TWI571941B - 用於低溫冷卻的系統及方法 - Google Patents
用於低溫冷卻的系統及方法 Download PDFInfo
- Publication number
- TWI571941B TWI571941B TW100116971A TW100116971A TWI571941B TW I571941 B TWI571941 B TW I571941B TW 100116971 A TW100116971 A TW 100116971A TW 100116971 A TW100116971 A TW 100116971A TW I571941 B TWI571941 B TW I571941B
- Authority
- TW
- Taiwan
- Prior art keywords
- load
- refrigerant
- control unit
- primary refrigerant
- temperature
- Prior art date
Links
- 238000001816 cooling Methods 0.000 title claims description 109
- 238000000034 method Methods 0.000 title claims description 53
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 342
- 239000003507 refrigerant Substances 0.000 claims description 296
- 238000005057 refrigeration Methods 0.000 claims description 192
- 229910052757 nitrogen Inorganic materials 0.000 claims description 171
- 239000007789 gas Substances 0.000 claims description 125
- 238000012546 transfer Methods 0.000 claims description 48
- 239000004065 semiconductor Substances 0.000 claims description 28
- 238000007710 freezing Methods 0.000 claims description 24
- 238000002955 isolation Methods 0.000 claims description 24
- 230000008014 freezing Effects 0.000 claims description 22
- 238000009835 boiling Methods 0.000 claims description 19
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 15
- 238000004458 analytical method Methods 0.000 claims description 12
- 239000007791 liquid phase Substances 0.000 claims description 12
- 239000001307 helium Substances 0.000 claims description 11
- 229910052734 helium Inorganic materials 0.000 claims description 11
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 11
- 239000012071 phase Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 9
- 238000012544 monitoring process Methods 0.000 claims description 9
- 238000005468 ion implantation Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 229910052754 neon Inorganic materials 0.000 claims description 7
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000012472 biological sample Substances 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000001311 chemical methods and process Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 229910052724 xenon Inorganic materials 0.000 claims description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 claims description 2
- 230000002792 vascular Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 229910052684 Cerium Inorganic materials 0.000 claims 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 15
- 238000009413 insulation Methods 0.000 description 8
- 239000002826 coolant Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000003134 recirculating effect Effects 0.000 description 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 231100001261 hazardous Toxicity 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000003303 reheating Methods 0.000 description 2
- 230000005514 two-phase flow Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/01—Heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/06—Several compression cycles arranged in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0251—Compressor control by controlling speed with on-off operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0253—Compressor control by controlling speed with variable speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/21—Temperatures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
- F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/34—Accessory or component
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33380110P | 2010-05-12 | 2010-05-12 | |
| US36351410P | 2010-07-12 | 2010-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201201282A TW201201282A (en) | 2012-01-01 |
| TWI571941B true TWI571941B (zh) | 2017-02-21 |
Family
ID=44515101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100116971A TWI571941B (zh) | 2010-05-12 | 2011-05-12 | 用於低溫冷卻的系統及方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10156386B2 (enExample) |
| EP (2) | EP3040646B1 (enExample) |
| JP (2) | JP5815682B2 (enExample) |
| KR (2) | KR101705032B1 (enExample) |
| CN (1) | CN102918336B (enExample) |
| TW (1) | TWI571941B (enExample) |
| WO (1) | WO2011143398A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI705221B (zh) * | 2018-03-07 | 2020-09-21 | 英屬開曼群島商睿能創意公司 | 環境狀態控制裝置、濕度控制方法及車輛系統 |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8011191B2 (en) | 2009-09-30 | 2011-09-06 | Thermo Fisher Scientific (Asheville) Llc | Refrigeration system having a variable speed compressor |
| JP5815682B2 (ja) | 2010-05-12 | 2015-11-17 | ブルックス オートメーション インコーポレイテッド | 極低温冷却のためのシステム |
| JP5938932B2 (ja) * | 2012-02-14 | 2016-06-22 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| JP5942459B2 (ja) * | 2012-02-14 | 2016-06-29 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| US20140260380A1 (en) * | 2013-03-15 | 2014-09-18 | Energy Recovery Systems Inc. | Compressor control for heat transfer system |
| CN103900315B (zh) * | 2014-01-07 | 2016-08-17 | 沃姆制冷设备(上海)有限公司 | 超导器件及材料的液氮降温方法和实现该方法的超导制冷机 |
| WO2016074720A1 (de) * | 2014-11-13 | 2016-05-19 | Leica Mikrosysteme Gmbh | Gefriermaschine mit behälter für gefrorene proben |
| CN105571187A (zh) * | 2016-01-04 | 2016-05-11 | 上海理工大学 | 采用Xe为低温级制冷剂的超低温复叠制冷系统 |
| KR102001251B1 (ko) * | 2016-09-21 | 2019-07-18 | 한국전력공사 | 액체질소 순환 및 냉동기를 통합한 초전도 케이블 냉각시스템 |
| CN106642776A (zh) * | 2016-11-24 | 2017-05-10 | 深圳市天健机电设备有限公司 | 一种集中水冷系统 |
| CN106766542A (zh) * | 2016-12-28 | 2017-05-31 | 上海原能细胞医学技术有限公司 | 生物样本冷库 |
| CN107818940B (zh) * | 2017-11-30 | 2020-04-10 | 上海华力微电子有限公司 | 一种静电吸盘装置及其温控方法 |
| KR102608957B1 (ko) | 2018-08-27 | 2023-12-01 | 삼성전자주식회사 | 플라즈마 처리 장치 |
| KR102646904B1 (ko) | 2018-12-04 | 2024-03-12 | 삼성전자주식회사 | 플라즈마 처리 장치 |
| WO2021086983A1 (en) | 2019-10-29 | 2021-05-06 | TMRW Life Sciences, Inc. | Apparatus to facilitate transfer of biological specimens stored at cryogenic conditions |
| CN111043805B (zh) * | 2019-12-30 | 2021-09-10 | 成都新连通低温设备有限公司 | 一种大功率液氮温区变温压力实验系统 |
| EP4154257A4 (en) | 2020-05-18 | 2023-12-06 | TMRW Life Sciences, Inc. | HANDLING AND TRACKING BIOLOGICAL SAMPLES FOR CRYOGENIC STORAGE |
| TWI731722B (zh) * | 2020-06-19 | 2021-06-21 | 國立臺北科技大學 | 具有自動除霜功能的冷凍系統及其自動除霜控制方法 |
| WO2022066943A1 (en) | 2020-09-24 | 2022-03-31 | TMRW Life Sciences, Inc. | Workstation and apparatus to facilitate transfer of biological specimens stored at cryogenic conditions |
| AU2021351505B2 (en) | 2020-10-02 | 2024-11-21 | TMRW Life Sciences, Inc. | Interrogation device and/or system having alignment feature(s) for wireless transponder tagged specimen containers and/or carriers |
| CN112218507A (zh) * | 2020-11-10 | 2021-01-12 | 中天(江苏)防务装备有限公司 | 一种集成桅杆综合冷却系统 |
| USD963194S1 (en) | 2020-12-09 | 2022-09-06 | TMRW Life Sciences, Inc. | Cryogenic vial carrier |
| CA3200508A1 (en) | 2020-12-10 | 2022-06-16 | TMRW Life Sciences, Inc. | Specimen holder with wireless transponder for attachment to specimen collection body |
| EP4252009B1 (en) | 2021-01-13 | 2025-03-05 | TMRW Life Sciences, Inc. | System to pick and/or place specimen containers |
| CN115406132B (zh) * | 2021-05-28 | 2023-09-15 | 中国科学院理化技术研究所 | 一种氦低温制冷系统及制冷方法 |
| GB202115660D0 (en) * | 2021-11-01 | 2021-12-15 | Edwards Vacuum Llc | Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system |
| US12204989B2 (en) * | 2021-12-13 | 2025-01-21 | The Boeing Company | Cryogenic cooling system |
| KR102489501B1 (ko) * | 2022-01-13 | 2023-01-18 | 크라이오에이치앤아이(주) | 반도체 제조 장비용 온도 조절 장치 |
| WO2023191963A1 (en) * | 2022-03-30 | 2023-10-05 | Microsoft Technology Licensing, Llc | Cryogenic removal of carbon dioxide from the atmosphere |
| KR102654974B1 (ko) * | 2022-05-25 | 2024-04-08 | 크라이오에이치앤아이(주) | 반도체 제조 장비용 온도 조절 장치 |
| KR102857513B1 (ko) * | 2023-11-03 | 2025-09-11 | 주식회사 엘지에너지솔루션 | 싸이클링 테스트 장치 |
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| US3733845A (en) * | 1972-01-19 | 1973-05-22 | D Lieberman | Cascaded multicircuit,multirefrigerant refrigeration system |
| US5060481A (en) * | 1989-07-20 | 1991-10-29 | Helix Technology Corporation | Method and apparatus for controlling a cryogenic refrigeration system |
| US5694776A (en) * | 1996-01-30 | 1997-12-09 | The Boc Group, Inc. | Refrigeration method and apparatus |
| US6324856B1 (en) * | 2000-07-07 | 2001-12-04 | Spx Corporation | Multiple stage cascade refrigeration system having temperature responsive flow control and method |
| US20040129015A1 (en) * | 2001-02-23 | 2004-07-08 | Apparao Tamirisa V V R | Ultra-low temperature closed-loop recirculating gas chilling system |
| US20050086974A1 (en) * | 2003-07-18 | 2005-04-28 | General Electric Company | Cryogenic cooling system and method with cold storage device |
| US20050227503A1 (en) * | 2002-04-15 | 2005-10-13 | Erich Reitinger | Method and device for conditioning semiconductor wafers and/or hybrids |
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| US4279127A (en) | 1979-03-02 | 1981-07-21 | Air Products And Chemicals, Inc. | Removable refrigerator for maintaining liquefied gas inventory |
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| JPS61128065A (ja) * | 1984-11-28 | 1986-06-16 | 株式会社日立製作所 | 極低温冷凍機 |
| US4840043A (en) * | 1986-05-16 | 1989-06-20 | Katsumi Sakitani | Cryogenic refrigerator |
| JPH0776641B2 (ja) * | 1986-05-16 | 1995-08-16 | ダイキン工業株式会社 | 極低温冷凍機 |
| US4951471A (en) * | 1986-05-16 | 1990-08-28 | Daikin Industries, Ltd. | Cryogenic refrigerator |
| JPS6375760A (ja) | 1986-09-19 | 1988-04-06 | Canon Inc | 放電装置の製造方法 |
| JPH0643647Y2 (ja) | 1986-11-05 | 1994-11-14 | 株式会社日立製作所 | 極低温冷凍装置 |
| USRE33878E (en) | 1987-01-20 | 1992-04-14 | Helix Technology Corporation | Cryogenic recondenser with remote cold box |
| JPS63220048A (ja) * | 1987-03-09 | 1988-09-13 | ダイキン工業株式会社 | 極低温冷凍装置 |
| US4829785A (en) * | 1987-12-04 | 1989-05-16 | The Boeing Company | Cryogenic cooling system with precooling stage |
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| TWI705221B (zh) * | 2018-03-07 | 2020-09-21 | 英屬開曼群島商睿能創意公司 | 環境狀態控制裝置、濕度控制方法及車輛系統 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6203800B2 (ja) | 2017-09-27 |
| KR101705032B1 (ko) | 2017-02-09 |
| US20120038120A1 (en) | 2012-02-16 |
| EP3040646B1 (en) | 2017-11-15 |
| US20190120528A1 (en) | 2019-04-25 |
| JP5815682B2 (ja) | 2015-11-17 |
| US11215384B2 (en) | 2022-01-04 |
| EP2569583B1 (en) | 2016-03-02 |
| KR20170015568A (ko) | 2017-02-08 |
| CN102918336A (zh) | 2013-02-06 |
| JP2015227775A (ja) | 2015-12-17 |
| KR101905161B1 (ko) | 2018-10-08 |
| TW201201282A (en) | 2012-01-01 |
| WO2011143398A1 (en) | 2011-11-17 |
| JP2013538324A (ja) | 2013-10-10 |
| US10156386B2 (en) | 2018-12-18 |
| CN102918336B (zh) | 2016-08-03 |
| EP2569583A1 (en) | 2013-03-20 |
| KR20130116162A (ko) | 2013-10-23 |
| EP3040646A1 (en) | 2016-07-06 |
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