JP2005154031A - Carrying roller body, carrying device, and washing facility - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrying roller body provided with a shaft body and a roller main body securely in a coaxial state, having the axial line of the roller main body coinciding with the rotation axis, a carrying device carrying an object stably by the carrying roller body, and a washing facility, in which carrying between a plurality of cleaning devices is facilitated by the carrying device. <P>SOLUTION: In this carrying roller body 10, a tightening body 13 is used to resiliently press a fixture part 17 in the roller main body 12 toward the shaft body 11 from the radially outward side, so that the fixture part is made to abut on the whole circumference of the shaft body 11. The roller main body 12 is thus fixed to the shaft body 11. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a transport roller body that transports an object by rotating around a rotation axis, a transport device that transports an object using the transport roller body, and a cleaning facility including the transport device.

FIG. 9 is a cross-sectional view illustrating a conventional conveying roller body 1. FIG. 10 is a cross-sectional view showing the conventional conveying roller body 1 as viewed in one direction of the rotation axis. The transport roller body 1 is provided, for example, in a cleaning facility that cleans a glass substrate for liquid crystal display, and is used to transport the glass substrate. The transport roller body 1 includes a shaft body 2 and a plurality of roller bodies 3. The shaft body 2 is provided so as to be rotatable around the axis, and is driven to rotate by a driving body (not shown). The roller body 3 includes a support base part 4 on which the glass substrate is placed and a fixing part 5 provided integrally with the support base part 4. The shaft body 2 and the roller body 3 are inserted coaxially. Fixing portion 5 of roller body 3
Are formed with two through holes 6 penetrating in the radial direction and capable of being screwed with set screws 7. By inserting the set screw 7 into the through-hole 6, rotating the set screw 7, and displacing the set screw 7 in the axial direction of the set screw 7, the end surface portion 7 near the shaft body 2 of the set screw 7.
a is brought into contact with the shaft body 2. This fixes the shaft body 2 and the roller body 3 (
For example, see Patent Document 1).
JP-A-3-283487

FIG. 11 is a cross-sectional view showing a conventional conveying roller body 1 in a state where the roller body 3 is fixed to the shaft body 2 using a set screw 7. When fixing using the set screw 7, when the end surface portion 7 a of the set screw 7 is brought into contact with the shaft body 2, the roller body 3 is separated from the shaft body 2 at a portion where the set screw 7 is screwed. Directional force acts. Thereby, the roller body 3 may be deformed so as to partially bulge outward in the radial direction. When the roller body 3 is deformed in this way, the outer peripheral surface radius of the support base 4 changes in the circumferential direction of the support base 4. The outer peripheral surface of the support base part 4 will be in the state which deviates from the cylindrical surface which makes a rotating shaft line an axis line. Therefore, there is a possibility that the glass substrate transported by the transport roller body 1 is transported out of a predetermined position or is meandered. As a result, the object to be transported may fall from the transport roller body, causing damage to the object, and the object could not be transported stably.

Accordingly, an object of the present invention is to provide a transport roller body in which the shaft body and the roller body are reliably provided in a coaxial state, and the axis line of the roller body and the rotation axis line coincide with each other.

Moreover, it is providing the conveying apparatus which conveys a target object stably by a conveyance roller body.

Another object of the present invention is to provide a cleaning facility that can be easily transported between a plurality of cleaning devices by a transport device.

The present invention is a transport roller body that transports an object to be placed by rotating around a predetermined rotation axis,
A shaft provided rotatably around the rotation axis;
A roller body having a support base part on which an object is placed and a fixing part provided integrally with the support base part, and a shaft body inserted coaxially;
A conveying roller body including a fastening body that elastically presses a fixed portion of the roller body from the radially outer side to contact the shaft body.

According to the present invention, the transport roller body is configured by fixing the roller body to the shaft body using a fastening body. The tightening body elastically presses the fixing portion of the roller body from the radially outer side, and fixes the fixing portion by contacting the shaft body. Therefore, it can be configured such that the axis of the support base portion of the roller body coincides with the axis of the shaft body. Accordingly, by rotating the shaft body around the axis of the shaft body, the outer peripheral surface of the support base portion of the roller body fixed to the shaft body can accurately draw a circular orbit.

Further, in the present invention, the fixing portion of the roller body is divided in the circumferential direction and can be elastically deformed in the radial direction, the outer peripheral portion is formed in a taper shape, and the external screw is formed in the outer peripheral portion,
The tightening body is characterized in that an inner peripheral portion is formed in a taper shape, and a female screw that is screwed with a male screw of a fixing portion of the roller body is formed on the inner peripheral portion.

According to the present invention, since the fixing portion of the roller body is divided in the circumferential direction, the rigidity of the fixing portion is reduced, and can be easily and elastically deformed in the radial direction by an external force from the radially outer side. It is. Since the external thread formed on the fixing portion of the roller body and the internal thread formed on the tightening body are screwed together, the tightening body can be rotated with respect to the roller body and displaced in the rotation axis direction. Since the fixing portion on which the male screw is formed and the tightening body on which the female screw is formed are formed in a taper shape, the tightening body displaces the fixing portion in the radial direction by displacing the tightening body in the rotation axis direction. It can be deformed inward.
Accordingly, the fixed portion can be uniformly pressed radially inward over the entire circumference.

The present invention is further characterized in that it further includes a rotation preventing body that prevents rotation of the fastening body relative to the shaft body and the roller body.

According to the present invention, it further includes a rotation preventing body that prevents rotation of the tightening body with respect to the shaft body and the roller body (hereinafter, also referred to as “relative rotation”), and thus occurs when the transport roller body rotates. Relative rotation of the fastening body due to vibration or the like can be prevented. Therefore, it is possible to prevent the roller main body and the fastening body from being easily separated when the transport roller body is rotating.

Further, the present invention is the transport apparatus, wherein the plurality of transport roller bodies are arranged in a transport direction different from the direction of the rotation axis.

According to the present invention, the conveying device is configured by arranging a plurality of conveying roller bodies in a conveying direction different from the direction of the rotation axis, thereby realizing an apparatus that smoothly and stably conveys an object. can do.

Moreover, this invention is a washing | cleaning installation characterized by including the some washing | cleaning apparatus which wash | cleans a target object, and the said conveying apparatus provided between each washing | cleaning apparatus.

According to the present invention, the cleaning facility includes a plurality of cleaning devices for cleaning an object and a transport device provided between the cleaning devices, thereby realizing a cleaning facility for transporting the object more smoothly and stably. can do.

As described above, according to the present invention, the axis of the support base portion of the roller main body can be configured to coincide with the axis of the shaft body. Accordingly, by rotating the shaft body around the axis of the shaft body, the outer peripheral surface of the support base portion of the roller body fixed to the shaft body can accurately draw a circular orbit. Therefore, when conveying the object, without displacing the object in a direction different from the conveyance direction by the rotation of the conveyance roller body,
It can be transported stably.

Further, according to the present invention, the fastening body can be deformed inward in the radial direction by displacing the fastening body in the rotation axis direction. Therefore, it is possible to realize a conveying roller body that fixes the fixing portion easily to the shaft body over the entire circumference in the circumferential direction.

Further, according to the present invention, it is possible to prevent the roller main body and the fastening body from being easily separated when the transport roller body is rotating. Therefore, it is possible to reduce the problems of the transport roller body that occur when the transport roller body is rotating.

Moreover, according to this invention, the conveying apparatus in which a target object does not displace in the direction different from a conveyance direction is easily realizable.

Moreover, according to this invention, a target object is efficiently conveyed between each washing | cleaning apparatus, and the washing | cleaning equipment which wash | cleans a target object suitably can be implement | achieved easily.

FIG. 1 is a cross-sectional view showing a conveying roller body 10 according to an embodiment of the present invention. The transport roller body 10 includes a shaft body 11, a roller body 12, and a tightening body 13. The transport roller body 10 rotates around a predetermined rotation axis,
The object to be placed is conveyed. The conveying roller body 10 is a shaft body 1 using a fastening body 13.
1, the roller main body 12 is fixed. The shaft body 11 has a cylindrical shape, is provided so as to be rotatable around the axis of the shaft body 11, and is rotationally driven by a driving body (not shown). The roller body 12 fixed to the shaft body 11 rotates with the rotation of the shaft body 11 and conveys an object placed on the roller body 12.

FIG. 2 is a sectional view showing the roller body 12 and the tightening body 13 separately in the transport roller body 10. FIG. 3 is an exploded perspective view showing the transport roller body 10. The transport roller body 10 further includes a set screw 14 and a ring 15.

The roller body 12 includes a support base 16, a fixing part 17, and a flange part 18. The support base part 16, the fixing part 17, and the flange part 18 are each substantially cylindrical, and the inner peripheral radii of each part are formed to be equal to each other. The radii of the outer peripheral surfaces of the respective parts are different from each other, and the fixing part 17, the support base part 16, and the flange part 18 are formed in order in order.
The roller body 12 is formed in one piece in the order of the fixed portion 17, the flange portion 18, and the support base portion 16 in the axial direction, with the axes of the portions 16 to 18 being coaxial. Support base 1
Reference numeral 6 denotes a part on which the object is placed.

A part of the outer peripheral part of the fixing part 17 is formed in a tapered shape, and the external thread is formed in the tapered part 17a. Further, the fixing portion is formed with a cutout portion 21 that is divided in the circumferential direction of the fixing portion. In the present embodiment, the fixing portion is divided into three equal portions in the circumferential direction, and is configured to be elastically deformable in the radial direction.

The flange portion 18 is provided so that the object placed on the support base portion 16 is not displaced to one side in the axial direction. The difference between the outer peripheral surface radius of the support base portion 16 and the outer peripheral surface radius of the flange portion 18 is determined based on the thickness dimension of the object. The peripheral edge portion 18a in the thickness direction of the flange portion 18 is formed in a tapered shape so as to increase in diameter toward an intermediate portion in the axial direction. The peripheral portion 18a of the collar portion 18 near the support base portion 16 is configured to place the object on the support base portion 1.
6, the object is easily guided to the support base 16.

The shaft body 11 and the roller main body 12 are inserted coaxially, and the outer peripheral surface radius of the shaft body 11 is formed smaller than the inner peripheral surface radius of the roller main body 12, and the roller main body 12 is in the axial direction with respect to the shaft body 11. Configured to deviate. The roller body 12 is made of a material having chemical resistance and corrosion resistance. For example, synthetic resin, specifically, polytetrafluoroethylene (eg, Teflon (R)) and polyacetal (eg, Duracon (R)) are used.
Etc.

The fastening body 13 elastically presses the fixing portion 17 of the roller body 12 from the radially outer side, and the inner peripheral portion of the tapered portion of the fixing portion 17 of the roller body 12 is applied to the shaft body 11. Make contact. The tightening body 13 has a substantially cylindrical shape, and an inner peripheral portion is formed in a tapered shape. A female screw that is screwed with a male screw of the fixing portion 17 of the roller body 12 is formed in the tapered portion 13a. The tightening body 13 has a plurality of through holes 19 penetrating in the radial direction, two in the present embodiment, and is formed on the inner peripheral portion facing the first and second through holes 19a and 19b, which are the two through holes 19. An internal thread is formed. Hereinafter, unspecified through hole 1
When “9” is indicated, “first” and “second” are omitted. The position where the first through hole 19a is formed is such that when the tightening body 13 and the roller body 12 are combined, the hole of the first through hole 19a in the inner peripheral portion of the tightening body 13 is the shaft body 11. It is formed at the position facing.
The position where the second through hole 19b is formed is such that when the tightening body 13 and the roller body 12 are combined, the hole of the second through hole 19b in the inner peripheral portion of the tightening body 13 It is formed at a position facing the fixing portion 17. Specifically, it is the remaining portion excluding the tapered portion of the fixed portion 17 and is formed at a position near the flange portion 18. Fastening body 1
3 is made of a material having corrosion resistance and chemical resistance, and is made of, for example, a synthetic resin, specifically polytetrafluoroethylene (eg, Teflon (R)) and polyacetal (eg, Duracon (R)). .

A set screw 14 that is a rotation blocking body is used to block the rotation of the tightening body 13 relative to the shaft body 11 and the roller body 12. The set screw 14 is cylindrical,
A male screw that is screwed with a female screw of the through hole 19 of the tightening body 13 is formed on the outer peripheral portion. The set screw 14 is inserted into the through hole 19 and the set screw 14 is rotated to displace the set screw 14 in the axial direction of the set screw 14. Set screw 1 inserted into first through hole 19a
4, the end face portion of the first set screw 14a near the shaft body 11 is brought into contact with the shaft body 11,
Shaft body 11 of second set screw 14b which is set screw 14 inserted into second through hole 19.
The close end surface part is brought into contact with the fixing part 17 of the roller body 12. The frictional force between the end surface portion of the set screw 14 and the shaft body 11 and the fixing portion 17 prevents the tightening body 13 from rotating relative to the shaft body 11 and the roller body 12.

The ring 15 is provided so as to circumscribe the support base 16 over the entire circumference in the circumferential direction of the support base 16 in order to improve the frictional force between the support base 16 and the target when the target is transported. . The ring 15 is made of a material having a frictional force larger than that of the support base 16, and is made of, for example, natural resin, and is made of rubber in the present embodiment. Ring 15
Is an annular shape, and is realized by, for example, an O-ring (O-ring).

FIG. 4 is a cross-sectional view showing the transport roller body 10 as viewed in one direction of the rotation axis. The fixing part 17 of the roller body 12 is divided into three equal parts in the circumferential direction by forming the notch part 21, and is configured to be elastically deformable in the radial direction. The fixing portion 17 is inserted into the inner peripheral portion of the tightening body 13, and the tightening body 13 is rotated with respect to the roller body 12 and displaced in the rotation axis direction. An end surface portion 17b on one side in the rotation axis direction of the fixing portion 17 before rotating the fastening body 13 with respect to the roller body 12 is shown using an imaginary line 20.
Since the outer peripheral portion of the fixing portion 17 and the inner peripheral portion of the fastening body 13 are formed in a tapered shape, an external force is generated on the radially inner side. Only the tapered portion of the fixed portion 17 is deformed radially inward over the entire circumference in the circumferential direction, the inner peripheral portion of the fixed portion 17 contacts the shaft body 11 over the entire circumferential direction, and the roller body 12 is It is fixed to the shaft body 11. The shaft body 11 receives an external force radially inward from the fixed portion 17 over the entire circumference in the circumferential direction.
1 does not deform. Further, since only the tapered portion of the fixing portion 17 is deformed, the support base portion 16 and the flange portion 18 which are the remaining portions are not deformed.

After fixing the roller body 12 to the shaft body 11, the set screw 14 inserted in the through hole 19 is rotated. The end face of the first set screw 14a is brought into contact with the shaft body 11, and the second
The end surface portion of the set screw 14b is brought into contact with the fixing portion 17 so that the shaft body 11 and the roller body 1
The rotation of the tightening body 13 with respect to 2 is prevented. Further, the ring 15 is connected to the roller body 12.
It arrange | positions and is provided in the support stand part 16 of this. In order to fix the roller body 12 to the shaft body 11, an end surface portion 13 b of the tightening body 13 near the roller body 12 and the flange portion 1 of the roller body 12.
The shaft body 11 and the roller body 12 are tightened so that the inner peripheral portion of the fixing portion 17 contacts and is fixed to the shaft body 11 before the end surface portion 18b near the tightening body 13 contacts the shaft body 11. Body 1
3 is determined. Therefore, in the conveying roller body, the end surface portion 13b of the tightening body 13 near the roller main body 12 and the tightening body 13 of the flange portion 18 of the roller main body 12 are used.
An interval ΔL exists between the end surface portion 18b and the end surface portion 18b.

According to the transport roller body 10 of the present embodiment as described above, the transport roller body 10 is configured by fixing the roller body 12 to the shaft body 11 using the fastening body 13. The tightening body 13 elastically presses the fixing portion 17 of the roller body 12 from the radially outer side,
The fixing portion 17 is fixed in contact with the shaft body 11. Accordingly, the axis of the support base 16 of the roller body 12 and the axis of the shaft body 11 can be configured to coincide with each other.
Accordingly, by rotating the shaft body 11 around the axis of the shaft body 11, the outer peripheral surface of the support base portion 16 of the roller body 12 fixed to the shaft body 11 can accurately draw a circular orbit. Therefore, when the object is conveyed, the object is transferred to the conveying roller body 1.
It can be stably conveyed without being displaced in a direction different from the conveyance direction by rotation of 0.

In the transport roller body 10 of the present embodiment, the fixing portion 17 of the roller body 12 is divided in the circumferential direction, so that the rigidity of the fixing portion 17 is reduced, and the elastic force can be easily changed by an external force from the radially outer side. It can be deformed in the radial direction spontaneously. Fixing part 1 of roller body 12
7 and the female screw formed on the tightening body 13 are screwed together, so that the tightening body 13 can be rotated relative to the roller body 12 and displaced in the direction of the rotation axis. The fixing portion 17 where the male screw is formed and the tightening body 13 where the female screw is formed,
Since it is formed in a taper shape, the fastening body 13 can deform the fixing portion 17 radially inward by displacing the fastening body 13 in the rotation axis direction.
Therefore, the fixing portion 17 can be uniformly pressed radially inward over the entire circumference. Therefore, it is possible to realize the transport roller body 10 that fixes the fixing portion 17 easily to the shaft body 11 over the entire circumference in the circumferential direction.

Further, in the transport roller body 10 of the present embodiment, only the tapered portion of the fixed portion 17 is deformed by the tightening body, so that the remaining portion is not deformed. Therefore, the outer peripheral surface of the support base portion of the roller body 12 can be rotated so as to accurately draw a circular orbit.

In addition, since the transport roller body 10 of the present embodiment further includes a set screw 14 that prevents relative rotation of the tightening body 13, the tightening body 13 caused by vibration or the like caused by the rotation of the transport roller body 10. Can be prevented from rotating relative to each other. Therefore, it is possible to prevent the roller main body 12 and the tightening body 13 from being easily separated when the transport roller body 10 is rotating. As a result, it is possible to reduce the problems of the transport roller body 10 that occur when the transport roller body 10 is rotating.

Further, in the transport roller body 10 of the present embodiment, the roller body 12 is doubly fixed by the fastening body 13 and the set screw 14, so that the roller body 12 is unlikely to be displaced with respect to the shaft body 11 due to vibration or the like. Can be configured.

FIG. 5 is a front view showing a transport roller body 30 used in the transport apparatus according to another embodiment of the present invention. The conveyance device is configured by arranging a plurality of conveyance roller bodies 30 in a conveyance direction different from the direction of the rotation axis. The present embodiment is similar to the transport roller body 10 of FIGS. 1 to 4 described above, and the configuration of the present embodiment has the same reference numerals as the corresponding configurations of the transport roller body 10 of FIGS. Only different configurations will be described, and description of similar configurations will be omitted. The transport roller body 30 of the present embodiment includes a shaft body 11, a first transport roller unit 31, a second transport roller unit 34, and a third transport unit.
The conveyance roller unit 32 is included. The first transport roller portion 31 is a remaining portion obtained by removing the shaft body 11 from the transport roller body 10 described above. The configuration of the second conveyance roller unit 34 is different from that of the first conveyance roller unit 31 in the configuration of the roller body 33. The 3rd conveyance roller part is the same composition as the 1st conveyance roller part.

The transport roller body 30 of the present embodiment is arranged and fixed on the same shaft body 11 in the order of the first transport roller section 31, the second transport roller section 34, and the third transport roller section 32 in the axial direction. . The 1st conveyance roller part 31 and the 3rd conveyance roller part 32 are arrange | positioned so that the support stand 16 may mutually oppose. The interval between the first conveyance roller unit 31 and the third conveyance roller unit 32 is configured to have a dimension such that the object is placed on the two support bases 16. The conveyance roller body 30 is configured so that the object to be placed is not displaced in the rotation axis direction by the flange portion 18 of the first and third conveyance roller portions 31 and 32. The second conveyance roller unit 34 is disposed in an intermediate portion 35 between the first conveyance roller unit 31 and the third conveyance roller unit 32.

When forming the conveyance roller body 30 of the present embodiment, the first to third conveyance roller portions 3
The fastening body 13 and the roller main bodies 12 and 33 constituting the parts 1, 32 and 34 are inserted into the shaft body 11 in advance. As the order of forming the first to third transport roller portions 31, 32, 34, first, the shaft body 11 is provided at a position determined by the configuration of the transport device and the like. The first conveyance roller unit 31 is provided at a position determined on the shaft body 11 based on the object. Next, the 3rd conveyance roller part 32 is provided in the position determined by the position of the 1st conveyance roller part 31, and the dimension of the width direction of a target object. Next, the second conveyance roller unit 34 is provided at an intermediate portion between the first and third conveyance roller units 31 and 32.

FIG. 6 is a cross-sectional view showing the second transport roller portion 34 that constitutes the transport roller body 30 of the present embodiment. FIG. 7 is a cross-sectional view showing the roller main body 33 and the fastening body 13 separately in the second transport roller portion 34. Second transport roller unit 3 of the present embodiment
4 differs from the above-described conveying roller body 10 of FIGS. 1 to 4 in the configuration of the roller body 33. The roller body 33 of the second transport roller unit 34 includes a fixed unit 36 and a support base unit 37.
Are provided integrally. The outer peripheral surface radius of the support base portion 37 is configured to be larger than the outer peripheral surface radius of the fixed portion 36. The support base 37 is substantially cylindrical. The peripheral edge portion 37a in the thickness direction of the support base portion 37 is formed in a tapered shape so as to increase in diameter toward the intermediate portion in the axial direction. By forming the peripheral edge portion 37a in a tapered shape, it is possible to prevent the object placed on the support base portion from being scratched. Since the second transport roller portion 34 is provided in the intermediate portion of the shaft body, the intermediate portion of the object is supported by the support base portion 37.
It is possible to prevent the vertical deflection of the object due to its own weight.

In the transport device according to the present embodiment, the transport device is configured such that the plurality of transport roller bodies 30 are arranged in a transport direction different from the direction of the rotation axis, and therefore the target object is transported smoothly and stably. It is possible to realize an apparatus for In addition, it is possible to easily realize a transfer device in which the object is not displaced in a direction different from the transfer direction. Further, since the transport roller body 30 of the present embodiment fixes the roller bodies 12 and 33 to the shaft body 11 using the fastening body 13 in the same manner as the transport roller body 10 described above, the transport roller body 1 described above.
The same effect as 0 can be achieved.

FIG. 8 is a plan view schematically showing a cleaning equipment 40 according to still another embodiment of the present invention. The cleaning equipment 40 of the present embodiment is a single wafer cleaning equipment 40, and is used for cleaning a glass substrate for a liquid crystal display panel, for example. The cleaning facility 40 includes a loader 41, a plurality of cleaning devices 42 to 45, an unloader 46, and a transport device 47.

The loader 41 accommodates a cassette 49 that houses a glass substrate 48 that is an object. The plurality of cleaning devices 42 to 45 are, for example, a scrub cleaning device 42, an ultrasonic cleaning device 43, a high-pressure jet cleaning device 44, and a drying device 45. The scrub cleaning device 42 includes a brush 42a for cleaning, and a glass substrate 48 using the brush 42a.
Wash. The ultrasonic cleaning device 43 includes an ultrasonic oscillator 43a and a cleaning liquid supply nozzle 43b. The ultrasonic cleaning device 43 sprays the cleaning liquid onto the glass substrate 48 by the cleaning liquid supply nozzle 43b, applies ultrasonic waves to the glass substrate 48 by the ultrasonic transmitter 43a, and applies ultrasonic vibration to promote cleaning. High-pressure jet cleaning device 4
4 sprays a cleaning liquid having a pressure higher than that of the cleaning liquid supply nozzle 43b onto the glass substrate 48;
The glass substrate 48 is cleaned. The drying device 45 removes the cleaning liquid adhering to the glass substrate 48 and dries the glass substrate 48 by, for example, an air knife 45 a that jets air onto the glass substrate 48. Unloader 46 is cassette 49
The glass substrate 48 that has been cleaned is stored in the cassette 49.

The conveyance device 47 of the present embodiment is similar to the conveyance device using the conveyance roller body 30 of FIGS. 5 to 7 described above, and the configuration of the present embodiment includes the conveyance roller body of FIGS. 5 to 7. The same reference numerals are assigned to the corresponding components in 30, and only different components will be described, and description of similar components will be omitted. The transport device 47 includes a plurality of transport roller bodies 3 so that the glass substrate 48 is transported along a predetermined transport path.
0 is placed. In the present embodiment, in the plurality of transport roller bodies 30, the position of the transport roller body 30 is adjusted so that the end surfaces of the support base portions 37 of the first and third transport roller sections 31 and 32 are flush with each other. Is done. The glass substrate 48 is stably moved by the transfer device 47 along the predetermined transfer path without falling. The glass substrate 48 is conveyed from the loader 41 to the unloader 46 through the scrub cleaning device 42, the ultrasonic cleaning device 43, the high pressure jet cleaning device 44, and the drying device 45 in order by the transport device 47.

The cleaning equipment 40 of the present embodiment includes a plurality of cleaning devices 4 that clean the glass substrate 48.
2 to 45 and a transfer device 47 provided between the cleaning devices 42 to 45,
The cleaning equipment 40 that transports the glass substrate 48 more smoothly and stably can be realized. Since the glass substrate 48 is transported smoothly and stably, problems such as cracks occurring in the glass substrate 48 when transported can be eliminated, and productivity can be improved. Moreover, since the roller main bodies 12 and 33 can be attached to the shaft body 11 by an easy operation, the operation can be performed efficiently. Accordingly, each cleaning device 42
The glass substrate 48 is efficiently conveyed between ˜45, and the cleaning equipment 40 that suitably cleans the glass substrate 48 can be easily realized. Further, the transport device 4 of the present embodiment
Since 7 has the same configuration as that of the transport device using the transport roller body 30 of the above-described embodiment, the same effect can be achieved.

It is sectional drawing which shows the conveyance roller body 10 which is one Embodiment of this invention. FIG. 3 is a cross-sectional view showing a roller body 12 and a fastening body 13 separately in the transport roller body 10. FIG. 3 is an exploded perspective view showing a conveyance roller body 10. FIG. 3 is a cross-sectional view showing the transport roller body 10 when viewed in one direction of the rotation axis. It is a front view which shows the conveyance roller body 30 used for the conveying apparatus which is another form of implementation of this invention. FIG. 4 is a cross-sectional view illustrating a second conveyance roller portion 34 that constitutes the conveyance roller body 30. FIG. 6 is a cross-sectional view showing a roller body 33 and a tightening body 13 separately in the second transport roller section 34. It is a top view which shows roughly the washing equipment 40 which is other embodiment of this invention. It is sectional drawing which shows the conveyance roller body 1 which is a prior art. It is sectional drawing which shows the conveyance roller body 1 seeing to a rotating shaft direction one side. FIG. 4 is a cross-sectional view showing the conveying roller body 1 in a state where the roller body 3 is fixed to the shaft body 2 using a set screw 7

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,30 Conveyance roller body 11 Shaft body 12,33 Roller body 13 Tightening body 14 Set screw 16,37 Support base part 17,36 Fixing part 40 Cleaning equipment 47 Conveyance apparatus

Claims (5)

A transport roller body that transports an object to be placed by rotating around a predetermined rotation axis,
A shaft provided rotatably around the rotation axis;
A roller body having a support base part on which an object is placed and a fixing part provided integrally with the support base part, and a shaft body inserted coaxially;
A conveying roller body comprising: a fastening body that elastically presses a fixed portion of the roller body from the radially outer side to contact the shaft body. The fixed part of the roller body is divided in the circumferential direction and can be elastically deformed in the radial direction, the outer peripheral part is formed in a taper shape, and a male screw is formed in this outer peripheral part,
2. The conveying roller body according to claim 1, wherein the tightening body has an inner peripheral portion formed in a tapered shape, and an inner screw is formed on the inner peripheral portion to be engaged with the male screw of the fixing portion of the roller body. The conveyance roller body according to claim 2, further comprising a rotation blocking body that blocks rotation of the tightening body with respect to the shaft body and the roller body. A conveying apparatus comprising: a plurality of conveying roller bodies according to claim 1 arranged in a conveying direction different from a direction of the rotation axis. A cleaning facility comprising: a plurality of cleaning devices for cleaning an object; and the transfer device according to claim 4 provided between the cleaning devices.

Images