TWI564662B - 圖案形成方法、感光化射線性或感放射線性樹脂組成物、抗蝕劑膜、電子元件的製造方法及電子元件 - Google Patents

圖案形成方法、感光化射線性或感放射線性樹脂組成物、抗蝕劑膜、電子元件的製造方法及電子元件 Download PDF

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TWI564662B
TWI564662B TW102134656A TW102134656A TWI564662B TW I564662 B TWI564662 B TW I564662B TW 102134656 A TW102134656 A TW 102134656A TW 102134656 A TW102134656 A TW 102134656A TW I564662 B TWI564662 B TW I564662B
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group
resin
sensitive
solvent
repeating unit
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TW102134656A
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Chinese (zh)
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TW201413386A (zh
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上村聡
高橋秀知
加藤啓太
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富士軟片股份有限公司
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    • C08F212/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by heteroatoms or groups containing heteroatoms
    • C08F212/22—Oxygen
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    • C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F212/02—Monomers containing only one unsaturated aliphatic radical
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