JP4014729B2 - UV cleaning equipment - Google Patents

UV cleaning equipment Download PDF

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Publication number
JP4014729B2
JP4014729B2 JP15778698A JP15778698A JP4014729B2 JP 4014729 B2 JP4014729 B2 JP 4014729B2 JP 15778698 A JP15778698 A JP 15778698A JP 15778698 A JP15778698 A JP 15778698A JP 4014729 B2 JP4014729 B2 JP 4014729B2
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Prior art keywords
chamber
cleaning
port
exterior
ozone
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JP15778698A
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JPH11347506A (en
Inventor
和夫 西澤
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CLEAN TECHNOLOGY CO., LTD.
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CLEAN TECHNOLOGY CO., LTD.
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Priority to JP15778698A priority Critical patent/JP4014729B2/en
Priority to TW088206734U priority patent/TW407531U/en
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/20—Gaseous substances, e.g. vapours
    • A61L2/202—Ozone
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/08—Radiation
    • A61L2/10—Ultra-violet radiation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/11—Apparatus for generating biocidal substances, e.g. vaporisers, UV lamps
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/12—Apparatus for isolating biocidal substances from the environment
    • A61L2202/122—Chambers for sterilisation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/14—Means for controlling sterilisation processes, data processing, presentation and storage means, e.g. sensors, controllers, programs

Description

【０００１】
【発明の属する技術分野】
本発明は、例えば液晶，カラーフィルタ，ＰＤＰなどの基板を洗浄するＵＶ洗浄装置に関するものである。
【０００２】
【従来の技術】
電子機器部品などでは非常に高い洗浄度が要求されている。汚れを大別すると塵，切粉などの無機質と、切削油，フラックス，指紋などの有機質とに分けられ、この無機質の汚れは、主に水洗浄によって取り除くことができるが、有機質の汚れは、水洗浄では完全に取り除けないため、水，溶剤などで事前に洗浄してから紫外線洗浄による精密洗浄が行われている。
【０００３】
即ち、この紫外線洗浄を行うＵＶ洗浄装置を、例えば製作ラインに配置し、精密洗浄を行っている。
【０００４】
従来のこのようなＵＶ洗浄装置は、例えば図３に示すように、被洗浄物１（例えばカラーフィルタなどの基板）を搬入口４から紫外線ランプ３を複数並設したＵＶ洗浄室２内に搬入し、洗浄後反対側の搬出口５より搬出する構成で、順次搬送機構により被洗浄物たる基板を送り込み紫外線洗浄するように構成している。
【０００５】
この紫外線洗浄は、簡単に説明すると、この紫外線ランプ３の紫外線（ＵＶ）照射によって有機物の分子鎖を分断し、ついでこの紫外線ランプ３の紫外線（ＵＶ）照射によって洗浄室２内にオゾンを発生させ、このオゾンの分解・生成反応過程の酸化力の強い発生期の酸素（Ｏ）と有機物との反応により被洗浄物１の表面有機物を蒸発気化させて洗浄するもので、乾式洗浄とも称されている。
【０００６】
一方、従来のＵＶ洗浄装置は、洗浄室２内のオゾン濃度を調整すると共に、洗浄室２の搬入口４や搬出口５から本装置ａの周囲にオゾン雰囲気が漏れ出ないように洗浄室２内に排気部15を設けて、常時洗浄室２内のオゾン雰囲気をダクトを介して外方部へ排気している。
【０００７】
【発明が解決しようとする課題】
しかしながら、本来洗浄力を高めるには洗浄室内のオゾン濃度を高くする必要があるが、従来のＵＶ洗浄装置では、例えば図３に示す前述のような構成のため、オゾン濃度を高めようとすると、それだけ高濃度のオゾン雰囲気が本装置周囲に漏れ出るおそれがあり、安全許容値を超えたり悪臭を放つなど周囲環境を悪化させる。
【０００８】
また、被洗浄物を搬入搬出する必要のある洗浄室内を気密保持することは容易ではない。
【０００９】
そのため、従来のＵＶ洗浄装置においては、図３に示すようにオゾンを多量に発生させつつも本装置ａ周囲にオゾン雰囲気が漏れ出ないように、排気部15より常時多量にオゾン雰囲気を排気して、搬入口４，搬出口５から外気を吸引してオゾン雰囲気の漏気を完全に防止しなければならない。そのために結局、洗浄室２内のオゾン濃度は十分に高い濃度とすることができず、また、オゾン濃度も不均一となり易く、洗浄力はまだまだ十分とはいえない。
【００１０】
本発明は、従来のＵＶ洗浄装置にこのような問題点を見い出し、従来通りオゾン雰囲気が周囲に完全に漏れないようにして周囲環境を悪化させずに、洗浄室内は従来よりも高いオゾン濃度とすることができ、洗浄力を向上できる画期的なＵＶ洗浄装置を提供することを目的としている。
【００１１】
【課題を解決するための手段】
添付図面を参照して本発明の要旨を説明する。
【００１２】
被洗浄物１を搬入する洗浄室２内に紫外線ランプ３を設け、この紫外線ランプ３の紫外線（ＵＶ）照射によって有機物の分子鎖を分断し、ついでこの紫外線ランプ３の紫外線（ＵＶ）照射によって洗浄室２内にオゾンを発生させ、このオゾンの分解・生成反応過程の酸化力の強い発生期の酸素（Ｏ）と有機物との反応により被洗浄物１の表面有機物を除去するように構成したＵＶ洗浄装置ａにおいて、前記洗浄室２内に前記被洗浄物１を搬入搬出する搬入口４と搬出口５とを設け、この搬入口４若しくは搬出口５を覆う補助室としての外装室６を設け、この外装室６に搬入口４Ａと搬出口５Ａとを設けて、前記被洗浄物１を前記洗浄室２内に前記搬入口４Ａ，４を順次通過して搬送し、前記搬出口５，５Ａを順次通過させて搬出し得るように構成し、この外装室６に排気部７を設け、この排気部７からの排気によって前記外装室６の搬入口４Ａ及び搬出口５Ａから外気が吸入されこの外装室６の搬入口４Ａ及び搬出口５Ａにエアーカーテンが生ずるように構成することで、前記洗浄室２の搬入口４若しくは搬出口５を介して洗浄室２内からこの外装室６内へ漏れ出るオゾン雰囲気を、この外装室６の搬入口４Ａ若しくは搬出口５Ａからこの外装室６外の前記本装置ａの設置周囲へ漏れ出さずにこの外装室６の排気部７から本装置ａの設置周囲より外方部へ排出するように構成して、本装置ａの設置周囲のオゾン雰囲気漏れを防止した上で、前記洗浄室２内のオゾン濃度を高く保持し得るように構成したことを特徴とするＵＶ洗浄装置に係るものである。
【００１３】
また、搬入口４Ａと搬出口５Ａとを有する搬入収納部内に前記搬入口４と搬出口５とを残して仕切区画する仕切部10を設けて、この搬入収納部内に前記洗浄室２と前記外装部６とを設けたことを特徴とする請求項１記載のＵＶ洗浄装置に係るものである。
【００１４】
【発明の実施の形態】
好適と考える本発明の実施の形態（発明をどのように実施するか）を、図面に基づいてその作用効果を示して簡単に説明する。
【００１５】
洗浄室２を覆う又は前記洗浄室２の被洗浄物１の搬入口４若しくは搬出口５を覆う補助室としての外装室６を設け、この外装室６に排気部７を設けて前記洗浄室２内からこの外装室６内へ漏れ出るオゾン雰囲気を排気部７によって本装置ａの設置周囲より外方部へ排出する。
【００１６】
従って、本装置ａの周囲に漏れ出ないように洗浄室２の外側の外装室６から排気するため、紫外線ランプ３によって生じるオゾン雰囲気が洗浄室２を充満した上で洗浄室２外の外装室６へ漏れ出て、本装置ａ周囲に漏らすことなくこの外装室６内で排気するため、本装置ａの設置周囲に漏れ出ないように洗浄室２内から直接強力に排気する従来例とは異なり、洗浄室２内のオゾン濃度を高く保持することができることとなる。
【００１７】
即ち、本装置ａの設置周囲のオゾン雰囲気漏れを従来例よりも完全に防止できる上、前記洗浄室２内のオゾン濃度は、従来例に比して同じＵＶ照射量であっても高く保持できることとなる。
【００１８】
尚、後述する実施例においては、洗浄室２内にオゾン濃度検知装置８（オゾンチェックポート）を複数設け、このオゾン濃度検知装置８に基づき、洗浄室２内のオゾン濃度調整や不均一な場合の濃度分布調整のために、外装室６だけでなく洗浄室２内にもオゾン雰囲気を排気する（主に濃度分布調整用の）排気部９を設けている。
【００１９】
即ち、本発明は、洗浄室２内に一切排気部を設けない発想に限定される創作ではない。
【００２０】
【実施例】
本発明の具体的な実施例について図面に基づいて説明する。
【００２１】
本実施例は、紫外線ランプ３を多数並設した洗浄室２の両端に、（被洗浄物１としての）薄板状の大型基板１を多数並設したローラ11上に水平架設状態にして送り込み搬送する搬入口４と搬出口５とを設け、この洗浄室２はこの搬入口４と搬出口５を残して封止状態に構成している。
【００２２】
この搬入口４と搬出口５とを覆う外装室６を夫々搬送方向に沿って連設状態に設け、この外装室６に夫々搬入口４Ａ，搬出口５Ａを設け、被洗浄物１が前記洗浄室２に搬入される場合は、搬入口４Ａ，外装室６，搬入口４を順次通過して搬入され、紫外線洗浄後搬出される場合は、搬出口５，外装室６，搬出口５Ａを順次通過して搬出されるように構成している。
【００２３】
更に具体的に説明すれば、本実施例では、搬入口４Ａと搬出口５Ａとを有する（開閉上蓋13によって開放可能な）搬入収納部内に前記搬入口４と搬出口５とを残して仕切区画する仕切部10を突設して、この搬入収納部内に前記洗浄室２とその左右に夫々前記外装部６とを設けた構成とし、いわば従来の洗浄室２の搬入口４と搬出口５の夫々の外側に更に補助室として外装室６を連設し、いわゆる全体として二重室構造に構成している。
【００２４】
そしてこのような二重室構造とした上で従来例のように搬入搬出口４，５から外部へ多量に漏れることを恐れて洗浄室２からオゾン雰囲気を直接強力に排気する構成とせずに、洗浄室２はあくまでオゾン雰囲気が十分に充満できる構成とし、この洗浄室２の搬入口４，搬出口５から一旦必ず外装室６に漏れ出るオゾン雰囲気を排気するように外装室６に排気部７を設けている。
【００２５】
従って、本装置ａの周囲に漏れ出ないように洗浄室２の外側の外装室６から排気するため、紫外線ランプ３によって生じるオゾン雰囲気が洗浄室２を充満した上で洗浄室２外の外装室６へ漏れ出て、本装置ａ周囲に漏らすことなくこの外装室６内で排気するため、本装置ａの設置周囲に漏れ出ないように洗浄室２内から直接強力に排気する従来例とは異なり、洗浄室２内のオゾン濃度を高く保持することができることとなる。
【００２６】
即ち、本装置ａの設置周囲のオゾン雰囲気漏れを従来例よりも完全に防止できる上、前記洗浄室２内のオゾン濃度は、従来例に比して同じＵＶ照射量であっても高く保持できることとなる。
【００２７】
本実施例においては、洗浄室２内にオゾン濃度検知装置８（オゾンチェックポート）を所定間隔を置いて多数並設し、このオゾン濃度検知装置８に基づき、洗浄室２内のオゾン濃度の微調整や不均一な場合の濃度分布調整のために、外装室６だけでなく洗浄室２内にもオゾン雰囲気を排気する濃度分布調整用の排気部９を複数か所に配設し、この各排気部９を前記オゾン濃度検知装置８に基づきコンピュータ制御作動させてオゾン濃度が洗浄室２内で均一となるように構成している。
【００２８】
即ち、本発明は、この実施例のように洗浄室２内に一切排気部を設けない発想に限定される創作ではない。
【００２９】
また、前記外装室６の前記排気部７からの排気によって前記外装室６の搬入口４Ａ並びに搬出口５Ａから外気が吸入されるため、いわゆるエアーカーテンが生じて、前記外装室６外の前記本装置ａの設置周囲へこの搬入口４Ａ並びに搬出口５Ａから外装室６内のオゾン雰囲気が確実にシャットアウトされる。
【００３０】
以上のように本実施例では、二重室構造ゆえにＵＶ洗浄装置ａの周囲へのオゾン雰囲気漏れを防止でき周囲環境を悪化させることない上、図３に示すような本実施例での仕切部10を有しなく外装室６を有しない従来例では、洗浄室２内のオゾン濃度が２０〜４０ＰＰＭでしかも不均一であるのに対し、図１，図２に示す本実施例では同じ紫外線の累積照度に対して１００〜１５０ＰＰＭと洗浄室２内を高いオゾン濃度に保持でき、接触角を約１.５倍小さくでき、しかも均一な濃度となり洗浄効果が飛躍的に向上したことが確認できた。しかも、前述のように本実施例ではオゾン濃度検知装置８によって検知しつつ複数配設した洗浄室２内の排気部９による排気調整によって一層洗浄室２内のオゾン濃度分布を均一化できるため、極めて高い洗浄能力が発揮されることとなる。
【００３１】
また、そのため高価な大出力ランプや紫外線照射時間を長くする必要がないため、製作コストやランニングコストの削減を図ることも可能となる。
【００３２】
また、本実施例の紫外線ランプ３は、低圧水銀ランプを使用し、処理温度をＩＲヒータによって１００〜２５０℃とし、洗浄室２内のオゾン濃度を５００〜１０００ＰＰＭとし、例えば数百ｍｍ角の大型基板をＵＶ照射，高濃度オゾン，温度加熱の相乗効果によって良好な乾式洗浄ができるように構成している。
【００３３】
尚、図中符号12は温度検知装置（温度チェックポート）である。
【００３４】
【発明の効果】
本発明は上述のように構成したから、本装置の周囲に漏れ出ないように洗浄室の外側の外装室から排気するため、紫外線ランプによって生じるオゾン雰囲気が洗浄室を充満した上で洗浄室外の外装室へ漏れ出てこの外装室で排気するため、本装置の設置周囲に漏れ出ないように洗浄室内から直接強力に排気する従来例とは異なり、周囲にはオゾン雰囲気を漏らすことなく洗浄室内のオゾン濃度を高く保持することができると共に、本装置の設置周囲にオゾン雰囲気が漏れ出ることが確実に防止できる画期的なＵＶ洗浄装置となる。
【００３５】
また、請求項２記載の発明においては、一層簡易な構成で前記作用効果を確実に発揮するＵＶ洗浄装置を容易に実現できる極めて実用性に秀れたＵＶ洗浄装置となる。
【図面の簡単な説明】
【図１】 本実施例の概略構成説明断面図である。
【図２】 本実施例の洗浄室並びに外装室を蓋を持ち上げて開放した状態での説明斜視図である。
【図３】 従来例の概略構成説明断面図である。
【符号の説明】
１ 被洗浄物（大型基板）
２ 洗浄室
３ 紫外線ランプ
４ 搬入口
４Ａ 搬入口
５ 搬出口
５Ａ 搬出口
６ 外装室
７ 排気部
10 仕切部
ａ ＵＶ洗浄装置（本装置）[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a UV cleaning apparatus for cleaning a substrate such as a liquid crystal, a color filter, and a PDP.
[0002]
[Prior art]
Electronic parts and the like are required to have a very high degree of cleaning. Dirt is roughly divided into inorganic substances such as dust and chips, and organic substances such as cutting oil, flux, and fingerprints. This inorganic dirt can be removed mainly by washing with water. Since it cannot be completely removed by water cleaning, precision cleaning by ultraviolet cleaning is performed after cleaning in advance with water or a solvent.
[0003]
That is, a UV cleaning apparatus that performs this ultraviolet cleaning is disposed in, for example, a production line to perform precision cleaning.
[0004]
Such a conventional UV cleaning apparatus, for example, as shown in FIG. 3, carries an object to be cleaned 1 (for example, a substrate such as a color filter) from a carry-in entrance 4 into a UV wash chamber 2 in which a plurality of ultraviolet lamps 3 are arranged in parallel. Then, after the cleaning, the substrate is carried out from the opposite outlet 5, and the substrate, which is the object to be cleaned, is sequentially fed by the transport mechanism and is cleaned by ultraviolet rays.
[0005]
In brief, the ultraviolet cleaning is performed by breaking the molecular chain of the organic substance by the ultraviolet (UV) irradiation of the ultraviolet lamp 3, and then generating ozone in the cleaning chamber 2 by the ultraviolet (UV) irradiation of the ultraviolet lamp 3. This is a process of evaporating and cleaning the surface organic matter of the object to be cleaned 1 by the reaction of oxygen (O), which has a strong oxidizing power in the process of decomposition and generation of ozone, and the organic matter, which is also called dry cleaning. Yes.
[0006]
On the other hand, the conventional UV cleaning apparatus adjusts the ozone concentration in the cleaning chamber 2 and also cleans the ozone chamber 2 so that the ozone atmosphere does not leak from the inlet 4 and the outlet 5 of the cleaning chamber 2 to the periphery of the apparatus a. An exhaust part 15 is provided inside, and the ozone atmosphere in the cleaning chamber 2 is always exhausted to the outside part through the duct.
[0007]
[Problems to be solved by the invention]
However, in order to increase the cleaning power originally, it is necessary to increase the ozone concentration in the cleaning chamber. However, in the conventional UV cleaning apparatus, for example, due to the above-described configuration shown in FIG. As a result, a high-concentration ozone atmosphere may leak around the device, resulting in a worsening of the surrounding environment, such as exceeding the safety tolerance or producing a foul odor.
[0008]
In addition, it is not easy to keep the cleaning chamber in which the object to be cleaned needs to be carried in and out in an airtight manner.
[0009]
Therefore, in the conventional UV cleaning apparatus, the ozone atmosphere is always exhausted in a large amount from the exhaust unit 15 so that the ozone atmosphere does not leak around the apparatus a while generating a large amount of ozone as shown in FIG. Thus, it is necessary to completely prevent leakage of ozone atmosphere by sucking outside air from the carry-in port 4 and the carry-out port 5. As a result, the ozone concentration in the cleaning chamber 2 cannot be made sufficiently high, the ozone concentration tends to be non-uniform, and the cleaning power is still not sufficient.
[0010]
The present invention finds such a problem in the conventional UV cleaning apparatus, and prevents the ozone atmosphere from leaking to the surroundings as usual, and does not deteriorate the surrounding environment. An object of the present invention is to provide an innovative UV cleaning apparatus that can improve the cleaning power.
[0011]
[Means for Solving the Problems]
The gist of the present invention will be described with reference to the accompanying drawings.
[0012]
An ultraviolet lamp 3 is provided in the cleaning chamber 2 into which the object to be cleaned 1 is carried, and the molecular chain of the organic substance is separated by the ultraviolet (UV) irradiation of the ultraviolet lamp 3, and then the ultraviolet lamp 3 is irradiated by the ultraviolet (UV) irradiation. UV that is configured to generate ozone in the chamber 2 and to remove surface organic substances on the object to be cleaned 1 by reaction of oxygen (O) with a strong oxidizing power in the process of decomposition and generation of ozone and organic substances. In the cleaning apparatus a, a carry-in port 4 and a carry-out port 5 for loading and unloading the object to be cleaned 1 are provided in the washing chamber 2 , and an exterior chamber 6 is provided as an auxiliary chamber covering the carry-in port 4 or the carry-out port 5. The exterior chamber 6 is provided with a carry-in port 4A and a carry-out port 5A, and the object to be cleaned 1 is sequentially conveyed through the carry-in ports 4A and 4 into the wash chamber 2 and the carry-out ports 5 and 5A. So that it can be taken out sequentially Form, the exterior chamber of the exhaust unit 7 is provided on the 6, the outside air from the inlet port 4A and unloading opening 5A of the outer chamber 6 by the exhaust from the exhaust unit 7 is sucked entrance 4A and unloading opening of the outer chamber 6 By configuring so that an air curtain is generated in 5A, an ozone atmosphere leaking from the cleaning chamber 2 into the exterior chamber 6 through the carry-in port 4 or the carry-out port 5 of the wash chamber 2 can be reduced . From the carry-in port 4A or the carry-out port 5A, the air is discharged from the exhaust part 7 of the outer chamber 6 to the outer part from the outer periphery of the apparatus a without leaking out to the surroundings of the apparatus a outside the outer chamber 6. The present invention relates to a UV cleaning apparatus characterized in that the ozone concentration in the cleaning chamber 2 can be kept high while preventing the ozone atmosphere from leaking around the apparatus a. .
[0013]
In addition, a partition portion 10 is provided in the carry-in and storage portion having the carry-in port 4A and the carry-out port 5A so as to partition and leave the carry-in port 4 and the carry-out port 5, and the cleaning chamber 2 and the exterior are provided in the carry-in and storage portion. those of the UV cleaning apparatus according to claim 1, characterized in that a and section 6.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention (how to carry out the invention) considered to be suitable will be briefly described with reference to the drawings, showing its effects.
[0015]
An exterior chamber 6 is provided as an auxiliary chamber that covers the cleaning chamber 2 or covers the carry-in port 4 or the carry-out port 5 of the object 1 to be cleaned in the wash chamber 2, and the exhaust chamber 7 is provided in the exterior chamber 6 to provide the wash chamber 2. The ozone atmosphere that leaks into the exterior chamber 6 from the inside is exhausted from the periphery of the apparatus a to the outside by the exhaust unit 7.
[0016]
Therefore, the exhaust chamber 6 outside the cleaning chamber 2 is exhausted so as not to leak around the apparatus a. Therefore, the ozone atmosphere generated by the ultraviolet lamp 3 fills the cleaning chamber 2 and the exterior chamber outside the cleaning chamber 2. In order to exhaust into the exterior chamber 6 without leaking to the apparatus a and surrounding the apparatus a, the conventional example in which the exhaust is directly exhausted from the cleaning chamber 2 so as not to leak around the installation of the apparatus a. Unlikely, the ozone concentration in the cleaning chamber 2 can be kept high.
[0017]
That is, the ozone atmosphere leakage around the installation of the apparatus a can be completely prevented as compared with the conventional example, and the ozone concentration in the cleaning chamber 2 can be kept high even with the same UV irradiation amount as compared with the conventional example. It becomes.
[0018]
In the embodiment described later, a plurality of ozone concentration detection devices 8 (ozone check ports) are provided in the cleaning chamber 2, and the ozone concentration in the cleaning chamber 2 is adjusted or non-uniform based on the ozone concentration detection device 8. In order to adjust the concentration distribution, an exhaust part 9 (mainly for adjusting the concentration distribution) for exhausting the ozone atmosphere is provided not only in the exterior chamber 6 but also in the cleaning chamber 2.
[0019]
That is, the present invention is not a creation limited to the idea of not providing any exhaust part in the cleaning chamber 2.
[0020]
【Example】
Specific embodiments of the present invention will be described with reference to the drawings.
[0021]
In this embodiment, a large number of thin plate-like substrates 1 (as the objects to be cleaned 1) are horizontally placed on both ends of a cleaning chamber 2 in which a large number of ultraviolet lamps 3 are arranged in parallel, and are sent in and transported horizontally. A carry-in port 4 and a carry-out port 5 are provided, and the cleaning chamber 2 is configured in a sealed state leaving the carry-in port 4 and the carry-out port 5.
[0022]
An exterior chamber 6 covering the carry-in port 4 and the carry-out port 5 is provided in a continuous state along the transport direction, and a carry-in port 4A and a carry-out port 5A are provided in the exterior chamber 6, respectively. When it is carried into the chamber 2, it sequentially passes through the carry-in port 4 </ b> A, the exterior chamber 6, and the carry-in port 4, and when it is carried out after UV cleaning, the carry-out port 5, the exterior chamber 6, and the carry-out port 5 </ b> A are sequentially provided. It is configured to pass through and be carried out.
[0023]
More specifically, in the present embodiment, a partition section having a carry-in port 4A and a carry-out port 5A (which can be opened by the open / close upper lid 13) leaving the carry-in port 4 and the carry-out port 5 in the carry-in storage unit. A partition 10 that projects is provided, and the cleaning chamber 2 and the exterior portions 6 are provided on the left and right sides of the cleaning chamber 2 in the carry-in and storage section, so to speak, the entrance 4 and the exit 5 of the conventional cleaning chamber 2. An exterior room 6 is further provided as an auxiliary room on the outside of each of them so as to constitute a so-called double room structure as a whole.
[0024]
And without using a structure that exhausts the ozone atmosphere directly from the cleaning chamber 2 for fear of leaking a large amount from the loading / unloading outlets 4 and 5 as in the conventional example after having such a double chamber structure, The cleaning chamber 2 is configured so that the ozone atmosphere can be sufficiently filled, and the exhaust chamber 7 is provided in the outer chamber 6 so as to exhaust the ozone atmosphere that always leaks from the inlet 4 and the outlet 5 of the cleaning chamber 2 to the outer chamber 6. Is provided.
[0025]
Therefore, the exhaust chamber 6 outside the cleaning chamber 2 is exhausted so as not to leak around the apparatus a. Therefore, the ozone atmosphere generated by the ultraviolet lamp 3 fills the cleaning chamber 2 and the exterior chamber outside the cleaning chamber 2. In order to exhaust into the exterior chamber 6 without leaking to the apparatus a and surrounding the apparatus a, the conventional example in which the exhaust is directly exhausted from the cleaning chamber 2 so as not to leak around the installation of the apparatus a. Unlikely, the ozone concentration in the cleaning chamber 2 can be kept high.
[0026]
That is, the ozone atmosphere leakage around the installation of the apparatus a can be completely prevented as compared with the conventional example, and the ozone concentration in the cleaning chamber 2 can be kept high even with the same UV irradiation amount as compared with the conventional example. It becomes.
[0027]
In the present embodiment, a large number of ozone concentration detectors 8 (ozone check ports) are arranged in parallel in the cleaning chamber 2 at a predetermined interval, and the ozone concentration in the cleaning chamber 2 is slightly reduced based on the ozone concentration detector 8. In order to adjust or adjust the concentration distribution in the case of non-uniformity, exhaust portions 9 for adjusting the concentration distribution for exhausting the ozone atmosphere are disposed not only in the exterior chamber 6 but also in the cleaning chamber 2. The exhaust unit 9 is configured to be controlled by a computer based on the ozone concentration detector 8 so that the ozone concentration is uniform in the cleaning chamber 2.
[0028]
In other words, the present invention is not limited to the idea of providing no exhaust part in the cleaning chamber 2 as in this embodiment.
[0029]
Further, since the outside air is sucked from the carry-in entrance 4A and the carry-out exit 5A of the exterior chamber 6 by the exhaust from the exhaust section 7 of the exterior chamber 6, a so-called air curtain is generated, and the book outside the exterior chamber 6 is generated. The ozone atmosphere in the exterior chamber 6 is reliably shut out from the carry-in port 4A and the carry-out port 5A to the periphery of the installation of the apparatus a.
[0030]
As described above, in this embodiment, due to the double chamber structure, ozone atmosphere leakage to the surroundings of the UV cleaning apparatus a can be prevented and the surrounding environment is not deteriorated, and the partition portion in the present embodiment as shown in FIG. In the conventional example which does not have 10 and does not have the exterior chamber 6, the ozone concentration in the cleaning chamber 2 is 20 to 40 PPM and is non-uniform, whereas in the present embodiment shown in FIGS. It was confirmed that the cleaning chamber 2 can be kept at a high ozone concentration of 100 to 150 PPM with respect to the accumulated illuminance, the contact angle can be reduced by about 1.5 times, and the cleaning effect has been drastically improved with a uniform concentration. . In addition, as described above, in the present embodiment, the ozone concentration distribution in the cleaning chamber 2 can be made more uniform by adjusting the exhaust by the exhaust portions 9 in the cleaning chamber 2 disposed while being detected by the ozone concentration detector 8. An extremely high cleaning ability will be exhibited.
[0031]
In addition, it is not necessary to lengthen the expensive high-power lamp and the ultraviolet irradiation time, so that it is possible to reduce the manufacturing cost and the running cost.
[0032]
The ultraviolet lamp 3 of this embodiment uses a low-pressure mercury lamp, the processing temperature is 100 to 250 ° C. by an IR heater, the ozone concentration in the cleaning chamber 2 is 500 to 1000 PPM, for example, a large size of several hundred mm square. The substrate is configured so that a good dry cleaning can be performed by a synergistic effect of UV irradiation, high-concentration ozone, and temperature heating.
[0033]
In the figure, reference numeral 12 denotes a temperature detection device (temperature check port).
[0034]
【The invention's effect】
Since the present invention is configured as described above, in order to exhaust from the exterior chamber outside the cleaning chamber so as not to leak around the apparatus, the ozone atmosphere generated by the ultraviolet lamp fills the cleaning chamber and then the outside of the cleaning chamber. Unlike the conventional example in which exhaust is exhausted directly from the cleaning chamber so that it does not leak around the installation area of this device because it leaks into the outer chamber and exhausts in this outer chamber, the cleaning chamber does not leak the ozone atmosphere around it. This is an epoch-making UV cleaning apparatus that can maintain a high ozone concentration and can reliably prevent the ozone atmosphere from leaking around the installation of the apparatus.
[0035]
Further, in the invention described in claim 2 , it is an extremely practical UV cleaning apparatus that can easily realize a UV cleaning apparatus that reliably exhibits the above-described effects with a simpler configuration.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view illustrating a schematic configuration of the present embodiment.
FIG. 2 is an explanatory perspective view of the cleaning chamber and the exterior chamber of the present embodiment in a state where the lid is lifted and opened.
FIG. 3 is a sectional view illustrating a schematic configuration of a conventional example.
[Explanation of symbols]
1 Object to be cleaned (large substrate)
2 Washing room 3 Ultraviolet lamp 4 Carrying in 4A Carrying in 5 Carrying out 5A Carrying out 6 Exterior room 7 Exhaust section
10 Partition a UV cleaning device (this device)

Claims (2)

被洗浄物を搬入する洗浄室内に紫外線ランプを設け、この紫外線ランプの紫外線（ＵＶ）照射によって有機物の分子鎖を分断し、ついでこの紫外線ランプの紫外線（ＵＶ）照射によって洗浄室内にオゾンを発生させ、このオゾンの分解・生成反応過程の酸化力の強い発生期の酸素（Ｏ）と有機物との反応により被洗浄物の表面有機物を除去するように構成したＵＶ洗浄装置において、前記洗浄室内に前記被洗浄物を搬入搬出する搬入口と搬出口とを設け、この搬入口若しくは搬出口を覆う補助室としての外装室を設け、この外装室に搬入口と搬出口とを設けて、前記被洗浄物を前記洗浄室内に前記搬入口を順次通過して搬送し、前記搬出口を順次通過させて搬出し得るように構成し、この外装室に排気部を設け、この排気部からの排気によって前記外装室の搬入口及び搬出口から外気が吸入されこの外装室の搬入口及び搬出口にエアーカーテンが生ずるように構成することで、前記洗浄室の搬入口若しくは搬出口を介して洗浄室内からこの外装室内へ漏れ出るオゾン雰囲気を、この外装室の搬入口若しくは搬出口からこの外装室外の前記本装置の設置周囲へ漏れ出さずにこの外装室の排気部から本装置の設置周囲より外方部へ排出するように構成して、本装置の設置周囲のオゾン雰囲気漏れを防止した上で、前記洗浄室内のオゾン濃度を高く保持し得るように構成したことを特徴とするＵＶ洗浄装置。An ultraviolet lamp is installed in the cleaning chamber that carries the object to be cleaned. The molecular chain of the organic matter is broken by the ultraviolet (UV) irradiation of this ultraviolet lamp, and then ozone is generated in the cleaning chamber by the ultraviolet (UV) irradiation of this ultraviolet lamp. in UV cleaning device configured to remove surface organic matter to be washed by reaction with oxygen in the strong nascent oxidizing power of decomposition and generation reaction process of this ozone (O) and organic matter, in the cleaning chamber wherein the inlet port and outlet port for loading and unloading the object to be cleaned is provided, the outer chamber as an auxiliary chamber for covering the entrance or unloading port is provided, is provided a discharge port and entrance to the exterior chamber, the object to be The cleaning object is configured to be sequentially passed through the carry-in entrance and transported and to be carried out through the carry-out exit, and an exhaust portion is provided in the exterior chamber. By Outside air is sucked from the inlet port and the outlet port of the outer chamber by configuring such an air curtain is generated in entrance and unloading opening of the outer chamber, from the wash chamber through the inlet port or outlet port of said cleaning chamber The ozone atmosphere that leaks into the exterior room is not leaked from the entrance or exit of the exterior room to the installation area of the apparatus outside the exterior room, but from the exhaust part of the exterior room to the outside of the installation area of the apparatus. The UV cleaning apparatus is configured to discharge to a part so as to prevent ozone atmosphere leakage around the installation of the apparatus and to maintain a high ozone concentration in the cleaning chamber. 搬入口と搬出口とを有する搬入収納部内に前記搬入口と搬出口とを残して仕切区画する仕切部を設けて、この搬入収納部内に前記洗浄室と前記外装部とを設けたことを特徴とする請求項１記載のＵＶ洗浄装置。A partitioning section for partitioning is provided in the loading / unloading section having a loading / unloading port, leaving the loading / unloading port and the unloading outlet, and the cleaning chamber and the exterior section are provided in the loading / unloading section. The UV cleaning apparatus according to claim 1 .
JP15778698A 1998-06-05 1998-06-05 UV cleaning equipment Expired - Fee Related JP4014729B2 (en)

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JP15778698A JP4014729B2 (en) 1998-06-05 1998-06-05 UV cleaning equipment
TW088206734U TW407531U (en) 1998-06-05 1999-04-29 Ultraviolet cleaning device

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KR100831293B1 (en) * 2000-02-24 2008-05-22 엘지디스플레이 주식회사 Dry Cleaning In-line Transfer System
JP4193494B2 (en) * 2001-01-15 2008-12-10 株式会社ジーエス・ユアサコーポレーション Light processing equipment
JP5017975B2 (en) * 2006-09-13 2012-09-05 セイコーエプソン株式会社 Surface modification method and surface modification apparatus
JP5077173B2 (en) * 2008-09-27 2012-11-21 株式会社Ｇｓユアサ UV irradiation treatment equipment
WO2011129282A1 (en) * 2010-04-12 2011-10-20 株式会社日本製鋼所 Laser processing apparatus
JP5601312B2 (en) * 2011-11-25 2014-10-08 ウシオ電機株式会社 Light irradiation device
PL221739B1 (en) 2012-08-09 2016-05-31 Pol Pack Service Spółka Akcyjna Disinfection tunnel, in particular for disinfection of surfaces of the labile objects
CN103464424B (en) * 2013-08-28 2015-12-02 西安耀北光电科技有限公司 Ultra-violet radiation ozone light cleaning machine
CN113041370A (en) * 2021-03-02 2021-06-29 张德明 Tunnel conveying type ultraviolet new coronavirus sterilizing and disinfecting equipment

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