200307637 玖、發明說明： 【發明所屬之技術領域】 本發明係關於搬送裝置。 【先前技術】 譬如’構成彩色液晶表不面板的滤色片’透過在玻璃基 板上塗敷紅，綠色，藍色的而ί #劑而被製造，在此製造流 程中包括清洗步驟。為了提高清洗效果，清洗過程併用以 下兩種方法，即，使用純水的濕式清洗法和U V / 0 3清洗法。 此處的U V / 0 3清洗法是一種紫外線處理，其藉由紫外線使 有機物低分子化，及利用透過紫外線照射空氣中的氧氣而 產生的臭氧和活性氧基來除去有機物。 圖1 3，為表示用於該清洗步驟之紫外線處理裝置的開放 狀態的立體圖。在紫外線處理裝置5 0的本體51内，設置 有具備多數的傳送輥5 2之搬送裝置5 3，藉此，能夠把裝 載在傳送輥5 2上的作為被處理物的多塊玻璃基板（沒有圖 示）朝著圖1 3的箭頭方向依次搬送。 從前，在此種搬送裝置53中，採用在紫外線照射 下不易劣化的金屬傳送輥52。但是，因為金屬製的 傳送輥5 2為硬質，有時在與玻璃基板接觸時，易使 玻璃板產生擦傷，因而產生產品的成品率降低的問 題。特別是，在搬送大型的玻璃基板時，為防止玻璃 基板的彎曲，不僅在對產品質量影響少的兩端部，而 且在靠近内側的位置也必須設置傳送輥52來支撐玻 璃基板，於是，成品率降低的問題變得更嚴重。 5 312/發明說明書(補件)/92-07/92113054 200307637 因此，為了迴避此問題，採用不易產生擦傷的樹脂 製傳送輥5 2。但是，因樹脂製的傳送輥5 2比金屬製 的劣化快，存在著必須頻繁檢查，進行交換的問題。 並且，在此交換作業中，必須經過以下的繁雜步驟， 首先，從搬送裝置5 3取下傳送輥軸5 4，從傳送輥5 2 上抽出報軸 5 4之後，把新的報軸 5 4插入傳送報5 2， 再安裝到搬送裝置5 3。此外，因為此維修作業時間 長，造成裝置的工作效率下降的問題。 【發明内容】 本發明是針對上述情況而進行的，其目的在於提供一種 搬送裝置，其能完成搬送作業而不損傷被搬送物，且容易 進行維修作業。 基於為解決上述課題的第1發明之搬送裝置，為一種具 有帶報的報軸，搬送與上述輥•相接觸之被搬物體，其特徵 在於，上述輥具備在搬送中與上述被搬物體相接觸之環狀 部件，上述環狀部件上設有沿直徑方向使環狀部件分斷的 分斷部。 又，即使在上述報僅由上述環狀部件所組成之情況下， 當然，也包含於本發明之第1發明中。 第2發明，如第1發明之搬送裝置，上述輥具有保持部 件，上述保持部件由第1保持部和可固定於上述第1保持 部上的第2保持部分割形成，上述環狀部件可被上述第1 保持部和上述第2保持部相爽而被安裝在上述保持部件 上。 6 312/發明說明書(補件)/92-07/92113054 200307637 第3發明，如第1發明之搬送裝置，上述輥具有保持部 件，在上述環狀部件及上述保持部件之其中一方，設置有 沿軸方向突出之伸出部，同時在另一方，設置有可嵌入上 述伸出部之凹部。 第4發明，如第2發明之搬送裝置，在上述環狀部件及 上述保持部件之其中一方，設置有沿軸方向突出之伸出 部，同時在另一方，設置有可嵌入上述伸出部之凹部。 第5發明，如第4發明之搬送裝置，上述第1保持部可 固定於上述輥軸上，上述環狀部件可固定在上述保持部件 上，上述伸出部或上述凹部設置於上述第1保持部上。 第6發明，如第1發明之搬送裝置，上述環狀部件中之 搬送中與上述被搬物體相接觸的部分，由可避免上述被搬 送體與上述環狀部件因接觸而造成損傷之軟質材料所構 成。 此處，作為「可避免上述被搬送體由於與上述環狀部件 接觸而造成損傷之軟質材料」，可列舉為如含氟樹脂，聚醯 亞胺樹脂，聚醚嗣（P E E K )樹脂等的樹脂材料。 第7發明，如第1發明之搬送裝置，上述分斷部的輪廓 線中之與搬送中與上述被搬送體相接觸的部分，不收納於 含有上述親軸之旋轉軸的平面内。 環狀部件在與被搬送體相接觸的情況下，不管該環狀部 件與被搬送體相接觸部位多麼窄，必定有一定的寬度。因 此，譬如即使在沿直徑方向分割環狀部件的分割部是圓形 等情況，由分割面形成的平面不包含親的旋轉軸的情況 7 312/發明說明書(補件)/92-07/92] 13054 200307637 下，也相當於上述第7發明。 第8發明，如第2發明之搬送裝置，上述第2保持部， 可用螺絲固定在上述第1保持部上。 第9發明，如第8發明之搬送裝置，在上述第1保持部 或上述第2保持部上，設置有大徑孔和小徑孔連接而成的 安裝孔，在設置有安裝孔的保持部上，藉由貫通於上述安 裝孔的螺絲把另一保持部固定在其上，上述螺絲，係由螺 絲部與較上述螺絲部直徑大的頭部所構成之附頭螺絲，上 述頭部，係被容許插通上述大徑孔，且被限制插通上述小 徑孔。 第1 0發明，如第1至9發明中任一之搬送裝置，設置 於上述環狀部件上之上述分斷部為一處。 第1 1發明的搬送裝置，具備了帶輥輥軸，搬送與上述 棍相接觸的被搬物體，其特徵在於，上述親與搬送中的上 述被搬送體相接觸的部分由樹脂所構成，此由樹脂構成的 部分，被非樹脂部件夾著而固定。在此情況下，未必把此 非樹脂零部件分割成二個以上的部件，在非樹脂部件上形 成溝，把上述的由樹脂構成的部分嵌入溝内，此種情況也 相當於本發明之第1 1發明。 根據第1的發明，由於環狀部件設有分斷部，而不必從 搬送裝置上取下輥軸，就可以在輥軸上安裝，拆卸環狀部 件。由此一來，就可容易地進行交換環狀部件的作業。 根據第2的發明，環狀部件，係被第1保持部和第2保 持部相夾而配置。此時，為把第2保持部固定於第1保持 8 312/發明說明書(補件)/92-07/92丨13054 200307637 部上，可固定於比輥軸接近環狀部件與被搬送體相接 分的位置（參照圖5 )。因此，可高精確度地固定環狀 與被搬送體接觸部位的位置。其結果，可高精確度地 分斷部中與被搬送體相接觸部分，進而防止由於分斷 端的位置之偏差而造成之被搬送體於搬送時之不穩定 果第2保持部不被固定在第1保持部上，第1和2的 部的雙方都被固定在輥軸上（與第2的發明不同）的情 下，由於2個保持部中皆被固定於遠離環狀部件與被 體相接的部分，就不能高精確度地固定分斷部兩端與 送體相接的部分。 根據第3或第4發明，環狀部件及保持部件的其中 方，設置有沿軸方向突出的伸出部，另一方，設有可 此伸出部的凹部。 在此，環狀部件因有分斷部，其受熱或與被搬送體 涉等而易產生變形。但是，若如上述之構成，藉由伸 被預先嵌於凹部，因而限制了環狀部件的偏差，環狀 得以在保持其形狀的同時且被確實地固定在保持部件 據此，能防止環狀部件的變形而圓滑地搬送被搬送體 根據第5發明，第1保持部被無法移動地固定在輥 上，在此保持部件上嵌套有環狀部件。藉由如此之構 能將環狀部件保持住而不偏離輥軸芯，圓滑地搬送基 根據第6發明，可不損傷被搬送體而搬送。 第7發明，如第1發明之搬送裝置，上述分斷部的 線上之搬送中與上述被搬送體相接觸的部分，不收納 312/發明說明書(補件)/92-07/92113054 觸部 印件 固定 部兩 〇如 保持 況 搬送 被搬 嵌入 的干 出部 部件 上。 〇 軸 成， 板。 輪廓 於含 9 200307637 有上述輥軸之旋轉軸的平面内。 當環境溫度變動等引起環狀部件收縮時，在分斷部上可 能會產生開口 。在此，如果把分斷部形成於含有輥軸的旋 轉軸的平面内，會因該開口部朝向垂直於玻璃基板的搬送 方向，而有在搬送被搬送體時產生震動之虞。但是，根據 第7發明，由於分斷部的輪廓線上與搬送中的被搬送體相 接觸的部分，不收納於含有上述輥軸之平面内，所以被搬 送體經常是被分斷部兩側之任一分離邊所支撐。因此，根 據第7發明，可迴避震動而圓滑地搬送被搬送體。 根據第8發明，即使不取下第2保持部，或即使不完全 取下螺絲，只要稍微鬆動螺絲，就可解除由第1和第2保 持部對環狀部件的固定，進而可交換環狀部件。因此，能 大幅度縮短交換環狀部件所需之必要時間。 根據第9發明，即使不取掉附頭螺絲，透過使螺絲頭部 從大徑孔拔出穿入，可容易地進行第2保持部在第1保持 部上的安裝、拆卸。由此，可使維修工作變得更加容易。 根據第1 0的發明，因為設置於環狀部件上的分斷部為 一處，所以有在搬送裝置之使用中，即使保持部對環狀部 件的壓迫鬆懈，環狀部件也不會從輥軸上脫落之優點。 根據第1 1的發明，由於輥上由樹脂組成的部分被非樹 脂的零部件所夾持配置，所以即使紫外線等的電磁波照射 裝置被用於本發明，被紫外線等電磁波所照射的樹脂部分 被控制於最小限度，從而抑制由樹脂組成部分之劣化。 【實施方式】 10 312/發明說明書(補件)/92·〇7/92113〇54 200307637 〈第1實施形態〉 以下，參照圖1至圖9，對具體化本發明之搬送裝置1 之第1實施形態加以詳細說明。 本發明之搬送裝置1具備對液晶顯示器用的玻璃基板 7 (相當於本發明的被搬送體）進行清洗之清洗裝置2，為搬 送玻璃基板7之裝置。 如圖1所示，清洗裝置2由下列裝置所構成：從紫外線 灰化裝置3之正面來看，其左側接有紅外線預熱裝置4， 右側配置冷卻裝置5，進一步，在冷卻裝置5之右側接連 配置濕式清洗裝置6。 在3、4、5、6之各裝置中分別具備搬送裝置1，玻璃基 板7被沿著如圖中箭頭所示的方向從左側向右側依次搬 送，全體形成一個連續清洗線。以下，以紫外線灰化裝置 3為例進行說明。 紫外線灰化裝置3的本體1 1呈箱狀，使上面呈開口狀， 並配置如堵塞該開口部之兩片燈罩1 2 (參照圖2 )。 從本體1 1之前面來看，位於其左側的燈罩1 2，其左側 緣前後兩端部介由鉸鏈機構由本體1 1的前面壁部Π A以及 後面壁部1 1 B所支撐，本體1 1的上面開口部的左半邊可藉 由該燈罩1 2朝左邊方向開關。另一方面，從本體1 1的前 面來看，位於其右側的燈罩1 2，其右側緣前後兩端部藉由 鉸鏈機構，由本體1 1的前面壁部1 1 A以及後面壁部Π B 所支撐，本體1 1的上面開口部的右半邊可藉由該燈罩1 2 在橫方向開關。並且，在各燈罩1 2的前後兩端部和本體 11 312/發明說明書(補件)/92-07/92113054 200307637 1 1的前面壁部Π A及後面壁部1 1 B之間，分別設置公知的 氣動缓衝式的支撐1 7，藉由該支撐1 7有助於燈罩1 2之開 放方向的動作，又可保持住燈罩1 2之開放狀態。 在燈罩1 2中在關閉位置時處於其底部的部分，配置有 多根用於紫外線照射的燈1 3。該燈1 3是一長的U字形彎 曲燈，整體而言，其長度與輸送機框壁2 1間的距離大致等 長，不過，其燈頭部1 3 A位於本體1 1的前部，而其玻璃燈 管部1 3 B在本體1 1的後側折返彎曲而成。燈頭部1 3 A被用 螺絲固定在燈罩1 2之固定部1 4上，玻璃燈管部1 3 B的後 端部被固定在保持夾1 5上，而此保持夾1 5則是用螺絲固 定於燈罩1 2的下面板1 2 A上。與燈頭部1 3 A相連的電線群 (沒有圖示）被集束於燈罩1 2前側，再通過設在燈罩1 2前 端部與本體1 1間的可撓性蛇腹管1 6而與本體1 1内的電源 裝置（圖中未表示）相連接。 同時，在燈罩1 2裡面設有未圖示之冷卻水路，該冷卻 水路的供水管1 8及排水管1 9是從位於上述蛇腹管1 6的相 反側的燈罩1 2的後端部引出的，其與本體1 1内的冷卻水 供給裝置相連接（未圖示）。 搬送裝置1被組合安裝於本體11。在本體11的内部， 設置有2片輸送機框架壁2 1，其為一對沿前面壁部1 1 A和 後面壁部1 1 B平行的框壁。在該輸送機框架壁2 1之間，沿 前後方向插有數根形成圓柱狀之輥軸2 2，其各自被軸承 (沒有圖示）所支撐而可旋轉。在各輥軸2 2上，大致按均一 螺距安裝有複數個傳送輥2 3 (相當於本發明的輥），藉由設 12 312/發明說明書(補件)/92-07/92113054 200307637 置在本體1 1裡面的驅動裝置驅動輥軸2 2旋轉，而可搬送 裝載在輥2 3上的玻璃基板7。 傳送輥2 3，由與玻璃基板7直接接觸之環狀部件2 4和 把此環狀部件2 4保持於輥軸2 2上之保持部件2 7所構成 (參照圖3〜圖5 )。 環狀部件2 4，由不至於損傷玻璃基板7的軟質材料，且， 紫外線照射時不易劣化的材料之聚四氟乙烯（P T F E )樹脂所 形成，呈平板圓環狀，其内經比輥軸2 2的外徑大。該環狀 部件24的一側，在其内側全周形成一個向輥軸方向突出的 凸緣2 5 (相當於本發明的伸出部）。同時，在環狀部件2 4 的任意1處，沿著軸方向切斷環而形成一個分斷部2 6，藉 由擴開該分斷部2 6，而可完成環狀部件2 4在輥軸2 2上的 安裝及拆卸。 保持部件2 7，整體為不鏽鋼製成的圓環狀物所形成，由 被固定在輥軸2 2上的固定環2 8 (相當於本發明之第1保持 部），及與該固定環2 8相配，用於夾持固定環狀部件2 4 的固定板3 6 (相當於本發明之第2保持部）所構成。 固定環2 8，具有與輥軸2 2的外徑大體相等的内徑，及 比環狀部件2 4小一圈的外徑的圓環。此固定環2 8的一側 面，為用於安裝環狀部件24的安裝面29。在此安裝面29 上，沿直徑外側，切削掉與環狀部件2 4厚度相等的部分而 形成台階部3 0。同時，在台階部3 0直徑方向之内側領域， 形成有一圈可嵌入環狀部件2 4的凸緣2 5的溝槽部3 1 (相 當於本發明的凹部）。使溝槽部3 1與凸緣2 5整合的同時， 13 312/發明說明書(補件)/92-07/92113054 200307637 把上述環狀部件2 4嵌入該台階部3 0上。 同時，在溝槽部31稍稍内側的所定位置，形成有螺絲 孔3 3，以使能把固定板3 6用附頭螺絲3 2固定在孔3 3上。 該螺絲孔3 3，被開在同一圓周上的等間隔的3處。 在固定環2 8之安裝面2 9的反面，在其直徑方向的内側 區域，形成有一周向輥軸方向突出的筒部3 4。藉此，輥軸 2 2被緊密地嵌入這個筒部3 4的内部，因此，固定環2 8以 同芯狀固定於輥軸2 2，且不會在直徑方向發生移動。在這 個筒部3 4的長邊方向的大體上處於中央的位置，開了一個 貫通的固定螺絲用孔3 5，透過在該固定螺絲孔3 5中裝入 固定螺絲（沒有圖示）擰緊，固定環2 8則被固定在輥軸2 2 上，作為一個整體而旋轉。 另一方面，固定板36，形成為一具有與固定環28大體 上相等的外徑的平板圓環狀。固定板3 6的内徑，比輥軸 2 2的外徑略大，以使在固定環2 8上安裝或拆卸固定板3 6 時沿轴方向易於滑動。在該固定板3 6上’與固定環2 8的 螺絲孔3 3整合的位置，形成有附頭螺絲3 2插通用的安裝 孔3 7。該安裝孔3 7，被做成大小圓孔相連的燒瓶形，大徑 孔3 7 Α的直徑較附頭螺絲3 2的頭部3 2 Α稍大；小徑孔3 7 Β 的直徑既比附頭螺絲3 2的螺絲部3 2 B大，又比頭部3 2 A /J、 〇 固定板3 6係，首先使安裝孔3 7的小徑孔3 7 B與固定環 2 8的螺絲孔3 3相整合而把固定板3 6予裝在固定環2 8的 安裝面2 9上，再把附頭螺絲3 2通過小徑孔3 7 B擰在螺絲 14 312/發明說明書(補件)/92·07/92113〇54 200307637 孔3 3上固定。這樣一來，環狀部件2 4，就由固定板 固定環2 8夾住，而保持不脫落。 其次，就上述構成的本實施形態的作用及效果加以 明。 如果用本實施形態的清洗裝置2來清洗玻璃基板7 則把玻璃基板7載在搬送裝置1的傳送輥2 3上，再運 動裝置。於是，通過輥軸2 2的旋轉驅動，使得被固定 軸2 2上而可一體化轉動的傳送報2 3旋轉。如此，載 送輥2 3上的玻璃基板7如圖1所示被從左面搬送到； 並且，在玻璃基板通過各裝置3、4、5、6的内部期間 璃基板7被依次進行處理。即，玻璃基板7通過紅外 熱裝置4裡面的時候被加熱處理，接著被搬送到紫外 化裝置3裡面進行财餘劑的灰化處理。其後，被搬送 卻裝置5裡面冷卻，再搬送到濕式洗淨裝置6裡面濕 淨。 此時，因為金屬製的保持部件2 7比環狀部件2 4直 小，而不與玻璃基板7接觸，只有軟質的環狀部件2 4 璃基板7接觸（參照圖6 )。藉此可迴避玻璃基板7被 輥2 3所損傷。 又，環狀部件2 4被固定環2 8及可被固定於固定環 上之固定板36失著配置。此時，為把固定板36固定 定環2 8上，比起輥軸2 2，更可固定於接近環狀部件 玻璃基板7相接觸的部分（參照圖5 )。因此，可精確 好地固定環狀部件2 4與玻璃基板7接觸部分的位置。 312/發明說明書(補件)/92-07/92113054 3 6和 說 時， 轉驅 在輥 於傳 &面。 ，玻 線預 線灰 到冷 式洗 徑 與玻 傳送 28 在固 24與 度很 其結 15 200307637 果，可很精確地固定分斷部2 6的兩端中與玻璃基板7接觸 的部分，能防止由於分斷部2 6的兩端的位置的偏差造成的 搬送時的玻璃基板7震動。 同時，由於環狀部件2 4具有分斷部2 6，而易受熱或基 材的干涉產生變形。但是，因為在環狀部件2 4上設置有凸 緣2 5，此凸緣2 5被鑲嵌在固定環2 8的溝槽31上，所以 環狀部件2 4相對於固定環2 8的運動被限制，而使得環狀 部件2 4既保持了其形狀又被確實地固定在保持部件2 7 上。因而，能防止環狀部件2 4的變形，而圓滑地搬送玻璃 基板7。 特別是，因為環狀部件2 4被嵌在固定環2 8的一側，此 固定環2 8又被不可游動地固定於輥軸2 2，所以能防止環 狀部件2 4對於輥軸2 2發生芯偏差。同時，凸緣2 5及溝槽 3 1是被形成於全周上，而使得環狀部件2 4確實保持圓環 形狀。據此，可防止搬送玻璃基板7的時候的振動。 因為設置於環狀部件2 4上的分斷部2 6為一處，使其具 有在搬送裝置使用中即使固定板3 6對環狀部件2 4的壓迫 鬆懈，也不會導致環狀部件2 4從輥轴2 2上脫落的優點。 由於環狀部件2 4受熱或紫外線等的影響而在比較早期 發生劣化，按以下的方法進行交換。 首先，稍微鬆開附頭螺絲3 2，轉動固定板3 6至附頭螺 絲3 2的頭部3 2 A與安裝孔3 7的大徑孔3 7 A相一致的位置 (圖7參照）。在此狀態下，滑動固定板3 6讓附頭螺絲3 2 的頭部3 2 A通過大徑孔3 7 A，從固定環2 8脫開（參照圖8 )。 16 312/發明說明書(補件)/92-07/92113054 200307637 接著，從固定環2 8上取下環狀部件2 4。並且，扭開環狀 部件2 4的分斷部2 6，擴開至分斷端2 6 A、2 6 B的空隙能使 輥軸2 2通過，使輥軸2 2從此空隙通過，取下環狀部件 2 4 (參照圖9 )。 此後，經與拆卸相反的次序，把新的環狀部件2 4，安裝 到保持部件2 7上。即，擴開環狀部件2 4的分斷部2 6，使 輥軸2 2從這裡進到圓環内，而把環狀部件2 4安裝到輥軸 2 2上。其次，讓溝槽3 1與凸緣2 5相一致，把環狀部件2 4 鑲嵌在固定環2 8上。接著，讓附頭螺絲3 2的頭部3 2 A從 大徑孔3 7 A通過，把固定板3 6滑向固定環2 8，使之與安 裝面2 9相接觸。並且，轉動固定板3 6使附頭螺絲3 2的螺 絲部3 2 B進入到小徑孔3 7 B的位置，使固定板3 6保持在不 會脫落。最後，藉由擰緊附頭螺絲3 2，而把環狀部件2 4 由固定板36和固定環28相夾固定。 如上所述，因為在環狀部件2 4上形成有分斷部2 6，就可 不必從搬送裝置1上取下輥軸2 2，而只進行環狀部件2 4 的安裝、拆卸作業。同時，因為設置於固定板3 6上的安裝 孔3 7呈燒瓶狀，就不必從固定環2 8上取下附頭螺絲3 2， 而可以在固定環2 8上進行安裝或拆卸固定板3 6的作業。 根據如上的本實施形態，與玻璃基板7直接接觸的環狀 部件2 4由軟質樹脂材料做成，而且通過在這個環狀部件 2 4上設置分斷部2 6，使得交換工作容易進行。因此，能搬 送玻璃基板7而使之不損傷，而且，能容易進行維修工作。 再者，根據本實施形態，因為樹脂的環狀部件24，被不 17 312/發明說明書(補件)/92-07/92113054 200307637 鏽鋼之固定環2 8和不鏽鋼之固定板3 6所夾持配置，使環 狀部件2 4上的被紫外線等的電磁波所照射的部分被限制 在最小限度，因而抑制了環狀部件2 4的劣化。 更且，在本實施形態中，雖然以具備紫外線灰化裝置3 之搬送裝置1為例進行說明，不過，其他的裝置4、5、6 上的搬送裝置也具有同樣的構成，也可達到同樣的作用效 果。 又，在本實施形態中，透過傳送輥2 3的轉動而搬送玻 璃基板7，不過，如果玻璃基板7是被輥以外的動力搬送， 輥只是被用於玻璃基板7的位置調整，同樣可得到本發明 的效果（第2實施形態，以及其他的實施形態也同樣）。 〈第2實施形態〉 以下，參照圖1 0及圖11，對本發明的第2實施形態加 以說明。 本實施形態與第1實施形態的不同之處在於，分斷部4 1 被設置成斜切於環狀部件4 0的軸方向。 由於環境溫度的變動，環狀部件40產生收縮時，有時 造成分斷部4 1產生開口。這裡，如像第1實施形態一樣地 將分斷部4 1設置成沿環狀部件4 0的軸方向，因為該開口200307637 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a conveying device. [Prior art] For example, "color filters constituting a color liquid crystal display panel" are manufactured by coating red, green, and blue agents on a glass substrate, and the manufacturing process includes a cleaning step. In order to improve the cleaning effect, the cleaning process is combined with the following two methods, namely, a wet cleaning method using pure water and a U V / 03 cleaning method. The U V / 0 3 cleaning method here is a kind of ultraviolet treatment, which reduces the molecular weight of organic substances by ultraviolet rays, and uses ozone and active oxygen groups generated by irradiating oxygen in the air with ultraviolet rays to remove organic substances. Fig. 13 is a perspective view showing an open state of the ultraviolet treatment device used in the cleaning step. The main body 51 of the ultraviolet processing device 50 is provided with a conveying device 5 3 having a large number of conveying rollers 52. Thereby, a plurality of glass substrates (without a workpiece) mounted on the conveying rollers 52 can be processed. (Illustrated) Carry them in order in the direction of the arrow in Figure 13. Heretofore, in such a conveying device 53, a metal conveying roller 52 which is hardly deteriorated by ultraviolet irradiation is used. However, since the metal transfer roller 52 is hard, there is a case where the glass plate is easily scratched when it comes into contact with the glass substrate, which causes a problem that the product yield is lowered. In particular, when transporting a large glass substrate, in order to prevent the glass substrate from being bent, it is necessary to provide a transfer roller 52 to support the glass substrate not only at the two end portions that have little influence on product quality, but also near the inside. The problem of lower rates becomes more serious. 5 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 Therefore, in order to avoid this problem, a resin-made transfer roller 5 2 which is less prone to scratches is used. However, since the resin-conveying roller 52 is deteriorated faster than the metal, there is a problem that it is necessary to frequently check and exchange it. In addition, in the exchange operation, the following complicated steps must be taken. First, the conveying roller shaft 5 4 is removed from the conveying device 5 3, the newspaper shaft 5 4 is pulled out from the conveying roller 5 2, and then the new newspaper shaft 5 4 is removed. Insert the telegram 5 2 and install it in the transport device 5 3. In addition, because the maintenance work takes a long time, there is a problem that the working efficiency of the device decreases. SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and an object thereof is to provide a conveying device that can complete a conveying operation without damaging an object to be conveyed, and is easy to perform a maintenance operation. The conveying device according to the first invention for solving the above-mentioned problems is a conveying device having a telegraph shaft for conveying an object to be brought into contact with the roller, and the roller is provided with a phase corresponding to the object to be conveyed during conveyance. The contacting ring-shaped member is provided with a cutting portion for cutting the ring-shaped member in a diameter direction. In addition, even in the case where the report is composed of only the ring-shaped member, it is naturally included in the first invention of the present invention. According to a second invention, as in the conveying device of the first invention, the roller has a holding member, and the holding member is formed by dividing the first holding portion and the second holding portion that can be fixed to the first holding portion, and the ring-shaped member can be formed by The first holding portion and the second holding portion are attached to the holding member so as to be compatible with each other. 6 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 In the third invention, the conveying device of the first invention, the roller has a holding member, and one of the ring-shaped member and the holding member is provided with a rim. A protruding portion protruding in the axial direction is provided with a recessed portion which can be fitted into the protruding portion on the other side. A fourth invention is the conveying device according to the second invention, wherein one of the ring-shaped member and the holding member is provided with a protruding portion protruding in the axial direction, and the other is provided with a protruding portion that can be fitted into the protruding portion. Recess. According to a fifth invention, as in the conveying device of the fourth invention, the first holding portion may be fixed to the roller shaft, the annular member may be fixed to the holding member, and the protruding portion or the recessed portion may be provided in the first holding portion. Ministry. According to a sixth aspect of the present invention, as in the first aspect of the conveying device, the portion of the ring-shaped member that comes into contact with the object to be conveyed is a soft material that prevents the object to be damaged from contact with the ring-shaped member. Made up. Here, as the "soft material which can prevent the conveyed object from being damaged due to contact with the above-mentioned ring-shaped member", resins such as a fluorine-containing resin, a polyimide resin, and a polyether (PEEK) resin can be cited. material. A seventh invention is the conveying device according to the first invention, wherein a portion of the contour line of the cut-off portion that is in contact with the object to be conveyed during conveyance is not housed in a plane including the axis of rotation of the affinitive axis. When the ring-shaped member is in contact with the object to be conveyed, it is necessary to have a certain width regardless of how narrow the area where the ring-shaped member is in contact with the object to be conveyed is. Therefore, for example, even when the division part that divides the ring-shaped member in the diameter direction is circular, the case where the plane formed by the division surface does not include the parent axis of rotation 7 312 / Invention Specification (Supplement) / 92-07 / 92 ] 13054 200307637, also corresponds to the seventh invention. The eighth invention is the conveying device according to the second invention, wherein the second holding portion is fixed to the first holding portion by screws. A ninth invention is the conveying device according to the eighth invention, wherein the first holding portion or the second holding portion is provided with a mounting hole formed by connecting a large-diameter hole and a small-diameter hole, and a holding portion provided with the mounting hole The other holding portion is fixed to the mounting hole by a screw penetrating the mounting hole. The screw is a captive screw composed of a screw portion and a head having a larger diameter than the screw portion. The large diameter hole is allowed to pass through, and the small diameter hole is restricted to pass through. The tenth invention is the conveying device according to any one of the first to ninth inventions, and the branching portion provided on the annular member is located at one place. A conveying device according to the eleventh invention is provided with a roller shaft for conveying an object to be brought into contact with the stick, wherein a part of the close contact with the object to be conveyed during conveyance is made of resin. The part made of resin is sandwiched and fixed by a non-resin member. In this case, it is not necessary to divide the non-resin component into two or more parts, form a groove in the non-resin part, and embed the above-mentioned part made of resin into the groove. This case also corresponds to the first aspect of the present invention. 1 1 invention. According to the first invention, since the ring-shaped member is provided with a breaking portion, the ring-shaped member can be attached to and removed from the roller without removing the roller shaft from the conveying device. As a result, the operation of replacing the ring-shaped member can be easily performed. According to the second invention, the ring-shaped member is disposed to be sandwiched between the first holding portion and the second holding portion. At this time, in order to fix the second holding part to the first holding part 8 312 / Invention Manual (Supplement) / 92-07 / 92 丨 13054 200307637, it can be fixed to the ring-shaped member closer to the roller than the roller shaft. The location of the points (see Figure 5). Therefore, the position of the ring-shaped contact portion with the object to be conveyed can be fixed with high accuracy. As a result, the contact portion of the cutting portion with the object to be conveyed can be divided with high accuracy, thereby preventing instability of the object to be conveyed due to the positional deviation of the cutting end, and the second holding portion is not fixed. In the case where both the first and second parts are fixed to the roller on the first holding part (different from the second invention), since both holding parts are fixed away from the ring member and the The part where the body is in contact with the body cannot fix the part where the both ends of the breaking part are in contact with the body with high accuracy. According to the third or fourth invention, one of the ring-shaped member and the holding member is provided with a protruding portion protruding in the axial direction, and the other is provided with a recessed portion capable of protruding therefrom. Here, the ring-shaped member is easily deformed because it has a cut-off portion, which is subjected to heat or related to the conveyed object. However, if the structure is as described above, since the protrusion is embedded in the recess in advance, the deviation of the ring-shaped member is restricted, and the ring can be reliably fixed to the holding member while maintaining its shape, thereby preventing the ring-shaped member. According to the fifth invention, the first holding portion is immovably fixed to the roller, and a ring-shaped member is nested in the holding member. With this structure, the ring-shaped member can be held without deviating from the roller core, and the base can be smoothly conveyed. According to the sixth invention, the object can be transported without damaging the object to be transported. The seventh invention is the conveying device of the first invention, and the part in contact with the object to be conveyed during the online conveyance of the cutting section does not contain the 312 / Instruction Manual (Supplement) / 92-07 / 92113054 touch section stamp The piece-fixing part transports the dry-out part parts that are inserted into the part as they are. 〇 Shaft into, plate. Contour in a plane containing 9 200307637 with the axis of rotation of the above roller. When the ring-shaped member shrinks due to fluctuations in ambient temperature, etc., openings may be formed in the cutout. Here, if the cutting portion is formed in a plane including the rotation axis of the roller shaft, the opening portion may face a conveyance direction perpendicular to the glass substrate, which may cause vibration during conveyance of the object to be conveyed. However, according to the seventh invention, since the portion of the contour line of the cutting portion that is in contact with the object to be conveyed is not accommodated in the plane containing the roller, the object to be conveyed is often located on both sides of the divided portion. Supported by any separating edge. Therefore, according to the seventh invention, the object to be conveyed can be smoothly conveyed while avoiding vibration. According to the eighth invention, even if the second holding portion is not removed, or even if the screw is not completely removed, as long as the screw is loosened, the fixing of the ring member by the first and second holding portions can be released, and the ring can be exchanged. component. Therefore, the time required to exchange the ring-shaped member can be greatly reduced. According to the ninth invention, even if the cap screw is not removed, the second holding portion can be easily attached to and detached from the first holding portion by pulling the screw head through the large-diameter hole. This makes maintenance work easier. According to the tenth invention, there is one cutting portion provided on the ring-shaped member. Therefore, in the use of the conveying device, the ring-shaped member does not move from the roller even if the holding portion presses the ring-shaped member loosely. The advantage of falling off the shaft. According to the 11th invention, since the resin portion on the roller is sandwiched and arranged by non-resin components, even if an electromagnetic wave irradiation device such as ultraviolet rays is used in the present invention, the resin portion irradiated by electromagnetic waves such as ultraviolet rays is Controlled to a minimum, thereby suppressing degradation of the resin component. [Embodiment] 10 312 / Invention Specification (Supplement) / 92 · 〇7 / 92113〇54 200307637 <First Embodiment> Hereinafter, referring to FIG. 1 to FIG. 9, the first of the conveying device 1 embodying the present invention will be described. The embodiment will be described in detail. The conveying device 1 of the present invention includes a cleaning device 2 for cleaning a glass substrate 7 (corresponding to the object to be conveyed in the present invention) for a liquid crystal display, and is a device for conveying the glass substrate 7. As shown in FIG. 1, the cleaning device 2 is composed of the following devices: viewed from the front of the ultraviolet ashing device 3, an infrared preheating device 4 is connected to the left side, a cooling device 5 is disposed on the right side, and further, a right side of the cooling device 5 Wet cleaning devices 6 are arranged one after the other. Each of the devices 3, 4, 5, and 6 is provided with a conveying device 1, and the glass substrate 7 is sequentially conveyed from left to right in the direction shown by the arrow in the figure, forming a continuous cleaning line as a whole. Hereinafter, the ultraviolet ashing device 3 will be described as an example. The main body 11 of the ultraviolet ashing device 3 has a box shape, an upper surface is opened, and two lamp covers 1 2 (see FIG. 2) are arranged to block the opening. Seen from the front of the main body 11, the front and rear ends of the lampshade 12 on the left side of the main body 11 are supported by the front wall portion Π A and the rear wall portion 1 1 B of the main body 11 through a hinge mechanism. The main body 1 The left half of the upper opening of 1 can be opened and closed by the lamp cover 12 in the left direction. On the other hand, when viewed from the front of the main body 11, the lampshade 12 on the right side of the main body 11 has front and rear ends of the right edge of the main body 11 by a hinge mechanism, and the front wall portion 1 1 A and the rear wall portion Π B of the main body 11. The right half of the upper opening of the main body 11 can be supported by the lamp cover 1 2 to be opened and closed in the horizontal direction. In addition, between the front and rear ends of each lampshade 12 and the front wall portion Π A and the rear wall portion 1 1 B of the main body 11 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 1 1 The well-known pneumatic cushioning support 17 helps the movement of the lampshade 12 in the opening direction by the support 17 and also maintains the open state of the lampshade 12. A plurality of lamps 1 3 for ultraviolet irradiation are arranged in a portion of the lamp cover 12 at the bottom thereof in the closed position. The lamp 13 is a long U-shaped curved lamp. As a whole, the distance between the lamp and the conveyor frame wall 21 is approximately the same length. However, the lamp head 1 3 A is located at the front of the body 11 and The glass lamp tube portion 1 3 B is bent and bent at the rear side of the main body 11. The lamp head 1 3 A is fixed to the fixing part 14 of the lamp cover 12 with a screw, and the rear end part of the glass tube part 1 3 B is fixed to the holding clip 15, and this holding clip 15 is screwed It is fixed on the lower panel 1 2 A of the lamp cover 12. A group of electric wires (not shown) connected to the lamp head 1 3 A is bundled on the front side of the lamp cover 1 2 and is connected to the main body 1 1 through a flexible bellows tube 16 provided between the front end of the lamp cover 12 and the main body 1 1. The power supply unit (not shown) is connected. At the same time, a cooling water path (not shown) is provided in the lampshade 12. The water supply pipe 18 and the drainage pipe 19 of the cooling water pipe are led out from the rear end of the lampshade 12 located on the opposite side of the bellows pipe 16. , Which is connected to the cooling water supply device in the body 11 (not shown). The transfer device 1 is mounted on the main body 11 in combination. Inside the body 11, there are provided two conveyor frame walls 21, which are a pair of frame walls parallel to the front wall portion 1 A and the rear wall portion 1 1 B. Between this conveyor frame wall 21, several roller shafts 2 2 formed in a columnar shape are inserted in the front-rear direction, and each of them is rotatably supported by a bearing (not shown). A plurality of conveying rollers 2 3 (corresponding to the rollers of the present invention) are mounted on each roller shaft 2 at a substantially uniform pitch, and are set at 12 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 at The driving device in the main body 11 drives the roller shaft 22 to rotate, and the glass substrate 7 mounted on the roller 23 can be conveyed. The transfer roller 23 is composed of a ring-shaped member 24 directly contacting the glass substrate 7 and a holding member 2 7 that holds the ring-shaped member 24 on the roller shaft 22 (see FIGS. 3 to 5). The ring-shaped member 24 is formed of a polytetrafluoroethylene (PTFE) resin which is a soft material that does not damage the glass substrate 7 and which is not easily deteriorated when irradiated with ultraviolet rays, and has a flat ring shape. 2 2 has a large outer diameter. On one side of the ring-shaped member 24, a flange 2 5 (corresponding to the protruding portion of the present invention) is formed on the entire periphery of the ring-shaped member 24 so as to protrude in the direction of the roller axis. At the same time, at any one of the ring-shaped members 2 4, the ring is cut along the axial direction to form a branching portion 26. By expanding the branching portion 2 6, the ring-shaped member 2 4 can be completed on the roller. Installation and removal on shaft 2 2. The holding member 27 is formed by a ring made of stainless steel as a whole, and is fixed by a fixing ring 2 8 (corresponding to the first holding portion of the present invention) fixed to the roller shaft 22, and the fixing ring 2 8 is matched, and it is comprised by the fixing plate 3 6 (equivalent to the 2nd holding | maintenance part of this invention) for holding and fixing the annular member 2 4. The fixing ring 28 has an inner diameter that is substantially equal to the outer diameter of the roller shaft 22, and an outer diameter that is one smaller than the outer diameter of the ring-shaped member 24. One side surface of the fixing ring 28 is a mounting surface 29 for mounting the ring-shaped member 24. On this mounting surface 29, a portion equal to the thickness of the ring-shaped member 24 is cut along the outside of the diameter to form a stepped portion 30. At the same time, a groove portion 3 1 (corresponding to the recessed portion of the present invention) is formed in the inner area of the step portion 30 in the diameter direction so as to fit into the flange 25 of the annular member 24. While integrating the groove portion 31 with the flange 25, 13 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 fits the above-mentioned annular member 24 to the stepped portion 30. At the same time, a screw hole 3 3 is formed at a predetermined position slightly inside the groove portion 31 to enable the fixing plate 36 to be fixed to the hole 33 with a cap screw 3 2. The screw holes 33 are opened at three equally spaced positions on the same circumference. On the reverse side of the mounting surface 29 of the fixing ring 28, a cylindrical portion 34 which protrudes in the direction of the roller axis on one side is formed in the inner area in the diameter direction. Thereby, the roller shaft 2 2 is tightly fitted into the inside of this cylindrical portion 34, and therefore, the fixing ring 28 is fixed to the roller shaft 2 in a concentric shape without moving in the diameter direction. A through-hole for fixing screws 35 is opened at a substantially central position in the longitudinal direction of the tube portion 34, and a fixing screw (not shown) is inserted into the fixing screw hole 35, and tightened. The fixing ring 28 is fixed on the roller shaft 2 2 and rotates as a whole. On the other hand, the fixing plate 36 is formed into a flat plate ring shape having an outer diameter substantially equal to that of the fixing ring 28. The inner diameter of the fixing plate 36 is slightly larger than the outer diameter of the roller shaft 22, so that it is easy to slide in the axial direction when the fixing plate 3 6 is installed or removed on the fixing ring 28. At the position where the fixing plate 36 is integrated with the screw hole 3 3 of the fixing ring 28, a universal mounting hole 37 is inserted into the cap screw 32. The mounting hole 37 is formed into a flask shape connected with large and small round holes. The diameter of the large-diameter hole 3 7 Α is slightly larger than that of the head 3 2 Α of the cap screw 3 2; the diameter of the small-diameter hole 3 7 Β is larger than that of the attachment. The head screw 3 2 has a larger screw part 3 2 B, and is larger than the head 3 2 A / J, and the fixing plate 3 6 series. First, make the small hole 3 7 B of the mounting hole 3 7 and the screw hole of the fixing ring 2 8 3 Three-phase integration to fix the fixing plate 3 6 on the mounting surface 2 9 of the fixing ring 2 8 and screw the cap screw 3 2 through the small diameter hole 3 7 B to the screw 14 312 / Invention Manual (Supplement) / 92 · 07 / 92113〇54 200307637 Hole 3 3 fixed. In this way, the ring-shaped member 2 4 is held by the fixing plate and the fixing ring 2 8 so as not to fall off. Next, the functions and effects of the present embodiment configured as described above will be described. When the glass substrate 7 is cleaned by the cleaning device 2 of this embodiment, the glass substrate 7 is placed on the transfer rollers 23 of the conveying device 1, and the device is moved again. Then, the rotation of the roller shaft 22 causes the transmission newspaper 23, which is fixed on the shaft 22 and can rotate integrally, to rotate. In this way, the glass substrate 7 on the carrying roller 23 is conveyed from the left side as shown in FIG. 1; and the glass substrate 7 is sequentially processed while the glass substrate passes through the respective devices 3, 4, 5, and 6. That is, when the glass substrate 7 passes through the inside of the infrared heating device 4, it is heat-treated, and then is transferred to the inside of the ultraviolet ray device 3 for ashing treatment of the residual agent. After that, it is cooled in the conveying device 5 and then cleaned in the wet cleaning device 6. At this time, since the metal holding member 2 7 is smaller than the ring-shaped member 2 4 and does not contact the glass substrate 7, only the soft ring-shaped member 2 4 and the glass substrate 7 are in contact (see FIG. 6). This prevents the glass substrate 7 from being damaged by the rollers 23. In addition, the ring member 24 is disposed with the fixing ring 28 and the fixing plate 36 which can be fixed to the fixing ring. At this time, in order to fix the fixing plate 36 to the fixed ring 28, it is possible to fix the fixing plate 36 to a portion closer to the ring-shaped member glass substrate 7 than the roller shaft 22 (see Fig. 5). Therefore, the position of the contact portion between the ring-shaped member 24 and the glass substrate 7 can be accurately and accurately fixed. 312 / Explanation of the Invention (Supplement) / 92-07 / 92113054 3 6 When talking, the rotary drive is on the roller pass & surface. , Glass line pre-line ash to cold washing diameter and glass transmission 28 solid 24 and the degree is very close 15 200307637, can be very accurately fixed at the two ends of the breaking part 2 6 contact with the glass substrate 7, can The glass substrate 7 at the time of transportation is prevented from being vibrated due to the positional deviation of the both ends of the breaking portion 26. At the same time, since the ring-shaped member 24 has the cut-off portion 26, it is liable to be deformed by heat or interference from the substrate. However, since the flange member 25 is provided on the ring member 24, the flange member 25 is fitted into the groove 31 of the fixed ring 28, so the movement of the ring member 2 4 relative to the fixed ring 28 is affected. Restriction allows the ring-shaped member 24 to both retain its shape and be securely fixed to the holding member 27. Therefore, the glass substrate 7 can be smoothly conveyed while preventing the deformation of the ring-shaped member 24. In particular, since the ring-shaped member 24 is fitted on one side of the fixed ring 28, and this fixed ring 28 is fixed to the roller shaft 2 in a non-movable manner, the ring-shaped member 2 4 can be prevented from contacting the roller shaft 2 2 Core deviation occurs. At the same time, the flanges 25 and the grooves 31 are formed on the entire periphery, so that the ring-shaped member 24 is kept in a ring shape. This can prevent vibration when the glass substrate 7 is transported. Because the cutting part 26 provided on the ring-shaped member 24 is one place, it has the ring-shaped member 2 even if the pressing of the ring-shaped member 2 4 by the fixing plate 36 is loose during the use of the conveying device. 4 The advantage of falling off from the roller shaft 2 2. The ring-shaped member 24 is deteriorated relatively early due to the influence of heat, ultraviolet rays, etc., and is exchanged in the following manner. First, loosen the attachment screw 3 2 slightly, and turn the fixing plate 36 to the position where the head 3 2 A of the attachment screw 3 2 coincides with the large-diameter hole 3 7 A of the mounting hole 37 (refer to FIG. 7). In this state, slide the fixing plate 36 to allow the head 3 2 A of the cap screw 3 2 to pass through the large-diameter hole 3 7 A to disengage it from the fixing ring 28 (see FIG. 8). 16 312 / Description of the Invention (Supplement) / 92-07 / 92113054 200307637 Next, remove the ring member 2 4 from the fixing ring 28. Then, the breaking portion 26 of the ring-shaped member 24 is twisted, and the gap to the breaking ends 2 6 A, 2 6 B can pass the roller shaft 22, and the roller shaft 22 can pass through the gap, and then removed. The ring member 2 4 (see FIG. 9). Thereafter, a new ring-shaped member 2 4 is attached to the holding member 27 in the reverse order of disassembly. That is, the cut-off portion 26 of the ring-shaped member 24 is widened, so that the roller shaft 22 enters the ring from here, and the ring-shaped member 24 is attached to the roller shaft 22. Next, the groove 31 and the flange 25 are aligned, and the ring-shaped member 2 4 is fitted on the fixing ring 28. Next, pass the head 3 2 A of the cap screw 3 2 through the large-diameter hole 3 7 A, and slide the fixing plate 3 6 toward the fixing ring 28 to make it contact the mounting surface 29. Then, turn the fixing plate 3 6 so that the screw portion 3 2 B of the cap screw 3 2 enters the position of the small-diameter hole 3 7 B so that the fixing plate 3 6 does not fall off. Finally, the ring member 2 4 is clamped and fixed by the fixing plate 36 and the fixing ring 28 by tightening the cap screw 3 2. As described above, since the cutting portion 26 is formed on the ring-shaped member 24, it is not necessary to remove the roller shaft 2 from the conveying device 1, and only the ring-shaped member 2 4 can be installed and removed. At the same time, because the mounting holes 37 provided in the fixing plate 36 are in the shape of a flask, there is no need to remove the cap screws 3 2 from the fixing ring 28, and the fixing plate 3 can be installed or removed on the fixing ring 28. 6 assignments. According to the present embodiment as described above, the ring-shaped member 24 which is in direct contact with the glass substrate 7 is made of a soft resin material, and the cut-off portion 26 is provided on the ring-shaped member 24 to facilitate the exchange work. Therefore, the glass substrate 7 can be transported without being damaged, and maintenance work can be easily performed. Furthermore, according to this embodiment, because the ring member 24 of the resin is sandwiched by the fixing ring 2 8 of stainless steel and the fixing plate 36 of stainless steel by 17 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 By maintaining the arrangement so that the portion of the ring-shaped member 24 that is irradiated with electromagnetic waves such as ultraviolet rays is minimized, deterioration of the ring-shaped member 24 is suppressed. Furthermore, in this embodiment, although the transporting device 1 provided with the ultraviolet ashing device 3 is described as an example, the transporting devices on the other devices 4, 5, and 6 also have the same configuration, and the same can be achieved. Effect. In this embodiment, the glass substrate 7 is transported by the rotation of the transfer roller 23. However, if the glass substrate 7 is transported by a power other than the roller, the roller is only used for the position adjustment of the glass substrate 7. Effects of the present invention (the same applies to the second embodiment and other embodiments). <Second Embodiment> Hereinafter, a second embodiment of the present invention will be described with reference to Figs. 10 and 11. This embodiment is different from the first embodiment in that the breaking portion 4 1 is provided obliquely to the axial direction of the ring-shaped member 40. When the ring-shaped member 40 shrinks due to fluctuations in the ambient temperature, the breaking portion 41 may open. Here, as in the first embodiment, the breaking portion 41 is provided along the axial direction of the ring-shaped member 40 because the opening
I 部分朝向與玻璃基板7的搬送方向相垂直的方向，則玻璃 基板7在搬送時會產生振動之疑慮。但是，若把分斷部4 1 設置成斜向於環狀部件4 0的轴方向，則會有兩分斷端 41A，41B中的其中至少一個支撐著玻璃基板7。因為這個 緣故，可迴避振動而圓滑地搬送玻璃基板7。 18 312/發明說明書(補件)/92-07/92113054 200307637 〈其他實施形態〉 本發明的技術範圍，並不僅限於上述的實施形態，下面 所記載的内容也包含於本發明的技術的範圍内。另外，本 發明的技術範圍涉及至均等之範圍。 (1 )上述實施形態中，雖在環狀部件2 4上只設有一處分 斷部2 6，不過，如圖1 2所示，分斷部4 2亦可設置在2處， 或設有3處以上。此構成適合用於，特別是，環狀部件4 3 由PEEK樹脂等比較硬的材質構成，若不加上大力量就擰不 動的情況。 (2 )上述實施形態中，雖在固定環2 8的一側設置有溝槽 部3 1，不過，亦可在固定板一側設置凹部。同時，也可在 保持部件一側設置有伸出部，在環狀部件一側設置凹部。 並且，可以在保持部件和固定板的雙方都設置凹部或伸出 部，在環狀部件的兩側設置可與上述部件相嵌合的伸出部 或凹部。 (3 )上述實施形態中，凸緣2 5及溝槽部3 1，雖被設置在 環狀部件24及固定環28的全周上，不過，只在圓周上的 一部分設置也可以。 (4 )上述實施形態中，在固定環2 8的一側設置有附頭螺 絲3 2，在固定板3 6 —側設有安裝孔3 7，不過，也可以在 固定環一側設置安裝孔，在固定板一側設置附頭螺絲。 (5)上述實施形態中，雖然環狀部件24由PTFE樹脂形 成，不過，用其他樹脂也可以。具體來說，可使用樹脂材 料如，作為聚醯亞胺樹脂的s e p u r a (登記商標），高密度聚 19 312/發明說明書(補件)/92_07/92113054 200307637 乙烯（U P E )等。並且，被用於内部為高溫的紅外線預熱裝置 4的搬送裝置時，最好使用具有出色耐熱性能的PEEK樹 脂。也可以使用混入纖維等，實行退火處理，交聯等改質 處理的樹脂。 (6 )上述實施形態中，保持部件2 7由不鏽鋼製成，不過， 亦可以採用鋁，陶瓷等。 (7 )把傳送輥安裝在輥軸上，各輥軸上輥的位置在沿軸 方向互相錯開也可以。如此一來，就可避免被搬送物總是 在特定的位置與傳送輕相接觸而造成的擦傷。 (產業上的利用可能性） 如上所述，本發明之搬送裝置，可用於作為搬送被搬物 體之裝置，特別適合於當被搬物體為玻璃等易受傷物體的 情況，及在對被搬送物進行紫外線處理的步驟中。 【圖式簡單說明】 圖1為第1實施形態之清洗裝置之側視圖。 圖2為紫外線灰化裝置之立體圖。 圖3為傳送輥之立體圖。 圖4為傳送輥之分解立體圖。 圖5為傳送輥之側剖視圖。 圖6為顯示用搬送裝置搬送玻璃基板情形之側剖視圖。 圖7至9為表示環狀部件交換作業之步驟圖。 圖1 0及1 1為第2實施形態之傳送輥之分解立體圖。 圖1 2為其他實施形態之傳送輥之分解立體圖。 圖1 3為表示習知搬送裝置之立體圖。 20 312/發明說明書(補件)/92-07/92113054 200307637 (元件 符 號 言兒 明 ) 1 搬 送 裝 置 2 清 洗 裝 置 3 紫 外 線 灰 化 裝 4 紅 外 線 預 熱 裝 5 冷 卻 裝 置 6 濕 式 清 洗 裝 置 7 玻 璃 基 板 11 紫 外 線 灰 化 裝 1 1 A 前 面 壁 部 1 1 B 後 面 壁 部 12 燈 罩 1 2 A 下 面 板 13 燈 1 3 A 燈 頭 部 1 3B 玻 璃 燈 管 部 14 固 定 部 15 保 持 夾 16 蛇 腹 管 17 支 撐 18 供 水 管 19 排 水 管 2 1 竿刖 送 機 框 架 壁 22 輥 軸 312/發明說明書(補件)/92-07/92113054 21 200307637 23 傳送輥 24 環狀部件 2 5 凸緣 2 6 分斷部 2 6 A 分斷部 2 6 B 分斷部 27 保持部件 28 固定環 2 9 安裝面 30 台階部 3 1 溝槽部 3 2 附頭螺絲 32 A 頭部 3 3 螺絲孔 34 筒部 35 固定螺絲孔 3 6 固定板 3 7 安裝孔 3 7 A 大徑孔 37B 小徑孔 40 環狀部件 4 1 分斷部 4 1 A 分斷部 41B 分斷部 22 312/發明說明書(補件)/92-07/92113054 200307637 5 0 紫外線處理裝置 5 1 紫外線處理裝置的本體 5 2 傳送報 5 3 搬送裝置 54 傳送輥軸 23 312/發明說明書(補件)/92-07/92113054If the part I faces a direction perpendicular to the conveyance direction of the glass substrate 7, the glass substrate 7 may be vibrated during conveyance. However, if the breaking portion 41 is provided obliquely to the axial direction of the ring-shaped member 40, at least one of the two breaking ends 41A and 41B supports the glass substrate 7. For this reason, the glass substrate 7 can be smoothly conveyed while avoiding vibration. 18 312 / Invention Specification (Supplement) / 92-07 / 92113054 200307637 <Other Embodiments> The technical scope of the present invention is not limited to the above-mentioned embodiments, and the content described below is also included in the technical scope of the present invention. . In addition, the technical scope of the present invention relates to a range of equals. (1) In the above embodiment, although the ring-shaped member 24 is provided with only one breaking portion 26, as shown in FIG. 12, the breaking portion 42 may be provided at two locations, or may be provided at three locations. More than. This configuration is particularly suitable for the case where the ring-shaped member 4 3 is made of a relatively hard material such as PEEK resin and cannot be screwed unless a large force is applied. (2) In the above embodiment, the groove portion 31 is provided on one side of the fixing ring 28, but a concave portion may be provided on the side of the fixing plate. At the same time, a protruding portion may be provided on the holding member side, and a recessed portion may be provided on the ring member side. Further, recesses or projections may be provided on both the holding member and the fixing plate, and projections or recesses may be provided on both sides of the ring-shaped member to be fitted into the members. (3) In the above embodiment, the flanges 25 and the groove portions 31 are provided on the entire circumference of the ring member 24 and the fixing ring 28, but they may be provided only on a part of the circumference. (4) In the above embodiment, a cap screw 3 2 is provided on one side of the fixing ring 28, and a mounting hole 37 is provided on the side of the fixing plate 36, but a mounting hole may be provided on the side of the fixing ring. , Set the cap screws on the side of the fixing plate. (5) In the above embodiment, although the ring-shaped member 24 is formed of a PTFE resin, other resins may be used. Specifically, resin materials such as s p u r a (registered trademark) as a polyimide resin, high-density poly 19 312 / Invention Specification (Supplement) / 92_07 / 92113054 200307637 ethylene (U P E), and the like can be used. In addition, when it is used in a conveying device of the infrared preheating device 4 having a high temperature inside, it is preferable to use PEEK resin having excellent heat resistance. It is also possible to use a resin mixed with fibers or the like and subjected to modification treatments such as annealing treatment and cross-linking. (6) In the above embodiment, the holding members 27 are made of stainless steel. However, aluminum, ceramics, or the like may be used. (7) The conveying rollers are mounted on the roller shafts, and the positions of the rollers on each roller shaft may be staggered from each other in the axial direction. In this way, it is possible to avoid abrasions caused by the conveyed material always contacting the conveying light at a specific position. (Industrial Applicability) As described above, the conveying device of the present invention can be used as a device for conveying an object to be conveyed, and is particularly suitable when the object to be conveyed is a vulnerable object such as glass, and when conveying the object to be conveyed. In the step of UV treatment. [Brief description of the drawings] Fig. 1 is a side view of a cleaning device according to a first embodiment. Fig. 2 is a perspective view of an ultraviolet ashing device. Fig. 3 is a perspective view of a transfer roller. FIG. 4 is an exploded perspective view of a transfer roller. Fig. 5 is a side sectional view of a transfer roller. FIG. 6 is a side cross-sectional view showing a state in which a glass substrate is transferred by a transfer device. 7 to 9 are diagrams showing the steps of a ring-shaped component exchange operation. 10 and 11 are exploded perspective views of a transfer roller according to the second embodiment. Fig. 12 is an exploded perspective view of a transfer roller according to another embodiment. Fig. 13 is a perspective view showing a conventional transfer device. 20 312 / Invention Manual (Supplement) / 92-07 / 92113054 200307637 (component symbol description) 1 conveying device 2 cleaning device 3 ultraviolet ashing device 4 infrared preheating device 5 cooling device 6 wet cleaning device 7 glass substrate 11 Ultraviolet ashing 1 1 A front wall 1 1 B back wall 12 lamp cover 1 2 A lower panel 13 lamp 1 3 A lamp head 1 3B glass tube 14 fixing part 15 holding clip 16 bellows tube 17 support 18 water supply tube 19 Drain pipe 2 1 Rod feeder frame wall 22 Roller shaft 312 / Invention manual (Supplement) / 92-07 / 92113054 21 200307637 23 Conveying roller 24 Ring-shaped member 2 5 Flange 2 6 Breaking section 2 6 A Breaking Part 2 6 B Breaking part 27 Holding member 28 Fixing ring 2 9 Mounting surface 30 Stepped part 3 1 Groove part 3 2 Cap screw 32 A Head 3 3 Screw hole 34 Tube part 35 Fixing screw hole 3 6 Fixing plate 3 7 Mounting hole 3 7 A Large-diameter hole 37B Small-diameter hole 40 Ring-shaped member 4 1 Breaking section 4 1 A Breaking section 41B Breaking section 22 312 / Invention Certificate (Supplement) / 92-07 / 92113054 200307637 5 0 UV treatment device 5 1 UV treatment device body 5 2 Transmission report 5 3 Transfer device 54 Transfer roller 23 312 / Invention specification (Supplement) / 92-07 / 92113054