JP5441515B2 - Work transfer method and jig for surface treatment tank - Google Patents

Work transfer method and jig for surface treatment tank Download PDF

Info

Publication number
JP5441515B2
JP5441515B2 JP2009150001A JP2009150001A JP5441515B2 JP 5441515 B2 JP5441515 B2 JP 5441515B2 JP 2009150001 A JP2009150001 A JP 2009150001A JP 2009150001 A JP2009150001 A JP 2009150001A JP 5441515 B2 JP5441515 B2 JP 5441515B2
Authority
JP
Japan
Prior art keywords
workpiece
conveying
jig
width direction
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009150001A
Other languages
Japanese (ja)
Other versions
JP2011006183A (en
Inventor
富士夫 浅
純司 水本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
C.UYEMURA&CO.,LTD.
Original Assignee
C.UYEMURA&CO.,LTD.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by C.UYEMURA&CO.,LTD. filed Critical C.UYEMURA&CO.,LTD.
Priority to JP2009150001A priority Critical patent/JP5441515B2/en
Publication of JP2011006183A publication Critical patent/JP2011006183A/en
Application granted granted Critical
Publication of JP5441515B2 publication Critical patent/JP5441515B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Description

本発明は、洗浄槽あるいはめっき処理槽等の表面処理槽内で、プリント基板等のワークを、略水平状態で搬送するワーク搬送方法及びその搬送に用いる搬送用治具に関する。   The present invention relates to a work transfer method for transferring a workpiece such as a printed circuit board in a substantially horizontal state in a surface treatment tank such as a cleaning tank or a plating tank, and a transfer jig used for the transfer.

電子機器に用いられているプリント基板等のワークの製造過程では、各種洗浄槽あるいはめっき槽等の表面処理槽が用いられており、ワークは、各表面処理槽内において、各種薬液、洗浄液あるいは水等により、表面処理される。   In the manufacturing process of workpieces such as printed circuit boards used in electronic equipment, surface treatment tanks such as various washing tanks or plating tanks are used. Surface treatment is performed by the above.

上記表面処理槽内でワークを搬送する方法として、上下の搬送ローラで構成される搬送ローラ対により、ワークの幅方向の両端部を挟持し、搬送ローラの回転により、ワークを水平状態で搬送する方法が採用されている。すなわち、ワークを表面処理槽内で水平搬送し、搬送中に、上下のノズルから洗浄液、薬液あるいは水を噴射したり、貯留されているめっき液中を通過させたりする(特許文献1及び2等参照)。   As a method of transporting the workpiece in the surface treatment tank, both ends in the width direction of the workpiece are sandwiched by a pair of transport rollers composed of upper and lower transport rollers, and the workpiece is transported in a horizontal state by rotation of the transport roller. The method is adopted. That is, the work is horizontally transported in the surface treatment tank, and during transport, cleaning liquid, chemical liquid or water is sprayed from the upper and lower nozzles, or the stored plating liquid is passed (Patent Documents 1 and 2, etc.) reference).

特開2008−285323号公報JP 2008-285323 A 特開2008−85119号公報JP 2008-85119 A

電子機器に用いられる昨今のプリント基板等は、極薄化及びフレキシブル化が進んでいるため、ワークの幅方向の両端部を、単に、搬送ローラにより挟持して搬送方向に水平搬送する方法では、噴射される処理液の勢いや、処理液の重みにより、ワークに弛みが生じ、処理液が均一にワーク全面に行き渡らず、表面処理の品質が低下したり、また、左右の搬送ローラ対の挟持圧あるいは摩擦力のばらつきにより、ワークが蛇行し、これによっても、品質が低下するおそれがあった。   Since the recent printed circuit boards used in electronic devices are becoming extremely thin and flexible, the both ends in the width direction of the workpiece are simply sandwiched by the transport rollers and horizontally transported in the transport direction. Due to the momentum of the processing liquid being sprayed and the weight of the processing liquid, the workpiece is slackened, the processing liquid does not spread evenly over the entire surface of the workpiece, the quality of the surface treatment is reduced, and the pair of left and right transport rollers are clamped Due to variations in pressure or frictional force, the workpiece meanders, which may also reduce the quality.

これに対し、前記各先行技術文献に開示された技術では、搬送ローラの軸芯を、搬送方向と直角な幅方向に対して傾斜させることにより、搬送中のワークに対して幅方向の外方への引張力を付与し、これにより、ワークの弛み等を防止するようにしている。   On the other hand, in the technologies disclosed in each of the above prior art documents, the shaft core of the transport roller is inclined with respect to the width direction perpendicular to the transport direction, so that the outer side in the width direction with respect to the workpiece being transported. A tensile force is applied to the workpiece, thereby preventing the workpiece from loosening.

ところが、前記いずれの先行文献の技術においても、ワークの弛み及びワークの蛇行を確実に阻止することは不可能であった。また、搬送ローラ対とワークとの接触面を増加させるために、搬送ローラ対の配置密度を増加させることが考えられるが、部品点数が増えると共に、コストが高くなる。   However, in any of the prior art techniques, it has been impossible to reliably prevent the workpiece from loosening and the workpiece from meandering. Further, in order to increase the contact surface between the conveying roller pair and the workpiece, it is conceivable to increase the arrangement density of the conveying roller pair, but the number of parts increases and the cost increases.

本発明は、上記課題に鑑みて為されたものであり、ワークを、弛みが生じることなく、かつ、蛇行することなく、平面状態で搬送方向に沿って水平搬送することができるようにすることを目的としている。さらに、極薄でフレキシブルなワークであっても、搬送ローラ対の数を増やすことなく、水平搬送できるようにすることも目的としている。   The present invention has been made in view of the above problems, and enables a workpiece to be horizontally transported along a transport direction in a planar state without causing slack and meandering. It is an object. Another object of the present invention is to enable even a very thin and flexible workpiece to be transported horizontally without increasing the number of transport roller pairs.

上記課題を解決するため、本発明は、上下に対向する搬送ローラからなる搬送ローラ対がワーク搬送方向に所定間隔をおいて、複数配設された搬送ローラ装置を、ワーク搬送経路の幅方向の両側に備え、前記各搬送ローラ対のローラ軸芯を、上方から見て、上記幅方向の内方側が搬送方向側にくるように傾斜させ、上記両搬送ローラ装置により、矩形状のワークの幅方向の両端部を上下から把持し、ワークを水平状態で搬送する表面処理槽のワーク搬送方法において、前記ワーク搬送経路の幅方向の両側のうち、少なくとも一方に、ワーク搬送経路と平行に延びる搬送ガイドが敷設され、前記一対の搬送ローラ装置のうち、前記搬送ガイドが配置されている側の搬送ローラ装置のローラ挟持圧を、他方の搬送ローラ装置のローラ挟持圧よりも高く設定し、上記ローラ挟持圧の差によって、ワークを搬送ガイド側に引き寄せると共に、前記搬送ガイドに押し当て、搬送方向にガイドし、
前記ワークの幅方向の両端部を、ワークの搬送方向の全長に亘って搬送用治具により上下から挟持し、前記各搬送用治具をそれぞれ対応する側の搬送ローラ装置の搬送ローラ対で上下から挟持し、前記各搬送ローラ対の回転により、幅方向両側の前記両搬送用治具を介してワークを幅方向の外方に引っ張りつつ、搬送する。
In order to solve the above-described problems, the present invention provides a plurality of transport roller devices each having a transport roller pair composed of transport rollers opposed to each other at a predetermined interval in the work transport direction in the width direction of the work transport path. provided on both sides, the roller axis of each transport roller pair, as viewed from above, the inner side of the width direction is inclined to come to the conveying direction, Ri by the above two conveying rollers device, the rectangular shaped workpieces both end portions gripping the upper and lower width direction of the workpiece transfer method for the surface treatment tank for transporting a workpiece in horizontal state, among the both sides in the width direction of the workpiece conveying path, at least one, work transfer path and Rights A conveyance guide extending in a row is laid, and of the pair of conveyance roller devices, the roller clamping pressure of the conveyance roller device on the side where the conveyance guide is disposed is higher than the roller clamping pressure of the other conveyance roller device. Ku is set, by the difference in the roller nip Ji圧, with drawing the workpiece to the transport guide side, pressed against the conveying guide to guide the conveying direction,
The both ends of the workpiece in the width direction are sandwiched from above and below by the conveying jig over the entire length of the workpiece in the conveying direction, and each conveying jig is vertically moved by the conveying roller pair of the corresponding conveying roller device. The workpiece is conveyed while being pulled outward in the width direction through the both conveying jigs on both sides in the width direction by the rotation of each pair of conveying rollers.

また、本発明は、上記搬送方法に用いる搬送用治具を提供するものである。この搬送用治具は、水平姿勢に配置された矩形状のワークの幅方向の両端部を上下から挟持する搬送用治具であって、上側治具部材と下側治具部材とを備え、両治具部材は、ワークの幅方向の端部の上下面にそれぞれ当接する摩擦係数の高い挟持面を有し、一方の治具部材には、ワーク搬送方向に間隔を置いて配置された突起部が形成され、他方の治具部材には、上記突起部が嵌合する嵌合孔が形成され、上記各突起部は、ワークの幅方向の端縁に当接して前記端縁を搬送方向と平行に位置決めする。 Moreover, this invention provides the jig | tool for conveyance used for the said conveying method. The transport jig, both ends of the width direction of the work of rectangular shape arranged horizontal posture from above and below a conveying jig for clamping, and a upper jig member and the lower jig member The two jig members have a high friction coefficient holding surface that abuts on the upper and lower surfaces of the end portion in the width direction of the workpiece, respectively, and one jig member is disposed at an interval in the workpiece conveyance direction. A projection is formed, and the other jig member is formed with a fitting hole into which the projection is fitted. Each projection contacts the edge in the width direction of the workpiece and conveys the edge. positioning in the direction of the flat row.

上記搬送用治具において、好ましくは、前記突起は円柱状に形成され、前記嵌合孔は円形に形成されている。   In the conveying jig, preferably, the protrusion is formed in a columnar shape, and the fitting hole is formed in a circular shape.

また、別の搬送用治具として、水平姿勢に配置された矩形状のワークの幅方向の両端部を上下から挟持する搬送用治具であって、上側治具部材と下側治具部材とを備え、両治具部材は、ワークの幅方向の端部の上下面にそれぞれ当接する摩擦係数の高い挟持面を有し、一方の治具部材には、該治具部材のワーク搬送方向の全長に亘って延びる筋状の段部が形成され、他方の治具部材には、上記段部が嵌合する嵌合溝が形成され、上記段部は、ワークの幅方向の端縁に当接して前記端縁を搬送方向と平行に位置決めすることを特徴とする搬送用治具を提供する。
Further, as a separate conveying jig, the both ends in the width direction of the work of rectangular shape arranged horizontal posture from above and below a conveying jig for clamping, the upper jig member and the lower jig And both jig members have clamping surfaces with a high coefficient of friction that are in contact with the upper and lower surfaces of the end portion in the width direction of the workpiece, respectively, and one jig member has a workpiece conveyance of the jig member. A stair-like step portion extending over the entire length in the direction is formed, and the other jig member is formed with a fitting groove into which the step portion is fitted, and the step portion is an edge in the width direction of the workpiece. providing transport jig, characterized in that contact with positioning the edge in the conveying direction and flat row to.

(1)本発明による搬送方法によると、ワークの幅方向の両端部を、傾斜姿勢の搬送ローラにより上下から挟持し、かつ、両搬送ローラ装置のローラ挟持圧に差を持たせることにより、ワークを、幅方向の外方に引っ張りつつ、ローラ挟持圧の高い搬送ローラ装置側に引き寄せ、搬送ガイドに押し当てて搬送するので、ワークを、弛みが生じることなく、かつ、蛇行することなく、平面状態で、確実に搬送方向に沿って搬送することができ、搬送が円滑に行える。これにより、ワーク全面を均一に表面処理することができると共に、ワークの表面処理の品質を向上させることができる。 (1) According to the conveying method according to the present invention, the workpiece in the width direction is clamped from above and below by the inclined conveying rollers, and a difference is given to the roller clamping pressure of both conveying roller devices. Is pulled to the outside of the width direction while being pulled toward the conveying roller device side where the roller clamping pressure is high, and is pressed against the conveying guide to convey the workpiece, so that the workpiece is flattened without causing slack and meandering. In this state, it can be reliably transported along the transport direction and can be transported smoothly. As a result, the entire surface of the workpiece can be uniformly treated and the quality of the surface treatment of the workpiece can be improved.

(2)ワークの幅方向の両端部を、ワークの搬送方向の略全長に亘る搬送用治具で上下から挟持して、搬送することにより、極薄のワークであっても、搬送ローラ対の数を多く設置しなくとも、ワークの弛みを確実に防止し、平面状態で搬送することができる。 (2) The both ends of the workpiece in the width direction are sandwiched from above and below by a conveying jig that extends over the entire length of the workpiece in the conveying direction and conveyed, so even if the workpiece is extremely thin, Even if a large number is not installed, loosening of the workpiece can be reliably prevented and the workpiece can be transported in a flat state.

(3)搬送用治具は、好ましくは、突起と嵌合孔とで相互に位置決めされる上側治具部材と下側治具部材を備え、上記突起を利用して、ワークの端縁の位置決めを行う構造としていると、簡単な構造で、所定の固定位置に、確実にワークを位置決めすることができる。 (3) The conveying jig preferably includes an upper jig member and a lower jig member that are positioned with respect to each other by the protrusion and the fitting hole, and the edge of the workpiece is positioned by using the protrusion. If it is set as the structure which performs, it can position a workpiece | work reliably to a predetermined fixed position with a simple structure.

(4)また、搬送用治具は、ワークに対して着脱自在に装着することが可能であるので、繰り返して利用することができ、コストの低減に寄与することができる。 (4) Moreover, since the conveyance jig can be detachably attached to the workpiece, it can be used repeatedly, contributing to cost reduction.

本発明に係る搬送方法が実施される表面処理槽(洗浄槽)の概略断面図である。It is a schematic sectional drawing of the surface treatment tank (cleaning tank) with which the conveyance method concerning this invention is implemented. 図1のII-II断面拡大図である。It is the II-II cross-sectional enlarged view of FIG. 図2のIII-III断面拡大図である。It is the III-III cross-sectional enlarged view of FIG. 図1の矢印IV部分の拡大断面図である。It is an expanded sectional view of the arrow IV part of FIG. 図4のV-V断面図である。It is VV sectional drawing of FIG. 搬送ローラ装置の軸受の分解斜視図である。It is a disassembled perspective view of the bearing of a conveyance roller apparatus. 搬送用治具の分解斜視図である。It is a disassembled perspective view of the conveyance jig. 図7の搬送用治具の正面図である。It is a front view of the jig for conveyance of FIG. 搬送ローラ装置の変形例を示す平面図である。It is a top view which shows the modification of a conveyance roller apparatus. 本発明に係るワーク搬送方法における各工程を示す斜視図である。It is a perspective view which shows each process in the workpiece conveyance method which concerns on this invention. 搬送用治具の変形例を示す分解斜視図である。It is a disassembled perspective view which shows the modification of the jig | tool for conveyance. 図11の搬送用治具の正面図である。It is a front view of the jig for conveyance of FIG. 搬送ローラ装置の変形例を示す平面図である。It is a top view which shows the modification of a conveyance roller apparatus. 本発明に係る別の搬送方法が実施される表面処理槽の図2と同様の断面拡大図、The cross-sectional enlarged view similar to FIG. 2 of the surface treatment tank in which another conveyance method according to the present invention is implemented, 本発明の実験例に用いる搬送ローラ装置の平面略図、A schematic plan view of a conveying roller device used in an experimental example of the present invention, 図15の装置に基づく実験結果を表すグラフ、FIG. 15 is a graph showing experimental results based on the apparatus of FIG. 本発明の別の実験例に用いる搬送ローラ装置の断面拡大略図、Cross-sectional enlarged schematic view of a transport roller device used in another experimental example of the present invention, 図17の装置に基づく実験結果を表すグラフである。It is a graph showing the experimental result based on the apparatus of FIG.

図1乃至図8は、本発明に係るワーク搬送方法を実施するための表面処理槽と、ワーク搬送用治具であり、まず、これらの図面に基づいて表面処理装置の一例を説明する。   1 to 8 show a surface treatment tank and a workpiece conveyance jig for carrying out a workpiece conveyance method according to the present invention. First, an example of a surface treatment apparatus will be described based on these drawings.

図1は表面処理槽全体の縦断面略図であり、表面処理槽として、プリント基板等の薄物ワークを連続的に洗浄する洗浄槽1を備えている。矢印Fがワーク搬送方向であり、また、説明の都合上、ワーク搬送方向と直交する水平方向を、「幅方向」あるいは「左右方向」と称し、以下説明する。   FIG. 1 is a schematic vertical cross-sectional view of the entire surface treatment tank. As the surface treatment tank, a washing tank 1 for continuously washing a thin workpiece such as a printed circuit board is provided. The arrow F is the workpiece conveyance direction. For convenience of explanation, the horizontal direction orthogonal to the workpiece conveyance direction is referred to as “width direction” or “left-right direction” and will be described below.

洗浄槽1のワーク搬送方向Fの後端と前端には、ワーク入口2とワーク出口3とが設けられると共に、ローディング槽4とアンローディング槽5が接続されており、ローディング槽4内とアンローディング槽5内には、それぞれワークWを水平状態で搬入及び搬出するための搬送ローラ6,7が配置されている。   A work inlet 2 and a work outlet 3 are provided at a rear end and a front end of the work transfer direction F of the cleaning tank 1, and a loading tank 4 and an unloading tank 5 are connected to each other. In the tank 5, conveyance rollers 6 and 7 are arranged for carrying in and out the workpiece W in a horizontal state.

洗浄槽1内には、複数の搬送ローラ対10を有するワーク搬送装置11と、複数の上側洗浄液ノズル12と、複数の下側洗浄液ノズル13と、が配置されている。前記搬送ローラ対10は、搬送方向Fに所定間隔を置いて配置されると共に、上下方向に対向する上側搬送ローラ15と下側搬送ローラ16から構成されており、両搬送ローラ15,16間で、ワークWが水平姿勢で通過するワーク搬送経路Aを構成している。ワーク搬送装置11の搬送速度は、たとえば、毎分0.5m〜2mである。なお、図1では、記載スペースの都合上、複数の搬送ローラ対10及び複数の洗浄液ノズル12,13の一部のみ符号を附し、残りは符号を省略している。   In the cleaning tank 1, a work transfer device 11 having a plurality of transfer roller pairs 10, a plurality of upper cleaning liquid nozzles 12, and a plurality of lower cleaning liquid nozzles 13 are arranged. The pair of transport rollers 10 is arranged with a predetermined interval in the transport direction F, and is composed of an upper transport roller 15 and a lower transport roller 16 that face each other in the vertical direction, and between the transport rollers 15 and 16. The workpiece conveyance path A through which the workpiece W passes in a horizontal posture is configured. The conveyance speed of the workpiece conveyance device 11 is, for example, 0.5 m to 2 m per minute. In FIG. 1, for convenience of description space, only a part of the plurality of transport roller pairs 10 and the plurality of cleaning liquid nozzles 12 and 13 are denoted by reference numerals, and the rest are omitted.

各洗浄液ノズル12,13は、図示しないが複数の配管を介して洗浄液供給部に連通し、搬送経路A内を水平搬送されるワークWに対し、上側と下側から洗浄液を噴射し、ワークWの両面を洗浄するようになっている。洗浄槽1の下端部には、噴射された洗浄液がレベルL1まで溜まっている。   Although not shown, each of the cleaning liquid nozzles 12 and 13 communicates with the cleaning liquid supply unit via a plurality of pipes, and sprays the cleaning liquid from the upper side and the lower side with respect to the work W transported horizontally in the transport path A. Both sides are designed to be cleaned. At the lower end portion of the cleaning tank 1, the sprayed cleaning liquid is accumulated up to the level L1.

図2は、図1のII-II断面拡大図、図3は図2のIII-III断面図であり、図3においては、前記図1と同様に、記載スペースの都合上、多数記載されている搬送ローラ15等に対し、一部のみに符号を附し、残りは符号を省略している。図2において、搬送ローラ装置11は、搬送方向Fと直交する幅方向(左右方向)の両側に配置されており、各搬送装置11は、ワークWの左右両端部を、搬送用治具18を介して上下の搬送ローラ15,16間で上下から挟持し、搬送するように構成されている。搬送ローラ15,16の材質は、たとえばゴムであり、エストラマ又は天然ゴムでも可能である。耐薬液性を有していることが好ましいので、金属あるいはテフロン樹脂(登録商標)でも可能である。   2 is an enlarged sectional view taken along the line II-II in FIG. 1, and FIG. 3 is a sectional view taken along the line III-III in FIG. 2. In FIG. For the transport rollers 15 and the like, only a part is given a reference numeral, and the rest is omitted. In FIG. 2, the transport roller device 11 is disposed on both sides in the width direction (left and right direction) orthogonal to the transport direction F, and each transport device 11 has the left and right ends of the workpiece W placed on the transport jig 18. The upper and lower conveying rollers 15 and 16 are sandwiched from above and below to be conveyed. The material of the transport rollers 15 and 16 is, for example, rubber, and can be elastomer or natural rubber. Since it is preferable to have chemical resistance, metal or Teflon resin (registered trademark) is also possible.

搬送ローラ装置11の支持構造及び駆動構造を説明する。洗浄槽1内には、左右方向に間隔を置いて一対の内側支持壁41が立設されると共に、各内側支持壁41からそれぞれ左右方向の外方に間隔を置いた位置に、外側支持壁42が立設されている。前記各搬送ローラ15,16のローラ軸21,22は、前記内外の両支持壁41,42に、内外の軸受43,44を介して回転自在に支持されている。前記内側支持壁41には、上下の搬送ローラ15,16間のすき間(ローラ挟持圧)を調節するための隙間調節機構(ローラ圧調節機構)45が設けられている。   The support structure and drive structure of the transport roller device 11 will be described. In the cleaning tank 1, a pair of inner support walls 41 are erected at intervals in the left-right direction, and the outer support walls are located at positions spaced from the inner support walls 41 outward in the left-right direction. 42 is erected. The roller shafts 21 and 22 of the transport rollers 15 and 16 are rotatably supported by the inner and outer support walls 41 and 42 via inner and outer bearings 43 and 44, respectively. The inner support wall 41 is provided with a gap adjusting mechanism (roller pressure adjusting mechanism) 45 for adjusting a gap (roller clamping pressure) between the upper and lower conveying rollers 15 and 16.

各上側搬送ローラ軸21とこれに対応する各下側搬送ローラ軸22とは、それぞれ平ギヤ23、24を介して連動連結されている。   Each upper transport roller shaft 21 and each corresponding lower transport roller shaft 22 are interlocked and connected via flat gears 23 and 24, respectively.

各下側搬送ローラ軸22の下方には、左右の支持壁41,42に亘って動力伝達軸34が回転自在に架設されており、該動力伝達軸34の左右両端部近傍に設けられた複数の平ギヤ25に、各下側搬送ローラ軸22の平ギヤ24が噛み合っている。   Below each lower conveyance roller shaft 22, a power transmission shaft 34 is rotatably mounted across the left and right support walls 41, 42, and a plurality of power transmission shafts 34 are provided in the vicinity of both left and right ends of the power transmission shaft 34. The flat gear 24 of each lower conveyance roller shaft 22 is meshed with the flat gear 25.

図3において、洗浄槽1内の左右方向の一端部、たとえば図3の左端部には、搬送方向Fと平行に延びる駆動軸31が配置されており、この駆動軸31の長さ方向の一端部は、動力伝達機構(図示せず)を介して駆動モータ等の駆動源に連結している。前記駆動軸31の途中には、搬送方向Fに等間隔を置いて各搬送ローラ対10に略対応する位置にベベルギヤ32が固着されており、各ベベルギヤ32は、前記各動力伝達軸34の左端部に固着されたベベルギヤ33に噛み合っている。   In FIG. 3, a drive shaft 31 extending in parallel with the transport direction F is disposed at one end portion in the left-right direction in the cleaning tank 1, for example, the left end portion in FIG. 3, and one end of the drive shaft 31 in the length direction. The unit is connected to a drive source such as a drive motor via a power transmission mechanism (not shown). In the middle of the drive shaft 31, bevel gears 32 are fixed at positions corresponding to the respective transport roller pairs 10 at equal intervals in the transport direction F, and each bevel gear 32 is connected to the left end of each power transmission shaft 34. It meshes with a bevel gear 33 fixed to the part.

すなわち、駆動モータ等により回転する駆動軸31の回転は、各ベベルギヤ32,33を介して動力伝達軸34に伝達され、該動力伝達軸34の左右両端部から、図2に示す平ギヤ24及び25を介して、下側搬送ローラ軸22及び上側搬送ローラ軸21にそれぞれ伝達され、各搬送ローラ15,16を、互いに反対方向に回転する。   That is, the rotation of the drive shaft 31 rotated by a drive motor or the like is transmitted to the power transmission shaft 34 via the bevel gears 32 and 33, and the flat gear 24 shown in FIG. 25, and is transmitted to the lower transport roller shaft 22 and the upper transport roller shaft 21, respectively, to rotate the transport rollers 15 and 16 in opposite directions.

図3において、左右の上側搬送ローラ軸21の軸芯は、搬送方向Fと直角な幅方向(左右方向)に対して、左右方向の内方側が搬送方向F側にくるように、所定角度θ1でもって傾斜している。図2に示す各下側搬送ローラ軸22の軸芯も、前記上側搬送ローラ軸21と同じ角度θ1で持って、幅方向(左右方向)に対して傾斜している。   In FIG. 3, the axis of the left and right upper transport roller shafts 21 has a predetermined angle θ1 with respect to the width direction (left and right direction) perpendicular to the transport direction F, so It is inclined. The axis of each lower conveyance roller shaft 22 shown in FIG. 2 is also inclined with respect to the width direction (left-right direction) at the same angle θ1 as that of the upper conveyance roller shaft 21.

搬送ローラ軸21,22を上記のように傾けた状態に支持するために、各軸受43,44に形成される軸受孔の中心線も、幅方向(左右方向)に対して前記所定角度θ1で傾斜しており、かつ、各外側軸受44に対し、各内側軸受43は、搬送方向F側にずれた位置に配置されている。   In order to support the transport roller shafts 21 and 22 in the inclined state as described above, the center line of the bearing hole formed in each of the bearings 43 and 44 is also at the predetermined angle θ1 with respect to the width direction (left and right direction). The inner bearings 43 are arranged at positions that are inclined and are shifted to the conveying direction F side with respect to the outer bearings 44.

また、各搬送ローラ軸21、22の途中には、外側軸受44の左右方向の内面に当接可能なストッパー46が固着されており、これにより、搬送ローラ軸21,22がローラ軸芯方向に移動するのを防止している。   In addition, a stopper 46 that can contact the inner surface of the outer bearing 44 in the left-right direction is fixed in the middle of each of the transport roller shafts 21, 22, so that the transport roller shafts 21, 22 are in the roller axis direction. Prevents movement.

図4は、図1の矢印IV部分の拡大断面図であり、前記隙間調節機構45の構造を示している。内側軸受43には、下側搬送ローラ軸22用の円形の軸受孔47と、上側搬送ローラ軸21用の上下方向に長い軸受孔48とが形成されており、下側搬送ローラ軸22は径方向に移動不能に下側の軸受孔47に支持されているが、上側搬送ローラ軸21は、上下方向移動可能に上側の軸受孔48に支持されている。   FIG. 4 is an enlarged cross-sectional view taken along arrow IV in FIG. 1 and shows the structure of the gap adjusting mechanism 45. The inner bearing 43 is formed with a circular bearing hole 47 for the lower conveying roller shaft 22 and a vertically long bearing hole 48 for the upper conveying roller shaft 21, and the lower conveying roller shaft 22 has a diameter. The upper conveying roller shaft 21 is supported by the upper bearing hole 48 so as to be movable in the vertical direction.

隙間調節機構45は、内側支持壁41の上面に取付ボルト55により固定されたケース51と、該ケース51の下壁を貫通して前記上側軸受孔48に上下方向移動可能に突入する押さえロッド52と、該押さえロッド52の上端面に連結されたコイルばね53と、該コイルばね53の上端に連結すると共にケース51の上壁のめねじ孔に螺挿された調節ねじ54と、を備えている。   The gap adjusting mechanism 45 includes a case 51 fixed to the upper surface of the inner support wall 41 by a mounting bolt 55 and a pressing rod 52 that penetrates the lower wall of the case 51 and enters the upper bearing hole 48 so as to be movable in the vertical direction. And a coil spring 53 connected to the upper end surface of the holding rod 52, and an adjustment screw 54 connected to the upper end of the coil spring 53 and screwed into the female screw hole of the upper wall of the case 51. Yes.

押えロッド52の下端は円弧形凹面に形成され、上側搬送ローラ軸21の上面に当接可能となっている。前記調節ねじ54の締め込み量を変更することにより、押えロッド52の上下方向の位置を調節し、これにより、上下の搬送ローラ15,16の隙間(ローラ挟持圧)を調節できるようになっている。   The lower end of the presser rod 52 is formed in an arcuate concave surface and can come into contact with the upper surface of the upper transport roller shaft 21. By changing the tightening amount of the adjusting screw 54, the position of the presser rod 52 in the vertical direction is adjusted, so that the gap (roller clamping pressure) between the upper and lower conveying rollers 15 and 16 can be adjusted. Yes.

図5は図4のV-V端面図であり、左右の搬送ローラ装置11は、それぞれローラ隙間調節機構45を備えているが、ローラ挟持圧を異なる値に設定している。該実施の形態では、左側の搬送ローラ装置11の上下の搬送ローラ15,16間の隙間が、右側の搬送ローラ装置11の上下の搬送ローラ15,16間の隙間よりも小さくなるように、調節されている。すなわち、左側の搬送ローラ装置11のローラ挟持圧が右側搬送ローラ装置11のローラ挟持圧よりも大きくなるように、左右の前記隙間が設定されている。   FIG. 5 is a VV end view of FIG. 4, and the left and right transport roller devices 11 are each provided with a roller gap adjusting mechanism 45, but the roller clamping pressure is set to a different value. In this embodiment, the clearance between the upper and lower transport rollers 15 and 16 of the left transport roller device 11 is adjusted to be smaller than the clearance between the upper and lower transport rollers 15 and 16 of the right transport roller device 11. Has been. That is, the left and right clearances are set so that the roller clamping pressure of the left conveyance roller device 11 is larger than the roller clamping pressure of the right conveyance roller device 11.

上記のように、左側の搬送ローラ装置11のローラ挟持圧を高く設定している場合において、左側の内側軸受43の右端面には、搬送ガイドとして、摩擦係数の小さい、滑らかな面を有するガイドテープ60が貼付されている。すなわち、ローラ挟持圧を高く設定している側の内側軸受43の端面に、ガイドテープ60を貼り付けている。このガイドテープ60は、搬送経路Aを含む高さに配置されている。   As described above, when the roller holding pressure of the left conveyance roller device 11 is set high, a guide having a smooth surface with a small friction coefficient is provided on the right end surface of the left inner bearing 43 as a conveyance guide. Tape 60 is affixed. That is, the guide tape 60 is attached to the end surface of the inner bearing 43 on the side where the roller clamping pressure is set high. The guide tape 60 is disposed at a height including the conveyance path A.

図6は、内側軸受43の分解斜視図であり、内側支持壁41には、上下方向に長く、上端が開口した軸受取付孔70が形成され、内側軸受43のワーク搬送方向Fの両端面には、前記軸受取付孔70の内周面に嵌合可能な溝71が形成されている。内側軸受43を上方から軸受取付孔70に嵌合し、図4のように、内側軸受43の上端面を、前記隙間調節機構45のケース51の下端面により、押さえ付けている。   FIG. 6 is an exploded perspective view of the inner bearing 43. The inner support wall 41 is formed with bearing mounting holes 70 that are long in the vertical direction and open at the upper end. Is formed with a groove 71 that can be fitted to the inner peripheral surface of the bearing mounting hole 70. The inner bearing 43 is fitted into the bearing mounting hole 70 from above, and the upper end surface of the inner bearing 43 is pressed by the lower end surface of the case 51 of the gap adjusting mechanism 45 as shown in FIG.

図7及び図8により、ワークWを保持するための搬送用治具18の構造を説明する。図7は搬送用治具18の分解斜視図であり、搬送用治具18は、ワーク搬送方向Fに細長い上側治具部材72と下側治具部材73とから構成されており、各治具部材72,73の長さは、ワークWの搬送方向の長さに略等しく設定されている。各治具部材72,73の材質は、たとえば、ポリ塩化ビニル(PVC)、ポリプロピレン(PP)、テトラフルオロエチレン・パーフルオロアルキルビニルエーテル共重合体(PFA)、ポリフッ化ビニリデン(PVDF)又はポリエーテルエーテルケトン(PEEK)等の樹脂であり、耐薬品性及び耐久性があるものが好ましい。   The structure of the transfer jig 18 for holding the workpiece W will be described with reference to FIGS. FIG. 7 is an exploded perspective view of the conveying jig 18. The conveying jig 18 includes an upper jig member 72 and a lower jig member 73 that are elongated in the workpiece conveying direction F. The lengths of the members 72 and 73 are set to be approximately equal to the length of the workpiece W in the conveyance direction. The materials of the jig members 72 and 73 are, for example, polyvinyl chloride (PVC), polypropylene (PP), tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), polyvinylidene fluoride (PVDF), or polyether ether. A resin such as ketone (PEEK), which has chemical resistance and durability, is preferable.

下側治具部材73の上面には、下側治具部材73の長さ方向(ワーク搬送方向)に等間隔を置いて複数の円柱突起74が形成されている。各円柱突起74は、同一の形状及び同位置の大きさに形成されると共に、それらの中心が下側治具部材73の長さ方向と平行な一直線上に揃うように、下側治具部材73の幅方向の中央に配置されている。これにより、総ての円柱突起74の右端縁と左端縁とは、それぞれ下側治具部材73の長さ方向と平行な一直線上に位置している。各円柱突起74の左右の端縁と下側治具部材73の左右の端縁との間には、摩擦係数の大きい滑り止めテープ(摩擦テープ)75がそれぞれ貼り付けられている。滑り止めテープ75の幅は、ワークWの挟持幅となるものであり、ワークWの幅が400mm程度であれば、十分な挟持状態を維持するためには、滑り止めテープ75の幅(挟持幅)は、たとえば5mm〜10mm程度が必要である。この滑り止めテープ75の材質は、たとえば、軟質ポリ塩化ビニル(PVC)シリコンゴム又はゴム等の樹脂であり、耐薬品性及び耐久性に優れたものが好ましい。   A plurality of cylindrical protrusions 74 are formed on the upper surface of the lower jig member 73 at equal intervals in the length direction of the lower jig member 73 (work transfer direction). Each cylindrical protrusion 74 is formed in the same shape and the same size, and the lower jig member is arranged so that the centers thereof are aligned on a straight line parallel to the length direction of the lower jig member 73. 73 is arranged at the center in the width direction. Thereby, the right end edge and the left end edge of all the cylindrical protrusions 74 are respectively positioned on a straight line parallel to the length direction of the lower jig member 73. Between the left and right edges of each cylindrical protrusion 74 and the left and right edges of the lower jig member 73, a non-slip tape (friction tape) 75 having a large friction coefficient is attached. The width of the anti-slip tape 75 is the width of the workpiece W. If the width of the workpiece W is about 400 mm, the width of the anti-slip tape 75 (the clamping width) is sufficient to maintain a sufficient clamping state. ) Needs, for example, about 5 mm to 10 mm. The material of the anti-slip tape 75 is, for example, a resin such as soft polyvinyl chloride (PVC) silicon rubber or rubber, and is preferably excellent in chemical resistance and durability.

上側治具部材72には、前記下側治具部材73の各円柱突起74が嵌合する複数の嵌合孔76が、上側治具部材72の長さ方向(ワーク搬送方向)に等間隔を置いて形成されている。また、上側治具部材72の下面の左右両端部には、前記下側治具部材73の滑り止めテープ75と同様の滑り止めテープ77が貼り付けられている。   The upper jig member 72 has a plurality of fitting holes 76 into which the cylindrical protrusions 74 of the lower jig member 73 are fitted at equal intervals in the length direction of the upper jig member 72 (work transfer direction). Is formed. Further, a non-slip tape 77 similar to the anti-slip tape 75 of the lower jig member 73 is attached to the left and right ends of the lower surface of the upper jig member 72.

なお、図示しないが、上下の治具部材72,73の四隅には、R面が形成されている。   Although not shown, R surfaces are formed at the four corners of the upper and lower jig members 72 and 73.

図9は、搬送ローラ装置11の変形例を示しており、駆動系を少し簡略化し、ワーク搬送方向Fにおけるローラ間隔を狭めると共に、動力伝達軸の数を減らしている。すなわち、前記図3の構造と比較して、左右の搬送ローラ装置11間を連結する動力伝達軸34を、一つ置きに間引くと共に、ワーク搬送方向Fに隣り合う下側搬送ローラ軸22(図9でな上側ローラ軸21の下側に隠れている)間を、一対のギヤ68,68及び中間ギヤ69により連結した構造である。その他の構造は、前記図1乃至図9の構造と同じである。   FIG. 9 shows a modified example of the transport roller device 11, which slightly simplifies the drive system, narrows the roller interval in the work transport direction F, and reduces the number of power transmission shafts. That is, as compared with the structure of FIG. 3, the power transmission shafts 34 connecting the left and right transport roller devices 11 are thinned out every other and the lower transport roller shaft 22 adjacent to the work transport direction F (see FIG. 3). 9 is hidden by the lower side of the upper roller shaft 21) by a pair of gears 68, 68 and an intermediate gear 69. The other structure is the same as the structure shown in FIGS.

[表面処理作業の全体の流れ]
図1において、プリント基板等の矩形状のワークWは、自動ローディング機構により、あるいは手動により、ローディング槽4の搬送ローラ6上に水平状態に供給され、該搬送ローラ6により、入口2を通って洗浄槽1内に搬送される。
[Overall flow of surface treatment work]
In FIG. 1, a rectangular workpiece W such as a printed circuit board is supplied in a horizontal state onto a conveying roller 6 of a loading tank 4 by an automatic loading mechanism or manually, and passes through an inlet 2 by the conveying roller 6. It is conveyed into the cleaning tank 1.

洗浄槽1内において、ワークWは、左右の搬送ローラ装置11により搬送方向Fに搬送され、上下の洗浄液ノズル12,13から噴射される洗浄液により洗浄され、出口3を通過してアンローディング槽5に排出される。アンローディング槽5では、ワークWは、自動アンローディング機構により、あるいは手動により、取り出され、たとえば次の工程に供給される。   In the cleaning tank 1, the workpiece W is transported in the transport direction F by the left and right transport roller devices 11, cleaned by the cleaning liquid sprayed from the upper and lower cleaning liquid nozzles 12, 13, passes through the outlet 3, and is unloaded from the unloading tank 5. To be discharged. In the unloading tank 5, the workpiece W is taken out by an automatic unloading mechanism or manually, and supplied to the next step, for example.

[ワーク搬送方法の一具体例及びその効果]
上記のような表面処理作業における具体的なワーク搬送方法を、図10等により説明する。なお、図10は、前記変形例で説明した搬送装置11を備えている場合の搬送過程を示している。
[One specific example of workpiece transfer method and its effect]
A specific work transfer method in the surface treatment operation as described above will be described with reference to FIG. FIG. 10 shows a transport process when the transport device 11 described in the modification is provided.

(1)ローディング作業の前工程として、図10の右上端に示すように、矩形状ワークWの左右両端部を、それぞれ搬送用治具18により上下から挟持する。この挟持作業は、自動ローディング機構に付設される自動取付機構により自動で行うことも、手動で行うことも可能である。この挟持作業において、図8に示すように、ワークWの左右の端縁を下側治具部材73の円柱突起74に当接させることにより、ワークWと搬送用治具18との相対的な位置決めを行う。そして、円柱突起74を嵌合孔76に嵌合すると共に、上側治具部材72を下側治具部材73に重ね合わせることにより、上下の滑り止めテープ77,75間でワークWの左右の端部を挟持する。 (1) As a pre-process of the loading operation, as shown in the upper right end of FIG. 10, the left and right ends of the rectangular workpiece W are sandwiched from above and below by the conveying jig 18. This clamping operation can be performed automatically by an automatic attachment mechanism attached to the automatic loading mechanism or manually. In this clamping operation, the left and right edges of the workpiece W are brought into contact with the cylindrical protrusions 74 of the lower jig member 73, as shown in FIG. Perform positioning. Then, the cylindrical protrusion 74 is fitted into the fitting hole 76 and the upper jig member 72 is overlapped with the lower jig member 73, whereby the left and right ends of the workpiece W are sandwiched between the upper and lower antiskid tapes 77 and 75. Hold the part.

(2)図10に戻り、搬送用治具18により左右端部が挟持されたワークWは、ローディング槽4から洗浄槽1内に搬入され、左右の搬送用治具18が上下の搬送ローラ15,16間に挟持され、搬送ローラ15,16の回転により搬送方向Fに搬送される。この搬送過程において、図3のように、左右の搬送ローラ対10の軸芯は、左右方向の内方側が搬送方向F側にくるように所定角度θ1で傾斜しているので、ワークWは、左右の搬送用治具18を介して左右方向の外方に張力を受けた状態で搬送される。 (2) Returning to FIG. 10, the workpiece W sandwiched between the left and right ends by the conveying jig 18 is carried into the cleaning tank 1 from the loading tank 4, and the left and right conveying jigs 18 are moved to the upper and lower conveying rollers 15. , 16 and conveyed in the conveying direction F by the rotation of the conveying rollers 15 and 16. In this transport process, as shown in FIG. 3, the shaft cores of the left and right transport roller pairs 10 are inclined at a predetermined angle θ1 so that the inner side in the left-right direction is on the transport direction F side. It is conveyed in a state where it receives tension in the left and right direction via the left and right conveying jigs 18.

これにより、ワークWは、水平な平面状態を保ちながら搬送され、上下から洗浄液が勢いよく衝突しても、ワークが弛んだり、皺になったり、外れたりすることがない。また、水平な平面状態に維持されることにより、洗浄液が略均一にワーク全面に行き渡り、高品質の洗浄性能を得ることができる。   Thereby, the workpiece W is conveyed while maintaining a horizontal plane state, and even if the cleaning liquid collides with force from above and below, the workpiece does not loosen, become wrinkled or come off. Further, by maintaining the horizontal flat state, the cleaning liquid can be distributed almost uniformly over the entire surface of the work, and high-quality cleaning performance can be obtained.

特に、ワークWの左右両端部を、ワークの搬送方向Fの略全長に亘って搬送用治具18で挟持し、この搬送用治具18を上下の搬送ローラ15,16で挟持して搬送するので、各搬送ローラ装置11内での各搬送ローラ対10のローラ挟持圧に、若干のばらつきがあても、ワークWの搬送方向の全長を、均一に挟持することができ、これによって、ワークWの皺の発生、脱落及び蛇行を防止できる。   In particular, the left and right ends of the work W are sandwiched by the transport jig 18 over substantially the entire length in the transport direction F of the work, and the transport jig 18 is sandwiched and transported by the upper and lower transport rollers 15 and 16. Therefore, even if there is a slight variation in the roller clamping pressure of each conveyance roller pair 10 in each conveyance roller device 11, the entire length of the workpiece W in the conveyance direction can be uniformly clamped. It is possible to prevent the occurrence of wrinkles, dropping off and meandering.

(3)図5において、該実施の形態では、左側の搬送ローラ装置11のローラ挟持圧を、右側の搬送ローラ装置11のローラ挟持圧よりも大きくし、かつ、左側の内側軸受43の右端面に、摩擦係数の小さいガイドテープ60を貼り付けているので、ワーク搬送中、ワークWは、ローラ挟持圧の強い左側に引き寄せられ、ワークWの左側の搬送用治具18がガイドテープ60に当接した状態が維持される。すなわち、ワークWはガイドテープ60により正確に搬送方向Fにガイドされ、斜行することなく、正確に搬送経路A中を搬送される。 (3) In FIG. 5, in this embodiment, the roller clamping pressure of the left conveying roller device 11 is made larger than the roller clamping pressure of the right conveying roller device 11, and the right end surface of the left inner bearing 43 In addition, since the guide tape 60 having a small friction coefficient is attached, the workpiece W is attracted to the left side where the roller clamping pressure is strong during the workpiece conveyance, and the conveyance jig 18 on the left side of the workpiece W contacts the guide tape 60. The contact state is maintained. In other words, the workpiece W is accurately guided in the transport direction F by the guide tape 60, and is accurately transported in the transport path A without being skewed.

また、該実施の形態では、内側軸受部材43毎にガイドテープ60を貼り付けているが、搬送治具18の四隅にR面を形成しているので、搬送用治具18が、一つの内側軸受43から次の内側軸受43に移行する時に該次の内側軸受43の端縁に当接しても、前記R面により、円滑に通過することができ、引っ掛かることがない。   In this embodiment, the guide tape 60 is attached to each inner bearing member 43. However, since the R surfaces are formed at the four corners of the conveying jig 18, the conveying jig 18 has one inner side. Even when abutting against the edge of the next inner bearing 43 when moving from the bearing 43 to the next inner bearing 43, it can be smoothly passed by the R surface and is not caught.

(4)図10において、洗浄後のワークWは、出口3からアンローディング槽5に排出され、排出されたワークWから搬送用治具18が外される。この搬送用治具18は、繰り返し、ワークWの搬送に利用される。 (4) In FIG. 10, the cleaned workpiece W is discharged from the outlet 3 to the unloading tank 5, and the conveying jig 18 is removed from the discharged workpiece W. This conveying jig 18 is repeatedly used for conveying the workpiece W.

[その他の実施の形態]
(1)図11及び図12は搬送用治具18の変形例である。前記図7及び図8に示す構造と同様に、細長い上側治具部材72と細長い下側治具部材73とから構成され、下側治具部材73には複数の円柱突起74が形成され、上側治具部材72には複数の円形の嵌合孔76が形成されており、これらの構成に加え、下側治具部材73の上面には左右幅の中央部に治具部材長さ方向に直線状に延びる筋状の段部80が形成され、上側治具部材72の下面には、前記段部80が嵌合する直線状の嵌合溝81が形成されている。また、段部80の左右両側方と嵌合溝81に左右両側方には、摩擦係数の高い滑り止めテープ75,77が貼り付けられている。
[Other embodiments]
(1) FIGS. 11 and 12 show modified examples of the conveying jig 18. Similar to the structure shown in FIGS. 7 and 8, the upper jig member 72 is composed of an elongated upper jig member 72 and an elongated lower jig member 73, and a plurality of cylindrical protrusions 74 are formed on the lower jig member 73. A plurality of circular fitting holes 76 are formed in the jig member 72. In addition to these configurations, the upper surface of the lower jig member 73 has a straight line extending in the jig member length direction at the center of the left and right width. A linear step groove 80 is formed, and a linear fitting groove 81 into which the step portion 80 is fitted is formed on the lower surface of the upper jig member 72. Further, anti-slip tapes 75 and 77 having a high friction coefficient are attached to the left and right sides of the step 80 and the left and right sides of the fitting groove 81.

前記円柱突起74及び嵌合孔76は、それぞれ段部80の上面と嵌合溝81の底面に形成されている。   The cylindrical protrusion 74 and the fitting hole 76 are formed on the upper surface of the stepped portion 80 and the bottom surface of the fitting groove 81, respectively.

該変形例の搬送用治具18でワークWを挟持する場合には、図12に示すように、段部80の左右方向の一方の端面にワークWの左右の端縁を当接させることにより、ワークWと搬送用治具18との相対的な位置決めを行う。また、上下の治具部材72,73間の位置決めは、円柱突起74と嵌合孔76との嵌合構造に加え、段部80と嵌合溝81との嵌合によっても実施され、上下の治具部材72,93は強固に結合される。   When the workpiece W is clamped by the transfer jig 18 of the modified example, as shown in FIG. 12, the left and right edges of the workpiece W are brought into contact with one end surface of the step portion 80 in the left-right direction. The relative positioning of the workpiece W and the conveying jig 18 is performed. Further, the positioning between the upper and lower jig members 72 and 73 is performed not only by the fitting structure of the cylindrical protrusion 74 and the fitting hole 76 but also by the fitting of the stepped portion 80 and the fitting groove 81. The jig members 72 and 93 are firmly coupled.

(2)前記図1等の例では、表面処理槽として、洗浄液ノズル12,13を有する洗浄槽を用いているが、無電解めっき用あるいは電気めっき用のめっき液が貯留されためっき槽、エッチング、剥離あるいは現像に利用する薬液が貯留された薬液槽におけるワーク搬送にも適用できる。 (2) In the example of FIG. 1 and the like, a cleaning tank having cleaning liquid nozzles 12 and 13 is used as a surface treatment tank. However, a plating tank in which a plating solution for electroless plating or electroplating is stored, etching Also, the present invention can be applied to workpiece conveyance in a chemical tank in which a chemical used for peeling or developing is stored.

(3)ワークの種類としては、主としてプリント基板が適用されるが、本発明は、特に、フレキシブル基板や厚さ0.06mm以下の極薄板等の表面処理の搬送に適している。 (3) Although a printed circuit board is mainly used as the type of workpiece, the present invention is particularly suitable for conveying a surface treatment such as a flexible substrate or an ultrathin plate having a thickness of 0.06 mm or less.

(4)図13は、搬送ローラ対10の支持構造の変形例であり、前記図3の構造と比較して、内側軸受43(図3)を省略し、内側支持壁41に搬送ローラ軸21,22を直接支持する構造となっている。 (4) FIG. 13 is a modified example of the support structure of the transport roller pair 10. Compared with the structure of FIG. 3, the inner bearing 43 (FIG. 3) is omitted, and the transport roller shaft 21 is placed on the inner support wall 41. , 22 is directly supported.

(5)搬送ガイドとして、内側軸受43の左右方向に内面にガイドテープ60を貼る構造の他に、搬送経路の略全長に亘る一本のガイド板を配置することも可能である。勿論このガイド板は、摩擦係数の低い、表面が滑らかな部材であって、耐久性及び耐薬品性の高い部材が使用される。なお、ガイドテープ60やガイド板を設けず、内側軸受43自体を搬送ガイドとすることも可能である。 (5) In addition to the structure in which the guide tape 60 is attached to the inner surface of the inner bearing 43 in the left-right direction as the conveyance guide, a single guide plate that extends over substantially the entire length of the conveyance path can be disposed. Of course, this guide plate is a member having a low friction coefficient and a smooth surface, and a member having high durability and chemical resistance. It is also possible to use the inner bearing 43 itself as a conveyance guide without providing the guide tape 60 or the guide plate.

(6)図7及び図8のように、搬送用治具18の各治具部材72,73の挟持面に、摩擦係数の高い滑り止めテープ75,77を貼る代わりに、各治具部材72,73の表面に、細かい凹凸を設けたり、多数の微粒子を付着させたり、あるいは、面粗度を高く(粗く)することにより、滑り止め機能を発揮させることもできる。 (6) As shown in FIGS. 7 and 8, each jig member 72 is replaced with a non-slip tape 75, 77 having a high friction coefficient on the holding surface of each jig member 72, 73 of the conveying jig 18. , 73 can be provided with fine irregularities, a large number of fine particles can be attached, or the surface roughness can be increased (roughened) to exhibit an anti-slip function.

(7)図14は、搬送治具を用いない搬送方法を示しており、前記図2と同様の断面拡大図であり、図2と同じ部品には同じ符号を附してある。この図14に示す搬送方法は、ワークWの幅方向の両端部を、直接、上下の搬送ローラ15,16で挟持し、搬送する。搬送治具を用いないこと以外は、前記図1乃至図13の方法と同様であり、同様の効果がある。この方法は、厚みが、たとえば500μm以上の剛性の高いワークWを搬送する場合に適している。 (7) FIG. 14 shows a transport method that does not use a transport jig. FIG. 14 is an enlarged cross-sectional view similar to FIG. 2, and the same components as those in FIG. In the conveying method shown in FIG. 14, both end portions in the width direction of the workpiece W are directly sandwiched and conveyed by the upper and lower conveying rollers 15 and 16. Except not using a conveying jig, it is the same as the method of FIGS. 1-13, and there exists the same effect. This method is suitable for conveying a highly rigid workpiece W having a thickness of, for example, 500 μm or more.

(8)前記図1等の例では、上下の搬送ローラ15,16の総てに挟持圧が設定されているが、一部の搬送ローラ15,16だけに前記挟持圧の設定を適用することもできる。たとえば、挟持圧が設定される搬送ローラ対10が、搬送治具又はワークに少なくとも2対ずつ常に接するようにすることもできる。 (8) In the example of FIG. 1 and the like, the clamping pressure is set for all of the upper and lower conveying rollers 15 and 16, but the setting of the clamping pressure is applied only to some of the conveying rollers 15 and 16. You can also. For example, the conveyance roller pair 10 for which the clamping pressure is set can always be in contact with the conveyance jig or the workpiece at least two pairs.

[実験例]
本願発明による効果を立証するために、次の実験1及び2を行った。
(実験1)
図15は実験1の実験装置の平面略図を示し、図16は図15の実験装置を使用した実験結果を示している。この実験1は、左右の搬送ローラ装置11の挟持圧に差を付けることにより、ワークWが一方の搬送ガイド60側に引き寄せられることを実証する実験である。具体的には、左右の搬送ローラ装置11の挟持圧差と、ワークWの幅方向の移動量との関係を、実験により求めたものである。
[Experimental example]
In order to prove the effect of the present invention, the following experiments 1 and 2 were performed.
(Experiment 1)
15 shows a schematic plan view of the experimental apparatus of Experiment 1, and FIG. 16 shows the experimental results using the experimental apparatus of FIG. This experiment 1 is an experiment demonstrating that the workpiece W is attracted to one conveyance guide 60 side by making a difference in the clamping pressure between the left and right conveyance roller devices 11. Specifically, the relationship between the clamping pressure difference between the left and right conveying roller devices 11 and the amount of movement of the workpiece W in the width direction is obtained by experiments.

図15において、実験装置は、基本的には、前記図1乃至図13と同様な構造の左右一対の傾斜状の搬送ローラ装置11を備えており、図1乃至図13と同じ部品には同じ符号を附している。また、搬送ローラ対10の数は一対のみ表示し、残りは省略してある。   15, the experimental apparatus basically includes a pair of left and right inclined conveying roller devices 11 having the same structure as in FIGS. 1 to 13, and the same components as those in FIGS. 1 to 13 are the same. The sign is attached. Further, only one pair of transport roller pairs 10 is displayed, and the rest are omitted.

図15において、実験条件は、以下の通りである。
(1)左側の搬送ローラ装置11の挟持圧を、50Nに固定し、右搬の送ローラ装置11の挟持圧を、左側の搬送ローラ装置11の挟持圧よりも低く、25N〜47Nの間で5段階に変化させる。
In FIG. 15, the experimental conditions are as follows.
(1) The clamping pressure of the left conveying roller device 11 is fixed to 50 N, and the clamping pressure of the right conveying roller device 11 is lower than the clamping pressure of the left conveying roller device 11 and is between 25 N and 47 N. Change to 5 levels.

(2)ワークWのローディング位置(LP)において、左側の搬送ガイド(ガイドテープ)60から左側搬送治具72(73)の左端までの距離B1を、6mmにセットする。 (2) At the loading position (LP) of the workpiece W, the distance B1 from the left conveyance guide (guide tape) 60 to the left end of the left conveyance jig 72 (73) is set to 6 mm.

(3)ワークWの搬送距離Aを3mとする。 (3) The conveyance distance A of the workpiece W is 3 m.

(4)ワークWの厚みを、50μmとする。 (4) The thickness of the workpiece W is 50 μm.

(5)ローディング位置LPからアンローディング位置ULPまでの上記距離Aを搬送後、ワークWが左側に移動した量(距離)B2を測定する。 (5) After transporting the distance A from the loading position LP to the unloading position ULP, the amount (distance) B2 by which the workpiece W has moved to the left side is measured.

(6)上記搬送実験を5回ずつ繰り返し、その平均値を図16の表にプロットする。 (6) The conveyance experiment is repeated 5 times, and the average value is plotted in the table of FIG.

(実験2)
図17は実験2の実験装置の断面略図を示し、図18は図17の実験装置を使用した実験結果を示している。この実験2は、ワーク搬送中、ワークWの表裏両面にシャワー水を当て、ワークWの幅方向の中央の撓み量δを測定する実験である。
(Experiment 2)
FIG. 17 shows a schematic cross-sectional view of the experimental apparatus of Experiment 2, and FIG. 18 shows the experimental results using the experimental apparatus of FIG. This experiment 2 is an experiment in which shower water is applied to both the front and back surfaces of the workpiece W and the amount of deflection δ at the center in the width direction of the workpiece W is measured during the workpiece conveyance.

図17において、実験条件は、以下の通りである。
(1)左側の搬送ローラ装置11の挟持圧を、50Nに固定し、右側の搬送ローラ装置11の挟持圧を、左側の搬送ローラ装置11の挟持圧よりも低く、25N〜47Nの間で5段階に変化させる。
In FIG. 17, the experimental conditions are as follows.
(1) The clamping pressure of the left conveyance roller device 11 is fixed to 50 N, and the clamping pressure of the right conveyance roller device 11 is lower than the clamping pressure of the left conveyance roller device 11 and is 5 to 25 N to 47 N. Change to stages.

(2)ワーク搬送中、12メガパスカルのシャワー水をワークWの表裏全面に吹き付ける。 (2) During work transfer, 12 megapascals of shower water is sprayed on the front and back surfaces of the work W.

(3)ワークWの搬送距離Aを3mとする(図15参照)。 (3) The conveyance distance A of the workpiece W is set to 3 m (see FIG. 15).

(4)ワークWの厚みを、50μmとする。 (4) The thickness of the workpiece W is 50 μm.

(5)前記図15のローディング位置LPからアンローディング位置ULPまでの距離Aを搬送後、図17のように、ワークWの幅方向の中央部の撓み量δを測定する。 (5) After conveying the distance A from the loading position LP to the unloading position ULP in FIG. 15, the amount of deflection δ at the center in the width direction of the workpiece W is measured as shown in FIG.

(6)上記搬送実験を5回ずつ繰り返し、その平均値を図18の表にプロットする。 (6) The conveyance experiment is repeated 5 times, and the average value is plotted in the table of FIG.

(実験1及び2の実験結果に基づく結論)
(1)図16に示すように、片方(右側)のローラ挟持圧を低くする程、搬送距離当たりのワークWの幅方向の移動量B2は大きくなるが、一方、図18に示すように、ワークWの中央部の撓み量δも大きくなることが分かる。
(Conclusion based on the experimental results of Experiment 1 and 2)
(1) As shown in FIG. 16, the lower the roller clamping pressure on one side (right side), the greater the movement amount B2 of the workpiece W in the width direction per conveyance distance. On the other hand, as shown in FIG. It can be seen that the amount of deflection δ at the center of the workpiece W also increases.

(2)前記実験1及び2の結果を考慮すると、左右の搬送ローラ装置11のローラ挟持圧(N)の比が、左側:右側=1:0.9〜1:0.4程度であるのが好適であり、この範囲においては、ワークWの幅方向の移動が速やかに行われ、かつ、ワークWの中央部の撓み量δも小さく保つことができる。 (2) Considering the results of Experiments 1 and 2, the ratio of the roller clamping pressure (N) of the left and right conveying roller devices 11 is about left: right = 1: 0.9 to 1: 0.4. In this range, the workpiece W is moved quickly in the width direction, and the deflection amount δ at the center of the workpiece W can be kept small.

(3)なお、左右の搬送ローラ装置11のローラ挟持圧、ワークの厚み、ワークの外径寸法、ワークの性質、シャワー圧、搬送治具の有無等の要因を考慮して、ワークが押し潰されず、なおかつ、ワークが搬送ローラ15,16から滑落しない程度の範囲で設定される。 (3) The work is crushed in consideration of factors such as the roller clamping pressure of the left and right transport roller devices 11, the thickness of the work, the outer diameter of the work, the nature of the work, the shower pressure, and the presence or absence of a transport jig. In addition, the workpiece is set within a range in which the workpiece does not slide off the conveying rollers 15 and 16.

1 洗浄槽(表面処理槽の一例)
10 搬送ローラ対
11 搬送ローラ装置
15 上側搬送ローラ
16 下側搬送ローラ
18 搬送用治具
45 隙間調節機構
60 ガイドテープ(搬送ガイド)
72 上側治具部材
73 下側治具部材
74 円柱突起
75,77 滑り止めテープ
76 嵌合孔
80 段部
81 嵌合溝
W ワーク
1 Cleaning tank (an example of a surface treatment tank)
DESCRIPTION OF SYMBOLS 10 Conveyance roller pair 11 Conveyance roller apparatus 15 Upper conveyance roller 16 Lower conveyance roller 18 Jig for conveyance 45 Gap adjustment mechanism 60 Guide tape (conveyance guide)
72 Upper jig member 73 Lower jig member 74 Cylindrical protrusion 75, 77 Non-slip tape 76 Fitting hole 80 Step part 81 Fitting groove W Workpiece

Claims (4)

上下に対向する搬送ローラからなる搬送ローラ対がワーク搬送方向に所定間隔をおいて、複数配設された搬送ローラ装置を、ワーク搬送経路の幅方向の両側に備え、前記各搬送ローラ対のローラ軸芯を、上方から見て、上記幅方向の内方側が搬送方向側にくるように傾斜させ、上記両搬送ローラ装置により、矩形状のワークの幅方向の両端部を上下から把持し、ワークを水平状態で搬送する表面処理槽のワーク搬送方法において、
前記ワーク搬送経路の幅方向の両側のうち、少なくとも一方に、ワーク搬送経路と平行に延びる搬送ガイドが敷設され、
前記一対の搬送ローラ装置のうち、前記搬送ガイドが配置されている側の搬送ローラ装置のローラ挟持圧を、他方の搬送ローラ装置のローラ挟持圧よりも高く設定し、
上記ローラ挟持圧の差によって、ワークを搬送ガイド側に引き寄せると共に、前記搬送ガイドに押し当て、搬送方向にガイドし、
前記ワークの幅方向の両端部を、ワークの搬送方向の全長に亘って搬送用治具により上下から挟持し、
前記各搬送用治具をそれぞれ対応する側の搬送ローラ装置の搬送ローラ対で上下から挟持し、
前記各搬送ローラ対の回転により、幅方向両側の前記両搬送用治具を介してワークを幅方向の外方に引っ張りつつ、搬送することを特徴する表面処理槽のワーク搬送方法。
A plurality of conveying roller pairs, each of which includes a pair of conveying rollers that are vertically opposed to each other with a predetermined interval in the workpiece conveying direction, are provided on both sides in the width direction of the workpiece conveying path. the axial, viewed from above, the inner side of the width direction is inclined to come to the conveying direction, Ri by the above two conveying rollers device grips the both ends in the width direction of the rectangular shaped workpieces from above and below in the work transfer method for the surface treatment tank for transporting a workpiece in horizontal state,
Wherein among both sides in the width direction of the workpiece conveying path, at least one, conveying guides extending workpiece transfer path and the flat row is laid,
Of the pair of transport roller devices, the roller clamping pressure of the transport roller device on the side where the transport guide is disposed is set higher than the roller clamping pressure of the other transport roller device,
Due to the difference in the roller clamping pressure, the workpiece is drawn toward the conveyance guide side, pressed against the conveyance guide, guided in the conveyance direction,
The both ends of the workpiece in the width direction are sandwiched from above and below by a conveying jig over the entire length of the workpiece in the conveying direction,
Each of the conveying jigs is sandwiched from above and below by a pair of conveying rollers of the corresponding conveying roller device,
A method of conveying a workpiece in a surface treatment tank, wherein the workpiece is conveyed while being pulled outward in the width direction through the two conveying jigs on both sides in the width direction by the rotation of each pair of conveying rollers .
平姿勢に配置された矩形状のワークの幅方向の両端部を上下から挟持する搬送用治具であって、
上側治具部材と下側治具部材とを備え、
両治具部材は、ワークの幅方向の端部の上下面にそれぞれ当接する摩擦係数の高い挟持面を有し、
一方の治具部材には、ワーク搬送方向に間隔を置いて配置された突起部が形成され、他方の治具部材には、上記突起部が嵌合する嵌合孔が形成され、
上記各突起部は、ワークの幅方向の端縁に当接して前記端縁を搬送方向と平行に位置決めすることを特徴とする搬送用治具。
Both end portions in the width direction of the workpiece arranged rectangular shape horizontal posture from above and below a conveying jig for clamping,
An upper jig member and a lower jig member;
Both jig members have clamping surfaces with a high coefficient of friction that contact the upper and lower surfaces of the end portion in the width direction of the workpiece,
One jig member is formed with a protrusion arranged at an interval in the workpiece conveying direction, and the other jig member is formed with a fitting hole into which the protrusion is fitted.
Each protrusion, conveying jig, characterized by positioning the flat row and conveying direction said edge in contact with the width direction of the edge of the workpiece.
請求項2に記載の搬送用治具において、
前記突起は円柱状に形成され、前記嵌合孔は円形に形成されている搬送用治具。
In the conveying jig according to claim 2 ,
The protrusion is formed in a cylindrical shape, and the fitting hole is formed in a circular shape.
平姿勢に配置された矩形状のワークの幅方向の両端部を上下から挟持する搬送用治具であって、
上側治具部材と下側治具部材とを備え、
両治具部材は、ワークの幅方向の端部の上下面にそれぞれ当接する摩擦係数の高い挟持面を有し、
一方の治具部材には、該治具部材のワーク搬送方向の全長に亘って延びる筋状の段部が形成され、他方の治具部材には、上記段部が嵌合する嵌合溝が形成され、
上記段部は、ワークの幅方向の端縁に当接して前記端縁を搬送方向と平行に位置決めすることを特徴とする搬送用治具。
Both end portions in the width direction of the workpiece arranged rectangular shape horizontal posture from above and below a conveying jig for clamping,
An upper jig member and a lower jig member;
Both jig members have clamping surfaces with a high coefficient of friction that contact the upper and lower surfaces of the end portion in the width direction of the workpiece,
One jig member is formed with a stair-like step portion extending over the entire length of the jig member in the workpiece conveying direction, and the other jig member has a fitting groove into which the step portion is fitted. Formed,
The stepped portion is conveyed jig, characterized by positioning the contact with the end edge in the width direction of the edge of the workpiece in the conveying direction and flat row.
JP2009150001A 2009-06-24 2009-06-24 Work transfer method and jig for surface treatment tank Active JP5441515B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009150001A JP5441515B2 (en) 2009-06-24 2009-06-24 Work transfer method and jig for surface treatment tank

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009150001A JP5441515B2 (en) 2009-06-24 2009-06-24 Work transfer method and jig for surface treatment tank

Publications (2)

Publication Number Publication Date
JP2011006183A JP2011006183A (en) 2011-01-13
JP5441515B2 true JP5441515B2 (en) 2014-03-12

Family

ID=43563347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009150001A Active JP5441515B2 (en) 2009-06-24 2009-06-24 Work transfer method and jig for surface treatment tank

Country Status (1)

Country Link
JP (1) JP5441515B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101913300B1 (en) * 2012-02-27 2018-10-30 주성엔지니어링(주) Transferring Apparatus for Boards and Controlling Method for the same
KR102656981B1 (en) * 2018-03-27 2024-04-11 가부시키가이샤 에바라 세이사꾸쇼 Cleaning appratus, plating apparatus including the same, and cleaning method
JP2024034527A (en) * 2022-08-31 2024-03-13 ファスフォードテクノロジ株式会社 Semiconductor manufacturing device and manufacturing method for semiconductor device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2500024B2 (en) * 1991-02-05 1996-05-29 富士通株式会社 A jig for conveyor work of thin printed wiring boards
JP2006347732A (en) * 2005-06-17 2006-12-28 Fujifilm Holdings Corp Sheet-like recording medium supply device
TWI319720B (en) * 2007-04-16 2010-01-21 Conveyor for substrate material

Also Published As

Publication number Publication date
JP2011006183A (en) 2011-01-13

Similar Documents

Publication Publication Date Title
US11062929B2 (en) Device and method for treating substrates using a support roller having a porous material
JP5441515B2 (en) Work transfer method and jig for surface treatment tank
JP2008285323A (en) Conveyor for base plate material
TWI492812B (en) Grinding equipment and grinding method
TW201342517A (en) Substrate treating apparatus
JP2008085119A (en) Chemical treatment device
JP5502443B2 (en) Substrate transfer device
JP2008137733A (en) Conveyor for surface treating device
JP2008168200A (en) Bar coater
JPWO2008072403A1 (en) Non-contact liquid sealing apparatus and method
JP2008248337A (en) Energization processing apparatus and manufacturing apparatus for film with plated film
JP4504839B2 (en) Substrate processing equipment
JP2006245125A (en) Substrate treatment apparatus and method therefor
JP4602567B2 (en) Substrate cleaning device
JP2010280925A (en) Surface treatment device and surface treatment system, method for surface treatment and band-shaped thin body treated thereby
KR101234960B1 (en) Carrier System for Horizontal Conveyance Flatten Objects and Method for Establishing In-Line Dipping Using the Same
JP2010179987A (en) Surface treatment system and surface treatment method
TWI451002B (en) Treatment method of web, treatment tank, continuously electrolysis plating device and method for producing plastic film with plating film
US5720813A (en) Thin sheet handling system
JP5745631B2 (en) Sheet material conveying apparatus and sheet material conveying method
JP6602648B2 (en) Thin plate liquid transport device
JP2008156068A (en) Conveyor of surface processing device
JP2002026490A (en) Substrate-treating apparatus and treated substrate obtained by it
KR20110080829A (en) Module for transferring a substrate and apparatus for processing a substrate including the same
JP3612378B2 (en) Transport device and transport method for substrate for liquid crystal display element

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120515

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20130327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20130327

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130918

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130924

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131107

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131203

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131217

R150 Certificate of patent or registration of utility model

Ref document number: 5441515

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250