JP4587834B2 - Non-masking continuous partial plating equipment - Google Patents

Non-masking continuous partial plating equipment Download PDF

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JP4587834B2
JP4587834B2 JP2005037367A JP2005037367A JP4587834B2 JP 4587834 B2 JP4587834 B2 JP 4587834B2 JP 2005037367 A JP2005037367 A JP 2005037367A JP 2005037367 A JP2005037367 A JP 2005037367A JP 4587834 B2 JP4587834 B2 JP 4587834B2
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plating
plating solution
electrode
rotating body
conveyance
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JP2006225677A (en
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小林敬介
伊藤善昭
小宮山清
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MITOMO SEMICON ENGINEERING CO., LTD.
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本発明は、長手方向に連続する帯状共通部分と長手方向に不連続でかつ幅方向に延びる複数の櫛歯状部分とを有する被処理物を連続搬送しつつ櫛歯状部分の選択されためっき必要部分に連続してめっき処理を施すためのノンマスキング方式の連続部分めっき装置に関する。 The present invention provides a plating method in which comb-like portions are selected while continuously conveying a workpiece having a strip-like common portion that is continuous in the longitudinal direction and a plurality of comb-like portions that are discontinuous in the longitudinal direction and extend in the width direction. The present invention relates to a non-masking type continuous partial plating apparatus for continuously performing plating on necessary portions.

図6に示す被処理物は、連続する帯状長尺物(例えば、リードフレーム)でかつ連続するめっき必要部分1RYを有するワーク1Rである。かかるワーク1Rの場合は、連続部分めっき装置を構成する処理槽内のめっき液面を調整板の利用により一定に保持し、下方部(めっき必要部分)1RYをめっき液に浸漬しつつ搬送させれば、めっき不必要部分1RNにめっき処理することなく、選択された一部分(めっき必要部分)のみに連続してめっき処理を施すことができる。   The workpiece to be processed shown in FIG. 6 is a work 1R having a continuous strip-like long object (for example, a lead frame) and a continuous plating required portion 1RY. In the case of such a workpiece 1R, the plating solution surface in the processing tank constituting the continuous partial plating apparatus is kept constant by using the adjusting plate, and the lower portion (the portion requiring plating) 1RY is conveyed while being immersed in the plating solution. For example, the plating process can be continuously performed only on the selected part (the plating required part) without performing the plating process on the plating unnecessary part 1RN.

しかし、めっき液面の変動を絶無化することは実際上不可能に近いので、部分めっき位置(境界)の高精度化が難しい。また、このような液面調整型の連続部分めっき装置では、例えば図8(板厚方向から見た状態を表わす。)の(C)に示すワーク1Cのうちの中間めっき不必要部分1MNを除きかつこれを上下方向に挟む下方めっき必要部分1DYおよび上方めっき必要部分1UYの双方にめっき処理を施すことはできない。   However, since it is almost impossible to eliminate the fluctuation of the plating solution level, it is difficult to improve the accuracy of the partial plating position (boundary). Further, in such a liquid level adjustment type continuous partial plating apparatus, for example, the intermediate plating unnecessary portion 1MN of the workpiece 1C shown in FIG. 8C (representing the state viewed from the plate thickness direction) is excluded. In addition, it is impossible to perform the plating process on both the lower plating required portion 1DY and the upper plating required portion 1UY sandwiching this in the vertical direction.

そこで、めっき不必要部分1MNにテープ等を貼り付け(マスキング)して、部分めっき終了後にテープ等を引き剥がす直接貼付マスキング方式が採用される場合がある。しかし、テープ購入金額が嵩み、またテープ貼付作業および引剥作業が必要であるから、生産能率が大幅に低下し生産コスト高となる。テープ貼付作業のバラツキ等やテープ変形等が生じるので、例えば3〜2mm以下の位置精度を得ることは無理である。   Therefore, there is a case where a direct sticking masking method is adopted in which a tape or the like is attached (masking) to the plating unnecessary portion 1MN, and the tape or the like is peeled off after completion of the partial plating. However, the amount of tape purchased increases, and the tape application work and the peeling work are necessary, so that the production efficiency is greatly reduced and the production cost is increased. Since variations in tape application work, tape deformation, and the like occur, it is impossible to obtain positional accuracy of 3 to 2 mm or less, for example.

さらに、図8(A)に示すめっき不必要部分1UN,めっき必要部分1MYおよびめっき不必要部分1DNがあるワーク1Aや同図(B)に示すめっき必要部分1DY,めっき不必要部分1MNおよびめっき必要部分1UYがあるワーク1Bのように大きな変形(凹凸や曲り)部分がある場合は、マスキング自体が難しく採用し難い。   Furthermore, a workpiece 1A having a plating-unnecessary portion 1UN, a plating-necessary portion 1MY and a plating-necessary portion 1DN shown in FIG. 8A, or a plating-necessary portion 1DY, a plating-necessary portion 1MN and a plating-necessary shown in FIG. When there is a large deformation (unevenness or bend) like the work 1B with the part 1UY, masking itself is difficult and difficult to adopt.

これに対して、いわゆる間接固着マスキング方式が提案(特許文献1を参照)されている。この特許文献1に係る部分めっき装置は、めっき不必要部分を絶縁マスキングし、ノズルからめっき液を吐出して保持体層(布等)10に浸潤しつつ流動させ、この状態でドラムを回転させることにより、保持体層と接する部分にように液溜りを形成しかつこの液溜りに浸漬された状態でめっき必要部分に部分めっきを施すことができるように形成されている。しかし、上記した液面制御方式や直接貼付マスキング方式に比較しても、装置コスト高となる割にはめっき位置精度の大幅な向上は望めない。寧ろ、ワークの長手方向の液流れを防止できずかつ保持体層の変形が生じるので、直接貼付マスキング方式の場合に比較して位置精度が劣悪化してしまう。   On the other hand, a so-called indirect fixing masking method has been proposed (see Patent Document 1). The partial plating apparatus according to Patent Document 1 performs insulation masking on an unnecessary part of plating, discharges a plating solution from a nozzle and causes it to flow while infiltrating into a holding body layer (cloth, etc.) 10, and rotates the drum in this state. Thus, the liquid reservoir is formed at the portion in contact with the holding body layer, and the portion that needs to be plated can be partially plated while being immersed in the liquid reservoir. However, even if compared with the above-described liquid level control method and direct sticking masking method, a significant improvement in plating position accuracy cannot be expected for the high device cost. On the contrary, since the liquid flow in the longitudinal direction of the workpiece cannot be prevented and the holder layer is deformed, the positional accuracy is deteriorated as compared with the case of the direct sticking masking method.

さらに、直接貼付マスキング方式の装置や間接固着マスキング方式(特許文献1)の場合には、テープやマスキング部材によるマスキング困難性から、小型(微細)で複雑形状の帯状被処理物の部分めっきには不適当である。   Furthermore, in the case of the direct pasting masking system and the indirect adhesion masking system (Patent Document 1), it is difficult to mask with a tape or a masking member. Inappropriate.

そこで、めっき必要部分とマスキング部材との間に空間を形成し、この空間内にめっき液を供給して当該めっき必要部分にめっき処理を施す装置が提案(例えば、特許文献2)されている。つまり、回転ドラムの外周壁にマスク部材を固着し、このマスク部材の外側に金属条を巻き付け、回転ドラム内からマスキング部材を通してめっき液を供給しつつ、金属条の内面側でかつマスキング部材に非接触な領域(めっき必要部分)に部分めっきを施すことができる。   In view of this, an apparatus has been proposed in which a space is formed between a plating-required portion and a masking member, and a plating solution is supplied into the space to perform a plating process on the plating-required portion (for example, Patent Document 2). That is, the mask member is fixed to the outer peripheral wall of the rotating drum, the metal strip is wound around the outer surface of the mask member, and the plating solution is supplied from the rotating drum through the masking member, while the inner surface of the metal strip is not on the masking member. Partial plating can be performed on a contact area (a part where plating is necessary).

同様な考え方でかつマスキング部材を可動式とした装置も提案(特許文献3および特許文献4を参照)されている。回転ドラムと回動マスキングベルトとを密接させた状態とし、回転ドラムに巻き付けられた被処理物のうちマスキングベルトが当接されない部分に対応する空間内にめっき液を供給しかつ当該部分(めっき必要部分)のみにめっき処理を施す構造である。   An apparatus having a similar concept and a movable masking member has also been proposed (see Patent Document 3 and Patent Document 4). The rotating drum and the rotating masking belt are brought into intimate contact with each other, and the plating solution is supplied to the space corresponding to the portion where the masking belt is not in contact with the workpiece wound around the rotating drum (the plating is necessary). In this structure, only part) is plated.

しかし、かかる特許文献2,3,4に係る装置でも、マスキング材と被処理物との間にめっき液が浸み込んでしまうので、めっき必要部分とめっき不必要部分との境界が部分的に変動する。精度上の要求を満たせない。マスキングベルト等の交換等が必要であるから生産コスト高になる。しかも、めっき処理後にプレス加工により分断する考え方であるから、めっき皮膜にも傷が付く。製品の原価削減上は致命的な欠陥となる。換言すれば、図7に示す不連続部分(1K)を有するワーク1Fには適応できない。   However, even in the apparatuses according to Patent Documents 2, 3, and 4, since the plating solution is infiltrated between the masking material and the object to be processed, the boundary between the plating necessary part and the plating unnecessary part is partially. fluctuate. The accuracy requirements cannot be met. Since replacement of the masking belt or the like is necessary, the production cost increases. In addition, the plating film is damaged by press working after the plating treatment, so that the plating film is also scratched. This is a fatal defect in reducing product costs. In other words, it cannot be applied to the workpiece 1F having the discontinuous portion (1K) shown in FIG.

そこで、本出願人は、被処理物の形態が一段と小型化および複雑化するとともに部分めっきの位置精度が一層高度化するとともに生産性が高くかつ低コストで部分めっきを施したいとする要請に応えるためのノンマスキング方式の新規装置を提案(例えば、特願2003−429635号)している。   Accordingly, the present applicant responds to the request to further reduce the size and complexity of the workpiece and to further improve the position accuracy of partial plating and to perform partial plating with high productivity and low cost. Has proposed a new non-masking system device (for example, Japanese Patent Application No. 2003-429635).

この先提案装置は、図7に示す長手方向(図で左右方向)に連続する帯状共通部分1Cと長手方向に不連続でかつ幅方向に延びる複数の櫛歯状部分1Kとを有するワーク(例えば、リードフレーム等)1Fの不連続形態とめっき液の流動性との関係に着目しかつ櫛歯状部分(1K)間をめっき液の流動路として巧みに利用する新規な考え方に基づく。   The previously proposed apparatus has a workpiece (for example, a plurality of comb-like portions 1K that are discontinuous in the longitudinal direction and extend in the width direction, for example, a belt-like common portion 1C continuous in the longitudinal direction (left and right in the drawing) shown in FIG. (Lead frame, etc.) Based on a novel concept that pays attention to the relationship between the discontinuous form of 1F and the fluidity of the plating solution, and skillfully uses the space between the comb-like portions (1K) as the flow path of the plating solution.

詳しくは、基軸線を中心に回転する回転電極構造(90)内で外部から供給されためっき液に陽極電位を印加給電し、給電後のめっき液を全周方向に連続するスリット部から径方向に噴流し、ワーク(1B)の幅方向の選択されためっき必要部分[例えば、図8(B)の1UYあるいは1DY(その後にワーク1Bを上下反転させた2回目の場合は、1DYあるいは1UY)]のみにめっき液を吹付けながら、当該めっき必要部分のみに部分めっきを施すことができる。めっき不必要部分[図8(B)のバリヤ部1MN]には、めっき液が付着されることがないので、位置精度を劣悪化させる低品質で無用なめっき皮膜が析出されてしまうことはない。   Specifically, an anode potential is applied and supplied to the plating solution supplied from the outside in the rotating electrode structure (90) rotating around the base axis, and the plating solution after the supply is supplied in the radial direction from the slit portion continuous in the entire circumferential direction. And a selected portion of the workpiece (1B) in the width direction that is necessary for plating [for example, 1UY or 1DY in FIG. 8B (in the case where the workpiece 1B is turned upside down for the second time, 1DY or 1UY) ], The plating solution can be sprayed only on the necessary parts for plating. Since the plating solution is not attached to the plating-unnecessary portion [barrier portion 1MN in FIG. 8B], a low-quality and unnecessary plating film that deteriorates the positional accuracy is not deposited. .

かくして、安定しためっき処理により高品質な製品を生産することができるとともに大幅な生産能率の向上および生産コストの低減を図れ、しかも取り扱いが簡単である。
特開平02−97692号公報 特開2002−38294号公報 特開平11−131284号公報 特開平11−293489号公報
Thus, it is possible to produce a high-quality product by a stable plating process, to greatly improve the production efficiency and reduce the production cost, and to handle easily.
Japanese Patent Laid-Open No. 02-97692 JP 2002-38294 A JP-A-11-131284 JP 11-293489 A

しかしながら、高位置精度および生産性の向上並びに高品質保障の安定性が一段と強く求められる現今要請に応えるためには、さらなる改善が必要と考える。   However, further improvement is necessary to meet the current demands for higher positioning accuracy, improved productivity, and higher quality assurance stability.

すなわち、本出願人の先提案装置においては、回転体30の全周(360度)に設けられたスリット部から径方向(ラジアル方向)に噴流されためっき液は、全体として、例えば帽子円形鍔に似た外側に向かって広がる薄板円盤形状の液薄膜となる。しかし、供給めっき液の脈動,回転体30の回転速度の変動等があると、全周に渡って水平であるべき円盤形状液薄膜に、上下方向やねじれ方向の乱れが部分的に生じる場合があり得る。顧みて、時として発生するめっき品質(高さ位置精度)のバラツキ発生の1つの原因と考えられる。   That is, in the previously proposed apparatus of the present applicant, the plating solution jetted in the radial direction (radial direction) from the slit portion provided on the entire circumference (360 degrees) of the rotating body 30 is, for example, a hat circular ridge as a whole. It becomes a thin disk-shaped liquid thin film that spreads out toward the outside. However, if there is a pulsation of the supply plating solution, a fluctuation in the rotational speed of the rotating body 30, etc., the disc-shaped liquid thin film that should be horizontal over the entire circumference may partially cause disturbances in the vertical direction and the twist direction. possible. In retrospect, this is considered to be one cause of the occurrence of variations in plating quality (height position accuracy) that sometimes occurs.

また、ワーク(1F)には、連続搬送の上流側では回転体30の外周(ガイド)面33に接触状態になる以前の一定期間内にめっき液が付着(接触)され、その下流側ではめっき処理後の非接触状態となった以降の一定期間内にもめっき液が付着(接触)する。短時間とはいえ、めっき液が接触したワーク部分には、正規とはいえない不良めっき処理がなされる。この際のめっき品質は低い。これも、時として発生するめっき品質(高さ位置精度)のバラツキ発生の1つの原因と考えられる。だからと言って、連続搬送されるワーク1Fを回転体30の全周に巻き付けた状態で搬送ガイドさせることは物理的に不可能である。   In addition, the plating solution adheres (contacts) to the work (1F) within a certain period of time before being brought into contact with the outer peripheral (guide) surface 33 of the rotating body 30 on the upstream side of the continuous conveyance, and plating is provided on the downstream side thereof. The plating solution adheres (contacts) even within a certain period after the non-contact state after the treatment. Although it is a short time, a defective plating process which is not normal is performed on the work part in contact with the plating solution. The plating quality at this time is low. This is also considered to be one cause of the occurrence of uneven plating quality (height position accuracy). However, it is physically impossible to guide the conveyance of the workpiece 1 </ b> F that is continuously conveyed around the entire circumference of the rotating body 30.

また、めっき液は、回転体30の内側から回転電極構造90(液流路95)および整流用液室51Sを通して全周方向に連続する1つのノズル部52から全径方向に噴流される。かかる構造である以上、めっき液の単位量当りの給電面積をこれ増大させることが難しい。したがって、給電能率の一段の向上が難しい。   Further, the plating solution is jetted from the inner side of the rotating body 30 through the rotating electrode structure 90 (liquid channel 95) and the rectifying liquid chamber 51S in the entire radial direction from one nozzle portion 52 that is continuous in the entire circumferential direction. With this structure, it is difficult to increase the power supply area per unit amount of the plating solution. Therefore, it is difficult to further improve the power supply efficiency.

さらに、電極構造90が回転体30とともに同期回転させる回転構造であるから、回転体30の一段の回転高速化による生産性向上の抑制要因にもなっている。回転体30の回転数を可能な限りにおいて高速化しても、給電不足の虞がある。回転高速化断念は、装置小型化を断念に等しい。   Furthermore, since the electrode structure 90 is a rotating structure that rotates synchronously with the rotating body 30, it is a factor that suppresses productivity improvement due to a one-stage rotation speed increase of the rotating body 30. Even if the rotational speed of the rotator 30 is increased as much as possible, there is a risk of insufficient power supply. Abandonment of high-speed rotation is equivalent to abandonment of device miniaturization.

本発明の目的は、高位置精度な部分めっき処理を確実かつ安定して行える連続部分めっき装置を提供することにある。   An object of the present invention is to provide a continuous partial plating apparatus capable of reliably and stably performing partial plating processing with high position accuracy.

本発明は、先提案(特願2003−429635号)に係るノンマスキング方式の連続部分めっき装置の実際運用を含む試験・研究の結果として問題視される上記の技術的課題を一挙に解決するものである。すなわち、本発明は、円筒形状で静止状態の電極構造体に設けられた複数の小径電極ノズルから周方向の一定角度範囲内においてめっき液を径方向に勢いよく噴射させることで、噴射めっき液の上下方向乱れを発生しないように形成され、連続搬送中のワークは回転体に係合されかつ電極ノズルに対応する位置に到達した以降においてはじめてめっき液に接触されかつ回転体と非係合になる以前にめっき液との接触を断って不必要なめっき液との接触および劣悪めっき処理のなされることを回避可能に形成され、複数の電極ノズルを通すことでめっき液単位量当りの給電面積を増大させて給電能率を向上可能に形成され、さらに電極構造体の静止化と相俟って回転体の回転数を高速化可能に形成されている。 The present invention solves the above technical problems at a stroke as a result of tests and research including actual operation of a non-masking type continuous partial plating apparatus according to the previous proposal (Japanese Patent Application No. 2003-429635). It is. That is, the present invention allows the plating solution to be ejected vigorously in the radial direction from a plurality of small-diameter electrode nozzles provided on the cylindrical and stationary electrode structure within a certain angular range in the circumferential direction. Formed so as not to cause vertical disturbance, the workpiece being continuously conveyed is engaged with the rotating body and is contacted with the plating solution only after reaching the position corresponding to the electrode nozzle and is not engaged with the rotating body. It is formed so as to avoid contact with the plating solution by cutting the contact with the plating solution before and unnecessary plating treatment, and the power supply area per unit amount of the plating solution can be increased by passing multiple electrode nozzles. It is formed so as to be able to improve the power supply efficiency by increasing it, and in addition to the staticization of the electrode structure, it is formed so as to increase the rotational speed of the rotating body.

詳しくは、請求項1の発明に係るノンマスキング方式の連続部分めっき装置は、長手方向に連続する帯状共通部分と長手方向に不連続でかつ幅方向に延びる複数の櫛歯状部分とを有する被処理物を連続搬送しつつ櫛歯状部分のめっき必要部分に連続してめっき処理を施すためのノンマスキング方式の連続部分めっき装置であって、外周面側に被処理物と係合して搬送ガイド可能な搬送ガイド面が形成されかつ垂直状態の基軸線を中心に被処理物の搬送速度に対応する回転速度で回転可能な回転体と、該基軸線を中心とする仮想円軌跡の周方向に離隔配設された複数の小径孔形状の電極ノズルを有するとともに内部に供給されためっき液に給電可能かつ給電されためっき液を各電極ノズルからその径方向に噴射可能に形成された円筒形状で静止状態の電極構造体とを設け、電極ノズルの配設角度範囲が回転体の搬送ガイド面に被処理物が係合している角度範囲よりも小さく選択され、回転体が該基軸線を中心とする静止構造体である中空円筒体の外側に回転可能に装着されかつ電極構造体が中空円筒体の内側に嵌装された軸部材の上方部に着脱可能に取付けられ、この軸部材の基軸線方向の位置調整により回転体と電極構造体との基軸線方向の相対位置を調整可能に形成されるとともに、調整後の相対位置において各電極ノズルから噴射されためっき液を連続搬送中のめっき必要部分に吹き付けることができる状態に被処理物を保持するワーク位置保持部を設けられている、ことを特徴とする。 Specifically, the non-masking-type continuous partial plating apparatus according to the first aspect of the invention includes a belt-shaped common portion that is continuous in the longitudinal direction and a plurality of comb-like portions that are discontinuous in the longitudinal direction and extend in the width direction. It is a non-masking type continuous partial plating device for continuous plating of the parts that need to be plated in the comb-shaped part while continuously transporting the processed object, and is engaged with the object to be processed on the outer peripheral surface side. A rotating body on which a guide guide for conveyance is formed and which can rotate at a rotation speed corresponding to the conveyance speed of the object to be processed around a base axis in a vertical state, and a circumferential direction of a virtual circular locus around the base axis A cylindrical shape having a plurality of small-diameter hole-shaped electrode nozzles spaced apart from each other and capable of supplying power to the plating solution supplied to the inside and spraying the supplied plating solution in the radial direction from each electrode nozzle Still And an electrode structure of the state provided, disposed angle range of the electrode nozzle object to be treated is selected smaller than the angle range in engagement with the conveying guide surface of the rotating body, the rotating body and around the base axis The electrode member is detachably attached to an upper portion of a shaft member that is rotatably mounted on the outer side of the hollow cylindrical body that is a stationary structure, and the base axis of the shaft member. It is possible to adjust the relative position of the rotating body and the electrode structure in the base axis direction by adjusting the position of the direction , and plating is necessary during continuous conveyance of the plating solution sprayed from each electrode nozzle at the adjusted relative position ready to be blown in the portion is provided a work position holding unit for holding an object to be processed, characterized in that.

また、請求項2の発明に係るノンマスキング方式の連続部分めっき装置は、回転体が電極構造体を収容可能な収容空間と,この収容空間内に収容された電極構造体の電極ノズルから連続搬送中のめっき必要部分に向けて噴射されるめっき液を流通可能なめっき液流路とを有し、搬送ガイド面が基軸線方向においてめっき液流路を挟む搬送上ガイド面と搬送下ガイド面とから形成されているFurther, the non-masking-type continuous partial plating apparatus according to the invention of claim 2 is a continuous transport from a housing space in which the rotating body can accommodate the electrode structure, and an electrode nozzle of the electrode structure housed in the housing space. A plating solution flow path capable of flowing a plating solution sprayed toward a necessary portion of the plating inside, and a conveyance guide surface sandwiching the plating solution flow channel in the base axis direction, a conveyance upper guide surface, and a conveyance lower guide surface Formed from .

また、請求項3の発明では、電極ノズルの直径が0.1mm〜1.0mmの中から選択されている。 Further, in the invention of claim 3, the diameter of the electrodes nozzles are selected from among 0.1 mm to 1.0 mm.

請求項1の発明によれば、ノンマスキング方式でかつ静止型電極構造体の電極ノズルからめっき液を噴射させつつ連続部分めっき処理可能に形成されているので、高位置精度な部分めっき処理を確実かつ安定して行えるとともに、給電効率および生産能率が高くかつ装置小型化を促進できる。さらに静止した電極ノズルと連続搬送中のめっき必要部分との相対位置を容易かつ確実に行える。しかも、装着済み電極構造体と仕様が異なる電極構造体との交換が容易である。 According to the first aspect of the present invention, the non-masking method and the continuous partial plating process can be performed while spraying the plating solution from the electrode nozzle of the stationary electrode structure. In addition, it can be performed stably, has high power supply efficiency and high production efficiency, and can promote downsizing of the apparatus. Furthermore, the relative position of the stationary electrode nozzle and the necessary plating part during continuous conveyance can be easily and reliably performed. Moreover, it is easy to replace the mounted electrode structure with an electrode structure having different specifications.

また、請求項2の発明によれば、請求項1の発明の場合と同様な効果を奏することができ、さらにワーク(被処理物)の幅方向の各端部分を当該各搬送ガイド面に当接できるので、ワークの姿勢を一段と正しくかつ安定した連続搬送を担保できる。 Further, according to the invention of claim 2, the same effect as in the case of the invention of claim 1 can be obtained, and each end portion in the width direction of the work (object to be processed) is applied to each conveyance guide surface. Since it can touch, the posture of the workpiece can be secured more accurately and stably.

第2補正
また、請求項3の発明によれば、請求項1および2の各発明の場合と同様な効果を奏することができることに加え、めっき必要部分の大きさに応じた電極ノズルの選択が一段と容易であるとともにめっき不必要部分への無用なめっき処理を確実に防止できる。
Second Correction According to the invention of claim 3 , in addition to having the same effects as those of the inventions of claims 1 and 2 , it is possible to select an electrode nozzle in accordance with the size of the plating required portion. It is much easier and can reliably prevent unnecessary plating treatment on unnecessary parts.

(第1の実施の形態)
ノンマスキング方式の本連続部分めっき装置20は、図1〜図4に示す如く、図1に示す垂直状態の基軸線(Z軸線)を中心に回転可能な回転体30と、複数の電極ノズル53を有し給電済めっき液Qfを径方向に噴射可能に形成された静止型の電極構造体50とを設け、電極ノズルの配設角度範囲が回転体の搬送ガイド面32に被処理物が係合している角度範囲よりも小さく選択され、回転体が基軸線を中心とする静止構造体(中空円筒体24)の外側に回転可能に装着されかつ電極構造体が中空円筒体の内側に嵌装された軸部材27の上方部に着脱可能に取付けられるとともに軸部材の基軸線方向の位置調整により回転体と電極構造体との基軸線方向の相対位置を調整可能に形成され、調整後の相対位置において各電極ノズルから噴射されためっき液Wを連続搬送中のめっき必要部分に吹き付けることができる状態に被処理物(ワーク)を保持するワーク位置保持部34設け、各電極ノズル53から噴射されためっき液Qfを連続搬送中の各めっき必要部分1KYに吹き付けて連続部分めっき処理可能なノンマスキング方式構造に形成されている。
(First embodiment)
As shown in FIGS. 1 to 4, the non-masking type continuous partial plating apparatus 20 includes a rotating body 30 that can rotate around a base axis (Z axis) in a vertical state shown in FIG. 1 and a plurality of electrode nozzles 53. And a stationary electrode structure 50 formed to be capable of injecting a fed plating solution Qf in the radial direction, and an arrangement angle range of the electrode nozzle is related to the conveyance guide surface 32 of the rotating body. The rotating body is rotatably mounted outside the stationary structure (hollow cylindrical body 24) centered on the base axis, and the electrode structure is fitted inside the hollow cylindrical body. It is detachably attached to the upper part of the mounted shaft member 27 and is adjusted so that the relative position in the base axis direction of the rotating body and the electrode structure can be adjusted by adjusting the position of the shaft member in the base axis direction. It is injected from the electrode nozzle at a relative position The object to be treated a plating solution W ready to be sprayed in order Kki necessary portion in a continuous conveying the work position holding portion 34 for holding a (work) provided with a plating solution Qf injected from each electrode nozzle 53 It is formed in a non-masking system structure that can be sprayed on each plating-required portion 1KY during continuous conveyance and can be subjected to continuous partial plating.

まず、被処理理物は、図4,図7に示す長手方向(図7では左右方向)に連続する帯状共通部分1Cと長手方向に不連続でかつ幅方向(上下方向)に延びる複数の櫛歯状部分1Kとを有するリードフレーム(ワーク1F)とされている。搬送中のワーク1Fの板厚(縦断面)方向から見た形態を図2に示す。   First, a processed material includes a strip-shaped common portion 1C that is continuous in the longitudinal direction (left and right in FIG. 7) shown in FIGS. 4 and 7 and a plurality of combs that are discontinuous in the longitudinal direction and extend in the width direction (vertical direction). A lead frame (work 1F) having a tooth-like portion 1K is provided. The form seen from the plate | board thickness (longitudinal cross section) direction of the workpiece | work 1F in conveyance is shown in FIG.

図4において、ワーク1Fの櫛歯状部分1Kの先端側(図2で上方側、図4では下方側)には、水平部1H(めっき不必要部分1HN)を介して外側に脹らむ凹形状湾曲部1M(めっき不必要部分1MN)が形成されかつ折り返した後の頂き部分1Tが形成されている。櫛歯状部分1Kの選択された一部分がめっき必要部分(1KYおよび1TY)である。   In FIG. 4, a concave curve that expands outward via a horizontal portion 1H (a plating unnecessary portion 1HN) on the tip side (upper side in FIG. 2, lower side in FIG. 4) of the comb-like portion 1K of the work 1F. Part 1M (plating-unnecessary part 1MN) is formed and a part 1T after turning is formed. A selected portion of the comb-like portion 1K is a portion requiring plating (1KY and 1TY).

すなわち、図2に示す状態では、縦断面が円形状の噴射めっき液Qfを吹き付け可能にセットされた櫛歯状部分1Kの内面側がめっき必要部分1KYであり、これを除く他の部分1H(1HN),1M(1MN),1T(1TY)および帯状共通部分1Cがめっき不必要部分である。頂き部分1Tをめっき必要部分(1TY)とする場合には、搬送ガイド面32に対するセット姿勢を変える。あるいは部分めっき用冶具(20)自体を交換する。   That is, in the state shown in FIG. 2, the inner surface side of the comb-like portion 1K set so as to be sprayable with the spray plating solution Qf having a circular longitudinal section is the plating-necessary portion 1KY, and other portions 1H (1HN) other than this are necessary. ), 1M (1MN), 1T (1TY) and the belt-like common portion 1C are unnecessary portions for plating. In the case where the received portion 1T is to be a portion requiring plating (1TY), the setting posture with respect to the conveyance guide surface 32 is changed. Alternatively, the partial plating jig (20) itself is replaced.

因みに、図4に示した各寸法は、非常に小さい。すなわち、リード付き端子部材(1K)の全長Lvが2mmで、リード部(1KY)の長Luが1mm、バリヤ部(1MN)の長Lmが0.5mmかつ突出長Lwが1.5mm、端子部(1TY)の長Ldが0.5mmである。   Incidentally, each dimension shown in FIG. 4 is very small. That is, the total length Lv of the lead-equipped terminal member (1K) is 2 mm, the length Lu of the lead portion (1KY) is 1 mm, the length Lm of the barrier portion (1MN) is 0.5 mm, and the protruding length Lw is 1.5 mm. The length Ld of (1TY) is 0.5 mm.

このように、一枚帯板を予めプレス加工して作成されたワーク1Fの中の長手方向に一定ピッチで離隔された不連続状態でかつ幅方向(上下方向)に延びる複数の櫛歯状部分1K(1KY)に部分めっき処理を施すのであるから、例えば図6に示す従来例の場合(長手方向に連続する幅狭ストライプ状のめっき必要部分1RYに部分めっきした後に、プレス加工して図8に示すように個別製品化する。)に比較すれば、生産能率を大幅に向上できかつプレス加工時のバリや皮膜剥が発生しないから皮膜品質を良好に維持できるわけである。   In this way, a plurality of comb-like portions extending in the width direction (vertical direction) in a discontinuous state spaced apart at a constant pitch in the longitudinal direction in the workpiece 1F created by pressing a single strip in advance. Since partial plating treatment is performed on 1K (1KY), for example, in the case of the conventional example shown in FIG. 6 (after partial plating is performed on a narrow stripe-like plating-required portion 1RY continuous in the longitudinal direction, press working is performed, and FIG. Compared to the case of individual products as shown in Fig. 4, the production efficiency can be greatly improved, and burrs and film peeling during press working do not occur, and the film quality can be maintained well.

なお、ワーク1Fに全体としてニッケルめっきが施されかつめっき必要部分への部分めっきは、金めっきとされている。もとより、部分めっきの種類(金属種類)はこれらに限定されない。   In addition, nickel plating is given to the work 1F as a whole, and the partial plating on the plating-required portion is gold plating. Of course, the type (metal type) of partial plating is not limited to these.

図1において、連続部分めっき処理システム10は、この実施の形態の場合は、4台の連続部分めっき装置20をメインタンク11内に組込んだ構成とされ、各連続部分めっき装置20A〜20Dを丁度部分めっき用ヘッド乃至部分めっき用冶具(20)として活用する例である。   In FIG. 1, in the case of this embodiment, the continuous partial plating processing system 10 is configured such that four continuous partial plating apparatuses 20 are incorporated in the main tank 11, and each of the continuous partial plating apparatuses 20A to 20D is installed. It is just an example utilized as a head for partial plating thru | or a jig for partial plating (20).

ワーク1Fは、メインタンク11内に配設されたガイドローラー71を含む連続搬送手段70により、ワーク搬送(X)方向に連続搬送される。このX方向に、上流側タンク12Uとメインタンク11と洗浄タンク14と下流側タンク12Dとが、この順で列配されている。   The workpiece 1 </ b> F is continuously conveyed in the workpiece conveyance (X) direction by continuous conveyance means 70 including guide rollers 71 disposed in the main tank 11. The upstream tank 12U, the main tank 11, the cleaning tank 14, and the downstream tank 12D are arranged in this order in the X direction.

上流側タンク12Uおよび下流側タンク12Dには、連続給電手段90の一部を構成する給電ローラー91が配設されている。この給電ローラー91はめっき電源装置(図示省略)の陰極端子に接続され、めっき電源装置(図示省略)の陽極端子は図2に示す電極構造体50に接続されている。かくして、連続搬送中のワーク1F(1C)に給電(例えば、1.5A/dm)することができる。 In the upstream tank 12U and the downstream tank 12D, a power feeding roller 91 that constitutes a part of the continuous power feeding means 90 is disposed. The feeding roller 91 is connected to a cathode terminal of a plating power supply device (not shown), and an anode terminal of the plating power supply device (not shown) is connected to the electrode structure 50 shown in FIG. Thus, it is possible to supply power (for example, 1.5 A / dm 2 ) to the workpiece 1F (1C) during continuous conveyance.

メインタンク11内には複数の液切り手段16が設けられ、洗浄タンク14内にはワーク洗浄手段が設けられている。   A plurality of liquid draining means 16 are provided in the main tank 11, and a work cleaning means is provided in the cleaning tank 14.

連続搬送手段70は搬送ローラー(図示省略)が帯状共通部分1Cを付勢してワーク1Fを設定搬送速度(例えば、2m/sec)でX方向に連続搬送する。ワーク1Fは、メインタンク11内の連続部分めっき装置20A〜20Dを通過する間に部分めっき処理がなされる。   In the continuous conveyance means 70, a conveyance roller (not shown) urges the belt-like common portion 1C to continuously convey the workpiece 1F in the X direction at a set conveyance speed (for example, 2 m / sec). The workpiece 1F is subjected to partial plating while passing through the continuous partial plating apparatuses 20A to 20D in the main tank 11.

連続めっき液供給手段(80)は、図示しない加圧循環ポンプ,配管,弁類を含み、各部分めっき用冶具(20A〜20D)の電極構造体50(めっき液供給口51)に所定圧力に加圧されためっき液を連続供給する。また、メインタンク11や他の各タンク12U,14,12Dから回収しためっき液を再循環使用する。   The continuous plating solution supply means (80) includes a pressure circulation pump, piping and valves (not shown), and applies a predetermined pressure to the electrode structure 50 (plating solution supply port 51) of each of the partial plating jigs (20A to 20D). A pressurized plating solution is continuously supplied. Further, the plating solution recovered from the main tank 11 and each of the other tanks 12U, 14 and 12D is recirculated and used.

なお、連続めっき液供給手段(80)は、各部分めっき用冶具(連続部分めっき装置20A〜20D)毎に形成してもよい。   In addition, you may form a continuous plating solution supply means (80) for every jig for partial plating (continuous partial plating apparatus 20A-20D).

また、1台の部分めっき用冶具(20)を用いて連続部分めっき処理可能な連続部分めっき装置20を構築することもできる。但し、この実施の形態の場合のように、複数の連続部分めっき装置(部分めっき用冶具)20を用いた連続部分めっきシステムとして構築すれば、めっき膜厚を大きくできる。しかも、各連続部分めっき装置20の給電可能容量を過度に大きくする必要がなくかつ小型化も促進できる。装置20の交換が簡単であるから、連続的生産を担保できる。   Moreover, the continuous partial plating apparatus 20 which can perform a continuous partial plating process can also be constructed | assembled using the jig | tool (20) for partial plating. However, if it is constructed as a continuous partial plating system using a plurality of continuous partial plating apparatuses (partial plating jigs) 20 as in this embodiment, the plating film thickness can be increased. In addition, it is not necessary to excessively increase the power supply capacity of each continuous partial plating apparatus 20, and miniaturization can be promoted. Since the replacement of the device 20 is simple, continuous production can be secured.

図2において、回転体30は、全体として中空円筒形状であり、外周面側にワーク1Fと係合して搬送ガイド可能な搬送ガイド面32を有しかつZ軸線を中心にワーク1Fの搬送速度に対応する回転速度で回転可能に形成されている。   In FIG. 2, the rotating body 30 has a hollow cylindrical shape as a whole, has a conveyance guide surface 32 that can be guided by engagement with the workpiece 1F on the outer peripheral surface side, and the conveyance speed of the workpiece 1F around the Z axis. It is formed so as to be rotatable at a rotation speed corresponding to.

この回転体30は、Z軸線を中心としてベース24に固着された中空円筒体24の外側にベアリング25を介して、回転可能に装着されている。一体的な起立円筒部31の外周面が搬送ガイド面32とされ、ワーク1Fの帯状共通部分1Cの内側と係合しワーク1Fの搬送円滑化を図る。   The rotating body 30 is rotatably mounted via a bearing 25 on the outer side of the hollow cylindrical body 24 fixed to the base 24 around the Z axis. The outer peripheral surface of the integral upright cylindrical portion 31 is a conveyance guide surface 32, and engages with the inside of the belt-like common portion 1C of the workpiece 1F to facilitate the conveyance of the workpiece 1F.

搬送ガイド面32の下方に設けられた鍔状部分(上面部分)33は、ワーク1Fの端部を支持することでワーク1Fの上下方向の位置を一定の位置に保持する機能を持つワーク位置保持部34を形成する。すなわち、ワーク位置保持部34は、後記する軸部材27の基軸線方向の位置調整により回転体30と電極構造体50との基軸線方向の相対位置が調整された後に当該相対位置において各電極ノズルから噴射されためっき液Wを連続搬送中のめっき必要部分に吹き付けることができる状態に被処理物(ワーク1F)を保持することができる。 A bowl-shaped portion (upper surface portion) 33 provided below the conveyance guide surface 32 has a function of holding the position of the workpiece 1F in the vertical direction by supporting the end portion of the workpiece 1F. A portion 34 is formed. That is, the work position holding unit 34 adjusts the relative position in the base axis direction of the rotating body 30 and the electrode structure 50 by adjusting the position of the shaft member 27 in the base axis direction, which will be described later. The workpiece (work 1F) can be held in such a state that the plating solution W sprayed from can be sprayed onto the plating-necessary portions during continuous conveyance.

電極構造体50は、図3(横断面図)に示す如く、Z軸線を中心とする仮想円軌跡Rの周方向に離隔配設された複数の小径孔形状の電極ノズル53を有しかつ電気的良導体から形成され、内部(めっき液貯留部52)に供給されためっき液に給電可能かつ給電されためっき液Qfを各電極ノズル53からその径方向に噴射可能である。各電極ノズル53は、仮想円軌跡Rの法線方向に延びる形態である。   As shown in FIG. 3 (transverse cross section), the electrode structure 50 has a plurality of small-diameter hole-shaped electrode nozzles 53 that are spaced apart from each other in the circumferential direction of a virtual circular locus R centering on the Z axis. A plating solution Qf formed from a good conductor and capable of supplying power to the plating solution supplied to the inside (plating solution storage section 52) and supplied with the plating solution Qf can be ejected from each electrode nozzle 53 in the radial direction. Each electrode nozzle 53 is configured to extend in the normal direction of the virtual circular locus R.

なお、電極構造体50は、少なくとも連続めっき液供給手段(80)から図2のめっき液保留部52に供給されためっき液に接触可能な内側面が電気的良導体からなる給電面として形成されていればよい。必ずしも全体を電気的良導体とする必要はない。   In the electrode structure 50, at least the inner side surface that can contact the plating solution supplied from the continuous plating solution supply means (80) to the plating solution holding unit 52 in FIG. 2 is formed as a power supply surface made of a good electrical conductor. Just do it. It is not always necessary that the whole is a good electrical conductor.

一方において、この実施の形態では、各電極ノズル53の内面(小径孔内周全壁面)も重要な給電面を形成する。上下方向に対峙する給電面(平行壁面)から給電する先提案装置の場合に比較して、めっき液の単位量当りの実質給電面積を能率よく増大することができる。このため、給電効率が高くまた大電流給電化によるめっき処理高速化を促進できる。   On the other hand, in this embodiment, the inner surface of each electrode nozzle 53 (the entire inner wall surface of the small-diameter hole) also forms an important power supply surface. Compared to the case of a previously proposed apparatus that supplies power from a power supply surface (parallel wall surface) facing in the vertical direction, the actual power supply area per unit amount of the plating solution can be increased efficiently. For this reason, the power supply efficiency is high, and it is possible to promote the speeding up of the plating process by increasing the current supply.

また、図2に示すノズル形成部56に形成される給電ノズル53の径(ラジアル)方向寸法を大きくすれば、給電能率を向上できる。また、ノズル先端縁54を、搬送ガイド面32に係合されたワーク1Fのめっき必要部分1KYに近づければ近づけるほど、給電効率を向上できる。   Moreover, if the diameter (radial) direction dimension of the power feeding nozzle 53 formed in the nozzle forming portion 56 shown in FIG. 2 is increased, the power feeding efficiency can be improved. Further, the closer the nozzle tip edge 54 is to the plating required portion 1KY of the work 1F engaged with the conveyance guide surface 32, the more the power feeding efficiency can be improved.

電極ノズル53の配設角度範囲θは、図3に示すように、ワーク1Fが回転体30の搬送ガイド面32に係合する角度範囲(図3の場合は、180度を示す。)よりも、小さな角度範囲(θ)に選択決定されている。めっき液の径方向全周一律噴流方式である先提案装置の一つの問題点を解消するためである。つまり、搬送ガイド面32に係合していない場所(図3中の上流側位置PTNUおよび下流側位置PTND)において発生するめっき液の乱流や拡散により、当該位置を通過するワーク1Fの不特定部位(特に、めっき必要部分1KYの上下近傍…1C,1HN・1MN)に不必要で劣悪品質のめつき皮膜が析出されるという現象を、一掃化する。   As shown in FIG. 3, the arrangement angle range θ of the electrode nozzle 53 is larger than the angle range in which the work 1F engages with the conveyance guide surface 32 of the rotating body 30 (in the case of FIG. 3, 180 degrees is shown). The small angle range (θ) is selected and determined. This is in order to solve one problem of the previously proposed apparatus which is a uniform jet method for the entire circumference of the plating solution in the radial direction. That is, the workpiece 1 </ b> F passing through the position is unspecified due to turbulent flow or diffusion of the plating solution generated at a place not engaged with the conveyance guide surface 32 (upstream position PTNU and downstream position PTND in FIG. 3). It eliminates the phenomenon that an unnecessary and poor quality plating film is deposited on the portion (particularly, the upper and lower portions of the plating required portion 1KY... 1C, 1HN · 1MN).

ここに、電極ノズル53の直径および噴出めっき液の流速に関しては、従来部分めっき装置や先提案装置との比較において、大いに異なる固有的で格別な値を選択するのが好ましい。   Here, regarding the diameter of the electrode nozzle 53 and the flow rate of the spray plating solution, it is preferable to select unique and exceptional values that are significantly different from those of the conventional partial plating apparatus and the previously proposed apparatus.

すなわち、各電極ノズル53の直径は0.1mm〜1.0mmの中から選択されている。この実施の形態では、めっき必要部分1KYの大きさ(前後方向寸法および左右方向寸法の大きい方)に対応する寸法(直径…この実施の形態では0.3mm)のめっき液流Qfを生成・噴射させるために0.3mmに選択してある。この意味において、1.0mmを超える直径を選択可能に構築することもできる。   That is, the diameter of each electrode nozzle 53 is selected from 0.1 mm to 1.0 mm. In this embodiment, a plating solution flow Qf having a dimension (diameter: 0.3 mm in this embodiment) corresponding to the size of the necessary plating portion 1KY (the larger one in the front-rear direction dimension and the left-right direction dimension) is generated and jetted. For this purpose, it is selected to be 0.3 mm. In this sense, a diameter exceeding 1.0 mm can be selected.

しかし、1.0mmを超えるような比較的に大きな直径を選択すると、噴射めっき液の液流一直線性が失われ易い。つまり、各電極ノズル53の製作精度上の問題から直径にある範囲(数%)内でのバラツキが生じ得るが、このバラツキによる径の変化分(絶対値)が相対的に大きくなる。つまりは、その絶対値が大きいほど噴射液流の横断面積(直径)のバラツキも大きくなるので、めっき位置精度の保障が難しくなる。他方、0.1mm未満の極小径にすると、ノズル内流路抵抗が非常に大きくなる。当然に、電極構造体50(51,52)への供給めっき液の圧力を過大にしなければならない。この液圧力の超過大化は、装置全体構築上、技術的・経済的に非常な不利を招来する。かくして、各電極ノズル53の直径は0.1mm〜1.0mmの中から選択すべきである。一段と安定した実施のためには、0.3mm〜0.6mmの中から選択することが好ましい。   However, if a relatively large diameter exceeding 1.0 mm is selected, the liquid flow straightness of the spray plating solution tends to be lost. That is, due to a problem in manufacturing accuracy of each electrode nozzle 53, a variation within a certain range (several percent) in the diameter may occur, but a change in diameter (absolute value) due to the variation becomes relatively large. In other words, the larger the absolute value, the greater the variation in the cross-sectional area (diameter) of the jet liquid flow, so that it is difficult to ensure the plating position accuracy. On the other hand, if the diameter is less than 0.1 mm, the flow resistance in the nozzle becomes very large. Naturally, the pressure of the plating solution supplied to the electrode structure 50 (51, 52) must be excessive. This excessive increase in fluid pressure causes a great technical and economic disadvantage in constructing the entire apparatus. Thus, the diameter of each electrode nozzle 53 should be selected from 0.1 mm to 1.0 mm. For more stable implementation, it is preferable to select from 0.3 mm to 0.6 mm.

また、電極ノズル53から噴射されるめっき液Qfの流速は、5m/sec〜20m/secの中から選択されている。噴射めっき液の液流一直線性を担保するためである。5m/sec未満では電極ノズル53の直径過大化の場合と同様な問題が、20m/secを超えると電極ノズル53の直径過小化の場合と同様な問題が生じる虞が強いからである。   The flow rate of the plating solution Qf sprayed from the electrode nozzle 53 is selected from 5 m / sec to 20 m / sec. This is to ensure the liquid flow straightness of the spray plating solution. This is because the problem similar to that in the case where the diameter of the electrode nozzle 53 is excessively large is less than 5 m / sec, and the problem similar to that in the case where the diameter of the electrode nozzle 53 is excessively small is likely to exceed 20 m / sec.

なお、運用上の実際においては、電極ノズル53の直径,めっき液の種類・粘度やワーク1Fの形態・剛性等との関係においても、見直しつつ最適値を決定すべきである。この実施の形態では、電極ノズル53の直径を0.3mmに選択した場合には10±5m/secにすることで良好な結果を得ることができた。   In practice, the optimum value should be determined while reviewing the relationship between the diameter of the electrode nozzle 53, the type / viscosity of the plating solution, the form / rigidity of the workpiece 1F, and the like. In this embodiment, when the diameter of the electrode nozzle 53 is selected to be 0.3 mm, good results can be obtained by setting it to 10 ± 5 m / sec.

回転体30および電極構造体50のZ軸線方向の相対位置は、各電極ノズル53から噴射されためっき液Qfが連続搬送中の各めっき必要部分1KYに吹き付けることができる状態として保持される。この実施の形態では、電極構造体50を中空円筒体24の内側に嵌装された軸部材27の上方部に取付けられ、この軸部材27のZ軸線方向の位置調整により回転体30と電極構造体50とのZ軸線方向の相対位置を調整可能に形成されている。電極構造体50の電極ノズル53と回転体30に搬送ガイドされためっき必要部分1KY(ワーク1F)との相対位置を容易かつ確実に行える。 The relative positions of the rotating body 30 and the electrode structure 50 in the Z-axis direction are held in such a state that the plating solution Qf sprayed from each electrode nozzle 53 can be sprayed to each plating required portion 1KY that is being continuously conveyed. In this embodiment, the electrode structure 50 is attached to the upper part of the shaft member 27 fitted inside the hollow cylindrical body 24, and the rotating member 30 and the electrode structure are adjusted by adjusting the position of the shaft member 27 in the Z-axis direction. The position relative to the body 50 in the Z-axis direction can be adjusted. The relative position between the electrode nozzle 53 of the electrode structure 50 and the plating required portion 1KY (work 1F) guided by the rotating body 30 can be easily and reliably performed.

中空円筒体24および軸部材27の双方が、可動構造体(回転体30)と異なる静止構造体であるから、例えば中空円筒体24の位置に対する軸部材27の位置を上下方向にずらせて固定することは簡単で、手段の具現化も極めて簡単である。例えば、軸部材27に設けた上下方向の設置位置が異なる複数の横穴の中から選択した1つの横穴に、中空円筒体24側のピン部材を挿入する構造とすればよい。   Since both the hollow cylindrical body 24 and the shaft member 27 are stationary structures different from the movable structure (rotating body 30), for example, the position of the shaft member 27 with respect to the position of the hollow cylindrical body 24 is shifted in the vertical direction and fixed. It is easy and the implementation of the means is very simple. For example, the structure may be such that the pin member on the hollow cylindrical body 24 side is inserted into one horizontal hole selected from a plurality of horizontal holes provided in the shaft member 27 in different vertical installation positions.

また、電極構造体50は、軸部材27に着脱可能である。この実施の形態では、図2に示すボルト29の緊締弛緩により着脱できる。電極ノズル53の仕様等が異なる別の電極構造体50を簡単に交換することができる。つまり、装着済み電極構造体50と仕様が異なる電極構造体50との交換が容易である。この点からも、ワークの種類・形態やめっき必要部分の大きさ等に対する適応性が広い。 Further, the electrode structure 50 can be attached to and detached from the shaft member 27. In this embodiment, it can be attached and detached by tightening and loosening the bolt 29 shown in FIG. Another electrode structure 50 having a different specification or the like of the electrode nozzle 53 can be easily replaced. That is, it is easy to replace the mounted electrode structure 50 with an electrode structure 50 having different specifications. From this point of view as well, the applicability is wide with respect to the type and form of the workpiece and the size of the necessary plating part.

各電極ノズル53から噴射された給電済めっき液Qfは、図2のめっき必要部分1KYに吹き付けられ、部分めっき処理を行なう。その後に、図7に示す櫛歯状部分1Kの間(左右方向の隙間)を通過して進み、落下かつ流動してメインタンク11に回収される。その後に、再循環利用される。   The fed plating solution Qf sprayed from each electrode nozzle 53 is sprayed to the plating-required portion 1KY in FIG. 2 to perform a partial plating process. After that, it passes through the comb-like portion 1K shown in FIG. 7 (a gap in the left-right direction), falls, flows and is collected in the main tank 11. After that, it is recycled.

電極構造体50の上方側には、下方側の回転体30に対応する形態の静止構造物(カバー部材36)が設けられている。上方側から回転体30へミス接触することによる危険性を未然排除する。さらに、この実施の形態では、回転体30の起立円筒部31に対応する位置に垂下円筒部37を設け、この下方先端を補助電極として利用可能に形成してある。   On the upper side of the electrode structure 50, a stationary structure (cover member 36) having a form corresponding to the rotating body 30 on the lower side is provided. This eliminates the danger of miscontacting the rotating body 30 from above. Furthermore, in this embodiment, a hanging cylindrical portion 37 is provided at a position corresponding to the rising cylindrical portion 31 of the rotating body 30, and the lower tip is formed so as to be used as an auxiliary electrode.

しかして、この第1の実施の形態に係る垂直状態の基軸線を中心に回転可能な回転体30と、複数の電極ノズル53を有し給電済めっき液Qfを径方向に噴射可能に形成された静止型電極構造体50とを設け、電極ノズルの配設角度範囲が回転体の搬送ガイド面32に被処理物が係合している角度範囲よりも小さく選択され、回転体が基軸線を中心とする中空円筒体24の外側に回転可能に装着されかつ電極構造体が中空円筒体の内側に嵌装された軸部材27の上方部に着脱可能に取付けられるとともに軸部材の基軸線方向の位置調整により回転体と電極構造体との基軸線方向の相対位置を調整可能に形成され、調整後の相対位置において各電極ノズルから噴射されためっき液Wを連続搬送中のめっき必要部分に吹き付けることができる状態に被処理物(ワーク)を保持するワーク位置保持部34を設けたノンマスキング方式連続部分めっき処理装置20であるから、高位置精度な部分めっき処理を確実かつ安定して行えるとともに、給電効率および生産能率が高くかつ装置小型化を促進できる。さらに静止した電極ノズルと連続搬送中のめっき必要部分との相対位置を容易かつ確実に行える。しかも、装着済み電極構造体と仕様が異なる電極構造体との交換が容易である。 Thus, the rotating body 30 that can rotate around the base axis in the vertical state according to the first embodiment and the plurality of electrode nozzles 53 are formed so that the fed plating solution Qf can be ejected in the radial direction. The electrode nozzle arrangement angle range is selected to be smaller than the angular range in which the object to be processed is engaged with the conveyance guide surface 32 of the rotating body, and the rotating body has a base axis. The electrode structure is rotatably attached to the outer side of the hollow cylinder 24 as the center and the electrode structure is detachably attached to the upper part of the shaft member 27 fitted on the inner side of the hollow cylinder. By adjusting the position, the relative position of the rotating body and the electrode structure in the base axis direction can be adjusted, and the plating solution W sprayed from each electrode nozzle is sprayed onto the plating-required portion during continuous conveyance at the adjusted relative position. State that can Since a continuous partial plating apparatus 20 of the non masking method in which a work position holding portion 34 for holding the object to be processed (work), along with a high positional precision parts plating performed reliably and stably, power supply efficiency and Productivity is high and downsizing of the device can be promoted. Furthermore, the relative position of the stationary electrode nozzle and the necessary plating part during continuous conveyance can be easily and reliably performed. Moreover, it is easy to replace the mounted electrode structure with an electrode structure having different specifications.

また、電極ノズル53の直径がめっき必要部分1KYの大きさに応じた0.3mmに選択されているので、めっき不必要部分(1MN等)への無用なめっき処理を確実に防止できる。しかも、噴射めっき液の流速を高速(10±5m/sec)に選択してあるから、めっき必要部分1KYに一段と正確に吹き付けることができかつその後に櫛歯状部分間の空間(隙間)を通して外側に円滑に排出できる。電極構造体50およびその周辺にめっき液が付着することによる汚れが生じることがない。   Moreover, since the diameter of the electrode nozzle 53 is selected to be 0.3 mm according to the size of the plating required portion 1KY, it is possible to reliably prevent unnecessary plating treatment on the plating unnecessary portions (1MN, etc.). In addition, since the flow rate of the spray plating solution is selected to be high speed (10 ± 5 m / sec), it is possible to spray the plating required portion 1KY more accurately and then through the space (gap) between the comb-like portions to the outside. Can be discharged smoothly. There is no contamination due to the plating solution adhering to and around the electrode structure 50.

さらに、回転体30の全周(360度)に設けられたスリット部からめっき液を噴流する先提案装置の場合の問題点(全周に渡って水平であるべき円盤形状液薄膜に、上下方向やねじれ方向の乱れ・拡散が生じる。)を一掃できるから、バラツキのない高品質(高さ位置方向のめっき精度が高い。)で良質で均一な皮膜を析出させることができる。   Further, there is a problem in the case of the previously proposed apparatus in which the plating solution is jetted from the slit portion provided on the entire circumference (360 degrees) of the rotating body 30 (in the vertical direction on the disk-shaped liquid thin film that should be horizontal over the entire circumference). And turbulence / diffusion in the torsional direction can be eliminated), so that a high-quality and uniform film can be deposited with high quality without variation (high plating accuracy in the height position direction).

さらに、回転体30の外周面(32)に係合状態になる以前およびめっき処理後の非係合状態となった以降の一定期間内にワーク1Fにめっき液が付着(接触)するという先提案装置の問題点(バラツキが激しくかつ低品質で無用なめっき皮膜が析出される現象が発生する。)を一掃化することができる。   Further, the prior proposal that the plating solution adheres (contacts) to the workpiece 1F within a certain period of time before being engaged with the outer peripheral surface (32) of the rotating body 30 and after being disengaged after the plating process. It is possible to eliminate the problem of the apparatus (a phenomenon in which a highly uneven and low quality and unnecessary plating film is deposited) can be eliminated.

さらにまた、めっき液を全周方向に連続する1つのノズル部から径方向全周に一律的に噴流させる構造(先提案装置)の場合に比較して、めっき液の単位量当りの給電面積を簡単に増大できるから、給電能率を大幅に向上でき、生産高速化にも有益である。   Furthermore, compared to the case where the plating solution is uniformly jetted from one nozzle part continuous in the entire circumferential direction to the entire circumference in the radial direction (the previously proposed device), the power supply area per unit amount of the plating solution is reduced. Since it can be increased easily, the power supply efficiency can be greatly improved, and it is also beneficial for speeding up production.

さらにまた、電極構造体50が先提案装置(回転体とともに同期回転する電極構造)の回転型とは相異する静止型に形成されているから、回転体30の一段の回転高速化による大幅な生産性向上を期待できる。装置小型化も促進できる。   Furthermore, since the electrode structure 50 is formed in a stationary type that is different from the rotary type of the previously proposed device (the electrode structure that rotates synchronously with the rotary body), the rotation speed of the rotary body 30 is greatly increased by one stage. Productivity improvement can be expected. The downsizing of the device can be promoted.

(第2の実施の形態)
この第2の実施形態は、図5に示される。この実施の形態に連続部分めっき装置(20)の基本的構成・機能は第1の実施の形態の場合(図1〜図4)と同様とされているが、回転体30をワーク形態に対応させた構造に形成してある。
(Second Embodiment)
This second embodiment is shown in FIG. In this embodiment, the basic configuration and function of the continuous partial plating apparatus (20) are the same as those in the case of the first embodiment (FIGS. 1 to 4), but the rotating body 30 corresponds to the work form. It is formed in the structure made.

ワーク1Fは、側面形状(1F…1C、1K)が図7に示す形状で、板厚方向の形状が図8(C)に示す形状(1A)である。なお、図8(C)では、めっき必要部分1DY,めっき不必要部分1MN,めっき必要部分1UYの順とされているが、この実施の形態の場合は、図5に示すようにめっき不必要部分1DN,めっき必要部分1MY,めっき不必要部分1UNの順であるものとする。   The workpiece 1F has a side shape (1F... 1C, 1K) as shown in FIG. 7, and a shape in the plate thickness direction is a shape (1A) as shown in FIG. In FIG. 8C, the plating required portion 1DY, the plating unnecessary portion 1MN, and the plating required portion 1UY are arranged in this order. In this embodiment, as shown in FIG. It is assumed that the order is 1DN, plating-necessary portion 1MY, and plating-unnecessary portion 1UN.

図5において、回転体30は、電極構造体50を収容可能な収容空間39Sと,この収容空間39S内に収容された電極構造体50の電極ノズル53から連続搬送中のめっき必要部分1MYに向けて噴射されるめっき液Qfを流通可能なめっき液流路39Hとを有し、搬送ガイド面32がZ軸線方向においてめっき液流路39Hを挟む搬送上ガイド面32Uと搬送下ガイド面32Dとから形成されている。   In FIG. 5, the rotating body 30 is directed from the accommodation space 39 </ b> S capable of accommodating the electrode structure 50 and the electrode-needed portion 53 of the electrode structure 50 accommodated in the accommodation space 39 </ b> S toward the plating-necessary portion 1 </ b> MY being continuously conveyed. A plating solution channel 39H through which the plating solution Qf sprayed can be circulated, and the conveyance guide surface 32 includes a conveyance upper guide surface 32U and a conveyance lower guide surface 32D sandwiching the plating solution channel 39H in the Z-axis direction. Is formed.

回転体30は、この実施の形態の場合は、上下1対の回転体30U,30Dの組合わせとされ、いずれも上下の中空円筒部24U,24Dにベアリング25U,25Dを介して回転可能に装着されている。なお、上方の中空円筒部24Uの中空部はめっき液供給口51として利用される。   In this embodiment, the rotating body 30 is a combination of a pair of upper and lower rotating bodies 30U and 30D, both of which are rotatably mounted on the upper and lower hollow cylindrical portions 24U and 24D via bearings 25U and 25D. Has been. The hollow portion of the upper hollow cylindrical portion 24U is used as the plating solution supply port 51.

かくして、ワーク1Fのめっき必要部分1MYを上下に挟むめっき不必要部分1DN,1UNを対応する搬送ガイド面32U,32Dに係合させられる。つまり、ワーク(被処理物)の幅方向の各端部分を当該各搬送ガイド面に当接できるから、ワーク1Fの姿勢を一段と正しくかつ安定した連続搬送ができる。長い櫛歯状部分1Kを持つワーク1Fに対しては、一段と有効である。 Thus, the plating unnecessary portions 1DN and 1UN sandwiching the plating required portion 1MY of the workpiece 1F up and down are engaged with the corresponding conveyance guide surfaces 32U and 32D . That is, since each end portion in the width direction of the workpiece (object to be processed) can be brought into contact with each conveyance guide surface, the posture of the workpiece 1F can be more accurately and stably continuously conveyed. It is more effective for the work 1F having the long comb-like portion 1K.

もとより、第1の実施の形態の場合と同様に、高位置精度な部分めっき処理を確実かつ安定して行えるとともに、給電効率および生産能率が高くかつ装置小型化を促進できる。   Of course, as in the case of the first embodiment, the partial plating process with high positional accuracy can be performed reliably and stably, the power supply efficiency and the production efficiency are high, and the downsizing of the apparatus can be promoted.

本発明は、長手方向に連続する帯状共通部分と不連続な複数の櫛歯状部分とを有するプレス加工後のワーク(例えば、リードフレーム等)にノンマスキングで部分めっき処理を施す場合に極めて有用である。   INDUSTRIAL APPLICABILITY The present invention is extremely useful when a partial plating process is performed without masking on a workpiece after pressing (for example, a lead frame) having a belt-like common portion continuous in the longitudinal direction and a plurality of discontinuous comb-like portions. It is.

本発明の第1の実施の形態に係る連続部分めっきシステムの全体構成を説明するための平面図である。It is a top view for demonstrating the whole structure of the continuous partial plating system which concerns on the 1st Embodiment of this invention. 同じく、連続部分めっき装置の要部を説明するための縦断面図である。Similarly, it is a longitudinal sectional view for explaining the main part of the continuous partial plating apparatus. 同じく、電極構造体および電極ノズルを説明するための図2の矢視線A−Aに基く横断面図である。Similarly, it is a cross-sectional view based on the arrow line AA in FIG. 2 for explaining the electrode structure and the electrode nozzle. ワークのめっき必要部分およびめっき不必要部分を説明するための図である。It is a figure for demonstrating the plating necessity part and plating unnecessary part of a workpiece | work. 本発明の第2の実施の形態に係る連続部分めっき装置の要部を説明するための縦断面図である。It is a longitudinal cross-sectional view for demonstrating the principal part of the continuous partial plating apparatus which concerns on the 2nd Embodiment of this invention. 連続形状の被処理物(ワーク)を説明するための図である。It is a figure for demonstrating the to-be-processed object (work) of a continuous shape. 櫛歯状部を有する不連続形状被処理物(ワーク)を説明するための図である。It is a figure for demonstrating the discontinuous shape to-be-processed object (workpiece | work) which has a comb-tooth shaped part. ワークのめっき必要部分およびめっき不必要部分の各例示を説明するための図である。It is a figure for demonstrating each illustration of the plating required part of a workpiece | work, and a plating unnecessary part.

符号の説明Explanation of symbols

1 ワーク(被処理物)
1C 帯状共通部分
1K 櫛歯状部分
N めっき不必要部分
Y めっき必要部分
10 連続部分めっき処理システム
11 メインタンク
20 連続部分めっき装置
24 中空円筒体
27 軸部材
30 回転体
32 搬送ガイド面(外周面)
32U 搬送上ガイド面
32D 搬送下ガイド面
34 ワーク位置保持部
39H めっき液流路
50 電極構造体
53 電極ノズル
54 ノズル先端縁
70 連続搬送手段
80 連続めっき液供給手段
90 連続給電手段
91 給電ローラー(陰極電極)
Z 縦軸線(基軸線)
1 Workpiece (object to be processed)
1C Belt-like common part 1K Comb-like part N Plating unnecessary part Y Plating necessary part 10 Continuous partial plating system 11 Main tank 20 Continuous partial plating apparatus 24 Hollow cylindrical body 27 Shaft member 30 Rotating body 32 Conveying guide surface (outer peripheral surface)
32U Transport upper guide surface 32D Transport lower guide surface 34 Work position holder
39H plating solution flow path 50 Electrode structure 53 Electrode nozzle 54 Nozzle tip edge 70 Continuous conveyance means 80 Continuous plating solution supply means 90 Continuous power supply means 91 Power supply roller (cathode electrode)
Z Vertical axis (base line)

Claims (3)

長手方向に連続する帯状共通部分と長手方向に不連続でかつ幅方向に延びる複数の櫛歯状部分とを有する被処理物を連続搬送しつつ櫛歯状部分のめっき必要部分に連続してめっき処理を施すためのノンマスキング方式の連続部分めっき装置であって、
外周面側に前記被処理物と係合して搬送ガイド可能な搬送ガイド面が形成されかつ垂直状態の基軸線を中心に前記被処理物の搬送速度に対応する回転速度で回転可能な回転体と、
該基軸線を中心とする仮想円軌跡の周方向に離隔配設された複数の小径孔形状の電極ノズルを有するとともに内部に供給されためっき液に給電可能かつ給電されためっき液を各電極ノズルから径方向に噴射可能に形成された円筒形状で静止状態の電極構造体とを設け、
電極ノズルの配設角度範囲が回転体の搬送ガイド面に被処理物が係合している角度範囲よりも小さく選択され、
回転体が該基軸線を中心とする静止構造体である中空円筒体の外側に回転可能に装着されかつ電極構造体が中空円筒体の内側に嵌装された軸部材の上方部に着脱可能に取付けられ、この軸部材の基軸線方向の位置調整により回転体と電極構造体との基軸線方向の相対位置を調整可能に形成されるとともに、調整後の相対位置において各電極ノズルから噴射されためっき液Wを連続搬送中の前記めっき必要部分に吹き付けることができる状態に被処理物を保持するワーク位置保持部を設けた、ノンマスキング方式の連続部分めっき装置。
Continuously plating a workpiece having a strip-like common portion continuous in the longitudinal direction and a plurality of comb-like portions discontinuous in the longitudinal direction and extending in the width direction while continuously plating the plating-needed portions of the comb-like portion. Non-masking type continuous partial plating equipment for processing,
A rotating body that has a conveying guide surface that can be guided by being engaged with the object to be processed on the outer peripheral surface side, and that can rotate at a rotation speed corresponding to the conveying speed of the object to be processed around a base axis in a vertical state When,
Each electrode nozzle has a plurality of small-diameter-shaped electrode nozzles spaced apart in the circumferential direction of a virtual circular locus centering on the base axis, and can supply power to the plating solution supplied to the inside and supply the supplied plating solution to each electrode nozzle. A stationary electrode structure with a cylindrical shape formed so as to be capable of jetting in the radial direction from
The arrangement angle range of the electrode nozzle is selected to be smaller than the angle range in which the workpiece is engaged with the conveyance guide surface of the rotating body,
The rotating body is rotatably mounted on the outer side of the hollow cylindrical body that is a stationary structure centered on the base axis, and the electrode structure is detachably attached to the upper part of the shaft member fitted on the inner side of the hollow cylindrical body. It is attached, and by adjusting the position of the shaft member in the base axis direction, the relative position in the base axis direction of the rotating body and the electrode structure can be adjusted, and sprayed from each electrode nozzle at the adjusted relative position . provided work position holding unit for holding an object to be processed in a state capable of spraying a plating solution W in the plating necessary parts during continuous conveyance, the continuous partial plating system of the non-masking scheme.
請求項1において、
前記回転体が、前記電極構造体を収容可能な収容空間と,この収容空間内に収容された前記電極構造体の電極ノズルから連続搬送中のめっき必要部分に向けて噴射されるめっき液を流通可能なめっき液流路とを有し、前記搬送ガイド面が基軸線方向においてめっき液流路を挟む搬送上ガイド面と搬送下ガイド面とから形成されている、ノンマスキング方式の連続部分めっき装置。
In claim 1,
The rotating body circulates a receiving space in which the electrode structure can be stored, and a plating solution sprayed from the electrode nozzle of the electrode structure stored in the receiving space toward a plating necessary portion during continuous conveyance A non-masking type continuous partial plating apparatus having a possible plating solution flow path, wherein the conveyance guide surface is formed of a conveyance upper guide surface and a conveyance lower guide surface that sandwich the plating solution flow channel in the base axis direction. .
請求項1または2のいずれかにおいて、
前記電極ノズルの直径が0.1mm〜1.0mmの中から選択されている、ノンマスキング方式の連続部分めっき装置。
In either claim 1 or 2,
A non-masking type continuous partial plating apparatus in which the diameter of the electrode nozzle is selected from 0.1 mm to 1.0 mm .
JP2005037367A 2005-02-15 2005-02-15 Non-masking continuous partial plating equipment Expired - Fee Related JP4587834B2 (en)

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JP4922849B2 (en) 2007-07-04 2012-04-25 三友セミコンエンジニアリング株式会社 Electrode structure and continuous partial plating apparatus
JP5412198B2 (en) * 2009-07-15 2014-02-12 三友セミコンエンジニアリング株式会社 Continuous partial plating apparatus and continuous partial plating method using the same
JP5364674B2 (en) * 2010-10-20 2013-12-11 三友セミコンエンジニアリング株式会社 Continuous partial plating apparatus and continuous partial plating method using the same
KR101362265B1 (en) 2012-11-20 2014-02-14 대성하이피(주) By way of drum rotation portion of the stereoscopic connector pin electroplating unit
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JPH0570987A (en) * 1991-06-07 1993-03-23 Fujitsu Ltd Partial plating method and plating device thereof
JPH11293488A (en) * 1998-04-10 1999-10-26 Nec Tohoku Ltd Partial plating method
JPH11293489A (en) * 1998-04-10 1999-10-26 Hitachi Cable Ltd Both side continuous partial plating treatment apparatus for lead frame

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS61124594A (en) * 1984-11-17 1986-06-12 Electroplating Eng Of Japan Co Partial plating device of band-shaped plating object
JPH0570987A (en) * 1991-06-07 1993-03-23 Fujitsu Ltd Partial plating method and plating device thereof
JPH11293488A (en) * 1998-04-10 1999-10-26 Nec Tohoku Ltd Partial plating method
JPH11293489A (en) * 1998-04-10 1999-10-26 Hitachi Cable Ltd Both side continuous partial plating treatment apparatus for lead frame

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