR101325796B1 (ko) | 2013-11-05 |
JP2008513325A (ja) | 2008-05-01 |
US20080095691A1 (en) | 2008-04-24 |
EP1791613A1 (en) | 2007-06-06 |
WO2006029930A1 (en) | 2006-03-23 |
DE102004045245A1 (de) | 2006-04-06 |
CN1774397A (zh) | 2006-05-17 |
RU2007114043A (ru) | 2008-10-27 |
NO20071960L (no) | 2007-04-17 |
CN1774397B (zh) | 2012-07-04 |
US8038961B2 (en) | 2011-10-18 |
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