KR20080104972A - Heat treatment apparatus - Google Patents

Abstract

A heating treatment apparatus is provided to prevent the malfunction of blower or heater, washing the thermal processing chamber inside of the side of heat treatment. A heating treatment apparatus heat-treating the heat treated material comprises a respective connected gas entry site(12) in the thermal processing chamber in which it can be put in and outs, the heat treated material is admitted and side of heat treatment(10) having gas taking out portion(13); a gas processing unit(20A) including the gas path(21A) introducing the gas for the thermal process to the gas entry site, and for drawing the gas in the thermal process in the gas taking out portion are included; a catalyst(30) which disassembles the sublimate generated in the corresponding heat treated material when heat-treating the heat treated material in the gas path; a heater(31) heating up catalyst; and a blower(32) inducing the gas in the gas for the thermal process and thermal process to the predetermined direction.

Description

Heat treatment apparatus

The present invention relates to a heat treatment apparatus for heat-treating a heat treated material.

Background Art Conventionally, a heat treatment apparatus is known that heats an object to be processed contained in a heat treatment chamber by circulating air in the heat treatment chamber to heat the inside of the heat treatment chamber. The above-described heat treatment apparatus is, for example, a prebake or postbake process of a photoresist or organic thin film in an FPD (Flat Panel Display) manufacturing process. It is used for. In the above process, when heat-treating a to-be-processed object, such as an organic substrate, a volatile component contained in a photoresist etc. vaporizes and a large amount of sublimation generate | occur | produces. Problems such as the sublimation recrystallized and scattered around the heat treatment apparatus attached to the surroundings.

As a solution of the above problem, for example, in Japanese Patent Laid-Open No. 10-141868. It is described to ventilate the inside of the heat treatment chamber by heating the outside air and blowing it into the inside of the heat treatment chamber to let the air inside the heat treatment chamber flow out through the duct. By ventilating the inside of the heat processing chamber of the said form, it was possible to suppress recrystallization and adhesion of the sublimation.

However, in the heat treatment apparatus of Japanese Patent Laid-Open No. 10-141868, since a gas treatment section including a blower and a heater for circulating air into and out of the heat treatment chamber is provided between the outer wall of the heat treatment portion and the heat treatment chamber, As the sublimation adhering to the inner wall of the chamber needs to be removed by washing, electric equipment such as a blower or a heater of the gas treatment unit may cause a failure due to the cleaning liquid used for cleaning.

It is an object of the present invention to provide a heat treatment apparatus capable of cleaning the inside of a heat treatment chamber of a heat treatment portion in a state of preventing a failure of a blower or a heater.

The invention according to claim 1 of the present invention comprises a heat treatment section having a gas introduction section and a gas introduction section respectively connected to a heat treatment chamber in which a heat treated material is receivably received, and introducing a gas for heat treatment into the gas introduction section and simultaneously introducing the gas. And a gas treatment unit having a gas passage for deriving gas during heat treatment, wherein the gas passage includes a catalyst for decomposing a sublimation generated in the heat treated substance when the heat treated substance is heat treated, and at least the catalyst. And a heater for heating the gas and one or more blowers for guiding the heat treatment gas and the gas during the heat treatment in a predetermined direction.

By using the heat treatment apparatus of the present invention, it is possible to clean the inside of the heat treatment chamber of the heat treatment portion in a state of reliably preventing the failure of the blower or the heater, and replace only the heat treatment portion by separating the heat treatment portion and the gas treatment portion. It is possible to replace the gas treatment unit or to replace only the gas treatment unit, and to set the catalyst to the optimum active temperature without depending on the heating temperature of the to-be-processed object, and to match the volume of the heat treatment chamber or the amount of sublimation generated. It provides the effect of selecting and selecting the capability of the gas treatment section.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)

1 is a view showing a schematic configuration of a heat treatment apparatus according to a first embodiment of the present invention. 1 A of said heat processing apparatuses are used for the manufacturing process of FPD, for example, are installed in a clean room, and are called a clean oven.

1 A of heat processing apparatuses are equipped with the heat processing part 10 and the gas processing part 20A. The heat treatment unit 10 includes a heat treatment chamber 11 that allows the heat-treatment material W, hereinafter referred to as a material, to be received therein. The gas treatment unit 20A derives the gas during the heat treatment, for example, the air during the heat treatment, from the heat treatment chamber 11, while the gas for the heat treatment, for example, the heated air, is applied to the heat treatment chamber 11 of the heat treatment unit 10. It is provided with a gas passage (21A) for introducing.

The heat treatment unit 10 includes a gas introduction unit 12 through which a gas for heat treatment is introduced from the gas treatment unit 20A, and a gas extraction unit 13 which derives air during heat treatment from the heat treatment chamber 11. The outer side of the heat processing chamber 11 is surrounded by the heat insulation wall 11a.

Inside the heat treatment chamber 11, for example, a support member (not shown) is provided which allows one or more to-be-processed objects W to be held in a predetermined state. The support member is installed at the place indicated by the dashed-dotted line in the center of FIG. The gas introduction portion 12 has a tubular shape extending outward from the heat insulation wall 11a of the heat treatment chamber 11 in communication with the heat treatment chamber 11, and a connection flange 14 is provided at an inlet side thereof. It is provided. The gas extracting portion 13 also communicates with the heat treatment chamber 11 and has a tubular shape extending outward from the heat insulation wall 11a of the heat treatment chamber 11. The gas extraction portion 13 has a connecting flange 15 at its outlet end.

The gas passage 21A includes an introduction duct 22 connected to the gas introduction unit 12, an induction duct 23 connected to the gas extraction unit 13, and a gas provided between the introduction duct 22 and the induction duct 23. The processing duct 24 is provided. A connection flange 25 connected to the connection flange 14 of the gas introduction hole 12 is installed at the outlet side end of the introduction duct 22, and the gas extraction unit 13 is provided at the inlet side end of the induction duct 23. The connection flange 26 connected to the connection flange 15 of () is installed. Then, the connecting flange 25 of the introduction duct 22 and the connecting flange 14 of the gas introduction portion 12 are connected by means of, for example, a bolt and a nut, Means for fastening the connecting flange 26 and the connecting flange 15 of the gas extraction hole 13, for example, by means of bolts and nuts, connected to the heat treatment chamber 11 and the gas treatment unit of the heat treatment section 10 21 A of gas passages of 20A are connected in communication, and a circulation passage is formed. In addition, the air volume adjusting damper (not shown) is provided in the gas passage 21A.

In addition, the gas treatment duct 24 is provided with a catalyst 30, a heater 31, a blower 32, and a pretreatment 33. The blower 32 is for allowing air to circulate through the circulation passage, and the heater 31 serves to heat the catalyst 30 and the air. The air heated by the heater 31 passes through the introduction duct 22 and enters the heat treatment chamber 11, where the heat-treated material W is heated. Sublimation may generate | occur | produce from the to-be-processed object W at the time of the heat processing which heats the said to-be-processed object W. FIG. Air at the time of heat treatment includes a sublimate, and passes through the catalyst 30 through the gas extraction unit 13 and the gas extraction duct 23.

The catalyst 30 is for promoting the oxidative decomposition reaction of the sublimate contained in the air during the heat treatment, and for example, a precious metal such as platinum (Pt) or palladium (Pd), or an active metal such as a noble metal alloy thereof Are employed. The catalyst 30 of this type exhibits catalytic activity under a temperature atmosphere of about 150 to 350 ° C. For this reason, in this embodiment, the heater 31 is arrange | positioned at the front side of the catalyst 30 (upstream side rather than the catalyst 30 in the direction through which air flows through a circulation path). In addition, when the catalyst 30 may be poisoned by the introduction of a substance called a catalyst poison, for example, Si, P, S, or the like into the sublimate, the pretreatment agent may be It is preferable to arrange 33 in front of the catalyst 30.

Therefore, in the heat treatment apparatus 1A according to the first embodiment having the above configuration, the blower 32 and the heater 31 are provided in the gas passage 21A on the outside of the heat treatment portion 10 away from the heat treatment portion 10. By arranging, it is possible to clean the inside of the heat treatment chamber 11 in a state of preventing failure of the blower 32 and the heater 31. In addition, the gas passage portion (12) and the gas extracting portion (13) of the heat treatment portion (10) are provided with a gas passage (via a connecting means composed of connecting flanges (14, 15, 25, 26) and bolts and nuts ( By detachably attaching the 21A to the gas passage 21A, the gas treatment unit 20A having the blower 32 and the heater 31 installed in the gas passage 21A is separately removed from the heat treatment unit 10. 10 can be separated from each other, whereby the inside of the heat treatment chamber 11 can be cleaned in a state where the failure of the blower 32 and the heater 31 is reliably prevented.

In addition, by allowing the gas derived from the heat treatment chamber 11 to pass through the derivation duct 23, the gas treatment duct 24, and the introduction duct 22 in order to return to the heat treatment chamber 11 again, In addition to being able to circulate the gas with one blower 32, the catalyst 30 and the gas can be heated by the heater 31. In addition, by separating the heat treatment unit 10 and the gas treatment unit 20A from each other, it is possible to replace only the heat treatment unit 10 or to replace only the gas treatment unit 20A.

(2nd embodiment)

2 is a view showing a schematic configuration of a heat treatment apparatus according to a second embodiment of the present invention. Here, the same components as in FIG. 1 are given the same reference numerals.

The heat treatment apparatus 1D includes a gas treatment unit 20D different from the gas treatment unit 20A of the first embodiment. That is, the gas treatment unit 20D is provided with an open end 22a at the inlet side of the inlet duct 22 and a gas passage 21D having the open end 24a at the outlet side of the gas treatment duct 24. Equipped. The catalyst 30 and the heater 31 are installed in the gas treatment duct 24 of the gas treatment unit 20D, and the blower 34 and the heater 35 are provided in the introduction duct 22. In addition, although the pretreatment agent is not shown in FIG. 2, it is preferable to provide a pretreatment agent.

In the heat treatment apparatus 1D having the above configuration, the air flows as follows. That is, the air flowing into the introduction duct 22 from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11. The heated air is provided to the heat treatment of the material (W). The air (air at the time of heat treatment) provided for the heat treatment of the raw material W includes a sublimate and is introduced into the derivation duct 23 and then guided to the gas treatment duct 24. In the gas treatment duct 24, the air during the heat treatment undergoes the oxidative decomposition reaction of the sublimation by the catalyst 30, and is then discharged to the outside through the open end 24a. In addition, reference numeral 16 shown in the middle of FIG. 2 is a baffle plate for allowing air to reflux in the interior of the heat treatment chamber 11 to flow from the gas introduction section 12 to the gas extraction section 13. The passage 16a is formed on the side opposite to the gas introduction portion 12 of the heat treatment chamber 11.

Accordingly, in the heat treatment apparatus 1D, the blower 34 and the heaters 31 and 35 are installed in the gas passage 21D outside the heat treatment unit 10 separated from the heat treatment unit 10. ) And the inside of the heat treatment chamber 11 can be cleaned in a state of preventing the failure of the heaters 31 and 35. In addition, the gas introduction portion 12 and the gas extraction portion 13 of the heat treatment portion 10 are connected to the gas passage (via the connecting means consisting of the connecting flanges 14, 15, 25, 26 and bolts and nuts). By detachably connecting 21D, it is possible to separate gas processing unit 20D having blower 34 and heaters 31 and 35 provided in gas passage 21D thereof from heat treatment unit 10. Accordingly, the inside of the heat treatment chamber 11 can be cleaned in such a manner as to prevent failure of the blower 34 and the heaters 31 and 35.

In addition, by removing the heat processing part 10 and the gas processing part 20D from each other, it becomes possible to replace only the heat processing part 10 or only the gas processing part 20D.

Furthermore, air sucked from the inlet side open end 22a of the inlet duct 22 is heated by the heater 35 to be introduced into the heat treatment chamber 11, and the inductor duct 23 and the gas treatment duct 24 are removed. By having it consist of the form derived past, the air introduce | transduced into the heat processing chamber 11 does not have a sublimation. For this reason, fresh air is always introduced into the heat treatment chamber 11, thereby making it possible to prevent the oxidative decomposition reaction of the sublimation by the catalyst 30 from being lowered. In addition, in the heat treatment apparatus 1D, the air flows in one direction, and the blower 34 is installed in the introduction duct 22, thereby introducing gas into the heat treatment chamber 11 through the introduction duct 22. The outflow duct 23 allows gas to be discharged from the heat treatment chamber 11.

In addition, although the blower 34 was provided in the introduction duct 22 in the said 2nd Embodiment, it is not limited to this. For example, the blower may be installed in the induction duct 23 or the gas treatment duct 24, or may be installed in at least one of the introduction duct 22, the gas treatment duct 24, and the induction duct 23. It is also preferable.

(Third embodiment)

3 is a view showing a schematic configuration of a heat treatment apparatus according to a third embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same component as FIG.

The heat treatment apparatus 1C includes a gas treatment unit 20C different from the gas treatment unit 20D of the second embodiment. That is, the gas processing part 20C is provided with the gas passage 21C provided with the connection duct 28 which connected the introduction duct 22 and the gas processing duct 24. As shown in FIG. One end of the connection duct 28 is in communication with the portion between the outlet 30a and the place where the catalyst 30, the heater 31, and the blower 32 are installed in the middle of the gas treatment duct 24. The other end of the gas passage 21C is connected to the middle portion of the introduction duct 22. 20 C of gas processing parts are comprised so that the heater 35 and the blower 34 may be provided in the downstream position rather than the site | part which the connection duct 28 joins in the introduction duct 22. As shown in FIG. In addition, although the pretreatment agent is not shown in FIG. 3, it is also preferable to provide a pretreatment agent. In addition, the blower 32 may be omitted.

In the heat treatment apparatus 1C having the above configuration, the flow of air is made as follows. That is, the air introduced into the introduction duct 22 from the open end 22a is heated by the heater 35 and flows into the heat treatment chamber 11. The heated air contributes to the heat treatment of the raw material (W). The air at the time of heat treatment contains the sublimate, but the air at the time of heat treatment flows into the induction duct 23 and is then led to the gas treatment duct 24. In the gas treatment duct 24, the air during the heat treatment undergoes the oxidative decomposition reaction of the sublimation by the catalyst 30, and thereafter, is discharged from the open end 24a, or the connecting duct 28 and the introduction duct 22. It returns to the heat treatment chamber 11 via. In addition, the code | symbol 16 shown in the middle part of FIG. 3 is the same baffle plate as 2nd Embodiment.

Therefore, in the heat treatment apparatus 1C according to the third embodiment, the blowers 32 and 34 and the heaters 31 and 35 are provided in the gas passage 21C outside the heat treatment portion 10 separated from the heat treatment portion 10. Since the is provided, it is possible to clean the inside of the heat treatment chamber 11 in such a manner as to prevent failure of the blowers 32 and 34 and the heaters 31 and 35. In addition, the gas passage portion (12) and the gas extracting portion 13 of the heat treatment portion 10, through the connecting means consisting of connecting flanges (14, 15, 25, 26) and bolts, nuts (gas passage) ( By detachably connecting the 21C, it is possible to separate the gas treatment unit 20C having the blowers 32 and 34 and the heaters 31 and 35 provided in the gas passage 21C from the heat treatment unit 10. Done. As a result, the inside of the heat treatment chamber 11 can be cleaned while the blowers 32 and 34 and the heaters 31 and 35 are reliably prevented, and only the heat treatment unit 10 can be replaced. Alternatively, only the gas treatment unit 20C can be replaced.

In addition, in the heat treatment apparatus 1C, the inlet end 22a of the introduction duct 22 is opened, so that fresh air can be introduced. In addition, in the inlet duct 22, the air that is purified by the catalyst 30 derived from the heat treatment chamber 11 and heated by the heater 31 is joined through the connection duct 28 so that the heat loss is reduced. Work is possible. In addition, a gas heating heater 35 installed in the introduction duct 22 is used for temperature management of the heat treatment chamber 11 and a heater 31 installed in the gas treatment duct 24 controls the temperature of the catalyst 30. By being used for the purpose, it becomes possible to use these heaters 35 and 31 exclusively, respectively. Therefore, it is possible to set the catalyst 30 to an optimum active temperature without being influenced by the heating temperature (set temperature) of the to-be-processed object W.

(4th Embodiment)

4 is a view showing a schematic configuration of a heat treatment apparatus according to a fourth embodiment of the present invention. In addition, the same code | symbol is attached | subjected in the same component as FIG.

The heat treatment apparatus 1B includes a gas passage 21B having a second connection duct 27. One end of the second connection duct 27 is located on the downstream side from the position where the connection duct 28 joins in the introduction duct 22 than the position where the gas heating heater 35 and the blower 34 are provided. It is located upstream and connected. The other end of the second connection duct 27 is connected in the middle of the lead-out duct (23). The second connecting duct 27 is surrounded by a heat insulating wall.

The gas treatment unit 20B is configured in the following form. That is, the gas treatment duct 24 is provided with a catalyst 30, a heater 31, a blower 32, and the like. The blower 34, the heater 35, etc. of the above-mentioned form are provided in the position downstream of the joining point of the 2nd connection duct 27 in the middle of the introduction duct 22. As shown in FIG. The heater 35 is installed for the purpose of heating the air introduced into the heat treatment chamber 11. In addition, the baffle plate 16 is provided inside the heat treatment chamber 11. Here, although the pretreatment agent was abbreviate | omitted in FIG. 4, the form which provides a pretreatment agent is preferable.

In the heat treatment apparatus 1B having the above configuration, the air flows as follows. In other words, the air introduced into the introduction duct 22 from the open end 22a is heated by the heater 35 to be introduced into the heat treatment chamber 11, and contributes to the heat treatment in the heat treatment chamber 11. The air at the time of the heat treatment is to include a sublimation, the air at the time of heat treatment flows into the lead-in duct 23 and is classified toward the second connection duct 27 and the gas treatment duct 24. The air introduced into the second connection duct 27 is heated by the heater 35 in the introduction duct 22 and returns to the heat treatment chamber 11. That is, part of the air circulates between the heat treatment chamber 11 and the second connection duct 27. On the other hand, the air during the heat treatment including the sublimate introduced toward the gas treatment duct 24 is discharged from the open end 24a after undergoing the oxidative decomposition reaction of the sublimate according to the catalyst 30, or the connection duct 28 And the heat return chamber 11 through the introduction duct 22.

Accordingly, in the heat treatment apparatus 1B, the blowers 32 and 34 and the heaters 31 and 35 are provided in the outer gas passage 21B of the heat treatment portion 10 separated from the heat treatment portion 10. It is possible to clean the inside of the heat treatment chamber 11 in such a manner as to prevent the failure of the 32 and 34 and the heaters 31 and 35. In addition, the gas passage (12) and the gas extracting portion (13) of the heat treatment portion (10), through the connecting means consisting of connecting flanges (14, 15, 25, 26) and bolts and nuts through the gas passage ( By detachably connecting the 21B, it is possible to separate the gas treatment unit 20B having the blowers 32 and 34 and the heaters 31 and 35 installed in the gas passage 21B from the heat treatment unit 10. Done. As a result, the inside of the heat treatment chamber 11 can be cleaned while the blowers 32 and 34 and the heaters 31 and 35 are reliably prevented, and only the heat treatment unit 10 can be replaced. Alternatively, only the gas processing unit 20B can be replaced.

Further, in the heat treatment apparatus 1B, the inlet end 22a of the inlet duct 22 is opened and the air is circulated through the connection duct 28, thereby effecting the same effect as in the third embodiment. It is possible to get Furthermore, a circulation path is formed in the second connection duct 27 in the vicinity of the heat treatment chamber 11 rather than the circulation path by the connection duct 28, and a gas heater heater is provided in the circulation path including the second connection duct 27. By making it the structure which 35 is provided, it becomes possible to use the air with little temperature drop again.

Here, in the above-described first to fourth embodiments, the connecting flange 14 is a means for connecting the gas introducing portion 12 and the gas extracting portion 13 of the heat treatment portion 10 and the gas passages 21A to 21D. , 15, 25, 26) and bolts and nuts are used, but the present invention is not limited thereto. For example, a connecting means or other mechanism in which a male screw and a female screw are combined may be used.

In addition, in the above-described first to fourth embodiments, the gas introducing portion 12 and the gas extracting portion 13 of the heat treatment portion 10, the gas passages 21A to 21D, and the like are connected to each other (connection flanges 14, 15, 25, 26) and bolts and nuts), but the structure is detachably connected, but the present invention is not limited thereto. For example, the structure which connected the gas introduction part 12 and the introduction duct 22 by welding etc., and connected the gas delivery part 13 and the extraction duct 23 by welding etc. is also preferable. Also in the above configuration, the blower 32, the heater 31, and the like are arranged in the gas passages 21A to 21D outside the heat treatment unit 10 separated from the heat treatment unit 10, and the blower 32 is disposed. By making the cleaning liquid hardly reach the heater 31 and the like, it becomes possible to clean the heat treatment chamber 11 in a state of preventing the failure of the blower and the heater, thereby achieving the object of the present invention.

In addition, although the 1st thru | or 4th embodiment mentioned above arrange | positions one gas processing part 20A-20D with respect to one heat processing part 10, this invention is not limited to this. A configuration in which two or more gas treatment units are disposed with respect to one heat treatment unit 10 is also preferable. For example, a case where two gas treatment units are disposed with respect to one heat treatment unit 10 will be described based on, for example, FIG. 5.

In the heat treatment part 10 of the form shown in FIG. 5, in addition to a set of the gas introducing part 12 and the gas extracting part 13, an additional set of the gas introducing part 12a and the gas extracting part 13a are provided. do. A gas passage 21A of the gas treatment unit 20A is connected to the gas introduction unit 12 and the gas introduction unit 13, and a gas treatment unit having the same configuration as the gas introduction unit 12a and the gas introduction unit 13a. Preferably, the gas passage 21A of 20A is configured to communicate with each other. In the above configuration, when only one set of the gas introducing portion 12 and the gas extracting portion 13 is used, the gas introducing portion 12a is removed by removing the gas passage 21A added in the form shown in FIG. And the stopper 18 is attached to the gas extracting portion 13a.

Accordingly, in the above-described embodiment, the catalyst 30 is arranged in the gas treatment duct 24, but the present invention is not limited thereto. For example, in the form as shown in FIG. 7, the structure which arrange | positions the separate catalyst 17 also in the inside of the heat processing chamber 11 is also preferable. At this time, the inside of the heat treatment chamber 11 may or may not install the baffle plate 16. With the above configuration, the oxidative decomposition reaction of the sublimation with the two catalysts 30 and 17 can be performed with high efficiency.

Outline of Embodiment

In summary, there are the following types.

(1) In the heat treatment apparatus of the present embodiment, the blower or the heater is disposed in the gas passage disposed on the outside of the heat treatment portion separated from the heat treatment portion to clean the inside of the heat treatment chamber in the state of preventing the blower or the heater from failure. You can do it.

(2) The heat treatment apparatus, wherein the gas passage includes an introduction duct detachably connected to the gas introduction portion via a connecting means, and an induction duct detachably connected to the gas extracting portion via a connecting means. It is preferable. In this aspect, it is possible to separate the induction duct and the induction duct from the gas treatment unit from the heat treatment unit by the connecting means. When the gas treatment unit is separated from the heat treatment unit, it is possible to clean the inside of the heat treatment chamber in the heat treatment unit in a state that reliably prevents a blower or heater failure, and by separating the heat treatment unit from the gas treatment unit and the like. It is possible to replace only the parts or to replace only the gas treatment part.

(3) In the heat treatment apparatus, a gas treatment duct is connected between an inlet end of the introduction duct and an outlet end of the lead duct so that the catalyst and the heater are installed in the gas treatment duct. . In this state, a circulation path is formed in which the gas derived from the heat treatment chamber passes in the order of the induction duct, the gas treatment duct, and the induction duct and returns to the heat treatment chamber again. For this reason, gas can be circulated by one blower, and a catalyst, gas, etc. can be heated by the heater of a gas processing duct.

(4) In the heat treatment apparatus, an inlet end of the induction duct is opened, and a gas heating heater is installed in the introduction duct, and the catalyst and the heater are provided at an outlet end of the induction duct. Preferably, the gas treatment duct is connected and the blower is installed in at least one of the derivation duct, the gas treatment duct, and the introduction duct.

In the above aspect, the gas sucked from the open inlet end of the introduction duct is heated by the gas heating heater to be introduced into the heat treatment chamber, and introduced into the heat treatment chamber by causing the gas to be led out through the leading duct and the gas treatment duct. The resulting gas is in the form of no sublimation. For this reason, it is possible to make it difficult to reduce the oxidative decomposition reaction of the sublimation by a catalyst by always introducing fresh gas into the heat treatment chamber. In addition, in the above embodiment, by allowing the gas to flow in one direction, it is possible to install a blower in at least one of the induction duct, the induction duct, and the gas treatment duct, thereby allowing gas introduction into the heat treatment chamber and gas extraction from the heat treatment chamber.

(5) In the heat treatment apparatus, when the gas treatment duct having the catalyst, the heater, and the like is connected to the outlet side end of the lead-in duct, the gas treatment duct may be used in a place where the catalyst, the heater, etc. are installed. The position on the downstream side and the introduction duct are in communication with each other via a connection duct, and the inlet side end portion of the introduction duct is opened, and the gas is heated downstream from the connection position of the connection duct in the introduction duct. It is preferable that a heater, the blower, and the like are provided.

In this aspect, fresh gas can be introduced by opening the inlet end of the introduction duct. In addition, the gas derived from the heat treatment chamber is purified by the catalyst and then introduced into the introduction duct through the connection duct in the state heated by the heater. For this reason, it is possible to raise the gas sucked from the open inlet side end of the introduction duct and introduce it into the heat treatment chamber, thereby reducing the heat loss. In addition, the gas heating heater provided in the introduction duct is used for temperature management of the heat treatment chamber, and the heater installed in the gas treatment duct is used for temperature management of the catalyst, thereby making it possible to use such a heater exclusively. Therefore, it is possible to set the catalyst to the optimum active temperature without depending on the heating temperature of the object to be treated.

(6) In the above heat treatment apparatus, the connecting duct is positioned downstream from the position where the connection duct is connected, and the position of the upstream side of the gas heating heater and the blower, and the induction duct are connected to the second. It is desirable to be in communication via a duct. In this aspect, the inlet end of the introduction duct is opened, and then the gas is circulated through the connection duct, thereby obtaining the same effect as the heat treatment apparatus. The circulation path is formed by the second connection duct in the vicinity of the heat treatment chamber rather than the circulation path by the connection duct, and the gas heating heater is installed in the circulation path. Work is possible.

(7) In the heat treatment apparatus, a catalyst is also preferably provided in the heat treatment chamber of the heat treatment portion. This configuration makes it possible to select and select the capacity of the gas treatment unit in accordance with the volume of the heat treatment chamber or the amount of sublimation generated.

Although preferred embodiments of the present invention have been described above, the present invention is not limited to the above, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention. Belongs to the scope of.

1 is a schematic configuration diagram of a heat treatment apparatus according to a first embodiment of the present invention.

2 is a schematic structural diagram of a heat treatment apparatus according to a second embodiment of the present invention.

3 is a schematic structural diagram of a heat treatment apparatus according to a third embodiment of the present invention.

4 is a schematic structural diagram of a heat treatment apparatus according to a fourth embodiment of the present invention.

5 is a schematic structural diagram of a heat treatment apparatus according to another embodiment of the present invention.

6 is a schematic structural diagram of a heat treatment apparatus according to another embodiment of the present invention.

7 is a schematic structural diagram of a heat treatment apparatus according to another embodiment of the present invention.

* Brief description of symbols for the main parts of the drawings *

10: heat treatment unit 11: heat treatment chamber

12: gas introduction portion 13: gas introduction portion

14, 15, 25, 26: flange 22: introduction duct

23: derived duct 24: gas treatment duct

28: connection duct

30: catalyst 31, 35: heater

32, 34: blower 33: pretreatment agent

Claims (7)

A heat treatment portion having a gas introduction portion and a gas extraction portion respectively connected to the heat treatment chamber in which the heat treated material is receivably received; A gas treatment part having a gas passage for introducing a heat treatment gas into the gas introducing part and deriving gas during the heat treatment from the gas introducing part; The gas passage includes a catalyst for decomposing a sublimate generated in the heat treated material when the heat treated material is heat treated, a heater for heating at least the catalyst, a gas for heat treatment and a gas during the heat treatment in a predetermined direction. Heat treatment apparatus characterized in that one or more blowers are installed to guide to. The gas passage according to claim 1, wherein the gas passage includes an introduction duct detachably connected to the gas introduction portion via a connecting means, and a lead duct detachably connected to the gas extracting portion via a connecting means. Heat treatment apparatus characterized in that. The heat treatment according to claim 2, wherein the inlet end of the introduction duct and the outlet end of the lead duct are connected via a gas treatment duct, and the catalyst and the heater are installed in the gas treatment duct. Device. According to claim 2, wherein the inlet end of the introduction duct is opened, the heater for gas heating is installed in the introduction duct, A gas treatment duct having the catalyst and the heater is connected to an outlet end of the lead-in duct; And the blower is installed in at least one of the derivation duct, the gas treatment duct, and the introduction duct. The gas treatment duct having the catalyst and the heater is connected to an outlet end of the lead-in duct. In the gas treatment duct, a position downstream from the place where the catalyst and the heater are installed, and the introduction duct is connected in communication with each other via a connection duct. And an inlet end of the introduction duct being opened, and a gas heating heater and the blower are provided downstream of the connection position of the connection duct in the introduction duct. 6. The induction duct communicates with the induction duct via a second connection duct at a position upstream of the gas heater and the blower that is downstream from the position where the connection duct is connected. Heat treatment apparatus, characterized in that connected. The method according to any one of claims 1 to 6, And a separate catalyst is installed in the heat treatment chamber of the heat treatment portion.

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