KR101461675B1 - Heat treatment apparatus - Google Patents

Abstract

The present invention provides a heat treatment apparatus which makes it difficult for a vapor generated from a heat treatment article to flow out after a gas lead-out hole at the time of heat treatment.

The apparatus comprises a heat processing chamber (11) for allowing a material to be heat-treated to be received and received therein and a device body (10) having a heating chamber (12) communicating with the heat treatment chamber, The heat treatment object is subjected to heat treatment by heating the heat treatment gas introduced into the heating chamber 12 through the gas introduction hole 14 in the heating chamber 12, And the gas at the time of heat treatment is led out from the heat treatment chamber 11 through the lead-out hole 16. In the heat treatment apparatus, a catalyst (22) capable of decomposing the sludge generated in the heat treatment product contained in the gas during the heat treatment is installed in such a manner as to block the inlet (16a) of the gas discharge hole (16).

Heat treatment, heat treatment material, heating chamber, gas introduction hole, gas extraction hole,

Description

[0001] Heat treatment apparatus [0002]

The present invention relates to a heat treatment apparatus for heat-treating a subject to be heat-treated.

BACKGROUND ART Conventionally, there is known a heat treatment apparatus for heating an object to be heat-treated accommodated in a heat treatment chamber by circulating air in the heat treatment chamber and heating the inside of the heat treatment chamber. The above-described heat treatment apparatus can be used for, for example, prebaking photoresist or organic thin film in a process of manufacturing an FPD (flat panel display, FPD), postbaking process . In the above process, volatile components contained in the photoresist or the like are vaporized when the heat-treated article such as a glass substrate is heat-treated, and a large amount of the vaporized component is generated. There arises a problem that the above-mentioned sludge is recrystallized and scattered around the periphery of the heat treatment apparatus and adhered to the periphery.

As a solution to the above problem, for example, in Japanese Patent Application Laid-Open No. 10-141868. It is described that the outside air is heated and blown into the heat treatment chamber to ventilate the inside of the heat treatment chamber as the air in the heat treatment chamber flows out through the duct. It was possible to suppress the recrystallization of the sublimate and the adherence of the periphery by ventilating the inside of the heat treatment chamber of the above form.

However, in addition to the ventilation of the heat treatment room or the ventilation, it is considered to arrange a catalyst in order to remove the sludge in the heat treatment chamber. However, even in the case of disposing the catalyst, depending on the arrangement position thereof, the sludge generated by the heat treatment flows out to the gas outlet hole without being treated by the catalyst, and the gas outlet outlet and the outlet duct connected thereto are recrystallized So that it was attached. Therefore, there remains a problem to be improved in the above-mentioned heat treatment apparatus.

SUMMARY OF THE INVENTION An object of the present invention is to provide a heat treatment apparatus that prevents a vaporized product generated from a heat-treated product from flowing out after a gas discharge hole at the time of heat treatment.

According to one aspect of the present invention, there is provided a heat treatment apparatus comprising: a heat treatment chamber for allowing a heat-treated product to be received and received; and a device body having a heating chamber communicating with the heat treatment chamber, A heat treatment apparatus for heat-treating the heat-treated article according to heating the introduced heat-treating gas in the heating chamber, passing through a gas outlet hole provided in the heat-treating chamber and drawing gas from the heat-treatment chamber, And a catalyst capable of decomposing the sludge generated in the heat treatment material contained in the gas during the heat treatment is installed in a manner blocking the inlet of the gas outlet hole.

The heat treatment apparatus of the present invention can prevent the condensate generated from the heat-treated product from flowing out from the gas lead-out hole at the time of the heat treatment, suppress the temperature decrease of the catalyst and improve the treatment efficiency of the catalyst, It is possible to further improve the acceleration of the oxidative decomposition reaction and to cause part of the gas at the time of the heat treatment discharged from the gas lead-out hole to return to the gas introduction hole so that the heat of the gas at the time of heat treatment is used again for the heat treatment of the heat- And it is possible to perform the heat treatment with the fresh gas introduced from the gas introduction hole, so that it is possible to suppress the increase of the concentration of the vaporization in the heat treatment chamber even if the catalyst deteriorates.

Hereinafter, preferred embodiments for carrying out the present invention will be described in detail with reference to the drawings.

(First Embodiment)

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing a schematic configuration of a heat treatment apparatus according to a first embodiment of the present invention; Fig. The heat treatment apparatus 1A is used, for example, in a manufacturing process of an FPD. The heat treatment apparatus 1A is installed in a clean room and is called a so-called clean oven.

The heat treatment apparatus 1A includes a heat treatment chamber 11 for allowing a heat treatment product W (hereinafter referred to as a material) to be received and received and a heating chamber 12 for supplying heated air to the heat treatment chamber 11 And a main body 10 of the apparatus. As shown in the drawing, the heating chamber 12 is disposed above the heat treatment chamber 11.

The apparatus main body 10 is provided with four side surfaces (side walls), a ceiling surface (bottom surface), a bottom surface (bottom surface), and the like and has a rectangular cross section. Here, the right side wall (right side wall) is denoted by 10a, the inner side face (inner side wall) is denoted by 10b, the left side face (left side wall) by 10c, the ceiling face by 10d and the bottom face by 10e.

A gas introducing hole 14 is provided at a position corresponding to the heating chamber 12 with respect to the right side face 10a. That is, the gas introduction holes 14 are provided on the side wall of the heating chamber 12. An introduction duct (15) provided outside the right side face (10a) is connected to the gas introduction hole (14). A gas outlet hole 16 is provided at a position corresponding to the height of the right side face 10a of the heat treatment chamber 11 (for example, a lower position near the bottom of the heat treatment chamber 11 through the figure) have. That is, the gas lead-out hole 16 is provided on the side wall of the heat treatment chamber 11. And a draft duct 17 provided on the outside of the right side face 10a is connected to the gas lead-out hole 16 to communicate therewith.

The introduction duct 15 and the gas introduction hole 14 allow the outside air to be introduced into the heating chamber 12 and the gas lead-out hole 16 and the lead-out duct 17 are arranged in such a manner that air in the heat- .

A separation plate 13 is provided between the heating chamber 12 and the heat treatment chamber 11. The separator plate 13 is installed horizontally across the inner side surface 10b and a front side surface (not shown) facing the inner side surface 10b, and a gap (gap) is formed between the separator plate 13 and the right side surface 10a. 13a. A gap 13b is formed between the separation plate 13 and the left side face 10c. That is, the apparatus main body 10 is provided with a gap 13a provided at a side close to the gas introducing hole 14 and the gas discharging hole 16, a gas introducing hole 14 and a gas introducing hole 16, A gap 13b is formed.

A heater 20 and a blower 21 are installed in the heating chamber 12 located above the separator plate 13. The heater 20 heats the outside air introduced through the introduction duct 15 and the gas introduction hole 14 and air circulating in the apparatus main body 10. [ The blower 21 sends out the heated outside air and air from the heat treatment chamber 11. The gap 13a is disposed on the suction side with respect to the blower 21 and the gap 13b is disposed on the delivery side with respect to the blower 21. [

The catalyst 22 is attached to the front side of the gas outlet 16 in the right side surface 10a of the heat treatment chamber 11. The inlet 16a of the gas outlet 16 through the catalyst 22 It becomes blocked. Here, the catalyst 22 is fixed by a fixing member (not shown).

Further, a holding member (not shown) is provided inside the heat treatment chamber 11, for example, to hold one or two or more heat treatments W in a predetermined state. As shown in Fig. 2, the position of the holding member is indicated by a chain double-dashed line.

The catalyst 22 is for promoting the oxidative decomposition reaction of the sublimate contained in the air during the heat treatment, and for example, an active metal such as platinum (Pt) and a noble metal such as palladium (Pd) and an alloy of the noble metal is employed . The catalyst 22 of this type exhibits catalytic activation under a temperature atmosphere of about 150 to 200 ° C.

The air introduced into the heating chamber 12 through the introduction duct 15 and the gas introduction hole 14 is heated by the heater 20 and the air is introduced into the gap 21 by the blower 21, (13b) to the heat treatment chamber (11). The heated air introduced into the heat treatment chamber 11 is once again supplied to the heating chamber 12 through the gap 13a and circulated. During the circulation, a part of the air passes through the gas outlet hole 16 and the outlet duct 17 and is exhausted to the outside. The circulating air supplied again to the heating chamber 12 through the gap 13a is mixed with the air introduced from the gas introducing hole 14.

Then, the work W in the heat treatment chamber 11 is heat-treated by the air flowing in the above-described manner. At this time, the ascending material A is generated from the work W, and the ascending material A is mixed with the air during the heat treatment and moved. When the ascending cargo A comes into contact with the catalyst 22 disposed at the inlet 16a of the gas outlet 16, the ascending cargo A is oxidized and decomposed to remove it. The air from which the ascending freight A is removed passes through the gas outlet hole 16 and the outlet duct 17 and is exhausted.

Therefore, the following effects can be obtained in the heat treatment apparatus 1A according to the first embodiment.

(a) Since the catalyst 22 is provided in such a manner as to block the inlet 16a of the gas lead-out hole 16, the air 22 in the air during the heat treatment, including the hydrogenation product A generated from the heat- All of the air exhausted through the extraction hole 16 is brought into contact with the catalyst 22. Therefore, it is possible to make it difficult for the ascending material A to flow out from the gas discharge hole 16.

(A) can be disassembled by the catalyst 22 before the air at the time of heat treatment including the ascending cargo (A) is removed into the outlet duct (b). Therefore, the temperature of the catalyst 22 can be suppressed from lowering, and the treatment efficiency of the catalyst 22 can be improved.

(c) Since the catalyst 22 is provided in the heat treatment chamber 11, it is possible to use a large one that is not accommodated in the gas discharge hole 16. The air during the heat treatment including the ascorbic acid A circulates in the heat treatment chamber 11 so that the catalyst 22 flows in the heat treatment chamber 11 as it is installed in the heat treatment chamber 11 It is possible to improve the frequency with which the catalyst 22 is brought into contact with the charged product A Thereby making it possible to further promote the promotion of the oxidative decomposition reaction of the sublimate according to the catalyst 22. [

(Second Embodiment)

Fig. 2 is a diagram showing a schematic configuration of a heat treatment apparatus according to a second embodiment of the present invention. Fig. Here, the same components as those in Fig. 1 are denoted by the same reference numerals.

The heat treatment apparatus 1B is provided with a partition plate 30 disposed between the heating chamber 12 and the heat treatment chamber 11 with respect to the partition plate 13 of the heat treatment apparatus 1A of the first embodiment. The partition plate 30 is horizontally supported along the front side surfaces of the right side surface 10a and the inner side surface 10b of the apparatus main body 10. [ A gap 30a is formed between the partition plate 30 and the left side surface 10c. As a result, the gap 30a is provided on the opposite side of the right side surface 10a where the gas introduction hole 14 and the gas discharge hole 16 are provided. In other words, a gap 30a is provided on the delivery side with respect to the blower 21, but no gap is formed on the suction side of the blower 21.

In the heat treatment apparatus 1B, the air introduced into the heating chamber 12 through the introduction duct 15 and the gas introduction hole 14 is heated by the heater 20 and blown by the blower 21 to the gap (30a) and supplied to the heat treatment chamber (11). Then, the air is not returned to the heating chamber 12, and the vaporized product A is removed by the catalyst 22 and exhausted through the gas outlet hole 16 and the outlet duct 17. The air introduced into the apparatus main body 10 from the gas introduction hole 14 moves in the order of the heating chamber 12, the heat treatment chamber 11 and the gas outlet hole 16, It is not returned to the heating chamber 12.

Therefore, in the second embodiment, the same effects (a) to (c) as those of the first embodiment are obtained, and in addition, the following effect (d) is obtained.

(d) Since the air does not return to the heating chamber 12 from the heat treatment chamber 11, the air supplied from the heating chamber 12 to the heat treatment chamber 11 is returned to the fresh air do. This makes it possible to carry out the heat treatment with the fresh air introduced from the gas introduction hole 14 so that even if the catalyst 22 is deteriorated, the increase in the concentration of the vaporization in the heat treatment chamber 11 is suppressed Work becomes possible. It is also possible to suppress the occurrence of stagnation of air in the heat treatment chamber 11 and to suppress the increase of the concentration of the condensate in the heat treatment chamber 11 accompanying the deterioration of the catalyst 22 Work becomes possible.

(Third Embodiment)

Fig. 3 is a diagram showing a schematic configuration of a heat treatment apparatus according to a third embodiment of the present invention. 1 are denoted by the same reference numerals.

The heat treatment apparatus 1C is provided with the reflux duct 18 for returning a part of the air flowing through the lead duct 17 to the lead duct 15. The heat treatment apparatus 1C according to the first embodiment, . One end of the reflux duct 18 is communicatively connected to the middle portion of the introduction duct 15 while the other end of the reflux duct 18 is connected to the middle portion of the duct 17. The reflux duct 18 includes a blower 19 therein to allow air to flow from the other end toward the one end.

Therefore, in the heat treatment apparatus 1C, the effects (a), (b) and (c) can be obtained in the same manner as in the first embodiment, and the following effect (e) is obtained.

(e) A part of the air at the time of heat treatment exhausted through the gas lead-out hole 16 is returned to the gas introduction hole 14 (heating chamber 12) through the reflux duct 18, It is possible to use it again for the heat treatment of the water W.

The effect (e) is the same as that shown in Fig. 4, and also in the heat treatment apparatus 1D having the reflux duct 18 of the present embodiment provided for the same heat treatment apparatus 1B as that of Fig. 2, Get the form.

(Fourth Embodiment)

Fig. 5 is a diagram showing a schematic configuration of a heat treatment apparatus according to a fourth embodiment of the present invention. Fig. The same reference numerals are given to the same constituent elements as those in Fig.

In the heat treatment apparatus 1E, the configuration of the leading end of the lead-out duct, the arrangement method of the catalyst, and the like are different from the heat treatment apparatus 1B of the second embodiment. The difference between them is described in detail below.

The catalyst 32 is attached to the leading end of the leading duct 31. The catalyst 32 is detachably attached to the duct 31 by means not shown. The leading duct 31 has a flange 31a formed to protrude outward from the outer circumferential surface. The leading duct 31 allows the tip end portion of the flange 31a to be inserted into the gas outlet hole 16.

The outlet duct 31 with the catalyst 32 attached to its tip end is inserted into the gas outlet hole 16 from the front end and the flange 31a is brought into contact with the outer wall surface of the right side face 10a. The catalyst 32 is arranged at the inlet 16a of the gas discharge hole 16 as the flange 31a is fixed to the right side face 10a with screws or the like. The size of the catalyst 32 is substantially the same as or substantially the same as that of the inner surface of the gas outlet hole 16. The positional relationship between the catalyst 32 and the inlet 16a of the gas outlet 16 is such that the end face of the catalyst 32 on the side of the heat treatment chamber 11 is connected to the inlet 16a of the gas outlet 16 The end face of the catalyst 32 on the side opposite to the end face on the side of the heat treatment chamber 11 comes into the gas discharge hole 16 and the end face of the catalyst 32 on the side opposite to the end face of the heat treatment chamber 11, It may be preferable that the side end face is projected toward the heat treatment chamber 11 side with respect to the inlet 16a of the gas lead-out hole 16. [

Therefore, in the heat treatment apparatus 1E, the effects (a) to (d) are obtained in the same manner as in the second embodiment, and in addition, the following effect (f) is obtained.

(f) As the leading end of the leading duct 31 is inserted into the gas discharge hole 16, it is possible to arrange the catalyst 32 in such a manner as to block the inlet 16a of the gas discharge hole 16 . Conversely, as the leading duct 31 is separated from the gas lead-out hole 16, the catalyst 32 can be placed outside the gas lead-out hole 16. Therefore, the catalyst 32 can be easily exchanged.

In the fourth embodiment, the catalyst 32 is provided on the end face of the leading duct 31, but the catalyst may be disposed inside the leading end of the leading duct 31. However, there is a need to construct the duct 31 in such a manner that a gap is not formed between the gas outlet 16 and the duct 31.

In addition, the catalyst 32 is provided separately from the lead-out duct 31 and the lead-out duct 31 is inserted into the lead-out hole 16 at the time of introducing the catalyst 32 into the lead- It is preferable to dispose the inlet 16a in which the catalyst 32 is inserted. In this case, a stopper is provided at the inlet 16a of the gas discharge hole 16, thereby making it possible to easily perform positioning and prevention of departure.

However, the effect (f) is the same as that in the heat treatment apparatus 1A of FIG. 1, the heat treatment apparatus 1C of FIG. 3 and the heat treatment apparatus 1D of FIG. 4, ), It is possible to obtain the same form of course.

In the first to fourth embodiments described above, the gas introducing hole 14 and the gas lead-out hole 16 are similarly arranged on the right side surface 10a, but the present invention is not limited thereto. It is possible to apply the present invention to the same configuration in a configuration in which these are disposed on one of the other three sides and a configuration in which the gas introduction hole 14 and the gas discharge hole 16 are arranged on the other side.

In the first to fourth embodiments described above, a heat treatment apparatus in which the heating chamber 12 is disposed above the heat treatment chamber 11 is exemplified. However, the present invention is not limited to this, It is possible to apply the same configuration to the heat treatment apparatus disposed on the lower side or on the transverse side.

[Outline of Embodiment]

The embodiments are summarized as follows.

(1) In the present embodiment, by providing the catalyst in a form that blocks the inlet of the gas evacuation hole, all of the gas evacuated through the gas evacuation hole is introduced into the gas during the heat treatment including the vapor- Catalyst. Therefore, it is possible to make it difficult for the wastewater to flow out from the gas outlet hole. Furthermore, it is possible to decompose the vaporized product by the catalyst before the gas at the time of the heat treatment including the vaporized product is cooled in the intermediate portion of the duct. Therefore, it is possible to suppress the temperature drop of the catalyst, thereby improving the treatment efficiency of the catalyst.

(2) In the heat treatment apparatus, the catalyst is provided inside the heat treatment chamber. According to this aspect, since the catalyst is provided inside the heat treatment chamber, it is possible to exchange the catalyst by inserting the hand into the heat treatment chamber. Further, by making it possible to use a gas having a size which can not enter the gas lead-out hole with respect to the catalyst, the gas at the time of heat treatment containing the sludge can be circulated in the heat treatment chamber and the frequency of contact with the catalyst can be improved Do. This makes it possible to further promote the promotion of the oxidative decomposition reaction of the sublimate by the catalyst.

(3) The heat treatment apparatus according to any one of (1) to (4), further comprising an outlet duct through which the front end portion is inserted and removed from the outside of the apparatus main body to the inside of the gas outlet hole, the catalyst being sized to close the inlet of the gas outlet hole, Respectively. Therefore, as the derived duct is inserted into the gas outlet hole, the catalyst is disposed at the inlet of the gas outlet hole. In this embodiment, it is possible to arrange the catalyst in such a manner as to close the inlet of the gas outlet hole as the leading end of the outlet duct is inserted into the gas outlet hole. Conversely, it is possible to separate the catalyst from the gas evacuation hole by separating the evacuating duct from the gas evacuation hole. Therefore, the catalyst can be easily exchanged.

(4) In the above-described heat treatment apparatus, a part of the gas exhausted from the gas lead-out hole is returned to the gas lead-in hole. In this embodiment, a part of the gas at the time of heat treatment discharged from the gas lead-out hole is returned to the gas introduction hole, so that the heat of the gas at the time of heat treatment can be used again for the heat treatment of the heat-treated substance.

(5) In the above-described heat treatment apparatus, the apparatus main body is provided with a separator plate between the heating chamber and the heat treatment chamber for permitting the flow of gas from the heating chamber to the heat treatment chamber. In this embodiment, the gas introduced into the apparatus main body through the gas introduction holes always flows sequentially to the heating chamber, the heat treatment chamber and the gas discharge hole, so that the gas supplied from the heating chamber to the heat treatment chamber becomes fresh gas containing no sludge. Therefore, it becomes possible to perform the heat treatment with the fresh gas introduced from the gas introduction hole, so that it becomes possible to suppress the increase of the concentration of the vaporization in the heat treatment chamber even if the catalyst deteriorates. Further, it is possible to suppress the occurrence of stagnation of air in the heat treatment chamber, and accordingly, it is possible to suppress the increase of the concentration of the condensate in the heat treatment chamber in conjunction with the deterioration of the catalyst.

(6) In the heat treatment apparatus, a blower is provided in the heating chamber, and a gap communicating the heating chamber and the heat treatment chamber is provided on the delivery side of the blower. In this embodiment, the gas introduced into the heating chamber through the gas introducing hole flows into the heat treatment chamber through the gap and is exhausted through the gas evacuation hole. Therefore, the gas flows in the order of the heating chamber, the heat treatment chamber, and the gas evacuation hole.

 While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, .

1 is a schematic configuration diagram of a heat treatment apparatus according to a first embodiment of the present invention.

2 is a schematic configuration diagram of a heat treatment apparatus according to a second embodiment of the present invention.

3 is a schematic configuration diagram of a heat treatment apparatus according to a third embodiment of the present invention.

4 is a schematic configuration diagram of another heat treatment apparatus according to the third embodiment of the present invention.

5 is a schematic configuration diagram of a heat treatment apparatus according to a fourth embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS FIG.

1A: Heat treatment apparatus 10: Device body

11: heat treatment chamber 12: heating chamber

13: separation plate 14: gas introduction hole

15: introduction duct 16:

17, 31: Derivation duct 18: Reflux duct

19: blower 20: heater

21: blower 22, 32: catalyst

Claims (6)

And a device main body having a heating chamber communicating with the heat treatment chamber, wherein the heat treatment gas introduced into the heating chamber through a gas introduction hole provided in the heating chamber is heated by the heating A heat treatment apparatus for heat-treating a subject to be heat-treated in accordance with work in a room, and for drawing a gas during a heat treatment from the heat treatment chamber through a gas outlet hole provided in the heat treatment chamber, And an outlet duct into which the front end portion is inserted and removed from the outside of the apparatus main body to the inside of the gas outlet hole, Wherein a catalyst capable of decomposing the sludge generated in the heat treatment product contained in the gas at the time of the heat treatment is installed in such a manner as to block the inlet of the gas outlet hole, The catalyst is sized to block the inlet of the gas outlet and is disposed at the leading end of the outlet duct, Wherein the catalyst is disposed at an inlet of the gas outlet hole as the outlet duct is installed to be detachable from the gas outlet hole. The heat treatment apparatus according to claim 1, wherein the catalyst is installed inside the heat treatment chamber. delete 3. The heat treatment apparatus according to claim 1 or 2, wherein a part of the gas exhausted from the gas lead-out hole is returned to the gas introduction hole. 3. The heat treatment apparatus according to claim 1 or 2, wherein a partition plate is provided between the heating chamber and the heat treatment chamber to allow only the flow of gas from the heating chamber to the heat treatment chamber. 6. The apparatus of claim 5, wherein the heating chamber is provided with a blower, And a gap for communicating the heating chamber and the heat treatment chamber is disposed on the delivery side of the blower.

Images