KR100497582B1 - Transport roller in UV cleaning apparatus - Google Patents

Abstract

Based on poly (4) fluoride (PTFE), a resin material that has been used so far, the resin part is formed of a resin material to which a predetermined filler is added, thereby preventing damage to the object to be cleaned, and further, the UV resistance is high. It is to provide a conveying roller in a breakthrough and practical UV cleaning device which has dramatically improved the use time (life time).

An ultraviolet lamp 3 is provided in the cleaning chamber 2 carrying the object 1 to be cleaned, and the molecular chain of the organic substance is divided by ultraviolet (UV) irradiation of the ultraviolet lamp 3, and then the ultraviolet lamp Ozone is generated in the cleaning chamber (2) by ultraviolet (UV) irradiation of (3), and the object to be cleaned is reacted with oxygen (O) of the generator having strong oxidizing power during the decomposition and generation reaction of this ozone. As a conveyance roller provided in the support shaft 4 for carrying in or carrying out the said to-be-cleaned substance 1 in the said washing chamber 2 of the UV washing | cleaning apparatus (a) comprised so that the surface organic matter of (1) may be removed, The resin part 6 which supports the to-be-cleaned object 1 is attached to the roller body 5 attached to the said support shaft 4 in a protruding state at the outer periphery, or is provided in the said support shaft 4 The roller body 5 itself is composed of a resin material, and the roller body 5 itself is used as the resin part 6 supporting the object to be cleaned 1, The resin part 6, the poly-tetrafluoroethylene (PTFE) for the conveying roller in the filler as a base to UV cleaning apparatus is configured as a resin material containing a predetermined amount.

Description

반송 Transport roller in cleaning apparatus

This invention relates to the conveyance roller in the UV washing | cleaning apparatus which wash | cleans board | substrates, such as a liquid crystal, a color filter, and a PDP, for example.

Very high cleaning degree is required for electronic device parts and the like. Dividing contaminants into two categories is divided into inorganic substances such as dust and cutting powder, and organic substances such as cutting oil, flux, and fingerprints. The organic contaminants can be removed by washing with water, but organic contaminants are completely removed by washing with water. Since it cannot be removed, washing with water, a solvent or the like in advance is performed, followed by precise washing with ultraviolet washing.

That is, the UV cleaning apparatus which wash | cleans this ultraviolet-ray is arrange | positioned in a manufacturing line, for example, and precisely washes.

In brief, the ultraviolet cleaning is performed by breaking up the molecular chain of organic matter by ultraviolet (UV) irradiation of the ultraviolet lamp, and then generating ozone in the cleaning chamber by ultraviolet (UV) irradiation of the ultraviolet lamp. It is also called dry cleaning by evaporating and cleaning the surface organics of the object to be cleaned by reaction of oxygen (O) of the generator having strong oxidizing power during the decomposition and production reaction with organic matter.

In such a conventional UV cleaning apparatus, as shown in FIG. 1, a plurality of ultraviolet lamps 3 are provided in parallel with a to-be-cleaned object 1 (for example, a substrate such as a color filter) at the inlet 16. It is a structure which is carried in in the UV cleaning chamber 2, and is carried out in the discharging opening 17 of the opposite side after a washing | cleaning, and it is comprised so that the board | substrate which is the to-be-cleaned object 1 may be sent and ultraviolet-ray-cleaned by a conveyance mechanism sequentially.

In the conventional UV cleaning device, a plurality of support shafts 4 are rotatably arranged in parallel along the conveying direction of the object to be cleaned 1, and the object to be cleaned 1 is supported on the support shaft 4. The conveyance mechanism is comprised by attaching many conveyance rollers 11 which hold | maintain.

Since this conveyance roller is irradiated with an ultraviolet ray and arranged in an ozone atmosphere, it should be adopted that it does not deteriorate even after receiving this ultraviolet irradiation for a long time.

However, for example, if the conveyance roller is made of all metals such as stainless steel, the object to be cleaned is supported at the outer edge of the metal roller, and when foreign substances such as debris and dust adhere to the outer edge surface, the object to be cleaned is removed. It may be damaged.

That is, for example, in the case of carrying and carrying the glass substrate as the object to be cleaned, if the glass powder adheres to the outer circumferential surface of the roller, there is a possibility that the surface of the substrate is damaged by the roller.

Therefore, the present applicant forms an engaging groove in the circumferential direction of the outer circumferential surface of the roller body made of metal, and engages the O-ring-shaped resin supporting member of the circular cross section so that the outer circumferential portion protrudes slightly into the engaging groove. The conveyance roller of the structure which provided the resin part in the roller body was developed.

And furthermore, in order to improve durability, the conveyance roller was formed into a donut plate shape having a plate shape longer in the radial direction than the plate thickness, and sandwiched by a metal gripping portion slightly protruded from the outer circumference. (Japanese Patent Application No. 10-186939) was developed.

Since the main body (roller body) is made of metal in this way, it is excellent in rigidity and durability (UV resistance), and the conveyed object is supported by a resin part which protrudes slightly from the outer circumference of the roller body, thereby damaging the conveyed object. It becomes the structure which is not made.

In addition, this resin part adopts polytetrafluoroethylene (PTFE) (for example, resin marketed as a brand name Teflon) which has little modification and alteration and high UV resistance even when subjected to ultraviolet irradiation.

However, even when PTFE having excellent UV performance or adopting a donut plate shape having more excellent durability is deteriorated under long-term UV irradiation and ozone atmosphere. That is, when used for a long time beyond the service time, there is a problem of cracking, cracking, deterioration of the hardness and elasticity (tattered state).

Therefore, the rollers must be replaced frequently, requiring maintenance and at the same time, if the replacement is late, it may cause damage to the object to be cleaned or it may cause a problem in conveyance.

Therefore, the present invention finds such a problem in the conventional configuration employing a polytetrafluoroethylene (PTFE) resin resin which is considered to be resistant to ultraviolet rays (UV), and focuses on this problem and repeats the start experiment and research. The resin part formed by the resin material which added the predetermined filler to this based on the polytetrafluoroethylene (PTFE) which is the resin material used until now and solved after trial and error, and damages the to-be-cleaned object Moreover, it aims at providing the conveyance roller in the breakthrough and practical UV cleaning apparatus which has high UV-resistance performance and drastically improved the use time (life time) until now.

The gist of the present invention will be described with reference to the accompanying drawings.

An ultraviolet lamp 3 is provided in the cleaning chamber 2 carrying the object 1 to be cleaned, and the molecular chain of the organic substance is divided by ultraviolet (UV) irradiation of the ultraviolet lamp 3, and then the ultraviolet lamp Ozone is generated in the cleaning chamber (2) by ultraviolet (UV) irradiation of (3), and the object to be cleaned is reacted with oxygen (O) of the generator having strong oxidizing power during the decomposition and generation reaction of this ozone. As a conveyance roller provided in the support shaft 4 for carrying in or carrying out the said to-be-cleaned substance 1 in the said washing chamber 2 of the UV cleaning apparatus (a) comprised so that the surface organic matter of (1) may be removed, The resin part 6 which supports the to-be-cleaned object 1 is provided in the outer periphery in the roller body 5 provided in the said support shaft 4, or it is provided in the said support shaft 4 The roller body 5 itself is made of a resin material, and the roller body 5 itself is used as the resin part 6 supporting the object 1 to be cleaned. The branch part 6 is formed of a resin material formed of polytetrafluoroethylene (PTFE) based on a predetermined amount of fillers that form a large number of fine gaps around, and formed by countless gaps of several micron orders. It is related with the conveyance roller in the UV washing apparatus made into.

In addition, the resin part 6 is composed of a resin material containing a predetermined amount of a polytetrafluoroethylene (PTFE) filler in order to improve the durability, such as wear, bending, compression, etc., UV cleaning according to claim 1 It is related with the conveyance roller in an apparatus.

In addition, the resin part 6 is composed of a resin material containing a predetermined amount of inorganic fine particulate or fine rod-shaped solid in the polytetrafluoroethylene (PTFE) as the filler (7). Or it is related with the conveyance roller in the UV cleaning apparatus of 2.

Moreover, the said filler is related with the conveyance roller in the UV cleaning apparatus of Claim 1 or 2 characterized by containing 15-30 weight% of said poly tetrafluoroethylene (PTFE) as a base.

In addition, the said resin body 6 comprised by the pair of metal clamping parts 10 which have the bearing hole part 9, and formed in the donut plate shape between these metal clamping parts 10 is carried out. The outer circumferential portion of the resin portion 6 is sandwiched between the metal clamping portions 10 so as to protrude so that the resin portion 6 is provided on the roller body 5 in the protruding state. It is related with the conveyance roller in the UV cleaning apparatus of Claim 1 or 2 characterized by the structure.

The resin part 6 is provided so that the divided part 14 may be provided in one or several places so that it may become annular as a whole by the some divided resin part 6C, and the support shaft 4 may be disassembled. It is related with the conveyance roller in the UV cleaning apparatus of Claim 5 which comprised so that the said resin part 6 could be attached or detached from a support shaft via the said division part 14 which is not necessary.

EMBODIMENT OF THE INVENTION Embodiment of this invention considered to be preferable (how to implement this invention) is demonstrated based on the figure, showing the effect.

It is made into the conveyance roller 11 of the structure which attached the resin part 6 used as resin support part in the state which protruded more than the outer periphery of the metal roller body 5, or the roller body 5 itself is resin The to-be-cleaned object 1 was made into the conveyance roller 11 of the structure which made this roller body 5 itself the resin part 6, and made it the protruding outer peripheral part 6A of this resin part 6 with zero. I support it.

Therefore, for example, when the roller body 5 is made of metal, it is excellent in durability (UV resistance) and rigidity, and the object to be cleaned 1 is not supported by the metal surface, but the resin part 6 made of resin. Because it is supported by, it does not damage the object to be cleaned 1.

Moreover, since this resin part 6 is a resin material using polytetrafluoroethylene (PTFE), the UV resistance of this resin part 6 is also high.

In addition, the present invention is not a simple polytetrafluoroethylene (PTFE) material of the resin portion 6, but a resin material containing a predetermined amount of filler (e.g., mica, glass, carbon, etc.) based on the PTFE. As a result, since the resin portion 6 is formed of PTFE containing filler, the service life limit (life time) is drastically improved as compared with the case where the resin portion 6 is formed only of the conventional PTFE.

That is, when the resin portion 6 is formed only of PTFE, the resin portion 6 can withstand the use of about 2000 hours in the case of unit roughness 20 mW / cm ² , but is significantly degraded when used in excess of this. In the same condition, the present invention is almost unchanged even before use for about 8000 hours (no cracking, no cracking, and no deterioration). It is confirmed by the endurance test repeated by the applicant that the deterioration by the ultraviolet ray (UV) and the ultraviolet ray (UV) are very small and can be maintained almost before use.

In other words, by using PTFE as a resin part 6 of the conveyance roller 11 of this UV cleaner (a), PTFE containing commercially available fillers reinforced with fillers to improve durability such as wear, bending, compression, etc. , Used for carrying in and out of the object to be cleaned (1) for a long time in ultraviolet (UV) irradiation and ozone atmosphere, that is, for conveyance that is hardly deteriorated and does not deteriorate even if it is subjected to UV irradiation for a long time in the ozone atmosphere. The roller is realized.

For example, the filler is formed into a resin part 6 in which inorganic mica, glass, carbon, or the like is mixed with PTFE and formed as a fine particle or fine rod-shaped solid, thereby forming a large number (anhydrous) around the filler. The fine gaps of the microstructures can be formed in the structure of the PTFE so that a large number of the gaps of the several micron orders which were not available in the PTFE stage can be scattered (anhydrous).

Therefore, a resin material shrinks when it receives UV irradiation for a long time normally, but it is guessed that this gap permits this shrinkage by presence of this many (anhydrous) gap. That is, this gap is only smaller by shrinkage and does not deteriorate even after being subjected to UV irradiation for a long time. In other words, in the case of a simple PTFE without a gap, the shrinkage results in a tattered state, which leads to the loss of hardness and elasticity and cracking.However, the PTFE containing the filler of the present invention has a large number of such gaps in the structure in advance. Since it is scattered and formed (anhydrous), even if it irradiates for a long time UV, this gap shrinks and it is guessed that alteration does not arise.

For example, by making content of the said filler contained in PTFE into 15 to 30 weight%, the said durability with respect to ultraviolet-ray (UV) can be exhibited favorably, and the resin part 6 can be shape | molded.

EXAMPLE

EMBODIMENT OF THE INVENTION The specific Example of this invention is described based on drawing.

A plurality of support shafts 4 are rotatably arranged in parallel along the conveying direction of the object to be cleaned 1, and a conveying roller 11 supporting the object to be cleaned 1 is supported on the support shaft 4. The conveyance mechanism is constructed by attaching and fixing.

Since the conveying roller 11 is irradiated with ultraviolet rays (UV) or exposed to an ozone atmosphere, it should be adopted that it does not deteriorate even after being subjected to ultraviolet rays (UV) irradiation for a long time. have.

The roller body 5 which is the main body of the conveyance roller 11 of this embodiment is comprised by the pair of metal clamping parts 10 which have the bearing hole part 9, and is between the metal clamping parts 10. FIG. The resin portion 6 formed in the shape of a donut plate is sandwiched by holding the outer circumferential portion of the resin portion 6 so as to protrude between the metal clamping portions 10, and the resin portion 6 is placed on the roller body 5. ) Is installed on the outer circumference.

That is, the one clamping part 10 of this roller body 5 is set as the structure which integrally formed the cylindrical bearing hole part 9 in one side of the plate-shaped base body, and this clamping part ( 10) a fastening means for attaching the support shaft 4 for fastening and fastening to the support shaft 4 inserted into the bearing hole 9 (a screw formed in the bearing hole 9 of one clamping portion 10). And the other plate-shaped clamping portion 10 to the one clamping portion 10 fixed to the support shaft 4 and fixed to the support shaft 4, by the resin portion. Fastening means 13 for clamping resin part 6 (insertion hole 13A formed in one clamping part 10, and screw hole 13B formed in another clamping part 10) by sandwiching (6). And the clamping means 13 for clamping the resin part 6 by loosening the clamping means 13 for clamping the resin part 6, and supporting the other clamping part 10 with the supporting shaft ( 4) Follow And configured to move the slide.

In addition, the resin part 6 of this embodiment forms the raw material using polytetrafluoroethylene (PTFE), and improves UV resistance.

In addition, the resin part 6 of this embodiment is formed in the shape of a donut plate, is formed so that it may have a plate shape more than twice this plate thickness, and is firmly clamped by the clamping part 10 of the said roller body 5, In this case, the structure exhibits better UV resistance.

In other words, by using a donut plate shape having a plate length longer than the thickness without using an O-ring, the UV resistance is further improved, and at the same time, it is possible to obtain ultraviolet light as far as possible except for the protruding outer circumferential portion 6A supporting the object to be cleaned 1. Since it is fitted in a concealed state by the metal clamping part 10 so that it may not be irradiated, it is comprised so that the outstanding durability (UV resistance) may be exhibited.

In addition, in the present embodiment, the resin portion 6 is formed not only of PTFE but also from the material containing a predetermined amount of filler based on the PTFE.

That is, PTFE containing commercially available filler containing a predetermined amount of filler for improving durability, such as wear, bending, compression, and thermal expansion, is employed in the resin portion 6 of the conveying roller 11 of this embodiment. .

In this embodiment, PTFE containing commercial filler containing a predetermined amount of mica (SiO ₂ · K · Al) or glass (SiO ₂ ) or carbon (C) in PTFE was employed.

That is, the resin part 6 has a structure in which PTFE contains a predetermined amount of inorganic fine grains or fine rod-shaped solids as the filler.

For example, mica (SiO ₂ · K · Al) is used as the filler, and 30 wt% of mica (SiO ₂ · K · Al) is contained in PTFE, which is formed only of PTFE to have a unit roughness of 20 mW / cm ² . In the case of UV irradiation, it is significantly degraded after about 2000 hours of use, and cracked or deteriorated to a tattered state that has lost hardness or elasticity. It is confirmed by the endurance test that the applicant repeatedly performed that it is almost unchanged (no cracks at all, no alteration), and deterioration due to ultraviolet light (UV) is very small and can be kept almost unchanged before use. Doing.

In addition, it was confirmed that the glass (SiO ₂ ) contained 20% by weight in PTFE exhibited almost no deterioration even when used for 8000 hours and exhibited excellent durability against ultraviolet rays (UV).

In addition, it was also confirmed that the carbon (C) contained in 15% by weight of PTFE also had almost no deterioration even after 8000 hours of use, and the deterioration by ultraviolet (UV) was very small, showing excellent UV resistance. have.

That is, it is confirmed that excellent UV resistance is exhibited by putting a predetermined amount of an inorganic fine particle or a fine rod-shaped solid into PTFE.

The microparticles | fine-particles of PTFE containing this filler were confirmed by the microphotograph, and many microparticles | fine-particles which are invisible when a filler is not contained are scattered around PTFE, and these microparticles | fine-particles (anhydrous) are formed. It is speculated that this is one of the causes for the dramatic improvement in UV performance.

That is, for example, the filler is formed into a resin part 6 in which inorganic mica, glass, or carbon is mixed with PTFE and formed as a fine particle or fine rod-shaped solid. Anhydrous fine gaps are formed, and the structure of the PTFE can be a structure in which a plurality of micron-order gaps, which were not present when PTFE alone is dispersed, are scattered.

Therefore, the resin material shrinks when subjected to UV irradiation for a long time, but it is speculated that this gap allows this shrinkage due to the presence of a large number of gaps. In other words, the gap becomes smaller due to shrinkage and does not deteriorate even when subjected to UV irradiation for a long time. In other words, in the case of a simple PTFE without a gap, the shrinkage results in a tattered state, loss of hardness and elasticity, and cracking.However, in the PTFE containing the filler of the present invention, a large number of such gaps are formed in advance in the tissue. Since it is formed, even if it is irradiated with UV for a long time, this gap shrinks and it is guessed that alteration does not arise.

Therefore, the resin part 6 of this embodiment is a filler for improving the durability, such as abrasion, bending, compression, thermal expansion, etc., which can be formed by interspersing a large number of micron-order gaps in PTFE, specifically, The incorporation of an inorganic fine particle or a fine rod-shaped solid shows excellent UV resistance.

That is, the filler in the present embodiment is not limited to the above-described filler as long as it can form this gap. In other words, as long as it is an inorganic fine particle shape or a rod-shaped solid, it is not limited to the above-mentioned filler.

Therefore, as a filler, titanium oxide, zirconium oxide, aluminum oxide, silicon carbide, besides mica, glass, and carbon, may be sufficient, and the same effect is exhibited.

In addition, when the content of the filler mixed into PTFE is 15 to 30% by weight, the above-mentioned effect is exhibited satisfactorily. In other words, if the content of the filler is less than 15%, the above-mentioned effect of the present embodiment, in which the endurance of use is significantly improved, may not be sufficient. If the content of the filler is more than 30% by weight, the molding of the resin part 6 It may cause trouble.

In addition, in this embodiment, the structure in which one part part 14 is provided in the ring-shaped resin part 6, or the several part part part 14 is provided, and the whole part is made up by 6 C of several part resin parts. It is comprised so that it may become ring shape, and it is comprised so that the said resin part 6 may be detached from the support shaft 4 via this dividing part 14, without removing the said support shaft 4 provided.

Specifically, in this embodiment, two dividing portions 14 are provided at opposing positions of the annular resin portion 6, so that the dividing portion ( It is comprised so that the resin part 6 may be attached or detached from the support shaft 4 via 14).

That is, the roller body 5 is provided with the clamping means 13 for clamping the resin part 6 which clamps, clamps and fixes this resin part 6 which is clamped and placed between the clamping parts 10. By loosening this clamping means 13 for clamping, it is comprised so that the resin part 6 may be attached to or detached from the support shaft 4 via the said dividing part 14.

Specifically, a fastening means for attaching the support shaft 4 to be fastened to the support shaft 4 inserted into the bearing hole 9 by the clamping portion 10 of the roller body 5. 12), the other clamping portion 10 is held by one clamping portion 10 fastened and fixed to the support shaft 4, and the resin portion 6 is sandwiched between the clamping portions 10. It is configured to be held by the fastening means 13 and fixed, and by loosening the fastening means 13 for clamping the resin part 6, the other clamping part 10 is slid along the support shaft 4, The resin portion 6 is detachable from the support shaft 4 via the dividing portion 14 between the clamping portions 10.

Therefore, even if the roller body 5 is stopped and fixed to the support shaft 4, that is, even if the clamping portion 10 is attached to the support shaft 4, the support shaft ( 4), only the resin part 6 deteriorated by ultraviolet light (UV) irradiation for a long time can be replaced.

Therefore, the conveyance roller 11 of this embodiment becomes a conveyance roller in the UV washing | cleaning apparatus which can exhibit the outstanding maintenance management property.

In addition, the structure of the UV washing | cleaning apparatus shown in FIG. 1, FIG. 2 of a present Example is demonstrated.

The UV cleaning device (a) of the present embodiment has a thin board-shaped large substrate 1 (as the object to be cleaned 1) at both ends of the cleaning chamber 2 in which a plurality of ultraviolet lamps 3 are installed in parallel. An inlet 16 and an outlet 17 for transporting in a horizontal installation state are provided on the conveying rollers 11 arranged in parallel, and the cleaning chamber 2 is provided with the inlet 16 and the outlet 16. Except the carrying out opening 17, it is comprised in the sealed state.

The exterior chambers 18 covering the delivery openings 16 and the delivery openings 17 are respectively provided in a continuous state along the conveying direction, and each of the delivery openings 16A and the delivery openings 17A is respectively provided in the exterior chamber 18. In the case where the object to be cleaned 1 is carried into the cleaning chamber 2, the cleaning object 1 is carried in through the inlet port 16A, the exterior chamber 18, and the inlet port 16 in turn, and after UV washing, When carrying out, it is comprised so that it may carry out through the carrying out outlet 17, the exterior chamber 18, and 17 A of carrying out outlets in order.

More specifically, in the present embodiment, the inlet 16 and the outlet (with the opening 16A and the outlet 17A) in the carrying section (openable by the opening and closing top cover 19) The boundary part 20 which borders on and leaves 17 is protruded, and the said washing | cleaning chamber 2 and the said exterior chamber 18 were provided in the carry-in / out part, respectively, so-called conventional washing | cleaning room The outer chamber 18 is successively provided as an auxiliary chamber in the outer side of the inlet 16 and the outlet 17 of (2), and is comprised so-called double-room structure as a whole.

After the double-chamber structure is used, the washing chamber is not configured to exhaust the ozone atmosphere directly and strongly from the washing chamber 2 in a fear that a large amount of leakage may occur from the carrying in and out ports 16 and 17 as in the conventional example. (2) is a configuration in which the ozone atmosphere is sufficiently filled to the last, so that the ozone atmosphere that always leaks into the exterior chamber 18 from the inlet 16 and the outlet 17 of the cleaning chamber 2 is always provided. The exhaust part 21 is provided in the exterior chamber 18 so as to exhaust.

Therefore, since the exhaust gas is exhausted from the exterior chamber 18 outside the cleaning chamber 2 so as not to leak around the apparatus (a), the ozone atmosphere generated by the ultraviolet lamp 3 fills the cleaning chamber 2. Since it leaks into the exterior chamber 18 outside the cleaning chamber 2 and exhausts in this exterior chamber 18 without leaking around this apparatus a, it does not leak to the circumference | surroundings of this apparatus a. Unlike the conventional example in which the exhaust gas is exhausted directly in the chamber 2, the ozone concentration in the cleaning chamber 2 can be maintained high.

That is, since ozone atmosphere leakage can be prevented to the circumference | surroundings of this apparatus (a) more fully than a conventional example, ozone concentration in the said washing | cleaning chamber 2 can be kept high even if it is the same UV irradiation quantity compared with a conventional example.

In the present embodiment, a plurality of ozone concentration detection devices 22 (ozone check ports) are provided in parallel in the cleaning chamber 2 at predetermined intervals, and based on this ozone concentration detection device 22, the cleaning chamber 2 is provided. In order to finely adjust the ozone concentration in the interior or to adjust the concentration distribution in the case of non-uniformity, a plurality of exhaust parts 23 for concentration distribution adjustment for exhausting the ozone atmosphere are provided not only in the exterior chamber 18 but also in the cleaning chamber 2. Each of the exhaust units 23 is computer controlled based on the ozone concentration detecting device 22 so that the ozone concentration is uniform in the cleaning chamber 2.

In addition, since the outside air is sucked in at the inlet 16A and the outlet 17A of the exterior chamber 18 by the exhaust from the exhaust section 21 of the exterior chamber 18, a so-called air curtain is produced. In addition, the ozone atmosphere in the exterior chamber 18 is reliably shut off at the inlet 16A and the outlet 17A around the apparatus (a) other than the exterior chamber 18.

As described above, in the present embodiment, since it is a double solid structure, it is possible to prevent the leakage of ozone atmosphere around the UV cleaning device a and does not deteriorate the surrounding environment. Therefore, the exterior is not provided with the boundary 20 in the present embodiment. In the conventional example without the chamber 18, the ozone concentration in the cleaning chamber 2 is 20 to 40 PPM, and moreover, in the present embodiment, the cleaning chamber 2 is 100 to 150 PPM with respect to the cumulative illuminance of the same ultraviolet rays. The inside can be maintained at a high ozone concentration, the contact angle can be reduced by about 1.5 times, and the uniform concentration can be confirmed that the cleaning effect is dramatically improved. Furthermore, as described above, in the present embodiment, the ozone in the washing chamber 2 is further adjusted by the exhaust adjustment by the exhaust unit 23 in the washing chamber 2 arranged in plural numbers while being detected by the ozone concentration detecting device 22. Since the concentration distribution can be made uniform, very high cleaning performance can be obtained.

In addition, since it is not necessary to lengthen an expensive large output lamp and ultraviolet irradiation time, it is also possible to reduce manufacturing cost and operation cost.

In the ultraviolet lamp 3 of the present embodiment, a low pressure mercury lamp is used, the treatment temperature is set to 100 to 250 ° C by an IR heater, and the ozone concentration in the cleaning chamber 2 is set to 500 to 1000 PPM. For example, several hundred mm square large substrates are constructed to provide good dry cleaning by synergistic effects of UV irradiation, high concentration ozone and temperature heating.

In the drawing, reference numeral 24 denotes a temperature detection device (temperature check port).

In addition, this invention is not limited to a present Example, The specific structure of each structural requirement can be designed suitably.

Since the present invention has been constructed as described above, the resin part is formed of a resin material having a predetermined filler added thereto, based on poly (4) fluoride (PTFE), a resin material that has been used so far. It becomes a conveyance roller in the breakthrough and practical UV cleaning apparatus which drastically improved the use time (life time) until now.

That is, PTFE is used as the resin part of the conveying roller of the UV cleaning device, for example, by adopting PTFE containing a reinforced filler to improve durability such as wear, bending, compression, and the like. Even if the water is used for carrying in and out for a long time, that is, even if it is subjected to UV irradiation for a long time or in the ozone atmosphere for a long time, it becomes a conveying roller in a UV cleaning apparatus that does not deteriorate in quality and does not generate cracks at all.

In other words, the object to be cleaned is formed by forming the resin part of the roller body from a material containing not only PTFE but also a predetermined amount of filler (for example, mica, glass, carbon, etc.) based on the PTFE. Although it is a structure which is not damaged very much, it becomes the conveyance roller in the UV washing | cleaning apparatus which can dramatically improve the endurance service life (life) until now.

In invention of Claims 2-4, it becomes a conveyance roller in the UV washing | cleaning apparatus with which the action and effect of the said invention are exhibited reliably.

In the invention according to claim 5, the UV resistance is further improved by forming a donut plate having a plate shape longer than the thickness without forming an O-ring, and at the same time, it is ultraviolet light as long as it can be other than the protruding outer portion that supports the object to be cleaned. Since it is clamped and fixed by the metal clamping part so that it may not receive (UV) irradiation, it becomes the conveyance roller in the very breakthrough UV cleaning apparatus which exhibits the outstanding durability (UV resistance). In invention of Claim 6, it becomes a conveyance roller in the breakthrough UV cleaning apparatus which exhibits the further outstanding retainability which can smoothly exchange | exchange resin materials etc. by that much.

1 is a schematic configuration explanatory diagram of a UV cleaning device of this embodiment.

Fig. 2 is an explanatory perspective view of a cleaning chamber and an exterior chamber of the UV cleaning apparatus of this embodiment in a state in which a lid is lifted and opened;

3 is an exploded explanatory perspective view of this embodiment.

4 is an explanatory perspective view showing a state of use of this embodiment.

5 is an explanatory cross-sectional view showing a state of use of this embodiment.

6 is an exploded perspective view illustrating a part of the present embodiment.

Fig. 7 shows an open state in which the clamping means for clamping the clamping part of the present embodiment is loosened, and the other clamping part is slightly moved relative to one clamping part (removing two divided resin parts forming the resin part). An exploded perspective of some of the explanations.

<Explanation of symbols for the main parts of the drawings>

1: To-be-cleaned object (substrate) 2: Cleaning room

3: ultraviolet lamp 4: support shaft

DESCRIPTION OF SYMBOLS 5 Roller body 6 Resin part 6C Separation resin part 9 Bearing hole part 10 Holding part 14 Separation part

delete

a: UV cleaner

Claims (6)

An ultraviolet lamp is installed in the cleaning chamber into which the object to be cleaned is brought in, and the molecular chain of the organic substance is divided by ultraviolet (UV) irradiation of the ultraviolet lamp, and then ozone in the cleaning chamber by ultraviolet (UV) irradiation of the ultraviolet lamp. In the cleaning chamber of the UV cleaning apparatus configured to remove the surface organic matter of the object to be cleaned by reacting oxygen (O) of the generator having a strong oxidizing power during the decomposition and production reaction of ozone with organic matter. A conveying roller provided on a support shaft for carrying in or carrying out the material, wherein the resin portion for supporting the object to be cleaned is provided on the roller body provided on the support shaft in a protruding state on the outer circumference or on the support shaft. The roller body itself is made of a resin material, and the roller body itself is a resin part for supporting the object to be cleaned, and the resin part is made of polytetrafluoroethylene (PTFE) as a base. A conveyance roller in a UV cleaning apparatus, characterized by comprising a resin material in which a predetermined amount of fillers forming a large number of fine gaps are contained and formed by countless gaps of several micron orders. The UV cleaning device according to claim 1, wherein the resin part is made of a polytetrafluoroethylene (PTFE) resin material containing a predetermined amount of a filler for improving durability such as wear, bending and compression. Roller for conveyance. The said resin part is comprised from the resin material which contained a predetermined amount of inorganic fine particle shape or a fine rod-like solid in polytetrafluoroethylene (PTFE) as said filler, The said resin part is characterized by the above-mentioned. Roller for conveyance in UV cleaning apparatus. The conveying roller according to claim 1 or 2, wherein the filler contains 15 to 30% by weight of the polytetrafluoroethylene (PTFE) as a base. The said roller body is comprised by a pair of metal clamping part which has a bearing hole part, The said resin part formed in the donut plate shape between this metal clamping part is the outer periphery of this resin part of Claim 1 or 2. A conveyance roller in a UV cleaning apparatus, characterized in that a portion is sandwiched between the metal holding portions so as to protrude so that the resin portion is provided in the roller body in a protruding state. 6. The support shaft according to claim 5, wherein the resin portion is formed in one or several places by providing a dividing portion so that the dividing portion is annular as a whole by a plurality of dividing resin portions, so that the supporting shaft is not separated from the supporting shaft. The conveyance roller in the UV cleaning apparatus characterized by the above-mentioned so that the said resin part can be attached or detached.