TWI319720B - Conveyor for substrate material - Google Patents
Conveyor for substrate materialInfo
- Publication number
- TWI319720B TWI319720B TW096116446A TW96116446A TWI319720B TW I319720 B TWI319720 B TW I319720B TW 096116446 A TW096116446 A TW 096116446A TW 96116446 A TW96116446 A TW 96116446A TW I319720 B TWI319720 B TW I319720B
- Authority
- TW
- Taiwan
- Prior art keywords
- conveyor
- substrate material
- substrate
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007106822 | 2007-04-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200841935A TW200841935A (en) | 2008-11-01 |
TWI319720B true TWI319720B (en) | 2010-01-21 |
Family
ID=40033410
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096116446A TWI319720B (en) | 2007-04-16 | 2007-05-09 | Conveyor for substrate material |
TW096149897A TW200843019A (en) | 2007-04-16 | 2007-12-25 | Conveyer for a substrate material |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096149897A TW200843019A (en) | 2007-04-16 | 2007-12-25 | Conveyer for a substrate material |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2008285323A (en) |
KR (1) | KR20080093365A (en) |
CN (1) | CN101288863A (en) |
TW (2) | TWI319720B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602760B (en) * | 2013-05-07 | 2017-10-21 | Sheet conveyor |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100944281B1 (en) * | 2008-05-19 | 2010-02-24 | 김원식 | A printer structure for head assemble type |
DE102009018393B4 (en) * | 2009-04-22 | 2017-05-24 | Atotech Deutschland Gmbh | Method, holding means, apparatus and system for transporting a flat material to be treated and loading or unloading device |
JP5441515B2 (en) * | 2009-06-24 | 2014-03-12 | 上村工業株式会社 | Work transfer method and jig for surface treatment tank |
KR101234946B1 (en) * | 2011-11-21 | 2013-02-19 | 삼성전기주식회사 | Apparatus for transfering circuit board, and facility for treating black oxide |
JP2013122500A (en) * | 2011-12-09 | 2013-06-20 | Nitto Denko Corp | Long laminated film manufacturing method |
US9855590B2 (en) * | 2012-12-12 | 2018-01-02 | Jfe Steel Corporation | Steel-sheet snaking preventing device and steel-sheet snaking preventing method for vertical looper |
CN204660915U (en) * | 2015-04-10 | 2015-09-23 | 宇宙电路板设备(深圳)有限公司 | A kind of soft board feedway |
JP6682226B2 (en) * | 2015-10-02 | 2020-04-15 | キヤノン株式会社 | Image forming device |
CN106111441A (en) * | 2016-08-30 | 2016-11-16 | 开平太平洋绝缘材料有限公司 | A kind of gumming device of prepreg |
CN107487057B (en) * | 2017-07-31 | 2024-05-07 | 平湖市新保纺织科技有限公司 | Conveying device of hot melting compounding machine |
CN110112087A (en) * | 2019-05-23 | 2019-08-09 | 德淮半导体有限公司 | Wafer transfer box and its control method |
CN110980218B (en) * | 2019-12-30 | 2021-02-09 | 合肥海明科技股份有限公司 | Five-port linear sorting device for e-commerce |
CN112090674B (en) * | 2020-08-25 | 2022-08-19 | 泰州市津达电子科技有限公司 | Roadside tree lime smearing device |
CN113578632A (en) * | 2021-08-06 | 2021-11-02 | 灵璧县德军家具制造有限公司 | Automatic spraying equipment for furniture manufacturing and spraying process thereof |
CN115418640B (en) * | 2022-11-07 | 2023-03-24 | 苏升智能科技徐州有限公司 | Sheet metal surface etching treatment equipment |
CN116062458B (en) * | 2023-04-03 | 2023-07-28 | 江苏环亚医用科技集团股份有限公司 | Conveying and dispensing mechanism for clean operating room |
-
2007
- 2007-05-09 TW TW096116446A patent/TWI319720B/en not_active IP Right Cessation
- 2007-09-25 JP JP2007246605A patent/JP2008285323A/en active Pending
- 2007-12-25 TW TW096149897A patent/TW200843019A/en unknown
-
2008
- 2008-03-21 KR KR1020080026388A patent/KR20080093365A/en not_active Application Discontinuation
- 2008-04-10 CN CNA2008100897897A patent/CN101288863A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602760B (en) * | 2013-05-07 | 2017-10-21 | Sheet conveyor |
Also Published As
Publication number | Publication date |
---|---|
CN101288863A (en) | 2008-10-22 |
KR20080093365A (en) | 2008-10-21 |
JP2008285323A (en) | 2008-11-27 |
TW200843019A (en) | 2008-11-01 |
TW200841935A (en) | 2008-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |