CN110112087A - Wafer transfer box and its control method - Google Patents
Wafer transfer box and its control method Download PDFInfo
- Publication number
- CN110112087A CN110112087A CN201910434004.3A CN201910434004A CN110112087A CN 110112087 A CN110112087 A CN 110112087A CN 201910434004 A CN201910434004 A CN 201910434004A CN 110112087 A CN110112087 A CN 110112087A
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- Prior art keywords
- wafer
- transfer box
- wafer transfer
- sliding
- rail structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
It includes: rail structure part that technical solution of the present invention, which discloses a kind of wafer transfer box and its control method, the wafer transfer box, is set to wafer transfer box side wall；Wafer holder has sliding part and clamping part, and the sliding part and the rail structure part cooperate, and the clamping part and wafer cooperate；Control mechanism is connect with the wafer holder, is slided with controlling the wafer holder along the rail structure part.Technical solution of the present invention can also scratch the wafer in wafer transfer box, to promote product yield to avoid the wafer in wafer transfer box because of influence of the Particulate Pollution to follow-up process caused by mechanical arm to avoid mechanical arm.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors more particularly to a kind of wafer transfer box and its control methods.
Background technique
Front open type wafer feeder (FOUP, Front Opening Unified Pod)) it is to be used in manufacture of semiconductor
Protect, transport and store a kind of container of wafer (Wafer), inside can accommodate multi-disc (generally 25) wafer.
In semiconductor fabrication, wafer transfer box temporarily stores the work that wafer transmits between each board as wafer
Tool, plays the role of extremely important.The wafer transfer box space closed as one keeps the stabilization and cleaning of interior environment,
It can be contacted to avoid wafer with the direct of external environment, guarantee the stabilization of technique while reducing environmental impact factor.
In current production, since toilet's clean-up performance, board environment and process flow conditions, wafer transfer box exist
After being transported to load port (Load Port), board mechanical arm protrudes into wafer transfer box and carries out crawl wafer.However, manipulator
Arm when grabbing the wafer in wafer transfer box may the certain particle (Particle) of remaining and stain wafer transfer box with
And wafer therein is deposited in, or even due to the cause of fluctuation of wafer and mechanical arm, it is caused in the process of grasping to adjacent to it
The scuffing of its wafer.
Summary of the invention
How technical solution of the present invention improves mechanical arm when grabbing the wafer in wafer transfer box to crystalline substance if being to solve
Justify the pollution problem of feeder and wafer and the scuffing problem to neighbouring other wafers.
In order to solve the above technical problems, technical solution of the present invention provides a kind of wafer transfer box, comprising: rail structure part,
Set on wafer transfer box side wall；Wafer holder, has sliding part and clamping part, and the sliding part is matched with the rail structure part
It closes, the clamping part and wafer cooperate；Control mechanism is connect with the wafer holder, to control the wafer holder edge
The rail structure part sliding.
Optionally, the rail structure part includes the supporting track and the connection branch set on the wafer transfer box side wall
Support the insert of track；The sliding part has embedded space, and the sliding part slides on the supporting track.
Optionally, the length of the supporting track and the length of the wafer transfer box side wall are adapted, alternatively, the branch
The sliding distance of the length and the wafer holder that support track is adapted.
Optionally, the rail structure part is sliding track slot, and the sliding part slides in the sliding track slot.
Optionally, the length of the sliding track slot and the length of the wafer transfer box side wall are adapted, alternatively, described
The sliding distance of the length of sliding track slot and the wafer holder is adapted.
Optionally, the sliding part includes slider bar, gear, steel ball or pulley.
Optionally, the clamping part is using pneumatically clamping down on or electronic clamp down on.
Based on above-mentioned wafer transfer box, the control method of the wafer transfer box of technical solution of the present invention includes: control machine
Structure controls the wafer holder in the wafer transfer box and slides along the rail structure part to outside wafer transfer box, the wafer
The clamping part of supporting element locks wafer；When the wafer, which is moved to, partly or entirely to be exposed outside the wafer transfer box, control
The clamping part of wafer holder described in mechanism controls processed unlocks the wafer.
Optionally, the part is 1/2~2/3.
Optionally, the control method further include: control mechanism controls the wafer holder edge in the wafer transfer box
The rail structure part slides into appropriate location to outside wafer transfer box；The wafer holder is placed the wafer in mechanical arm
After clamping part, control mechanism controls the clamping part and locks the wafer, and controls the wafer holder along the sliding rail knot
Component is slided into wafer transfer box.
Compared with prior art, technical solution of the present invention has the advantages that
The mechanism that is slidably matched is set in wafer transfer box, and the mechanism that is slidably matched includes rail structure part and wafer branch
Support member is slidably matched mechanism by wafer removal or feeding wafer transfer box, so that mechanical arm crawl is brilliant using control mechanism control
Circle carries out all outside wafer transfer box, not only can grab remaining particle because of mechanical arm to avoid the wafer in wafer transfer box
Object pollution can also scratch the wafer in wafer transfer box, so that it is guaranteed that the clean environment of storing wafer, avoids to avoid mechanical arm
Wafer contamination and influence follow-up process, and then promoted product yield.
Wafer is locked using the clamping part of wafer holder, wafer can be made smoothly to remove or be sent into wafer transmission
Box can damage to avoid wafer because fluctuating or falling off, and can also touch other wafers to avoid wafer on the move, further mention
Rise product yield.
Detailed description of the invention
Fig. 1 is the top view of the wafer transfer box of the embodiment of the present invention；
Fig. 2 is the main view of the partial structurtes of the wafer transfer box of the embodiment of the present invention；
Fig. 3 and Fig. 4 is status diagram of the wafer holder in different location of the wafer transfer box of the embodiment of the present invention.
Specific embodiment
In current semiconductors manufacture, board mechanical arm, which protrudes into, carries out crawl wafer in wafer transfer box, mechanical arm exists
Particle that may be remaining when grabbing the wafer in wafer transfer box can stain wafer transfer box, or even due to wafer and mechanical arm
Cause of fluctuation, cause the scuffing to other wafers are closed in the process of grasping.
Based on this, technical solution of the present invention proposes that a kind of wafer transfer box, the wafer transfer box inner wall are equipped with sliding and match
Mechanism is closed, wafer removal wafer transfer box is grabbed into wafer by mechanical arm again using mechanism is slidably matched, it thus will not be in box
Interior residual particles and stain wafer transfer box, the other wafers being stored in box will not be scratched.
Technical solution of the present invention is described in detail below with reference to embodiment and attached drawing.
Incorporated by reference to reference Fig. 1 and Fig. 2, the wafer transfer box 1 of the embodiment of the present invention, comprising: rail structure part 12, wafer branch
Support member 13 and control mechanism 14.
The rail structure part 12 is set to wafer transfer box side wall 11.When it is implemented, can be the two of wafer transfer box 1
Rail structure part 12 is respectively set on relative inner wall 11.Usual wafer transfer box 1 can store more wafers, therefore, it is necessary to
In every layer crystal circular groove (Slot), opposite rail structure part 12 is all set.
The wafer holder 13 has sliding part 131 and clamping part 132, the sliding part 131 and the rail structure
Part 12 cooperates, and the clamping part 132 cooperates with wafer (being represented by dotted lines in Fig. 1).The sliding part 131 and cunning of wafer holder 13
The shape or structure of rail structural member 12 cooperate, so that sliding part 131 can be slided or be moved along rail structure part 12.Wafer
The clamping part 132 of supporting element 13 and the shape of wafer or structure cooperate, so that clamping part 132 can be clamped and lock crystalline substance
Circle, when wafer is stored in wafer transfer box 1 guarantee wafer will not move, and wafer holder 13 by wafer send out or
Guarantee the stationarity of wafer when being sent into wafer transfer box 1.
Control mechanism 14 is connect with the wafer holder 13, to control the wafer holder 13 along the sliding rail knot
Component 12 slides.Control mechanism 14 may include the transmission parts (not shown) connecting with wafer holder 13, with driving
Wafer holder 13 is slided to outside wafer transfer box 1 along the rail structure part 12 or is slided into wafer transfer box 1.
In the present embodiment, the rail structure part 12 includes the supporting track 121 set on the wafer transfer box side wall 11
With the insert 122 for connecting the supporting track 121.The sliding part 131 has embedded space 131a, for insert 122
Insert 122 is surrounded in insertion, i.e. sliding part 131.The sliding part 131 can slide on the supporting track 121, specifically
Gear, steel ball or pulley, gear, steel ball or pulley energy can be set in ground, the part that sliding part 131 is contacted with supporting track 121
It is enough to be rolled on supporting track 121, alternatively, the part that sliding part 131 is contacted with supporting track 121 may be strip, it can
Enough slider bars slided on supporting track 121.
The length of the supporting track 121 can be adapted with the length of the wafer transfer box side wall 11, specifically, branch
The length for supportting track 121 can be equal to or less than the length of wafer transfer box side wall 11, and guarantee that wafer holder 13 can be
It is slided on supporting track 121 and supporting track 121 will not be fully slid out.Alternatively, the length of the supporting track 121 can also be with
The sliding distance of the wafer holder 13 is adapted, and specifically, the length of supporting track 121 can be equal to or more than wafer branch
The sliding distance of support member 13, to guarantee that wafer holder 13 can be slided on supporting track 121 and will not fully slide out support
Track 121.In addition, the insert 122 or strip, length and supporting track 121 are identical, supporting track 121
It can be integrally formed with insert 122.
It should be noted that slide construction part and sliding part are not limited to structure described in the present embodiment (such as Fig. 1 and Fig. 2
It is shown), it can also be the mechanism that is slidably matched of other structures.For example, the rail structure part can be sliding track slot,
The sliding part slides in the sliding track slot.The part that the sliding part is contacted with sliding track slot may include sliding
Item, gear, steel ball or pulley.
The length of the sliding track slot and the length of the wafer transfer box side wall are adapted, specifically, the sliding
The length of track groove can be equal to or less than the length of wafer transfer box side wall, and guarantee that the sliding part of the wafer holder can
To be slided in the sliding track slot and the sliding track slot will not be fully slid out.Alternatively, the length of the sliding track slot
Degree and the sliding distance of the wafer holder are adapted, and specifically, the length of the sliding track slot can be equal to or more than
The sliding distance of the wafer holder, to guarantee that the sliding part of the wafer holder can be slided in the sliding track slot
It moves and the sliding track slot will not be fully slid out.
In the present embodiment, the clamping part 132 has groove 132a, to accommodate crystal round fringes.Clamping part 132 can be adopted
With pneumatically clamp down on or it is electronic clamp down on, by control mechanism 14 control locking or unlock wafer.
Wafer transfer box based on above structure, the control method of the wafer transfer box of the embodiment of the present invention include: control
Wafer holder in wafer transfer box described in mechanism controls is slided along the rail structure part to outside wafer transfer box, the crystalline substance
The clamping part of circle supporting element locks wafer；When the wafer, which is moved to, partly or entirely to be exposed outside the wafer transfer box,
The clamping part that control mechanism controls the wafer holder unlocks the wafer.
Specifically, as shown in figure 3, wafer 2 is stored in wafer transfer box 1, wafer 2 is by the clamping part of wafer holder 13
132 lockings clamp, therefore will not arbitrarily move in wafer transfer box 1, and neighbouring wafer mutually will not be touched or be polluted.
When needing to be stored in the taking-up of the wafer in wafer transfer box 12, corresponding to the wafer 2 that the selection of control mechanism 14 needs to take out
Wafer holder 13 and control the wafer holder 13 and slided along rail structure part 12 to outside wafer transfer box 1, drive by this
The wafer 2 that the clamping part 132 of wafer holder 13 is locked is moved to outside wafer transfer box 1, since wafer 2 is clamped down on positioning, institute
It will not arbitrarily be moved with wafer 2 relative to wafer holder 13, ensure that wafer 2 can smoothly remove wafer transfer box 1, no
Wafer can be caused to damage because fluctuating or falling off.
As shown in figure 4, partly or entirely exposing when wafer transfer box 1 is outer when wafer 2 is moved to, control mechanism 14 is controlled
Wafer holder 13 stops sliding, and controls the unlock of clamping part 132 or unclamp wafer 2, and then, mechanical arm can take out wafer
2.Since mechanical arm grabs wafer 2 outside wafer transfer box 2, will not in wafer transfer box 2 residual particles and pollute crystalline substance
Circle feeder and other wafers therein, and mechanical arm will not touch other wafers in wafer transfer box and cause pair
The scuffing of wafer.In general, when 2 part of wafer exposes wafer transfer box or all exposes wafer transfer box, mechanical arm is all
Wafer can be grabbed.Optionally, achieve the purpose that avoid staiing to guarantee enough amount removed, and avoid amount removed mistake
Cause the risk that wafer is fallen, the amount removed of wafer, which can control, removes 1/2 to 2/3 part in wafer, and control mechanism can more
To control the wafer holder stopping sliding and unlock wafer, so that mechanical arm can grab the wafer.
In the present embodiment, the control method of the wafer transfer box can also include: that control mechanism controls the wafer biography
The wafer holder in box is sent to slide into appropriate location to outside wafer transfer box along the rail structure part；In mechanical arm by wafer
After being put into the clamping part of the wafer holder, control mechanism controls the clamping part and locks the wafer, and controls the crystalline substance
Circle supporting element is slided along the rail structure part into wafer transfer box.
Specifically, when needing wafer depositing in wafer transfer box, as shown in Figure 1, control mechanism 14 controls the crystalline substance
Wafer holder 13 in circle feeder 1 slides into appropriate location to outside wafer transfer box 1 along the rail structure part 12, such as
It can be identical as the position that wafer stops is sent out.
As shown in figure 4, wafer 2 is inserted into the clamping part 132 of wafer holder 13 by mechanical arm, then, control mechanism 14 is controlled
Clamping part 132 processed locks wafer 2.Control mechanism 14 further control sliding part 131 along rail structure part 12 to wafer transfer box 1
Predetermined position is inside slid into, as shown in Figure 3.Since wafer 2 is clamped down on positioning, thus wafer 2 relative to wafer holder 13 not
It can arbitrarily move, ensure that wafer 2 can smoothly be sent into wafer transfer box 1, wafer will not be caused to damage because fluctuating or falling off
Wound, will not touch and be damaged to other wafers.
In conclusion the wafer transfer box and its control method of technical solution of the present invention are using the mechanism that is slidably matched by wafer
It removes and is sent into wafer transfer box and thus avoid mechanical arm in wafer so that mechanical arm grabs wafer outside wafer transfer box
Residual particles in feeder pollute wafer, and then influence follow-up process, also avoid mechanical arm and scratch in wafer transfer box
Wafer.
Although the present invention discloses as above in a preferred embodiment thereof, it is not for limiting the present invention, any ability
Field technique personnel without departing from the spirit and scope of the present invention, may be by the methods and technical content of the disclosure above to this
Inventive technique scheme makes possible variation and modification, therefore, anything that does not depart from the technical scheme of the invention, according to this hair
Bright technical spirit belongs to the technology of the present invention to any simple modifications, equivalents, and modifications made by embodiment of above
The protection scope of scheme.
Claims (10)
1. a kind of wafer transfer box characterized by comprising
Rail structure part is set to wafer transfer box side wall；
Wafer holder has sliding part and clamping part, and the sliding part and the rail structure part cooperate, the clamping part with
Wafer cooperation；
Control mechanism is connect with the wafer holder, is slided with controlling the wafer holder along the rail structure part.
2. wafer transfer box as described in claim 1, which is characterized in that the rail structure part includes being set to the wafer to pass
It send the supporting track of box side wall and connects the insert of the supporting track；The sliding part has embedded space, the sliding
It is slided on the supporting track in portion.
3. wafer transfer box as claimed in claim 2, which is characterized in that the length of the supporting track and the wafer transmit
The length of box side wall is adapted, alternatively, the sliding distance of the length of the supporting track and the wafer holder is adapted.
4. wafer transfer box as described in claim 1, which is characterized in that the rail structure part is sliding track slot, described
Sliding part slides in the sliding track slot.
5. wafer transfer box as claimed in claim 4, which is characterized in that the length of the sliding track slot and the wafer pass
The length of box side wall is sent to be adapted, alternatively, the length of the sliding track slot and the sliding distance of the wafer holder are mutually fitted
It answers.
6. wafer transfer box as claimed in claim 2 or 4, which is characterized in that the sliding part includes slider bar, gear, steel
Pearl or pulley.
7. wafer transfer box as described in claim 1, which is characterized in that the clamping part use is pneumatically clamped down on or electronic pincers
System.
8. a kind of control method of the described in any item wafer transfer boxes of claim 1 to 7 characterized by comprising
It is sliding to outside wafer transfer box along the rail structure part that control mechanism controls the wafer holder in the wafer transfer box
Dynamic, the clamping part of the wafer holder locks wafer；
When the wafer, which is moved to, partly or entirely to be exposed outside the wafer transfer box, control mechanism controls the wafer branch
The clamping part of support member unlocks the wafer.
9. control method as claimed in claim 8, which is characterized in that the part is 1/2~2/3.
10. the control method of wafer transfer box as claimed in claim 8, which is characterized in that further include:
It is sliding to outside wafer transfer box along the rail structure part that control mechanism controls the wafer holder in the wafer transfer box
It moves to appropriate location；
After the clamping part that mechanical arm places the wafer in the wafer holder, control mechanism is controlled described in the clamping part locking
Wafer, and control the wafer holder and slided along the rail structure part into wafer transfer box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910434004.3A CN110112087A (en) | 2019-05-23 | 2019-05-23 | Wafer transfer box and its control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910434004.3A CN110112087A (en) | 2019-05-23 | 2019-05-23 | Wafer transfer box and its control method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110112087A true CN110112087A (en) | 2019-08-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910434004.3A Pending CN110112087A (en) | 2019-05-23 | 2019-05-23 | Wafer transfer box and its control method |
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| CN (1) | CN110112087A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112918806A (en) * | 2021-01-28 | 2021-06-08 | 西安奕斯伟硅片技术有限公司 | Silicon wafer packing device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1909203A (en) * | 2005-08-04 | 2007-02-07 | 爱德牌工程有限公司 | Clamping device, substrate transmitting device, and on-line fpd automatic optical detection device |
| JP2008285323A (en) * | 2007-04-16 | 2008-11-27 | Tokyo Kakoki Kk | Conveyor for base plate material |
| CN207676892U (en) * | 2017-11-08 | 2018-07-31 | 德淮半导体有限公司 | wafer transfer box |
| CN208570577U (en) * | 2018-08-06 | 2019-03-01 | 上海东煦电子科技有限公司 | A kind of semiconductor crystal wafer clamping device |
-
2019
- 2019-05-23 CN CN201910434004.3A patent/CN110112087A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1909203A (en) * | 2005-08-04 | 2007-02-07 | 爱德牌工程有限公司 | Clamping device, substrate transmitting device, and on-line fpd automatic optical detection device |
| JP2008285323A (en) * | 2007-04-16 | 2008-11-27 | Tokyo Kakoki Kk | Conveyor for base plate material |
| CN207676892U (en) * | 2017-11-08 | 2018-07-31 | 德淮半导体有限公司 | wafer transfer box |
| CN208570577U (en) * | 2018-08-06 | 2019-03-01 | 上海东煦电子科技有限公司 | A kind of semiconductor crystal wafer clamping device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112918806A (en) * | 2021-01-28 | 2021-06-08 | 西安奕斯伟硅片技术有限公司 | Silicon wafer packing device |
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Application publication date: 20190809 |