JP2013538324A5 - - Google Patents

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JP2013538324A5
JP2013538324A5 JP2013510291A JP2013510291A JP2013538324A5 JP 2013538324 A5 JP2013538324 A5 JP 2013538324A5 JP 2013510291 A JP2013510291 A JP 2013510291A JP 2013510291 A JP2013510291 A JP 2013510291A JP 2013538324 A5 JP2013538324 A5 JP 2013538324A5
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Japan
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load
control unit
primary
refrigerant
primary refrigerant
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JP2013510291A
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Japanese (ja)
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JP5815682B2 (ja
JP2013538324A (ja
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Priority claimed from PCT/US2011/036213 external-priority patent/WO2011143398A1/en
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JP2013510291A 2010-05-12 2011-05-12 極低温冷却のためのシステム Active JP5815682B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US33380110P 2010-05-12 2010-05-12
US61/333,801 2010-05-12
US36351410P 2010-07-12 2010-07-12
US61/363,514 2010-07-12
PCT/US2011/036213 WO2011143398A1 (en) 2010-05-12 2011-05-12 System and method for cryogenic cooling

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015186263A Division JP6203800B2 (ja) 2010-05-12 2015-09-24 極低温冷却のためのシステム

Publications (3)

Publication Number Publication Date
JP2013538324A JP2013538324A (ja) 2013-10-10
JP2013538324A5 true JP2013538324A5 (enExample) 2014-06-26
JP5815682B2 JP5815682B2 (ja) 2015-11-17

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JP2013510291A Active JP5815682B2 (ja) 2010-05-12 2011-05-12 極低温冷却のためのシステム
JP2015186263A Active JP6203800B2 (ja) 2010-05-12 2015-09-24 極低温冷却のためのシステム

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JP2015186263A Active JP6203800B2 (ja) 2010-05-12 2015-09-24 極低温冷却のためのシステム

Country Status (7)

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US (2) US10156386B2 (enExample)
EP (2) EP3040646B1 (enExample)
JP (2) JP5815682B2 (enExample)
KR (2) KR101705032B1 (enExample)
CN (1) CN102918336B (enExample)
TW (1) TWI571941B (enExample)
WO (1) WO2011143398A1 (enExample)

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CN112218507A (zh) * 2020-11-10 2021-01-12 中天（江苏）防务装备有限公司 一种集成桅杆综合冷却系统
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CN115406132B (zh) * 2021-05-28 2023-09-15 中国科学院理化技术研究所 一种氦低温制冷系统及制冷方法
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KR102489501B1 (ko) * 2022-01-13 2023-01-18 크라이오에이치앤아이(주) 반도체 제조 장비용 온도 조절 장치
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