JP2003306223A - Carrying device and fitting structure of material to be fitted - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrying device having carrying rollers which can be strongly and surely fitted to a carrying shaft for fixation. <P>SOLUTION: This carrying device is provided with the carrying shaft 3 to be driven for rotation and the carrying rollers 4 fixed to the carrying shaft to support a board. The carrying roller is provided with a roller body 23 fitted on the carrying shaft freely to move to support the material to be carried in the peripheral surface thereof, a receiver member 27 formed with a first recessed part 26 to be brought in contact with the peripheral surface of the carrying shaft and integrally provided with the roller body on one side of the roller body, and a fixing member 31 formed with a second recessed part 30 to be brought in contact with the peripheral surface of the carrying shaft and fitted to the receiver member 27 by screws 34 for fixation to pinch the carrying shaft between itself and the receiver member. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device used for transferring an object to be transferred in a predetermined direction and a mounting structure for mounting and fixing an object to be mounted on a shaft.

[0002]

2. Description of the Related Art For example, a circuit pattern is formed on a glass substrate used in a liquid crystal display device as an object to be conveyed. A lithographic process is used to form a circuit pattern on a substrate. In the lithographic process, as is well known, a resist is applied to the substrate, and the resist is irradiated with light through a mask on which a circuit pattern is formed.

Next, a part of the resist which is not irradiated with light or a part which is irradiated with light is removed, a part of the substrate where the resist is removed is etched, and the resist is removed after etching. By repeating this, a circuit pattern is formed on the substrate.

In such a lithographic process, a step of treating the substrate with an etching liquid or a stripping liquid for removing the resist after etching and a treating liquid such as a cleaning liquid for cleaning the substrate after removing the resist is required. Becomes

When the plate surface of the substrate is treated with a treatment liquid, the substrate is conveyed in a predetermined direction by a conveying device and the treatment liquid is supplied to the substrate during the conveyance so that the substrate is treated. There is.

The carrying device has a carrying shaft as a plurality of shafts rotatably supported with their axes parallel to each other. A transport roller as an attached body is provided on each transport shaft. The transport shaft is rotationally driven by the drive source. As a result, the substrate is supported by the outer peripheral surface of the transport roller and is transported in a predetermined direction.

Conventionally, as shown in FIG. 12, the conveying shaft 101 and the conveying roller 102 are formed as separate members.
2 is integrally fixed to the transport shaft 101. That is, the transport roller 102 has a mounting hole 103 through which the transport shaft 101 is inserted. Further, the transport roller 102 is formed with a screw hole 104 having one end opened to the outer peripheral surface and the other end opened to the inner peripheral surface of the mounting hole.

The carrying roller 102 is connected to the carrying shaft 101.
Then, the cap screw 105 is screwed in from the screw hole 104, and the tip end surface thereof is brought into pressure contact with the outer peripheral surface of the transport shaft 101. Thereby, the transport roller 102 is fixed to the transport shaft 101.

[0009]

However, according to the mounting structure in which the conveying roller 102 is fixed to the conveying shaft 101 by the pressing screw 105, when the pressing screw 105 is screwed in, the conveying roller 102 is deformed in the radial direction. Since it is easy, a large tightening force may not be obtained, and the pressing screw 105 is easily loosened.
May not be fixed securely.

The deformation of the carrying roller 102 in the radial direction when the pressing screw 105 is tightened becomes large when the carrying roller 102 is made of resin. Therefore, in order to eliminate the deformation, the carrying roller 102 made of metal or It is inconvenient because the conveyance roller 102 having a metal collar must be used.

Further, if the holding screw 105 is tightly tightened, the central portion of the outer peripheral surface of the conveying roller 2 pressed by the tip surface of the holding screw 5 is dented and the peripheral portion is liable to be deformed and scratched. Therefore, the transport roller 102 may not be able to be pulled out from the transport shaft 101 at the time of replacement due to the deformed scratch.

An object of the present invention is to provide a conveying device in which the conveying roller can be attached to the conveying shaft securely and firmly, and the conveying shaft can be attached without damaging the conveying shaft.

It is an object of the present invention to provide a mounting structure for a mounted body which is capable of mounting the mounted body to the shaft body securely and securely without damaging the shaft body.

[0014]

According to a first aspect of the present invention, there is provided a conveying device including a conveying shaft which is rotationally driven, and a conveying roller which is fixed to the conveying shaft and which supports an object to be conveyed. The transport roller is a roller body that is movably fitted around the transport shaft and supports the transported object by an outer peripheral surface,
A first concave portion that contacts the outer peripheral surface of the transport shaft is formed, and a receiving member that is integrally provided with the roller body on one side surface of the roller body and a second concave portion that contacts the outer peripheral surface of the transport shaft are provided. And a fixing member which is fixed to the receiving member by a screw and holds the conveying shaft between the receiving member and the receiving member.

According to a second aspect of the present invention, at least one of the receiving member and the fixing member is made of metal, and one member made of metal is provided with a screw hole into which the screw is screwed. The transport apparatus according to claim 1, wherein

According to a third aspect of the present invention, the receiving member is formed separately from the roller body, and is removably integrally fixed to the roller body by a screw. On the device.

According to a fourth aspect of the present invention, in the mounting structure for mounting and fixing the mounted body mounted on the shaft body to the shaft body, the first concave portion that contacts the outer peripheral surface of the shaft body is formed. On one side surface of the mounted body, a receiving member integrally provided with the mounted body, and a second concave portion that comes into contact with the outer peripheral surface of the shaft body are formed, and the receiving member is mounted and fixed to the receiving member with a screw. And a fixing member for sandwiching the shaft body with the above.

According to the present invention, since the carrying shaft is sandwiched by the receiving member which is integrally provided with the roller body which constitutes the carrying roller, and the fixing member which is screwed and fixed to the receiving member, the receiving member is fixed. The carrying roller can be firmly fixed to the carrying shaft by the clamping force with the member, and further, the carrying shaft can be fixed without damaging the carrying shaft.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

1 to 5 show a first embodiment of the present invention, and FIG. 1 shows a processing apparatus for processing a substrate W for a liquid crystal display device as an object to be conveyed. The processing apparatus has a chamber 10, and a transfer device 1 is provided in the chamber 10. The transporting device 1 includes transporting shafts 3 (only one is shown) as a plurality of shafts which are arranged in parallel at predetermined intervals with their axes parallel to each other and whose both ends are rotatably supported by bearings 2.

First conveying rollers 4 as attached bodies are provided at both ends of the conveying shaft 3, and a plurality of second conveying rollers as attached bodies are provided between the first conveying rollers 4. 5 are provided at equal intervals. A worm wheel 6 is fitted to one end of each of the transport shafts 3, and a worm gear 8 fitted to a driven shaft 7 is meshed with the worm wheel 6.

A driven pulley 11 is fitted and fixed to the driven shaft 7. The drive source 1 is located near the driven pulley 11.
2 are provided. A drive pulley 13 is fitted on the rotary shaft of the drive source 12. A belt 14 is stretched around the drive pulley 13 and the driven pulley 11.
As a result, when the drive source 12 operates, the belt 1
Since the driven shaft 7 is rotated via 4, the plurality of transport shafts 3 are interlocked with the rotation via the worm gear 8 and the worm wheel 6.

A liquid draining plate 15 is provided at both ends of each transport shaft 3. The draining plate 15 prevents the processing liquid supplied to the substrate W from flowing along the transport shaft 3 to the bearing 2 side.

The lower surface of the substrate W, which is an object to be conveyed, is supported by the first conveying roller 4 and the second conveying roller 5 provided on the conveying shaft 3 so that the substrate W moves from one end to the other end in the chamber 10. Be transported.

A substrate W to be transferred into the chamber 10
As a processing liquid supply device for supplying the processing liquid toward the upper surface of the substrate W, for example, an aqua knife 17 is provided with its longitudinal direction along the width direction intersecting the transport direction of the substrate W. A processing liquid supply pipe 18 is connected to the aqua knife 17, and the processing liquid supplied from the supply pipe 18 is linearly directed toward the upper surface of the substrate W from a slit 19 formed in the lower end along the longitudinal direction. Supplied in the form of. Thereby, the upper surface of the substrate W can be processed.

Both ends of the aqua knife 17 are supported by the height adjusting mechanism 21 so that the height of the aqua knife 17 with respect to the upper surface of the substrate W can be adjusted. Also,
The treatment liquid supply device may be another supply device such as a shower nozzle.

The first transport roller 4 and the second transport roller 5 are made of synthetic resin having resistance to chemicals or stainless steel, in this embodiment, stainless steel. As shown in FIGS. 2 to 5, it has first and second roller bodies 23 and 24. Each of the roller bodies 23, 24 is provided with mounting holes 23a, 24a whose inner diameter is slightly larger than the outer dimension of the transport shaft 3.

A step portion 25 for engaging and supporting the widthwise end portion of the substrate W is formed on the outer peripheral surface of the first roller body 23, and a semi-cylindrical receiving member 27 is integrally formed on one side surface. Has been done. As a result, the inner peripheral surface of the receiving member 27 is the first concave portion 26 that is a semicircular concave surface. Further, screw holes 28 are formed on both end surfaces of the receiving member 27 in the circumferential direction.

The receiving member 27 is provided with the receiving member 27.
Corresponding to the semi-cylindrical shape, the fixing member 31 formed in the second concave portion 30 having the semicircular inner peripheral surface is attached and fixed. A step portion 32 is formed at both ends of the fixing member 31 in the radial direction, and a pair of insertion holes 33 are formed in the step portion 32 at intervals corresponding to the pair of screw holes 28. That is,
The insertion hole 33 is formed so as to open from the step portion 32 to both end surfaces in the circumferential direction of the fixing member 31.

The first roller body 23 is the transfer shaft 3
Is externally slidably fitted in the mounting hole 23a.
Then, the fixing member 27 is covered on the outer peripheral surface exposed from the receiving member 27 provided on one side surface of the first roller body 23 of the transport shaft 3, and the pair of insertion holes 3 of the fixing member 27 is covered.
3 to the pair of screw holes 28 of the receiving member 27 with screws 34
Screw together.

The circumferential end faces of the receiving member 27 in which the screw holes 28 are formed, and the fixing member 3 fitted on the conveying shaft 3.
The fixing member 31 has a gap 35 shown in FIGS.
The circumferential dimension or the circumferential dimension of the receiving member 27 is set.

As a result, when the screw 34 is tightened, the first recess 26 on the inner surface of the receiving member 27 and the second recess 30 on the inner surface of the fixing member 31 come into pressure contact with the outer peripheral surface of the transport shaft 3. , The transport shaft 3 by these members 27, 31
Is sandwiched, and the first transport roller 4 is fixed to the transport shaft 3.

As shown in FIG. 5, a mounting groove 36 is formed in the second roller body 24 of the second transport roller 5 over the entire length of the outer peripheral surface, and an O-ring 37 is mounted in the mounting groove 36. Has been done. The substrate W is supported by the O-rings 37 of the plurality of transport rollers 5 at a plurality of locations on the lower surface except both ends in the width direction.

Further, a semi-cylindrical receiving member 42 having a first recess 40 is integrally formed on one side surface of the second roller body 24. Screw holes 41 (only one of which is shown) are formed on both end surfaces of the receiving member 42 in the circumferential direction.

A fixing member 46 is fixed to the receiving member 42 with a screw 47. The fixing member 46 has a semi-cylindrical shape having a semi-circular second recess 43, and step portions 44 (only one of which is shown) are formed at both ends in the radial direction. The step portion 44 has an insertion hole 45 for screwing the screw 47 into the screw hole 41.

That is, the first transport roller 4 and the second transport roller 5 have different structures for supporting the substrate W, but both have a structure for fixing the substrate W to the transport shaft 3.
7, 42 and the fixing members 31, 46 are used, and in that respect, they are almost the same.

In this way, the first and second transport rollers 4,
Reference numeral 5 denotes receiving members 27, 42 provided on one side surface of the roller bodies 23, 24, and screws 34, 4 for the receiving members 27, 42.
The conveying shaft 3 is clamped and fixed by the fixing members 31 and 46 which are attached by 7.

Therefore, since the receiving members 27 and 42 and the fixing members 31 and 46 clamp the outer peripheral surface of the transport shaft 3 along the circumferential direction, a large tightening force can be obtained. The transport rollers 4 and 5 can be firmly fixed to the transport shaft 3.

The receiving member 27, 42 is fixed to the fixing member 31,
By tightening and fixing 46 with screws 34 and 47, these members will not be deformed in the radial direction, so that not only a large tightening force can be obtained, but also screws 34 and 47 are difficult to loosen. There is also. That is, although the first and second conveying rollers 4 and 5 are made of metal in this embodiment, even if they are made of synthetic resin, they are prevented from being deformed in the radial expansion direction by the tightening force of the screws 34 and 47. can do.

The conveying rollers 4, 5 can be attached and fixed without pressing the screws 34, 47 to the outer peripheral surface of the conveying shaft 3. Therefore, the outer peripheral surface of the transport shaft 3 is not damaged, and the transport rollers 4 and 5 are prevented from coming off the transport shaft 3.

FIG. 6 shows a second embodiment of the present invention. This embodiment is a modification of the first transport roller 4A. The first transport roller 4A has a first roller body 23A, and a receiving member 27A having an outer shape of a prism is provided on one side surface of the first roller body 23A. A semi-circular first recess 26A having the same curvature as the mounting hole 23a is formed in a portion of the receiving member 27A corresponding to the mounting hole 23a. Through holes 51 are formed in both ends of the receiving member 27A in the thickness direction.

A fixing member 31A is fastened and fixed to the receiving member 27a by a pair of screws 52. The fixing member 31A has a block shape in which a second recess 43A is formed, and has screw holes 53 penetrating in the vertical direction at both ends in the longitudinal direction.

When the first roller body 23A is mounted on the conveying shaft 3, the fixing member 31A is put on the outer peripheral surface of the receiving member 27A on the outer peripheral surface of the conveying shaft 3 exposed from the first recess 26A, and A screw 52 is passed through a pair of insertion holes 51 of the member 27A and screwed into a screw hole 53 of the fixing member 31A.

As a result, similarly to the first embodiment, the carrying shaft 3 can be clamped and fixed by the receiving member 27A and the fixing member 31A, so that the first carrying roller 4A is firmly fixed to the carrying shaft 3. Can be mounted and fixed.

Such a structure is used for the first roller body 23A.
Is effective when made of synthetic resin. That is, the first roller body 23A is made of synthetic resin and the fixing member 31A is made of metal.

As a result, the screw 52 is screwed into the screw hole 53 formed in the fixing member 31A made of metal. Therefore, even if the screw 52 is screwed too strongly, the screw hole 53 It is possible to prevent the threads of the screw from being damaged.

In the second embodiment, the fixing member 31A may also be made of synthetic resin. In that case, the screw 52
If the screw is strongly screwed in, the thread formed on the fixing member 31A may be damaged. In such a case, only the fixing member 31A can be replaced. Therefore, the first roller body 23A is replaced. It is advantageous in cost as compared with the case of having to do it.

The second embodiment can also be applied to the second conveying roller 5 shown in the first embodiment.

7 and 8 show a third embodiment of the present invention. In the third embodiment, the first transport roller 4
B Both the receiving member 63 and the fixing member 64 in which the first concave portion 61 and the second concave portion 62 are formed are the first members.
The transport roller 4B is formed separately from the first roller body 23B. The outer shape of these members 63 and 64 is formed into a substantially block shape.

In the first roller body 23B, a first screw hole 65 penetrating in the thickness direction is formed near the mounting hole 23a into which the transport shaft 3 is inserted. The receiving member 63
A first insertion hole 66 is formed in the thickness direction, and the first screw 67 passed through the insertion hole 66 is attached to the first roller body 2.
By being screwed into the first screw hole 65 of 3B, the receiving member 6
3 is fixed to one side surface of the first roller body 23B.

Second screw holes 68 are formed on both end faces of the first recess 61 of the receiving member 63 on the outer side in the radial direction, and a portion of the fixing member 64 on the outer side of the second recess 62 in the radial direction. A second insertion hole 69 penetrating in the up-down direction is formed in this.

Therefore, the transport shaft 3 is inserted into the mounting hole 23a of the first roller body 23B in which the receiving member 63 is mounted.
Through the second screw hole 70 of the fixing member 64 and the second screw hole 68 through the second screw hole 70 of the fixing member 64.
When it is tightened, the receiving member 63 and the fixing member 64 sandwich the transport shaft 3. Therefore, the first transport roller 4B can be firmly attached and fixed to the transport shaft 3.

According to the first conveying roller 3B having the above structure, as shown in FIG. 8, the first roller 3B is located inward of the first conveying roller 4B of the first conveying shaft 3 by a predetermined dimension in the axial direction. The receiving member 63 and the fixing member 64 attached to the body 23B
Separately, the other receiving member 63 and the fixing member 64 are attached and fixed.

By doing so, when the width dimension of the substrate W transported by the transport device 1 is changed, the first screw 67 fixed to the receiving member 63 of the first roller body 23B.
8, the first roller body 23B is slid inward in the axial direction of the conveying shaft 3 as shown by a chain line in FIG. 8, and the receiving member 63 previously fixed inward in the axial direction from the initial position. The fixing member 64 is fixed to the receiving member 63 by the first screw 67. Thereby, the first
The roller body 23B can be positioned at a position to receive the widthwise end portion of the substrate W whose width dimension is changed.

That is, not only the fixing member 64 but also the receiving member 63 of the first conveying roller 4B are formed separately from the first roller body 23B. Since it can be integrally fixed to any of the side surfaces by the first screw 67, the position of the first roller body 23B can be easily and quickly changed according to the size change of the substrate W.

9 to 11 show a fourth embodiment of the present invention. This embodiment is a modification of the transport shaft.
The transport shaft 3A of this embodiment has a double pipe structure in which an inner pipe 72 made of carbon fiber is inserted into an outer pipe 71 made of synthetic resin having chemical resistance such as vinyl chloride. The inner pipe 72 may be made of stainless steel, but if it is made of carbon fiber, the weight can be reduced. Both openings of the transport shaft 3A are closed by stoppers 73 made of a synthetic resin having chemical resistance such as vinyl chloride.

Both ends of the transport shaft 3A are rotatably supported by bearings 2A on a support member 74 shown in FIG. The bearing 2A is held by the housing 75.
As shown in FIG. 10, the housing 75 has a mounting portion 7
6 and a holding portion 77 having a diameter larger than that of the mounting portion 76 are integrally formed. An outer case 78 that constitutes the bearing 2A is fitted to the holding portion 77, and an inner case 80 is rotatably provided in the outer case 78 via a steel ball 79.

A mounting groove 81 is formed on the upper end surface of the support member 74. The mounting portion 76 fits into the mounting groove 81. Thereby, the housing 75 is attached with the end surface of the holding portion 77 joined to the outer surface of the support member 74.

Both ends of the transport shaft 3A are fitted and inserted into the inner case 80 of the bearing 2A. As a result, both ends of the transport shaft 3 are rotatably supported by the bearing 2A. An inner case retainer 82 is provided at an end of the transport shaft 3A protruding from the inner case 80, and an outer case retainer 83 made of a screw is provided at an end surface of the housing 75. As a result, the transport shaft 3A is held by the pair of bearings 2A so as to be rotatable and not slidable in the axial direction.

A worm wheel 6A as a mounted body is provided at one end of the transport shaft 3A. As shown in FIG. 11, on one side surface of the worm wheel 6A, the first recess 26 is formed on the side surface of the worm wheel 6A, similarly to the transport roller 4 of the first embodiment.
The first receiving member 27 having is formed integrally. A fixing member 31 having a second recess 30 formed therein is attached and fixed to the first receiving member 27 with a screw 34.
That is, even if the outer pipe 71 of the transport shaft 3A is made of synthetic resin, the worm wheel 6A can be used for the transport shaft 3A.
Can be securely attached and fixed to.

A metal short shaft 84 is fitted inside the portion of the transport shaft 3A to which the worm wheel 6A is attached. Thereby, the fixing member 31 and the receiving member 2
Even if the carrier shaft 3A is clamped, the hollow carrier shaft 3A is prevented from being deformed in the radial direction even if the carrier shaft 3A is clamped.

The inner case retainer 82 on the side of the worm wheel 6A has its axial movement fixed by the worm wheel 6A, and the other inner case retainer 82 holds a pair of outer peripheral portions of the conveying shaft 3A. Presser piece 8
The axial movement is fixed by 4. Both ends of the pair of pressing pieces 84 located radially outward of the transport shaft 3A are fixed by screws.

In this way, the holding portion 77 of the housing 75 holding the bearing 2A is joined to the outer surface of the support member 74,
The mounting portion 76 having a diameter smaller than that of the holding portion 77 is attached to the support member
Since the mounting portion 81 is mounted in the mounting groove 81 of No. 4, the holding portion 77 holding the bearing 2A having a larger diameter than the mounting portion 76 is located on the outer surface of the support member 74.

Conventionally, the bearing is housed in a housing having a diameter larger than that of the bearing, a recess is formed around the housing, and the recess is engaged with the peripheral portion of the mounting groove of the holding member to form the bearing. The holding member is attached via the housing.

For this reason, the pitch of the transport shafts, which are supported by the bearings at both ends, cannot be made smaller than the width of the housing.

On the other hand, in this embodiment, the housing 75 is provided with the holding portion 77 for accommodating the bearing 2A and the mounting portion 76 having a diameter smaller than that of the holding portion 77. It is arranged to be mounted in the mounting groove 81. Therefore, the holding portion 77 of the housing 75 is
Since it is possible to make the outer dimensions of the substrate smaller than the outer dimensions of the conventional housing, it is possible to arrange the transport shafts 3A with a smaller pitch along the transport direction of the substrate W accordingly.

In order to provide the transport shaft 2A with chemical resistance and strength, it has a double pipe structure of an outer pipe 71 made of synthetic resin and an inner pipe 72 made of carbon fiber.

If the outer pipe 71 is made of synthetic resin, it becomes difficult to attach and fix the worm wheel 6A to the carrying shaft 3, but as described above, the carrying shaft 3A is formed integrally with the worm wheel 6A. Since the receiving member 27 and the fixing member 31 screwed and fixed to the receiving member 27 sandwich the worm wheel 6A, the worm wheel 6A can be securely attached to the transport shaft 3A without damaging the transport shaft 3A. It will be possible.

The transport shaft 3A is hollow. Therefore, when the transfer shaft 3A is used by being immersed in a liquid such as a processing liquid, the downward bending of the transfer shaft 3A due to its own weight is canceled by the buoyancy force received from the liquid, so that the transfer shaft 3A is not bent. Can be used.

In each of the above embodiments, the first and second recesses formed in the receiving member and the fixing member have a semicircular shape, but these recesses may have a V shape, for example. The point is that the shape is such that when the receiving member is attached and fixed to the fixing member, the conveying shaft can be sandwiched and fixed by these members.

Further, although the O-ring is attached to the outer peripheral surface of the second conveying roller, the O-ring may not be provided and the point is not limited at all.

In each of the above-described embodiments, the carrier roller and the worm wheel are used as the object to be mounted. However, the present invention is applicable to the case where a spur gear, another gear, or a pulley is mounted and fixed to a shaft body such as a carrier shaft. Can be applied.

[0073]

As described above, according to the present invention, the conveying shaft is sandwiched by the receiving member integrally provided with the roller body constituting the conveying roller and the fixing member screwed to the receiving member. did.

Therefore, the conveying roller can be firmly fixed to the conveying shaft by the sandwiching force between the receiving member and the fixing member, and the conveying shaft can be securely fixed without being damaged.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a processing device using a carrying device according to a first embodiment of the present invention.

FIG. 2 is an exploded perspective view of a first transport roller of the transport device.

FIG. 3 is a partially sectional front view of a first transport roller.

FIG. 4 is a side view showing a partial cross section of a first transport roller.

FIG. 5 is a side view in which a part of a second transport roller is cut away.

FIG. 6 is an exploded perspective view of a first conveyance roller according to the second embodiment of the present invention.

FIG. 7 is an exploded perspective view of a first transport roller according to a third embodiment of the present invention.

FIG. 8 is a front view showing an end portion of a transport shaft on which the first transport roller is provided.

FIG. 9 is a sectional view of a carrier shaft mounting structure showing a fourth embodiment of the present invention.

FIG. 10 is a perspective view of a housing in which a bearing is housed.

FIG. 11 is a perspective view of a worm wheel.

FIG. 12 is a cross-sectional view showing a conventional structure for mounting a transport roller on a transport shaft.

[Explanation of symbols]

4 ... First transport roller 5 ... Second transport roller 23 ... First roller body 24 ... Second small roller body 26 ... First recess 27 ... Receiving member 30 ... Second recess 31 ... Fixing member

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3F033 BA01 BA06 BB02 BB14 BC02                       BC07 GA06 GB08 GC01 GC03                       GD01 GE02                 3F049 CA21 LA01 LB01                 5F031 CA05 FA02 FA07 GA53 KA02                       LA13 LA14 MA24 PA16

Claims (4)

[Claims] 1. A transport device comprising: a transport shaft that is rotationally driven; and a transport roller that is fixed to the transport shaft and that supports an object to be transported, wherein the transport roller moves to the transport shaft. A roller body which is fitted as much as possible and supports the conveyed object by the outer peripheral surface, and a first concave portion which comes into contact with the outer peripheral surface of the conveying shaft are formed and provided integrally with the roller body on one side surface of the roller body. A receiving member, and a fixing member that forms a second recess that contacts the outer peripheral surface of the transport shaft, is fixed to the receiving member by a screw, and clamps the transport shaft with the receiving member. A transport device characterized by. 2. At least one of the receiving member and the fixing member is made of metal, and a screw hole into which the screw is screwed is formed in one member made of metal. Item 2. The transport device according to Item 1. 3. The conveying apparatus according to claim 1, wherein the receiving member is formed separately from the roller body and is detachably fixed to the roller body integrally with a screw. 4. A mounting structure for mounting and fixing a mounted body mounted on a shaft body to the shaft body, wherein a first concave portion that contacts an outer peripheral surface of the shaft body is formed on one side surface of the mounted body. The shaft member is sandwiched between the receiving member integrally provided with the mounted member and a second recess which is in contact with the outer peripheral surface of the shaft member and is fixed to the receiving member by a screw. An attachment structure for an object to be attached, comprising: