CN101288863A - Conveyer belt of substrate material - Google Patents
Conveyer belt of substrate material Download PDFInfo
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- CN101288863A CN101288863A CNA2008100897897A CN200810089789A CN101288863A CN 101288863 A CN101288863 A CN 101288863A CN A2008100897897 A CNA2008100897897 A CN A2008100897897A CN 200810089789 A CN200810089789 A CN 200810089789A CN 101288863 A CN101288863 A CN 101288863A
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- baseplate material
- face
- roller
- conveyer belt
- transports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
The subjective of the invention consist in providing a conveying belt for a substrate material, wherein firstly, the conveying belt prevents the shaking, S-shaped swing of the substrate material so as to avoid conveying accidents and to realize steady horizontal conveying; secondly, the conveying belt prevents the slide of the substrate material to thereby achieve the steady horizontal conveying; thirdly, the above situations are accomplished on condition that scratch, scar and damage are not led to the substrate material. The conveying belt (3) is used for a surface processing device (1) of the substrate material (A). The surface processing device (1) comprises a chemical solution trough (5) of treatment solution (B); the conveying belt (3) for conveying the substrate material within the solution in the chemical solution trough (5); a nozzle for spraying the treatment solution (B) to the substrate material (A) within the solution. The conveying belt (3) is not contacted with a circuit formation surface (D) of the substrate material (A) , end face conveying rolls (8, 9), which clamp left and right two end faces (E) along upper and lower directions to convey, are arrayed to dispose on the conveying belt (3), the end face conveying rolls (8, 9) use a straight roll (R1) and an inclined roll (R2) and perform antiskid treatment on the outer circumference thereof.
Description
Technical field
The present invention relates to the conveyer belt of baseplate material.That is, the present invention relates to be used for the manufacturing process of circuit substrate, the conveyer belt of the end face method of shipment of surface processing device.
Background technology
The progress highly significant of the change as thin as a wafer of the miniaturization and of the circuit substrate that electronic equipment adopted, thickness, flexibility and then multiple stratification, semiconductor packagesization etc. is handled for the granular of formed electronic circuit equally, and densification is handled also remarkable.
In addition, in the manufacturing process of such circuit substrate, adopt surface processing device, baseplate material carries out surface treatment by the treatment fluid of chemical liquids, cleaning fluid etc.
In this surface processing device, by up and down the transport roller level of conveyer belt transport baseplate material on one side, on one side from the nozzle ejection treatment fluid, thus, carry out surface treatment successively, form electronic circuit, make circuit substrate.
In addition, in the past, conveyer belt, nozzle be arranged in the atmosphere, aerial, baseplate material carries out surface treatment by the treatment fluid that sprays in atmosphere, in the air, but, the progress of following nearest thickness to change as thin as a wafer, baseplate material can't be resisted the expulsion pressure of treatment fluid, the weight of treatment fluid, the accident that deflection, clot often take place, drops.
So, in order to tackle these accidents, people are by following surface processing device, seek the solution of the generation problem of above-mentioned accident, in this surface processing device, conveyer belt, nozzle are arranged in the chemical liquid bath that is full of treatment fluid, thus, in liquid, transport the baseplate material that does not have toughness as thin as a wafer on one side, by the treatment fluid that in liquid spray it carried out surface treatment on one side.
As such surface processing device, such as, enumerate in the following patent documentation 1,2 shown in form.Patent documentation 1 relates to aerial spray regime, and patent documentation 2 relates to spray regime in the liquid.
Patent documentation 1: TOHKEMY 2002-68435 document
Patent documentation 2: Japanese kokai publication hei 10-079565 document
(about the conveyer belt of end face method of shipment)
In addition, the inventor is at the surface processing device of spray regime in the liquid, further study, on September 28th, 18 to propose application number be Japanese Patent Application 2006-264189 number patent application in putting down into, the main contents of this patent application are at this conveyer belt, do not contact, only transport the both sides end face, end face is set in liquid transports roller from clamping up and down with the circuit formation face of baseplate material.
Promptly, in this conveyer belt in the past, owing to transporting roller, the whole face that transports from the whole surfaces externally and internally of clamping baseplate material up and down is arranged at the liquid, so on the circuit formation face of baseplate material, be easy to generate the infringement of scratch, scar, damage etc., going wrong aspect reliability, the yield rate, but present patent application plans to solve such problem (the present invention is the improvement invention of this patent application).
Summary of the invention
But at the conveyer belt that is the surface processing device of the end face method of shipment under the spray regime in such liquid, recently, following aspect becomes problem.That is, the baseplate material that is transported rocks, S shape swing, thus, transports precision and reduces, and baseplate material stable is transported to produce hinder.
These aspects are further specifically described.In this conveyer belt, not having the baseplate material of toughness as thin as a wafer only is the narrower both sides end face of the width of 10mm in clamping amount, the amount of holding only on one side, up and down end face transports between the roller about being held on, in liquid, transport, on one side in liquid inject process liquid.So baseplate material bears the expulsion pressure of treatment fluid, the influence of weight, dandle, produce fluctuating shape, deflection, lax easily, so, the danger with the accident of transporting that drops etc.
In addition, transport in several meters～tens of meters scope in the liquid of baseplate material, be not easy equably (such as, all impartial by the clamp pressure that end face transports roller) be assemblied in the resinous conveyer belt that the scope of total length is provided with.So, the influence of above-mentioned expulsion pressure etc. not only being arranged, but also have the defective of such conveyer belt, baseplate material is left and right deviation easily halfway, carries out the swing of S shape, so, the danger that from this respect, has the accident of transporting that drops etc.
In addition, because these transport accident, people also point out the problem that the surface treatment precision of baseplate material reduces.
The conveyer belt of baseplate material of the present invention has drawn the result of present inventors' further investigation effort at such actual conditions, so that solve the above-mentioned problem of example in the past.
So, the object of the present invention is to provide a kind of conveyer belt of baseplate material, wherein, the 1st, prevent the rocking of baseplate material, the swing of S shape; And the 2nd, also prevent the slip of baseplate material; The 3rd, baseplate material is not caused damage and realize.
The technical scheme of the present invention that solves such problem is as described below.At first, technical scheme 1 is as described below.
The conveyer belt of technical scheme 1 described baseplate material is used for the surface processing device of baseplate material.This surface processing device comprises the chemical liquid bath that is full of by treatment fluid; In this chemistry liquid bath, in liquid, transport the conveyer belt of baseplate material; In this chemistry liquid bath, in liquid to the nozzle of baseplate material inject process liquid.
It is characterized in that this conveyer belt does not contact with the circuit formation face of baseplate material, only transport the end face of the left and right sides end face of baseplate material along clamping up and down and transport roller and arrange along carriage direction and be provided with.In addition, transport roller as this end face, adopt in combination towards carriage direction directly advance roller with relative carriage direction slightly laterally cross roll.
Technical scheme 2 is as described below.The conveyer belt of the baseplate material of technical scheme 2 relates to technical scheme 1 described conveyer belt, and this directly advances roller and transports baseplate material towards carriage direction, and this cross roll is carriage direction and towards slightly oblique outside stretching substrate material relatively on one side, on one side it is transported.So baseplate material is kept flat-hand position at the state that stretches along carriage direction on one side, Yi Bian transport.
Technical scheme 4 is as described below.The conveyer belt of technical scheme 4 described baseplate materials relates to the conveyer belt of technical scheme 1 described baseplate material, it is characterized in that, transports at this end face on the outer peripheral face of roller and carries out anti-skidding processing.
Technical scheme 5 is as described below.The conveyer belt of technical scheme 5 described baseplate materials relates to the conveyer belt of technical scheme 4 described baseplate materials, it is characterized in that, the anti-skidding processing that this end face transports roller by such as, the trickle concavo-convex reticulate pattern of knurling forms, by really clamping and be held in this baseplate material that transports in the liquid up and down, realization can prevent the function based on the slip that stretches.
The present invention forms by such mechanism, thus, and as following.
(1) this surface processing device is used for the manufacturing process of circuit substrate, and baseplate material is carried out surface treatment.
(2) in addition, in the chemical liquid bath of treatment fluid, conveyer belt and nozzle are set.
(3) in this conveyer belt, about up and down end face transport the left and right sides face of roller clamping baseplate material and realize transporting.
(4) transport roller as such end face, adopt and directly advance roller and cross roll.
(5) so, baseplate material along about width apply tension force, being drawn into the state of pin, maintain flat-hand position, transport simultaneously along carriage direction.
(6) baseplate material does not have toughness as thin as a wafer, in addition, carries out transporting in the liquid, sprays in the liquid, although clamping both sides end face and transporting still can prevent to rock, the generation of S shape swing.
(7) in addition, free and compatibly adopt the integrated mode of directly advancing roller and cross roll selectively so that stop rock, the generation of S shape swing.
(8) also have, such end face is transported roller, that is, the outer peripheral face that directly advances roller and cross roll carries out anti-skidding processing.So the baseplate material that transports in the liquid is from holding reliably up and down, not because of tensile stress slides, the realization level is transported.
(9) so, the effect that the performance of the conveyer belt of baseplate material of the present invention is following.
(the 1st effect)
The 1st, prevent the rocking of baseplate material, the swing of S shape, so, transport precision and improve, realize that stable level transports.
Promptly, the conveyer belt of baseplate material of the present invention uses in combination as what end face transported roller and directly advances roller and cross roll, thus, although to the baseplate material that does not have toughness as thin as a wafer carry out in the liquid spraying, the side end face transports, still can prevent baseplate material swing, form undulations, deflection, lax etc., and can prevent skew, the S shape swing of baseplate material, so, the generation of the accident of transporting of dropping of baseplate material etc. can be avoided.
From these aspects, to compare with aforesaid this existing example, the surface treatment precision of baseplate material further improves.
(the 2nd effect)
The 2nd, prevent the slip of baseplate material, so, from this respect, transport precision and improve, realize that stable level transports.
That is, in conveyer belt of the present invention, what end face transported that roller adopts anti-skidding processing directly advances roller and cross roll.The baseplate material that transports in the liquid bears tensile stress by cross roll, and because of the viscosity of treatment fluid, the photonasty resist of sneaking into etc., is in the situation of easy slip, still, and by so anti-skidding processing, from holding really up and down.
So, clamping and hold baseplate material really, it does not slide, and stably level is transported in liquid.
(the 3rd effect)
The 3rd, in addition, so stable transporting do not realized under the hurtful situation baseplate material.
That is, in the conveyer belt of baseplate material of the present invention, what end face transported that roller adopts anti-skidding processing in combination directly advances roller and cross roll, realizes above-mentioned the 1st, the 2nd effect.
That is, owing to realize stable transporting, so the yet danger that does not contact with the circuit formation face of baseplate material does not contact with circuit formation face, do not cause the infringement of scratch, scar, damage etc., reliability, yield rate are all good.
Like this, realize that the problem that exists in this example in the past all solves etc., the effect of the present invention's performance significantly increases.
Description of drawings
Fig. 1 (1)～Fig. 1 (3) is used to illustrate the preferred form that is used to carry out an invention of baseplate material conveyer belt of the present invention, Fig. 1 (1) is whole main cutaway view, Fig. 1 (2) transports the plane key diagram of roller for the end face in left side, and Fig. 1 (3) transports the plane key diagram of roller for the end face on right side;
Fig. 2 is used for explanation and implements preferred form of the present invention, is the enlarged drawing of the major part of Fig. 1 (1);
Fig. 3 (1)～Fig. 3 (2) is used for explanation and implements preferred form of the present invention, transports the plane key diagram of the integrated mode of roller for end face, the major part of 1 example of Fig. 3 (1) expression, and Fig. 3 (2) represents the major part of another example;
Fig. 4 is used to illustrate and implements the preferred form that the present invention uses, and is the side-looking cross sectional illustration figure of integral body.
The specific embodiment
Following basis is used to implement the preferred form of illustrated invention, and the conveyer of baseplate material of the present invention is specifically described.
Fig. 1 (1)～Fig. 1 (3), Fig. 2, Fig. 3 (1)～Fig. 3 (2) are used to illustrate preferred form of the present invention.In addition, Fig. 1 (1) is whole main cutaway view, and Fig. 1 (2) transports the plane key diagram of roller for the end face in left side, and Fig. 1 (3) transports the plane key diagram of roller for the end face on right side.Fig. 2 is the enlarged drawing of the major part of Fig. 1 (1).
Fig. 3 (1)～Fig. 3 (2) transports the plane key diagram of the integrated mode of roller for end face, the major part of 1 example of Fig. 3 (1) expression, and Fig. 3 (2) is the major part of another example.Fig. 4 is whole side-looking cross sectional illustration figure.
(about circuit substrate)
Surface processing device 1 of the present invention is used for the manufacturing process of the circuit substrate that electronic circuit uses.So, at first, circuit substrate is described.
Miniaturization and, the thickness of electronic circuit board that is used for the printed wiring board etc. of electronic equipment changes as thin as a wafer and the progress highly significant of circuit granular, high-density circuitization, multiple stratification etc.Equally for hard soft energy, compare with the rigid substrate of the rigid substrates in past etc., the progress of soft flexible base plate, increasing significantly as thin as a wafer of flexible base, board and other, the universal of conductor package substrate that semiconductor devices and circuit are integral assembling also carries out rapidly.
So, handle for changing processing, granular as thin as a wafer as the degree that requires of nearest circuit substrate, in the scope of 25 μ m～100 μ m, circuit thickness H is 10 μ m until its thickness of slab, circuit width L, circuit interval S are in the scope of 20 μ m～30 μ m.
Circuit substrate forms like this.
(about surface processing device 1)
Surface processing device 1 is used for the manufacturing process of such circuit substrate, by treatment fluid B baseplate material A is carried out surface treatment.With reference to Fig. 1 (1)～Fig. 1 (3), Fig. 4, surface processing device 1 is described more specifically.
In surface processing device 1, inside at this process chamber 2, baseplate material A to the copper-coated laminated board system that is laid with the photonasty resist that transports by conveyer belt 3, successively from the treatment fluid B of nozzle 4 injections such as developer solution, etching solution, stripper or cleaning fluid etc., so, baseplate material A is carried out the surface treatment of chemical liquids processing, cleaning treatment etc.
Then, surface processing device 1 has chemical liquid bath 5, conveyer belt 3, nozzle 4, storage tank 6 etc. in the inside of process chamber 2.At first, chemical liquid bath 5 is full of with treatment fluid B.That is, chemical liquid bath 5 is at the top of process chamber 2, adopts the support partition wall 7 of double as transmitter support and forms, and fill full by the treatment fluid B identical with the treatment fluid B that sprays from nozzle 4.
Treatment fluid B via pump 10, pipe 11, gives each nozzle 4 by pressure from the storage tank 6 of the bottom of process chamber 2, sprays and gives baseplate material A.Then, from baseplate material A reflection, the treatment fluid B of rebound is absorbed in the treatment fluid B in the chemical liquid bath 5, consequently, is recovered in the storage tank 6 and preserves from the treatment fluid B of chemical liquid bath 5 overflows, recycles once more afterwards.
In addition, nozzle 4 shown in Fig. 3 (1)～Fig. 3 (2) is provided with in the face of ground towards the inside and outside two sides of baseplate material A, but, be the occasion of the single face substrate of an only face at the circuit formation face D of baseplate material A, also consider situation about being provided with in the face of ground towards a face.
Surface processing device 1 forms like this.
(about conveyer belt 3 of end face method of shipment etc.)
Below with reference to Fig. 1 (1)～Fig. 1 (3), the conveyer belt 3 of such surface processing device 1 is described.Conveyer belt 3 does not form face D with the circuit of baseplate material A and contact, from about clamping only the left and right sides end face E of baseplate material A and a plurality of end faces of transporting transport roller 8,9 and arrange along carriage direction C in the inside of chemical liquid bath 5.
But baseplate material A forms face D by the circuit of pars intermedia broad, and front/rear end, the left and right sides end face E narrower with its outer peripheral edges constitute, and the width of front/rear end, both sides end face E is 10mm, and it is that the inverter circuit that is also referred to as ear forms face.
In addition, the end face roller 9 that the end face of top side transports roller 8 and bottom side with the left and right sides end face E of baseplate material A as clamping amount, the amount of holding, up and down in pairs so that transport from clamping up and down, and about arrange along carriage direction C.This end face transports roller 8,9 and forms by the driven roller (driven roller) that rotation drives, via axle 12
1, the axle 12
2, transmit gear 13, driven wheel 14, driving shaft 15 etc., be connected with the driving mechanism (not shown) of motor etc.In addition, end face transports roller and is formed from a resin, and also can be made of metal.
The conveyer belt 3 of end face method of shipment forms substantially like this.
(about directly advancing roller R1, cross roll R2)
To shown in Fig. 1 (1)～Fig. 1 (3), Fig. 3 (1)～Fig. 3 (2) directly advance roller R1, cross roll R2 describes.In this conveyer belt 3, as about up and down end face transport roller 8,9, directly advance roller R1, cross roll R2 uses in combination.
Directly advance roller R1 and directly advance rotation, baseplate material A is transported as the crow flies towards carriage direction C towards carriage direction C.The relative carriage direction C of cross roll R2 rotates slightly laterally, and the relative carriage direction C of baseplate material A towards inclined outer side stretching slightly, transports along carriage direction C simultaneously.So baseplate material A transports along carriage direction C level at the state that launches.
About these aspects, describe more specifically.Directly advance the axle 12 of roller R1
1Be positioned at horizontal plane, and shown in the image pattern 1 (2), Fig. 1 (3) etc. like that, correctly towards left and right sides width F.So, transport roller 8,9 and this end face of example in the past to transport roller identical by directly advancing end face that roller R1 forms, towards with the perpendicular fore-and-aft direction of left and right sides width F, i.e. carriage direction C and rotating.
Relative this situation, the axle 12 among the cross roll R2
2Be positioned at horizontal plane, and shown in the image pattern 1 (2) like that, the axle 12 in left side
2From left and right sides width F with some angle deviatings to the outside, shown in the image pattern 1 (3) like that, the axle 12 in left side
2From left and right sides width F, arrive the outside with some angle deviatings.So, the end face that forms by cross roll R2 transport roller 8,9 relative carriage direction C with some angles slightly towards about the outside, to transport roller different with this end face of example in the past, rotate towards the outside slightly of carriage direction C.
In addition, cross roll R2 also can and with the type of 2 kinds of angles, with the type of more perspective.
End face transport roller 8,9 directly advance roller R1, cross roll R2 forms like this.
(about various integrated modes)
In addition, in this conveyer belt 3, so directly advance roller R1 and cross roll R2 as about up and down end face transport roller 8,9, use according to compound mode, still, this integrated mode can be various.
That is, in the combination of directly advancing roller R1 and cross roll R2, both any person can be transported roller 9 as the end face that the end face of top side transports roller 8, bottom side, in addition, also its any person can be positioned at right side, left side,, consider various patterns by their combination.In addition, transport roller 8,9, also can be the alternatively mixing syntype of the single or multiple placements of carriage direction C about end face up and down.
Such integrated mode is further specifically described.At first, in the pattern shown in Fig. 3 (1), the end face of whole top side in left side transports roller 8 and adopts cross roll R2, and the end face of whole bottom side in left side transports roller 9 employings and directly advances roller R1.The end face up and down on right side transports roller 8,9 and all adopts and directly advance roller R1.Obviously, also can adopt its heterochiral pattern, the pattern that it is opposite up and down.
Then, in the pattern shown in Fig. 1 (1), Fig. 3 (2), about the end face of top side transport roller 8 and adopt cross roll R2, about the end face of bottom side transport roller 9 and adopt and directly advance roller R1.Obviously, also can adopt its opposite up and down pattern.
That is, transport roller 8 according to the end face of (a) top side and be cross roll R2, the end face of bottom side transports roller 9 for directly advancing the combination of roller R1; In contrast, (b) end face of top side transports roller 8 for directly advancing roller R1, and the end face of bottom side transports roller 9 and is the combination of cross roll R2; Have, (c) end face up and down transports the combination that roller 8,9 is cross roll R2 again; In contrast, (d) end face up and down transports roller 8,9 and is combination of directly advancing roller R1 etc., carries out the combination of (a) and (b), (c), (d) according to the mode that is applied to right side and left side respectively, thus, considers various patterns.
Relative this situation, transport roller 8,9 at end face up and down, respectively along carriage direction C, such as, place 1, place 2, place 3, alternately will directly advance roller R1 and cross roll R2 combination, according to this situation, be applied to right side and left side and carry out this combination, by this mode, can realize various patterns equally.
In addition, such integrated mode also can be rule and unified type, still, and also can be not according to this mode, and be irregular run-in index, can freely select.
Like this, consider various integrated modes.
(about anti-skidding processing H)
Below with reference to Fig. 2, describe transport the anti-skidding processing H that carries out in the roller 8,9 at end face.
In the conveyer belt 3 of this baseplate material A, the end face that is adopted is transported the outer peripheral face of roller 8,9, carry out anti-skidding processing H.
That is, as end face transport directly advancing of roller 8,9 roller R1, cross roll R2 with outer peripheral face that baseplate material A contacts on, carry out anti-skidding processing H.
The anti-skidding processing H that such end face is transported roller 8,9 describes more specifically.This anti-skidding processing H by be such as, knurling, reticulate pattern, trickle oblique, horizontal concavo-convex zigzag reticulate pattern texturing sample forms, and transports at end face on the whole outer peripheral face of roller 8,9 and handles.
Then, from really clamping and hold the baseplate material A that transports the liquid up and down, so, realize preventing really function based on the slip of the tensile stress of cross roll R2.
In addition, roughness of the shape of anti-skidding processing H, apperance, reticulate pattern or the like is not limited to illustrated example, can be other various forms etc.
Anti-skidding processing H carries out like this.
The conveyer belt 3 of the surface processing device 1 of baseplate material A of the present invention constitutes as described above.So, as described below.
(1) this surface processing device 1 is used for the manufacturing process of electronic circuit board, by treatment fluid B, baseplate material A is carried out surface treatment.That is, be used for flexible base, board, other the manufacturing process of the soft lining substrate that does not have toughness as thin as a wafer, when transporting baseplate material A,, carry out surface treatment, so that form electronic circuit from nozzle 4 inject process liquid B.
(2) in addition, in being full of the chemical liquid bath 5 of treatment fluid B, conveyer belt 3 and nozzle 4 are set.
So the treatment fluid B that carries out spraying the liquid from nozzle 4 directly advances in the treatment fluid B of chemical liquid bath 5, then, the circuit of the baseplate material A that transports in liquid by conveyer belt 3 is formed face D carry out direct injection, its surface treatment.Thus, treatment fluid B reflection, it is absorbed among the treatment fluid B of chemical liquid bath 5, and thus, formation turbulent flow, liquid retain on circuit formation face D.
(3) in addition, in this conveyer belt 3, about up and down end face transport roller 8,9 and transport with the left and right sides end face E that forms face as inverter circuit of method of clamping to baseplate material A only.So the circuit of baseplate material A forms face D and does not also produce scratch, scar, damage because of contact in transit.
(4) in addition, in this conveyer belt 3, as about up and down end face transport roller 8,9 towards carriage direction C directly advance roller R1, from carriage direction C, tilt slightly and toward the outer side cross roll R2 adopts with compound mode.
(5) so, baseplate material A transports the cross roll R2 of roller 8,9 by end face, along about width F apply pulling force, also adopt the buoyancy of treatment fluid B, simultaneously having the state that pulls into pin under the situation of tension force, maintain flat-hand position.That is, baseplate material A about person's the cross roll R2 arbitrarily that stretches about at least, and another directly advances between roller R1 or the cross roll R2.
Like this, the baseplate material A that maintains flat-hand position transports roller 8,9 by end face,, directly advances roller R1 and cross roll R2 that is, towards the carriage direction C of front and back and transport.
(6) for baseplate material A, carry out the processing of thickness as thin as a wafer, there is not toughness, in addition, carry out transporting in the liquid, spray in the liquid, although and the both sides end face E of the clamping amount by narrower width, the amount of holding and clamping is transported, still can prevent to rock, the swing of S shape.
Baseplate material A transports at the state of keeping according to flat-hand position with extended state, stops expulsion pressure, weight because of treatment fluid B to swing up and down really, or the assembling defective of conveyer belt, carries out the swing of S shape along left and right sides width F.
(7) in addition, such rock in order to stop, the swing of S shape takes place, free and compatibly select to adopt the integrated mode of directly advancing roller R1 and cross roll R2 of transporting roller 8,9 as end face.
Also has the situation in several meters～tens of meters scope of transporting such as, baseplate material A.In many occasions, be not easy assembly belt 3 in heterogeneity, baseplate material A carries out the swing of S shape about halfway.In such occasion, correcting in order to carry out S shape swing, baseplate material A is such as under on the right side the situation easily, optionally uses from a plurality of integrated modes and adopts cross roll R2 etc. in the left side, according to circumstances and the pattern of appropriate combination.
(8) in addition, also can be not according to such combination, transport roller 8,9 as end face up and down and only adopt cross roll R2, so, transport baseplate material A towards carriage direction C, stretch to the outside that tilts slightly at relative carriage direction C simultaneously, thus, baseplate material A carries out level and transports along carriage direction C at the state that stretches.
(9) in addition, transport roller 8,9, that is, directly advance on the outer peripheral face of roller R1 and cross roll R2, carry out anti-skidding processing H at such end face.
The baseplate material A that transports in liquid bears tensile stress by cross roll R2, and according to the treatment fluid B of developer solution, etching solution, stripper etc., or because of the viscosity of the photonasty resist of handling dissolving etc., is in the state of easy slip.
But such situation overcomes by anti-skidding processing H.Baseplate material A transports roller 8,9 by the end face that has carried out anti-skidding processing H,, directly advances roller R1, cross roll R2 that is, from positively holding up and down, thus, anti-sliding stop, simultaneously in liquid stably level transport.
Claims (5)
1. the conveyer belt of a baseplate material, it is the conveyer belt of the surface processing device of baseplate material, this surface processing device comprises the chemical liquid bath that is full of by treatment fluid; In this chemistry liquid bath, in liquid, transport the conveyer belt of baseplate material; In this chemistry liquid bath, in liquid to the nozzle of baseplate material inject process liquid;
This conveyer belt does not contact with the circuit formation face of baseplate material, only transports the end face of the left and right sides end face of baseplate material along clamping up and down and transports roller and arrange along carriage direction and be provided with;
This end face transport roller adopt in combination towards carriage direction directly advance roller with relative carriage direction slightly laterally cross roll.
2. the conveyer belt of baseplate material according to claim 1, it is characterized in that, this directly advances roller and transports baseplate material towards carriage direction, this cross roll is on one side towards relative carriage direction and oblique slightly outside stretching substrate material, on one side it is transported, so baseplate material is kept flat-hand position at the state that stretches along carriage direction on one side, Yi Bian transport.
3. the conveyer belt of baseplate material according to claim 2, it is characterized in that, this combination of directly advancing roller and cross roll can be up and down integrated mode, about integrated mode, they and with the single or multiple alternatively mixing syntype of being provided with of pattern or carriage direction.
4. the conveyer belt of baseplate material according to claim 1 is characterized in that, transports at this end face on the outer peripheral face of roller and carries out anti-skidding processing.
5. the conveyer belt of baseplate material according to claim 4, it is characterized in that, the anti-skidding processing that this end face transports roller by such as, the trickle concavo-convex reticulate pattern of knurling forms, by really clamping and be held in this baseplate material that transports in the liquid up and down, realization can prevent the function based on the slip that stretches.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-106822 | 2007-04-16 | ||
| JP2007106822 | 2007-04-16 | ||
| JP2007-246605 | 2007-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101288863A true CN101288863A (en) | 2008-10-22 |
Family
ID=40033410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100897897A Pending CN101288863A (en) | 2007-04-16 | 2008-04-10 | Conveyer belt of substrate material |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008285323A (en) |
| KR (1) | KR20080093365A (en) |
| CN (1) | CN101288863A (en) |
| TW (2) | TWI319720B (en) |
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| CN104853860A (en) * | 2012-12-12 | 2015-08-19 | 杰富意钢铁株式会社 | Device for preventing steel plate meandering in vertical looper and method for preventing meandering of steel plate |
| CN104891223A (en) * | 2015-04-10 | 2015-09-09 | 宇宙电路板设备(深圳)有限公司 | Flexible printed circuit board conveying apparatus |
| CN106111441A (en) * | 2016-08-30 | 2016-11-16 | 开平太平洋绝缘材料有限公司 | A kind of gumming device of prepreg |
| CN106560436A (en) * | 2015-10-02 | 2017-04-12 | 佳能株式会社 | Sheet Conveyance Apparatus And Image Forming Apparatus |
| CN110980218A (en) * | 2019-12-30 | 2020-04-10 | 合肥海明科技股份有限公司 | Five-port linear sorting device for e-commerce |
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| CN116062458A (en) * | 2023-04-03 | 2023-05-05 | 江苏环亚医用科技集团股份有限公司 | Conveying and dispensing mechanism for clean operating room |
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| DE102009018393B4 (en) * | 2009-04-22 | 2017-05-24 | Atotech Deutschland Gmbh | Method, holding means, apparatus and system for transporting a flat material to be treated and loading or unloading device |
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| KR101234946B1 (en) * | 2011-11-21 | 2013-02-19 | 삼성전기주식회사 | Apparatus for transfering circuit board, and facility for treating black oxide |
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-
2007
- 2007-05-09 TW TW096116446A patent/TWI319720B/en not_active IP Right Cessation
- 2007-09-25 JP JP2007246605A patent/JP2008285323A/en active Pending
- 2007-12-25 TW TW096149897A patent/TW200843019A/en unknown
-
2008
- 2008-03-21 KR KR1020080026388A patent/KR20080093365A/en not_active Application Discontinuation
- 2008-04-10 CN CNA2008100897897A patent/CN101288863A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104853860A (en) * | 2012-12-12 | 2015-08-19 | 杰富意钢铁株式会社 | Device for preventing steel plate meandering in vertical looper and method for preventing meandering of steel plate |
| CN104853860B (en) * | 2012-12-12 | 2016-12-14 | 杰富意钢铁株式会社 | The steel plate of vertical loop device crawls the prevention method of crawling of anti-locking apparatus and steel plate |
| CN104891223A (en) * | 2015-04-10 | 2015-09-09 | 宇宙电路板设备(深圳)有限公司 | Flexible printed circuit board conveying apparatus |
| CN106560436A (en) * | 2015-10-02 | 2017-04-12 | 佳能株式会社 | Sheet Conveyance Apparatus And Image Forming Apparatus |
| US10053320B2 (en) | 2015-10-02 | 2018-08-21 | Canon Kabushiki Kaisha | Sheet conveyance apparatus and image forming apparatus |
| CN106111441A (en) * | 2016-08-30 | 2016-11-16 | 开平太平洋绝缘材料有限公司 | A kind of gumming device of prepreg |
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| CN110980218B (en) * | 2019-12-30 | 2021-02-09 | 合肥海明科技股份有限公司 | Five-port linear sorting device for e-commerce |
| CN112090674A (en) * | 2020-08-25 | 2020-12-18 | 李网珍 | Roadside tree lime smearing device |
| CN112090674B (en) * | 2020-08-25 | 2022-08-19 | 泰州市津达电子科技有限公司 | Roadside tree lime smearing device |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW200843019A (en) | 2008-11-01 |
| KR20080093365A (en) | 2008-10-21 |
| TWI319720B (en) | 2010-01-21 |
| TW200841935A (en) | 2008-11-01 |
| JP2008285323A (en) | 2008-11-27 |
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Open date: 20081022 |