JP4760791B2 - Roll brush and substrate liquid processing apparatus - Google Patents

Description

  The present invention provides, for example, a roll brush for rubbing the surface or both front and back surfaces with a brush while the glass substrate is transported in order to perform a predetermined liquid treatment on the glass substrate of a panel constituting a flat panel display. The present invention relates to a substrate liquid processing apparatus using a roll brush.

  When a flat panel display such as a liquid crystal display, a plasma display, or an organic EL display is manufactured, predetermined processing is sequentially performed while the glass substrate constituting the panel is transported by the transport means. For example, a cleaning process is performed by supplying a cleaning solution to both the front and back surfaces or the surface of the glass substrate, and a developing process is performed by supplying a developing solution to the surface of the glass substrate. In order to smoothly perform in-line liquid processing performed by supplying the cleaning liquid, the developer, and the like, the conveying means conveys the glass substrate in a horizontal or inclined state. Then, an ejection nozzle is provided in the middle of the transport path, and the processing liquid is ejected from this nozzle. In order to efficiently perform liquid processing and prevent the occurrence of uneven cleaning and development, a structure in which the surface (or both front and back surfaces) of the glass substrate is rubbed is generally used. ing.

  For example, a substrate development processing apparatus that performs development processing on a glass substrate uses a roller conveyor as a conveying means, and rotates the roller conveyor to convey the glass substrate in a horizontal or inclined state. In order to spread the developing solution sprayed from the nozzle onto the glass substrate evenly over the entire surface of the glass substrate, this nozzle is disposed downstream of the nozzle mounting portion. A roll brush that rubs the surface of the glass substrate is provided in the vicinity of the nozzle. The roll brush has a length that covers at least the entire length of the glass substrate in the width direction, and is rubbed against the surface of the glass substrate while being rotated by the rotation driving means.

When a glass substrate is repeatedly rubbed with a roll brush, the brush is soiled, the tip of the hair is deformed, and wear / damage occurs. Therefore, it is necessary to regenerate or replace the brush part. . For this purpose, the roll brush has a structure in which a brush unit formed by implanting a brush on a brush base is detachably attached to a rotating shaft, and the brush unit is separated from the rotating shaft to clean, repair, Maintenance such as replacement can be performed. For this purpose, Patent Document 1 discloses a brush unit configured to be detachably fixed to a rotating shaft using a bolt. In this patent document 1, it is set as the structure which uses a pair of division | segmentation brush body made into the half-split state, these division brush bodies are fitted to the outer peripheral surface of a rotating shaft from right and left, and is fixed using a volt | bolt. And, in order to firmly fix both the divided brush bodies to the rotating shaft, the bolt inserted through one of the divided brush bodies is fastened by passing through the rotating shaft and screwing into the other divided brush body. Yes.
JP-A-6-169817

  In general, a brush-based brush is a brush bundle in which a predetermined number of brushes are bundled, and the brush bundle is generally inserted into a mounting hole formed in the brush base and fixed with an adhesive. The mounting holes are regularly arranged with respect to the brush base. Further, in order to attach the divided brush body to the rotating shaft, the brush base is provided with a bolt insertion hole for inserting a bolt. Here, a mounting hole for mounting the brush bundle cannot be provided around the bolt insertion hole, particularly at a position that slightly interferes with the arrangement position of the bolt insertion hole. As described above, the position of the mounting hole is restricted by the bolt insertion hole, and depending on the position where the bolt insertion hole is provided, there is a portion where the brush is not provided in a considerably wide range. If there is a region where the brush does not exist, unevenness of friction occurs when the glass substrate is subjected to friction. Therefore, the area where no brush is present must be minimized.

  The present invention has been made in view of the above points. The object of the present invention is to provide a roll brush and a substrate liquid processing apparatus using the roll brush, which are detachably mounted on a rotary shaft, To suppress the occurrence of uneven friction by minimizing the area where no brush is present around the insertion part of the bolt provided to detachably fix the brush base constituting the divided brush body to the rotating shaft It is in.

  In order to achieve the above-described object, the roll brush of the present invention includes a plurality of divided brush bodies in which a large number of brushes are implanted on the outer peripheral surface of the brush base, and each of the divided brush bodies can be attached and detached by a plurality of bolts. The rotating shaft is mounted and is configured to rub the workpiece. The rotating shaft is provided with screw holes into which the bolts are screwed, and the brush bases have bolt insertion holes. The bolts are screwed into the screw holes via washers made of an annular plate having an outer diameter larger than the heads of the bolts, and the heads of the bolts are inserted into the washers. This is characterized in that a plurality of replenishing brushes are provided at positions on the outer peripheral side of the portion where the contact is made.

  Since the divided brush body is detachably attached to the rotating shaft, the divided brush body is configured to have a cylindrical shape as a whole when assembled. Therefore, the brush base must be at least a half cylinder. Of course, it may be divided into three parts instead of half, but if the number of divisions is too large, the attachment and detachment to the rotating shaft becomes troublesome.

  Bolts for fixing the brush base to the rotating shaft are attached via washers. Here, the washer does not necessarily have a function of preventing the bolt from loosening, but its outer diameter is larger than the outer diameter of the bolt head. And a brush is provided in the site | part of the outer peripheral side rather than the site | part with which the head part of this volt | bolt contacts. This brush is mounted as a supplementary brush by the same or different planting method as the brush planted on the brush base. That is, the brush base is provided with a mounting hole for easy installation, and a brush bundle in which a plurality of brushes are bundled is inserted into the mounting hole and fixed with an adhesive or the like. The washer replenishing brush, which is limited to the outer peripheral side of the portion where the contact is made, is provided by, for example, fixing one or several brushes to the surface of the washer with an adhesive or the like. And, for example, when using a bolt with a hexagonal hole as the bolt, if the space for inserting the tightening tool is left in the hexagonal hole in the head, the refilling brush partially covers the head of the bolt. Anyway. Thereby, the area | region where the brush in a division | segmentation brush body does not exist can be suppressed to the minimum. A bolt head accommodating portion for accommodating the bolt head is provided in the bolt insertion hole formed in the brush base, and the washer is formed from a flat surface formed between the bolt head accommodating portion and the shaft inserting portion for inserting the bolt shaft portion. It may be mounted so as to be in contact with the contact surface, or may be mounted so as to protrude from the outer peripheral surface of the brush base.

  Further, as an invention of a substrate liquid processing apparatus, an ejection unit having a processing liquid supply nozzle is provided at a midway position in a conveyance path through which a substrate is conveyed, and a downstream side position in the conveyance direction from the position where the ejection unit is disposed. A brush unit having a roll brush that rubs the surface of the substrate, and the brush unit includes a plurality of divided brush bodies in which a plurality of brushes are implanted on the outer peripheral surface of the brush base. The rotating shaft is provided with a screw hole into which each bolt is screwed, and each brush base is provided with a bolt insertion hole. Is screwed into the screw hole via a washer made of an annular plate having an outer diameter larger than the head of each bolt, and the washer is on the outer peripheral side of the portion where the head of the bolt abuts. It is an its features that it has a configuration in which a plurality of supplemental brush on location.

  The area where no brush is present around the bolt insertion part provided to fix the brush base to the rotating shaft can be minimized, and when the work made of glass substrate or the like is rubbed, almost the entire surface Can be rubbed evenly.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, FIG. 1 conceptually shows a liquid treatment process using a glass substrate as a workpiece. In the drawing, as a configuration of the substrate liquid processing apparatus, a description will be given of a case where a glass substrate is exposed to a predetermined pattern by exposure and then development processing is performed to develop the transfer pattern. In addition, the liquid processing to the glass substrate is not limited to this, but can be applied to other liquid processing. For example, when cleaning the glass substrate, not only on the front surface side of the glass substrate but also on the back surface side. Also, a roll brush described later is provided.

  In the figure, 1 is a glass substrate, and this glass substrate 1 is conveyed along the conveyance path 2. Roller conveyors 3 having rollers 3b on the drive shaft 3a are arranged at a predetermined pitch interval in the conveyance path 2, and the rollers 3c at both ends are configured with rollers with hooks. By rotating and driving the drive shaft 3a of the roller conveyor 3, the glass substrate 1 is brought into a horizontal state, or is conveyed in a direction indicated by an arrow by being inclined at a predetermined angle in a direction orthogonal to the conveyance direction or in the conveyance direction. . Here, not only in the case of horizontal conveyance, but also in the case of inclined conveyance, the surface thereof is directed substantially upward. Therefore, in the following description, including the horizontal conveyance state and the inclined conveyance state, This transport mode is called flat feed.

  As the stage configuration of the substrate liquid processing apparatus, in the development processing stage illustrated in FIG. 1, an ejection unit 4 having a developer supply nozzle is provided in the middle of the transport path of the glass substrate 1 by the transport path 2. In order to spread the developer supplied to the glass substrate 1 almost uniformly on the entire surface thereof at a position on the downstream side in the conveying direction of the arrangement position of the ejection means 4 and in a position close to the ejection means 4. In addition, a roll brush 10 that rubs the surface of the glass substrate 1 is provided. The roll brush 10 has a brush unit 12 removably attached to a rotary shaft 11, and both side portions of the rotary shaft 11 are rotatably supported by bearings 13, 13, and one end portion of the rotary shaft 11. A rotational drive motor 14 is coupled to the motor.

  Here, as shown in FIG. 2, the brush unit 12 is configured by providing a brush 16 on the outer surface of the brush base 15 that is externally mounted on the rotating shaft 11. On the other hand, the inner peripheral surface of the brush base 15 is divided into arc shapes having an angle of approximately 180 degrees with respect to the rotation shaft 11. The entire length of the brush unit 12 is longer than at least the length in the direction perpendicular to the conveying direction of the glass substrate 1, that is, the width direction. Therefore, when developing a glass substrate 1 having a large width dimension for a large display, if the brush base 15 has a length extending over the entire length in the length direction, the length becomes extremely long. In addition to being divided into two parts, it is also divided into a plurality of parts in the length direction. Of course, although it is not essential to divide in the length direction, it is divided into a certain number in the axial direction, for example, about 2 to 4 in order to facilitate handling during maintenance such as maintenance, inspection, repair and replacement of the brush unit 12. Has been. Therefore, the brush unit 12 is the brush base 15 having the brush 16, but is composed of a plurality of divided brush bodies 17 as shown in FIG. 3.

  In each divided brush body 17, in order to form the brush 16 on the brush base 15, the brush base 15 is provided with a brush mounting hole 18 made up of a number of drill holes in the circumferential direction as shown in FIG. And it is formed with a dense pitch interval in the axial direction. The brush 16 of the brush unit 12 includes a brush bundle 19 in which a predetermined number of brushes are bundled, and the brush bundle 19 is inserted into each brush mounting hole 18 and fixed by an adhesive. The portion of the brush bundle 19 inserted into the brush mounting hole 18 is a bundled portion, protrudes from the brush mounting hole 18 and expands in a conical shape, and this portion functions as a rubbing portion.

  As described above, the brush base 15 of each divided brush body 17 constituting the brush unit 12 is detachably attached to the rotating shaft 11 by the plurality of bolts 20. For this purpose, as shown in FIGS. 3 and 5, the rotating shaft 11 is provided with a screw hole 21 into which the bolt 20 is screwed, and the brush base 15 corresponds to the screw hole 21. Bolt insertion holes 22 are drilled in the holes. The bolts 20 are provided at a plurality of positions in different positions in the circumferential direction and the axial direction, for example, four positions in FIG. 4, so that the brush base 15 is securely and stably fixed to the rotating shaft 11. become.

  Here, the bolt insertion hole 22 has a step, and the inner peripheral side in contact with the rotary shaft 11 is a shaft insertion part 22a made of a small diameter hole having a slightly larger diameter than the shaft part 20a of the bolt 20, and the outer peripheral side is The diameter is expanded to form a bolt head accommodating portion 22b that accommodates the head 20b of the bolt 20. Further, the step portion 22c between the shaft insertion portion 22a and the bolt head accommodating portion 22b has a flat surface shape. Therefore, by tightening the bolt 20, each divided brush body 17 is fixed to the outer peripheral portion of the rotating shaft 11, and when all the divided brush bodies 17 are mounted, the brush unit 12 having the brush 16 formed over the entire surface is formed. The

  In this manner, the bolt 20 is inserted into the bolt insertion hole 22 of the brush base 15 and screwed into the screw hole 21 of the rotating shaft. A washer 23 is provided between the head 20b of the bolt 20 and the stepped portion 22c. It is intervened. The washer 23 is formed of an annular plate, and the function of preventing the bolt 20 from loosening is not necessarily a requirement. Therefore, it is desirable that the washer 23 is formed of a plastic molded product instead of a metal. The inner diameter of the washer 23 is larger than the shaft portion 20a of the bolt 20 and smaller than the head portion 20b. The outer diameter of the washer 23 is larger than that of the head portion 20b and slightly larger than that of the large diameter portion 22b of the bolt insertion hole 22. It is getting smaller.

  When the bolt 20 is inserted into the washer 23, an annular flat portion is formed on the washer 23 on the outer peripheral side of the head 20b of the bolt 20, and a replenishing brush 24 is provided on the flat portion. Is provided. Here, the supplementary brush 24 constitutes the brush 16 implanted in the brush unit 12 together with the brush bundle 19 and may be bundled similarly to the brush bundle 19, but one brush is provided on the surface of the washer 23. You may make it adhere | attach one by one or several.

  Here, a hexagonal hole 25 is formed in the head 20b of the bolt 20. When the bolt 20 is screwed into the screw hole 21 of the rotary shaft 11 and tightened, a tightening tool is engaged with the hexagonal hole 25. The The supplementary brush 24 is supplementarily implanted around the head 20b of the bolt 20. The refilling brush 24 can be mounted so as not to cover the upper position of the head 20b of the bolt 20, but when the bolt 20 is tightened, the replenishing brush 24 can be attached to the head 20b of the bolt 20 within a range where the tightening tool does not contact. It can also be installed to cover a portion. The hair tips of the replenishing brush 24 are arranged so as to be aligned with the brushes constituting the brush bundle 19, and the brush bundle 19 and the replenishing brush 24 constitute the brush 16 of the brush unit 12.

  In the above configuration, the glass substrate 1 is transported in a flat feed state along the transport path 2, and the developing solution is ejected from the ejecting means 4 while the glass substrate 1 is traveling and supplied to the surface of the glass substrate 1. The surface of the glass substrate 1 is rubbed by the roll brush 10 at a position immediately after passing through the developer spray area. While the glass substrate 1 is being transported, the rotating shaft 11 of the roll brush 10 is rotationally driven by a motor 14, and the glass substrate 1 is rubbed by the brush 16 of the roll brush 10, whereby the developer is applied to the entire surface. Disseminated.

  Thus, since the glass substrate 1 is conveyed along the conveyance path 2 and the roll brush 10 is rotated and the glass substrate 1 is rubbed, the developer sprayed from the spraying means 4 is uniformly distributed over the entire surface. It is necessary to make the density of the brush 16 in the brush unit 12 of the roll brush 10 substantially uniform in the circumferential direction and the axial direction. However, in the brush base 15, a position where a wall is not formed between a position where the bolt insertion hole 22 is disposed and, more specifically, a position between the bolt insertion hole 22 and the brush mounting hole 18 where the brush bundle 19 is mounted. Then, the brush mounting hole 18 cannot be provided. For example, if the brush mounting hole 18 and the bolt insertion hole 22 are in the positional relationship shown in FIG. 6, by providing the bolt insertion hole 22, as shown by phantom lines in FIG. The brush mounting hole 18 is missing, and a large blank space is generated around the bolt insertion hole 22. However, since a washer 23 is fitted in the bolt insertion hole 22 and a replenishing brush 24 is provided on the washer 23, a blank space is filled and the brush 16 is substantially missing. Since the location becomes smaller, the unevenness of the surface of the glass substrate 1 can be minimized. Moreover, the replenishing brush 24 provided on the washer 23 does not cover the portion of the head 20b of the bolt 20 where the hexagonal hole 25 is provided, so that it does not obstruct the operation of attaching and detaching the bolt 20.

  Here, in the above-described embodiment, the bolt insertion hole 22 formed in the brush base 15 has a step shape, and the head 20b and the washer 23 of the bolt 20 are accommodated in the bolt accommodating portion 22b. Although it is set as the structure which does not protrude outside, it can also be comprised as shown in FIG. The bolt insertion hole 122 provided in the brush base 115 shown in FIG. 7 is not a step structure but is slightly larger than the shaft portion 20a of the bolt 20 and has a uniform hole diameter. The bolt 20 and the washer 123 are formed on the brush base 115. You may mount | wear so that it may protrude from an outer surface. In this case, the contact surface of the washer 123 with the brush base 115 is an arc surface along the outer shape of the brush base 115. A replenishing brush 24 is provided on the other surface of the washer 123. If comprised in this way, the process of the bolt insertion hole 122 will become easy.

It is explanatory drawing which shows the conceptual structure of the developing solution processing stage of a glass substrate as an example of the liquid processing apparatus of a board | substrate. It is a longitudinal cross-sectional view of the roll brush which shows one Embodiment of this invention. It is a longitudinal cross-sectional view of a roll brush, Comprising: It is a decomposition | disassembly longitudinal cross-sectional view of the roll brush in the position of a bolt mounting part. It is an expanded view of a brush base. It is principal part sectional drawing toward the axial direction of a roll brush. It is explanatory drawing which shows the arrangement | positioning relationship between the bolt insertion hole and brush mounting hole in a brush base. It is principal part sectional drawing similar to FIG. 5 which shows the other form of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Glass substrate 2 Conveyance path 4 Injection means 10 Roll brush 11 Rotating shaft 12 Brush unit 13 Bearing 14 Motor 15, 115 Brush base 16 Brush 17 Split brush body 18 Brush mounting hole 19 Brush bundle 20 Bolt 20a Shaft portion 20b Head portion 21 Screw Hole 22, 122 Bolt insertion hole 22a Shaft insertion portion 22b Bolt head accommodating portion 22c Stepped portion 23, 123 Washer 24 Replenishing brush 25 Hexagonal hole

Claims (5)

A structure comprising a plurality of divided brush bodies in which a large number of brushes are planted on the outer peripheral surface of the brush base, and a rotating shaft on which each of the divided brush bodies is detachably mounted by a plurality of bolts, and the workpiece is rubbed. In the rolled brush,
The rotating shaft is provided with screw holes into which the bolts are screwed, and the brush bases are provided with bolt insertion holes,
Each bolt is screwed into the screw hole via a washer made of an annular plate having an outer diameter larger than the head of each bolt,
A roll brush characterized in that the washer is provided with a plurality of replenishing brushes at an outer peripheral side position of a portion where the head of the bolt abuts. The brush base has a half-cylindrical shape and is composed of a plurality of members shorter than the entire length of the rotating shaft, and the plurality of brush bases are sequentially brought into contact with the circumferential direction and the length direction of the rotating shaft. The roll brush according to claim 1, wherein the roll brush is configured to be attached to the rotating shaft. The bolt insertion hole of the brush base is formed with a bolt head accommodating portion that accommodates the head of the bolt, and the washer includes a shaft insertion portion that allows the bolt head accommodating portion and the shaft portion of the bolt to be inserted. The roll brush according to claim 1, wherein the roll brush is configured to abut on a flat abutting surface formed therebetween. The roll brush according to claim 1 or 2, wherein the washer is mounted so as to contact an outer peripheral surface of the brush base. An ejection unit having a treatment liquid supply nozzle is provided at a midway position in the conveyance path through which the substrate is conveyed, and a roll brush that rubs the substrate surface at a downstream position in the conveyance direction from the position where the ejection unit is disposed. In substrate processing equipment with brush unit attached,
The brush unit is provided by attaching a plurality of divided brush bodies in which a large number of brushes are implanted on the outer peripheral surface of the brush base to be detachably attached to the rotary shaft by a plurality of bolts, respectively.
The rotating shaft is provided with screw holes into which the bolts are screwed, and the brush bases are provided with bolt insertion holes,
Each bolt is screwed into the screw hole via a washer made of an annular plate having an outer diameter larger than the head of each bolt,
The substrate liquid processing apparatus, wherein the washer is configured to include a plurality of replenishing brushes at a position on an outer peripheral side of a portion where the head of the bolt abuts.

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