TWI476356B - Heat treatment device - Google Patents

Heat treatment device Download PDF

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Publication number
TWI476356B
TWI476356B TW097119342A TW97119342A TWI476356B TW I476356 B TWI476356 B TW I476356B TW 097119342 A TW097119342 A TW 097119342A TW 97119342 A TW97119342 A TW 97119342A TW I476356 B TWI476356 B TW I476356B
Authority
TW
Taiwan
Prior art keywords
gas
heat treatment
pipe
introduction
heat
Prior art date
Application number
TW097119342A
Other languages
English (en)
Chinese (zh)
Other versions
TW200907269A (en
Inventor
Tezen Hisamitsu
Original Assignee
Espec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Espec Corp filed Critical Espec Corp
Publication of TW200907269A publication Critical patent/TW200907269A/zh
Application granted granted Critical
Publication of TWI476356B publication Critical patent/TWI476356B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Especially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0083—Chamber type furnaces with means for circulating the atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/02—Supplying steam, vapour, gases, or liquids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/02—Supplying steam, vapour, gases, or liquids
    • F27D2007/023—Conduits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • F27D2007/045—Fans

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Furnace Details (AREA)
  • Gas-Filled Discharge Tubes (AREA)
TW097119342A 2007-05-29 2008-05-26 Heat treatment device TWI476356B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007141427A JP4589941B2 (ja) 2007-05-29 2007-05-29 熱処理装置

Publications (2)

Publication Number Publication Date
TW200907269A TW200907269A (en) 2009-02-16
TWI476356B true TWI476356B (zh) 2015-03-11

Family

ID=40105675

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097119342A TWI476356B (zh) 2007-05-29 2008-05-26 Heat treatment device

Country Status (4)

Country Link
JP (1) JP4589941B2 (ja)
KR (1) KR101450902B1 (ja)
CN (1) CN101314516B (ja)
TW (1) TWI476356B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010144939A (ja) * 2008-12-16 2010-07-01 Tohoku Univ 循環式の基板焼成炉
TWI404955B (zh) * 2009-02-23 2013-08-11 Yang Electronic Systems Co Ltd 平板顯示器基材電性測試中使用的冷卻和防濕設備
JP5639262B2 (ja) * 2011-04-14 2014-12-10 シャープ株式会社 表示パネル用基板の製造装置
JP6855687B2 (ja) * 2015-07-29 2021-04-07 東京エレクトロン株式会社 基板処理装置、基板処理方法及び基板処理装置のメンテナンス方法及び記憶媒体
CA3008497A1 (en) * 2016-11-29 2018-06-07 Yue Zhang Hot-air oxygen-free brazing system
KR102012158B1 (ko) * 2019-05-13 2019-08-20 정영문 환경조절장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07100422A (ja) * 1993-10-02 1995-04-18 Osaka Gas Co Ltd 塗装乾燥炉
TWI323332B (en) * 2003-04-14 2010-04-11 Koyo Thermo Sys Co Ltd Continuous kiln with unit of dealing with discharge gas

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2222050B2 (de) * 1972-05-05 1975-08-21 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Verfahren und Vorrichtung zum Vakuumsintern von Kohlenwasserstoffe enthaltenden Preßkorpern aus pulverformigen Ausgangsstoffen
JPH0424576Y2 (ja) * 1985-01-29 1992-06-10
JPH03420U (ja) * 1989-05-25 1991-01-07
JPH059556A (ja) * 1991-07-02 1993-01-19 Daido Steel Co Ltd 熱処理炉の送気方法
JP3000420U (ja) * 1994-01-25 1994-08-09 日本電熱計器株式会社 はんだ付け装置における雰囲気の冷却装置
JP3959141B2 (ja) * 1996-11-12 2007-08-15 エスペック株式会社 昇華物対策付き熱処理装置
JP2001201271A (ja) * 2000-01-24 2001-07-27 Shinko Mex Co Ltd 銅の縦型溶解炉における排ガス処理システム
JP4402846B2 (ja) * 2001-02-20 2010-01-20 中外炉工業株式会社 平面ガラス基板用連続式焼成炉
JP2002257314A (ja) * 2001-03-02 2002-09-11 Ngk Insulators Ltd 熱風発生装置
JP2003158082A (ja) * 2001-11-22 2003-05-30 Hitachi Ltd 基板処理装置
JP2003229425A (ja) * 2002-02-05 2003-08-15 Hitachi Kokusai Electric Inc 基板処理装置
JP4111269B2 (ja) * 2002-12-19 2008-07-02 株式会社日立国際電気 基板処理装置
JP2004206983A (ja) * 2002-12-25 2004-07-22 Pioneer Electronic Corp プラズマディスプレイパネルの製造方法及び熱処理装置
CN100501287C (zh) * 2003-01-25 2009-06-17 北京环能海臣科技有限公司 一种物料脱水干燥回收冷凝水热气体循环回用装置
JP2005037024A (ja) * 2003-07-18 2005-02-10 Matsushita Electric Ind Co Ltd プラズマディスプレイパネルの焼成炉
JP4098179B2 (ja) * 2003-07-30 2008-06-11 日本碍子株式会社 熱処理炉
JP2005071632A (ja) * 2003-08-25 2005-03-17 Fujitsu Hitachi Plasma Display Ltd プラズマディスプレイパネルの製造方法及びその装置
JP2007085702A (ja) * 2005-09-26 2007-04-05 Espec Corp ガラス基板処理装置、ガラス基板処理システム及びガラス基板処理方法
JP4291832B2 (ja) * 2006-06-23 2009-07-08 株式会社フューチャービジョン 基板焼成炉の給排気システム
JP4372806B2 (ja) * 2006-07-13 2009-11-25 エスペック株式会社 熱処理装置
JP4331784B2 (ja) * 2008-07-22 2009-09-16 株式会社フューチャービジョン 基板焼成炉の給排気方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07100422A (ja) * 1993-10-02 1995-04-18 Osaka Gas Co Ltd 塗装乾燥炉
TWI323332B (en) * 2003-04-14 2010-04-11 Koyo Thermo Sys Co Ltd Continuous kiln with unit of dealing with discharge gas

Also Published As

Publication number Publication date
TW200907269A (en) 2009-02-16
KR101450902B1 (ko) 2014-10-14
CN101314516A (zh) 2008-12-03
CN101314516B (zh) 2012-05-30
JP4589941B2 (ja) 2010-12-01
JP2008298300A (ja) 2008-12-11
KR20080104972A (ko) 2008-12-03

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