TWI691388B - 基板處理裝置 - Google Patents

基板處理裝置 Download PDF

Info

Publication number
TWI691388B
TWI691388B TW106131822A TW106131822A TWI691388B TW I691388 B TWI691388 B TW I691388B TW 106131822 A TW106131822 A TW 106131822A TW 106131822 A TW106131822 A TW 106131822A TW I691388 B TWI691388 B TW I691388B
Authority
TW
Taiwan
Prior art keywords
arm
scara
axis
arms
end effector
Prior art date
Application number
TW106131822A
Other languages
English (en)
Chinese (zh)
Other versions
TW201811513A (zh
Inventor
基士德 阿里色吉爾
莫拉 傑洛
傑亞拉曼 克利許納斯美
米契爾 卓
羅勃 卡維尼
Original Assignee
美商布魯克斯自動機械公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商布魯克斯自動機械公司 filed Critical 美商布魯克斯自動機械公司
Publication of TW201811513A publication Critical patent/TW201811513A/zh
Application granted granted Critical
Publication of TWI691388B publication Critical patent/TWI691388B/zh

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y10S901/15—Jointed arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/27—Arm part
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Polarising Elements (AREA)
  • Manufacturing Of Printed Wiring (AREA)
TW106131822A 2011-03-11 2012-03-12 基板處理裝置 TWI691388B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161451912P 2011-03-11 2011-03-11
US61/451,912 2011-03-11

Publications (2)

Publication Number Publication Date
TW201811513A TW201811513A (zh) 2018-04-01
TWI691388B true TWI691388B (zh) 2020-04-21

Family

ID=46796797

Family Applications (2)

Application Number Title Priority Date Filing Date
TW106131822A TWI691388B (zh) 2011-03-11 2012-03-12 基板處理裝置
TW101108322A TWI614831B (zh) 2011-03-11 2012-03-12 基板處理裝置

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101108322A TWI614831B (zh) 2011-03-11 2012-03-12 基板處理裝置

Country Status (6)

Country Link
US (7) US8918203B2 (enExample)
JP (5) JP6059156B2 (enExample)
KR (5) KR102047033B1 (enExample)
CN (1) CN103503127B (enExample)
TW (2) TWI691388B (enExample)
WO (1) WO2012125572A2 (enExample)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012031635A1 (en) * 2010-09-10 2012-03-15 Abb Research Ltd. Industrial robot
KR102047033B1 (ko) * 2011-03-11 2019-11-20 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴
KR20180128987A (ko) * 2011-09-16 2018-12-04 퍼시몬 테크놀로지스 코포레이션 기판 이동 장치
KR20130083857A (ko) * 2012-01-13 2013-07-23 노벨러스 시스템즈, 인코포레이티드 듀얼 암 진공 로봇
US10363665B2 (en) * 2012-07-10 2019-07-30 Persimmon Technologies Corporation Linear robot arm with multiple end effectors
JP5532110B2 (ja) * 2012-11-16 2014-06-25 株式会社安川電機 基板搬送ロボットおよび基板搬送方法
US9190306B2 (en) * 2012-11-30 2015-11-17 Lam Research Corporation Dual arm vacuum robot
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6703937B2 (ja) * 2013-03-15 2020-06-03 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板堆積システム、ロボット移送装置、及び電子デバイス製造のための方法
KR102308221B1 (ko) 2013-06-05 2021-10-01 퍼시몬 테크놀로지스 코포레이션 로봇 및 적응형 배치 시스템 및 방법
JP6229324B2 (ja) 2013-06-14 2017-11-15 セイコーエプソン株式会社 ロボット、ロボット制御装置およびロボットの制御方法
US10424498B2 (en) * 2013-09-09 2019-09-24 Persimmon Technologies Corporation Substrate transport vacuum platform
SG2013069893A (en) * 2013-09-13 2015-04-29 Jcs Echigo Pte Ltd Material handling system and method
JP2015076433A (ja) * 2013-10-07 2015-04-20 東京エレクトロン株式会社 基板搬送方法
KR102402324B1 (ko) 2014-01-28 2022-05-26 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
WO2015120369A1 (en) 2014-02-10 2015-08-13 Persimmon Technologies, Corp. Robot having predetermined orientation
DE102014009892B4 (de) * 2014-07-04 2018-05-30 gomtec GmbH Antriebseinheit mit magnetischer Schnittstelle
KR102075827B1 (ko) * 2014-10-10 2020-02-10 가와사끼 쥬고교 가부시끼 가이샤 기판 반송 로봇 및 그 운전 방법
CN107000202B (zh) * 2014-12-26 2020-03-17 川崎重工业株式会社 多关节机器人及其模块
CN107000201B (zh) * 2014-12-26 2020-07-03 川崎重工业株式会社 双臂机器人
EP3056320B1 (en) * 2015-02-10 2018-12-05 F. Hoffmann-La Roche AG Robotic device and laboratory automation system comprising robotic device
US11691268B2 (en) * 2015-03-12 2023-07-04 Persimmon Technologies Corporation Robot having a variable transmission ratio
US9866035B2 (en) * 2015-03-27 2018-01-09 Irobot Corporation Rotatable coupling
CN107534000B (zh) * 2015-04-20 2021-12-17 应用材料公司 缓冲腔室晶片加热机构和支撑机械臂
KR102587203B1 (ko) 2015-07-13 2023-10-10 브룩스 오토메이션 인코퍼레이티드 온 더 플라이 자동 웨이퍼 센터링 방법 및 장치
WO2017041007A1 (en) * 2015-09-04 2017-03-09 Douglas Machine Inc. Improved robotic article handling system & operations
CN106548970B (zh) * 2015-09-23 2019-10-11 北京北方华创微电子装备有限公司 升降装置及半导体加工设备
US10124492B2 (en) * 2015-10-22 2018-11-13 Lam Research Corporation Automated replacement of consumable parts using end effectors interfacing with plasma processing system
US9827678B1 (en) 2016-05-16 2017-11-28 X Development Llc Kinematic design for robotic arm
US9827677B1 (en) 2016-05-16 2017-11-28 X Development Llc Robotic device with coordinated sweeping tool and shovel tool
TWI724971B (zh) * 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US11270904B2 (en) * 2016-07-12 2022-03-08 Brooks Automation Us, Llc Substrate processing apparatus
JP6635888B2 (ja) * 2016-07-14 2020-01-29 東京エレクトロン株式会社 プラズマ処理システム
JP6747136B2 (ja) * 2016-07-22 2020-08-26 東京エレクトロン株式会社 基板処理装置
US11065760B2 (en) 2016-08-09 2021-07-20 Inventec Appliances (Pudong) Corporation Multiaxial robot with cover
CN106181982A (zh) * 2016-08-09 2016-12-07 英华达（上海）科技有限公司 多轴机器人
CA3107180C (en) * 2016-09-06 2022-10-04 Advanced Intelligent Systems Inc. Mobile work station for transporting a plurality of articles
TWI815803B (zh) * 2017-01-26 2023-09-21 美商布魯克斯自動機械美國公司 用於基板輸送設備位置補償之方法及設備、基板輸送經驗臂下垂測繪設備、基板輸送設備、和基板處理工具
US10651067B2 (en) * 2017-01-26 2020-05-12 Brooks Automation, Inc. Method and apparatus for substrate transport apparatus position compensation
US10580682B2 (en) * 2017-02-15 2020-03-03 Persimmon Technologies, Corp. Material-handling robot with multiple end-effectors
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10629472B2 (en) * 2017-08-17 2020-04-21 Persimmon Technologies Corporation Material handling robot
US11020852B2 (en) * 2017-10-05 2021-06-01 Brooks Automation, Inc. Substrate transport apparatus with independent accessory feedthrough
CN107962550B (zh) * 2017-11-07 2020-12-11 大连理工大学 一种具有部分解耦和动平衡特性的scara高速并联机械手
US10155309B1 (en) * 2017-11-16 2018-12-18 Lam Research Corporation Wafer handling robots with rotational joint encoders
CN109994358B (zh) * 2017-12-29 2021-04-27 中微半导体设备(上海)股份有限公司 一种等离子处理系统和等离子处理系统的运行方法
TWI815869B (zh) * 2018-03-16 2023-09-21 美商布魯克斯自動機械美國公司 基板輸送裝置及用於基板輸送裝置之方法
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
US11192239B2 (en) * 2018-10-05 2021-12-07 Brooks Automation, Inc. Substrate processing apparatus
TWI818096B (zh) * 2018-10-05 2023-10-11 美商布魯克斯自動機械美國公司 基板處理裝置、操作基板處理裝置之方法，及在基板處理裝置中處理基板之方法
EP3672040A1 (en) * 2018-12-17 2020-06-24 Nexperia B.V. Device for enabling a rotating and translating movement by means of a single motor; apparatus and system comprising such a device
US11583756B2 (en) 2019-03-08 2023-02-21 Infivention Technologies Pvt. Ltd. Electronic game board
JP7597725B2 (ja) * 2019-03-11 2024-12-10 パーシモン テクノロジーズ コーポレイション 非対称のデュアルエンドエフェクタロボットアーム
JP6677366B1 (ja) * 2019-03-12 2020-04-08 日本精工株式会社 ワークチェンジャ、ワーク搬送装置、加工装置、及び、リング軸受の製造方法、機械の製造方法、車両の製造方法
US11850742B2 (en) * 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
US11633848B2 (en) 2019-07-31 2023-04-25 X Development Llc Independent pan of coaxial robotic arm and perception housing
JP6880519B2 (ja) * 2019-11-11 2021-06-02 株式会社安川電機 ロボットシステム、ロボットの制御方法、半導体製造システム
US11569111B2 (en) * 2019-12-02 2023-01-31 Brooks Automation Us, Llc Substrate processing apparatus
JP2021097162A (ja) * 2019-12-18 2021-06-24 東京エレクトロン株式会社 基板処理装置及び載置台
US11235935B2 (en) * 2020-01-23 2022-02-01 Brooks Automation, Inc. Substrate transport apparatus
TWI776479B (zh) * 2020-04-22 2022-09-01 漢辰科技股份有限公司 離子佈植裝置及機械手臂
CN113838788B (zh) * 2020-06-24 2025-09-19 拓荆科技股份有限公司 晶圆自动承载系统及采用该系统传送晶圆的方法
US12255089B2 (en) * 2020-07-02 2025-03-18 Applied Materials, Inc. Robot apparatus, systems, and methods for transporting substrates in electronic device manufacturing
KR102272535B1 (ko) * 2020-12-14 2021-07-05 (주)볼타오토메이션 반송로봇용 듀얼타입의 반송암모듈
US12208517B2 (en) * 2021-03-18 2025-01-28 Persimmon Technologies Corporation Distributed-architecture robot with multiple linkages
US12163228B2 (en) * 2021-05-18 2024-12-10 Mellanox Technologies, Ltd. CVD system with substrate carrier and associated mechanisms for moving substrate therethrough
KR102394121B1 (ko) * 2021-10-08 2022-05-04 (주) 티로보틱스 기판 이송 로봇을 챔버 내에서 주행하기 위한 주행 로봇
US12142508B2 (en) * 2021-10-12 2024-11-12 Applied Materials, Inc. Factory interface robots usable with integrated load locks
US12226896B2 (en) 2021-10-22 2025-02-18 Applied Materials, Inc. Operations of robot apparatuses within rectangular mainframes
KR20240144217A (ko) * 2022-01-27 2024-10-02 퍼시몬 테크놀로지스 코포레이션 다수의 엔드-이펙터들을 가진 횡단 로봇
KR102431679B1 (ko) * 2022-02-15 2022-08-12 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
KR102431664B1 (ko) * 2022-02-15 2022-08-12 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
US20240071802A1 (en) * 2022-08-26 2024-02-29 Applied Materials, Inc. Operations of robot apparatuses within rectangular mainframes
CN116021551B (zh) * 2023-03-31 2023-06-02 成都思越智能装备股份有限公司 一种连杆式机械臂
CN116476106A (zh) * 2023-04-28 2023-07-25 中芯智达半导体科技(上海)有限公司 大角度运动末端执行机构及无死角晶圆机器人
WO2025050119A1 (en) * 2023-09-01 2025-03-06 Brooks Automation Us, Llc Substrate processing apparatus
CN117593675B (zh) * 2024-01-18 2024-11-12 内蒙古工业大学 一种光伏清洗机器人的智能系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6547510B1 (en) * 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
US20040001750A1 (en) * 2002-05-09 2004-01-01 Izya Kremerman Dual arm robot
US20040240971A1 (en) * 2003-06-02 2004-12-02 Tokyo Electron Limited Substrate processing apparatus and substrate transferring method
US20070071581A1 (en) * 2005-07-11 2007-03-29 Ulysses Gilchrist Process apparatus with on-the-fly workpiece centering

Family Cites Families (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1309082A (en) 1969-06-24 1973-03-07 Plessey Co Ltd Control of fluidic devices
US4365527A (en) 1981-04-03 1982-12-28 Gardner Bender, Inc. Automatic wire connector attaching apparatus
US4597708A (en) 1984-06-04 1986-07-01 Tencor Instruments Wafer handling apparatus
JPS63236342A (ja) * 1987-03-25 1988-10-03 Matsushita Electric Ind Co Ltd ウエハ搬送装置
US4823629A (en) 1987-08-27 1989-04-25 Ha Jin S Automatic transmission system
JPH01133951A (ja) 1987-11-20 1989-05-26 Olympus Optical Co Ltd 光学素子の成形方法
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
JP2808826B2 (ja) 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
US5209765A (en) 1991-05-08 1993-05-11 Atlantic Richfield Company Centrifugal separator systems for multi-phase fluids
JPH05109866A (ja) * 1991-10-16 1993-04-30 Nec Corp ウエハ移載ロボツト
DE9207087U1 (de) 1992-05-26 1992-11-26 Kuechler, Jürgen, Dr., 3556 Weimar Rotationskolbenmaschine
EP0696242B2 (en) 1993-04-16 2004-10-13 Brooks Automation, Inc. Articulated arm transfer device
JP3369255B2 (ja) * 1993-05-28 2003-01-20 株式会社日立国際電気 半導体製造方法及び半導体製造装置
KR0129582B1 (ko) 1994-06-23 1998-04-06 김주용 다중 기판 전달 장치
JPH0870033A (ja) * 1994-08-26 1996-03-12 Kokusai Electric Co Ltd 半導体製造装置のウェーハ移載機
JPH08330377A (ja) * 1995-05-29 1996-12-13 Hitachi Ltd 基板搬送装置及び半導体製造方法
US6360144B1 (en) 1995-07-10 2002-03-19 Newport Corporation Self-teaching robot arm position method
US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
JPH09162257A (ja) * 1995-12-05 1997-06-20 Metsukusu:Kk 薄型基板の搬送装置
US20040005211A1 (en) * 1996-02-28 2004-01-08 Lowrance Robert B. Multiple independent robot assembly and apparatus and control system for processing and transferring semiconductor wafers
TW365568B (en) 1996-03-22 1999-08-01 Komatsu Mfg Co Ltd Robotic machine for transporting articles
JPH10329069A (ja) * 1997-03-31 1998-12-15 Daihen Corp 搬送システムの制御方法
JPH1116981A (ja) 1997-06-20 1999-01-22 Dainippon Screen Mfg Co Ltd 基板処理装置
JP3806812B2 (ja) * 1997-07-16 2006-08-09 株式会社ダイヘン ２アーム方式の搬送用ロボット装置
EP2099061A3 (en) * 1997-11-28 2013-06-12 Mattson Technology, Inc. Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
US6450755B1 (en) 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader
JP2000072248A (ja) * 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
JP2000174091A (ja) 1998-12-01 2000-06-23 Fujitsu Ltd 搬送装置及び製造装置
US6256555B1 (en) 1998-12-02 2001-07-03 Newport Corporation Robot arm with specimen edge gripping end effector
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6486444B1 (en) * 1999-06-03 2002-11-26 Applied Materials, Inc. Load-lock with external staging area
JP2002158272A (ja) 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
JP4682378B2 (ja) 2000-12-05 2011-05-11 川崎重工業株式会社 ダブルアームおよびそれを備えたロボット
JP2002172570A (ja) * 2000-12-05 2002-06-18 Kawasaki Heavy Ind Ltd ダブルアームおよびそれを備えたロボット
US20020098072A1 (en) 2001-01-19 2002-07-25 Applied Materials, Inc. Dual bladed robot apparatus and associated method
JP4628602B2 (ja) 2001-04-05 2011-02-09 ナブテスコ株式会社 ロボットアーム
US20030014155A1 (en) 2001-07-12 2003-01-16 Applied Material, Inc. High temperature substrate transfer robot
US6663333B2 (en) * 2001-07-13 2003-12-16 Axcelis Technologies, Inc. Wafer transport apparatus
US7578649B2 (en) 2002-05-29 2009-08-25 Brooks Automation, Inc. Dual arm substrate transport apparatus
KR20040010280A (ko) * 2002-07-22 2004-01-31 어플라이드 머티어리얼스, 인코포레이티드 고온 기판 이송 로봇
US6935486B2 (en) 2002-08-28 2005-08-30 Production Automation, Inc. Bushing system for live roller conveyor
JP2004288719A (ja) * 2003-03-19 2004-10-14 Tokyo Electron Ltd 基板搬送装置及び基板処理装置
JP4294984B2 (ja) * 2003-03-19 2009-07-15 東京エレクトロン株式会社 基板搬送装置及び基板処理装置
JP4245387B2 (ja) * 2003-03-19 2009-03-25 東京エレクトロン株式会社 基板搬送装置及び基板処理装置
AU2003296827A1 (en) 2002-12-13 2004-07-09 Recif Device for gripping a semiconductor plate through a transfer opening, using the closure of the opening
US7245989B2 (en) * 2002-12-20 2007-07-17 Brooks Automation, Inc. Three-degree-of-freedom parallel robot arm
JP4513435B2 (ja) 2003-07-16 2010-07-28 東京エレクトロン株式会社 搬送装置
US7837425B2 (en) 2003-07-16 2010-11-23 Tokyo Electron Limited Transportation apparatus and drive mechanism
JP4493955B2 (ja) 2003-09-01 2010-06-30 東京エレクトロン株式会社 基板処理装置及び搬送ケース
US20070269297A1 (en) * 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
JP4262064B2 (ja) 2003-11-28 2009-05-13 株式会社ダイヘン 搬送ロボット
KR100527669B1 (ko) 2003-12-19 2005-11-25 삼성전자주식회사 로봇 암 장치
JP2005189259A (ja) 2003-12-24 2005-07-14 Konica Minolta Business Technologies Inc 静電荷像現像用トナー
KR101398665B1 (ko) * 2004-06-09 2014-05-26 브룩스 오토메이션 인코퍼레이티드 이중 스카라 아암
JP4732716B2 (ja) 2004-06-29 2011-07-27 株式会社アルバック 搬送装置及びその制御方法並びに真空処理装置
US7704036B2 (en) 2004-07-09 2010-04-27 Rorze Corporation Drive source and transportation robot
US8668422B2 (en) 2004-08-17 2014-03-11 Mattson Technology, Inc. Low cost high throughput processing platform
JP4719010B2 (ja) * 2005-01-21 2011-07-06 日本電産サンキョー株式会社 産業用ロボット
JP4974118B2 (ja) 2005-02-12 2012-07-11 アプライド マテリアルズ インコーポレイテッド 多軸真空モータアセンブリ
JP4732805B2 (ja) 2005-06-03 2011-07-27 株式会社エヌ・ティ・ティ・ドコモ サービス利用方法及び端末
US7904182B2 (en) * 2005-06-08 2011-03-08 Brooks Automation, Inc. Scalable motion control system
JP2007005582A (ja) * 2005-06-24 2007-01-11 Asm Japan Kk 基板搬送装置及びそれを搭載した半導体基板製造装置
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
JP4534886B2 (ja) * 2005-07-15 2010-09-01 東京エレクトロン株式会社 処理システム
JP4648161B2 (ja) 2005-11-14 2011-03-09 平田機工株式会社 ダブルアーム列式基板搬送用ロボット
WO2007061603A2 (en) 2005-11-21 2007-05-31 Applied Materials, Inc. Methods and apparatus for transferring substrates during electronic device manufacturing
US8741096B2 (en) * 2006-06-29 2014-06-03 Wonik Ips Co., Ltd. Apparatus for semiconductor processing
KR101263857B1 (ko) 2006-08-11 2013-05-13 어플라이드 머티어리얼스, 인코포레이티드 로봇 손목 조립체를 위한 장치 및 방법
US9117859B2 (en) * 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
JP4851895B2 (ja) 2006-09-13 2012-01-11 新日鉄エンジニアリング株式会社 シュレッダーダストの溶融処理方法
JP4744427B2 (ja) * 2006-12-27 2011-08-10 大日本スクリーン製造株式会社 基板処理装置
JP4712731B2 (ja) * 2007-01-25 2011-06-29 株式会社アルバック 搬送ロボット、真空装置
US8950998B2 (en) 2007-02-27 2015-02-10 Brooks Automation, Inc. Batch substrate handling
US7946800B2 (en) 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
JP4970128B2 (ja) 2007-04-27 2012-07-04 日本電産サンキョー株式会社 産業用ロボット及び集合処理装置
US9437469B2 (en) * 2007-04-27 2016-09-06 Brooks Automation, Inc. Inertial wafer centering end effector and transport apparatus
KR101629734B1 (ko) * 2007-05-08 2016-06-13 브룩스 오토메이션 인코퍼레이티드 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
KR101366651B1 (ko) 2007-05-31 2014-02-25 어플라이드 머티어리얼스, 인코포레이티드 이중 스카라 로봇 링키지의 리치를 연장하기 위한 방법 및 장치
US8275681B2 (en) 2007-06-12 2012-09-25 Media Forum, Inc. Desktop extension for readily-sharable and accessible media playlist and media
US8283813B2 (en) * 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
KR20090001050A (ko) * 2007-06-29 2009-01-08 삼성전자주식회사 기판 반송 로봇
JP5102564B2 (ja) * 2007-08-31 2012-12-19 日本電産サンキョー株式会社 産業用ロボット
WO2010008929A1 (en) * 2008-07-15 2010-01-21 Ulvac, Inc. Work-piece transfer systems and methods
JP5109866B2 (ja) 2008-08-13 2012-12-26 カシオ計算機株式会社 撮像装置、撮像方法及びプログラム
JP5059729B2 (ja) * 2008-09-30 2012-10-31 株式会社日立ハイテクコントロールシステムズ ウェーハ搬送ロボット及びウェーハ搬送装置
KR20100058984A (ko) * 2008-11-25 2010-06-04 세메스 주식회사 웨이퍼 이송로봇
CN102326244B (zh) 2009-01-11 2014-12-17 应用材料公司 用于在电子器件制造中传输基板的机械手系统、装置及方法
JP5501375B2 (ja) 2009-01-11 2014-05-21 アプライド マテリアルズ インコーポレイテッド ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法
JP2010207938A (ja) * 2009-03-09 2010-09-24 Yaskawa Electric Corp 多段モータを駆動源とする基板搬送ロボット
WO2010118769A1 (en) * 2009-04-15 2010-10-21 Abb Research Ltd An apparatus for a robot arm
JP5424987B2 (ja) 2009-06-12 2014-02-26 三菱樹脂株式会社 積層ポリエステルフィルム
JP5480562B2 (ja) * 2009-08-26 2014-04-23 日本電産サンキョー株式会社 産業用ロボット
JP5304601B2 (ja) 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
US8408082B2 (en) 2009-11-18 2013-04-02 General Electric Company Apparatus to measure fluids in a conduit
JP2011119556A (ja) 2009-12-07 2011-06-16 Yaskawa Electric Corp 水平多関節ロボットおよびそれを備えた搬送装置
JP2011199121A (ja) * 2010-03-23 2011-10-06 Ulvac Japan Ltd 搬送装置
JP2012028659A (ja) * 2010-07-27 2012-02-09 Hitachi High-Technologies Corp 真空処理装置
KR102047033B1 (ko) * 2011-03-11 2019-11-20 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6547510B1 (en) * 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
US20040001750A1 (en) * 2002-05-09 2004-01-01 Izya Kremerman Dual arm robot
US20040240971A1 (en) * 2003-06-02 2004-12-02 Tokyo Electron Limited Substrate processing apparatus and substrate transferring method
US20070071581A1 (en) * 2005-07-11 2007-03-29 Ulysses Gilchrist Process apparatus with on-the-fly workpiece centering

Also Published As

Publication number Publication date
US20190304823A1 (en) 2019-10-03
WO2012125572A2 (en) 2012-09-20
KR102879642B1 (ko) 2025-10-30
KR102618895B1 (ko) 2023-12-28
JP2022000915A (ja) 2022-01-04
JP2017085127A (ja) 2017-05-18
US20150110584A1 (en) 2015-04-23
US9852935B2 (en) 2017-12-26
US20120232690A1 (en) 2012-09-13
JP7546726B2 (ja) 2024-09-06
JP7294940B2 (ja) 2023-06-20
US11978649B2 (en) 2024-05-07
JP2023113891A (ja) 2023-08-16
US11195738B2 (en) 2021-12-07
KR102392186B1 (ko) 2022-04-28
WO2012125572A4 (en) 2013-10-03
JP2014509083A (ja) 2014-04-10
US20220172972A1 (en) 2022-06-02
JP6571629B2 (ja) 2019-09-04
US20160133493A1 (en) 2016-05-12
TW201308505A (zh) 2013-02-16
TWI614831B (zh) 2018-02-11
KR20220058659A (ko) 2022-05-09
JP2019208073A (ja) 2019-12-05
TW201811513A (zh) 2018-04-01
US10325795B2 (en) 2019-06-18
US20200321232A1 (en) 2020-10-08
KR102047033B1 (ko) 2019-11-20
US8918203B2 (en) 2014-12-23
WO2012125572A3 (en) 2013-07-04
CN103503127B (zh) 2016-05-11
KR20210054061A (ko) 2021-05-12
KR20190099104A (ko) 2019-08-23
JP7297363B2 (ja) 2023-06-26
US10600665B2 (en) 2020-03-24
CN103503127A (zh) 2014-01-08
KR20140027949A (ko) 2014-03-07
JP6059156B2 (ja) 2017-01-11
US9230841B2 (en) 2016-01-05
KR20240005187A (ko) 2024-01-11
US20180138066A1 (en) 2018-05-17
KR102436038B1 (ko) 2022-08-24

Similar Documents

Publication Publication Date Title
TWI691388B (zh) 基板處理裝置
US12263587B2 (en) Dual arm robot