TW200907269A - Heat treatment device - Google Patents

Abstract

This invention provides a heat processing device, which is able to prevent cleaning the heat processing part under the condition that the blower or heater has a fault, including: a heat processing part including a gas introducing part and a gas exporting part respectively connected with a heating chamber; the heat processing chamber is used for accepting an object processed by heat heated processed object which can be taken out from the heat processing chamber; and a gas processing part including a gas passage used for introducing the gas for heat processing to the gas introducing part and exporting the gas after heat processing from the gas exporting part; the gas passage is provided with a catalysis exporting the gas after heat processing from the gas exporting part; ; the gas passage is provided with a catalyst decomposed to the sublimation generated from the object processed by heat when the object processed by heat is processed the heat processing; a heater used for at least heating the catalyst; and a blower. This invention includes a flange for connection, a bolt and a nut which are used for disassembly connecting the gas passage relative to the gas introducing part and the gas exporting part of the heat processing part.

Description

200907269 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a heat treatment apparatus for heat-treating a material to be heat-treated. [Prior Art] In the conventional heat treatment apparatus, the heat-treated room is heated while the air in the heat treatment chamber is recirculated, thereby heat-treating the object to be heat-treated in the heat treatment chamber. Such a heat treatment apparatus is used, for example, in a pre-bake process or a post-bake process of a photoresist or an organic film in the process of manufacturing a flat panel display (FPD: Flat Display Panel). In the heat treatment of the heat-treated material such as a glass substrate, the volatile component contained in the photoresist or the like is vaporized to generate a large amount of sublimate, and the sublimate is recrystallized, scattered or adhered to the heat treatment apparatus. The problem. As disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The two sides of the outlet tube are discharged... The heat treatment chamber is thus ventilated in the heat treatment chamber:: the inner lamp is replaced. Into the heat treatment device. In the heat treatment apparatus of the Japanese Patent Laid-Open Publication No. ko. No. s. 868, the gas treatment section is provided, and the gas is interposed between the wall and the heat treatment chamber. Loop inside and outside the heat treatment chamber. A problem with a heater and a political fan for making an air gap is that

2014-9695-PF 200907269 In the case of the sublimation of the inner wall of the heat treatment chamber, the cleaning liquid for cleaning may cause malfunction of electrical equipment such as the above gas generator or heater. Hurricane hurricane [Summary] The purpose of the present invention is to provide a heat treatment apparatus which can be used in a 觖 energy chamber where a blower or a heater fails. "The heat treatment unit of the heat treatment unit in the early state" The heat treatment apparatus provided by the present invention comprises: a heat treatment portion having eight gas conduction portions and a gas discharge portion in communication with the heat treatment chamber, and the heat = for accommodating the heat-treated material' The heat-treated material contained therein is taken out from the heat treatment chamber; and the gas treatment portion has a gas passage for (4) processing the body guide to the gas (four) human portion, and is subjected to heat treatment from the gas discharge portion. a gas in which the catalyst is disposed in the gas passage, and decomposes in the heat treatment; the catalyst generated from the heat-treated material during heat treatment; and - or more than two blowers: : The processing gas and the gas after the heat treatment described above are guided in a predetermined direction. Therefore, the heat treatment chamber of the heat treatment unit can be cleaned in a state in which the blasting is prevented from being smashed. [Embodiment] Hereinafter, the embodiment of the present invention will be described with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE INVENTION [2014-9695-PF 6 200907269 (First Embodiment) Fig. 1 is a view showing a first embodiment of the present invention. The heat treatment apparatus 1A is disposed in a clean room, for example, by using a simple arrangement. The processing unit 1A includes a heat treatment unit, a heat treatment unit, a treatment unit, and a body treatment unit 20A. The processing unit 10 has a processing unit 1A. It is used to accommodate the smashing of the bedding area W (hereinafter also referred to as the workpiece, the u-room η, the heat-treated material), and the shovel J is taken out from the heat treatment chamber 1 1 . The body treatment unit 20 has a gas replenishment and a bitterness 1 , and the gas enthalpy 21A is used for deriving from the heat treatment chamber η, ... to the U-derived heat treatment gas (for example, after heat treatment) Air), and stare...the use of rolling bodies (for example, The heating air is introduced into the heat treatment chamber U of the heat treatment unit 1. The heat treatment unit 10 includes a gas filling unit, and a rolling body introduction unit 12 for introducing a heat treatment gas from the gas processing unit 20A. The U and the rolled body lead-out portion 13 are for heat-treating the gas from the heat to 11 V. The outer side of the heat treatment is surrounded by the heat insulating wall 11a. A holding member is provided inside the heat treatment t11 (not shown). The holding member may be supported and held in a predetermined state by, for example, one or two or more heat-treated materials. The holding member is disposed at a position not indicated by a chain double-dashed line in Fig. 1. The gas introduction portion 丨2 is tubular, from The heat insulating wall 11a of the heat treatment chamber i extends outward and communicates with the heat treatment chamber. The inlet side end of the gas introduction portion 12 is provided with a connection flange 14. The gas 'outlet portion 13 is also It is tubular and extends outward from the heat insulating wall 11a of the heat treatment chamber 11 and communicates with the heat treatment chamber 1. The outlet side 15-9695-PF 7 200907269 of the gas outlet portion 3 is provided with a connecting flange 15 The gas passage 21A has: an inlet tube (1) for export 23, the gas-conducting gas introduction portion is connected to the inlet pipe 22 and the outlet pipe 23, and the gas-side end of the carrier treatment pipe is provided with a flange for the connection flange 52 The connection is provided with a connecting flange 26 on the gas end, and the inlet side of the inlet portion is connected by a convex (four): two: 26 and the flange of the gas outlet _: the part r = Η, and for example The flange edge 26 of the bolts, nuts, and the like 12 and the gas outlet portion of the gas guide portion are connected to the gas processing chamber:::: the heat treatment portion is connected to form a loop passage. And ^ = body channel ^ and .w . at the appropriate position of the gas passage 21A § is also provided with a vibrator for adjusting the air volume (not shown) the gas treatment tube 24 is provided with a catalyst (can (four): catalyst 3G, heater 3, blower 32, and pretreatment agent 33. Blower 32 is used to recirculate air in the loop passage, and heating '31 is used to heat catalyst 30 and air. Air that is heated by heater 31 After the introduction tube 22 enters the heat treatment chamber u, the heat-treated material w is heated in the heat treatment. When the heat treatment of the heat-treated material W is performed by the lamp, the sublimate is generated from the heat-treated material w. The air after the heat treatment contains the sublimate. The air containing the sublimate flows through the gas deriving unit 13 and the outlet tube 23 through the catalyst 30. The catalyst 30 is used to promote the liter contained in the air after the heat treatment.

2014-9695-PF 8 200907269 The oxidative decomposition of Chinese materials, such as noble metals such as platinum (Pt) and palladium (pd) or active metals such as alloys of these noble metals. The above catalyst 3 〇 can obtain catalytic performance under a temperature of about 15 〇 to 350 T; In the present embodiment, the heater 31 is placed on the front side of the catalyst 3 (the position upstream of the catalyst 30 in the direction in which the air flows through the loop passage). In addition, when a substance called a catalytic poison (cataiyst p〇is〇n) (for example, an organic compound containing S1, P, or S) is mixed into a sublimate, it is possible to catalyze it! In the case of 30 poisoning (failure), in order to prevent poisoning of the catalyst 30, it is preferable to carry out the treatment agent 33 before the first (four) of the catalyst 3 (). As described above, in the heat treatment apparatus 1A of the first embodiment having the above configuration, since the air blower 32 and the heater 31 are disposed in the gas passage 2u (outside the heat treatment portion 10) provided separately from the heat treatment portion, therefore, The inside of the heat treatment chamber 11 can be cleaned in a state where the blower 32 or the heater 31 is prevented from malfunctioning. Further, the gas passage 21A is detachably connected to the gas introduction portion 12 and the gas outlet portion 13 of the heat treatment portion 1A by a connection device including the connection flanges 14, 15, 25, 26, bolts, nuts, and the like. Therefore, by removing the gas processing unit 20A' having the air blower 32 and the heater 31 provided in the gas passage 21A from the heat treatment portion, the gas processing portion 20A and the heat treatment portion 1 can be smashed. Thereby, it is possible to clean the inside of the heat treatment chamber 11 in a state where the blower 32 or the heater 31 is surely prevented from malfunctioning. Further, since the gas from the heat treatment chamber U sequentially flows through the discharge pipe 23, the gas treatment pipe 24, and the guide outlet pipe 22 in the above-described circulation passage

After 2014-9695-PF 9 200907269, it flows back into the heat treatment chamber u again, so that the gas can be circulated by a blower 32 and both the catalyst 3 and the crucible can be heated by the heater 31. Further, by separating the heat treatment portion 1A and the gas treatment unit 20A, it is possible to exchange only the heat treatment portion 1 or only the exchange gas 20A. σΡ (Second Embodiment) Fig. 2 is a schematic view of a heat treatment apparatus according to a second embodiment of the present invention. In Fig. 2, the same components as those in Fig. are denoted by the same reference numerals. The heat treatment apparatus includes a gas treatment unit 20D that is different from the gas treatment unit 20A of the first embodiment. That is, the gas processing unit includes a body passage 21D having an open end 22& which is provided with the intake side end of the introduction pipe 22, and an open end 24a provided at the outlet side end of the gas processing pipe 24. The gas treatment tube 24 of the gas treatment unit 2) is provided with a catalyst. 30 and the heater 31, the inlet pipe 22 is provided with an blast: 34 and a heater 35. Further, although the pretreatment agent is not shown in FIG. 4, it is also possible to provide a pretreatment agent. The gas flow in the heat treatment set 1D having the above structure is as follows. That is, the air that has flowed into the introduction pipe 22 from the open end 22a is heated by the heater 35 and flows into the heat treatment chamber u. This heated air is used to heat treat the workpiece W. The air (heat-treated air) which has been heat-treated to the workpiece w contains a sublimate which flows into the discharge tube and is guided into the gas processing tube 24. In the gas treatment f 24, the heat-treated air passes through the catalyst 30 to cause the sublimate contained therein to generate oxygen, and then is discharged from the open end 24a. In addition, the working 6 疋 baffle in FIG. 2 is for preventing the air from flowing back inside the heat treatment chamber ,, and allowing air to flow from the gas introduction portion i 2 to the gas discharge portion , 3, since the baffle 16 is provided, In the heat treatment chamber n, a channel 16a is formed on the side opposite to the gas introduction portion 12. ..., the heart ^^ clothes set 1 UT also arranges the class wind fly d 4 and the adder 3 b 35 in the gas passage 21D (outside the heat treatment portion ^) provided separately from the heat treatment portion 1 , so that the blower can be prevented ^, the households of the heat treatment chamber 11 are cleaned in a state where the heaters 31, 35 are in a failure state. Further, since the gas passage 2id is detachably connected to the gas introduction portion 12 and the gas discharge portion 13 of the cable treatment portion by the connection means including the connection flanges 14, 15, M, Mj bolts and the screw. The gas processing unit 2〇d provided in the gas passage 21 blower 34 and the heaters 31, 35 can be separated from the hot material 1G. Thus, it is sufficient to prevent the blower 34 or the heater 3 from appearing in the state of cleaning the inside of the heat treatment chamber 11. In addition, the heat treatment portion 1G and the gas treatment portion can exchange only the heat treatment portion 10 or only the gas treatment portion, and the air that is introduced from the inlet of the introduction tube 22 is heated by the heater. After the heating is 35, it is introduced into the hot portion, and then the a-derivation official 23 and the gas processing tube 24 are led out, and the air in the processing chamber 11 does not contain the sublimate. Therefore, it is difficult to reduce the oxidative decomposition reaction performance of the catalyst '3::; = by introducing hot fresh air into the heat treatment chamber". In addition, "Chinese object processing department 2 〇 d

In 2014-9695-PF 200907269, since the air is circulated in one direction and the machine is in the air, the blast air can be introduced into the introduction guide 22 through the introduction pipe 22 to guide the gas, and the heat transfer chamber is taken out from the heat treatment chamber through the outlet pipe 23. Out of the gas. & 11 In: In the second embodiment, the blower 34 is disposed on the guide I; it is not limited thereto. For example, it is also possible to apply the blower 34 to the outlet tube 23 and the gas treatment tube 24; the method τ $ can also place the blower 34 § in at least one of the introduction tube 22, the gas treatment tube 24 and the outlet tube 23. in. (THIRD EMBODIMENT) FIG. 3 is a view showing a heat treatment apparatus according to a third embodiment of the present invention. In FIG. 3, the same components as those of FIG. 2 are denoted by the same reference numerals. The gas processing unit 2D of the embodiment has a different gas processing unit 20C. That is, the gas processing unit 2〇c includes a gas passage 2U> The gas passage 21C has a connecting tube for connecting the guide tube 22 to the processing tube 24. 28. One end of the connecting pipe 28 is connected to helium

The body treatment tube 24 is provided between the position of the catalyst J 30, the heater 31, and the blower S and the outlet side end 24a. The other end of the connecting pipe 28 is connected to a midway portion of the introduction pipe 22. In the gas processing unit 2〇c, the heater 35 and the blower 34 are disposed at positions downstream of the portion of the introduction pipe 22 that is connected to the connection technology and the smuggling unit 28. Further, although the pretreatment agent is not provided in Fig. 3, a pretreatment agent may be provided. Further, the blower 32 may be omitted. The gas flow in the heat treatment apparatus 1C having the above structure is as follows: 2014-9695-PF 12 200907269. That is, the air that has flowed into the introduction pipe 22 from the open end 22a is heated by the heater 35, and then flows into the heat treatment chamber ij. This heated air is used to heat treat the workpiece W. The sublimate is contained in the air after the heat treatment, and the air after the heat treatment flows into the discharge pipe 23, and then introduced into the gas processing pipe 24. In the gas treatment tube 24, the air subjected to the heat treatment passes through the catalyst 30 to cause an oxidative decomposition reaction of the sublimate contained therein, and then is discharged from the open end 24a, or flows back to the heat treatment through the connection pipe 28 and the introduction pipe 22. Further, 16 in Fig. 3 is the same broadcast board as the second embodiment. As described above, in the heat treatment apparatus 1C of the third embodiment, the air blowers 32, 34 and the heaters 3 are also disposed in the gas passage 2 (which is outside the heat treatment portion) which is disposed in the heat treatment portion u. In C, it is therefore possible to clean the inside of the heat treatment chamber 11 in a state where the blowers 32, 34 or the heaters 3 are prevented from malfunctioning. Further, since the gas passage 21G is detachably connected to the gas inlet portion 12 and the gas discharge portion 13 of the heat treatment portion 10 by the connection means including the connection flanges 14, 15, 25, 26, bolts, nuts, and the like, The gas processing unit 2〇C having the xenon blowers 32 and 34 and the heaters 3ί, 35 provided in the gas passage 21 can be separated from the heat treatment unit 10 . Thereby, it is possible to clean the inside of the heat treatment chamber 1 1 in a state where the blower 32 34 or the heating is prevented from being malfunctioning, and the processing portion 2 〇 c can be realized. In addition, in the heat treatment apparatus 1 C φ, | Μ 罝 1L, since the inlet end 22a of the introduction pipe 22 is in an open state, fresh air rolling is introduced into the introduction pipe 22 by Kongdian J.

2014-9695-PF 13 200907269. Further, since the air derived from the heat treatment chamber i 1 is cleaned by the catalyst and heated by the heater 31 and then flows into the introduction pipe 22 through the connection pipe 28, heat loss can be reduced. Further, since the gas heating heater 35 provided in the introduction pipe is used for the temperature control of the heat treatment chamber, the heater 31 provided in the gas treatment pipe 24 is used for the temperature control of the catalyst 3, The heaters 35, W can be utilized exclusively for each. Thus, the temperature of the catalyst 30 is set to an optimum temperature at which catalytic performance can be obtained without being subjected to the heating temperature (set temperature) of the object to be heat-treated. (Fourth embodiment) Fig. 4 is a schematic view of a heat treatment apparatus according to a fourth embodiment of the present invention, which is shown in Fig. 40 and the same as Fig. 3. Dingzhu ^ soil; the attached icon «The processing device 1β includes a gas 具有 with a second connecting pipe. The end of the first connection t27 is connected to the portion where the conduit 28 is connected close to the downstream, and (4) = the ratio of the connection heater 35 and the blower 34% body heating connection pipe 27 and the guide person f22 = ^ upstream Upper to connect the second U. The second connecting pipe is connected to the other end pipe 23 of the middle of the outlet pipe 23. The second connecting pipe-connecting pipe 27 and the outgoing connecting g 27 are surrounded by the heat insulating wall. The gas processing part 2〇B The gentleman has a catalyst of 3 〇, twisting and structuring. The gas processing tube 24 is placed in the tube ,, which is 32° higher than the first-distal blower, as described above, and is introduced at the position where the first connecting tube 27 is connected*. The air blower 34 and the position downstream of the twisting k are provided, and the thief 35 is used.

2014-9695-PF 14 200907269 The empty push in the heat treatment chamber 11 is heated to the inside of the heat treatment chamber 11. In addition, the baffle plate 6 is provided inside the crucible. ..., epidemic to 11 6 In addition, although the treatment agent is used in Fig. 4, a pretreatment agent may be provided. / The gas flow in the heat treatment apparatus 1B having the above structure is as follows. That is, the empty rolling from the open end 22a into the introduction pipe 2 / L" is heated by the twister 35, and then flows into the heat treatment chamber u & old, and is used in the heat treatment chamber 11 for heat treatment. After the heat treatment, the air is filled with the sublimate, and the work gas after the heat treatment is introduced into the outlet pipe 23, and then the second connecting pipe 27 and the gas are introduced. The g 2 4 is shunted, and the air introduced into the first and second connecting tubes 27 of the first and third stages is heated again by the heater 35, and then "passed through the introduction tube 22" to return to the heat treatment chamber 11. That is, the air is looped between the heat treatment chamber 11 and the second connection 〇7 /, " On the other hand, the heat-treated air containing the right-handed lean & Δ sublimated material introduced into the gas treatment pipe 24 is contacted by the catalyst 30, and the retort is further oxidized and decomposed after being subjected to oxidative decomposition reaction. The end 24a is discharged from the row 4»V, the "4a", or flows back to the heat treatment chamber 11 through the connecting pipe 28 and the inlet pipe 2 2 . As described above, in the heat treatment of the dream, the IB t is also disposed because the air blowers 32, 34 and the heaters 31, 35 are disposed in the gas passage which is disposed separately from the heat treatment portion 10 (outside the heat treatment portion 10). ^ ^ ΰ, so it is possible to clean the inside of the heat treatment chamber 11 in a state where the blowers 3 2, 3 4 or the heaters 31, 3 5 4 * @ @ are prevented from malfunctioning. Further, since the method of smashing and arranging the connection, including the connection flanges u, 丨5, 25, and 26, bolts, nuts, and the like, the gas passage 21B and the heat treatment portion 1 are detachably illusory. Since the chaotic body portion and the gas outlet portion 13 are connected, it is possible to divide the heat treatment portion 1

The gas processing unit 2〇b having the xenon blowers 32 and 34 provided in the gas passage 21B and the twisted write si, ..., 31, 35 is opened.

2014-9695-PF 200907269 Thus, it is possible to clean the inside of the heat treatment chamber 11 while surely preventing the blowers 32, 34 or the heaters 31, 35 from malfunctioning, and it is possible to exchange only the heat treatment portion 10 or only the gas treatment portion. 20B. Further, in the gas treatment portion 20B, the intake side end 22a of the introduction pipe 22 is in an open state, and the air is circulated through the connection pipe 28, so that the same effects as those of the third embodiment can be obtained. Moreover, since the second connecting pipe 27 is provided to form a loop passage closer to the heat treatment chamber 11 than the loop passage formed by the connecting pipe 28, and the gas passage for heating is provided in the loop passage including the second connecting pipe 27. The heater 35 is thus capable of reusing air having a small temperature drop. In the above-described first to fourth embodiments, the connecting means for connecting the gas introduction portion 12 and the gas outlet portion 13 of the heat treatment portion 与 with the gas passages (21a to 21D) includes the connection flanges 14, 25, I5, 26 and bolts and nuts, but the invention is not limited thereto. For example, you can also use the snail

A connecting device composed of a combination of a wire and a nut may also utilize other connecting means. Further, in the fourth embodiment, the gas guiding portion 12 and the gas outlet portion 13 of the heat treatment portion are detachably separated by the connecting means (the connecting flanges 14, 15, 25, 26 and the bolts and nuts). It is connected to the gas passages (21A to 21D), but the present invention is not limited thereto. For example, the gas guiding portion 12 and the guiding person f22 may be connected by welding or the like, and the gas guide (four) 13 and the lead f23 may be connected by welding or the like. In the case of using this connection method, the air blower 32 and the like, and the heater Μ etc. are disposed in the gas passage 2014-9695-PF 16 200907269 (21A to 21D) which are separately provided in the spot heat treatment unit 1 (outside the heat treatment portion)中,田比, ^ ^ 1 ^ It is difficult to fly to the blower 32 and the heater 3", and it is possible to clean the heat treatment chamber η & ",,,,,,,,,,,,, The object of the present invention is achieved. Further, in the above-mentioned first to fourth embodiments, one (the heat treatment unit adult processing unit (2 shots to 20D) is provided on the 10th, but it may be In the case of one month, it is not limited to the Department of Production. For example, two or more gas chambers are provided. > FIG. 5 shows a case where #w gas processing units are placed in one heat treatment unit. In the heat treatment unit 1G of Fig. 5, in addition to the gas guide and the gas outlet portion 13, a gas person portion 12a and a body lead portion 13a are disposed. The gas introduction portion 12 and the gas discharge portion processing unit The gas passages 21A of m are connected to make these connections, and, = body conduction The inlet core and the gas outlet portion are connected to the gas passage 21A of the gas treatment portion 20A having the same structure to communicate these. In this configuration, 'only the gas guide portion 12 and the gas outlet portion 13 are used. In the case of 'It', as shown in Fig. 6, the additional gas passage 2i a is removed, and the top cover 18 is attached to the gas guiding portion 12a and the gas guide (four) 13a. Also, in the above embodiment, only in the gas The catalyst 30 is provided in the treatment tube 24, but the present invention is not limited thereto. For example, as shown in Fig. 7, other catalysts 17 may be provided inside the heat treatment chamber 11. At this time, a baffle may be provided inside the heat treatment chamber 11. It is also possible to provide no baffle 16 in the case of this configuration. In the case of adopting such a structure, the oxidative decomposition reaction of the sublimate can be efficiently performed by the two catalysts 3, 7 .

2014-9695-PF 200907269 (Summary of the Examples) The above examples are summarized as follows: (1) In the heat treatment of the poor example, the 埶邴 命 命 为 为 命 命 命 命 命 命 命 命 命 命 ' ' ' 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于The heat treatment chamber of the heat treatment unit is cleaned in a part of the heat treatment unit (heat treatment = body passage, so it can be prevented), the skin energy τ, the main body, the soil, or the heater malfunctioning. (2) In the above heat treatment apparatus, it is preferable to have: an introduction pipe through which the connection unit "rolls through the passage, and reversely presses the nipple to be detachably connected to the upper; and the outlet pipe, through the connection of the single and the inlet. The raft is detachably connected to the upper cymbal. With this configuration, the inlet pipe and the outlet pipe of the gas processing section are opened by the second part by the connection means. In the case where the gas processing section is opened from the heat= The heat treatment chamber of the heat treatment portion is cleaned in a state where the failure of the device is reliably prevented: machine: heat is supplied by gas treatment from the heat treatment portion, or only the gas treatment portion is exchanged. Heat treatment (3) in the above heat treatment device The gas-passing treatment tube, through the gas processing tube, the inlet side of the inlet tube: the outlet side of the outlet can be connected to 'in the gas (4). The catalyst and the heater are further disposed In this structure, the shape of the ..., the processing chamber derivates the helium gas to flow through the lead t, the gas treatment tube and the guide 2 μ and then return to the heat treatment chamber for a long time. The gas can be circulated by a blower, and the catalyst and gas can be heated by the heat of the gas treatment tube. ") In the above heat treatment device, the gas passage has a gas 2014-9695-PF 18 200907269 treatment tube, In the inlet pipe, the gas can be opened, and the outlet side of the pipe is provided with a heater, and in the above-mentioned derivation, the above catalyst and the above::; pipe: the gas processing pipe gas processing pipe and the above The introduction of the tube to;; the above-mentioned outlet tube of the above-mentioned outlet tube. One of the , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The gas in the chamber does not contain the rise W'. Therefore, the introduction of the hot body into the heat treatment chamber can always make the performance of the fresh gas reservoir difficult. It is difficult to reduce the oxidative decomposition reactivity target of the sublimate. Moreover, the gas can be guided in the introduction pipe and the outlet structure because the gas is unidirectionally looped and the fan is placed. The chamber is also used to derive gas. ..., processing to the inside 'and from the heat treatment (5) in the above heat treatment apparatus, the treatment tube and the remote connection technology, the rolling body passage has a gasification, the outlet side of the outlet tube, and the above-mentioned heater The gas processing tube is connected to the gas outlet side of the outlet tube. The gas is connected to the heater, and the gas processing tube is further provided with the catalyst and the above-mentioned catalyst. The location of the sin near the downstream part of the official can be connected through the above-mentioned connecting pipe, the inlet side of the above-mentioned introduction pipe can be in an open state, compared with f, traitor, and above, in the above-mentioned introduction pipe, the connection The location where the official is connected is close to the downstream part and can be set

2014-9695-PF 19 200907269 Gas heating heater and the above air blower. With this configuration, fresh gas can be introduced due to the introduction of the tube. Moreover, in an open state, the gas is purified by the catalyst and is heated by the addition of the gas to the side of the outlet and is introduced into the tube to open the inlet enthalpy loss. In addition, the interior of the room is treated, so it can be reduced by ",, and, because of the knees, the 膝 丄 埶 埶 埶 埶 埶 埶 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 气体 气体 气体 气体The temperature management heat exchanger is used for the temperature management of the catalyst, because of the force of the body treatment tube.... This can be used specifically for these, ', , ::: & not subject to the heating temperature of the heat-treated material The degree of energy can be obtained. (6) In the above heat treatment apparatus, the gas passage is a connecting pipe, and the above-mentioned introduction camp is provided with Bub, +, $λ^^, and the above connecting pipe. The connected position is closer to the lower jaw j than the gas heating heater and the blasting means: the outlet tube is connected to the second connecting tube. According to the configuration, the structure is used, and since The intake side end of S is in an open state, and the teaching body is looped through the connecting pipe, so that the same is obtained from the above-mentioned heat treatment device, and 'the second connecting pipe is set To form a ratio The tube ring Ή ^ ring channel is closer to the loop channel of the heat treatment chamber and the gas heating heater is placed at the back H ^. Therefore, it is possible to reuse the gas with a lower temperature drop. The new heat treatment ♦ (7) in the above heat treatment In the apparatus, a catalyst may be provided in the chamber in the heat treatment unit.

2014-9695-PF 20 200907269 The capacity of the heat treatment chamber or the amount of sublimate produced, and the ability of the gas treatment unit is selected and selected. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a heat treatment apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic view of a heat treatment apparatus of a second embodiment of the present invention. Figure 3 is a schematic view of a heat treatment apparatus of a third embodiment of the present invention. Fig. 4 is a schematic view of a heat treatment apparatus of a fourth embodiment of the present invention. Fig. 5 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention. Figure 6 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention. Figure 7 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention. [Description of main component symbols] 1A to the heat treatment device; 10 0 heat treatment portion; 11 to heat treatment chamber; 11 a to heat insulation wall; 12 to gas introduction portion; 13 to gas discharge portion; 14, 15, 八, 26 ~ Connection flange; 2 0 ~ gas treatment unit · 20A ~ gas treatment unit; 21A ~ gas passage; 2 2 ~ introduction tube

2014-9695-PF 21 200907269 23~Export tube; 24~ gas treatment tube; 3 0 ~ catalyst; 31~heater; 3 2~ blower; 33~ pretreatment agent; W ~ heat treated material.

C

2014-9695-PF 22

Claims (1)

200907269 X. Patent application scope: 1. A heat treatment device, comprising: a heat treatment portion 'having a gas guiding portion respectively communicating with a heat treatment chamber and a gas generating portion β', wherein the heat treatment chamber is for accommodating a heat-treated material, the The heat-treated product to be contained may be taken out from the heat treatment chamber; and the gas treatment portion 'haves a gas passage for guiding the heat treatment gas to the gas guide portion, and is led out from the gas discharge portion for heat treatment. a gas in which: a catalyst is disposed to decompose a sublimate generated from the object to be heat treated when heat-treating the heat-treated material; heating the catalyst to heat the catalyst; and one or more blowers, The gas for heat treatment and the gas after the heat treatment are guided in a predetermined direction. 2. The heat treatment apparatus according to claim 1, wherein the gas passage has: a 导入 introduction member detachably coupled to the gas introduction portion through a connection unit; and the outlet tube detachably coupled to the outlet unit The gas discharge unit is connected. 3. The heat treatment apparatus according to claim 2, wherein the gas passage has a gas treatment tube, ... through the gas treatment f' the inlet side of the inlet tube and the outlet side end of the outlet tube In the gas processing tube, the catalyst and the heater are provided. 4_ The heat treatment apparatus according to claim 2, wherein the gas passage of the above-mentioned 2014-9695-PF 23 200907269 has a gas treatment tube, the milk-feeding side end of n: : S is in an open state, and is introduced into the crucible Further, a heater for gas heating is provided, and a rolling-up processing tube of the right side is disposed in the outlet side end processing tube of the introduction tube, and the gas, the catalyst, and the heater are placed thereon. One of the outlet pipe and the above gas is provided with the above blower. At least 5 of the attacking introduction officer, as described in the second paragraph of the patent application scope, has a gas processing tube and a connecting tube, ',', wherein the outlet side end body processing tube of the above-mentioned outlet tube Medium gas: the ancient gas processing tube of the ancient chamber is provided with the above-mentioned catalyst and the above-mentioned heater, and the gas processing tube is disposed closer to the downstream portion than the above-mentioned guide _ _ and the above-mentioned introduction of the heater The connecting pipes of the tubes B and 匕 are connected, and the inlet side end of the s is in the open inlet pipe, which is opener than the above-mentioned connection, and is disposed near the downstream portion at the position where the gas-added _1 is connected. The heater for flower heating and the above blower. 6. The gas passage of claim 5, wherein the gas passage has a second connecting pipe, and the processing device, wherein the upper inlet pipe is closer to the downstream than the connection of the connection bt±H'-floor S, and the outlet pipe is... 4 The position of the blower near the upstream is connected to the upper G by "connecting through the above second connecting pipe. 7. If the patent application scope is set, the heat treatment device r described in the item t H:6 is in the heat treatment portion. j·诂备疮剂. Magical above the heat treatment room is also equipped with catalysis 2014-9695-PF 24