KR101705032B1 - 극저온 냉각용 시스템 및 방법 - Google Patents
극저온 냉각용 시스템 및 방법 Download PDFInfo
- Publication number
- KR101705032B1 KR101705032B1 KR1020127032539A KR20127032539A KR101705032B1 KR 101705032 B1 KR101705032 B1 KR 101705032B1 KR 1020127032539 A KR1020127032539 A KR 1020127032539A KR 20127032539 A KR20127032539 A KR 20127032539A KR 101705032 B1 KR101705032 B1 KR 101705032B1
- Authority
- KR
- South Korea
- Prior art keywords
- delete delete
- rod
- main refrigerant
- temperature
- refrigerant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 87
- 238000000034 method Methods 0.000 title claims description 54
- 239000003507 refrigerant Substances 0.000 claims abstract description 229
- 238000005057 refrigeration Methods 0.000 claims abstract description 138
- 238000009413 insulation Methods 0.000 claims abstract description 60
- 238000007710 freezing Methods 0.000 claims abstract description 19
- 230000008014 freezing Effects 0.000 claims abstract description 15
- 238000007599 discharging Methods 0.000 claims abstract description 11
- 230000001276 controlling effect Effects 0.000 claims description 51
- 239000004065 semiconductor Substances 0.000 claims description 27
- 238000012546 transfer Methods 0.000 claims description 25
- 238000002955 isolation Methods 0.000 claims description 17
- 238000009835 boiling Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000007791 liquid phase Substances 0.000 claims description 9
- 238000005468 ion implantation Methods 0.000 claims description 8
- 239000012071 phase Substances 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 7
- 239000002826 coolant Substances 0.000 claims description 6
- 229920006395 saturated elastomer Polymers 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 266
- 229910052757 nitrogen Inorganic materials 0.000 description 131
- 239000007789 gas Substances 0.000 description 97
- 239000007788 liquid Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 239000001307 helium Substances 0.000 description 8
- 229910052734 helium Inorganic materials 0.000 description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 8
- 239000012530 fluid Substances 0.000 description 7
- 239000003921 oil Substances 0.000 description 7
- 238000000926 separation method Methods 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052743 krypton Inorganic materials 0.000 description 5
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 229910052724 xenon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000012472 biological sample Substances 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000011152 fibreglass Substances 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 239000007792 gaseous phase Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000005514 two-phase flow Effects 0.000 description 2
- 241000237509 Patinopecten sp. Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 235000020637 scallop Nutrition 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/01—Heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/06—Several compression cycles arranged in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0251—Compressor control by controlling speed with on-off operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0253—Compressor control by controlling speed with variable speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/21—Temperatures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
- F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/34—Accessory or component
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33380110P | 2010-05-12 | 2010-05-12 | |
| US61/333,801 | 2010-05-12 | ||
| US36351410P | 2010-07-12 | 2010-07-12 | |
| US61/363,514 | 2010-07-12 | ||
| PCT/US2011/036213 WO2011143398A1 (en) | 2010-05-12 | 2011-05-12 | System and method for cryogenic cooling |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020177002757A Division KR101905161B1 (ko) | 2010-05-12 | 2011-05-12 | 극저온 냉각용 시스템 및 방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130116162A KR20130116162A (ko) | 2013-10-23 |
| KR101705032B1 true KR101705032B1 (ko) | 2017-02-09 |
Family
ID=44515101
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127032539A Active KR101705032B1 (ko) | 2010-05-12 | 2011-05-12 | 극저온 냉각용 시스템 및 방법 |
| KR1020177002757A Active KR101905161B1 (ko) | 2010-05-12 | 2011-05-12 | 극저온 냉각용 시스템 및 방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020177002757A Active KR101905161B1 (ko) | 2010-05-12 | 2011-05-12 | 극저온 냉각용 시스템 및 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10156386B2 (enExample) |
| EP (2) | EP3040646B1 (enExample) |
| JP (2) | JP5815682B2 (enExample) |
| KR (2) | KR101705032B1 (enExample) |
| CN (1) | CN102918336B (enExample) |
| TW (1) | TWI571941B (enExample) |
| WO (1) | WO2011143398A1 (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8011191B2 (en) | 2009-09-30 | 2011-09-06 | Thermo Fisher Scientific (Asheville) Llc | Refrigeration system having a variable speed compressor |
| JP5815682B2 (ja) | 2010-05-12 | 2015-11-17 | ブルックス オートメーション インコーポレイテッド | 極低温冷却のためのシステム |
| JP5938932B2 (ja) * | 2012-02-14 | 2016-06-22 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| JP5942459B2 (ja) * | 2012-02-14 | 2016-06-29 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| US20140260380A1 (en) * | 2013-03-15 | 2014-09-18 | Energy Recovery Systems Inc. | Compressor control for heat transfer system |
| CN103900315B (zh) * | 2014-01-07 | 2016-08-17 | 沃姆制冷设备(上海)有限公司 | 超导器件及材料的液氮降温方法和实现该方法的超导制冷机 |
| WO2016074720A1 (de) * | 2014-11-13 | 2016-05-19 | Leica Mikrosysteme Gmbh | Gefriermaschine mit behälter für gefrorene proben |
| CN105571187A (zh) * | 2016-01-04 | 2016-05-11 | 上海理工大学 | 采用Xe为低温级制冷剂的超低温复叠制冷系统 |
| KR102001251B1 (ko) * | 2016-09-21 | 2019-07-18 | 한국전력공사 | 액체질소 순환 및 냉동기를 통합한 초전도 케이블 냉각시스템 |
| CN106642776A (zh) * | 2016-11-24 | 2017-05-10 | 深圳市天健机电设备有限公司 | 一种集中水冷系统 |
| CN106766542A (zh) * | 2016-12-28 | 2017-05-31 | 上海原能细胞医学技术有限公司 | 生物样本冷库 |
| CN107818940B (zh) * | 2017-11-30 | 2020-04-10 | 上海华力微电子有限公司 | 一种静电吸盘装置及其温控方法 |
| US11472264B2 (en) * | 2018-03-07 | 2022-10-18 | Gogoro Inc. | Apparatuses for controlling environmental conditions and associated methods |
| KR102608957B1 (ko) | 2018-08-27 | 2023-12-01 | 삼성전자주식회사 | 플라즈마 처리 장치 |
| KR102646904B1 (ko) | 2018-12-04 | 2024-03-12 | 삼성전자주식회사 | 플라즈마 처리 장치 |
| WO2021086983A1 (en) | 2019-10-29 | 2021-05-06 | TMRW Life Sciences, Inc. | Apparatus to facilitate transfer of biological specimens stored at cryogenic conditions |
| CN111043805B (zh) * | 2019-12-30 | 2021-09-10 | 成都新连通低温设备有限公司 | 一种大功率液氮温区变温压力实验系统 |
| EP4154257A4 (en) | 2020-05-18 | 2023-12-06 | TMRW Life Sciences, Inc. | HANDLING AND TRACKING BIOLOGICAL SAMPLES FOR CRYOGENIC STORAGE |
| TWI731722B (zh) * | 2020-06-19 | 2021-06-21 | 國立臺北科技大學 | 具有自動除霜功能的冷凍系統及其自動除霜控制方法 |
| WO2022066943A1 (en) | 2020-09-24 | 2022-03-31 | TMRW Life Sciences, Inc. | Workstation and apparatus to facilitate transfer of biological specimens stored at cryogenic conditions |
| AU2021351505B2 (en) | 2020-10-02 | 2024-11-21 | TMRW Life Sciences, Inc. | Interrogation device and/or system having alignment feature(s) for wireless transponder tagged specimen containers and/or carriers |
| CN112218507A (zh) * | 2020-11-10 | 2021-01-12 | 中天(江苏)防务装备有限公司 | 一种集成桅杆综合冷却系统 |
| USD963194S1 (en) | 2020-12-09 | 2022-09-06 | TMRW Life Sciences, Inc. | Cryogenic vial carrier |
| CA3200508A1 (en) | 2020-12-10 | 2022-06-16 | TMRW Life Sciences, Inc. | Specimen holder with wireless transponder for attachment to specimen collection body |
| EP4252009B1 (en) | 2021-01-13 | 2025-03-05 | TMRW Life Sciences, Inc. | System to pick and/or place specimen containers |
| CN115406132B (zh) * | 2021-05-28 | 2023-09-15 | 中国科学院理化技术研究所 | 一种氦低温制冷系统及制冷方法 |
| GB202115660D0 (en) * | 2021-11-01 | 2021-12-15 | Edwards Vacuum Llc | Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system |
| US12204989B2 (en) * | 2021-12-13 | 2025-01-21 | The Boeing Company | Cryogenic cooling system |
| KR102489501B1 (ko) * | 2022-01-13 | 2023-01-18 | 크라이오에이치앤아이(주) | 반도체 제조 장비용 온도 조절 장치 |
| WO2023191963A1 (en) * | 2022-03-30 | 2023-10-05 | Microsoft Technology Licensing, Llc | Cryogenic removal of carbon dioxide from the atmosphere |
| KR102654974B1 (ko) * | 2022-05-25 | 2024-04-08 | 크라이오에이치앤아이(주) | 반도체 제조 장비용 온도 조절 장치 |
| KR102857513B1 (ko) * | 2023-11-03 | 2025-09-11 | 주식회사 엘지에너지솔루션 | 싸이클링 테스트 장치 |
Family Cites Families (78)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3733845A (en) * | 1972-01-19 | 1973-05-22 | D Lieberman | Cascaded multicircuit,multirefrigerant refrigeration system |
| US4279127A (en) | 1979-03-02 | 1981-07-21 | Air Products And Chemicals, Inc. | Removable refrigerator for maintaining liquefied gas inventory |
| US4277949A (en) | 1979-06-22 | 1981-07-14 | Air Products And Chemicals, Inc. | Cryostat with serviceable refrigerator |
| JPS61128065A (ja) * | 1984-11-28 | 1986-06-16 | 株式会社日立製作所 | 極低温冷凍機 |
| US4840043A (en) * | 1986-05-16 | 1989-06-20 | Katsumi Sakitani | Cryogenic refrigerator |
| JPH0776641B2 (ja) * | 1986-05-16 | 1995-08-16 | ダイキン工業株式会社 | 極低温冷凍機 |
| US4951471A (en) * | 1986-05-16 | 1990-08-28 | Daikin Industries, Ltd. | Cryogenic refrigerator |
| JPS6375760A (ja) | 1986-09-19 | 1988-04-06 | Canon Inc | 放電装置の製造方法 |
| JPH0643647Y2 (ja) | 1986-11-05 | 1994-11-14 | 株式会社日立製作所 | 極低温冷凍装置 |
| USRE33878E (en) | 1987-01-20 | 1992-04-14 | Helix Technology Corporation | Cryogenic recondenser with remote cold box |
| JPS63220048A (ja) * | 1987-03-09 | 1988-09-13 | ダイキン工業株式会社 | 極低温冷凍装置 |
| US4829785A (en) * | 1987-12-04 | 1989-05-16 | The Boeing Company | Cryogenic cooling system with precooling stage |
| US4796433A (en) | 1988-01-06 | 1989-01-10 | Helix Technology Corporation | Remote recondenser with intermediate temperature heat sink |
| JPH0788980B2 (ja) * | 1989-02-01 | 1995-09-27 | ダイキン工業株式会社 | ヘリウム冷凍機 |
| US5060481A (en) * | 1989-07-20 | 1991-10-29 | Helix Technology Corporation | Method and apparatus for controlling a cryogenic refrigeration system |
| JPH03102652A (ja) | 1989-09-18 | 1991-04-30 | Canon Inc | 光学的情報記録再生装置 |
| JP2873388B2 (ja) * | 1990-05-15 | 1999-03-24 | 日本酸素株式会社 | 冷凍機及びその冷凍能力の調整方法 |
| JP3102652B2 (ja) | 1991-11-19 | 2000-10-23 | 株式会社日立製作所 | 冷熱衝撃試験装置 |
| JPH05322343A (ja) * | 1992-05-15 | 1993-12-07 | Hitachi Ltd | リザーバタンク付き冷凍装置 |
| JP2725689B2 (ja) * | 1992-06-09 | 1998-03-11 | 住友重機械工業株式会社 | 蓄冷器式冷凍機 |
| JPH0626459A (ja) * | 1992-07-09 | 1994-02-01 | Hitachi Ltd | 極低温冷却装置およびその冷却方法 |
| JPH06117716A (ja) * | 1992-10-05 | 1994-04-28 | Kobe Steel Ltd | 液化冷凍装置の予冷方法及び装置 |
| JP2945806B2 (ja) * | 1992-10-07 | 1999-09-06 | 株式会社神戸製鋼所 | 液化冷凍装置に設けられる冷凍負荷の予冷装置 |
| JPH06123508A (ja) * | 1992-10-07 | 1994-05-06 | Japan Atom Energy Res Inst | 冷凍装置 |
| JP3159553B2 (ja) * | 1992-12-18 | 2001-04-23 | 東海旅客鉄道株式会社 | 極低温冷凍機の運転制御方法 |
| JPH06265230A (ja) * | 1993-03-11 | 1994-09-20 | Kobe Steel Ltd | 液化冷凍装置の運転制御方法及び装置 |
| JP2910499B2 (ja) * | 1993-05-18 | 1999-06-23 | 株式会社日立製作所 | 冷凍装置 |
| JPH06323662A (ja) * | 1993-05-18 | 1994-11-25 | Hitachi Ltd | 冷凍装置 |
| JPH06323664A (ja) * | 1993-05-18 | 1994-11-25 | Hitachi Ltd | 冷凍装置 |
| JPH06323663A (ja) * | 1993-05-18 | 1994-11-25 | Hitachi Ltd | 冷凍装置 |
| JPH06323661A (ja) * | 1993-05-18 | 1994-11-25 | Hitachi Ltd | 冷凍装置 |
| US5508613A (en) | 1994-08-29 | 1996-04-16 | Conductus, Inc. | Apparatus for cooling NMR coils |
| JPH08222429A (ja) * | 1995-02-13 | 1996-08-30 | Hitachi Ltd | 極低温装置 |
| JPH09113052A (ja) * | 1995-10-16 | 1997-05-02 | Hitachi Ltd | 冷凍装置 |
| JPH09196487A (ja) * | 1996-01-17 | 1997-07-31 | Daikin Ind Ltd | 極低温冷凍機 |
| US5694776A (en) * | 1996-01-30 | 1997-12-09 | The Boc Group, Inc. | Refrigeration method and apparatus |
| JP3573384B2 (ja) * | 1996-02-20 | 2004-10-06 | 住友重機械工業株式会社 | 極低温冷凍装置 |
| JPH09236340A (ja) * | 1996-02-28 | 1997-09-09 | Daikin Ind Ltd | 極低温冷凍装置 |
| JP3571837B2 (ja) * | 1996-03-01 | 2004-09-29 | 住友重機械工業株式会社 | 極低温冷凍装置 |
| JPH09303897A (ja) * | 1996-05-10 | 1997-11-28 | Daikin Ind Ltd | 極低温冷凍装置 |
| JPH10246524A (ja) * | 1997-03-06 | 1998-09-14 | Hitachi Ltd | 冷凍装置 |
| DE19720677C1 (de) | 1997-05-16 | 1998-10-22 | Spectrospin Ag | NMR-Meßvorrichtung mit gekühltem Meßkopf |
| JPH11125474A (ja) * | 1997-10-23 | 1999-05-11 | Hitachi Ltd | 極低温冷凍システム |
| JP3670536B2 (ja) * | 1999-11-08 | 2005-07-13 | 東海旅客鉄道株式会社 | 極低温冷却装置 |
| WO2002001122A1 (en) * | 2000-06-28 | 2002-01-03 | Igc Polycold Systems, Inc. | High efficiency very-low temperature mixed refrigerant system with rapid cool down |
| US6324856B1 (en) * | 2000-07-07 | 2001-12-04 | Spx Corporation | Multiple stage cascade refrigeration system having temperature responsive flow control and method |
| JP3929022B2 (ja) | 2000-11-01 | 2007-06-13 | 松下電器産業株式会社 | ポイントサービスシステム |
| US6425250B1 (en) | 2001-02-08 | 2002-07-30 | Praxair Technology, Inc. | System for providing cryogenic refrigeration using an upstream pulse tube refrigerator |
| EP1362211A4 (en) * | 2001-02-23 | 2005-12-21 | TIE TEMPERATURE VACUUM COOLING SYSTEM IN CLOSED CIRCULATION | |
| US6415613B1 (en) * | 2001-03-16 | 2002-07-09 | General Electric Company | Cryogenic cooling system with cooldown and normal modes of operation |
| US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| US7478540B2 (en) * | 2001-10-26 | 2009-01-20 | Brooks Automation, Inc. | Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems |
| DE10216786C5 (de) * | 2002-04-15 | 2009-10-15 | Ers Electronic Gmbh | Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden |
| JP2003336923A (ja) * | 2002-05-20 | 2003-11-28 | Central Japan Railway Co | 極低温冷凍装置 |
| JP2004020754A (ja) | 2002-06-13 | 2004-01-22 | Namiki Precision Jewel Co Ltd | ピグテイル型光ファイバ |
| US6679066B1 (en) * | 2002-08-16 | 2004-01-20 | Sumitomo Heavy Industries, Ltd. | Cryogenic cooling system for superconductive electric machines |
| US7003977B2 (en) * | 2003-07-18 | 2006-02-28 | General Electric Company | Cryogenic cooling system and method with cold storage device |
| JP4034253B2 (ja) * | 2003-09-30 | 2008-01-16 | 株式会社日立製作所 | 核磁気共鳴測定装置 |
| GB0408312D0 (en) * | 2004-04-14 | 2004-05-19 | Oxford Instr Superconductivity | Cooling apparatus |
| JP4407384B2 (ja) | 2004-05-28 | 2010-02-03 | 株式会社Sumco | Soi基板の製造方法 |
| ITTO20040588A1 (it) * | 2004-09-06 | 2004-12-06 | Iarp S R L | Impianto frigorifero a compressione di co2 per applicazioni di bassa temperatura |
| JP2006125772A (ja) * | 2004-10-29 | 2006-05-18 | Chubu Electric Power Co Inc | 極低温冷凍機の運転制御装置 |
| US7165422B2 (en) * | 2004-11-08 | 2007-01-23 | Mmr Technologies, Inc. | Small-scale gas liquefier |
| DE102004053972B3 (de) * | 2004-11-09 | 2006-07-20 | Bruker Biospin Gmbh | NMR-Spektrometer mit gemeinsamen Refrigerator zum Kühlen von NMR-Probenkopf und Kryostat |
| DE102004053973B3 (de) * | 2004-11-09 | 2006-07-20 | Bruker Biospin Ag | NMR-Spektrometer mit Refrigeratorkühlung |
| US7185501B2 (en) * | 2004-12-16 | 2007-03-06 | General Electric Company | Cryogenic cooling system and method with backup cold storage device |
| JP4563269B2 (ja) * | 2005-07-05 | 2010-10-13 | 財団法人鉄道総合技術研究所 | タービン型冷凍機の冷凍能力制御装置 |
| JP2007303794A (ja) * | 2006-05-15 | 2007-11-22 | Sanyo Electric Co Ltd | 冷凍装置 |
| US8769982B2 (en) * | 2006-10-02 | 2014-07-08 | Emerson Climate Technologies, Inc. | Injection system and method for refrigeration system compressor |
| US7528392B2 (en) * | 2006-11-27 | 2009-05-05 | Varian Semiconductor Equipment Associates, Inc. | Techniques for low-temperature ion implantation |
| JP4253852B2 (ja) | 2007-03-15 | 2009-04-15 | 村田機械株式会社 | 画像読取装置及びイメージスキャナ装置 |
| US20100139297A1 (en) * | 2007-04-26 | 2010-06-10 | Mccormick Stephen A | Air cycle refrigeration capacity control system |
| US8532832B2 (en) * | 2008-09-23 | 2013-09-10 | Be Aerospace, Inc. | Method and apparatus for thermal exchange with two-phase media |
| EP3943069B1 (en) | 2009-03-17 | 2024-11-27 | Nicox Ophthalmics, Inc. | Ophthalmic formulations of cetirizine and methods of use |
| JP2011125474A (ja) | 2009-12-17 | 2011-06-30 | Isuzu Motors Ltd | 体調判定装置 |
| WO2011132231A1 (ja) * | 2010-04-23 | 2011-10-27 | 住友重機械工業株式会社 | 冷却システム及び冷却方法 |
| JP5815682B2 (ja) | 2010-05-12 | 2015-11-17 | ブルックス オートメーション インコーポレイテッド | 極低温冷却のためのシステム |
| KR20120109873A (ko) * | 2011-03-28 | 2012-10-09 | 삼성중공업 주식회사 | 옥내의 환기시스템 및 그 제연 방법 |
-
2011
- 2011-05-12 JP JP2013510291A patent/JP5815682B2/ja active Active
- 2011-05-12 WO PCT/US2011/036213 patent/WO2011143398A1/en not_active Ceased
- 2011-05-12 TW TW100116971A patent/TWI571941B/zh active
- 2011-05-12 US US13/106,180 patent/US10156386B2/en active Active
- 2011-05-12 KR KR1020127032539A patent/KR101705032B1/ko active Active
- 2011-05-12 KR KR1020177002757A patent/KR101905161B1/ko active Active
- 2011-05-12 EP EP16150093.9A patent/EP3040646B1/en active Active
- 2011-05-12 EP EP11731559.8A patent/EP2569583B1/en active Active
- 2011-05-12 CN CN201180023565.6A patent/CN102918336B/zh active Active
-
2015
- 2015-09-24 JP JP2015186263A patent/JP6203800B2/ja active Active
-
2018
- 2018-12-17 US US16/221,954 patent/US11215384B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6203800B2 (ja) | 2017-09-27 |
| US20120038120A1 (en) | 2012-02-16 |
| EP3040646B1 (en) | 2017-11-15 |
| US20190120528A1 (en) | 2019-04-25 |
| JP5815682B2 (ja) | 2015-11-17 |
| US11215384B2 (en) | 2022-01-04 |
| EP2569583B1 (en) | 2016-03-02 |
| KR20170015568A (ko) | 2017-02-08 |
| CN102918336A (zh) | 2013-02-06 |
| JP2015227775A (ja) | 2015-12-17 |
| KR101905161B1 (ko) | 2018-10-08 |
| TW201201282A (en) | 2012-01-01 |
| WO2011143398A1 (en) | 2011-11-17 |
| JP2013538324A (ja) | 2013-10-10 |
| TWI571941B (zh) | 2017-02-21 |
| US10156386B2 (en) | 2018-12-18 |
| CN102918336B (zh) | 2016-08-03 |
| EP2569583A1 (en) | 2013-03-20 |
| KR20130116162A (ko) | 2013-10-23 |
| EP3040646A1 (en) | 2016-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101705032B1 (ko) | 극저온 냉각용 시스템 및 방법 | |
| US11940186B2 (en) | CO2 refrigeration system with magnetic refrigeration system cooling | |
| US6574978B2 (en) | Very low temperature refrigeration system with controlled cool down and warm up rates and long term heating capabilities | |
| EP3341662B1 (en) | Co2 refrigeration system with direct co2 heat exchange | |
| JP2013538324A5 (enExample) | ||
| US20040020221A1 (en) | Very low temperature refrigeration system with controlled cool down and warm up rates and long term heating capabilities | |
| JPH10246524A (ja) | 冷凍装置 | |
| JPH09113052A (ja) | 冷凍装置 | |
| JP2910499B2 (ja) | 冷凍装置 | |
| JP2873388B2 (ja) | 冷凍機及びその冷凍能力の調整方法 | |
| TWI900526B (zh) | 溫度控制裝置、半導體處理裝置及經由調節迴路控制晶圓溫度之方法 | |
| KR20220140525A (ko) | 반도체 웨이퍼 온도 제어 장치 | |
| JP3596825B2 (ja) | 極低温冷凍機の低圧制御装置 | |
| US20230204258A1 (en) | Apparatus and method for generating cryogenic temperatures and use thereof | |
| JPH09106906A (ja) | 伝導冷却式超電導磁石 | |
| JPH0668419B2 (ja) | 極低温冷凍機 | |
| JPH04335959A (ja) | 極低温冷凍機 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20121212 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| A302 | Request for accelerated examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20160511 Comment text: Request for Examination of Application |
|
| PA0302 | Request for accelerated examination |
Patent event date: 20160511 Patent event code: PA03022R01D Comment text: Request for Accelerated Examination |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20160823 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20161103 |
|
| PA0104 | Divisional application for international application |
Comment text: Divisional Application for International Patent Patent event code: PA01041R01D Patent event date: 20170131 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20170203 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20170206 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| PR1001 | Payment of annual fee |
Payment date: 20200123 Start annual number: 4 End annual number: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20210127 Start annual number: 5 End annual number: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 20220121 Start annual number: 6 End annual number: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20240122 Start annual number: 8 End annual number: 8 |
|
| PR1001 | Payment of annual fee |
Payment date: 20250121 Start annual number: 9 End annual number: 9 |