JP5815682B2 - 極低温冷却のためのシステム - Google Patents

極低温冷却のためのシステム Download PDF

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Publication number
JP5815682B2
JP5815682B2 JP2013510291A JP2013510291A JP5815682B2 JP 5815682 B2 JP5815682 B2 JP 5815682B2 JP 2013510291 A JP2013510291 A JP 2013510291A JP 2013510291 A JP2013510291 A JP 2013510291A JP 5815682 B2 JP5815682 B2 JP 5815682B2
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Japan
Prior art keywords
load
control unit
refrigerant
primary
temperature
Prior art date
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Active
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JP2013510291A
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Japanese (ja)
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JP2013538324A5 (enExample
JP2013538324A (ja
Inventor
バートレット・アレン・ジェイ
ジョンソン・ウィリアム
コリンズ・マーク
シソエフ・セルゲイ
オニール・ジェームズ・エー
エアコバッチ・マイケル・ジェイ・ジュニア
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Azenta Inc
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Azenta Inc
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Publication of JP2013538324A5 publication Critical patent/JP2013538324A5/ja
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B7/00Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/02Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/01Heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/06Several compression cycles arranged in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00Control issues
    • F25B2600/02Compressor control
    • F25B2600/025Compressor control by controlling speed
    • F25B2600/0251Compressor control by controlling speed with on-off operation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00Control issues
    • F25B2600/02Compressor control
    • F25B2600/025Compressor control by controlling speed
    • F25B2600/0253Compressor control by controlling speed with variable speed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21Temperatures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/006Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00Chucks or sockets
    • Y10T279/34Accessory or component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
JP2013510291A 2010-05-12 2011-05-12 極低温冷却のためのシステム Active JP5815682B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US33380110P 2010-05-12 2010-05-12
US61/333,801 2010-05-12
US36351410P 2010-07-12 2010-07-12
US61/363,514 2010-07-12
PCT/US2011/036213 WO2011143398A1 (en) 2010-05-12 2011-05-12 System and method for cryogenic cooling

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015186263A Division JP6203800B2 (ja) 2010-05-12 2015-09-24 極低温冷却のためのシステム

Publications (3)

Publication Number Publication Date
JP2013538324A JP2013538324A (ja) 2013-10-10
JP2013538324A5 JP2013538324A5 (enExample) 2014-06-26
JP5815682B2 true JP5815682B2 (ja) 2015-11-17

Family

ID=44515101

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013510291A Active JP5815682B2 (ja) 2010-05-12 2011-05-12 極低温冷却のためのシステム
JP2015186263A Active JP6203800B2 (ja) 2010-05-12 2015-09-24 極低温冷却のためのシステム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015186263A Active JP6203800B2 (ja) 2010-05-12 2015-09-24 極低温冷却のためのシステム

Country Status (7)

Country Link
US (2) US10156386B2 (enExample)
EP (2) EP3040646B1 (enExample)
JP (2) JP5815682B2 (enExample)
KR (2) KR101705032B1 (enExample)
CN (1) CN102918336B (enExample)
TW (1) TWI571941B (enExample)
WO (1) WO2011143398A1 (enExample)

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JP5815682B2 (ja) 2010-05-12 2015-11-17 ブルックス オートメーション インコーポレイテッド 極低温冷却のためのシステム
JP5938932B2 (ja) * 2012-02-14 2016-06-22 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
JP5942459B2 (ja) * 2012-02-14 2016-06-29 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
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CN107818940B (zh) * 2017-11-30 2020-04-10 上海华力微电子有限公司 一种静电吸盘装置及其温控方法
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KR101705032B1 (ko) 2017-02-09
US20120038120A1 (en) 2012-02-16
EP3040646B1 (en) 2017-11-15
US20190120528A1 (en) 2019-04-25
US11215384B2 (en) 2022-01-04
EP2569583B1 (en) 2016-03-02
KR20170015568A (ko) 2017-02-08
CN102918336A (zh) 2013-02-06
JP2015227775A (ja) 2015-12-17
KR101905161B1 (ko) 2018-10-08
TW201201282A (en) 2012-01-01
WO2011143398A1 (en) 2011-11-17
JP2013538324A (ja) 2013-10-10
TWI571941B (zh) 2017-02-21
US10156386B2 (en) 2018-12-18
CN102918336B (zh) 2016-08-03
EP2569583A1 (en) 2013-03-20
KR20130116162A (ko) 2013-10-23
EP3040646A1 (en) 2016-07-06

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